JP3835883B2 - Clean air blowing unit and clean room - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a clean air blowing unit used for forming a space that needs to be cleaned, such as a space for manufacturing various electronic components typified by semiconductor components and a space for manufacturing chemicals and foods. Equipped with a blowout chamber that uses the blowout opening as a mounting part for the blowout air purification filter, and is equipped with a blowout fan that takes the blowout air into the blowout chamber and blows the intake air from the blowout opening. The present invention relates to a clean air blowing unit, and a clean room using the clean air blowing unit.
[0002]
[Prior art]
Conventionally, as a facility using a clean air blowing unit, as shown in Japanese Patent Laid-Open No. 3-263534, in a configuration in which a clean air blowing unit is arranged in parallel on a ceiling portion of a purification target room, a person in the room is detected. Human detection sensors are distributed at multiple locations on the ceiling surface, and signals from these human detection sensors are input intensively, and each clean air blowing unit is remotely controlled centrally based on the signals. A general controller is provided, and based on the detection information of these human detection sensors, the fan air flow rate of the clean air blowing unit corresponding to the position of the person by remote control by the general controller (that is, the blown air volume of clean air) ) Is increased more than when the clean air blowing unit is not compatible with the position of the person, thereby reducing the fan air flow when the person is absent. While achieving the value, there is a thing that was so as to prevent contamination by dust from the people.
[0003]
Further, as seen in Japanese Patent Laid-Open No. 4-306439, in a configuration in which a clean air blowing unit with an individual controller is arranged side by side on the ceiling of a chamber to be purified, a processed product on the line is installed in the production line installed indoors. The processing object detection sensors that detect water are distributed at multiple locations, and signals are individually input from these processing object detection sensors to the individual controllers of the clean air blowing unit corresponding to the detection position of each sensor. Thus, based on the detection information of these processed object detection sensors, the control of the individual controller controls the fan air blowing amount of the clean air blowing unit corresponding to the position of the processed object on the line, and the presence of the processed object in the clean air blowing unit. While increasing the position relative to the non-corresponding position, as in the above type, while reducing energy consumption by reducing the fan air flow when the workpiece is absent Is that in order to maintain around treated to the required cleanliness.
[0004]
[Problems to be solved by the invention]
However, the former conventional format requires a signal line facility connecting a plurality of human detection sensors and a general controller, and a signal line facility connecting the general controller and a plurality of clean air blowing units. Since the facilities of the line are large and complicated, there is a problem that the equipment cost as a whole is high, the equipment construction is complicated, and the construction efficiency is poor.
[0005]
On the other hand, the latter conventional type eliminates the need for a signal line facility connecting the general controller and a plurality of clean air blowing units. Therefore, although the signal line facility is simplified to some extent, a plurality of processed object detection sensors and A signal line facility that connects a plurality of clean air blowing units to each other is necessary. In this respect, there is still a problem similar to the above.
[0006]
In addition, in any conventional type, in addition to installing the clean air blowing unit, it is necessary to install a human detection sensor and a processing object detection sensor separately. There was a bad problem.
[0007]
In contrast to the above circumstances, the first problem of the present invention is that the air flow rate of the clean air blowing unit is automatically controlled when a dust generating body or a clean atmosphere required body exists in the area in charge of the unit facing the opening for blowing. Therefore, there is a point to provide a clean air blowing unit capable of reducing the equipment cost of the unit facility equipment and facilitating the equipment construction.
[0008]
In addition, the second problem of the present invention is to adopt a form in which the amount of clean air blown out to the target object existing position is automatically increased with respect to the indoor movement of the dust generating body and the clean atmosphere required body. This is to provide a clean room that is inexpensive and easy to install.
