JPS62190337A - Air blow-off device for ventilation and air conditioning in clean room - Google Patents

Air blow-off device for ventilation and air conditioning in clean room

Info

Publication number
JPS62190337A
JPS62190337A JP61027968A JP2796886A JPS62190337A JP S62190337 A JPS62190337 A JP S62190337A JP 61027968 A JP61027968 A JP 61027968A JP 2796886 A JP2796886 A JP 2796886A JP S62190337 A JPS62190337 A JP S62190337A
Authority
JP
Japan
Prior art keywords
air
tunnel
blow
clean
passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61027968A
Other languages
Japanese (ja)
Inventor
Takeo Ishii
石井　武夫
Toru Mima
美馬　徹
Mikio Takanaka
高仲　三喜男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HOSOKAWA KANKYO ENG KK
Fujita Corp
Original Assignee
HOSOKAWA KANKYO ENG KK
Fujita Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HOSOKAWA KANKYO ENG KK, Fujita Corp filed Critical HOSOKAWA KANKYO ENG KK
Priority to JP61027968A priority Critical patent/JPS62190337A/en
Priority to KR1019860008342A priority patent/KR870008157A/en
Publication of JPS62190337A publication Critical patent/JPS62190337A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F24F13/06—Outlets for directing or distributing air into rooms or spaces, e.g. ceiling air diffuser

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ventilation (AREA)

Abstract

PURPOSE:To simplify a device and reduce cost by purifying two spacers of a tunnel part and a passage part in a clean room with a single air blow-off device for ventilation and air conditioning placed at the upper part of the tunnel part. CONSTITUTION:At the upper part of a tunnel part B a clean air blow-off space part 1 is placed and the part 1 is composed of such perforated plates as a lower horizontal piece 2 having blow-off holes pointing and being opened to the part B, an upper slanting side piece 3 having blow-off holes pointing and being opened to a passage part C side, and a lower slanting side piece 4 located between the two pieces 2 and 3 and having blow-off holes pointing and being opened to the part C and further a hanging wall 5 which points to the part C from a boundary part between two pieces 3 and 4 and is elongated slantingly downward is placed in projected state. By this constitution, an air curtain is formed by clean air discharged from the blow-off holes at the side piece 4 to prevent the mixing of air streams blown off to the parts B and C from the pieces 2 and 3 respectively.

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明はクリーンルームにおける空気清浄装置に係るも
のである。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an air purifying device for a clean room.

（従来の技術） 従来のクリーンルームのペイ方式等で使用されている換
気、空調装置は、クリーンルームにおける両側トンネル
部及び間両トンネル部に挾まれた通路部の各上方に、夫
々超高性能フィルタが内蔵されたトンネル部の空気清浄
装置に通路部の空気清浄部が個々に配設され、同各空気
清浄部の下面から清浄空気が吹出されている。(Prior art) Ventilation and air conditioning equipment used in conventional clean room pay systems, etc. have ultra-high performance filters installed above each of the tunnels on both sides of the clean room and the passageway sandwiched between the two tunnels. Air cleaning sections for the passage section are individually arranged in the built-in air cleaning device for the tunnel section, and clean air is blown out from the bottom surface of each air cleaning section.

（発明が解決しようとする問題点） このように前記従来のものにあっては、−双のトンネル
部とその中間に位置する通路部が夫々側の空気清浄シス
テムで換気、空調が図られているので、経済性の面で問
題があった。(Problems to be Solved by the Invention) In this way, in the above-mentioned conventional system, - the twin tunnel sections and the passage section located between them are ventilated and air-conditioned by air cleaning systems on each side. Therefore, there was a problem in terms of economic efficiency.

（問題点を解決するための手段） 本発明はこのような問題点を解決するために提案された
もので、相対する両側トンネル部間に通路部が配設され
たクリーンルームにおいて、前記トンネル部の頂部に、
同トンネル部に指向して開口する吹出口を有する下部水
平片、及び通路部側に指向して開口する吹出口を有する
上部傾斜側片、並に前記両片間に介在し且つ通路部に指
向して開口する吹出口を有する下部傾斜側片とよりｙる
清浄空気吹出空間部を配設するとともに、前記上下両傾
斜側片の境界部よシ通路部に指向して斜下方に延びる垂
れ壁を突設してなることを特徴とするクリーンルームに
おける換気、空調吹出装置に係るものである。(Means for Solving the Problems) The present invention has been proposed to solve these problems, and in a clean room in which a passage section is provided between opposing tunnel sections on both sides, At the top,
a lower horizontal piece having an air outlet that opens toward the tunnel; an upper inclined side piece that has an air outlet that opens toward the passageway; and an upper inclined side piece that is interposed between the two pieces and is oriented toward the passageway. A hanging wall extending obliquely downward from the boundary between the upper and lower inclined side pieces toward the passageway, and a lower inclined side piece having an air outlet opening therebetween. The present invention relates to a ventilation and air conditioning blow-off device for a clean room, which is characterized by a projecting structure.

