JP2022538130A - Energy-saving ventilation system using process exhaust - Google Patents

Abstract

The present invention provides an energy saving ventilation system that utilizes process exhaust. The energy-saving ventilation system comprises an outside air treatment unit for treating outdoor outside air and delivering it to the production room, and the process exhaust available in the production room itself and/or the energy of the production room into said production room and/or fresh air. and an exhaust gas recycling device for returning to the air inlet of the unit. In such energy-saving ventilation systems, the exhaust gas reclaiming device transfers the process exhaust itself and/or the energy available in the production room to the production room or the outside air treatment unit air inlet, thereby reducing the process exhaust itself or the energy contained in the process exhaust. can be recovered and reused, avoids energy waste, reduces the energy required for outside air treatment by the outside air treatment unit, and saves energy. [Selection drawing] Fig. 2

Description

Cross-reference to related applications

This application is a Chinese patent application filed with the Chinese Patent Office on July 22, 2019, with application number 201910662624.2 and titled "Ventilation System Using Process Heat for Exhaust" and 2019 Claiming priority based on a Chinese patent application entitled "Energy-Saving Ventilation System Using Process Exhaust", filed with the Chinese Patent Office on July 22, 2019, with application number 201910663309.1 , the disclosure of which is hereby incorporated in its entirety.

The present invention relates to the technical field of industrial manufacturing, and in particular to energy-saving ventilation systems utilizing process exhaust.

In the areas of integrated circuit manufacturing, flat panel display manufacturing, and optoelectronic device manufacturing, there are various process exhausts for process manufacturing needs, and such process exhausts are generally vented directly to the atmosphere. However, as shown in FIG. 1, a significant portion of process exhaust from process equipment 03 in production room (production plant) 04 is either very clean (or contains only a small amount of dust) or very For hot (or cold) exhaust that is extremely clean (or contains only a small amount of dust), the energy (cold) contained in the exhaust is not utilized if the process exhaust is exhausted directly from the exhaust fan 02. The result is a waste of energy. At the same time, it is also necessary to configure the outside air treatment unit 01 for this type of exhaust in order to maintain the parameter requirements of the plant environment. Fresh air consumes a lot of energy, filtering, cooling, heating and humidifying.

[Problems to be solved by the invention]
Embodiments of the present invention provide an energy-saving ventilation system that utilizes process exhaust, maximizing the use of process exhaust and recycling available process exhaust itself and/or energy to the production room and/or air. Return to entrance and save energy.

[Means to solve the problem]
The present invention provides an energy-saving ventilation system utilizing process exhaust, said energy-saving ventilation system comprising:
an outside air treatment unit for treating outdoor outside air and delivering it to the production room;
an exhaust gas recycling device for returning the available process exhaust gas in the production room itself and/or the energy of the production room to the air inlet of said production room and/or the fresh air unit.

An energy-saving ventilation system provided by an embodiment of the present invention includes an outdoor air treatment unit and an exhaust air recycling device, where the outdoor air treatment unit filters, cools, heats, and humidifies outdoor air into a production room (production plant). Different process equipment in the production room exhausts different process exhausts, some process equipment process exhaust is available process cold exhaust, some process equipment process exhaust is available process Hot or cold exhaust. The exhaust gas reclaimer can send the available process exhaust itself in the production room and/or the production room energy back to the air inlet of the production room and/or the outdoor air treatment unit, avoiding wasted energy and reducing the energy consumption of the outdoor air treatment unit. Reduces the energy needed to process fresh air in the air, saving even more energy.

Optionally, said exhaust gas recycling device comprises a process exhaust gas recycling unit for collecting and transporting available process exhaust gas within said production chamber to said production chamber.

Optionally, said process exhaust recycling unit is connected to an air intake connected to an outlet of said production chamber for exhausting available process exhaust and to an inlet for receiving available process exhaust from the production chamber. and a fan section between said intake section and said exhaust section.

Optionally, at least one filtering section is located between said intake section and said fan section and/or at least one filtering section is located between said fan section and said exhaust section.

Optionally, the filtration section located between said intake section and said fan section comprises a chemical filtration section and/or a medium efficiency filtration section.

Optionally, the filtering section located between said fan section and said exhaust section comprises a high efficiency filtering section.

Optionally, a connecting air pipe is further included, one end of said connecting air pipe being connected to said exhaust and the other end being connected to said production chamber.

Optionally, an exhaust air pipe is further included, a first electrical shut-off valve is provided on said connecting air pipe, one end of said exhaust air pipe is connected between said exhaust and said first electrical shut-off valve. connected to the connecting air pipe located between, the other end of the exhaust air pipe is connected to the atmosphere outside the production room, a second electrical shut-off valve is installed on the exhaust air pipe, and the A hazardous substance detector is installed in a portion of the connecting air pipe located between the exhaust portion and the first electrical shut-off valve, the hazardous substance detector is signal-connected to a controller, and the first electrical shut-off valve and said controller being connected to said first electrical shut-off valve and said second electrical shut-off valve respectively for controlling the opening and closing of said second electrical shut-off valve, respectively;
When the hazardous substance detector detects that there is a hazardous substance in the connecting air line, the controller closes the first electrical shut-off valve and controls the second electrical shut-off valve to open.

