JP2004303835A - Substrate storing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate storing device which is capable of storing substrates efficiently and protecting them against contamination. <P>SOLUTION: The substrate storing device 20 comprises a load port 24 which mounts and positions carriers 22 containing substrates 21 and opens or closes the front doors 23 of the carriers 22, a robot 26 which takes out the substrates 21 from the carriers 22 and moves and arranges them on a substrate storing shelf 25, and the substrate storing shelf 25 where the substrates 21 are arranged and stored in layers sheet by sheet. A space within the movable range of the robot 26 and the substrate storing shelf 25 are filled up with clean nitrogen gas through a gas inlet 28A and kept in a clean nitrogen gas atmosphere. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a substrate storage device used in a manufacturing process of a semiconductor device, a flat panel display device, a magnetic head, and the like, and particularly to a substrate storage device suitable for storing a large-sized substrate.
[0002]
[Prior art]
Conventionally, a work-in-progress or final product substrate between semiconductor manufacturing processes accommodates a dozen or more to several tens of substrates in a single carrier. It has been transported by the operator. The substrate is stored in a substrate storage shelf or the like while being stored in the carrier until it is supplied to the next process due to a difference in process time or machine operation time between processes.
[0003]
FIG. 1 is a diagram showing a conventional board storage shelf. As shown in FIG. 1, a plurality of shelves 11 are provided on a substrate storage shelf 10, each of the shelves 11 is provided with a door 12 for isolating it from the external environment, and 14 are stored. The substrate storage shelf 10 is introduced and filled with clean dry air, nitrogen, or the like to prevent contamination of the substrate and the carrier.
[0004]
[Patent Document 1]
JP-A-11-31729 [0005]
[Problems to be solved by the invention]
By the way, in order to reduce the manufacturing cost of a semiconductor device or the like, the size of the substrate is being enlarged. The diameter of a substrate for a semiconductor device is shifting from 200 mm to 300 mm in the past, and in response to such an increase in size, not only a manufacturing device and a transport device, but also a carrier for storing substrates and a substrate storage shelf have a substrate size. It is necessary to correspond to. In particular, when the size of the substrate is increased, the size of the carrier is increased. Therefore, even if the same number of substrates are stored as before, the size of the substrate storage shelf is further increased. Therefore, there is a limit to space saving in the conventional storage method for each carrier.
[0006]
In addition, a substrate usually manufactured by the same manufacturing method is stored in one carrier. However, in many cases, all the storage spaces in the carrier are not used and there is a vacant space. Usage efficiency is low.
[0007]
On the other hand, if the substrate is taken out of the cassette and is simply stored, the surface of the substrate may be contaminated. As a cassette for accommodating 300 mm substrates, FOUP (Front Open Unified Pod) is standardized by SEMI (registered trademark, Semiconductor Equipment and Materials International). In the FOUP, a door for taking in and out the substrate is provided at the front, and the door is moved below the FOUP and opened. A cassette for a 200 mm substrate (for example, SMIF Pod (Standard Mechanical Interface)) was taken out from the lower surface of the cassette. However, in the case of a FOUP, the space below the FOUP cannot be used, so more space is required. Will occupy.
[0008]
Therefore, an object of the present invention is to provide a substrate storage device that efficiently stores a substrate and prevents contamination of the substrate.
[0009]
[Means for Solving the Problems]
According to one aspect of the present invention, a substrate storage container for storing a substrate is placed thereon, and a load port for opening and closing a door of the substrate storage container, a substrate storage shelf for storing the substrate, and a loader mounted on the load port. There is provided a substrate storage device, comprising: a substrate transfer means for positioning a substrate between a substrate storage container and a substrate storage shelf, wherein the substrate storage shelf is arranged in layers for each substrate and stored.
[0010]
ADVANTAGE OF THE INVENTION According to this invention, a board | substrate is taken out from a board | substrate storage container, and it arrange | positions at a board | substrate storage shelf one by one at a layer form, and can use a storage space efficiently and can save space.
