JPH07139761A - Cooling facility and exhaust heat-utilizing facility for clean room - Google Patents

Abstract

PURPOSE:To provide a cooling facility for a clean room in which energy can be efficiently operated by utilizing a cooling tower. CONSTITUTION:The cooling facility and exhaust heat utilizing facility for a cooling room comprise a cooling tower 28 coupled to a first cooling coil 6 through switching valves 29, 30a, a refrigerating machine 27 coupled to a second cooling coil 22 provided in an atmospheric duct 8 and to a first cooling coil 6 through switching valves 31a, 32a, indoor temperature detecting means 33 provided in the room 1 and atmospheric temperature detecting means 34 provided out of the room 1. When an atmospheric temperature detected by the means 34 is lower than an indoor temperature detected by the means 33, the tower 28 is operated.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room cooling facility and a waste heat utilization facility used in a semiconductor factory or the like.

[0002]

2. Description of the Related Art There is an invention disclosed in Japanese Patent Application Laid-Open No. 4-98034 as an example of a clean room having an air circulation system including a cooling coil and a fan that takes in outside air from an outside air duct. FIG. A block diagram is shown.

In the figure, 1 is a vertical laminar flow type clean room in which a HEPA filter 2 and a fan filter 3 are arranged on the ceiling part, 4 is an exhaust plenum provided in the underfloor space of the clean room 1, and 5 is one side wall of the clean room 1. Is an exhaust duct that guides the circulating air from the exhaust plenum 4 to the upper side (ceiling side), inside which the cooling coil 6 and the circulation fan 7 are arranged in the order of air flow, and the clean room 1, the exhaust duct 5, and the cooling An air circulation system is configured by the coil 6, the circulation fan 7, and the like. The cooling coil 6 is cooled by cooling water from a refrigerator (not shown).

Reference numeral 8 denotes an outside air duct, one end of which is connected to one end of the exhaust duct 5 on the floor side and the other end of which is provided with an outside air intake 9.
A removal unit U in which a corona discharger 10 and an electrostatic precipitator 11 for electrostatically removing impurities mixed in the outside air are arranged in the order of the air flow in the outside air intake path, and an upstream side of the removal unit U A primary filter 12 for removing coarse dust arranged in the order of air flow, an air heater 13 for controlling the relative humidity of passing air to 60 to 70% or less, and a secondary filter for high performance filter for capturing fine particles. 14 and an outside air introduction fan 15 are installed downstream of the removal unit U.

Reference numeral 16 denotes an air conditioner having one end connected to the lower portion of the exhaust duct 5 and the other end having an outside air intake 9. Inside the air conditioner, a primary filter 12, an air heater 13 and a secondary filter 1 are provided.
4, the removal unit U, the outside air introduction fan 15, and the heat exchangers 17 and 18 are arranged in the order of air flow. Also,
The air heater 13 and the secondary filter 14 so that a part of the circulating air in the clean room 1 is taken into the air conditioner 16.
A return air duct 19 whose one end is connected to one end on the ceiling side of the exhaust duct 5 is connected between and.

A clean room 1 constructed as described above
In, the circulating air sucked from the clean room 1 into the exhaust plenum 4 is guided to the ceiling via the cooling coil 6 of the exhaust duct 5 and the circulating fan 7. At this time, the circulating air is mixed with the outside air from which dust and sea salt particles are removed in the outside air duct 8 and the air conditioner 16, and is cooled to a preset temperature by the cooling coil 6.
The amount of circulating air commensurate with the amount of outside air introduced into the exhaust duct 5 is exhausted from the exhaust port 20 provided at the upper part of the exhaust duct 5. Then, the cooled circulating air is cleaned by passing through the HEPA filter 2 and supplied again into the clean room 1. In this way, the removal unit U removes sea salt particles in the outside air, and also removes the alkali metal particles generated in the clean room 1 or remaining in the circulating air by taking in the return air, Air condition the clean room 1.

[0007]

In the conventional air circulation system of the clean room 1 as described above, when the circulating air mixed with the outside air is cooled to a preset temperature,
Since it is cooled by the cooling coil 6 provided in the exhaust duct 5, for example, even when the outside air temperature is lower than the temperature in the clean room 1, that is, the temperature of the circulating air mixed with the outside air is lower than the temperature in the clean room 1, the refrigerator Must be operated to cool the cooling coil 6 to cool the circulating air, which is not efficient such as wasteful consumption of energy for cooling the cooling coil 6 and the like.

Further, the outside air and the circulating air taken into the outside air duct 8 and the air conditioner 16 are separated by a plurality of pieces in order to remove dust and sea salt particles mixed in the outside air and to set a preset temperature and humidity. Since heating, cooling, and heating are repeated many times with individual air heaters and cooling coils, the amount of energy used to drive the air heaters increases, which is uneconomical. was there.

The present invention has been made to solve the above problems, and when the outside air temperature becomes lower than the room temperature of the clean room, a clean room can be used to efficiently use energy by using a cooling tower. It is intended to provide the cooling equipment of. Another object of the present invention is to provide a facility for utilizing exhaust heat of a clean room that can be economically operated by effectively utilizing the exhaust heat of the circulating air from the clean room.

[0010]

A cooling facility for a clean room according to a first aspect of the invention is a facility for cooling the inside of a clean room by taking in outside air from an outside air duct and using an air circulation system including a first cooling coil and a fan. A cooling tower connected to the first cooling coil via a switching valve, a second cooling coil provided in the outside air duct and the second cooling coil, and a switching valve to the first cooling coil. A refrigerator connected through, and an indoor temperature detecting means provided inside the clean room and an outside air temperature detecting means provided outside the clean room, and the outside air temperature detected by the outside air temperature detecting means is determined by the indoor temperature detecting means. When the temperature becomes lower than the detected room temperature, the cooling tower is operated.

The cooling equipment for a clean room according to the second aspect of the present invention includes a cooling tower connected to the first cooling coil via a switching valve, a second cooling coil provided in an outside air duct, and the second cooling. A refrigerator connected to the coil and connected to the first cooling coil via a switching valve, an indoor temperature detecting means provided inside the clean room, and an outside air temperature detecting means provided outside the clean room,
The refrigerator and the cooling tower are connected by a pipe, and when the outside air temperature detected by the outside air temperature detecting means becomes lower than the indoor temperature detected by the indoor temperature detecting means, the cooling tower is operated. .

