JPH06294533A - Clean room - Google Patents

Abstract

PURPOSE:To provide a clean room having a superior vibrationproof and assembling properties at a low cost by a method wherein a working part and a passage part are arranged continuously within the clean room enclosed by a cover and a floor surface spacing apart from the space of building the manufacturing line. CONSTITUTION:Manufacturing devices 9 in a manufacturing line are arranged face-to-face, and two lines are set as one set. A self standing frame is assembled with supporting columns 25 and lateral beams 26. Side plates 27 and a top plate 28 are applied to the frame so as to constitute a covering in which the manufacturing line is spaced apart from the building space. A working part 29a for mounting the manufacturing devices 9 and a passage 29b are arranged continuously in a longitudinal direction within the clean room formed by the covering and the floor surface on which the covering is mounted. With such an arrangement, it is to get a clean room having a superior vibrationproof and assembling properties at a low cost.

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean working room (clean room) for creating a clean working environment required for semiconductor manufacturing and the like. FIG. 1 shows a typical example of a clean work room (a full-scale down-flow clean room) which has been conventionally used in a semiconductor manufacturing process. In FIG. 1, 1 is a building, 2 is a clean room room, 3 is a high performance filter, 4 is an illuminating lamp, 5 is a perforated ceiling plate, 6 is a perforated floor plate, 7 is an air supply duct from an air conditioner, and 8 is The return duct to the air conditioner, 9 is a working device for each production line such as exposure, etching, diffusion, metallization, etc., and as shown by the arrow in the figure, clean air treated by the high-performance filter 3 is laminarly flowed from the entire ceiling. By blowing the air into the room 2 and discharging the room air through the underfloor, the entire room can be maintained at a substantially uniform high cleanliness level (for example, class 100) so that the whole process can be performed in this clean atmosphere. There is. This full-scale downflow type clean room has been considered the best method from the viewpoint of improving the cleanliness of the entire room, but it has the following drawbacks. (1) Since the cleaning area and the area to be air-conditioned are wide and many expensive high-performance filters are used, the facility cost is very high. (2) Lining costs such as air conditioning maintenance costs and filter replacement costs are high. (3) Since the entire room is air-conditioned, it is not possible to control the air-conditioning temperature for each production line (for each process). (4) Since the work equipment and pipes are repaired in the clean room, dust generated by them is generated on other production lines (processes).
Has a great influence on. Therefore, the present inventors have examined a method of cleaning each production line. One such proposal is shown in FIGS. 2 and 3 as a reference example. The structure will be described with reference to FIG.
The blower 11, the high-performance filter 12, and the illumination lamp 13 are built into the air conditioner, the external air sucked through the pre-filter 14 is cleaned and blown down from the clean air outlet 15 on the ceiling surface, and the exhaust port 17 is provided at the lower part of the side plate 16. Unit A
Are hung from the ceiling of the building 1 by suspenders 18 and installed face-to-face with an interval sufficient for people to pass through, and a blower 19 and a high-performance filter 20 are built in the center part with an interval. A box-shaped unit B having a clean air outlet 21 on the lower surface is suspended and supported by a suspender 18 from the ceiling of the building 1 at a height such that a person can pass under it.
A unit 23a for connecting the unit A and the unit B with a partition plate 22 to assemble a tunnel-like cover, and installing the working equipment 9 in a room surrounded by the tunnel-like cover and the floor surface on which the unit is installed. The central passage portion 23b is continuously provided in the longitudinal direction of the tunnel-shaped cover,
By connecting the air-conditioning air supply duct 7 to the air intake port of the unit B, the clean air outlet port 15 of the unit A and the clean air outlet port 2 of the unit B are indicated by the arrows in the figure.
Clean air whose temperature is controlled from 1 is blown out into the room, and the room air discharged from the exhaust port 17 is circulated to the air-conditioning return duct 8 through the surrounding maintenance area 24 to achieve the air conditioning and cleaning of the room. . FIG. 3 is an external view of a cleaning work room according to the above method in which a large number of modular tunnel-like covers are connected, and the pipes required for working with water, gas, etc. are in an external maintenance area 2.