Optionally, said process exhaust gas recycling unit is installed in a ventilation and air conditioning machine room, suspended ceiling, technical mezzanine under a clean production plant or in a process room.

Optionally, an intake pipe for introducing outdoor outside air is connected to the air inlet of the outside air processing unit, and the exhaust gas recycling device is connected to a first exhaust fan and an air outlet of the first exhaust fan. a connected first exhaust pipe and a second exhaust pipe, wherein the first exhaust pipe communicates with the atmosphere outside the production room; A first electrovalve is provided for controlling the amount of outside air, and said second exhaust pipe, in conjunction with said intake pipe, diverts the available process exhaust itself and/or energy to the outside air treatment unit air inlet. A second electric valve is installed on the second exhaust pipe to communicate the outside air and control the amount of outside air in the second exhaust pipe.

Optionally, a temperature detector is further included, said temperature detector being installed at the air inlet of said outdoor air treatment unit or at said outdoor air treatment unit for detecting the temperature of the outdoor air at said outdoor air treatment unit air inlet, said temperature A detector is signally connected to a controller, the controller is signally connected to each of the first electrovalve and the second electrovalve signal, the controller is configured to control temperature sensed by the temperature detector and a set temperature. According to the temperature, the degrees of opening and closing of the first electric valve and the second electric valve are controlled.

Optionally, said second exhaust pipe communicates directly with said intake pipe.

Optionally, within said first exhaust fan, a filtering unit is installed on said second exhaust pipe or within said ambient air treatment unit.

Optionally, a filter is installed in said first exhaust fan, on said second exhaust pipe or in a filtering section in said ambient air treatment unit.

Optionally, the air inlet of said first exhaust fan communicates with the process equipment exhaust via a hot exhaust main.

Optionally, a hazardous substance detector is installed in said hot exhaust main, said hazardous substance detector is signal connected to a controller, said controller controlling said first and second electrovalves respectively. signally connected,
When the hazardous substance detector detects the presence of hazardous substances in the hot exhaust main, the second electrovalve is closed and the first electrovalve is fully opened.

Optionally, a heat recovery device is further included, said heat recovery device air inlet communicating with said first exhaust pipe, and said heat recovery device air outlet communicating with atmosphere outside said production chamber. , said first exhaust pipe indirectly transfers the energy of the process exhaust available in said first exhaust pipe to the outdoor ambient air at an ambient air treatment unit air inlet via said heat recovery device; cooperating with said ambient air treatment unit air inlet.

Optionally, said heat recovery device comprises one or a combination of runner type, plate type, fin type, heat pipe type, shell and tube type, and intermediate heat carrier type.

Optionally, a heat recovery device is further included, wherein said second exhaust indirectly transfers energy utilizing process exhaust in said second exhaust to outdoor ambient air at an ambient air treatment unit air inlet. so as to cooperate with the intake pipe via the heat recovery device.

Optionally, said heat recovery device comprises one or a combination of runner type, plate type, fin type, heat pipe type, shell and tube type, and intermediate heat carrier type.

Optionally, said heat recovery device is installed in said ambient air treatment unit, or installed on said second exhaust pipe, or installed in said first exhaust fan.

Optionally further included is a second exhaust fan for exhausting unusable process exhaust within said production chamber.

1 is a schematic structural diagram of a ventilation system in the prior art; FIG. 1 is a schematic structural diagram of an energy-saving ventilation system utilizing process exhaust provided by an embodiment of the present invention; FIG. FIG. 2 is a schematic structural diagram of functional parts of a process exhaust gas recycling unit provided by an embodiment of the present invention; FIG. 4 is another schematic structural diagram of an energy-saving ventilation system utilizing process exhaust provided by an embodiment of the present invention; FIG. 4 is a schematic structural diagram of another energy-saving ventilation system utilizing process exhaust provided by an embodiment of the present invention; 5 is a partially enlarged view of region C of FIG. 4; FIG. FIG. 4 is another schematic structural diagram of an energy-saving ventilation system utilizing process exhaust provided by an embodiment of the present invention; FIG. 4 is another schematic structural diagram of an energy-saving ventilation system utilizing process exhaust provided by an embodiment of the present invention; FIG. 4 is another schematic structural diagram of an energy-saving ventilation system utilizing process exhaust provided by an embodiment of the present invention; FIG. 2 is another schematic structural diagram of an energy-saving ventilation system utilizing process exhaust provided by an embodiment of the present invention;

[Description of symbols]
sign:
01-outside air treatment unit 02-exhaust fan 03-process equipment 04-production room 1-outside air treatment unit 11-intake pipe 12-temperature detector 2-exhaust gas recycle device 21-process exhaust gas recycle unit 211-intake 212- Chemical Filtration Section 213 - Medium Efficiency Filtration Section 214 - Fan Section 215 - High Efficiency Filtration Section 216 - Exhaust Section 22 - First Exhaust Fan 23 - Second Exhaust Fan 24 - Connecting Air Pipe 241 - First Electrical Shutoff Valve 242 - hazardous material detector 25 - exhaust air line 251 - second electrical shutoff valve 3 - process equipment 41 - first exhaust line 411 - first electrical valve 42 - second exhaust line 421 - second Electrovalve 43 - Hot exhaust main 431 - Hazardous material detector 51, 52 - Heat recovery device.