[0009]
[Means for Solving the Problems]
Based on the object detection sensor for detecting the presence or absence of the object in the unit charge area where the blowing opening is opposed to the dust generating object or the clean atmosphere required object, and the detection information of the object detection sensor, A unit individual controller that, when the target object is present in the unit charge area, increases the amount of air blown from the blowout fan as compared to when the target object is absent from the unit charge area, together with the blowout fan If the target body is present in the unit charge area facing the blowout opening , if the blower chamber is assembled and installed , the blower fan's air flow rate can be individually determined based on the detection information of the target object detection sensor. Increased by the controller to increase the amount of clean air blown to the unit area, so if the dust generating body is the target, generate dust from the dust generating body. Effectively scavenging with an increased amount of blowing clean air to prevent contamination by dust generated from the dust generating body, and when the target is a clean atmosphere, the clean atmosphere is increased with an increased amount of blowing clean air. The necessary body can be reliably maintained at the required cleanliness.
[0010]
In addition, when the target object is not present in the unit charge area, the blowing amount of the blowing fan is reduced. Therefore, regardless of the existence of the target object in the unit charge area, the blowing fan is operated with a constant large blow amount. Compared with this, energy consumption can be effectively reduced by reducing fan power consumption.
[0011]
As for the unit structure, the above-mentioned object detection sensor and each unit are individually formed in a blow chamber forming body (in other words, a unit base of the clean air blow unit) having the blow opening as a mounting portion for the blow air filter. Since the controller is assembled with the blowout fan, the signal line facility connecting the human detection sensor as the object detection sensor and the separate integrated controller, as in the above-mentioned conventional type, and the clean air blowout unit And a signal line facility that connects the remote control unit and the separate control unit, or a signal line facility that connects the clean air blowing unit and the separate processing object detection sensor as the target object detection sensor. When there is a dust generating body or a clean atmosphere required body in the unit charge area, the fan air volume of the clean air blowing unit is automatically increased. In fact, the equipment cost of the unit facilities and equipment can be expensive, also possible to improve the construction efficiency and ease of equipment construction.
[0012]
In addition, when installing a plurality of clean air outlet units, which object detection sensor should be associated with which clean air outlet unit in the construction of the unit facility equipment because the signal lines as described above become unnecessary. Therefore, it is possible to facilitate the construction of facilities from this point.
[0013]
The pre-Symbol object detection sensor and the unit individual control instrument, from the unit installation stage prior to the unit installation planned portion (e.g., a factory manufacturing stage of the unit), preassembled equipped to formation of blow chamber with blowing fan Thea lever, only the installation and construction of the clean air blowing unit to the unit installation planned portion, installation and construction of the object detection sensor and the unit individually controls also be completed at one time, be carried out more easily efficiently equipment construction it can.
[0014]
As object detection sensor before reporting, because are equipped with a human detection sensor for detecting the presence or absence of human in the unit coverage area, when a person exists in the unit coverage area, blowing clean air into the unit in charge of the area The air volume can be increased more than when no one is present, and dust generated from humans can be effectively removed by increasing the amount of blown-out clean air, which is why humans are generally the largest source of dust generation in clean rooms. As described above, it is possible to effectively prevent contamination due to dust generation from a person while realizing energy saving by reducing fan power consumption.
[0015]
As blowing fan before reporting, because it is equipped with a plurality of fan incorporating in parallel a blowing air to a common outlet chamber, compared to cover the airflow volume unit with only a single blowing fan, and a plurality The compact air blower unit can be made compact with a small height by adopting a form in which the small fans are assembled and installed in the unit in a state of being dispersed in the horizontal direction. As a result, the space can be saved and the unit can be easily installed on the ceiling of the room where the space is limited.
[0016]
In addition, while using a plurality of blowing fans, the blowing air taken in by the plurality of fans is equalized in a common blowing chamber and blown out uniformly from the blowing opening through the blowing air purification filter. This makes it possible to maintain a high purification function for the unit charge area while obtaining the above-described effects on the installation space.
[0017]
The unit structure is particularly advantageous when the area of the blowout opening in the unit is increased so that the area in charge of one clean air blowout unit is increased to some extent in area.
[0018]
In the above structure where a unit is equipped with a plurality of blowing fans, in order to increase / decrease the fan air flow according to the presence or absence of the target object in the unit charge area, the number of operating fans can be changed as a unit. A method to increase / decrease the fan air flow rate, or a method to increase / decrease the fan air flow rate as a unit by changing some or all of the rotation speeds of multiple blowing fans, or a method that combines these methods Any of these may be adopted.
