JP2003322375A - Air-conditioning system for clean room - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To allow an air-conditioning system for a clean room to rationally process fresh air. <P>SOLUTION: A series of circulation paths for causing circulation of indoor air is formed by an underfloor chamber 3, a wall shaft 7, and a ceiling chamber 4 all of which are provided in the clean room 1, to cause circulation of the air while processing indoor loads using an air conditioner provided on the circulation paths. The wall shaft is provided in a position facing an exterior wall and an outside air conditioner 21 is installed therein. Fresh air OA is directly taken in by the outside air conditioner; the fresh air processed is directly supplied into the wall shaft. The outside air conditioner is constructed as a unit into which a variety of components for processing fresh air, including fans, cooling and heating coils, filters and the like, can be optionally combined and incorporated. Exterior panels of the outside air conditioner are provided to serve also as exterior walls forming the wall shaft. The air conditioner 20 is a unit of the same specifications as the outside air conditioner 21. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to an air conditioning system for a clean room.

[0002]

2. Description of the Related Art A conventional example of a clean room air conditioning system is shown in FIG. This is applied to a clean room 1 in a semiconductor or liquid crystal manufacturing factory. The floor surface 2 of the clean room 1 is formed by a grating, and an underfloor chamber 3 also serving as an auxiliary machine space is provided below the floor, and a ceiling is provided at the ceiling. A fan filter unit (FFU) in which a chamber 4 is provided and a blower and a filter are integrated on the ceiling surface 5.
6 is installed, and a wall shaft 7 that connects the underfloor chamber 3 and the ceiling chamber 4 is provided on the peripheral wall portion, and a series of circulation paths through which indoor air circulates by the underfloor chamber 3, the wall shaft 7, and the ceiling chamber 4. It was formed. An air conditioner 8 for indoor load processing is provided in the middle of the circulation path, and the air conditioner 8 circulates the indoor air while processing the indoor air. The air conditioner 8 is provided with a dry coil for processing the sensible heat load in the room, and is usually installed in the underfloor chamber 3 and the wall shaft 7 as shown in the example of the drawing, and the room air is supplied by the air conditioner 8. Inhalation from the floor surface 2 into the underfloor chamber 3 as return air RA,
Supply air SA processed by the air conditioner 8 to the wall shaft 7
Is supplied to the ceiling chamber 4 through the FFU 6, and the supply air SA is blown downward from the ceiling chamber 4 into the clean room 1 by the FFU 6.

Further, in this type of clean room, since the indoor pressure is applied, the external air conditioner 10 which is an air conditioner for treating the outside air is used.
Is installed in the machine room 11, and from the outside air intake 12 to the duct 13
The fresh air OA taken in through the air is processed by the air conditioner 10 and supplied through the duct 14 into the ceiling chamber 4 from the air outlet 15 and mixed with the air supply SA from the air conditioner 8 in the ceiling chamber 4 by the FFU 6. The air is blown out into the room, and the room air is exhausted by an exhaust fan (not shown) or the like, leaving a portion corresponding to the pressure. In the illustrated example, the machine room 11 for installing the external conditioner 10 is provided on the second floor (the floor where the floor surface 2 of the clean room 1 is provided),
On the lower floor, there are various rooms 16 such as a utility room and a living room.

[0004]

By the way, in planning a clean room of this kind, sufficient space saving and cost saving are required from the economical point of view. However, in the above conventional air conditioning system, the external air conditioner 10 is used. Since a machine room 11 for installation is required, a considerable space must be secured for that purpose, and in order to supply the outside air OA processed by the external conditioner 10 to the entire clean room 1 without any deviation, the ceiling chamber Duct 1 for introducing outside air into 4
Since it is necessary to lay 4 and to provide the blow-out port 15, construction for that is necessary, which is an obstacle in saving space and cost.

It is also desired that the air conditioning system in this type of clean room is flexible and widely adaptable to the update or change of the manufacturing equipment. However, in the above conventional air conditioning system, for example, the amount of outside air introduced is greatly increased. Such a change cannot be dealt with, and in that case, a large-scale repair work for the entire system was required.

In view of the above circumstances, it is an object of the present invention to provide an air conditioning system suitable for use in a clean room, and particularly to provide an air conditioning system capable of more reasonably performing outside air treatment.