The cooling equipment for the clean room according to the third aspect of the present invention has a total heat exchanger provided upstream of the first cooling coil and the fan.

The facility for utilizing exhaust heat in a clean room according to a fourth aspect of the present invention is a first cooling coil that takes in outside air from an outside air duct provided with a filter, an air heater, a fan, a second cooling coil, a humidifier and the like. In a facility for air-conditioning a clean room by an air circulation system consisting of a fan and a fan, an air-air heat exchanger provided on the downstream side of an outside air duct, and one end connected to the air circulation system to circulate the air-air heat exchanger. Of the circulating air temperature detecting means and the outside air duct provided in the clean room, the exhaust heat recovery duct having a branch duct having a flow rate adjusting means for controlling the flow rate of the circulating air discharged to the outside air via the An outside air temperature detecting means provided on the downstream side of the air-air heat exchanger, and an outside air temperature detected by the outside air temperature detecting means and a circulating air temperature detecting means. Based on the detected circulating air temperature by which controls the flow rate adjusting means.

The facility for utilizing exhaust heat in a clean room according to the fifth aspect of the present invention is an air-air heat exchanger provided upstream of an outside air duct, and one end of which is connected to an air circulation system to circulate air to perform air-air heat exchange. Exhaust heat recovery duct provided with a branch duct having a flow rate adjusting means for controlling the flow rate of the circulating air discharged to the outside air through the air conditioner, the circulating air temperature detecting means and the outside air duct provided in the clean room Of air-outside air temperature detecting means provided on the upstream side of the air-heat heat exchanger, the flow rate adjusting means based on the outside air temperature detected by the outside air temperature detecting means and the circulating air temperature detected by the circulating air temperature detecting means. To control.

The facility for utilizing waste heat of a clean room according to the sixth aspect of the present invention is an air-cooling system provided at substantially the center of an outside air duct.
A branch duct having an air heat exchanger, and one end connected to an air circulation system to release circulating air through the air-air heat exchanger to the outside air and to control flow rate of the circulating air discharged to the outside air. An exhaust heat recovery duct provided with, a circulating air temperature detecting means provided in the clean room and an outside air temperature detecting means provided upstream of the air-air heat exchanger of the outside air duct, and detected by the outside air temperature detecting means. The flow rate adjusting means is controlled based on the outside air temperature and the circulating air temperature detected by the circulating air temperature detecting means.

[0016]

The cooling facility for the clean room according to the first aspect of the present invention is provided with the first cooling device provided in the air circulation system based on the indoor temperature and the outside air temperature detected by the indoor temperature detecting means and the outside air temperature detecting means during air conditioning. The cooling water circulated through the cooling coil and the second cooling coil provided in the outside air duct is switched from each of the cooling water from the refrigerator and the cooling tower through the switching valve, and the outside air temperature detected by the outside air temperature detecting means detects the indoor temperature. When the temperature is lower than the room temperature detected by the means, the cooling tower is operated to reduce the operating capacity of the refrigerator and operate energy efficiently.

The cooling equipment for a clean room according to the second aspect of the present invention includes a cooling tower connected to the first cooling coil via a switching valve, a second cooling coil provided in an outside air duct, and the second cooling. A refrigerator connected to the coil and connected to the first cooling coil via a switching valve, an indoor temperature detecting means provided inside the clean room, and an outside air temperature detecting means provided outside the clean room,
By connecting the refrigerator and the cooling tower with a pipe, and by operating the cooling tower when the outside air temperature detected by the outside air temperature detecting means becomes lower than the indoor temperature detected by the indoor temperature detecting means, When the outside air temperature detected by the outside air temperature detecting means is lower than the indoor temperature detected by the indoor temperature detecting means, the operating capacity of the refrigerator can be reduced and the cooling tower is shared by the first cooling coil and the refrigerator. By doing so, the installation space of the cooling tower can be reduced, and the cooling equipment with a small space can be obtained.

In the cooling equipment for the clean room according to the third aspect of the present invention, the total heat exchanger is provided on the upstream side of the first cooling coil and the fan, whereby the operating capacity of the refrigerator is further reduced and the energy is efficiently used. operate.

According to a fourth aspect of the present invention, the facility for utilizing exhaust heat in a clean room releases air or air based on the circulating air temperature and the outside air temperature detected by the circulating air temperature detecting means and the outside air temperature detecting means during air conditioning. -When the amount of circulating air from the exhaust recovery duct sent to the air heat exchanger is controlled by the flow rate adjusting means and the outside air temperature detected by the outside air temperature detecting means is lower than the circulating air temperature detected by the circulating air temperature detecting means. A large amount of circulating air is sent to the air-air heat exchanger to exchange heat with the outside air, and the exhaust heat of the circulating air released to the outside air is effectively used.

The exhaust heat utilization equipment for a clean room according to the fifth aspect of the present invention is an air-air heat exchanger provided upstream of an outside air duct, and one end thereof is connected to an air circulation system to circulate the air-air heat exchanger. Exhaust heat recovery duct provided with a branch duct having a flow rate adjusting means for controlling the flow rate of the circulating air discharged to the outside air through the air conditioner, the circulating air temperature detecting means and the outside air duct provided in the clean room Of air-outside air temperature detecting means provided on the upstream side of the air-heat heat exchanger, the flow rate adjusting means based on the outside air temperature detected by the outside air temperature detecting means and the circulating air temperature detected by the circulating air temperature detecting means. By controlling, the exhaust heat of the circulating air released to the outside air is effectively used.

The exhaust heat utilization equipment for a clean room according to the sixth aspect of the present invention is an air-cooling system provided substantially at the center of an outside air duct.
A branch duct having an air heat exchanger, and one end connected to an air circulation system to release circulating air through the air-air heat exchanger to the outside air and to control flow rate of the circulating air discharged to the outside air. An exhaust heat recovery duct provided with, a circulating air temperature detecting means provided in the clean room and an outside air temperature detecting means provided upstream of the air-air heat exchanger of the outside air duct, and detected by the outside air temperature detecting means. By controlling the flow rate adjusting means based on the outside air temperature and the circulating air temperature detected by the circulating air temperature detecting means, the outside air in the outside air duct is cooled by the circulating air discharged to the outside air, and the energy to be discarded is effectively used. To do.

[0022]

Embodiments First, embodiments of the cooling equipment for a clean room according to the present invention will be described. The same or corresponding parts as those of the conventional example described with reference to FIG.

