JP3183066B2 - Transport system - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a transfer system for transferring a substrate in a clean room used for manufacturing a semiconductor device such as a super LSI.

[0002]

2. Description of the Related Art As a prior art relating to a clean room, a separate volume Nikkei Microdevice 1988, No. 2. Some of the equipment and equipment described in Chapter 6, "Proposing a process line that does not expose wafers to the atmosphere".

[0003]

However, in the above-mentioned prior art, there is a problem that a large amount of cost is required for maintenance and management of the clean room, and the flexibility of the clean room configuration is poor.

[0004]

The above object can be attained by reducing the cost related to energy consumption in the maintenance and management of a clean room. For example, the cost required for producing a clean gas that does not contain pollutants (hereinafter referred to as clean air) is reduced.

The above problem can be solved by adopting a structure in which a transport path for products in a clean room is unitized.

[0006]

The amount of clean air consumed has a substantially positive correlation with the internal volume of the clean room. Therefore, it is possible to reduce the amount of clean air consumed by reducing the internal volume. Also, by increasing the conductance of the filter used for removing contaminants, the cost of producing clean air per unit volume can be reduced.

[0007] Further, by unitizing the transport path, it is easy to change the arrangement and configuration of the manufacturing apparatus.

[0008]

Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1) A first embodiment of the present invention will be described with reference to FIGS. FIG. 1 shows a configuration of a clean room using the present invention. The substrate to be processed is the transfer path 102
Is transported between the processing apparatus or the inspection apparatus 101.
The transport path 102 is a tunnel filled with clean air (hereinafter, a clean tunnel). It is only necessary to clean the inside of the clean tunnel, and the volume of the area that fills the clean air can be made smaller than in the conventional clean room, so that the consumption of clean air can be reduced. FIG. 1 shows an example in which seven processing devices or inspection devices are connected, but the number of processing devices or inspection devices and the connection relationship of the transport paths may be other than those shown in FIG.

[0010] Each manufacturing apparatus, inspection apparatus and the like are connected to a clean tunnel, and it is not always necessary to clean the atmosphere around the manufacturing apparatus. A mechanism for taking out clean air is provided as a utility in the clean room. By using in combination with a mechanism capable of shutting off outside air, a desired place can be locally cleaned as needed. This can be used when it is necessary to clean the periphery of the apparatus for maintenance work of each manufacturing apparatus and inspection apparatus.

FIGS. 2 to 9 show components of the clean tunnel. 2 shows a straight line portion, FIG. 3 shows a curved portion, FIGS. 4 and 5 show horizontal branch portions, and FIGS. 6 and 7 show vertical branch portions. FIG. 8 shows a cross section of the clean tunnel. FIG.
Denotes a take-in / take-out unit for putting a substrate to be processed into or out of the clean tunnel. The clean tunnel is used to fill the transfer path of the substrate to be processed between the manufacturing facilities with a clean atmosphere from which contaminants have been removed. Dry nitrogen or dry air is used as the atmosphere gas, and the inside of the clean tunnel is filled at a slightly higher pressure than the outside. By using a clean tunnel, the allowable concentration of pollutants such as dust in the clean room can be increased. Therefore, the contaminant removal processing becomes unnecessary, or the conductance of the flow path that takes in outside air into the clean room can be increased. Therefore, the consumption of clean air can be reduced.

The upper portion of the clean tunnel is made of a transparent material such as glass so that the inside of the tunnel can be grasped visually. The surface is made conductive to prevent charging. When a transport trouble occurs, a trouble occurrence site, a cause, and the like can be easily specified, so that maintenance is easier than in the case of using an opaque material, so that an operation rate can be improved. Further, it is configured such that energy such as ultraviolet rays for the semiconductor device, which may destroy the product, can be cut off.

The constituent units (hereinafter referred to as units) of the clean tunnel shown in FIGS. 2 to 9 can be easily replaced for each constituent element when a trouble such as a failure occurs or when the route of the transport path is changed. Additions and changes are possible. By using these units, a clean tunnel having a high degree of freedom in the configuration of the transport route can be obtained.