4 (see FIG. 2) and is connected to the internal working equipment 9 through the exhaust hole 17 of the unit A. The side plate 16 of the unit A can be partially removed when piping or repairing the working equipment 9. The method shown in FIG. 2 and FIG. 3 covers only the working part and the passage part of the manufacturing line in a tunnel shape to achieve cleaning and air conditioning for each manufacturing line. There is. (5) Since it is necessary to suspend and support the units A and B from the building ceiling, the construction work is expensive accordingly. (6) Since it is a suspension support, it is weak in earthquake resistance. (7) The central unit B projects in a convex shape, and the total height of this portion becomes high, which is a hindrance for construction when piping an air conditioning duct or the like between the unit B and the building ceiling. (8) When air-conditioning temperature control is performed for each production line, it is necessary to connect air-conditioning air supply ducts to the air intake ports of each of the units A and B, which increases construction costs. The object of the present invention is, in addition to the above-mentioned drawbacks (1) to (4) of the prior art, the drawbacks (5) to (5) of the above-mentioned reference example.
Regarding (8), it is to provide an improved cleaning work room. The above object is to provide a tunnel-like cover for covering the working part and the passage part of a manufacturing line, in which a side plate and a top plate on both sides are attached to a portal frame which is a combination of columns and cross beams. With a structure that can stand on its own, the position of the clean air outlet for the working part in the room enclosed by this tunnel-like cover and the floor on which it is installed is set lower than the position of the clean air outlet for the passage part. The air purification element is housed between the clean air outlet for the room and the top plate, and the clean air treated by this air purification element is used for indoor work from the clean air outlet for the working portion and the clean air outlet for the passage portion. Achieved by blowing downward into the section and passage. Since the tunnel-shaped cover for covering the working part and the passage part of the manufacturing line has a structure in which the side plate and the top plate on both sides are stretched on the gate-shaped frame in which columns and cross beams are combined to make it self-sustaining, Since it is possible to perform another air conditioning temperature control and to significantly reduce the cleaning area and the air conditioning target area to save energy, it is possible to reduce equipment costs and running costs. Further, since the tunnel-shaped structure is self-supporting, it is not necessary to suspend and support it from the ceiling of the building, and the construction work is very easy. Seismic resistance is significantly improved compared to the suspended structure. The position of the clean air outlet for the working part in the room surrounded by the tunnel-like cover and the floor on which it is installed is set lower than the position of the clean air outlet for the passage part, and the clean air for the working part is blown out. An air purifying element is housed between the mouth and the top plate, and the clean air treated by the air purifying element is passed from the clean air outlet for the working portion and the clean air outlet for the passage portion to the working portion and the passage portion in the room. The configuration in which the air is blown downward to the inside can eliminate the protruding portion such as the air purifying unit B shown in FIGS. 2 and 3 above the passage portion in the room, and the entire top plate can be made substantially the same height. As a result, the floor height of the building can be lowered, and the construction of the air conditioning duct between the building and the ceiling can be done easily. Embodiments of the present invention will be described below with reference to the drawings. FIGS. 4, 5 and 6 are views showing an embodiment in which the production line is located on both sides of the passage, FIG. 4 is a cross-sectional view of the tunnel-shaped cover at right angles to the longitudinal direction, and FIG. 6 is a perspective view showing the external appearance. In FIG. 4, the working devices 9 of the manufacturing line are arranged face to face, and two lines form one set. A gate-shaped frame is assembled with the pillars 25 and the cross beams 26, and side plates 27 and a ceiling plate 28 on both sides are stretched to form a tunnel-shaped cover that covers the manufacturing line. The tunnel-shaped cover and the floor surface on which it is installed. A working portion 29a for installing the working equipment 9 and a passage portion 29b are continuously provided in the enclosed room in the longitudinal direction of the tunnel-shaped cover. Reference numerals 101 and 102 respectively denote a clean air outlet for a working portion and a clean air outlet for a passage portion in a room. Blowers 32, 3 that are air purification elements are provided between the clean air outlet 101 for the working unit and the top plate 28.
3, blower chambers 34, 35, high-performance filters 36, 3
7 and the working unit illumination lamp 38 are housed, and a grid-like working unit diffuser plate 30 is installed under the illumination lamp 38. These equipments are suspended and supported from the horizontal beam 26 via a supporting member (not shown). Reference numeral 39 is an air suction port, 40 is a prefilter, and 41 is a partition decorative plate between the working portion clean air outlet 101 and the passage portion clean air outlet 102.