[0011]
The apparatus further includes a gas introduction unit for filling a clean gas, and a circulating unit that circulates the clean gas, wherein the substrate storage shelf and the substrate transfer unit are shut off from an external environment, and the substrate is exposed to the clean gas. Configuration. By keeping the inside of the substrate storage device in a clean atmosphere, contamination of the substrate can be prevented.
[0012]
The substrate storage shelf has a substrate storage portion arranged for each substrate, the substrate storage portion is arranged in a circumferential or polygonal shape, and the substrate storage shelf is rotated to move a loading / unloading port of the substrate storage portion to a substrate transfer means. To face. Since a large number of substrate storage units can be arranged on the substrate storage shelf and rotated to carry in and out the substrate, more substrates can be efficiently stored in a certain space.
[0013]
The apparatus further includes container transfer means for transferring the substrate storage container, and a container storage shelf for storing the substrate storage container. Provide a container storage shelf for the substrate storage container near the substrate storage shelf, and store the empty substrate storage container and quickly prepare the substrate storage container when unloading the substrate. In comparison, the number of transports by the transport trolley or the like can be reduced.
[0014]
Each of the boards has a different board identification mark, and the board identification mark is associated with the position of the stored board storage unit. By associating the board identification mark with the board storage position where the board is stored on the production management system, it is possible to manage the location and the processing state of the board.
[0015]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(First Embodiment)
FIG. 2A is a top view showing a schematic configuration of the substrate storage device according to the embodiment of the present invention, and FIG. 2B is a sectional view. Referring to FIGS. 2A and 2B, the substrate storage device 20 places and positions a carrier 22 for accommodating a substrate 21 on which an intermediate product of a semiconductor device or the like is formed. , A robot 26 for taking out the substrate 21 from the carrier 22 and moving and placing it on the substrate storage shelf 25, and a substrate storage shelf 25 for arranging and storing the substrates 21 one by one in layers. The space within the movable range of the robot 26 and the substrate storage shelf 25 are filled with clean nitrogen from the gas introduction unit 28A, and are kept in a clean nitrogen gas atmosphere.
[0016]
The front door 23 of the carrier 22 is opened and closed. For example, in a FOUP used for a substrate 21 of 300 mm, the door 23 is opened and closed vertically. Substrates 21 are arranged on the carrier 22 in a layered manner at regular intervals in the vertical direction. Further, the inside of the carrier 22 is maintained in a highly clean atmosphere (for example, a cleanliness class 1 or higher), and has a structure for preventing external contamination and internal dust generation.
[0017]
FIG. 3 is a conceptual diagram showing the load port 24 in an enlarged manner. Referring to FIG. 3, after the carrier 22 is placed on the load port 24 and the front surface of the carrier 22 is positioned on the load port 29 (shown in FIGS. 2A and 2B) on the substrate storage device 20 side, The door 23 on the front of the carrier 22 is moved downward to open toward the inside of the substrate storage device 25. The carrier 22 and the frame (not shown) of the port door 29 on the substrate storage device 20 are in close contact with each other so that the atmosphere of the external environment does not enter the substrate storage device 25 during positioning. The opening and closing of the port door 29 is such that the door 23 of the carrier 22 is opened after the port door 29 is first opened. In addition, the gas of the external environment atmosphere enclosed in the space formed between the door 23 and the port door 29 of the carrier 22 may be exhausted. The load port 24 is provided with a mechanism that opens and closes and holds the door 23 and the port door 29 of the carrier 22.
[0018]
FIG. 4 is an enlarged view of a main part of the load port and the carrier. Referring to FIG. 4, the load port 24 is provided with a gas filling section 30 for filling the carrier 22 with nitrogen gas. The gas filling section 30 is connected to a gas cylinder or the like (not shown) via a pipe 37A and a valve 37B. It is connected. The gas filling section 30 is fitted with an automatic valve 31 provided on the carrier 22, and clean nitrogen gas or the like is introduced into the carrier 22. In particular, after the substrate 21 is stored in the carrier 22 from the substrate storage shelf 25, the inside of the carrier can be maintained in a clean atmosphere by filling with clean nitrogen gas or the like.