The technical solutions in the embodiments of the present application are clearly and completely described below in conjunction with the drawings in the embodiments of the present application.

As shown in Figures 2 and 5, the present invention provides an energy saving ventilation system utilizing process exhaust. The energy-saving ventilation system includes an outside air treatment unit 1 and an exhaust gas recycling device 2 .

The outdoor air treatment unit 1 is configured to treat outdoor outdoor air and deliver it to the production room.

Said exhaust gas recycling device 2 is arranged to return the available process exhaust gas itself and/or energy in the production room to the production room and/or the ambient air treatment unit 11 air inlet.

The energy-saving ventilation system provided by an embodiment of the present invention includes an outside air treatment unit 1 and an exhaust gas recycle device 2 . The outdoor air processing unit 1 filters, cools, heats, humidifies, etc. the outdoor air, and then sends it to the production room (production plant). Different process equipment 3 in the production room exhausts different process exhausts, some process equipment 03 process exhaust is available process cold exhaust, some process equipment 03 process exhaust is available process Hot or cold exhaust. The exhaust gas recycle device 2 transfers the process exhaust itself and/or energy available in the production room to the production room and/or the outside air treatment unit air inlet. This can avoid wasting energy and reduce the energy required for outside air treatment by the outside air treatment unit 1, thereby saving energy.

The available process exhaust is either room temperature exhaust, hot exhaust, or cold exhaust, the recovered energy of the hot exhaust is the exhaust heat, and the recovered energy of the cold exhaust is the cold energy of the exhaust.

In a possible implementation, as shown in FIG. 2, the exhaust gas recycling device 2 is a process exhaust gas recycling unit 21 for collecting and transporting available process exhaust gas in the production room to the production room. Here, the available process exhaust is ambient exhaust whose temperature and humidity match the environment of the production room.

In the above energy-saving ventilation system, as shown in Fig. 2, the production room has two types of process exhaust outlets. The non-available process exhaust A in the production room is vented directly to the atmosphere and has an outside air volume QA. The directly available process exhaust B (cold exhaust) is either sent back to the room directly in the process exhaust recycling unit 21 or sent back to the room after filtration and has an outside air volume of QB. The amount of outside air that needs to be replenished in the outside air treatment unit 1 is QA. In a conventional ventilation system, as shown in Figure 1, the unusable process exhaust in the production room is vented directly to the atmosphere, with an outside air volume of QA, and the available process exhaust B is also vented directly to the atmosphere, with an outside air volume of QB. The amount of outside air that needs to be replenished in the outside air treatment unit 1 is QA+QB. Compared with the conventional ventilation system, the ventilation system of the embodiment of the present invention, in the present invention, the amount of outside air that needs to be replenished by the outside air treatment unit 1 is QA, and the newly supplemented amount of outside air is reduced by QB. .

Thus, in the above embodiment, the available cold exhaust is sent back to the production room for reuse by utilizing the process exhaust recycling unit 21, which reduces the amount of outside air in the production room and reduces the amount of outside air. Heat and cold energy for processing are reduced and the capacity of the outdoor air treatment unit 1 is reduced, saving energy.

Specifically, in embodiments of the present application, a portion of the available process exhaust that meets temperature and humidity and cleanliness requirements is sent directly back to the production room. Some process exhaust that meets temperature and humidity requirements but not cleanliness requirements is filtered before being sent to the production room. Now the process exhaust also needs to be treated, but the treatment process is simpler than the ambient air treatment process of the ambient air treatment unit 1 and requires less energy consumption.

Specifically, the production room of the foregoing embodiments may include a clean room.

Further, in order to match the available cold exhaust to requirements and send it back to the production room, referring to FIG. an air intake 211 in communication with the outlet of the , an exhaust 216 in communication with the inlet of the production chamber for receiving available process exhaust, and a fan section 214 located between the air intake 211 and the air exhaust 216. including. If the available process exhaust temperature, humidity and cleanliness meet the requirements, such process exhaust enters the process exhaust recycling unit 21, enters the fan section 214, and then exits through the exhaust section 216. It is sent directly back to the chamber and reused.

Furthermore, at least one filtering section is set between the intake section 211 and the fan section 214 or between the fan section 214 and the exhaust section 216 . Alternatively, at least one filtering section is set between the intake section 211 and the fan section 214 and between the fan section 214 and the exhaust section 216 . The available process exhaust enters from the intake section 211 and the process exhaust whose cleanliness does not meet the requirement is sent back to the production room through the filtration section to ensure the cleanliness of the production room.