An air passage 42 is provided between the passage clean air outlet 102 and the top plate 28, the passage illumination lamp 43 is housed therein, and a lattice-shaped diffuser plate 31 for passage is installed under the air passage 42. The position of the clean air blowout port 102 for the passage portion is set high enough for a worker to stand up and pass through, and the clean air blowout port 101 for the working portion is provided.
The position is set as low as possible without hindering the work (in one example, the height of the air outlet of the passage is 2200 mm, the height of the air outlet of the working portion is 1800 mm). This is because when the working unit air outlet height is made as low as possible, the airflow in the working unit space is less disturbed and the cleanliness retention performance is improved. In this case, the clean air outlet 1 for the passage
No high-performance filter, blower or the like is housed above 02, so even if the passage air outlet height is increased, the top plate 28
The overall height can be made substantially the same, and the overall height can be reduced. By operating the blowers 32 and 33, the outside air is sucked through the air inlet 39 through the prefilter 40. The air blown from the working unit blower 32 passes through the blowing chamber 34 and is cleaned by the working unit high-performance filter 36, and then blown downward from the working unit clean air outlet 101 to the working unit 29a in the room. On the other hand, the air blown out from the passage fan 33 is blown into the blower chamber 35.
After being cleaned by the high-performance passage filter 37, the air enters the air passage 42, and blows downward from the passage clean air outlet 102 to the indoor passage 29b. The arrows in the figure show the flow of this air. The diffuser plates 30 and 31 are
It is provided to diffuse the illumination and rectify the clean air flow. Reference numeral 44 in FIG. 5 is a punching plate for adjusting the wind speed distribution in the passage portion 29b. The wind speed of the clean air flow is, for example, the working portion 29a.
Is set to 0.4 m / s, and the passage portion 29b is set to 0.2 m / s according to the required cleanliness of each portion. By doing so, the cleanliness of the working portion 29a can be made higher than the cleanliness of the passage portion 29b. The clean airflow blown into the room flows as shown by the arrows in the figure, and is discharged to the outside from the exhaust ports 45 provided at the lower portions of the side plates 27 on both sides. Room pressure is exhaust port 45
Since the positive pressure is applied to the outside air by the amount of pressure loss at, the inflow of contaminated air from the outside can be prevented. The exhaust port 45 is also used for drawing water, gas, and other pipes and electric wires into the work equipment 9. The side plate 27 can be partially removed by using screws or hooks for repairing pipes and equipment. In addition, a part of the side plate 27 may be a transparent plate in order to improve the working environment in the room and manage the work from the outside. FIG. 6 shows an external view of a cleaning work room of this system in which a large number of modular tunnel-like covers are connected. FIG. 7 is a diagram showing another embodiment in which the manufacturing line is on one side of the passage, and shows a cross section perpendicular to the longitudinal direction of the tunnel-shaped cover. In FIG. 7, the same reference numerals as those in FIG. 4 indicate corresponding parts, and there is substantially no difference from the embodiment of FIGS. 4 to 6 except that one side of the passage portion 29b is closed by the side plate 27. . FIG. 8 is a view showing an example of implementation of the cleaning work room according to this system. In this example, two sets of line-type clean work chambers shown in FIGS. 4 to 6 are installed in the building 1 to which the air-conditioning air supply duct 7 and the return duct 8 are connected. End panels 4 with doors on both ends of the cover
6 is attached to partition the room 29 covered with a tunnel-like cover and the outside conservation area 47. Conservation area 4 within the same building
7 is cleaned to some extent by the clean air discharged from the room 29, but has a lower cleanness than the room 29. Since the pipes 48 such as water and gas used in the production line are installed in the maintenance area 47, the maintenance of these pipes 48 can be performed in the maintenance area 47. Further, by partially removing the side plate 27, most of the repair of the manufacturing line device 9 can be performed from the maintenance area 47. Moreover, since the maintenance area 47 can enter and leave the general room outside without passing through the clean room, dust produced by the maintenance work hardly affects other manufacturing lines. When air-conditioning temperature control for each production line is required, as shown in FIG. 8 (b), an air-supply duct connection port 49 is provided on the upper surface of the tunnel-shaped cover, and this is used to air-condition the ceiling of the building. It may be connected to the supply air duct 50. Since the whole ceiling plate 28 is formed at the same height in the clean work room according to this method, only by installing the ceiling partition plate 51 on the maintenance area 47, the air supply duct 50 is provided between the ceiling and the building ceiling. It can be easily installed. 4 to 8 show an example in which indoor air in the clean work chamber is discharged from the exhaust ports 45 on both sides.