[0019]
[1] In the first aspect of the present invention, the opening on the bottom provided with a plurality of mounting portions and to Rubo box-shaped body of the filter outlet air purification, a plurality of boxes shaped body independent of the opening on the bottom of each other with integrally connecting in a state of being close to each other while maintaining causes span a communication passage for communicating the interior space to each other in the box-shaped body between the facing surfaces of these boxes like bodies each other, a plurality of boxlike that communicated by the communication passage A series of internal spaces of the body is used as the blowout chamber , and the lower surface opening of each of the plurality of box-like bodies is used as the blowout opening. because are constituted by a respective one box-like body is small to form a blowing chamber, compared with forming the outlet chamber of the same volume in the box-like body of one large, lightweight thin While using an inexpensive material for forming can maintain a high strength of the box-like body of the individual, thereby, it can be made inexpensive production cost of the clean air blowing unit while ensuring high strength of the entire unit.
[0020]
In addition, while a structure in which a blowout chamber is formed by a plurality of box-shaped bodies, a series of box-shaped body internal spaces communicated by a communication passage is used as a blowout chamber. It is possible to equalize the pressure in the internal space of the box-like body and to blow out uniformly from the lower surface opening of each box-like body through the blown air purification filter, thereby maintaining a high purification function for the unit charge area.
[0021]
Then, according to the unit structure, by increasing the area of the air openings in the units it is particularly advantageous in the case of the single clean air blowing unit area of responsibility area to relatively large ones.
[0022]
[2] In the invention according to claim 2 , since each of the box-like bodies is individually equipped with a blowing fan for taking in the blowing air into their internal space, each of the box-like bodies is small in size as described above. Each of the box-shaped bodies that ensure high strength can support each of the blowout fans in a form that can support each blowout fan with high support strength, thereby using a lightweight, thin and inexpensive forming material. Thus, the overall strength of the clean air blowing unit can be further secured while reducing the manufacturing cost.
[0023]
In addition, with this unit structure, when producing a clean air blowing unit, a plurality of fan / box combinations in which blowing fans are assembled to the box-shaped body before being connected to other box-shaped bodies are individually manufactured. Also, it is possible to adopt a division of labor such that these produced fan / box assemblies are connected together while forming a communication path, and by adopting this production form, the blowout chamber is formed as one large box-like body. Compared to the production form in which a plurality of blowing fans are sequentially assembled to this large box-shaped body, the unit can be produced in a better procedure and the production efficiency of the clean air blowing unit can be improved, and the production cost can be reduced. It can be made cheap.
[0024]
[3] In the invention described in claim 3, each of the box-like bodies that extend over the communication path is formed in a rectangular parallelepiped shape as viewed from above, and an axial fan is used as the blowing fan in the direction of the fan axis. Are assembled to the upper surface of the ceiling of each box-shaped body in an oblique arrangement along the diagonal direction of the upper surface of the ceiling of the box-shaped body.
Incidentally, the sprinkler of the unit charge region and sprinkling area, unit placed earlier stage to the unit installation planned portion (e.g., a factory manufacturing stage of the unit) preassembled equipped tare lever from the formation of the outlet chamber, the unit The installation of the sprinkler can be completed at once by simply installing the clean air blowing unit at the installation location, and the installation of the equipment can be performed more easily and efficiently.
[0025]
[4] In the invention according to claim 4, the clean air blowing units according to any one of claims 1 to 3 are juxtaposed on the ceiling of the chamber to be purified, and the blowing of these clean air blowing units is performed. A clean room is configured as a configuration in which clean air is blown out from the opening to each region in the room.
Incidentally, in parallel with clean air blowing unit equipped with a target object detection sensor and the unit individually controls the ceiling portion of the clean target chamber, cleaning the outlet opening of the clean air blowing unit to the respective region of the chamber If it is set as the structure which blows off air, the fan air volume (namely, cleanliness) of the clean air blowing unit corresponding to the position where a target object exists among the clean air blowing units arranged in parallel with the ceiling part with respect to indoor movement of the target object The amount of air blown out) can be automatically increased to enhance the purification function for the area where the target is present, so that when the dust generating body is the target, In addition, it is possible to effectively prevent indoor contamination due to dust generated from the dust generating body, and in the case where the object requiring a clean atmosphere is the target object, the object requiring the clean atmosphere against the indoor movement of the object requiring the clean atmosphere. Around it can be reliably maintained at the required cleanliness.