Example 1. FIG. 1 is a schematic diagram of the first embodiment of the present invention. In the figure, reference numeral 21 denotes a salt removal coil provided in the outside air duct 8 for removing sea salt particles and dust mixed in the outside air. The primary filter 12, the salt removal coil 21, the secondary filter 14 and the outside air introduction fan 15 are connected to the outside air. They are arranged in the order of air flow in the intake path. Reference numeral 22 is a second cooling coil, 23 is a humidifier, and 24 is a heating coil, which are arranged in the order of the air flow on the downstream side of the outside air introducing fan 15, and the outside air taken into the outside air duct 8 is set in advance. It is configured to approach temperature and humidity. Further, the second cooling coil 22 is connected to the pipes 25, 2
The refrigerator 27 is connected via a cooling tower 28 a for cooling the cooling water of the refrigerator 27.

Reference numeral 28 is a cooling tower for cooling the cooling water circulated to the first cooling coil 6 connected to the first cooling coil 6 provided in the exhaust duct 5 via the pipes 29 and 30,
The pipes 29 and 30 are connected to pipes 31 and 32 which are connected to the pipes 25 and 26, respectively.
Switching valves 29a, 30a, 31a, and 32a are provided at 1 and 32, respectively. These switching valves 29a to 32
a is controlled by a control unit (not shown) that controls the air conditioning of the clean room 1. Reference numeral 33 denotes an indoor temperature sensor provided inside the clean room 1 for detecting the temperature inside the room, and 34 denotes an outside air temperature sensor provided outside the clean room 1 for detecting the temperature of the outside air, which is connected to the controller.

Next, the operation of this embodiment will be described. First, the outside air taken into the outside air duct 8 from the outside air intake 9 by the outside air introduction fan 15 is removed of dust and salts while passing through the primary filter 12, the salt removal coil 21, and the secondary filter 14, and the second cooling is performed. The coil 22, the humidifier 23, and the heating coil 24 bring the temperature and humidity close to a preset temperature and introduce them into the exhaust duct 5. Then, the outside air is mixed with the circulating air from the exhaust plenum 4 to reach the temperature and humidity set by the first cooling coil 6, and the amount of the circulating air commensurate with the introduced amount of the outside air is exhausted from the exhaust port 20 while the clean room 1 is discharged. Guided to the ceiling. Then, the circulating air is the HEPA filter 2
It is cleaned by and is supplied into the clean room 1. This is repeated to air-condition the clean room 1.

During air conditioning, the indoor temperature sensor 33 and the outside air temperature sensor 34 detect the indoor temperature Ti and the outside air temperature To. For example, when the outside air temperature To is higher than the indoor temperature Ti (To> Ti), the control unit switches. The valves 31a and 32a are opened and the switching valves 29a and 30a are closed, so that the refrigerator 2
The cooling water from 7 is supplied to the first cooling coil 6 and the second cooling coil 22 to cool the outside air and the circulating air mixed with the outside air at both 6 and 22. When the outside air temperature To is lower than the indoor temperature Ti (To <Ti), the control unit closes the switching valves 31a and 32a and switches the switching valves 29a and 3a.
0a is opened, the cooling water from the refrigerator 27 is supplied to the second cooling coil 22, the cooling water from the cooling tower 28 is supplied to the first cooling coil 6, and the first cooling coil 6 mixes with the outside air. Cool down the circulating air. At this time, it is not necessary to cool the outside air in the outside air duct 8 by the second cooling coil 22.
That is, since the cooling water of the refrigerator 27 does not absorb the heat of the outside air, the cooling water is hardly heated and the operating capacity of the refrigerator 27 becomes small.

As described above, the first cooling coil 6 is based on the detection results of the detected indoor temperature Ti and outside air temperature To.
Since the cooling water from the refrigerator 27 and the cooling tower 28 circulated in the second cooling coil 22 are switched, respectively, when the outside air temperature To is lower than the indoor temperature Ti, the cooling water from the cooling tower 28 is secondly cooled. It is possible to reduce the operating capacity of the refrigerator 27 by circulating it in the coil 22 and obtain an economical cooling facility that can efficiently operate energy.

In the above-described embodiment, when the outside air temperature To is lower than the indoor temperature Ti, the switching valve 29a is used in the controller.
To 32a are controlled to supply the cooling water from the refrigerator 27 to the second cooling coil 22 and the cooling water from the cooling tower 28 to the first cooling water.
However, when the load in the clean room 1 is large, for example, the switching valves 31a, 32
a is opened and the switching valves 29a and 30a are closed to supply the cooling water from the refrigerator 27 to the first cooling coil 6 and the second cooling coil 22, and the outside air and the circulating air mixed with the outside air at both sides 6 and 22 are supplied. May be cooled, and when the load in the clean room 1 is small, the switching valve 3
1a and 32a are closed, switching valves 29a and 30a are opened, and the operation of the refrigerator 27 is completely stopped to stop the cooling tower 28.
It is also possible to supply the cooling water from the first cooling coil 6 to cool the circulating air mixed with the outside air only by the first cooling coil 6.

Example 2. FIG. 2 is a schematic diagram of a second embodiment of the present invention. In this embodiment, the cooling tower 28a connected to the refrigerator 27 of the first embodiment is omitted and the cooling tower 28a is connected to the first cooling coil 6. Piping 3 that connects the cooling tower 28 and the refrigerator 27
They are connected via 5, 36.

By virtue of such construction, the first embodiment
Almost the same action and effect are obtained, and the exhaust heat from the refrigerator 27 is released from the cooling tower 28 to the outside air. in this way,
By sharing the cooling tower 28 between the first cooling coil 6 and the refrigerator 27, the installation space of the cooling tower 28a can be reduced, and the cooling equipment having a small space can be obtained.

Example 3. FIG. 3 is a schematic diagram of a third embodiment of the present invention. In this embodiment, heat exchange and steam substance exchange are performed upstream of the first cooling coil 6 provided in the exhaust duct 5 of the first embodiment. The total heat exchanger 37 is installed to bring the circulating air mixed with the outside air close to the temperature and humidity in the clean room 1.

With this configuration, the first embodiment
The same operation and effect as the above is obtained, and the circulating air mixed with the outside air passing through the exhaust duct 5 is brought close to the preset temperature and humidity by the total heat exchanger 37,
Further, it is cooled by the first cooling coil 6. in this way,
Total heat exchanger 3 to cool the circulating air mixed with the outside air
7 is activated and the outside air temperature To is equal to the indoor temperature Ti.
If it is lower, the control unit controls the switching valves 29a to 32a to supply the cooling water from the refrigerator 27 to the second cooling coil 22 and the cooling water from the cooling tower 28 to the cooling coil 6. The operating capacity of the refrigerator 27 can be further reduced.

