JPS61116233A - Ceiling variable type clean room - Google Patents
Ceiling variable type clean roomInfo
- Publication number
- JPS61116233A JPS61116233A JP59239002A JP23900284A JPS61116233A JP S61116233 A JPS61116233 A JP S61116233A JP 59239002 A JP59239002 A JP 59239002A JP 23900284 A JP23900284 A JP 23900284A JP S61116233 A JPS61116233 A JP S61116233A
- Authority
- JP
- Japan
- Prior art keywords
- ceiling
- filter
- clean room
- air supply
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
１ 産業上の利用分野
本発明は、天井可変式クリーンルームに関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] 1. Field of Industrial Application The present invention relates to a clean room with a variable ceiling.
ｉｆ 従来の技術
半導体製造プロセス等、クリーンルームに設置される生
産ラインは、数年に一度、大幅なライン構成の変更が行
われる。If Conventional Technology Production lines installed in clean rooms, such as those used in semiconductor manufacturing processes, undergo major line configuration changes once every few years.
しかし、従来の部分Ｆｍ流のクリーンルームの場合、フ
ィルタ天井が建物と一体イヒしていることが多いため、
製造プロセスのライン構成が変った際にこれに対応でき
ない。However, in the case of conventional partial Fm style clean rooms, the filter ceiling is often integrated with the building, so
Unable to respond when the line configuration of the manufacturing process changes.
また、全面層流のクリーンルームの場合、天井ふところ
を給気チャンバーとしているため、フィルタ間或いはフ
ィルタと周壁の間の気密性維持に難点がある。In addition, in the case of a clean room with laminar flow over the entire surface, the ceiling is used as an air supply chamber, so it is difficult to maintain airtightness between the filters or between the filter and the surrounding wall.
１１ 発明が解決しようとする問題貞そこで、本発明
は、清浄空間の配置をライン構成の変化に随伴してフレ
キシブルに４Ｎ応できるようにし、且つ、気密性の維持
を容易にしようとするものである。11 Problems to be Solved by the Invention Therefore, the present invention aims to make it possible to flexibly adapt the arrangement of the clean space to 4N according to changes in the line configuration, and to facilitate the maintenance of airtightness. be.
１ 問題点を解決するための手段
本発明は、クリーンルームのフィルタ天井をフィルタの
割付けに従がい小分割してそれぞれをユニット化すると
共に、各個に適宜昇降手段を講じて成る。1. Means for Solving the Problems The present invention consists of dividing the filter ceiling of a clean room into smaller units according to the allocation of the filters, forming each unit into units, and providing appropriate means for raising and lowering each unit.
１１ 作 用
如上の＃ｌ成であるから、ライン構成の変更に当っては
、それらのユニットを適宜に上げ下げし、全面垂直層流
方式、部分層流アイランド方式、りリーントンネル方式
、クリーンチューブ方式、乱流方式等の各振方式に任意
に適合させる。11 Operation Since the #l configuration is as shown above, when changing the line configuration, raise or lower those units as appropriate, and use the fully vertical laminar flow system, partial laminar flow island system, lean tunnel system, or clean tube system. , turbulent flow method, etc., as desired.
ｕｌ 実施例
第１図は、本発明に係る実施例を示し、クリーンルーム
Ａのフィルタ天井Ｂを、フィルタの割付けに従がい小分
割して、それぞれを昇降自在な超高性能フィルタ給気ユ
ニット（以下給気ユニットと云う） １・・とじ、それ
らの給気ユニットは、それぞれ断面方形の筒体１１を設
け、該筒体の下端に超高性能フィルタ１２を固定すると
共に、内部に送風機１３を設けている。ul Embodiment FIG. 1 shows an embodiment of the present invention, in which the filter ceiling B of the clean room A is divided into small sections according to the allocation of the filters, and each section is divided into ultra-high performance filter air supply units (hereinafter referred to as These air supply units each have a cylinder 11 with a rectangular cross section, an ultra-high performance filter 12 is fixed to the lower end of the cylinder, and a blower 13 is installed inside the cylinder. ing.