[0007]

According to a first aspect of the present invention, an underfloor chamber, a wall shaft and a ceiling chamber are provided in a lower floor portion, a peripheral wall portion and a ceiling portion of a clean room, respectively, and the underfloor chamber, the wall shaft and the ceiling chamber are provided. A series of circulation paths that circulate the indoor air are formed, and the indoor air is circulated while the indoor load is processed by an air conditioner installed in the middle of the circulation path, and the required amount of outside air is taken in by an external air conditioner to load the outside air. In a clean room air conditioning system that is configured to process and supply the air to the room, a wall shaft is installed at a position facing the outer wall, and an external air conditioner is installed inside the air conditioner, and the outdoor air is directly taken into the outdoor air conditioner. Further, it is characterized in that the treated outside air is directly supplied into the wall shaft by an external conditioner.

According to a second aspect of the present invention, in the air conditioning system for a clean room according to the first aspect of the invention, an external air conditioner is arbitrarily combined with various components for outside air treatment such as a blower, a cooling / heating coil, and a filter. It is characterized in that it is configured as an installable unit.

According to a third aspect of the present invention, in the clean room air-conditioning system according to the first or second aspect of the present invention, an exterior panel is provided on the external air conditioner, and the exterior panel is also provided as an outer wall forming a wall shaft. It is characterized by

According to a fourth aspect of the present invention, in the air conditioning system for a clean room according to the second or third aspect of the invention, the air conditioner for processing the indoor load is configured as a unit having a common standard with the external air conditioner. To do.

[0011]

DETAILED DESCRIPTION OF THE INVENTION An embodiment of the present invention will be described with reference to FIGS. The air conditioning system of this embodiment is shown in FIG.
Similar to the one shown in Fig. 1, it is intended for a clean room 1 in a manufacturing factory of semiconductors, liquid crystal, etc. Of the air conditioner 20 for indoor load processing and the indoor load processing air conditioner 20 to process the indoor load.
Although it is basically based on circulating the indoor air by the FU 6, in the air conditioning system of the present embodiment, the air conditioner 20 for indoor load processing is unitized and installed in the wall shaft 7, and at the same time for outdoor air processing. The external conditioner 21 is also unitized and installed in the wall shaft 7.

In the system of this embodiment, the air conditioner 20 and the external conditioner 21 installed in the wall shaft 7 are
Units U having the same shape and the same dimensions are assembled according to a common standard, and these units U can be installed by arranging them in the outer peripheral portion side by side.
A part of the wall shaft 7 is configured by itself. That is, as shown in FIG.
And the unit U as the external conditioner 21 is provided with the outer peripheral columns 25 and
When installed in a space surrounded by a perimeter beam 26 (a reverse beam in the illustrated example) which is a floor beam on the floor, the exterior panel 27 of each unit U also serves as the outer wall of the clean room 1, The interior panel 28 also serves as an interior wall that divides the wall shaft 7 and the clean room 1. Therefore, only by connecting the connecting panel 29 to the inside and outside of the outer peripheral pillar 25, the wall shaft 7 can be installed.
Of the first floor (the portion facing the underfloor chamber 3) is formed, and the units U themselves form a part of the wall shaft 7.

The air conditioner 20 and the external conditioner 2 described above
Each unit U constituting 1 is configured by arbitrarily combining the components required for each unit. That is, as shown in FIGS. 2 and 3, the air conditioner 20 for indoor load processing in the present embodiment includes two dry coil components 31 each including a dry coil 30 provided with a blower, and the inside of the wall shaft 7. It is composed of two penetration components 34 for passing pipes 32 and ducts 33 penetrating through, and as shown in FIG. 3, returns air from the bottom surface of the dry coil component 31 (top surface of the penetration component 34). Inhaling RA, processing the sensible heat load of the room with the dry coil 30, and supplying air SA
Is configured to blow upward into the wall shaft 7.

Further, as shown in FIG. 2 and FIG. 4, the outside air conditioner 21 for processing the outside air load in the present embodiment uses one of the two dry coil components 31 in the air conditioner 20 as outside air. It replaces the intake component 41 and incorporates the coil component 42 and the humidification / filter component 43. The outside air intake component 41 includes an outside air intake port 44 and an outside air intake blower 45, and the outside air intake port 44 is provided as necessary.
A filter can be attached inside the. The coil component 42 is provided with a heating coil 46 and a cooling coil 47 for treating the outside air load, the humidification / filter component 43 is provided with a humidifier 48 and a filter 49, and these respective components are combined as illustrated. Then, the outside air OA taken in from the outside air intake port 44 is subjected to a desired outside air treatment through the respective components as indicated by the arrow, and the indoor load treatment is also performed by the dry coil component 31, and the treated outside air OA is supplied. Wall shaft 7 by mixing with air SA
Is configured to feed upward.