Next, an embodiment of the exhaust heat utilization equipment of the clean room according to the present invention will be described.

Example 4. FIG. 4 is a schematic diagram of the fourth embodiment of the present invention. In the figure, 8 is an exhaust duct 5 at one end.
A primary filter 12, an air heater 13, a secondary filter 14, and an outside air introduction fan 15 are arranged inside the outside air duct connected to the lower part of the above in order of the air flow in the outside air intake path. 22 is a second cooling coil, 23 is a humidifier,
Reference numeral 38a denotes an air-air heat exchanger, and 38b denotes an air reheater, which are respectively arranged in the order of the air flow on the downstream side of the outside air introduction fan 15, and the outside air taken into the outside air duct 8 has a preset temperature and It is configured to approach humidity.

Reference numeral 39 is an exhaust heat recovery duct which has one end connected to the floor-side end of the exhaust duct 5 and discharges the circulating air from the exhaust plenum 4 to the outside air via the air-air heat exchanger 38a. A branch duct 41 that discharges the circulating air from the exhaust plenum 4 to the outside air via a flow rate control damper 40 is connected, and the amount of the circulating air introduced into the exhaust duct 5 is equal to the amount of the circulating air and the exhaust heat recovery duct 39. And is released to the outside air through the branch duct 41. Further, the outside air taken into the outside air duct 8 is the air-air heat exchanger 38.
When passing through a, heat is exchanged with the circulating air from the exhaust heat recovery duct 39. That is, for example, when the opening degree of the flow rate control damper 40 is increased, the amount of circulating air passing through the air-air heat exchanger 38a is reduced, and the temperature of the outside air in the outside air duct 8 is hardly exchanged with the outside air. Does not rise, and when the opening is reduced, the amount of circulating air passing through the air-air heat exchanger 38a increases and heat is exchanged with the outside air in the outside air duct 8 to raise the temperature of the outside air. In this way, the amount of heat used for heat exchange, that is, the amount of exhaust heat recovery is controlled by the amount of circulating air to the air-air heat exchanger 38a controlled by the opening degree of the flow rate control damper 40, and the inside of the outside air duct 8 is controlled. The outside air is heated.

42 is a circulating air temperature sensor for detecting the temperature of the circulating air sucked into the exhaust plenum 4, 43 is an outside air temperature which is provided on the downstream side of the air reheater 38b and detects the temperature of the outside air in the outside air duct 8. It is a sensor.

Next, the operation of this embodiment will be described. First, the circulating air that has been heated and polluted in the clean room 1 is sucked into the exhaust plenum 4 by the circulating fan 7, a part of it is discharged to the outside air through the exhaust heat recovery duct 39, and the remaining circulating air is the outside air duct. Mixed with outside air from 8. Then, it is cooled to a preset temperature by the first cooling coil 6 provided in the exhaust duct 5, cleaned by passing through the HEPA filter 2, and supplied again into the clean room 1. This is repeated to air-condition the clean room 1.

During the air conditioning, the outside air intake 9 is provided in the outside air duct 8.
When the relative humidity of the outside air taken into the outside air duct 8 is 70% or more and sea salt needs to be removed, first, coarse dust is removed by the primary filter 12, and the relative humidity is 70% or less by the air heater 13. Until the sea salt in the open air is crystallized by heating until
The fine particles that could not be completely removed in step 1 are removed to clean the outside air. When the relative humidity of the outside air taken into the outside air duct 8 from the outside air inlet 9 is 70% or less and sea salt removal is not required, the primary filter 12 and the secondary filter 12 and the secondary filter are not heated by the air heater 13. The next filter 14 cleans the outside air. Then, the cleaned outside air is dehumidified and cooled to a preset humidity by the second cooling coil 22 and the humidifier 23, and heated by the air-air heat exchanger 38a and the air reheater 38b to warm the outside air. Therefore, the temperature is set close to the set temperature and introduced into the exhaust duct 5. If the outside air in the outside air duct 8 that has undergone heat exchange has a preset temperature, the outside air is introduced into the exhaust duct 5 without being heated by the air reheater 38b.

At this time, the circulating air temperature sensor 42 and the outside air temperature sensor 43 detect the circulating air temperature Tj and the outside air temperature Tg, respectively, and when the outside air temperature Tg is lower than the circulating air temperature Tj (Tg <Tj), For example, when the outside air temperature Tg is about 9 ° C. and the circulating air temperature Tj is about 26 ° C., the opening degree of the flow rate control damper 40 is reduced to increase the amount of circulating air sent to the air-air heat exchanger 38a to clean the air-air heat exchanger 38a. Heat it to about 17 ° C by exchanging heat with the converted outside air. Further, the outside air temperature Tg is about 14 ° C. and the circulating air temperature Tj is 2
When the temperature is around 6 ° C, the flow rate control damper 4 is larger than in the former case.
The opening degree of 0 is slightly increased to reduce the amount of circulating air sent to the air-air heat exchanger 38a, and heat is exchanged with the cleaned outside air to heat up to about 20 ° C. On the other hand, when the outside air temperature Tg is higher than the circulating air temperature Tj (Tg> Tj),
The opening degree of the flow rate control damper 40 is made large or fully opened to discharge the circulating air from the branch duct 41 to the outside air.

As described above, since the exhaust heat of the circulating air which is heated and polluted in the clean room 1 released to the outside air can be used for heating the outside air taken into the outside air duct 8 by the air-air heat exchanger 38a, It is possible to obtain a waste heat utilization facility that effectively uses energy. Further, since the circulating air used for heat exchange is not directly introduced into the outside air duct 8, there is no need to upsize the outside air introduction fan 15 or the like, and there is no fear of upsizing of equipment or cost increase.

Example 5. FIG. 5 is a schematic view of a fifth embodiment of the present invention. In this embodiment, the air-air heat exchanger 38a of the fourth embodiment is omitted, and the air is provided upstream of the air heater 13.
An air heat exchanger 13a is provided, and the circulating air from the exhaust heat recovery duct 39 is configured to be released to the outside air via the air-air heat exchanger 13a. The exhaust heat recovery duct 39 is used by the air-air heat exchanger 13a. The heat is exchanged between the circulating air from the outside and the outside air in the outside air duct 8. In this embodiment, the outside air temperature sensor 43 of the fourth embodiment is the primary filter 1
It is installed on the downstream side of 2.