As in the conventional method, if a part of or all of the room air is discharged from the underfloor by using a perforated plate on the floor of the work room, the clean air in the room will be completely downflowed and The cleanliness of can be further improved. As is apparent from the above description, according to the present invention, the required cleanliness of the manufacturing line portion is higher than that of the full-scale downflow type clean room which has been the best method for manufacturing semiconductors. The following effects can be obtained while sufficiently securing. (1) Since the cleaning area and the air-conditioned area are significantly reduced, the facility cost is reduced to about half. (2) Running cost can be reduced to about half, and energy can be saved. (3) It becomes possible to control the air-conditioning temperature for each manufacturing line (for each process), which was difficult with the full-face downflow method. (4) Since the maintenance of the manufacturing line can be performed from the outside maintenance area, it is possible to prevent dust generated by the maintenance work from affecting other manufacturing lines. In addition, FIG.
There are the following effects compared with the method of. (5) Since the tunnel-shaped structure is self-supporting, it is not necessary to suspend and support it from the ceiling of the building, which makes the building construction very easy. (6) Since it has a self-supporting structure with a gate-shaped frame, its seismic resistance is significantly improved compared to the ceiling hanging structure. (7) Since there is no projecting portion like the air purification unit B of FIGS. 2 and 3 on the passage in the room, and the entire top plate can be made to have substantially the same height, the floor height of the building can be lowered. You can
In addition, the construction of air conditioning ducts between the building and the ceiling will be easier.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a vertical cross-sectional view of a prior art full surface downflow type clean room. FIG. 2 is a vertical cross-sectional view of a tunnel-type cleaning work room having a ceiling-hanging structure shown as a reference example. FIG. 3 is a perspective view showing an appearance of the cleaning work room in FIG. FIG. 4 is a vertical cross-sectional view of an embodiment of the cleaning work chamber according to the present invention (when the production line is on both sides of the passage). FIG. 5 is an enlarged view of a main part of the cleaning work room according to the embodiment of the present invention. FIG. 6 is a perspective view showing an appearance of a cleaning work room according to an embodiment of the present invention. FIG. 7 is a vertical cross-sectional view of another embodiment of the cleaning work chamber according to the present invention (when the manufacturing line is on one side of the passage). FIG. 8 is a view showing an example of implementing a cleaning work room according to the present invention,
(A) is a cutting plane view, (b) is a side sectional view. [Explanation of Codes] 25: Support, 26: Horizontal Beam, 27:
Side plate, 28: Top plate, 29a: Indoor working unit, 2
9b: Indoor passage portion, 101: Working portion clean air outlet, 102: Passage portion clean air outlet,
32: blower for working section, 33: blower for passage section,
34, 35: Blower chamber, 36: High-performance filter for working part, 37: High-performance filter for passage part 39: Air suction port, 40: Pre-filter, 42:
Air passage on ceiling of passage 45: Exhaust port 9: Working equipment

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[Procedure Amendment] [Date of submission] January 24, 1994 [Procedure Amendment 1] [Amendment target document name] Specification [Amendment target item name] Full text [Amendment method] Change [Amendment content] [Document name] Specification Document [Title of Invention] Cleaning work room [Claims] 1. Installed inside the building and equipped with work equipment for the production line
Working part and a passage formed in parallel with this working part
In a clean work room with a clean space formed from
The inner and outer surfaces of the ceiling plate are substantially flat and both sides of this ceiling plate.
Has a side wall to separate the clean space from the space inside the building.
The cover that surrounds it and the ceiling plate inside the cover
It is arranged in the corner formed by the side wall on the side of the working section and blows air.
A blower chamber that holds the pressurized air blown from the machine,
The lower part of the blower chamber at the corner and the passage side
Installed on the side of the fan and supplied from the blower chamber
Purifies the air and blows downwards toward the above working parts.
Sideways toward the working part filter and above passage
Having a filter for the passage that blows out,
Places that are located on the side of the passage filter
These modules are equipped with multiple modules of fixed length.
The working section and the passage section are respectively connected to the manufacturing line.