（作用） 本発明は前記したように構成されているので、前記トン
ネル部の頂部に配設された清浄空気吹出空間部における
下部水平片の吹出口、及び上部傾斜側片の吹出口から夫
々トンネル部並に通路部に清浄空気が吹出される。(Function) Since the present invention is configured as described above, the air outlet of the lower horizontal piece and the air outlet of the upper inclined side piece in the clean air blowing space provided at the top of the tunnel part are connected to the tunnel. Clean air is blown out into the passages as well as the sections.

この際、前記下部水平片及び上部傾斜側片の中間に配設
された下部傾斜側片の吹出口から通路部側に指向して斜
下方に清浄空気が吹出され、前記下部水平片及び上部傾
斜側片からの吹出空気流間にエアーカーテンが形成前記
上下両傾斜側片の中間部よシ斜下方に突設された垂れ壁
の存在と相俟って、前記両吹出空気流を区画し、間両空
気流の混合を防止する。At this time, clean air is blown obliquely downward toward the passage section from the outlet of the lower inclined side piece disposed between the lower horizontal piece and the upper inclined side piece, and An air curtain is formed between the airflows blown from the side pieces, and together with the presence of a hanging wall projecting diagonally downward from the middle part of the upper and lower inclined side pieces, the air curtains are partitioned between the two blown airflows, to prevent mixing of both air streams.

（発明の効果） このように本発明によれば、クリーンルームにおけるト
ンネル部と通路一部との雨空間がトンネル部の頂部に配
設された単一の換気、空調吹出装置によって清浄化され
るので、装置が簡略化され、コストが節減される。(Effects of the Invention) As described above, according to the present invention, the rain space between the tunnel section and a part of the passageway in the clean room is cleaned by a single ventilation and air conditioning blowing device disposed at the top of the tunnel section. , equipment is simplified and costs are saved.

更に前記下部傾斜側片よシ吹出されるエヤカーテンと前
記垂れ壁とによって、前記清浄空気吹出空間部よシトン
ネル部及び通路部に吹出される両清浄空気流の混合が防
止され、通路部の低清浄度空間の空気がトンネル部の高
清浄度空間に誘引されることがなく、また通路部で発生
した塵埃のトンネル部への侵入が防止される。Furthermore, the air curtain blown from the lower inclined side piece and the hanging wall prevent the clean air flows blown from the clean air blowing space into the tunnel and the passageway from mixing, thereby reducing the cleanliness of the passageway. Air in the clean space is not attracted to the highly clean space in the tunnel section, and dust generated in the passage section is prevented from entering the tunnel section.

（実施例） 以下本発明を図示の実施例について説明する。(Example) The present invention will be described below with reference to the illustrated embodiments.

（勾はクリーンルーム、申）はその両側に配設されたト
ンネル部、（Ｃ）は両トンネル部（Ｂ）に挾まれた通路
部で、トンネル部（Ｂ）の頂部に清浄空気吹出空間部（
１）が配設されている。(A) is a clean room, and (C) is a passageway sandwiched between both tunnels (B), with a clean air blowing space (
1) is provided.

同空間部（１）は多孔板よ多構成され、トンネル部（Ｂ
）に指向して開口する吹出口を有する下部水平片（２）
と、通路部（Ｃ）側に指向して開口する吹出口を有する
上部傾斜側片（３）と、前記両片（２）（３）間に介在
し、通路部（Ｃ）に指向して開口する吹出口を有する下
部傾斜側片（４）とよ多構成され、更に上下両傾斜側片
（４）の境界部よシ通路部（Ｃ）に指向して斜下方に延
びる垂れ壁（５）が突設されている。The space part (1) is composed of a multi-perforated plate, and the tunnel part (B
) a lower horizontal piece (2) having an air outlet opening toward
an upper inclined side piece (3) having an air outlet opening toward the passage (C); The lower inclined side piece (4) has an open air outlet, and the hanging wall (5) extends obliquely downward from the boundary between the upper and lower inclined side pieces (4) toward the passageway (C). ) is provided protrudingly.

図中（６）はレターンチャンバ（力の上方に配設された
前記清浄空気吹出空間部（１）に対する清浄空気供給用
のプレナムチャンバで、送風機（８）及び超高性能フィ
ルタ（９）が内蔵され、下部にはレターンロα０が配設
きれるとともに、上部に給気ダクトαυが接続されてい
る。In the figure, (6) is a return chamber (a plenum chamber for supplying clean air to the clean air blowing space (1) located above the force), and has a built-in blower (8) and ultra-high performance filter (9). A return roller α0 can be disposed in the lower part, and an air supply duct αυ is connected to the upper part.