[0019]
Returning to FIGS. 2A and 2B, the robot 26 mounts two arms 32 on which the substrate is mounted, an X stage 33 for translating the arm 32 in the X direction, and the arm 32 and the X stage 33. And a Y stage 35 for mounting the arm 32, the X stage 33, and the rotary stage 34 and moving them in the Y direction, and holding the Y stage 35 from both sides. The lift 36 moves in the direction (height direction). The arm 32 is made of, for example, two thin plates made of metal, resin, or a combination thereof, and a suction mechanism may be provided on a part of the arm 32 to more reliably hold the substrate. Note that one more arm may be provided at the center between the two arms 32 to support the center of the substrate. It is possible to safely transfer the substrate 21 which is large and thin and is easily broken by warpage.
[0020]
Further, the robot 26 used is one that conforms to a low dust generation degree of cleanliness of 1 or more. The substrate taken out of the carrier can be transferred without being contaminated by dust, oil mist, or the like.
[0021]
Further, the robot 26 takes out the substrates 21 in the carrier 22 one by one and transfers them to the empty position 25A of the substrate storage shelf 25. At this time, the board 21 and the position where the board 21 is transferred are associated with, for example, the board identification number board described on the board surface and the shelf position.
[0022]
As shown in FIG. 2B, the substrate storage shelves 25 are configured to stack the substrates 21 one by one in a layer at regular intervals, and as shown in FIG. Can be arranged.
[0023]
FIG. 5 is a conceptual diagram showing the substrate storage shelf 25 in an enlarged manner. Referring to FIG. 5, the substrate storage shelf 25 has a cylindrical shape, is divided into four in the rotation direction, and the substrate 21 is disposed in each of the divided regions 25A to 25D, and the substrate 21 is efficiently stored. I can do it. The substrate 21 is arranged in layers by a holding mechanism 40 (shown in FIG. 7). Note that the substrate storage shelf 25 is not limited to a cylindrical shape, and as shown in FIG. 6, the substrate storage shelf 38 has a polygonal column shape such as a hexagon, and the substrate 21 is placed in each of the six divided regions 38A to 38F. It may be arranged. The amount of storage substrates can be increased without significantly increasing the bottom area of the substrate storage shelf 38.
[0024]
FIG. 7 is an enlarged view showing a substrate holding mechanism of the substrate storage shelves 25 and 38 shown in FIG. 5 and FIG. Referring to FIG. 7, the substrate holding mechanism 40 is provided with a support portion 41 for holding the outer peripheral portion of the substrate from the back surface of the substrate 21. The front surface and the center of the substrate holding mechanism 40 are opened, and an opening having a height corresponding to the thickness of the substrate is provided in a space necessary for the robot 26 to carry in and out. The holding mechanism 40 of the substrate 21 is formed of a resin such as polycarbonate or PEEK (polyetheretherketone) mixed with a conductive material such as carbon, and is formed of a non-corrosive alloy such as stainless steel, for example, stainless steel. Is also good. The substrate holding mechanism 40 may be a cartridge that can store a certain number of sheets, for example, 2, 5, 10, 13, or the like. By making the cartridge detachable from the substrate storage shelf 25, the number of sheets that can be stored in the substrate storage shelf 25 can be adjusted as needed to increase the degree of freedom. In addition, by appropriately setting the width of the claw supporting the substrate of the support portion 41, even a substrate storage shelf for storing a substrate having a diameter of 300 mm, for example, stores a substrate having a smaller diameter such as 200 mm. be able to.