Configured by connecting multiple units so that they are continuous along
Clean work room characterized by . Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean working room (clean room) for creating a clean working environment required for semiconductor manufacturing and the like. FIG. 1 shows a typical example of a clean work room (a full-scale down-flow clean room) which has been conventionally used in a semiconductor manufacturing process. In FIG. 1, 1 is a building, 2 is a clean room room, 3 is a high performance filter, 4 is an illuminating lamp, 5 is a perforated ceiling plate, 6 is a perforated floor plate, 7 is an air supply duct from an air conditioner, and 8 is The return duct to the air conditioner, 9 is a working device for each production line such as exposure, etching, diffusion, metallization, etc., and as shown by the arrow in the figure, clean air treated by the high-performance filter 3 is laminarly flowed from the entire ceiling. By blowing the air into the room 2 and discharging the room air through the underfloor, the entire room can be maintained at a substantially uniform high cleanliness level (for example, class 100) so that the whole process can be performed in this clean atmosphere. There is. This full-scale downflow type clean room has been the best method for improving the cleanliness of the entire room, but has the following problems. (1) Since the cleaning area and the area to be air-conditioned are wide and many expensive high-performance filters are used, the facility cost is very high. (2) Running costs such as air-conditioning maintenance costs and filter replacement costs are high. (3) Since the entire room is air-conditioned, it is not possible to control the air-conditioning temperature for each production line (for each process). (4) Since the work equipment and pipes are repaired in the clean room, dust generated by them is generated on other production lines (processes).
Has a great influence on. Therefore, the inventors of the present invention have studied a configuration for cleaning each production line in the course of reaching the present invention.
The configuration will be described with reference to FIGS. Provided in the building
The working equipment of the production line is installed in the clean working room.
Working units are installed in parallel and work is performed between these working units.
A passage portion formed in parallel with the portion is provided. On the working section
Was built blower 11 to the main body case 10 of the inverted L-shaped comprising a side wall and a ceiling, high efficiency filter 12, the illumination lamp 13,
It grated blown from the clean air outlet 15 of the ceiling surface by cleaning the outside air sucked through the prefilter 14, alignment faces at intervals to the extent that the unit A having an exhaust port 17 at the bottom of the side plate 16 is passable human Installed in
It The ceiling portion of the unit A is suspended and supported from the ceiling of the building 1 by a suspender 18 . Hanger box-shaped unit B to the passage having a clean air outlet 21 on the lower surface incorporates a high-performance filter 20 and the blower 19, from the ceiling of the building 1 to the height of the degree to which the underlying human-passage 18 Suspended and supported by. Between units A and the unit B is a partition plate 22
Tunnel-like covering is connected is formed by, the tunnel-shaped cover and the indoor GaKiyoshi that it is surrounded by the installed floor surface
It becomes a clean space. The working portion 23a for installing the working equipment 9 and the central passage portion 23b are continuously provided in the longitudinal direction of the tunnel-shaped cover, and by connecting the air conditioning air supply duct 7 to the air intake port of the unit B, As shown by the arrows in the figure, the temperature-controlled clean air is blown out into the room from the clean air blowout port 15 of the unit A and the clean air blowout port 21 of the unit B, and the indoor air discharged from the exhaust port 17 is the surrounding conservation area. The air is returned to the air-conditioning return duct 8 through 24, and air-conditioning and cleaning of the room are achieved. FIG. 3 is an external view of a cleaning work room constructed by connecting a plurality of units A. The pipes required for work such as water and gas are placed in an external maintenance area 24 (see FIG. 2). It is installed and connected to the working equipment 9 inside through the exhaust hole 17 of the unit A. The side plate 16 of the unit A can be partially removed when piping or repairing the working equipment 9. [0006] Figure 2, but is obtained by achieving the indicated scheme working unit and tunnel shape overlying Alternative production line cleaning and conditioning only passage of the production line 3, the following problem in this There is a point . (5) It is necessary to suspend and support the unit A and the unit B from the building ceiling, and thus the building work is expensive. (6) Since it is a suspension support, it is weak in earthquake resistance. (7) Since the central unit B projects in a convex shape and the total height of this part becomes high, the space between the unit and the building ceiling becomes narrow,
Assembly from the ceiling of one working unit to the ceiling of the other working unit
The movement of the contractor is hindered and the work of connecting the ceiling is difficult.
Yes . (8) The ceiling part is the unit A and the unit B and the partition plate
And each is hung from the building ceiling.
Since it is lowered, it is difficult to align the position and the workability is bad.
Yes. The object of the present invention is to solve the above problems (1)-
Considering (8), it is low cost and has excellent earthquake resistance and assembly workability.