The unit U as the air conditioner 20 and the external conditioner 21 has the capability of each component according to the processing capacity and performance required for the air conditioner 20 and the external conditioner 21 based on the specifications of the clean room 1. The performance, performance, and combination of those components can be freely selected. For example, as the humidification / filter component 43 in the external air conditioner 21, a medium performance filter or a HEPA filter may be selected and used according to the cleanliness of the outside air,
If necessary, a pre-filter or a filter for removing various chemical substances may be used together. Further, unnecessary components may be omitted. For example, the dry coil component 31 in the above-mentioned external conditioner 21 may be omitted and dedicated to the outside air treatment, or the pipe 32 or the duct 33.
The penetrating component 34 may be omitted if it is not necessary to envision the penetration. However, in any case, in order that the exterior panel 27 and the interior panel 28 of these units U can also serve as the outer wall and the interior wall, and the installation positions of these units can be freely changed as needed, which unit U is However, at least the external dimensions should be unified.

The form of the unit U is as follows.
A structure in which a frame serving as a skeleton of the entire unit U is assembled, predetermined components are incorporated at predetermined positions in the frame, and the interior panel 28 and the exterior panel 27 are attached to the inside and outside of the frame can be suitably adopted. Alternatively, it is conceivable that the components U have independent casings, the components U are arranged side by side and stacked vertically, and the casings are connected to each other to form the unit U.

According to the air conditioning system of this embodiment, since the external conditioner 21 is installed in the wall shaft 7, it is necessary to install the external conditioner 10 in the related art as shown in FIG. The machine room 11 is not required, and the space can be effectively used as various rooms 16 such as living rooms, so that the space can be sufficiently saved and the space efficiency is excellent. Further, when it is necessary to greatly increase or decrease the amount of introduced outside air when the manufacturing equipment in the clean room 1 is changed or renewed, the outside air conditioner 21
It is possible to flexibly and widely support only by increasing or decreasing the number of installed units, and is far more flexible than the conventional system.

Further, the outside air conditioner 21 is installed in the wall shaft 7 so that the outside air OA is directly taken in from the outside air inlet 44 and the treated outside air OA is directly supplied to the wall shaft 7. Therefore, the ducts 13 and 14 for introducing the outside air and the air outlet 15 which have been conventionally required can be completely eliminated, and the cost can be saved accordingly. In addition, the duct 14 and the outlet 15 for supplying the outside air
Even if the above is omitted, the outside air OA supplied from the external conditioner 21 to the wall shaft 7 is promptly and surely mixed with the supply air SA from the air conditioner 20 in the wall shaft 7, and in the present embodiment. Since the four external air conditioners 21 are dispersedly arranged at the four corners of the clean room 1, the outside air OA from each of the external air conditioners 21 naturally spreads to the entire clean room 1 together with the air supply SA, and the outside air distribution may be biased. There is no.

Further, in this embodiment, since the external conditioner 21 in the form of the unit U in which various components are arbitrarily combined is adopted, it is applied to a clean room of various specifications and scales by changing the selection and combination of components. It is possible, and it is possible to deal flexibly and widely by changing only the necessary components according to the update or change of the manufacturing equipment, or by adding or removing. Moreover, in the present embodiment, the air conditioner 20 for indoor load processing is also the unit U of the common standard with the external conditioner 21,
The air conditioner 20 can be changed to the external air conditioner 21 only by changing the components, and vice versa, and therefore is more flexible. Further, there is an advantage that the cost can be reduced and the construction period can be shortened by sharing each component and simplifying the construction, and the design can be rationalized.

Moreover, since the exterior panel 27 of the unit U serving as the external air conditioner 21 and the air conditioner 20 also serves as the exterior wall, and the interior panel 28 also serves as the interior wall,
The structure work for forming the wall shaft 7 can be reduced, and the maintenance / inspection work for the external conditioner 21 and the air conditioner 20 can be performed from the outside by removing the exterior panel 27, which is excellent in maintainability. Is. Also, if it becomes necessary to remove the entire unit U, it is possible to pull out the entire unit U as it is and remove it, and when installing a new unit U, remove the unit U from the outside. Since it can be installed as it is, the work in the clean room 1 can be minimized.