[0025]
Returning to FIG. 2, the substrate storage shelf 25 is provided with a rotation mechanism 42 for rotating the substrate storage shelf 25 below. Compared with a conventional fixed substrate storage shelf, the number of substrates that can be stored can be increased even in the same space, and expansion of a substrate storage device accompanying an increase in the size of substrates can be suppressed. The rotation mechanism 42 includes a rotation shaft 43 of the substrate storage shelf 25, a motor 44 and a belt 45 for driving the rotation shaft 43, and supports the rotation shaft 43 to clean the atmosphere of the substrate storage shelf 25 and the external environment where the motor 44 is provided. It is composed of a magnetic fluid seal 46 for isolation. Organic gas and the like generated from the bearing of the rotating shaft 43 can be prevented from contaminating the atmosphere in the substrate storage device 20. Note that a low dust generation type bearing may be used instead of the magnetic fluid seal 46.
[0026]
The substrate storage device 20 is provided with a gas introduction unit 28A to which clean dry air, nitrogen gas, argon gas, or the like is supplied from the outside, for example, on the top surface 20A. These gases are preferably liquid air or liquid nitrogen or liquid argon evaporated. Contamination can be prevented by oil mist, low molecular weight organic substances, sulfites and the like in the air. In the case of air, an ULPA filter (ultra low penetration air filter), a chemical air filter, or the like may be provided on the top surface 20A of the substrate storage device 20 and may be introduced into the substrate storage device 20 after passing through these filters. . Particles and gaseous pollutants can be further removed.
[0027]
In addition, these supplied gases flow through the space where the substrate 21 in the substrate storage device 20 is stored mainly as a downflow from the top to the bottom, and a punch-like fine gas provided on the lower surface of the substrate storage device 20. The gas is discharged from the gas discharge unit 28B provided in the bottom plate 20B of the substrate storage device 20 through the opening 25-1 through the outside of the substrate storage device 20, for example, through an exhaust pipe. Balancing the supply side and the discharge side, for example, making the opening area of the gas introduction unit 28A opening to the substrate storage device 20 larger than the opening area of the gas discharge unit 28B opening to the substrate storage device 20. Thus, the inside of the substrate storage device 20 is controlled to a positive pressure, and the inflow of gas from the external environment is prevented.
[0028]
FIG. 8 is a block diagram of a control circuit of the substrate storage device 20. Referring to FIG. 8, the control circuit 50 of the substrate storage device 20 includes a CPU 51, a memory 52 storing a program or the like for controlling each control unit, a load port control unit 53, a robot control unit 54, It comprises a board storage shelf control unit 55 and an input / output unit 56 for transmitting and receiving data to and from a PC or the like on which a production management system or the like to be described later operates.
[0029]
The control units 53, 54, 55, and 56 receive instructions such as a board identification number, a container identification number of a carrier, and a transfer source and a transfer destination of a board. The substrates are transferred to desired locations in cooperation with each other. For example, in order for the robot 26 to take out a substrate at a desired shelf position, a command is output from the CPU 51 to the robot control unit 54 and the substrate storage shelf control unit 55, and the substrate storage shelf 25 is rotated, and the desired substrate storage shelf 25 is rotated. Is positioned so as to face the robot.
[0030]
According to the present embodiment, the substrates 21 in the carrier 22 can be efficiently stored by being transferred to the substrate storage shelf 25 on a substrate-by-substrate basis, and even if the substrates 21 are enlarged, space can be saved. . Further, since the degree of cleanliness in the substrate storage device 25 is maintained, contamination due to dust or the like can be prevented.
[0031]
(Second embodiment)
The substrate storage device according to the second embodiment of the present invention is characterized in that a carrier stocker is provided in the substrate storage device according to the first embodiment.
[0032]
FIG. 9 is a diagram conceptually showing the configuration of the substrate storage device according to the embodiment of the present invention. In the figure, parts corresponding to the parts described above are denoted by the same reference numerals, and description thereof will be omitted.