Also in this embodiment configured as described above, as in the case described in the fourth embodiment, the clean room 1
A part of the circulating air sucked into the exhaust plenum 4 from inside is discharged from the exhaust heat recovery duct 39 to the outside air, and the remaining circulating air is mixed with the outside air from the outside air duct 8 to be cleaned and supplied to the clean room 1. To air-condition clean room 1.

During air conditioning, the circulating air temperature sensor 42 and the outside air temperature sensor 43 detect the circulating air temperature Tj and the outside air temperature Tg, respectively. The outside air temperature Tg detected by the outside air temperature sensor 43 is detected by the circulating air temperature sensor 42. When the temperature becomes lower than the circulating air temperature Tj (Tg <Tj), in the outside air duct 8, when the relative humidity of the outside air taken into the outside air duct 8 is 70% or more and sea salt needs to be removed, first, The primary filter 12 removes coarse dust, and the opening degree of the flow rate control damper 40 is made small to send a large amount of circulating air from the exhaust heat recovery duct 39 and air while exchanging heat with the air-air heat exchanger 13a. After heating the relative humidity to 70% or less with the heater 13 to crystallize the sea salt in the outside air, the secondary filter 14 removes the sea salt with the primary filter 12. The no was fine to remove, to clean the outside air. Further, when the relative humidity of the outside air taken into the outside air duct 8 is 70% or less and sea salt removal is not necessary, the air-air heat exchanger 13a and the air heater 1 are used.
The outside air is cleaned by the primary filter 12 and the secondary filter 14 without heating at 3. Next, the cleaned outside air is dehumidified and cooled to a preset humidity by the second cooling coil 22 and the humidifier 23, heated to a preset temperature by the air reheater 38b, and introduced into the exhaust duct 5.

On the other hand, when the outside air temperature Tg detected by the outside air temperature sensor 43 is higher than the circulating air temperature Tj detected by the circulating air temperature sensor 42 (Tg> Tj),
The relative humidity of the outside air taken into the outside air duct 8 is 70
When there is more than 1% and sea salt needs to be removed, the primary filter 1
In step 2, the coarse dust is removed, the flow control damper 40 is fully opened, and the relative humidity is 70% or less in the air heater 13 without heat exchange in the air-air heat exchanger 13a to which circulating air is not sent. After heating until the sea salt in the outside air is crystallized, the secondary filter 14 removes fine particles that cannot be completely removed by the primary filter 12 to clean the outside air. At this time, the circulating air is discharged as the outside air from the branch duct 41. Further, when the relative humidity of the outside air taken into the outside air duct 8 is 70% or less and the sea salt removal is unnecessary,
The opening degree of the flow rate control damper 40 is fully opened, the circulating air is not sent to the air-air heat exchanger 13a, and the outside air is cleaned by the primary filter 12 and the secondary filter 14 without being heated by the air heater 13. Next, the cleaned outside air is dehumidified and cooled to a preset humidity by the second cooling coil 22 and the humidifier 23, and is heated to a preset temperature by the air reheater 38b and introduced into the exhaust duct 5.

As described above, since the amount of the circulating air sent to the air-air heat exchanger 13a can be easily controlled by the simple operation of the flow rate control damper 40, the exhaust heat of the circulating air discharged to the outside air can be reduced. It can be used effectively.

In the above-described Embodiments 4 and 5, when the outside air heat-exchanged by the air-air heat exchanger 38a or the air-air heat exchanger 13a is reheated by the air reheater 38b or the air heater 13. However, the outside air may be reheated by only the air-air heat exchangers 38a and 13a. Also, although the case where one end of the exhaust heat recovery duct 39 is connected to the floor-side end of the exhaust duct 5 is shown, it may be connected to the downstream side of the first cooling coil 6, the exhaust plenum 4 or the fan filter. It may be connected to the upstream side of 3.

Example 6. FIG. 6 is a schematic diagram of a sixth embodiment of the present invention. In this embodiment, the air-air heat exchanger 38a of the fourth embodiment is omitted and the air-air heat is provided upstream of the second cooling coil 22. The exchanger 22a is provided, and the exhaust heat recovery duct 39 is provided.
Circulating air from the air-air heat exchanger 22a is discharged to the outside air via the air-air heat exchanger 22a.
Thus, the circulating air from the exhaust heat recovery duct 39 and the outside air in the outside air duct 8 are heat-exchanged. In this embodiment, the outside air temperature sensor 43 of the fourth embodiment is installed on the upstream side of the air-air heat exchanger 22a, and one end of the outside air duct 8 is connected to the floor side end of the exhaust duct 5 to remove the exhaust air. One end of the heat recovery duct 39 is connected to the downstream side of the first cooling coil 6.

Also in this embodiment configured as described above, as in the case described in the fourth embodiment, the clean room 1
A part of the circulating air sucked into the exhaust plenum 4 from inside is discharged from the exhaust heat recovery duct 39 to the outside air, and the remaining circulating air is mixed with the outside air from the outside air duct 8 to be cleaned and supplied to the clean room 1. To air-condition clean room 1.

During air conditioning, in the outside air duct 8, when the relative humidity of the outside air taken into the outside air duct 8 by the outside air introduction fan 15 is 70% or more and sea salt needs to be removed, first, the primary filter 12 is used to remove coarse dust. Is removed and the relative humidity is reduced to 70% or less by the air heater 13 to crystallize sea salt in the outside air, and then the secondary filter 14 removes fine particles that cannot be completely removed by the primary filter 12. And clean the outside air. When the relative humidity of the outside air taken into the outside air duct 8 is 70% or less and sea salt removal is not required, the outside air is removed by the primary filter 12 and the secondary filter 14 without being heated by the air heater 13. To clean.

Next, when the outside air temperature Tg detected by the outside air temperature sensor 43 becomes higher than the circulating air temperature Tj detected by the circulating air temperature sensor 42 (Tg> Tj), the opening degree of the flow rate control damper 40 is reduced. Air-air heat exchanger 2
A large amount of circulating air from the exhaust duct 5 cooled by the first cooling coil 6 is sent to the 2a side, and the cleaned outside air is cooled by exchanging heat with the air-air heat exchanger 22a.
The second cooling coil 22 and the humidifier 23 dehumidify and cool down to the preset humidity, and the air reheater 38b heats it to a preset temperature and introduces it into the exhaust duct 5.