図中０２は床下プレナムチャンバ、α：ＩＣ１４）はレ
ターンロである。In the figure, 02 is an underfloor plenum chamber, and α:IC14) is a return rotor.

図示の実施例は前記したように構成されているので、前
記プレナムチャンバ（６）に内蔵された送風機（８）及
び超高性能フィルタ（９）によって前記トンネル部（Ｂ
）頂部の清浄空気吹出空間部（１）に供給された清浄空
気は、同空間部（１）の下部水平片（２）及び上部傾斜
側片（３）の各吹出口よシトンネル部（Ｂ）及び通路部
（Ｃ）に吹出され、同トンネル部（Ｂｌ並に通路部（Ｃ
）の雨空間が清浄化される。Since the illustrated embodiment is configured as described above, the tunnel section (B
) The clean air supplied to the clean air blowing space (1) at the top is passed through the air outlet of the lower horizontal piece (2) and the upper inclined side piece (3) of the space (1) to the tunnel part (B). and the passage part (C), and the same tunnel part (Bl) and the passage part (C) are blown out.
) rain spaces are cleaned.

この際、前記下部傾斜側片（４）の吹出口よシ吹出され
る清浄空気によってエヤカーテンが形成され、前記下部
水平片（２）及び上部傾斜側片（３）よシトンネル部に
）並に通路部（Ｃ）に吹出される清浄空気流の混入が防
止される。At this time, an air curtain is formed by the clean air blown out from the outlet of the lower inclined side piece (4), and an air curtain is formed by the clean air blown out from the outlet of the lower horizontal piece (2) and the upper inclined side piece (3) into the tunnel part) and the passageway. Mixing of the clean air flow blown into section (C) is prevented.

更に前記上下両傾斜側片＋２）（３）の境界部よシ斜下
方に突設された垂れ壁（５）によって、前記トンネル部
（Ｂ）及び通路部（Ｃ）に吹出される清浄空気流の混入
がより確実に防止される。Furthermore, a clean air flow is blown into the tunnel part (B) and the passage part (C) by a hanging wall (5) projecting diagonally downward from the boundary between the upper and lower inclined side pieces +2) (3). Contamination is more reliably prevented.

なお前記したようにクリーンルーム（Ａｌ内を清浄化シ
た空気流はレターンロａ４）、レターンチャンバ（７）
及びレターンロα１を介してプレナムチャンバ（６）に
戻される。As mentioned above, the clean room (the air flow that cleaned the inside of the aluminum is in the return room A4), the return chamber (7)
and is returned to the plenum chamber (6) via the return roller α1.

前記実施例によればこのように、クリーンルーム（Ａ）
におけるトンネル部（Ｂ）の頂部に配設された単一の清
浄空気吹出空間部（１）によって、トンネル部（Ｂ）と
通路部（Ｃ）との雨空間が清浄化されるので装置が簡略
化され、コストが節減される。According to the embodiment, the clean room (A)
Since the rain space between the tunnel part (B) and the passage part (C) is cleaned by the single clean air blowing space part (1) arranged at the top of the tunnel part (B) in reduced costs.

更に前記下部傾斜側片（４）の吹出口より吹出されるエ
ヤカーテンと、上下両傾斜側片（３）（４）の境界部よ
シ突設された垂れ壁（５）とによって、前記下部水平片
（２）及び上部傾斜側片（３）よシトンネル部（Ｂｌ並
に通路部（Ｃ１に吹出される両清浄空気流の混合が防止
され、通路部（Ｃ）の低清浄度空間の空気がトンネル部
（Ｂ）の高清浄度空間に誘引されることがなく、また通
路部（Ｃ）で発生した塵埃のトンネル部中）への侵入が
防止される。Furthermore, the air curtain blown out from the outlet of the lower inclined side piece (4) and the hanging wall (5) protruding from the boundary between the upper and lower inclined side pieces (3) and (4) cause the lower horizontal The piece (2) and the upper inclined side piece (3) prevent the mixing of both clean air flows blown into the tunnel part (Bl) and the passage part (C1), and the air in the low cleanliness space of the passage part (C) is prevented from mixing. Dust is not attracted to the highly clean space of the tunnel section (B), and dust generated in the passage section (C) is prevented from entering into the tunnel section.

以上本発明を実施例について説明したが、本発明は勿論
このような実施例にだけ局限されるものではなく、本発
明の精神を逸脱しない範囲内で種々の設計の改変を施し
うるものである。Although the present invention has been described above with reference to embodiments, the present invention is, of course, not limited to such embodiments, and can be modified in various ways without departing from the spirit of the present invention. .