Optionally, taking FIG. 3 as an example, the filtration section located between the air intake section 211 and the fan section 210 may include a chemical filtration section 212 and/or a medium efficiency filtration section 213, although these is not limited to The chemical filtration unit 212 can adsorb molecular level contaminants entrained in the process exhaust, and the medium efficiency filtration unit 213 can further filter the process exhaust containing particulate matter, so that the recycled process exhaust meets the cleanliness requirements. will meet
Optionally, a filtration section located between fan section 214 and exhaust section 216 can include, but is not limited to, high efficiency filtration section 215 . Higher efficiency filtering of the process exhaust from the fan section 214 allows the recycled process exhaust to meet the cleanliness requirements so that it can be sent back to the production room for reuse.

It should be noted that in embodiments of the present application, each filtration section of the process exhaust recycling unit 21 is selected and configured according to the nature of the exhaust and the requirements of the production room. This is not a required feature. Also, the position of each filtering section can be adjusted according to requirements. At the same time, available process exhaust purification includes not only filter treatment, but also other types of filter purification forms (water washing, adsorption, absorption, combustion, etc.).

Specifically, in this embodiment of the present application, the process exhaust gas recycling unit 21 is installed in the ventilation and air conditioning machine room, in the suspended ceiling, or in the technical mezzanine below the clean production plant. installed or can be installed in any location within the process room that meets the installation requirements.

Specifically, when the process exhaust gas reuse unit 21 is installed in a ventilation and air conditioning machine room or installed in a suspended ceiling, the energy-saving ventilation system in the embodiments of the present application further includes a connecting air pipe 24. . One end of connecting air pipe 24 is connected to the air outlet, section 216 is connected and the other end is connected to the production chamber for returning available process exhaust through the connecting air pipe to the production chamber.

In the actual invention, due to process production requirements, the production room has process equipment that utilizes hazardous chemicals, and process exhausts containing hazardous materials are discharged. Leakage of process exhaust containing hazardous materials can contaminate available process exhaust. To prevent recirculation of contaminated process exhaust, the exhaust air line 25 can be connected to the connecting air line. As shown in FIG. 4, the connecting air pipe 24 is provided with a first electrical closing valve 241 . One end of the exhaust air pipe 25 is connected to the connecting air pipe 24 located between the exhaust 216 and the first electrical shutoff valve 241, and the other end of the exhaust air pipe 25 is connected to the atmosphere outside the production house. , and a second electrical shutoff valve 251 is provided on the exhaust air pipe 25 . A dangerous substance detector 242 is provided in the portion of the connecting air pipe 24 located between the exhaust 216 and the first electrical shut-off valve 241 . Hazardous substance detector 242 is in signal communication with the controller. The controller controls the opening and closing of the first electrical shut-off valve 241 and the second electrical shut-off valve 251 by making signal connections to the first electrical shut-off valve 241 and the second electrical shut-off valve 251 respectively. If the hazardous material detector 242 detects no hazardous material, the controller controls the first electrical shut-off valve to open and the second electrical shut-off valve to close to recycle available process exhaust. to control. When the hazardous substance detector detects a hazardous substance, the controller controls the first electrical shut-off valve to close and the second electrical shut-off valve to open. This allows direct exhaust of the contaminated available process exhaust to prevent contamination of the production room environment.

Specifically, the process exhaust recycle unit 21 is installed in a production room or technical mezzanine below a clean production plant, the exhaust 216 of the process exhaust recycle unit 21 directly in the form of outlet air. It can also be installed to send return air directly to the technical mezzanine below the production room or clean production plant.

In another possible implementation, as shown in FIGS. 5 and 6, the air inlet of the outdoor air blower unit 1 is connected to an intake pipe 11 for introducing outdoor outdoor air, and the exhaust gas recycling device 2 is connected to the first It may include an exhaust fan 22 , a first exhaust pipe 41 connected to the first exhaust fan 22 air outlet, and a second exhaust pipe 42 . A first exhaust pipe 41 communicates with the atmosphere outside the production room. A first electric valve 411 is installed on the first exhaust pipe 41 to control the amount of air outside the first exhaust pipe 41 . The second exhaust pipe 42 cooperates with the intake pipe 11 to transfer the available process exhaust itself and/or energy to the outdoor outside air at the outside air treatment unit 1 air inlet. A second electric valve 421 is installed on the second exhaust pipe 42 to control the amount of air outside the second exhaust pipe 42 . In this configuration, the available process exhaust can be hot exhaust or cold exhaust.