To provide a clean working room. The above-mentioned object is to install in a building.
And the work equipment on the manufacturing line
And a passage formed in parallel with the working part of the rod.
Inside and outside of a clean work room with a clean space
Both have a substantially flat ceiling plate and side walls on both sides of this ceiling plate.
A cover that surrounds the clean space to separate it from the space inside the building,
Formed by the ceiling plate and the side wall on the working side inside this cover
Holds the pressurized air blown from the blower installed in the corner
Blower chamber and the lower part of this blower chamber at the corner.
And attached to the side of the aisle side and supplied from the blower chamber
Purify the generated air and face downward to the work area.
Sideways toward the working filter and passage
Having a filter for the passage that blows out,
Of a specified length, which is configured by being placed on the side of the filter
Multiple modules are provided, and these modules are
And the passages are continuous along the production line.
This is achieved by connecting multiple units to form a clean work room . [Operation] Isolate the clean space from the space inside the building.
Enclosing cover enables air conditioning temperature control for each production line
Along with this, the cleaning area and air-conditioned area are significantly reduced.
Energy saving and equipment cost and run
Cost can be reduced. The cover has a substantially flat ceiling on both the inside and outside.
Since it has a plate, from the passage filter on the inner surface side
Prevents turbulence of the blown airflow and improves the cleanliness of the passage.
It can be made to protrude, and on the outer surface side, it protrudes above the passage part.
The exposed part can be eliminated, and the whole top plate has almost the same height.
It is possible to lower the floor height of the building,
Also, because a space with a certain height is formed between the building and the ceiling,
During assembly, from the ceiling of one working unit to the ceiling of the other working unit
It will be easier for the assembly worker to move to
Works and air conditioning ducts will be easier to construct. The blower chamber has a ceiling plate inside this cover.
This ventilation is installed in the corner formed by the side wall on the working unit side.
Purifies the air supplied from the chamber to work on each
Working part filter and passage part that blows downward toward
It has a filter for the passage part that blows sideways toward
Therefore, it is possible to prevent the load from being applied to the ceiling plate above the passage.
The ceiling part above the aisle part of the cover should have a lightweight structure.
It is possible to improve the earthquake resistance. The upper part of the passage is located on the side of the passage filter.
Since it is located, there is no filter on the ceiling of the passage.
However, clean air can be supplied to the
To secure the height of the passage without increasing the total height.
While ensuring the required cleanliness of the production line
The space above the passage space can be effectively used. In addition, the above configuration is modularized so that work can be performed.
Section and passage section are each continuous along the production line
Since it is configured by connecting multiple units, workability during installation
Can be improved. Embodiments of the present invention will be described below with reference to the drawings. A first embodiment of the present invention will be described with reference to FIGS. 4, 5 and 6.
Reveal. This embodiment is an embodiment in which the production line is located on both sides of the passage . FIG. 4 is a cross-sectional view perpendicular to the longitudinal direction of the cleaning work chamber of the present embodiment , FIG. 5 is an enlarged view of a main part thereof, and FIG. 6 is a perspective view showing the appearance. In FIG. 4, the working devices 9 of the manufacturing line are arranged face to face, and two lines form one set. Set the self-supporting portal frame with struts 25 and cross beam 26, on a production line constitutes a cover to isolate the space in the building this Put the side plates 27 and the top plate 28, the covering
Stomach and cleaning work that has been formed it is surrounded by a floor surface to be installed
Providing the working unit 29a and the passage portion 29b for installing the work equipment 9 in work chamber continuously in the longitudinal direction of the cleaning work chamber. 10
Reference numerals 1 and 102 denote a clean air outlet for a working portion and a clean air outlet for a passage portion in a room, respectively. The blowers 32 and 33, which are air purification elements, the blower chambers 34 and 35, the high-performance filters 36 and 37, and the working unit illumination lamp 38 are housed between the working unit clean air outlet 101 and the top plate 28 to illuminate. Below the lamp 38, a lattice-shaped work unit diffuser plate 30 is installed. These equipments are suspended and supported from the horizontal beam 26 via a supporting member (not shown). Reference numeral 39 is an air suction port, 40 is a prefilter, and 41 is a partition decorative plate between the working portion clean air outlet 101 and the passage portion clean air outlet 102. The upper part of the passage portion 29b is used for the passage portion.
