JPH05322249A - Maintenance mechanism for clean tunnel - Google Patents

Abstract

PURPOSE:To obtain a maintenance mechanism for a clean tunnel, which is capable of effecting maintenance works in the clean tunnel without rapturing clean space in the clean tunnel. CONSTITUTION:In a clean tunnel having a clean space, constituted of an air supplying and discharging device 5 and an air cleaning device 3, and a manufacturing line and/or a transporting line 6, arranged in the clean space, airtight maintenance port 9, provided on the outer wall of the clean tunnel with a predetermined space, and a maintenance globe, attached to the airtight maintenance port 9 and used upon the maintenance of various lines 6, are provided.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean tunnel used for manufacturing and carrying semiconductors, and more particularly to maintenance of the clean tunnel.

[0002]

2. Description of the Related Art Conventionally, in the manufacture and transportation of semiconductors, a clean space constituted by an air supply / exhaust device and an air cleaning device and a production line and / or a transportation line arranged in the clean space have been used. The clean tunnel I have is being used. A conventional example of this clean tunnel will be described with reference to FIG.

In FIG. 5, the upper surface of the clean tunnel,
The bottom surface, the right surface, the left surface, the front surface, and the rear surface 6 are configured by connecting a plurality of clean modules 1 having the high-performance filter 3 and the air supply / exhaust device 5. Clean module 1
Is provided with a high-performance filter (HAPA filter) 3 on the side connected to the air supply zone A having the vent 2, the exhaust zone C having the exhaust 4, and the connection to the exhaust zone C. A clean space is formed by arranging the air exhaust port 13 on the side, and a clean tunnel portion B having the transfer device 6 therein is provided. The transport device 6 transports the work 8, and the air supply / exhaust device 5 constitutes a flow 7 of air supply / exhaust according to its air supply / exhaust function, and the flow 7 of air supply / exhaust is divided into each clean module 1, and a high performance filter (HAPA The dust in the air is filtered out by the filter 3 to form a clean air flow 7'and the clean tunnel portion B
Then, the work 8 on the transfer device 6 is kept clean. The air that has passed through the work 8 and the transfer device 6 is discharged to the exhaust zone C through the air outlet 13 together with the dust generated in the transfer device 6, becomes a supply / exhaust flow 7 and returns to the supply / exhaust device 5 for circulation. repeat.

[0004]

However, in the configuration of the above-mentioned conventional example, when some parts of the clean module 1 are opened for repairing or inspecting the carrier device 6, the external parts are not exposed to the outside. However, there is a problem that the dust inside the clean tunnel portion B contaminates the entire inside thereof and the clean space is destroyed.

Once the clean space is contaminated, the dust adheres to the details of the inside of the clean module 1 and the conveying device installed inside the clean module 1, and in order to restore the initial clean state again. However, there is a problem that a large amount of time and operating cost are required for cleaning and dust removal.

An object of the present invention is to solve the above problems and to provide a maintenance mechanism of a clean tunnel which can maintain the device in the clean tunnel portion B without destroying the clean space of the clean tunnel portion B. There is.

[0007]

In order to solve the above problems, a maintenance mechanism for a clean tunnel according to the present invention includes a clean space constituted by an air supply / exhaust device and an air cleaning device, and a clean space in the clean space. In a clean tunnel having an arranged production line and / or a transfer line, an airtight maintenance port provided at a predetermined interval on the outer wall of the clean tunnel, and airtightly attached to this airtight maintenance port during maintenance of the various lines It is characterized by having maintenance gloves to be used.

[0008]

The maintenance mechanism for a clean tunnel according to the present invention comprises an airtight maintenance port provided on the outer wall of the clean tunnel at a predetermined interval, and a maintenance glove which is airtightly attached to the airtight maintenance port and used for maintenance of the various lines. The maintenance glove 10 is used to maintain the airtightness between the clean tunnel and the outside air in order to repair the failure of the transfer line 6 in the clean tunnel, to inspect it, and to process the work with the abnormality. Up to this point, the necessary parts are carried to the maintenance position using the manufacturing line or the transfer line, and the work in which the abnormality has occurred or the removed parts are carried out using the manufacturing line or the transfer line for maintenance work. be able to. By doing this, as compared with the case of performing maintenance by opening the inside of the clean tunnel to the outside air as in the conventional example, it is possible to significantly reduce the time and operation cost required to return to the initial clean state. it can.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a maintenance mechanism for a clean tunnel according to the present invention will be described with reference to FIGS.

FIG. 1 is a sectional view of a clean tunnel using this embodiment, and FIG. 2 is a perspective view of the appearance of FIG.

1 and 2, a plurality of clean modules 1 having a high-performance filter (HAPA filter, etc.) 3 on the top, bottom, right, left, front, and rear surfaces of the clean tunnel, and the air supply / exhaust device 5. It is configured by connecting and. The clean module 1 includes an air supply zone A having a ventilation port 2, an exhaust zone C having an exhaust port 4, and a high performance filter (HAPA filter or the like) 3 on the side connected to the air supply zone A. An air outlet 13 is arranged on the side connected to C to form a clean space, and
A clean tunnel section B having a transfer line 6 inside thereof
With. The transfer line 6 transfers the work 8, and the air supply / exhaust device 5 uses the air supply / exhaust function to supply / exhaust flow 7
(Cleanliness class about 1 million), the air supply / exhaust flow 7 is divided into each clean module 1, and the high-performance filter (HAPA filter, etc.) 3 filters out dust in the air to clean air flow. 7 '(cleanness class about 1) enters the clean tunnel portion B, and the work 8 on the transfer line 6 is kept clean. The air passing through the work 8 and the transfer line 6 is dust generated in the transfer device 6 (cleanliness class: 100,000 to 1,000,000)
At the same time, it is discharged to the exhaust zone C through the air discharge port 13, becomes a supply / exhaust flow 7 and returns to the supply / exhaust device 5 to repeat circulation. In this way, the clean tunnel portion B of each clean module 1 forms a continuous clean space (clean degree class 1).