On the other hand, when the outside air temperature Tg detected by the outside air temperature sensor 43 becomes lower than the circulating air temperature Tj detected by the circulating air temperature sensor 42 (Tg <Tj), the opening degree of the flow rate control damper 40 is fully opened. Air-air heat exchanger 2
The circulating air is not sent to the 2a side, and the cleaned outside air is
The air reheater 38b is dehumidified by the humidifier 23 without being cooled by the cooling coil 22 of FIG.
Exhaust duct 5 after heating to a preset temperature with
Introduce to.

As described above, the outside air in the outside air duct 8 can be cooled by using the circulating air discharged to the outside air by the air-air heat exchanger 22a, and the load on the second cooling coil can be reduced. Therefore, it is possible to obtain the energy-saving equipment for utilizing exhaust heat.

In the above-described embodiment, the case where the outside air heat-exchanged by the air-air heat exchanger 22a is cooled by the second cooling coil 22 has been described as an example. However, only the air-air heat exchanger 22a removes the outside air. You may make it provide cooling. Further, although the case where one end of the exhaust heat recovery duct 39 is connected to the downstream side of the first cooling coil 6 is shown, it may be connected to the downstream side of the circulation fan 7 or the upstream side of the fan filter 3.

[0054]

As described above, the cooling equipment for the clean room according to the first aspect of the present invention is an equipment for cooling the inside of the clean room by taking in the outside air from the outside air duct and using the air circulation system including the first cooling coil and the fan. , A cooling tower connected to the first cooling coil via a switching valve, a second cooling coil provided in the outside air duct and the second cooling coil, and switched to the first cooling coil A refrigerator connected through a valve, an indoor temperature detecting means provided inside the clean room and an outside air temperature detecting means provided outside the clean room, and the outside air temperature detected by the outside air temperature detecting means is the indoor temperature detecting means. When the temperature becomes lower than the room temperature detected by, the cooling tower is operated, so the operating capacity of the refrigerator can be reduced and the energy consumption can be reduced. It is possible to obtain an efficient economical clean room of cooling equipment that can be operated ghee.

The cooling equipment for a clean room according to the second aspect of the present invention includes a cooling tower connected to the first cooling coil via a switching valve, a second cooling coil provided in an outside air duct, and the second cooling. A refrigerator connected to the coil and connected to the first cooling coil via a switching valve, an indoor temperature detecting means provided inside the clean room, and an outside air temperature detecting means provided outside the clean room,
The refrigerator and the cooling tower are connected by piping, and when the outside air temperature detected by the outside air temperature detecting means becomes lower than the indoor temperature detected by the indoor temperature detecting means, the cooling tower is operated so that the freezing is performed. The operating capacity of the machine can be reduced and energy can be efficiently used, and the space for cooling equipment can be reduced.

In the cooling equipment for the clean room according to the third aspect of the invention, since the total heat exchanger is provided on the upstream side of the first cooling coil and the fan, the operating capacity of the refrigerator can be further reduced and the efficiency can be improved. A clean room cooling system can be obtained.

The facility for utilizing waste heat in a clean room according to the fourth aspect of the present invention is the first cooling coil which takes in outside air from an outside air duct provided with a filter, an air heater, a fan, a second cooling coil, a humidifier and the like. In a facility for air-conditioning a clean room by an air circulation system consisting of a fan and a fan, an air-air heat exchanger provided on the downstream side of an outside air duct and one end connected to the air circulation system to circulate the air-air heat exchanger. Of the circulating air temperature detecting means and the outside air duct provided in the clean room, the exhaust heat recovery duct having a branch duct having a flow rate adjusting means for controlling the flow rate of the circulating air discharged to the outside air via the An outside air temperature detecting means provided on the downstream side of the air-air heat exchanger, and an outside air temperature detected by the outside air temperature detecting means and a circulating air temperature detecting means. Since the flow rate adjusting means is controlled based on the circulating air temperature detected by, the exhaust heat of the circulating air released to the outside air can be effectively used, and the exhaust heat utilization equipment of the clean room with high energy efficiency can be obtained. it can.

The facility for utilizing waste heat of a clean room according to the fifth aspect of the present invention is an air-air heat exchanger provided upstream of an outside air duct, and one end of which is connected to an air circulation system to circulate the air-air heat exchange. Exhaust heat recovery duct provided with a branch duct having a flow rate adjusting means for controlling the flow rate of the circulating air discharged to the outside air through the air conditioner, the circulating air temperature detecting means and the outside air duct provided in the clean room Of air-outside air temperature detecting means provided on the upstream side of the air-heat heat exchanger, the flow rate adjusting means based on the outside air temperature detected by the outside air temperature detecting means and the circulating air temperature detected by the circulating air temperature detecting means. Since it is controlled, it is possible to easily and easily use the exhaust heat of the circulating air that is released to the outside air, and obtain an energy-saving clean room exhaust heat utilization facility. It is possible.

The facility for utilizing waste heat of a clean room according to the sixth aspect of the present invention is an air-cooling system provided at substantially the center of the outside air duct.
A branch duct having an air heat exchanger and a flow rate adjusting means having one end connected to an air circulation system to release the circulating air to the outside air through the air-air heat exchanger and to control the flow rate of the circulating air discharged to the outside air. An exhaust heat recovery duct provided with, a circulating air temperature detecting means provided in the clean room and an outside air temperature detecting means provided upstream of the air-air heat exchanger of the outside air duct, and detected by the outside air temperature detecting means. Since the flow rate adjusting means is controlled on the basis of the outside air temperature and the circulating air temperature detected by the circulating air temperature detecting means, the circulating air discharged to the outside air can be effectively used for cooling and the like, and the cooling coil etc. It is possible to obtain an energy-saving equipment for utilizing exhaust heat in a clean room by reducing the load.

[Brief description of drawings]

FIG. 1 is a schematic view of a first embodiment of a clean room cooling facility according to the present invention.

FIG. 2 is a schematic diagram of a second embodiment of the cooling equipment for the clean room according to the present invention.

FIG. 3 is a schematic diagram of a third embodiment of the cooling equipment for the clean room according to the present invention.

FIG. 4 is a schematic diagram of a fourth embodiment of the exhaust heat recovery equipment of the clean room according to the present invention.

FIG. 5 is a schematic diagram of a fifth embodiment of the exhaust heat recovery equipment of the clean room according to the present invention.