Position it to the side of the high-performance filter 37 and direct it toward the passage.
The clean air is blown sideways, and this clean air is cleaned for the passage.
The sky formed between the clean air outlet 102 and the top plate 28
It is supplied to the passage portion through the air passage 42. Inside the air passage 42
Accommodates the passage illumination lamp 43, and the lattice-shaped diffuser plate 31 for passage is installed below the passage illumination lamp 43. The position of the passage clean air outlet 102 is set high so that a worker can stand up and pass through, and the position of the work portion clean air outlet 101 is set low as long as the work is not hindered. Air outlet height 2200mm, working part air outlet height 180
0 mm). This is because when the working unit air outlet height is made as low as possible, the airflow in the working unit space is less disturbed and the cleanliness retention performance is improved. In this case, the clean air outlet 1 for the passage
No high-performance filter, blower or the like is housed above 02, so even if the passage air outlet height is increased, the top plate 28
The overall height can be made substantially the same, and the overall height can be reduced. This creates a space with a certain height between the building and the ceiling
Therefore, when assembling, the work from the ceiling of one working unit to the other
The assembly worker can easily move to the ceiling of the division
Connection work of parts and construction of air conditioning ducts will be easier. By operating the blowers 32 and 33, the outside air is sucked through the air inlet 39 through the prefilter 40. The air blown from the working unit blower 32 passes through the blowing chamber 34 and is cleaned by the working unit high-performance filter 36, and then blown downward from the working unit clean air outlet 101 to the working unit 29a in the room. On the other hand, the air blown out from the passage fan 33 is blown into the blower chamber 35.
After being cleaned by the high-performance passage filter 37, the air enters the air passage 42, and blows downward from the passage clean air outlet 102 to the indoor passage 29b. The arrows in the figure show the flow of this air. The diffuser plates 30 and 31 are
It is provided to diffuse the illumination and rectify the clean air flow. Reference numeral 44 in FIG. 5 is a punching plate for adjusting the wind speed distribution in the passage portion 29b. The wind speed of the clean air flow is, for example, the working portion 29a.
Is set to 0.4 m / s, and the passage portion 29b is set to 0.2 m / s according to the required cleanliness of each portion. By doing so, the cleanliness of the working portion 29a can be made higher than the cleanliness of the passage portion 29b. The clean air flow blown into the room flows as shown by the arrows in the figure, and is discharged to the outside from the exhaust ports 45 provided at the lower portions of the side plates 27 on both sides. Room pressure is exhaust port 45
Since the positive pressure is applied to the outside air by the amount of pressure loss at, the inflow of contaminated air from the outside can be prevented. The exhaust port 45 is also used for drawing water, gas, and other pipes and electric wires into the work equipment 9. The side plate 27 can be partially removed by using screws or hooks for repairing pipes and equipment. In addition, a part of the side plate 27 may be a transparent plate in order to improve the working environment in the room and manage the work from the outside. FIG. 6 shows a ceiling plate whose inner and outer surfaces are substantially flat.
Inside the cover that has both side walls
Work that blows downward toward the working part in the formed corner
Passage that blows sideways toward the filter and passage
Of a predetermined length with a blower chamber having a filter
Configure the module and connect it to the
The appearance of a cleaning work room configured by connecting a plurality of road sections so that each road section is continuous along the production line is shown. A second embodiment of the present invention is shown in FIG. Implementation
Examples Example der when manufacturing line on one side of the passage
It FIG. 7 shows a cross section perpendicular to the longitudinal direction of the cleaning work room . In FIG. 7, the same reference numerals as those in FIG. 4 indicate the corresponding parts, and have the same configuration as the first embodiment except that one side of the passage portion 29b is closed by the side plate 27. FIG. 8 is a view showing an implementation example of the cleaning work chamber of the first embodiment of the present invention . In this example, two sets of line-side clean work chambers of the first embodiment are installed in the building 1 to which the air conditioning air supply duct 7 and the return duct 8 are connected .
Install the end panels 46 with doors on both ends of the cover
9 and the external conservation area 47 are separated. The maintenance area 47 in the same building is cleaned to some extent by the clean air discharged from the room 29, but has a lower cleanness than the room 29. Since the pipes 48 such as water and gas used in the production line are installed in the maintenance area 47, the maintenance of these pipes 48 can be performed in the maintenance area 47. Further, by partially removing the side plate 27, most of the repair of the manufacturing line device 9 can be performed from the maintenance area 47.