The above-described embodiment is merely an example, and the present invention is not limited to the above-described embodiment. Of course, an external air conditioner is installed in a wall shaft to take in and supply outside air in a ductless manner. It goes without saying that appropriate design changes can be made as long as it is based on the above, and it can be widely applied to clean rooms of various specifications, scales, applications, and forms.

[0022]

According to the air conditioning system of the first aspect of the present invention, the wall shaft, which is the circulation path of the indoor air in the clean room, is provided at a position facing the outer wall, and the outside air conditioner is installed inside the wall shaft to directly expose the outside air. Since the outside air that has been taken in and treated in the above is directly supplied into the wall shaft, no special machine room space is required for installing the external conditioner, and the duct for supplying the outside air can be eliminated, and therefore, It is excellent in space efficiency and flexibility, can reduce costs, and is optimal as an air conditioning system applied to a clean room.

According to the second aspect of the present invention, since the external air conditioner is configured as a unit that can be incorporated by arbitrarily combining various components, a clean room of various specifications and scales can be obtained by selecting and combining the optimum components. It is possible to deal with it flexibly and widely by changing only the necessary components according to the update or change of the manufacturing equipment, or by adding or removing the required components. The cost can be reduced and the construction period can be shortened by streamlining and simplification of construction, and the design can be rationalized.

According to the third aspect of the invention, since the exterior panel of the external conditioner also serves as the outer wall forming the wall shaft, it is possible to reduce the skeleton work for forming the wall shaft, and to install or remove the external conditioner. The work can be performed from the outside, and maintenance work can be performed from the outside by removing the exterior panel, which is excellent in maintainability.

According to the fourth aspect of the present invention, the air conditioner for processing the indoor load is configured as a unit having a common standard with the external conditioner. Therefore, the air conditioner can be changed to the external conditioner only by changing the components. The reverse is also possible, and therefore, it is more flexible, and it is possible to reduce costs and shorten the construction period by sharing each component and simplifying construction, and rationalize the design.

[Brief description of drawings]

FIG. 1 is a diagram showing an outline of an air conditioning system which is an embodiment of the present invention.

FIG. 2 is a diagram showing a state of installation of an air conditioner and an external conditioner on the wall shaft.

FIG. 3 is a diagram showing an outline of an air conditioner for processing indoor loads.

FIG. 4 is a diagram showing an outline of an outside air conditioner for processing an outside air load.

FIG. 5 is a diagram showing an example of a conventional air conditioning system.

[Explanation of symbols]

1 clean room 3 Underfloor chamber 4 ceiling chamber 6 Fan filter unit (FFU) 7 Wall shaft 20 air conditioners 21 External conditioner U unit (external controller and air conditioner) 27 Exterior panel (outer wall) 30 dry coil 31 Dry coil component 34 penetrating components 41 Outside air intake component 42 coil component 43 Humidification / filter components 44 Outside air intake 45 blower 46 heating coil 47 cooling coil 48 humidifier 49 Filter

Claims (4)

[Claims] 1. An underfloor chamber, a wall shaft, and a ceiling chamber are provided in a lower floor portion, a peripheral wall portion, and a ceiling portion of a clean room, respectively, and a series of circulation paths for circulating indoor air are formed by the underfloor chamber, the wall shaft, and the ceiling chamber. The air conditioner installed in the middle of the circulation path circulates the indoor air while processing the indoor load, and the outside air conditioner takes in the required amount of outside air to process the outside air load and supply it to the room. In this air conditioning system, the wall shaft is installed at a position facing the outer wall, and the outside air conditioner is installed inside it, and the outside air is directly taken into the outside air conditioner, and the treated outside air is taken in by the outside air conditioner by the wall shaft. A clean room air-conditioning system characterized by being supplied directly to the inside. 2. An air conditioner, a blower, a cooling / heating coil,
The air conditioner system for a clean room according to claim 1, wherein the air conditioner system is configured as a unit that can be assembled by arbitrarily combining various components for outside air treatment such as a filter. 3. The exterior panel is provided with an exterior panel,
The air conditioning system for a clean room according to claim 1 or 2, wherein the exterior panel is provided also as an outer wall forming a wall shaft. 4. The air conditioning system for a clean room according to claim 2, wherein the air conditioner for processing the indoor load is configured as a unit having a common standard with the external air conditioner.