また、それらの給気ユニット１・は、天井チャンバＣに
おいて、チェーン、ロープ、ジヤツキ、ラック・ピニオ
ン、スクリュ・ロッド、テレスコピック等から成る適宜
昇降装置２・・を各個に備え、これにより任意に昇降し
得るように構成している。In addition, these air supply units 1 are each equipped with an appropriate lifting device 2 consisting of a chain, a rope, a jack, a rack and pinion, a screw rod, a telescopic device, etc. in the ceiling chamber C, so that they can be raised or lowered at will. It is configured so that it can be done.
なお、上述の給気ユニット１・は、内部に送風機１３を
設けているが、天井チャンバＣがダクトを介して中央の
空調器、その他適宜給気手段をこ継がっている場合には
不要である。Although the air supply unit 1 described above is equipped with a blower 13 inside, it is not necessary if the ceiling chamber C is connected to a central air conditioner or other appropriate air supply means via a duct. be.
また、昇降装置２・・を装備させず、外部昇降装置をそ
の都度利用するものとし、適宜支持手段を講じてもよい
。Alternatively, the lifting device 2, etc. may not be provided, and an external lifting device may be used each time, and supporting means may be provided as appropriate.
給気ユニット１・相互間、給気ユニットと周壁との間に
、隙間封じの合成ａｍ材を設けるとよい。It is preferable to provide a synthetic am material for sealing gaps between the air supply units 1 and between the air supply units and the peripheral wall.
図中、Ｄは、通風床、Ｅは、床チャンバ、ＦＩＧは、ス
ラブである。In the figure, D is a ventilated floor, E is a floor chamber, and FIG is a slab.
如上の構成であり、各給気ユニット１・は、昇降Ｍ置に
より高さｈの間で適宜に上げ下げし、次の各種方式に適
合させる。Each air supply unit 1 is constructed as shown above, and each air supply unit 1 can be raised or lowered appropriately between a height h by raising and lowering the height M, and is adapted to the following various methods.
■ 全面垂直層流方式
第１図に示すように、全給気ユニットト・を下位点にセ
ットする。■ Full vertical laminar flow system As shown in Figure 1, set all air supply units to the lower points.
■ 部分層流アイランド方式
第２因に示すように、室内中央部乃至中央部周辺の給気
ユニット１・を下位点に、その他を上位点にセットする
。また、下位点にセットした給気ユニットの外縁部から
アイリッド３・・を垂下させる。(2) Partial laminar flow island system As shown in the second factor, the air supply unit 1 in or around the center of the room is set to the lower point, and the others are set to the higher point. Also, the eyelid 3... is made to hang down from the outer edge of the air supply unit set at the lower point.
■ クリーントンネル方式
第３図に示すように、ＩＩｍＮに沿った一列の給気ユニ
ット１・を下位点に、その他を上位点にセットし、下位
点にセットした給気ユニットの外縁部からアイリッド３
・・を垂下させる。■ Clean tunnel method As shown in Figure 3, set the air supply units 1 in a line along IImN at the lower points and the others at the upper points, and then move the air supply units 1 and 3 along the line IImN from the outer edge of the air supply units set at the lower points to the eyelid 3.
...to hang down.
■ クリーンチューブ方式
第４図に示すように、室内中間部の一列の給気ユニット
１・を下位点に、その他を上位点にセットする。また、
下位点にセットした給気ユニットの外縁部からアイリッ
ド３・・を垂下させ、該アイリッドでできる陽り生産ラ
インを包覆する（生産ラインの完全自動化に適する）。■Clean tube method As shown in Figure 4, set the air supply units 1 in the middle part of the room to the lower points and the others to the higher points. Also,
An eyelid 3... is suspended from the outer edge of the air supply unit set at the lower point, and the eyelid covers the production line (suitable for complete automation of the production line).
■ 乱流方式
第５図に示すように、全給気ユニットト・を上位点にお
き、これらの下面に、処々で送風口４１を開口したマス
ク４を当て、且つ、通風床りの床面にも、通風口５１の
あるマスク５を敷設する。■ Turbulent flow method As shown in Fig. 5, all the air supply units are placed at the upper point, and masks 4 with ventilation ports 41 opened here and there are placed on the bottom surfaces of these units, and A mask 5 with ventilation holes 51 is also installed.