Moreover, since the maintenance area 47 can enter and leave the general room outside without passing through the clean room, dust produced by the maintenance work hardly affects other manufacturing lines. When air-conditioning temperature control for each production line is required, an air supply duct connection port 49 is provided on the upper surface of the cover as shown in FIG. 8B, and this is used to supply air-conditioning air to the ceiling of the building. It may be connected to the duct 50. Since the whole ceiling plate 28 is formed at the same height in the clean work room according to this method, the air supply duct 50 can be easily formed between the building ceiling and the ceiling partition plate 51 above the maintenance area 47. Can be provided. 4 to 8 show an example in which the indoor air in the clean work chamber is discharged from the exhaust ports 45 on both sides.
As in the conventional method, if a part of or all of the room air is discharged from the underfloor by using a perforated plate on the floor of the work room, the clean air in the room will be completely downflowed and The cleanliness of can be further improved. According to the above-described embodiment, the manufacturing line section is required.
There is a space above the passage space while ensuring sufficient cleanliness.
A clean work room that can be effectively used can be obtained. Further, (1) cleaning zone and air-conditioning target area is greatly reduced
Therefore, the equipment cost is reduced to about half. (2) Running cost is reduced to about half
And energy can be saved. (3) Air conditioning temperature control for each production line is possible
become. (4) An air blowing chamber and a fan are provided at the inner corner of the cover.
Since the filter is installed, there is no load on the ceiling plate above the passage.
Prevents burrs and reduces the weight of the ceiling above the passageway in the cover
The structure can be improved and the earthquake resistance is greatly improved. (5) Since the inner surface of the ceiling plate is also substantially flat,
There is little turbulence in the air flow blown from the passage filter,
The cleanliness of the passage can be improved. (6) There is no portion protruding above the passage,
Since the whole top plate can be made almost the same height,
Floor height can be lowered and air-conditioning ducts between the building and ceiling, etc.
The construction of will be easier. It is possible to obtain the effect of The present invention is constructed as described above.
As a result, it is a clean product that is low in cost and has excellent earthquake resistance and assembly workability.
You can get a business room. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a vertical cross-sectional view of a prior art full surface downflow type clean room. FIG. 2 is a vertical cross-sectional view of a clean work chamber having a ceiling suspension structure, which was examined in the course of reaching the present invention . FIG. 3 is a perspective view showing an external appearance of a clean work room having a ceiling suspension structure, which was examined in the course of reaching the present invention . FIG. 4 is a vertical cross-sectional view of the cleaning work chamber according to the first embodiment of the present invention . FIG. 5 is an enlarged view of a main part of the cleaning work room according to the first embodiment of the present invention . FIG. 6 is a perspective view showing an appearance of a cleaning work room in the first embodiment of the present invention . FIG. 7 is a vertical cross-sectional view of a cleaning work chamber according to a second embodiment of the present invention . 8A and 8B are views showing an example of implementation of the cleaning work chamber in the first embodiment of the present invention , FIG. 8A is a sectional plan view, and FIG. 8B is a side sectional view. [Explanation of Codes] 25: Support, 26: Horizontal Beam, 27:
Side plate, 28: Top plate, 29a: Indoor working unit, 2
9b: Indoor passage portion, 101: Working portion clean air outlet, 102: Passage portion clean air outlet,
32: blower for working section, 33: blower for passage section,
34, 35: Blower chamber, 36: High-performance filter for working part, 37: High-performance filter for passage part 39: Air suction port, 40: Pre-filter, 42:
Air passage on ceiling of passage 45: Exhaust port 9: Working equipment

Claims (1)

[Claims] 1. A self-sustaining tunnel-shaped cover is constructed by stretching side plates and top plates on both sides of a gate-shaped frame that combines columns and cross beams, and working equipment is placed in the room surrounded by this tunnel-shaped cover and the floor surface on which it is installed. The work section for installing the work section and the passage section through which the worker passes are respectively provided continuously in the longitudinal direction of the tunnel-shaped cover, and the position of the clean air outlet for the working section in the room is set lower than the clean air blowing point for the passage section. Then, an air purifying element is housed between the working portion clean air outlet and the top plate, and the clean air treated by the air purifying element is discharged to the working portion clean air outlet and the passage portion clean air. A clean work room that blows downward from the mouth to the working part and passageway inside the room.