[0033]
Referring to FIG. 9, the substrate storage device 60 is supplied from the carry-in / out port 61 for carrying the carrier 22 containing the substrate 21 into or out of the substrate storage device 60, and supplied from the carry-in / out port 61. A load port 24 for placing and positioning the carrier 22 placed thereon and opening and closing a door on the front of the carrier 22, a robot 26 for taking out the substrate 21 in the carrier 22, moving and placing the substrate 21 on a substrate storage shelf 25, and one substrate 21 It is composed of a substrate storage shelf 25 for arranging and storing the carrier 22 in layers, a stocker 62 for storing the carrier 22, a stocker robot 63 for transferring the carrier 22 from the carry-in / out port 61 to the stocker 62 and the load port 24, and the like. .
[0034]
The carry-in / out port 61 receives the carrier 22 carried by the carrier trolley 64, for example, an AGV, transfers the carrier 22 to the stocker robot 63, and performs the reverse operation when carrying out.
[0035]
The stocker robot 63 places the received carrier 22 on the load port 24 or stores it on the designated empty shelf 65A of the stocker 62. In a series of these operations, a command is sent by a production management system described later, and the position of a shelf to be stored is specified according to the command. When the production management system issues a command to remove the carrier 22 containing the specified substrate 21, the stocker robot 63 takes it out of the shelf 65B where the carrier 22 is stored, and sends it to the designated destination. For example, the data is transferred to the load port 24 or the carry-in / out port 61.
[0036]
The stocker 62 is composed of a number of shelves 65 whose shelf positions have been identified. In the stocker 62, the empty carrier 22 after the substrate 21 is transferred to the substrate storage shelf 25 is stored in the stocker 62. When unloading the substrate 21, the carrier 22 can be quickly prepared, and there is no need to transport an empty carrier 22. Further, the carrier 22 in which the number of the substrates 21 near the number that can be stored in the carrier 22 may be stored. In this case, even if the entire carrier 22 is stored, the loss of the space is not so large, and the trouble of transferring the carrier 22 to the substrate storage shelf 25 can be omitted.
[0037]
FIG. 10 is a block diagram of the production management system. Referring to FIG. 10, the production management system 71 roughly manages the operation status of the production equipment 76 in each process of manufacturing a semiconductor device, and supplies materials to each process and intermediate products manufactured and processed by each process. The operation of a production equipment automation system 74 for managing the operations of the production equipment automation system 74, a transport trolley 84 for carrying in and out of each process of materials and intermediate products, a stocker 86 for storing materials and intermediate products, and a robot 85 for a substrate storage device. It comprises an automatic transport system 75 for managing. A database 77 is connected to the production management system 71, and registration information is recorded.
[0038]
The substrate storage device 78 belongs to the production facility automation system 74. The board identification number marked on the board 21 stored in the board storage device 78 is registered in the production management system 71. The board 21 stored in the carrier 22 is registered in the database 77 of the production management system 71 in association with the board identification number, the container identification number of the carrier 22, and the storage location. The substrate 21 is unloaded from the substrate storage device 78 based on the scheduler 72 referred to by the production management system 71, transferred by the transport trolley 84, and supplied to the production equipment station 79. The substrate 21 that has been subjected to the processing in the production equipment 76 is stored in the carrier 22, and communication is carried out from the production equipment station 79 to the transport trolley 84, the carrier 22 is transferred to the transport trolley 84, and the downstream It is transferred to the production equipment station 79 of the production equipment 76 of the process, the substrate storage device 78, or the like. These loading / unloading instructions are sent from the production management system 71 to the production equipment station 79, the load port 80 and the loading / unloading port 81 of the substrate storage device 78, the transport cart 84, the stocker 86, the substrate storage device robot 85, and the like. Alternatively, communication is performed between the production facility station 79, the load port 80 and the carry-in / out port 81 of the substrate storage device 78, the transport trolley 84, the stocker 86, the substrate storage device robot 85, and the like. When the carrier 22 accommodating the substrate 21 arrives at the production facility station 79 or the carry-in / out port 81 of the substrate storage device 78, the information of the arrived substrate 21 and the carrier 22 is automatically communicated one by one to the production management system, and the information of the database 77 is automatically transmitted. Is updated.
