JPH06347070A - Air-conditioning unit hanging type clean room - Google Patents

Abstract

PURPOSE:To permit the installation of a clean room in a building, in which a clean room can not be arranged because of the limit of a ceiling height, by a method wherein various kinds of air-conditioning units are hung and the total load thereof is supported employing hanging members and the lower surfaces of respective air-conditioning units are arranged in the same plane without producing clearance between the air-conditioning units to form a ceiling. CONSTITUTION:Various kinds of air-conditioning units 20, 22, 24, 26, 28 are hung from the structural body of a building through hanging members 11. Turnbuckles 14, having a right-handed screw thread and left-handed screw thread at both ends thereof, and the like are interposed on the half ways of the hanging members 11 whereby the length of the hanging members can be adjusted. The total load of all air-conditioning units is supported by the hanging members. Further, all air-conditioning units are arranged so as to be neighbored without any clearance in horizontal direction employing seal members and seal retaining members between the air-conditioning units mutually. According to this method, lattice type ceiling frame members are not necessitated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to improvement of a clean room, which is indispensable in a semiconductor or pharmaceutical manufacturing line, and in particular, it is a multipurpose object having excellent workability capable of promptly dealing with a layout change accompanying a change in manufacturing process. Regarding the corresponding clean room.

[0002]

2. Description of the Related Art Today, in the industrial field of semiconductors and the like which requires fine processing technology and the field of pharmaceuticals and the like which requires high quality, it is necessary to have a space in which the dust concentration in the air is controlled as low as possible. And many vertical laminar flow clean rooms have been provided. However, the conventional vertical laminar flow type clean room requires a large space in the ceiling for supplying clean air and controlling the air flow.

In the most general structure, a ceiling called a system ceiling in which a lattice-shaped frame material is arranged considerably below the roof of a building or an upper floor slab is formed, and an ultra-high performance filter is placed on the ceiling. A ceiling system is adopted in which a blower unit is placed on the filter. For example, in Japanese Patent Laid-Open No. 3-51647, "Clean Room Construction System", a grid-like ceiling frame is arranged below the roof of a building by a certain distance.

However, because of the structure in which the air conditioning unit is placed on the lattice-shaped ceiling frame material, a space above the ceiling is inevitably required for the work of installing the air conditioning unit, and in addition, the air conditioning unit and the filter etc. need to be replaced. It wasn't easy. In existing buildings, it was often impossible to install a clean room due to insufficient space above the ceiling.

Further, in order to replace the filter on the ceiling frame material of the system ceiling from the inside of the clean room, the outer frame of the filter must be made small, and it is difficult to secure a sufficient effective filter area. Met. Also in terms of workability, a three-step work of assembling the ceiling frame material, mounting the filter, and mounting the unit is required, which requires a long construction period.

Further, as the purpose of use of the clean room has expanded, the number of cases in which the work content in the clean room has been changed has increased. For example, it is often necessary to change the layout as the type, size, manufacturing quantity, etc. of semiconductor devices are changed. In the conventional method using the lattice frame material, it is not easy to deal with the layout change.

[0007]

SUMMARY OF THE INVENTION A main object of the present invention is to provide a structure that enables a clean room to be installed even in a building where it was difficult to install the clean room due to the ceiling height limitation. Another object of the present invention is to provide a clean room that facilitates replacement work of an air conditioning unit and a filter in the clean room and can promptly deal with layout changes. Still another object of the present invention is to enable clean air to be supplied also to the remaining space remaining in the peripheral area of the clean room when the air conditioning units of a certain size are continuously arranged.

[0008]

The above-mentioned object of the present invention is to suspend various air conditioning units from a structure in a building using a suspending member, and to support the total load of each air conditioning unit by the suspending member. The air conditioner unit-hanging clean room is characterized in that the lower surface of each air conditioner unit is adjacently arranged on the same plane without any gap to form a ceiling.

[0009]

According to the present invention, based on the above construction, since the entire load of each air conditioning unit is supported by the suspending member, the conventional grid-shaped ceiling frame member is not required. Since there is no ceiling frame material, the replacement work of the air conditioning unit and the filter can be performed from inside the clean room, and safe and quick work can be secured.

In the conventional air conditioning unit replacement work, it was necessary for an operator to ride on the ceiling frame material, so the upper layer space from the building roof or under the upper slab to the ceiling frame material required a considerably large space. Since the present invention does not require a ceiling frame material, it is possible to significantly reduce the upper space and effectively utilize the space in the building, and it is possible to install it in a space where it was difficult to construct a clean room in the past. became.