The energy-saving ventilation system described above includes an outside air treatment unit 1 and a first exhaust fan 22 . The outside air processing unit 1 processes outdoor outside air and sends it to the production room. A first exhaust fan 22 exhausts available process exhaust generated by process equipment 3 inside the production room outside the production room. Since the first exhaust pipe 41 and the second exhaust pipe 42 are connected to the air outlet of the first exhaust fan 22, the first exhaust pipe 41 communicates with the atmosphere outside the production room, The exhaust pipe 42 can cooperate with the intake pipe 11 to transfer the available process exhaust itself and/or energy to the outdoor ambient air at the air inlet of the ambient air treatment unit 1 . When the first electrovalve 411 is partially or fully closed and the second electrovalve is opened, the available process exhaust generated by the process device 3 is available via the second exhaust line 42 The process exhaust itself and/or the energy is transferred to the outdoor atmosphere at the outdoor air treatment unit 1 air inlet, the energy contained in the process exhaust being recovered and reused to avoid wasting energy and the outdoor air by the outdoor air treatment unit 1. Save energy by reducing the energy required for processing.

In practical application, when the available process exhaust is hot exhaust, the outside air is replenished by the outside air treatment unit 1 in winter, and the outside air is supplied to the outside air treatment unit 1 in order to reach the proper temperature and be sent to the production room. It needs to be heated and consumes a lot of energy. In the above ventilation system, the first exhaust fan 22 exhausts the hot exhaust gas generated by the process equipment 3 in the production plant from the production plant, and the air outlet of the exhaust fan 2 is connected to the first exhaust pipe 41 and the second , the first exhaust pipe 41 communicates with the atmosphere outside the production plant, and the second exhaust pipe 42 cooperates with the intake pipe 11 to dissipate the heat of the high-temperature exhaust gas. Transfer to outside air at the outside air treatment unit air inlet. Specifically, when the first electrovalve 411 is partially or completely closed and the second electrovalve 421 is opened, the heat of the hot exhaust produced by the process equipment 3 is transferred through the second exhaust pipe 42 to to improve the temperature of the outdoor air at the air inlet of the outdoor air processing unit 1, and reduce the amount of heating of the outdoor air by the outdoor air processing unit 1 in winter. and achieve the purpose of saving energy. In summer, by closing the second electric valve 421 and opening the first electric valve 411, the hot exhaust generated by the process equipment 3 can be discharged directly to the air, and the outdoor air at the outside air treatment unit 1 air inlet. outside air temperature.

Additionally, the available exhaust may be cold exhaust. In summer, the second exhaust pipe 42 cooperates with the intake pipe 11 to transfer the cold energy of the cold exhaust to the outside air at the air inlet of the outside air treatment unit. Specifically, when the first electrical valve 411 is partially closed and the second electrical valve 421 is open, the cold energy of the cold exhaust produced by the process device 3 is transferred through the second exhaust pipe 42 to The outside air can be transmitted to the outside air processing unit 1 air inlet, and the temperature of the outdoor outside air can be lowered at the outside air processing unit 1 air inlet, thereby reducing the outside air cooling capacity of the outside air processing unit 1 in summer. to achieve the purpose of saving energy.

Specifically, the outside temperature varies according to the season, and the temperature required for production in the production room also varies. If the exhaust gas recycle device is used to recover process exhaust energy, the amount of available process exhaust energy recovery is controlled to reduce the energy consumption of the outside air treatment unit. A temperature sensor 12 can be installed in the ventilation system to regulate the amount of energy recovery using the process exhaust, and as shown in FIG. Installed in the outside air treatment unit 1 to detect the temperature of the outside air at the air inlet of the outside air treatment unit, the outside air at the outside air treatment unit air inlet is the outside air after receiving the energy of the process exhaust. The temperature detector 12 is signally connected with the controller, which is signally connected to the first electric valve 411 and the second electric valve 421 respectively. The controller controls the degree of opening and closing of the first electric valve 411 and the second electric valve 421 according to the temperature detected by the temperature detector and the set temperature.

In practical application, the set temperature is the temperature required under the conditions of the lowest energy consumption of the outdoor air treatment unit. If the available process exhaust is hot exhaust, the heat of the hot exhaust is transferred to the outdoor ambient air at the ambient air treatment unit air inlet by the cooperation of the second exhaust pipe 42 and the intake pipe 11 . The temperature detector detects the temperature of the outside air at the outside air processing unit air inlet, the controller compares the set temperature and the outside air temperature at the outside air processing unit air inlet, and according to the difference value, the controller outputs the first electric Control the degree of opening and closing of the valve and the second electrovalve. For example, when the temperature of the outside air at the air inlet of the outside air processing unit is lower than the set temperature, the controller controls the opening degree of the second electric valve 421 to be larger or fully open, and the outside air in the second exhaust pipe to reduce or close the first electrovalve 411 to a lesser extent to reduce the amount of outside air in the first exhaust pipe, thereby increasing the amount of energy recovery. Alternatively, if the temperature of the outside air at the air inlet of the outside air processing unit is higher than the set temperature, the controller controls the degree of closing the second electric valve 421 to be small or close completely, so that the amount of outside air in the second exhaust pipe is is controlled to increase the degree of opening of the first electric valve or to open it completely to increase the amount of outside air in the first exhaust pipe and reduce the amount of energy recovery.