本発明によれば、フィルタ天井を構成する複数の給気ユ
ニットを、適宜に上げ下げすることにより、全面！ｍ［
層流方式、部分層流アイランド方式、クリーントンネル
方式、クリーンチューブ方式、乱流方式等の各種の方式
に任意に適合させることができ、従って、生産ラインの
ライン構成の大幅な変更にもフレキシブルに対応でき、
顕る経済的である。According to the present invention, by appropriately raising and lowering the plurality of air supply units that make up the filter ceiling, the entire surface can be covered. m[
It can be arbitrarily adapted to various methods such as laminar flow method, partially laminar flow island method, clean tunnel method, clean tube method, turbulent flow method, etc. Therefore, it is flexible enough to make major changes in the line configuration of the production line. I can handle it,
It is clearly economical.
また、給気ユニット相互間及び給気ユニットとＩＮＷと
の間の隙間に、隙間封じ用の部材を介入させることで、
極めて簡最に気密性をｔａｎでき、特に、各給気ユニッ
トに送風機を装備させた場合番こは、その隙間封じは、
天井チャン／ｆ側が負圧化するのでさほど厳密でなくと
もよく、好都合である。In addition, by intervening gap sealing members in the gaps between the air supply units and between the air supply units and the INW,
Airtightness can be achieved extremely easily, especially when each air supply unit is equipped with a blower.
Since the pressure on the ceiling channel/f side is negative, it is not necessary to be very strict, which is convenient.
更に、給気ユニット相互間及び給気ユニ゛ソトと周壁と
の間の隙間による遊びによって、耐震性が向上する。Furthermore, the play in the gaps between the air supply units and between the air supply unit and the peripheral wall improves earthquake resistance.
図面は、本発明に係る実施例で、第１図乃至第５図は、
各使用態様における構成要領断面図である。
ｌ・・超高性能フィルタ給気ユニット
２・・昇降装置ｆ ＋＋・・筒 体ｒ２・・超高
性能フィルタ １３・・送風機Ａ・・クリーンルーム
Ｂ・・フィルタ天井Ｃ・・天井チャンバ ０・・通
風床
Ｅ・・床チャンバ Ｆ、Ｇ ・スラブ第２図
第３図
第４図
第５図The drawings show embodiments of the present invention, and FIGS. 1 to 5 show embodiments of the present invention.
It is a sectional view of the configuration in each usage mode. l...Ultra high performance filter air supply unit 2...Elevating device f ++...Cylinder body r2...Ultra high performance filter 13...Blower A...Clean room
B... Filter ceiling C... Ceiling chamber 0... Ventilation floor E... Floor chamber F, G - Slabs Figure 2 Figure 3 Figure 4 Figure 5
Claims (1)
がい小分割してそれぞれをユニット化すると共に、各個
に適宜昇降手段を講じたことを特徴とする天井可変式ク
リーンルーム。A variable ceiling type clean room characterized in that the filter ceiling of the clean room is divided into units according to the allocation of the filters, each unit is made into a unit, and each unit is provided with an appropriate means of raising and lowering.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59239002A JPS61116233A (en) | 1984-11-12 | 1984-11-12 | Ceiling variable type clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59239002A JPS61116233A (en) | 1984-11-12 | 1984-11-12 | Ceiling variable type clean room |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61116233A true JPS61116233A (en) | 1986-06-03 |
| JPH042856B2 JPH042856B2 (en) | 1992-01-21 |
Family
ID=17038432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59239002A Granted JPS61116233A (en) | 1984-11-12 | 1984-11-12 | Ceiling variable type clean room |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61116233A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06347070A (en) * | 1993-06-03 | 1994-12-20 | Shinryo Corp | Air-conditioning unit hanging type clean room |
| JP2006186193A (en) * | 2004-12-28 | 2006-07-13 | Nec Electronics Corp | Transfer chamber unit |
| US20100022179A1 (en) * | 2007-10-26 | 2010-01-28 | Katsuhito Uematsu | Clean room |
-
1984
- 1984-11-12 JP JP59239002A patent/JPS61116233A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06347070A (en) * | 1993-06-03 | 1994-12-20 | Shinryo Corp | Air-conditioning unit hanging type clean room |
| JP2006186193A (en) * | 2004-12-28 | 2006-07-13 | Nec Electronics Corp | Transfer chamber unit |
| US20100022179A1 (en) * | 2007-10-26 | 2010-01-28 | Katsuhito Uematsu | Clean room |
| US8545296B2 (en) * | 2007-10-26 | 2013-10-01 | Panasonic Corporation | Clean room |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH042856B2 (en) | 1992-01-21 |
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