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明に係るクリーンルームにおける換気、空
調吹出装置の一実施例を示す縦断面図である。 （Ａｌ・・・クリーンルーム　（Ｂ）・・・トンネル部
（Ｃ１・・・通路部　　　　　（１）・・・清浄空気吹
出空間部（２）・−・下部水平片　　　（３）・・・上
部傾斜側片（４）・・・下部傾斜側片　　（５）・・・
垂れ壁代理人　弁理士　岡　本　重　文 外２名FIG. 1 is a longitudinal sectional view showing an embodiment of a ventilation and air conditioning blow-off device for a clean room according to the present invention. (Al...Clean room (B)...Tunnel part (C1...Passway part (1)...Clean air blowing space (2)...Lower horizontal piece (3)...Upper slope side Piece (4)...Lower inclined side piece (5)...
Hanegabe Agent Patent Attorney Shige Okamoto 2 people outside the text

Claims (1)

【特許請求の範囲】[Claims] 相対する両側トンネル部間に通路部が配設されたクリー
ンルームにおいて、前記トンネル部の頂部に、同トンネ
ル部に指向して開口する吹出口を有する下部水平片、及
び通路部側に指向して開口する吹出口を有する上部傾斜
側片、並に前記両片間に介在し且つ通路部に指向して開
口する吹出口を有する下部傾斜側片とよりなる清浄空気
吹出空間部を配設するとともに、前記上下両傾斜側片の
境界部より通路部に指向して斜下方に延びる垂れ壁を突
設してなることを特徴とするクリーンルームにおける換
気、空調吹出装置。In a clean room in which a passage is arranged between opposing tunnel parts on both sides, a lower horizontal piece having an air outlet opening toward the tunnel at the top of the tunnel, and an opening facing toward the passage. A clean air blowing space is provided, which includes an upper inclined side piece having an air outlet, and a lower inclined side piece interposed between the two pieces and having an air outlet opening toward the passage. A ventilation and air conditioning blowing device for a clean room, comprising a hanging wall extending diagonally downward toward the passage from the boundary between the upper and lower inclined side pieces.
JP61027968A 1986-02-13 1986-02-13 Air blow-off device for ventilation and air conditioning in clean room Pending JPS62190337A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61027968A JPS62190337A (en) 1986-02-13 1986-02-13 Air blow-off device for ventilation and air conditioning in clean room
KR1019860008342A KR870008157A (en) 1986-02-13 1986-10-06 Ventilation and air-conditioning ejectors in the cleanroom

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61027968A JPS62190337A (en) 1986-02-13 1986-02-13 Air blow-off device for ventilation and air conditioning in clean room

Publications (1)

Publication Number Publication Date
JPS62190337A true JPS62190337A (en) 1987-08-20

Family

ID=12235686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61027968A Pending JPS62190337A (en) 1986-02-13 1986-02-13 Air blow-off device for ventilation and air conditioning in clean room

Country Status (2)

Country Link
JP (1) JPS62190337A (en)
KR (1) KR870008157A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5086692A (en) * 1990-04-12 1992-02-11 Welch Henry W Air handling system and method for an operating room
ES2399776R1 (en) * 2010-10-11 2013-04-17 Tecnica En Instalaciones De Fluidos S L AIR CONDITIONING SYSTEM FOR REDUCED DIMENSIONS ENCLOSURES
CN110440359A (en) * 2019-08-22 2019-11-12 南方电网调峰调频发电有限公司 Coastal waters underground engineering utilizes the air-treatment and transportation system of access tunnel air inlet

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022394A (en) * 1983-07-18 1985-02-04 日本電気株式会社 Circuit board

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6022394A (en) * 1983-07-18 1985-02-04 日本電気株式会社 Circuit board

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5086692A (en) * 1990-04-12 1992-02-11 Welch Henry W Air handling system and method for an operating room
ES2399776R1 (en) * 2010-10-11 2013-04-17 Tecnica En Instalaciones De Fluidos S L AIR CONDITIONING SYSTEM FOR REDUCED DIMENSIONS ENCLOSURES
CN110440359A (en) * 2019-08-22 2019-11-12 南方电网调峰调频发电有限公司 Coastal waters underground engineering utilizes the air-treatment and transportation system of access tunnel air inlet
CN110440359B (en) * 2019-08-22 2021-05-04 南方电网调峰调频发电有限公司 Air treatment and conveying system for offshore underground engineering by utilizing air intake of traffic hole

Also Published As

Publication number Publication date
KR870008157A (en) 1987-09-24

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