As a further embodiment of the present invention, the air conditioning unit is a fan filter unit for supplying clean air from an upper space formed by the air conditioning unit into a clean room room through an ultra high performance filter, and this fan filter unit. A blow-out unit that receives air from the unit to supply air into the clean room, and a muffling unit that prevents noise generated in the upper space from permeating to the surroundings (including a blind plate and a suction port), It can be configured by a coil unit for cooling or the like.

In the conventional system using the fan filter unit shown in Japanese Patent Laid-Open No. 3-51647, "Clean Room Construction System", it is not possible to arrange an appropriate fan filter unit in a surplus space which is less than one filter. Difficult and the only option was to place a blind plate. Therefore, there is a drawback that the clean air supply area becomes small. The present invention has the advantage that clean air can be supplied to the entire chamber by using the blowing unit.

According to a preferred embodiment of the present invention, the effective filter area is increased by arranging the air conditioning units so as to be adjacent to each other in the horizontal direction by using the seal member and the seal holding member. You can

Further in accordance with a preferred embodiment of the present invention,
The ultra-high performance filter built in the air conditioning unit is supported using the mounting means that can be operated from within the clean room.
It is possible to replace the ultra-high performance filter without removing the air conditioning unit body. This facilitates maintenance of the clean room and contributes to maintaining cleanliness of the clean room. Hereinafter, the present invention will be described in more detail with reference to the embodiments of the accompanying drawings.

FIG. 1 shows a clean room 10 according to the present invention.
The interior of the building is divided into three areas: the upper space directly under the roof or slab 90, the intermediate space consisting of the clean room room, RA (return air) space, and the dirt zone, and the lower space under the floor. It is partitioned.

Similar to the well-known clean room, fresh air taken in from the outside air treatment air conditioner 2 installed outside the clean room is mixed with the circulating air which has passed through the clean room and passed through the pores of the floor surface to the bottom of the floor. After passing through the coil unit 28, it passes through the upper space and is sent into the clean room room. The coil unit 28 may be in the lower space or the return air space. At this time, a part of the air is discharged from the exhaust device 4 to the outside of the building as a dirt zone or exhaust of the device.

In accordance with the present invention, various air conditioning units 20, 22, 24, 26, 28 are suspended from the structure of the building via suspension members 11. Hanging member 1
1 can use a rod such as a round bar, a chain or a wire. It is desirable to be able to adjust the length by inserting a turnbuckle 14 or the like having nuts of right-hand screw and left-hand screw at both ends in the middle. It should be noted that the entire load of each air conditioning unit is supported by the suspending member 11, and no grid-like ceiling frame material like the conventional clean room is provided.

The various air-conditioning units shown in the figures include a fan filter unit 20 for supplying clean air from an upper space directly under the structure into the clean room room through an ultra-high performance filter 21, and a fan filter unit 22 with a branch pipe for supplying air. And a muffling unit 2 for preventing the noise generated in the upper space from permeating to the surroundings.
6 and a coil unit 28 for cooling.
Further, for a region which does not require the supply of clean air, a blind plate unit (not shown) can be used to block the air flow.

The muffling unit 26 has therein a muffler and a sound absorbing material. If necessary, a blind plate or a suction grill can be attached to the muffling unit 26,
It also acts as a doorway for inspecting the upper space.
The cooling coil unit 28 has a lower surface to which a cooling coil and a prefilter 30 are connected, and a silencer and a blower having the ability to compensate for the pressure loss of the coil can be installed inside.

FIG. 2 shows a preferred embodiment of the fan filter unit 20. A cylindrical portion 40 for accommodating the fan is provided at the upper end of the unit 20, but this cylindrical portion is changed to another shape according to the shape of the fan. Frame 4 of the fan filter unit 20
On the upper surface of 2, elongated holes 44 for receiving the hanging member 11 are formed at four corners, and the lower end of the hanging member 11 can be received and fixed with a nut or the like.

FIG. 3 shows a detailed structure of the blowing unit 24. Air is supplied from the fan filter unit 22 provided with the branch pipe 34 to the blowing unit 24 through the flexible duct 50, and clean air is supplied into the clean room room through the ultra-high performance filter 56.

The fan filter unit 22 is provided with a bypass damper 36 for adjusting the air volume on the upper surface thereof, so that the balance between the air volume flowing to the blowing unit 24 side and the air volume blowing into the clean room can be adjusted. ing. Inside the blowing unit 24,
A fixed baffle plate 52 for uniformly blowing air and a shutter 54 for manually adjusting the air volume are provided.