FIG. 6 is a schematic view of a sixth embodiment of the exhaust heat recovery equipment of the clean room according to the present invention.

FIG. 7 is a configuration diagram of a conventional clean room.

[Explanation of symbols]

 1 Clean Room 6 1st Cooling Coil 7 Circulation Fan 8 Outside Air Duct 12 Primary Filter 13 Air Heater 13a, 22a, 38a Air-Air Heat Exchanger 14 Secondary Filter 15 Outside Air Introducing Fan 22 Second Cooling Coil 23 Humidifier 27 Refrigerator 28 Cooling tower 29a, 30a, 31a, 32a Switching valve 33 Indoor temperature sensor 34, 43 Outside air temperature sensor 35, 36 Piping 37 Total heat exchanger 38b Air reheater 39 Exhaust heat recovery duct 40 Flow control damper 41 Branch duct 42 Circulating air temperature sensor

─────────────────────────────────────────────────── ───

[Procedure amendment]

[Submission date] January 27, 1994

[Procedure Amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0026

[Correction method] Change

[Correction content]

During air conditioning, the indoor temperature sensor 33 and the outside air temperature sensor 34 detect the indoor temperature Ti and the outside air temperature To. For example, when the outside air temperature To is higher than the indoor temperature Ti (To> Ti), the control unit switches. The valves 31a and 32a are opened and the switching valves 29a and 30a are closed, so that the refrigerator 2
The cooling water from 7 is supplied to the first cooling coil 6 and the second cooling coil 22 to cool the outside air and the circulating air mixed with the outside air at both 6 and 22. When the outside air temperature To is lower than the indoor temperature Ti (To <Ti), the control unit closes the switching valves 31a and 32a and switches the switching valves 29a and 3a.
0a is opened, the cooling water from the refrigerator 27 is supplied to the second cooling coil 22, the cooling water from the cooling tower 28 is supplied to the first cooling coil 6, and the first cooling coil 6 mixes with the outside air. Cool down the circulating air. At this time, the cooling water of the refrigerator 27 does not need to be supplied to the first cooling coil 6, so the operating capacity of the refrigerator 27 becomes small.

[Procedure Amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0038

[Correction method] Change

[Correction content]

During the air conditioning, the outside air intake 9 is provided in the outside air duct 8.
When the relative humidity of the outside air taken into the outside air duct 8 is 70% or more and the sea salt needs to be removed, first, coarse dust is removed by the primary filter 12, and the relative humidity is 70% or less by the air heater 13. Until the sea salt in the open air is crystallized by heating until
The fine particles that could not be completely removed in step 1 are removed to clean the outside air. When the relative humidity of the outside air taken into the outside air duct 8 from the outside air inlet 9 is 70% or less and sea salt removal is not required, the primary filter 12 and the secondary filter 12 and the secondary filter are not heated by the air heater 13. The next filter 14 cleans the outside air. Then, the cleaned outside air is dehumidified or humidified to a preset humidity by the second cooling coil 22 or the humidifier 23, and heated by the air-air heat exchanger 38a and the air reheater 38b to warm the outside air. Therefore, the temperature is set close to the set temperature and introduced into the exhaust duct 5. If the outside air in the outside air duct 8 that has undergone heat exchange has a preset temperature, the outside air is introduced into the exhaust duct 5 without being heated by the air reheater 38b.

[Procedure 3]

[Document name to be amended] Statement

[Correction target item name] 0039

[Correction method] Change

[Correction content]

At this time, the circulating air temperature sensor 42 and the outside air temperature sensor 43 detect the circulating air temperature Tj and the outside air temperature Tg, respectively, and when the outside air temperature Tg is lower than the circulating air temperature Tj (Tg <Tj), For example, when the outside air temperature Tg is about 9 ° C. and the circulating air temperature Tj is about 26 ° C., the opening degree of the flow rate control damper 40 is reduced to increase the amount of circulating air sent to the air-air heat exchanger 38a to clean the air-air heat exchanger 38a. Heat it to about 17 ° C by exchanging heat with the converted outside air. Further, the outside air temperature Tg is about 14 ° C. and the circulating air temperature Tj is 2
When the temperature is around 6 ° C, the flow rate control damper 4 is more than the former case.
The opening degree of 0 is slightly increased to reduce the amount of circulating air sent to the air-air heat exchanger 38a, and heat is exchanged with the cleaned outside air to heat up to about 17 ° C. On the other hand, when the outside air temperature Tg is higher than the circulating air temperature Tj (Tg> Tj),
The opening degree of the flow rate control damper 40 is made large or fully opened to discharge the circulating air from the branch duct 41 to the outside air.

[Procedure amendment 4]

[Document name to be amended] Statement

[Correction target item name] 0041

[Correction method] Change

[Correction content]

Example 5. FIG. 5 is a schematic view of a fifth embodiment of the present invention. In this embodiment, the air-air heat exchanger 38a of the fourth embodiment is omitted, and the air is provided upstream of the air heater 13.
An air heat exchanger 13a is provided, and the circulating air from the exhaust heat recovery duct 39 is configured to be released to the outside air via the air-air heat exchanger 13a. The exhaust heat recovery duct 39 is used by the air-air heat exchanger 13a. The heat is exchanged between the circulating air from the outside and the outside air in the outside air duct 8. In this embodiment, the outside air temperature sensor 43 of the fourth embodiment is the air heater 13.
It is installed on the downstream side of.

[Procedure Amendment 5]

[Document name to be amended] Statement

[Correction target item name] 0044

[Correction method] Change

[Correction content]

On the other hand, when the outside air temperature Tg detected by the outside air temperature sensor 43 is higher than the circulating air temperature Tj detected by the circulating air temperature sensor 42 (Tg> Tj),
The relative humidity of the outside air taken into the outside air duct 8 is 70
When there is more than 1% and sea salt needs to be removed, the primary filter 1
In step 2, the coarse dust is removed, the flow control damper 40 is fully opened, and the relative humidity is 70% or less in the air heater 13 without heat exchange in the air-air heat exchanger 13a to which circulating air is not sent. After heating until the sea salt in the outside air is crystallized, the secondary filter 14 removes fine particles that cannot be completely removed by the primary filter 12 to clean the outside air. At this time, the circulating air is discharged as the outside air from the branch duct 41. Further, when the relative humidity of the outside air taken into the outside air duct 8 is 70% or less and the sea salt removal is unnecessary,
The opening degree of the flow rate control damper 40 is fully opened, the circulating air is not sent to the air-air heat exchanger 13a, and the outside air is cleaned by the primary filter 12 and the secondary filter 14 without being heated by the air heater 13. Then, the cleaned outside air is dehumidified or humidified to a preset humidity by the second cooling coil 22 or the humidifier 23, and heated to a preset temperature by the air reheater 38b,
It is introduced into the exhaust duct 5.