The above is a description of the structure of a normal clean tunnel, and the structure of this embodiment will be described below with reference to FIGS.

1 to 4, a maintenance mechanism for a clean tunnel according to the present embodiment has an airtight maintenance port 9 provided at a predetermined interval on the outer wall of each clean module 1 of the clean tunnel, and this airtight maintenance port 9 An airtight maintenance glove 10 (for example, a rubber glove with a flange) that is airtightly attached to and used for maintenance of the various lines 6 is provided. The airtight maintenance port 9 has a hole for attaching the maintenance glove 10 and a pair of cover guides 12. The airtight maintenance port 9 is always airtightly closed by the cover 11 to prevent a decrease in pressurization inside the clean module 1 and prevent dust from entering. Is being prevented.

When a failure of the transfer line 6 in the clean tunnel or an abnormality of the work 8 occurs, the cover 11 of the airtight maintenance port 9 of the clean module 1 in which these abnormalities occur is removed from the cover guide 12, and instead. , Maintenance glove 10 cover guide 12
Insert it into the groove. In this case, maintenance glove 1
The flange portion of 0 and the cover 11 are brought into close contact with each other, and these are brought into close contact with the airtight maintenance port 9 so that both of them are moved laterally together while preventing clean air from flowing out from the airtight maintenance port 9. The maintenance glove 10 is installed at a predetermined position. Of course, the groove portion of the cover guide 12, the cover 11 and the maintenance glove 10 are manufactured so that airtightness can be maintained during and after the insertion work. After the maintenance gloves 10 are installed, the maintenance gloves 10 are used to carry the necessary parts while maintaining the airtightness between the clean tunnel and the outside air, and the necessary parts are transferred to the maintenance position using the manufacturing line or the transfer line, causing abnormalities. Maintenance work is carried out by carrying out the work or the removed parts that have occurred using the manufacturing line or the transfer line. When the maintenance is completed, the flange portion of the maintenance glove 10 and the cover 11 are brought into close contact with each other, and these are brought into close contact with the airtight maintenance port 9 so that both of them are moved laterally together. The maintenance glove 10 is removed from the airtight maintenance port 9 and the cover 11 is returned to its original position while preventing it from flowing out. By doing this, as compared with the case of performing maintenance by opening the inside of the clean tunnel to the outside air as in the conventional example, it is possible to significantly reduce the time and operation cost required to return to the initial clean state. it can. For example, in the case of a clean tunnel in which ten clean modules 1 are connected, the time required to return to the initial clean state is about 1/100 and the operating cost is about 1/100.

The maintenance mechanism of the clean tunnel according to the present invention is not limited to the above embodiment, but various modes are possible. For example, in this embodiment, the maintenance glove 10
Is a rubber glove with a flange, but the material is not limited to this as long as the material does not leak air and generates little dust. Further, the position of the airtight maintenance port 9 and the airtight structure are not limited to those in this embodiment, and can be freely designed. Also, maintenance gloves 10
Is always attached to the airtight maintenance port 9, and when not in use, maintenance gloves 1
It is also possible to turn 0 over and pull it out.

[0016]

The maintenance mechanism of the clean tunnel according to the present invention includes an airtight maintenance port provided on the outer wall of the clean tunnel at a predetermined interval, and airtightly attached to the airtight maintenance port to maintain various lines in the clean tunnel. This maintenance glove 10 is used when maintenance work for the transfer line 6 in the clean tunnel needs to be repaired or inspected, or if an abnormal work is removed by using the maintenance glove that is sometimes used. While maintaining the airtightness between the parts, the necessary parts are transferred to the maintenance position using the manufacturing line or the transfer line, and the defective work or removed parts are transferred using the manufacturing line or the transfer line. Maintenance work can be performed. By doing this, as compared with the case of performing maintenance by opening the inside of the clean tunnel to the outside air as in the conventional example, it is possible to significantly reduce the time and operation cost required to return to the initial clean state. it can. For example, in the case of a clean tunnel in which 10 clean modules 1 are connected, the time required to return to the initial clean state is about 1/100 and the operating cost is 1/100.
It will be about.

[Brief description of drawings]

FIG. 1 is a sectional view of a clean tunnel using an embodiment of a clean tunnel maintenance mechanism of the present invention.

FIG. 2 is a perspective view of the appearance of FIG.

FIG. 3 is a partially enlarged view of FIG.

FIG. 4 is a partially enlarged view of FIG.

FIG. 5 is a cross-sectional view of a conventional clean tunnel.

[Explanation of symbols]

 A Air supply zone B Clean tunnel part C Exhaust zone 1 Clean module 2 Vent 3 High performance filter (air purifier) 4 Exhaust 5 Air supply / exhaust 6 Transport line 7 Air supply / exhaust flow 7'Clean air flow 8 Work 9 Airtight maintenance port 10 Maintenance gloves 11 Cover 12 Cover guide 13 Air outlet

Claims (1)

[Claims] 1. A clean tunnel having a clean space constituted by an air supply / exhaust device and an air cleaning device, and a production line and / or a transfer line arranged in the clean space, on a outer wall of the clean tunnel. A maintenance mechanism for a clean tunnel, comprising: an airtight maintenance port provided at a predetermined interval, and a maintenance glove that is airtightly attached to the airtight maintenance port and used for maintenance of the various lines.