FIG. 9 shows the take-in / take-out unit 916. The take-in / out unit 916 includes the manufacturing equipment connected to the clean tunnel 917 and the clean tunnel 9.
17, or the unprocessed substrate 903 in the clean tunnel 917.
And a unit for taking out the substrate to be processed 903 from the clean tunnel 917 to the outside of the clean tunnel 917. When the substrate 901 and the substrate 903 to be processed are taken out of the clean tunnel 917 and transported to the take-out unit 916 from the clean tunnel 917, the gate 921 is opened after the sealing cover 918 is used to seal the base 901 and the substrate 903 to be processed. Is taken out. After the take-out processing, a clean atmosphere gas such as dry nitrogen or dry air is blown into the take-in / take-out unit to remove contaminants, and then the gate valve 920 is opened to open to the clean tunnel 917 side. Conversely, the substrate to be processed 903
When taking in the take-in / out unit 916
The processing target substrate 903 loaded with the sealing cover 918 attached thereto is blown, for example, with dry nitrogen or dry air into the taking-in / out unit 916 to remove contaminants, and then the sealing cover attaching / detaching mechanism 919 is used. 918 is removed, the gate valve 920 is opened, and transported into the clean tunnel 917. The same applies to the case where the manufacturing equipment and the substrate to be processed 903 are taken in and out. However, for example, a step of blowing dry nitrogen or dry air to remove contaminants can be omitted. The take-in / out unit can be freely attached to each port of each unit.

FIG. 10 shows a signal system of the clean tunnel. Each unit 10 that constitutes one clean tunnel
Reference numerals 23 each have a unique identification code and a communication device. In addition, each manufacturing apparatus also has a unit 10
It has the same functions and unique identification codes as those of 23, and sends a signal of the apparatus status (substrate processing waiting, substrate processing, pause, maintenance work, occurrence of abnormality, etc.) to the transport controller 1022, Signal from the device 1022 can be received. The identification codes are exchanged between the adjacent units 1024, and the units 102 connected to the own unit 1023 are exchanged.
4 is recognized. The unit identification code includes a code indicating the type and function of the unit and a code unique to the unit. The transport controller 1022 can recognize the function from the identification code of each clean tunnel constituting unit. The transfer controller 1022 and each clean tunnel constituting unit 1023 exchange the following information. Each manufacturing facility also has the same communication function as each clean tunnel constituent unit.

Information sent from the transport controller to each clean tunnel component Connection information request signal Transport direction instruction signal Operation confirmation request signal Board position information request signal Board identification code information request signal Operation command signal to each unit Other clean tunnel configuration Information sent from the element to the transport controller Identification code of each unit Identification code of the unit connected to each port of each unit Abnormality presence / absence signal Description of board position signal Board transfer direction signal Board identification code Others First clean tunnel path Is completed, the transport controller sends a connection information request signal to each clean tunnel constituting unit. Each unit that has received the connection information request signal sends the identification code of its own unit and the identification code of the unit connected to each port of its own unit to the transport controller. Upon receiving these signals, the transport controller recognizes and stores the connection relationship of each unit, and displays it on the output device. The connection information request signal may be automatically sent from the transport controller at any time. Also, a connection information request signal can be sent to each unit at any time by an instruction of an operator using an input device connected to the transport controller.

The substrate to be processed is transferred in a clean tunnel by a transfer table in lot units. Among the loading / unloading units, the unit that puts the substrate to be processed into the clean tunnel first has an identification code (hereinafter referred to as “lot number”) and a product name input mechanism unique to the lot of the substrate to be processed. The lot number and the product name are transmitted to the transport controller every time. When each unit receives a new lot, it sends a substrate position signal to the transport controller.
The transfer controller associates the substrate position signal with the lot number and grasps the position of the input lot in the clean tunnel. The transport controller internally holds a table describing the order in which the products are to be sent to each manufacturing apparatus for each product name, and transports each lot according to this table. Further, the transport controller determines which route to transport in the clean tunnel so as to maximize the throughput based on the limiting conditions for maintaining the quality of the product. In accordance with the determined transport path, the transport controller sends a transport direction instruction signal to each unit, and instructs each lot transport path to each unit. Further, the transport controller transmits a substrate position information request signal to each unit as needed. Each unit that has received the board position information request signal transmits its position to the transport controller if there is a lot in its own unit. The transfer may be performed not for each lot but for each sheet.
In this case, the operation of each unit is the same.

The transfer table may be provided with a communication function and a function for holding the names of lots being transferred. In this case, the transfer controller transmits a board identification code request signal as needed, the transfer table receives the board identification code request signal, and transmits the name of the lot being transferred to the transfer controller accordingly. Alternatively, the lot name can be transmitted to the transfer controller each time the transfer table moves.

Using the input / output device connected to the transport controller, display information such as connection information of each unit of the transport controller, information of a substrate position, a state of each manufacturing apparatus, a state of each unit, and the like. Further, the operator can directly instruct the transfer controller on the transfer direction of the substrate to be processed and the like.

When a transport trouble occurs, the unit at the occurrence site sends the occurrence of the abnormality, the content of the abnormality and the identification code of the unit to the transport controller. The transport controller analyzes the content of the abnormality, and performs operations such as changing the transport path, stopping the transport operation, and displaying an error on the output device based on the analysis result. The transport controller can also inquire of each unit at any time whether or not an abnormality has occurred.