Optionally, as shown in Figures 5, 6 and 7, a second exhaust pipe 42 is directly connected to the intake pipe 11 of the fresh air treatment unit 1 to transfer the available process exhaust itself and its energy to the fresh air treatment unit. 1 air inlet, reduce the energy required to treat the outside air by the outside air treatment unit 1, save energy, reduce the amount of outside air in the production room, thereby reducing the capacity of the outside air treatment unit 1 reduce and save energy.

Additionally, if the second exhaust pipe is directly connected to the intake pipe, the portion of the process exhaust that does not meet cleanliness requirements will be filtered before being sent back to the production room. A filtration unit is provided in the first exhaust fan 22 and the second exhaust pipe 42 or the outside air processing unit 1 so that when impurities such as dust are present in the available process exhaust, the impurities present in the exhaust are removed from the production room. can be prevented from entering

Specifically, a filter is provided in the first exhaust fan 22 , the second exhaust pipe 42 , or the filtering section of the outside air processing unit 1 . The filter filters available process exhaust produced by process equipment 3 . In addition, the filtering unit can filter exhaust gas by various other filtering methods such as washing with water and adsorption, but the method is not limited to this.

The first exhaust fan 22, the second exhaust pipe 42, or the ambient air treatment unit 1 can be provided with one or more filtering units, and each filtering unit can be a different filtering function to achieve different filtering. Please note. The specific filtering section is set according to the actual situation of the production plant, and there is no limit here.

In the energy-saving ventilation system described above, specifically, the air inlet of the first exhaust fan 22 communicates with the air outlet of the process device 3 via the high-temperature exhaust main pipe 43 .

Additionally, a hazardous substance detector 431 may be provided in the hot exhaust main 43 . The hazardous substance detector 431 is in signal connection with the controller, which is in signal connection with the first electric valve 411 and the second electric valve 421 respectively. When the hazardous substance detector 431 detects a hazardous substance in the hot exhaust main pipe, the second electric valve 411 is closed and the first electric valve 421 is fully opened. Process production requires process equipment 3 that utilizes hazardous chemicals in the production room and discharges unusable process exhaust. Hazardous substances can be transported to the air inlet of the ambient air treatment unit 1 . A hazardous substance detector 431 can be installed in the high temperature exhaust main pipe 43 to prevent hazardous substances from entering the air inlet of the outdoor air treatment unit 1 , and the hazardous substance detector 431 detects when there is a hazardous substance in the high temperature exhaust main pipe 43 . If so, the controller controls the second electrovalve 421 to close and the first electrovalve 411 to fully open. The process exhaust of the process equipment 3 is vented to the atmosphere so as not to contaminate the environment of the production room.

It should be noted that if both a temperature sensor and a hazardous substance detector are installed in the ventilation system, the controller will preferentially respond to the signal sent from the hazardous substance detector. When the hazardous substance detector detects a hazardous substance, the second electrovalve is closed and the first electrovalve is fully open. If the hazardous substance detector does not detect a hazardous substance, the controller responds to the signal sent from the temperature sensor.

If desired, the energy-saving ventilation system described above not only allows the process exhaust air to be mixed directly with the outdoor ambient air to save energy, but also converts the energy (cold heat) of the exhaust air produced by the process equipment 3 through a heat recovery device into It is also possible to communicate the outside air at the outside air treatment unit 1 air inlet.

In one embodiment, as shown in FIG. 8 , the second exhaust pipe 42 is directly connected to the intake pipe 11 and the first exhaust pipe 41 is connected to the outside of the production room, in particular via a heat recovery device 51 . communicated with the atmosphere. Specifically, the air inlet of the heat recovery device 51 communicates with the first exhaust pipe 41, the air outlet of the heat recovery device 51 communicates with the atmosphere outside the production room, and the first exhaust pipe 41 communicates with , in cooperation with the outdoor air treatment unit 11 air inlet via a heat recovery device 51 to indirectly transfer the energy of the available process exhaust in the first exhaust pipe 41 to the outdoor outdoor air at the outdoor air treatment unit air inlet. be. In actual production, available process exhaust may be contaminated with hazardous substances and cannot be directly recovered. Hazardous substance detector 431 can detect whether the process exhaust contains hazardous substances. When it is detected that there is no pollutant gas in the hot exhaust main pipe 43, the controller closes the first electric valve 411 and controls the second electric valve 421 to open. The hot (or cold) clean exhaust air can be mixed directly with the outdoor air, transferring energy directly to the outdoor air. When detecting the presence of contaminants in the hot exhaust main pipe 43, the controller closes the second electric valve 421 and controls the opening of the first electric valve 411 to remove the contaminants through the heat recovery device. Transfer the energy of the hot (or cold) exhaust containing air to the outside air at the outside air treatment unit air inlet.

In the above embodiment, a temperature detector can be installed at the air inlet of the outside air treatment unit 11 or at the outside air treatment unit 11 at the same time, and the heat recovery device 51 can adjust the recovery amount of the process exhaust energy. If the process exhaust in the hot exhaust main is detected to be hot (or cold) clean exhaust free of contaminants, the heat recovery device 51 may not recover the energy of the process exhaust and the controller may The degrees of opening and closing of the first electric valve 411 and the second electric valve 421 are respectively controlled according to the temperature detected by the detector and the set temperature. Adjust the amount of energy recovery for the process exhaust. Detecting that the process exhaust in the hot exhaust main is pollutant-containing process exhaust, the controller controls the second electrical valve 421 to be closed and the first electrical valve 411 to be fully open. A heat recovery device 51 recovers the energy. The heat recovery device 51 recovers the energy of the process exhaust inside the first exhaust pipe 41 .