[0026]
Further, among the clean air blowing units arranged side by side on the ceiling, for the clean air blowing unit that is not compatible with the position of the target object, the fan air flow rate is not increased, and the target object is moved, For clean air blowing units that have changed from a state corresponding to the target object to a non-compliant state, the fan blown air amount is reduced and restored, so the fan power consumption can be greatly reduced as a whole clean room, and energy saving can be achieved effectively. .
[0027]
Each of the clean air blowing units arranged in parallel on the ceiling portion is equipped with the target body detection sensor and the unit individual controller together with the blowing fan, and is mounted on the blowing chamber forming body as the unit base. Since the facility of such a signal line is unnecessary, in taking indoor air movements of dust generating bodies and clean atmosphere necessary bodies, in the form of automatically increasing the amount of clean air blown to the target object location, A clean room with low equipment cost and easy equipment construction can be obtained.
[0028]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows an overall configuration of a clean room, and clean air blowing units 3 including a blower fan 1 and a blown air purification filter 2 are closely aligned with the ceiling portion of the purification target chamber 4 in a matrix arrangement as shown in FIG. This clean air is obtained by purifying the blow-out air taken into the blow-out chamber 6 of each of the clean air blow-out units 3 by the blow-off fans 1 from the air supply chamber 5 on the back of the ceiling with the blow-off air purification filter 2. Are blown out from the clean air blowing units 3 into the purification target chamber 4 in a downward laminar flow state.
[0029]
7 is a return air chamber under the floor, 8 is a porous ventilation floor that allows the discharge of room air to the return air chamber, and 9 is a return to return the room air discharged to the return air chamber 7 to the air supply chamber 5 behind the ceiling. The air flow path 10 cools or heats the air that is returned to the air supply chamber 5, and the air to be purified 4 is given a predetermined air circulation through the air supply chamber 5 -purification target chamber 4 -return air chamber 7 -return air air path 9. It is a temperature control coil that adjusts to a temperature state, and the air circulation over the supply air chamber 5 -the purification target chamber 4 -the return air chamber 7 -the return air air passage 9 is blown by the blowing fan 1 provided in each clean air blowing unit 3 Do with ability.
[0030]
11 is an outside air passage for taking in outside air for indoor ventilation, 12 is an external air conditioner that preliminarily removes dust from the intake outside air, and adjusts temperature and humidity, and 13 is the inside or return of the chamber 4 to be purified. This is an exhaust fan that discharges an amount of air corresponding to the amount of intake outside air from the portion upstream of the intake air introduction portion in the air chamber 7 through the exhaust air passage 14.
[0031]
As shown in FIGS. 3 and 4, the clean air blowing unit 3 has the same rectangular parallelepiped shape (upper surface in this example) with each lower surface opening (that is, the blowing opening) as the mounting portion of the blown air purification filter 2. The two box-like bodies 15a and 15b (in other words, each of the two box-like bodies 15a and 15b is provided with a lower surface opening) are kept independent from each other . And a base structure in which the internal spaces of the box-like bodies 15a and 15b are communicated with each other by the communication passage 16 extending between the opposing surfaces of the box-like bodies 15a and 15b. As a result, the connected body (the connected box-like bodies 15a and 15b) of the box-like bodies 15a and 15b is connected to the communication passage 16 as a blowout chamber forming body. The continuous box-like body internal space is used as the blowout chamber 6 of each unit 3.
[0032]
Then, to this outlet chamber structure, two axial flow fan 1a of the same specifications as the blowing fan 1, 1b each box-like body 15a, the top plate portion of the rectangular shape of 15b (i.e., the ceiling portion) to the upper surface The fan axis direction is obliquely arranged along the diagonal direction of the upper surface of the ceiling , and the fan discharge ports of the fans 1a and 1b are individually connected to the two box-like bodies 15a and 15b by air paths. .