[0039]
Here, the substrate storage device 78 is the substrate storage device according to the first or second embodiment. The information of the substrates 21 stored in each position of the substrate storage shelf 25 of the substrate storage device 20 shown in FIGS. 2 and 9 and the information of the substrates 21 stored in the carrier 22 stored in the stocker 62 is stored in the production management. It is stored in the database 77 of the system 71. The robot 85 for the substrate storage device and the robot 83 for the stocker are controlled as a part of the automatic transfer system 75.
[0040]
In addition, by registering the substrate 21 for the production test and the condition of the production equipment 76 in the production management system 71 and storing it in the substrate storage device 78 of the present embodiment, the condition confirmation of the production equipment 76 is performed. The substrate 21 is automatically transferred from the substrate storage device 78 of the present embodiment to the production equipment station 79 of the production equipment 76 by the transport trolley 84 by simply instructing the production management system 71 to perform the processing of The wafer is automatically transferred by the transfer carriage 84 and returned to the substrate storage device 78. There are a small number and various types of substrates 21 for production tests and for confirming the condition of the production equipment 76. The substrate storage device 78 of the present invention can store the substrate 21 in a space-efficient manner, and can carry out the desired substrate 21 quickly. As a result, the time required for the production test and the test for confirming the condition of the production equipment 76 can be reduced, and the operation rate of the production equipment can be improved.
[0041]
FIG. 11 is a layout view of a semiconductor device production facility and the like. Referring to FIG. 11, the semiconductor device manufacturing equipment includes a production equipment 76 for each manufacturing process, a stocker 86 and a substrate storage device 78 for storing an intermediate substrate together with a carrier, a production equipment 76, a stocker 86, and a substrate. It is composed of a transport vehicle 84 to which the storage device 78 is connected, and a track 88 thereof.
[0042]
The substrate storage device 78 of the present invention is preferably provided on a track 88 on which a small amount of substrate is frequently conveyed. It is possible to reduce the amount of work of the transport cart 84 and quickly supply the substrates to the production equipment 76, and reduce the downtime of the production equipment 76 due to material waiting.
[0043]
Although the preferred embodiment of the present invention has been described in detail, the present invention is not limited to the specific embodiment, and various modifications and changes may be made within the scope of the present invention described in the claims. It is possible.
[0044]
In the above-described embodiment, a disk-shaped substrate has been described as an example. However, the present invention is also applicable to a rectangular or other rectangular or polygonal substrate, and is not limited to the shape of the substrate.
[0045]
In addition, the following supplementary notes are disclosed with respect to the above description.
(Supplementary Note 1) A load port on which a substrate storage container for storing a substrate is placed, and a door of the substrate storage container is opened and closed;
A substrate storage shelf for storing the substrate,
Between the substrate storage container and the substrate storage shelf mounted on the load port, comprising a substrate transfer means for positioning the substrate,
The substrate storage device is characterized in that the substrate storage shelves are arranged and stored in layers for each substrate.
(Supplementary Note 2) A gas introduction unit for filling a clean gas,
And a circulating means for circulating the clean gas,
The substrate storage shelf and the substrate transfer means are isolated from the external environment,
2. The substrate storage device according to claim 1, wherein the substrate is exposed to a clean gas.
(Supplementary Note 3) The substrate storage device according to Supplementary Note 2, wherein a filter that captures dust and / or an organic gas component is provided in the gas introduction unit.
(Supplementary Note 4) The substrate storage shelf has a substrate storage unit arranged for each substrate,
The substrate storage portion is arranged in a circumferential or polygonal shape,
The substrate storage device according to any one of Supplementary notes 1 to 3, wherein the substrate storage shelf rotates so that a loading / unloading port of the substrate storage unit faces the substrate transfer unit.
(Supplementary Note 5) The substrate storage device according to Supplementary Note 4, wherein the substrate storage unit is configured to store a predetermined number of substrates and be detachable.