Specifically, the heat recovery device can be one or a combination of multiple forms such as runner type, plate type, fin type, heat pipe type, shell and tube type, and intermediate heat medium type, and is limited herein. do not do.

In another solution, the energy-saving ventilation system described above includes a heat recovery device 52, as shown in FIG. The second exhaust pipe is not in direct communication with the intake pipe of the outside air treatment unit. The second exhaust pipe 42 cooperates with the intake pipe 11 via the heat recovery device 52 to convert the energy of the hot or cold exhaust gas in the second exhaust pipe 42 into the outdoor outside air at the outside air processing unit 1 air inlet. communicate indirectly to Specifically, the second exhaust pipe 42 communicates with the air inlet of the heat recovery device 52, the air outlet of the heat recovery device 52 communicates with the atmosphere outside the production room, and the heat recovery device 52 communicates with the second 2 transfers the energy of the process exhaust in the exhaust pipe 42 to the outdoor ambient air at the ambient air treatment unit 11 air inlet. The heat exchange effect of the heat recovery device causes the outside air temperature at the air inlet of the outside air treatment unit 1 to rise or fall, thereby reducing the amount of heating or cooling of the outside air by the outside air treatment unit 1, for the purpose of saving energy. to achieve

Specifically, the heat recovery device 52 can be one or a combination of multiple forms such as runner type, plate type, fin type, heat pipe type, shell and tube type, and intermediate heat carrier type. It is selected according to the actual situation and is not limited to this.

Specifically, the heat recovery device 52 can be installed in the outside air processing unit 1, the second exhaust pipe 42, or the exhaust fan. Here, the installation position of the heat recovery device is not particularly limited as long as the installation and operation functions of the heat recovery device can be realized.

In addition, because the requirements of indoor environmental parameters that need to be maintained in different production rooms are different, the design parameters of the treatment equipment and treatment equipment specially included in the outdoor air treatment unit are determined according to the actual situation and are limited here no.

In another possible implementation, the above two possible implementations can also be combined, as shown in FIG. A combination of a recycling unit 21 , a first exhaust pipe 41 and a second exhaust pipe 42 . A process exhaust recycle unit 21 can be used to filter cold exhaust from the production room and send it back to the production room after filtration. Via the first exhaust fan 22, the second exhaust pipe 42, and/or the heat recovery device, the hot or cold exhaust energy from the process equipment may be transferred to the outside air at the outside air treatment unit air inlet. can. Realize energy reuse and save energy.

In the energy-saving ventilation system provided by the three possible embodiments above, the ventilation system also includes a secondary exhaust for exhausting the unavailable process exhaust in the production room, as shown in FIGS. A fan 23 is also included.

Obviously, those skilled in the art can make various changes and modifications to the embodiments of the present application without departing from the spirit and scope of the embodiments of the present application. Thus, if these modifications and variations of the embodiments of this application fall within the scope of the claims of this application and their equivalents, this application is also intended to cover these modifications and variations. is doing.

Claims (22)