[0033]
That is, with this unit structure, when the above-described series of box-like body internal spaces are made into a common blowing chamber 6 for the two blowing fans 1a and 1b, the two blowing fans 1a and 1b are operated together, and In any of the cases where only one unit is operated, the intake air from these blowing fans 1a and 1b is equalized (static pressure) in the common blowing chamber 6 to thereby form two box-like bodies 15a. , 15b are blown out uniformly from the respective blowing openings.
[0034]
In addition, each clean air blowing unit 3 has an area in which the blowing opening is opposed in the room as a responsible area, whereas an object detection sensor that detects the presence or absence of a person in the unit assigned area with a person as the object. Based on the person detection sensor 17 as K and the detection information of the person detection sensor 17, independent of the other clean air blowing units 3, when two persons are present in their own unit charge area, Both fans 1a and 1b are operated to automatically increase the amount of fan blown as a unit, and one of the two blower fans 1a and 1b is operated when no person is present in the unit charge area. The unit individual controller 18 that automatically reduces and returns the fan air flow as a unit is connected to the above-mentioned connection box as a blow-out chamber forming body (in other words, a unit base). Scan-like body 15a, there as equipped with structures assembled to 15b.
[0035]
That is, by arranging the clean air blowing unit 3 side by side on the ceiling of the purification target chamber 4, based on the detection information of the human detection sensor 17 assembled and installed in each clean air blowing unit 3, When the clean air blowing unit 3 corresponding to a person's presence position (that is, a unit where a person exists in its own area) does not correspond to the person's existence position, That is, it is automatically increased than when there is no person in the area in charge.
[0036]
As a result, for the clean air blowing unit 3 in which no person is present in the area in charge, two boxes of clean air with a small amount of air sufficient to maintain the required cleanliness in a state free from human dust generation. Necessary for maintaining the required cleanliness against human dust generation for the clean air blowout unit 3 in which a person is present in the area in charge, and is blown out uniformly from the blowout openings of the respective bodies 15a and 15b. A large amount of clean air is uniformly blown from the blowout openings of the two box-like bodies 15a and 15b, and the cleanliness of each area of the chamber 4 to be purified is always maintained at a required value, while the Energy saving is achieved by reducing fan power consumption by avoiding unnecessary blowing of unnecessarily clean air in the existing area.
[0037]
The human detection sensor 17 employs an infrared sensor that detects the presence of a person in the unit charge area by detecting infrared rays (in other words, heat rays) emitted by a person, and the blowing fans 1a and 1b have an axial flow. The fan is adopted.
[0038]
In each clean air blowing unit 3, 19 is a vibration isolator for the blowing fans 1a and 1b, 20 is a silencer interposed in the discharge side air passage of the blowing fans 1a and 1b, 21 is a vibration isolating joint, and 22 is a blowing. The silencer 23 is provided in the intake side air passage of the fans 1a and 1b, and a check damper 23 is provided in the air intake 24 from the air supply chamber 5 on the back of the ceiling. The check damper 23 corresponds to the blowout fan 1a. , 1b is automatically opened by its suction pressure to allow the intake of air from the air intake 24, whereas, when the corresponding blowing fans 1a, 1b are in the stopped state, gravity is The air intake 24 is automatically closed by the action to close the air intake port 24. Thus, in the state where only one of the two blowout fans 1a, 1b is operated, the blowout fan 1a, b air from the air inlet 24 of the corresponding is prevented from flowing back discharge.
[0039]
Reference numeral 25 denotes a filter holding frame for holding eight blown air purifying filters 2 (for example, HEPA filters and ULPA filters) at the blowout openings of the two box-like bodies 15a and 15b forming the blowout chamber 6. , 26 is a sprinkler having a unit area as a watering area, 27 is a lighting fixture, and each clean air blowing unit 3 has the above-described blowing fans 1a and 1b and connecting devices for the blowing fan 1a and 1b at the factory production stage. The human detection sensor 17, the unit individual controller 18, the filter holding frame 25, the sprinkler 26, and the terminal connection pipe 28 for the person detection sensor 17, the box connection bodies 15a and 15b as blowout chamber forming bodies are preinstalled and installed in the factory. And installed on the ceiling of the chamber 4 to be purified, Equipment construction of clean room to facilitate, are to enhance the construction efficiency.