FIG. 11 shows a unit 1101 for supplying clean air into the clean tunnel (hereinafter referred to as a clean air supply unit 1101). The clean air supply unit 1101 has the same function as a straight line section, a curved section, and the like, and can be used in place of these units. This figure shows a clean air supply unit having the same function as that of the straight portion, but the same applies to a clean air supply unit having the same function as that of the curved portion. The clean air supply unit has a blower, a pollutant removal mechanism, and a temperature / humidity control mechanism inside.
02 and a transport mechanism 1103. A desired cleanliness can be obtained by replacing the contaminant removing mechanism with one having a contaminant removing ability suitable for processing. When the temperature and humidity control mechanism is unnecessary, it can be removed. The clean air supply unit supplies clean air controlled to a desired degree of cleanliness, temperature and humidity into the clean tunnel in accordance with a signal from the transport controller.

Atmospheric monitors are unitized at various places in the clean tunnel to monitor the amount of dust, humidity, temperature and the like in the clean tunnel. Instead of measuring the amount of dust and the like, the state of the substrate to be processed such as the amount of dust adhering to the substrate to be processed may be monitored. The obtained atmosphere data is transmitted to the transport controller at any time. The transport controller evaluates the atmospheric data. The maintenance work of the clean tunnel is performed when the atmosphere is at a level unsuitable for processing the substrate to be processed, or periodically or when a trouble such as a failure occurs. Maintenance work includes (1) cleaning inside the clean tunnel and (2) repairing and replacing units.

In the cleaning operation of the clean tunnel, a transfer controller or an operator determines an execution date and an execution place in consideration of an output result of an atmosphere monitor, a state of a product, an interval from a previous cleaning operation, a change operation of a transfer route, and the like. . Cleaning work is carried out by transporting a table for cleaning work inside the clean tunnel. The cleaning platform can remove contaminants inside the clean tunnel.

When a certain unit fails, the unit transmits a signal indicating the presence or absence of an abnormality and a content signal to the transport controller together with the identification code of the unit. Or, if the unit cannot transmit the failure of its own unit to the transfer controller, the transfer controller determines the failure of a certain unit based on the standard operation time of each unit, the movement of the substrate to be processed, and the operation of each unit. It can be determined independently. The transport controller that detects the failure of a certain unit outputs (1) the content of the failure (2) to the output device.
Displays the location of the failed unit, requests maintenance personnel to repair and replace the failed unit, searches for a route that avoids the failed unit and transports the substrate to be processed. Use and continue transport.

[0025]

When the clean tunnel constituting unit is replaced for maintenance or the like, the sealing stand is transported to a portion connected to each port of the unit to be replaced, and the inside of the clean tunnel is removed when the unit is removed. Prevent exposure to outside air. In addition, when a certain unit needs to be shut off, such as when the atmosphere monitor indicates an increase in the amount of contaminants around a certain unit, a sealing stand can be used similarly.

[Brief description of the drawings]

FIG. 1 is a block diagram of a manufacturing system using a clean tunnel.

FIG. 2 is a perspective view of a straight portion of the clean tunnel constituting unit.

FIG. 3 is a perspective view of a curved portion of the clean tunnel constituting unit.

FIG. 4 is a perspective view of a horizontal branch portion of the clean tunnel constituting unit.

FIG. 5 is a cross-sectional view of a horizontal branch portion of the clean tunnel constituting unit.

FIG. 6 is a perspective view of a vertical branch portion of the clean tunnel constituting unit.

FIG. 7 is a vertical sectional view of a vertical branch portion of the unit.

FIG. 8 is a sectional view of a clean tunnel.

FIG. 9 is a sectional view of a take-in / take-out unit of the clean tunnel constituting unit.

FIG. 10 is an explanatory diagram of a signal system of a clean tunnel.

FIG. 11 is a perspective view of a clean air supply unit.

[Explanation of symbols]

 101: Processing device or inspection device 102: Transport path

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) H01L 21/68 F24F 7/06

Claims (3)

(57) [Claims] 1. A transport path constituted by connecting a plurality of units.
Transport system for transporting samples in a clean atmosphere inside
A is, higher than the outside internally clean atmosphere of the transport system
Pressure maintaining means for maintaining a constant pressure, and a part of the transport path, which has an information processing function and a communication function.
Plural unit means having different codes and information processing function
Communication unit, an identification code, and a gate valve.
Connected to the knitting means and transported along the transport path of the unit means
To take the sample in and out of the transport path
Communication unit of the unit means.
Function to transmit the identification code to other unit means.
Or identification of said other unit means from other unit means
A transport system for receiving code information . 2. The unit means of the transport system is partially
The unit is provided with a transparent wall surface through the transparent wall surface.
Note that the transport path inside the means is observable from outside.
2. The transport system according to claim 1, wherein the transport system comprises: 3. The transport system processes the sample.
A connection between a plurality of processing devices.
2. The transport system according to 1 .