Since the size of the fan filter unit is limited, when the fan filter units are arranged so as to be adjacent to each other on the ceiling surface, an extra area is inevitably formed, and conventionally, a blind plate is used to block the flow of air. However, if the blowing unit 24 as shown in FIG. 3 is used, there is an advantage that clean air can be supplied to the area around the clean room.

FIG. 4 represents a preferred method for connecting adjacent air conditioning units using removable means. A threaded portion 17 is formed at the lower end of the suspension member 11, and a washer 15 is welded and fixed slightly above it. As described above, since the elongated hole 44 is formed on the upper surface of the frame 42 of the fan filter unit 20, the threaded portion 17 at the lower end of the suspension member 11 is inserted into the elongated hole 44 and the nut 19 is tightened. To fix. If you remove the ultra-high performance filter 21, this nut 1
9 can be operated from the inside of the clean room,
The advantage is that the air conditioning unit can be removed and replaced from inside the clean room.

As shown in FIG. 4, the lower end 60 of the frame 42 of two adjacent fan filter units 20 is brought into contact with the upper surface of a seal member 64 made of rubber or the like,
The seal member 64 is held on the bottom surface of the channel member 65. Since the channel member 65 is fastened to the frame 42 by the bolt 66, the adjacent air conditioning units are sealed and connected without any gap.

In FIG. 4, a sealing material 72 is attached to the upper surface of the outer frame 70 of the ultra high performance filter 21,
The bracket 74 is airtightly fixed to the frame 42 by fastening the bracket 74 to the channel member 65 with the bolt 76.

Blowers and power supplies that are incorporated in various air conditioning units as needed are supported using mounting brackets that can be operated from within the clean room, and the blowers and power supplies can be replaced without removing the air conditioning unit body. You can also

[0028]

As described above in detail, according to the present invention, since there is no lattice-shaped ceiling frame material, a clean room can be installed in an existing building where the ceiling height is insufficient. Further, since the replacement work of the air conditioning unit and the filter can be carried out from the clean room room, quick work can be realized and the layout can be easily changed. Moreover, the upper space of the clean room can be significantly reduced to effectively use the space in the building. Further, according to the present invention, the technical effect is extremely remarkable, such as the advantage that clean air can be supplied to the entire room by installing the filter in the extra space.

[Brief description of drawings]

FIG. 1 is a vertical sectional view showing an entire clean room according to the present invention.

FIG. 2 is a perspective view showing a typical fan filter unit.

FIG. 3 is a vertical cross-sectional view showing the arrangement of a branch type blowing unit.

FIG. 4 is a partial cross-sectional view showing a connection method between air conditioning units and a filter support method.

[Explanation of symbols]

 10 Clean Room 11 Suspension Member 20,22 Fan Filter Unit 21,56 Super High Performance Filter 24 Blowout Unit 26 Silence Unit 28 Coil Unit 30 Prefilter 44 Long Hole 50 Flexible Duct 64 Sealing Member 65 Channel Member 72 Sealing Material 74 Bracket

 ─────────────────────────────────────────────────── ─── Continued Front Page (72) Inventor Kakuo Ueda 1-1-5 Dojima, Kita-ku, Osaka-shi, Osaka Shinryo Corporation Co., Ltd. Osaka branch office (72) Inventor Koji Nakamura Kita-ku, Osaka-shi, Osaka 1-5 Dojima Shinryo Corporation Co., Ltd. Osaka branch office

Claims (4)

[Claims] 1. A variety of air conditioning units are suspended from a structure in a building by using suspending members, the suspension members support the total load of each air conditioning unit, and the lower surface of each air conditioning unit is placed on the same plane. An air-conditioning unit suspended clean room characterized in that the ceiling is formed by arranging them adjacent to each other with no gaps. 2. A fan filter unit that supplies clean air from an upper space of a ceiling formed by the air conditioning unit into a clean room room through an ultra-high performance filter, and a clean room that receives air from the fan filter unit. The clean room according to claim 1, further comprising: a blowout unit that supplies air to the room, a muffling unit that prevents noise generated in the upper space from being transmitted to the surroundings, and a coil unit for cooling. 3. The clean room according to claim 1, wherein the air-conditioning units are arranged adjacent to each other in the horizontal direction with no gap therebetween by using a seal member and a seal holding member. 4. The ultra-high performance filter built in the air conditioning unit is supported by a mounting means operable from a clean room room, and the ultra high performance filter can be replaced without removing the air conditioning unit body. Clean room described in 2.