An energy saving ventilation system utilizing process exhaust, comprising:
an outside air treatment unit for treating outdoor outside air and delivering it to the production room;
and an exhaust gas recycling device for returning the available process exhaust gas in the production room and/or the energy of the production room back to the air inlet of said production room and/or fresh air unit. Energy-saving ventilation system to utilize. 2. The process exhaust of claim 1, wherein the exhaust gas recycle device comprises a process exhaust gas recycling unit for collecting and transporting usable process exhaust gas within the production chamber to the production chamber. Energy-saving ventilation system to utilize. The process exhaust recycling unit has an air intake connected to an outlet of the production chamber for discharging available process exhaust and an exhaust connected to an inlet for receiving available process exhaust from the production chamber. and a fan section between said intake section and said exhaust section. At least one filtering unit is installed between the intake unit and the fan unit, and/or at least one filtering unit is installed between the fan unit and the exhaust unit, An energy-saving ventilation system utilizing the process exhaust of claim 3. The energy-saving ventilation system using process exhaust as claimed in claim 4, wherein the filtration unit installed between the intake unit and the fan unit includes a chemical filtration unit and/or a medium efficiency filtration unit. . 5. The energy-saving ventilation system using process exhaust as claimed in claim 4, wherein the filtering unit installed between the fan unit and the exhaust unit comprises a high efficiency filtering unit. 4. Utilizing process exhaust according to claim 3, further comprising a connecting air pipe, one end of said connecting air pipe being connected to said exhaust and the other end being connected to said production chamber. energy-saving ventilation system. An exhaust air pipe is further included, a first electric shut-off valve is installed on the connecting air pipe, one end of the exhaust air pipe is located between the exhaust and the first electric shut-off valve connected to the connecting air pipe, the other end of the exhaust air pipe is connected to the atmosphere outside the production house, a second electrical shut-off valve is installed on the exhaust air pipe, and the connecting air pipe is A hazardous substance detector is installed in the portion located between the exhaust and the first electrical shut-off valve, the hazardous substance detector is signal connected to a controller, the first electrical shut-off valve and the second electric wherein the controller is connected to the first electrical shut-off valve and the second electrical shut-off valve, respectively, for controlling the opening and closing of the shut-off valve, respectively;
The controller closes the first electrical shut-off valve and opens the second electrical shut-off valve when the hazardous material detector detects that there is a hazardous material in the connecting air pipe. An energy-saving ventilation system utilizing process exhaust as claimed in claim 7, wherein: 3. Process according to claim 2, characterized in that the process exhaust gas recycling unit is installed in a ventilation and air conditioning machine room, in a suspended ceiling, in a technical mezzanine under a clean production plant or in a process room. An energy-saving ventilation system that utilizes exhaust air. An intake pipe for introducing outside air is connected to the air inlet of the outside air processing unit, and the exhaust gas reuse device includes a first exhaust fan and a second exhaust fan connected to an air outlet of the first exhaust fan. a first exhaust pipe and a second exhaust pipe, wherein the first exhaust pipe communicates with the atmosphere outside the production room to control the amount of outside air in the first exhaust pipe above the first exhaust pipe; A first electrovalve is provided for controlling and said second exhaust pipe works in conjunction with said intake pipe to transfer the available process exhaust itself and/or energy to the outdoor outside air at the outside air treatment unit air inlet. 10. A second electrovalve is installed on the second exhaust pipe for transmitting and controlling the amount of outside air in the second exhaust pipe. An energy-saving ventilation system utilizing process exhaust according to claim 1. a temperature detector is further included, the temperature detector is installed at the air inlet of the ambient air processing unit or the ambient air processing unit to detect the temperature of the ambient air at the ambient air processing unit air inlet, the temperature detector comprising: signally connected to a controller, said controller being signally connected to each of said first electric valve and second electric valve signals, said controller being controlled according to the temperature sensed by said temperature detector and a set temperature; 11. The energy-saving ventilation system utilizing process exhaust as claimed in claim 10, wherein the degrees of opening and closing of said first electrovalve and said second electrovalve are controlled. 11. The energy saving ventilation system utilizing process exhaust of claim 10, wherein said second exhaust pipe communicates directly with said intake pipe. 13. The energy-saving ventilation system using process exhaust as claimed in claim 12, wherein a filtering unit is installed in the first exhaust fan, on the second exhaust pipe or in the ambient air treatment unit. Energy saving using process exhaust according to claim 13, characterized in that a filter is installed in the first exhaust fan, on the second exhaust pipe or on the filtering part in the outside air treatment unit. ventilation system. 13. The energy-saving ventilation system utilizing process exhaust as claimed in claim 12, wherein the air inlet of said first exhaust fan communicates with the exhaust port of the process equipment through a hot exhaust main. A hazardous substance detector is installed in the hot exhaust main, the hazardous substance detector is signally connected to a controller, and the controller is signally connected to each of the first electric valve and the second electric valve. ,
16. The second electrovalve is closed and the first electrovalve is fully opened when the hazardous material detector detects the presence of a hazardous material in the hot exhaust main. An energy-saving ventilation system utilizing process exhaust as described in . A heat recovery device is further included, the air inlet of the heat recovery device being in communication with the first exhaust pipe, the first exhaust pipe channeling available process exhaust energy in the first exhaust pipe. 17. The process exhaust of claim 16, cooperating with said outdoor air treatment unit air inlet through said heat recovery device in indirect communication with outdoor ambient air at the outdoor air treatment unit air inlet. An energy-saving ventilation system that utilizes 18. The process exhaust of claim 17, wherein the heat recovery device comprises one or a combination of runner type, plate type, fin type, heat pipe type, shell and tube type, and intermediate heat carrier type. An energy-saving ventilation system that utilizes A heat recovery device is further included, the second exhaust pipe cooperating with the intake pipe via the heat recovery device to convert available process exhaust energy in the second exhaust pipe to ambient air treatment. 11. The energy-saving ventilation system utilizing process exhaust as claimed in claim 10, characterized by indirect communication with outdoor ambient air at the unit air inlet. 20. The process exhaust of claim 19, wherein the heat recovery device comprises one or a combination of runner type, plate type, fin type, heat pipe type, shell and tube type, and intermediate heat carrier type. An energy-saving ventilation system that utilizes The heat recovery device is installed in the outside air processing unit, or installed on the second exhaust pipe, or installed on the first exhaust fan. 20. Energy saving ventilation system utilizing process exhaust according to 19. 2. The energy saving ventilation system utilizing process exhaust of claim 1, further comprising a second exhaust fan for exhausting unusable process exhaust within said production chamber.

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