[Procedure correction 6]

[Document name to be amended] Statement

[Correction target item name] 0047

[Correction method] Change

[Correction content]

Example 6. FIG. 6 is a schematic diagram of a sixth embodiment of the present invention. In this embodiment, the air-air heat exchanger 38a of the fourth embodiment is omitted and the air-air heat is provided upstream of the second cooling coil 22. The exchanger 22a is provided, and the exhaust heat recovery duct 39 is provided.
Circulating air from the air-air heat exchanger 22a is discharged to the outside air via the air-air heat exchanger 22a.
Thus, the circulating air from the exhaust heat recovery duct 39 and the outside air in the outside air duct 8 are heat-exchanged. In this embodiment, the outside air temperature sensor 43 of the fourth embodiment is installed on the downstream side of the cooling coil 22 and one end of the outside air duct 8 is connected to the floor side end of the exhaust duct 5 to exhaust heat recovery duct 39. Is connected to the downstream side of the first cooling coil 6.

[Procedure Amendment 7]

[Document name to be amended] Statement

[Correction target item name] 0050

[Correction method] Change

[Correction content]

Next, when the outside air temperature Tg detected by the outside air temperature sensor 43 becomes higher than the circulating air temperature Tj detected by the circulating air temperature sensor 42 (Tg> Tj), the opening degree of the flow rate control damper 40 is reduced. Air-air heat exchanger 2
A large amount of circulating air from the exhaust duct 5 cooled by the first cooling coil 6 is sent to the 2a side, and the cleaned outside air is cooled by exchanging heat with the air-air heat exchanger 22a.
The second cooling coil 22 or the humidifier 23 dehumidifies or humidifies to the preset humidity, and the air reheater 38b heats it to a preset temperature and introduces it into the exhaust duct 5.

[Procedure Amendment 8]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 5

[Correction method] Change

[Correction content]

[Figure 5]

[Procedure Amendment 9]

[Document name to be corrected] Drawing

[Name of item to be corrected] Figure 6

[Correction method] Change

[Correction content]

[Figure 6]

Claims (6)

[Claims] 1. A facility for cooling the inside of a clean room by taking in outside air from an outside air duct and cooling the inside of a clean room by an air circulation system consisting of a first cooling coil and a fan, wherein the cooling is connected to the first cooling coil via a switching valve. A tower, a second cooling coil provided in the outside air duct and a refrigerator connected to the second cooling coil and also connected to the first cooling coil via a switching valve, and in the clean room And an outside air temperature detecting means provided outside the clean room, wherein the outside air temperature detected by the outside air temperature detecting means is lower than the indoor temperature detected by the indoor temperature detecting means. A cooling facility for a clean room, characterized in that the cooling tower is operated. 2. A facility for cooling the inside of a clean room by taking in outside air from an outside air duct and cooling the inside of a clean room by an air circulation system consisting of a first cooling coil and a fan, wherein the cooling is connected to the first cooling coil via a switching valve. A tower, a second cooling coil provided in the outside air duct and a refrigerator connected to the second cooling coil and also connected to the first cooling coil via a switching valve, and in the clean room The indoor temperature detecting means provided in and the outside air temperature detecting means provided outside the clean room, the refrigerator and the cooling tower are connected by piping, and the outside air temperature detected by the outside air temperature detecting means is A cooling facility for a clean room, characterized in that the cooling tower is operated when the temperature becomes lower than the room temperature detected by the room temperature detecting means. . 3. The cooling equipment for a clean room according to claim 1, wherein a total heat exchanger is provided upstream of the first cooling coil and the fan. 4. A clean room is air-conditioned by taking in outside air from an outside air duct provided with a filter, an air heater, a fan, a second cooling coil, a humidifier, etc. The air-air heat exchanger provided on the downstream side of the outside air duct, and one end of which is connected to the air circulation system to circulate the circulating air.
An exhaust heat recovery duct provided with a branch duct having a flow rate adjusting means for controlling the flow rate of the circulating air discharged to the outside air via an air heat exchanger, and the circulating air temperature provided in the clean room An outside air temperature detecting means provided downstream of the air-air heat exchanger in the outside air duct, the outside air temperature detected by the outside air temperature detecting means and the circulating air detected by the circulating air temperature detecting means. A facility for utilizing exhaust heat in a clean room, characterized in that the flow rate adjusting means is controlled based on temperature. 5. A filter, a fan, a second cooling coil,
In a facility for taking in outside air from an outside air duct provided with a humidifier or the like to air-condition the inside of a clean room by an air circulation system including a first cooling coil and a fan, an air-air heat exchange provided upstream of the outside air duct. And one end of which is connected to the air circulation system to circulate air to the air-
An exhaust heat recovery duct provided with a branch duct having a flow rate adjusting means for controlling the flow rate of the circulating air discharged to the outside air via an air heat exchanger, and the circulating air temperature provided in the clean room An outside air temperature detecting means provided upstream of the air-air heat exchanger in the outside air duct, the outside air temperature detected by the outside air temperature detecting means and the circulating air detected by the circulating air temperature detecting means. A facility for utilizing exhaust heat in a clean room, characterized in that the flow rate adjusting means is controlled based on temperature. 6. An air circulation system including a first cooling coil and a fan for taking in outside air from an outside air duct provided with a filter, an air heater, a fan, a second cooling coil, a humidifier, etc. In the facility, an air-air heat exchanger provided substantially in the center of the outside air duct, and one end of which is connected to the air circulation system to circulate the circulating air.
An exhaust heat recovery duct provided with a branch duct having a flow rate adjusting means for controlling the flow rate of the circulating air discharged to the outside air via an air heat exchanger, and the circulating air temperature provided in the clean room An outside air temperature detecting means provided upstream of the air-air heat exchanger in the outside air duct, the outside air temperature detected by the outside air temperature detecting means and the circulating air detected by the circulating air temperature detecting means. A facility for utilizing exhaust heat in a clean room, characterized in that the flow rate adjusting means is controlled based on temperature.