(Supplementary Note 6) The substrate storage device according to any one of Supplementary Notes 1 to 5, wherein the load port is provided with a gas filling portion that fills a gas in a substrate storage container.
(Supplementary Note 7) Any one of Supplementary Notes 1 to 6, further including a container transfer unit that transfers the substrate storage container, and a container storage shelf that stores the substrate storage container. Substrate storage device.
(Supplementary Note 8) The substrate according to any one of Supplementary notes 1 to 7, wherein each of the substrates has a different board identification mark, and the board identification mark is associated with the position of the stored substrate storage unit. The substrate storage device according to any one of the preceding claims.
(Supplementary Note 9) Each of the substrate storage containers has a different container identification mark, and the substrate stored in the substrate storage container and the substrate storage container are associated with each other using the substrate identification mark and the container identification mark. 9. The substrate storage device according to any one of supplementary notes 1 to 8, wherein
(Supplementary Note 10) The substrate storage device according to any one of Supplementary Notes 7 to 9, wherein the substrate storage container is associated with a shelf position of a container storage shelf in which the substrate storage container is stored. .
[0046]
【The invention's effect】
As is apparent from the details described above, according to the present invention, a substrate storage shelf in which substrates are arranged in layers for each substrate is provided, and the substrate is kept in a clean atmosphere without being stored in each substrate storage container. Accordingly, it is possible to provide a substrate storage device that stores a substrate efficiently and prevents contamination of the substrate.
[Brief description of the drawings]
FIG. 1 is a diagram showing a conventional substrate storage shelf.
FIG. 2A is a top view illustrating a schematic configuration of a substrate storage device according to a first embodiment of the present invention, and FIG. 2B is a cross-sectional view.
FIG. 3 is a conceptual diagram showing a load port in an enlarged manner.
FIG. 4 is an enlarged view of a main part of a load port.
FIG. 5 is an enlarged conceptual diagram showing a substrate storage shelf.
FIG. 6 is an enlarged conceptual diagram illustrating another example of the substrate storage shelf.
FIG. 7 is an enlarged view showing a substrate holding mechanism of the substrate storage shelf shown in FIG. 5;
FIG. 8 is a block diagram of a control circuit of the substrate storage device.
FIG. 9 is a diagram conceptually showing a configuration of a substrate storage device according to a second embodiment of the present invention.
FIG. 10 is a block diagram of a production management system.
FIG. 11 is a layout view of a semiconductor device manufacturing facility and the like.
[Explanation of symbols]
Reference Signs List 20 substrate storage device 21 substrate 22 carrier 24 load port 25, 38 substrate storage shelf 26 robot 28A gas introduction unit 28B gas discharge unit 40 holding mechanism 42 rotation mechanism 62 stocker 63 stocker robot 65 shelf

Claims (5)

A load port for mounting a substrate storage container for storing a substrate and opening and closing a door of the substrate storage container,
A substrate storage shelf for storing the substrate,
Between the substrate storage container and the substrate storage shelf mounted on the load port, comprising a substrate transfer means for positioning the substrate,
The substrate storage device is characterized in that the substrate storage shelves are arranged and stored in layers for each substrate. A gas inlet for filling a clean gas,
And a circulating means for circulating the clean gas,
The substrate storage shelf and the substrate transfer means are isolated from the external environment,
The substrate storage device according to claim 1, wherein the substrate is exposed to a clean gas. The substrate storage shelf has a substrate storage unit arranged for each substrate,
The substrate storage portion is arranged in a circumferential or polygonal shape,
3. The substrate storage device according to claim 1, wherein the substrate storage shelf rotates so that a loading / unloading port of the substrate storage unit faces the substrate transfer unit. The substrate storage device according to any one of claims 1 to 3, further comprising container transfer means for transferring the substrate storage container, and a container storage shelf for storing the substrate storage container. . The said board | substrate has a different board | substrate identification mark, respectively, The said board | substrate identification mark and the position of the stored board | substrate storage part are linked | related, The Claim 1 characterized by the above-mentioned. Substrate storage device.

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