[0040]
Another embodiment
Next, another embodiment will be listed.
In the above-described embodiment, when the person is the target object and the person in the unit charge area is present, the fan air blowing amount of the clean air blowing unit 3 is increased. It may be a product requiring a clean atmosphere such as a manufactured product.
[0041]
As the object detection sensor K for detecting the presence or absence of an object, various detection methods can be adopted depending on the object. For example, when a person is an object, the human detection sensor 17 is an infrared sensor. Instead, an ultrasonic sensor that detects a person in the unit charge area by detecting reflected ultrasonic waves from a person with respect to ultrasonic radiation may be employed.
[0042]
In the above-described embodiment, the clean air blowing unit 3 is equipped with a plurality of blowing fans 1 (not limited to two but may be three or more), and by controlling the number of operating these fans 1a and 1b. The fan air blown amount as a unit of the clean air blowing unit 3 (that is, the blown air amount of the clean air as a unit) is adjusted to be increased or decreased, but instead of this, one or more equipped with the clean air blowing unit 3 You may employ | adopt the system which increases / decreases and adjusts the fan air flow rate as a unit by the rotation speed control with respect to the blower fan 1 of a stand | base, and the system which combined these operation number control and rotation speed control.
[0043]
In the above-described embodiment, the blowing chamber 6 in the clean air blowing unit 3 is formed by two of the plurality of box-like bodies 15a and 15b communicated with each other. However, the number is not limited to two but three or more. also not good.
[0044]
The blowout fan 1 is not limited to the axial flow fan. For example, various types of fans are used as the blowout fan 1 such as a multi-blade fan, a backward-facing fan, or a blade-type fan or a cross-line fan. Can be adopted.
[0045]
In addition, the clean air blowing unit by this invention can be used for formation of the clean space of various uses in various fields, and the clean room by this invention can also be used for various uses.
[Brief description of the drawings]
FIG. 1 is a side view of a clean room. FIG. 2 is a plan view of the clean room. Figure [Explanation of symbols]
2 Blowing air purification filter 6 Blowing chamber 1 Blowing fan K Object detection sensor 18 Unit individual controller

Claims (4)

The blower chamber forming body having the blowout opening as the mounting portion for the blowout air purifying filter is equipped with a blowout fan that takes the blowout air into the blowout chamber and blows out the intake air from the blowout opening. A clean air blowing unit,
The opening on the bottom provided with a plurality of mounting portions and to Rubo box-shaped body of the filter outlet air purification, connected together in a state of being close to each other a plurality of boxlike body maintains a separate opening on the bottom of each other In addition, a communication path that connects the internal spaces of the box-shaped bodies between the opposing surfaces of these box-shaped bodies is provided .
A plurality of box-shaped bodies having a series of internal spaces of a plurality of box-shaped bodies communicated by the communication passages as the blowing chambers and the lower surface openings of the plurality of box-shaped bodies as the blowing openings. A clean air blowing unit in which a forming body of the blowing chamber is constituted by a connecting body .   The clean air blowing unit according to claim 1, wherein each of the box-like bodies is individually equipped with the blowing fan for taking in the blowing air into the internal space. Each of the box-shaped bodies that span the communication path is configured in a rectangular parallelepiped shape as viewed from above, and an axial-flow fan is used as the blowing fan, and the fan axial direction is the diagonal direction of the top surface of the ceiling of the box-shaped body The clean air blowing unit according to claim 2, which is assembled to the upper surface of the ceiling of each box-like body in an oblique arrangement along the line.   The clean air blowing units according to any one of claims 1 to 3 are juxtaposed on a ceiling portion of a purification target chamber, and clean air is supplied from the blowing openings of the clean air blowing units to each region in the room. A clean room as a structure that blows out.

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