JPH02126912A - Air cleaner and clean room using it - Google Patents

Air cleaner and clean room using it

Info

Publication number
JPH02126912A
JPH02126912A JP27861388A JP27861388A JPH02126912A JP H02126912 A JPH02126912 A JP H02126912A JP 27861388 A JP27861388 A JP 27861388A JP 27861388 A JP27861388 A JP 27861388A JP H02126912 A JPH02126912 A JP H02126912A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
air
filter
cleaning
clean
room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27861388A
Inventor
Tomoaki Kajima
Shiyuusaku Saitou
Yoshinobu Suzuki
Original Assignee
Shimizu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To remove the dust contained in the air in the space of high cleanliness, such as a clean room, as well as the gaseous material working as the contaminant source of product by providing an adsorption filter in front of an air cleaning filter.
CONSTITUTION: When the air taken in from an air taking-in opening 6 is blown out from an air blowing-out opening 5, the air is cleaned by the air cleaning filter 10 provided in the vicinity of the air blowing-out opening 5. The adsorption filter 9 is provided in front of the air cleaning filter 10. As a result, the dust contained in the air in the space of high cleanliness, such as a clean room, as well as the gaseous material working as the contaminant source of product are removed.
COPYRIGHT: (C)1990,JPO&Japio
JP27861388A 1988-11-04 1988-11-04 Air cleaner and clean room using it Pending JPH02126912A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27861388A JPH02126912A (en) 1988-11-04 1988-11-04 Air cleaner and clean room using it

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27861388A JPH02126912A (en) 1988-11-04 1988-11-04 Air cleaner and clean room using it

Publications (1)

Publication Number Publication Date
JPH02126912A true true JPH02126912A (en) 1990-05-15

Family

ID=17599719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27861388A Pending JPH02126912A (en) 1988-11-04 1988-11-04 Air cleaner and clean room using it

Country Status (1)

Country Link
JP (1) JPH02126912A (en)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0445515U (en) * 1990-08-13 1992-04-17
JPH04126513A (en) * 1990-08-31 1992-04-27 Hitachi Ltd Clean room
JPH0491715U (en) * 1990-12-28 1992-08-10
WO1994012265A1 (en) * 1992-12-02 1994-06-09 Ebara-Infilco Co., Ltd. Method and apparatus for preventing contamination of substrate or substrate surface
US5459943A (en) * 1993-02-04 1995-10-24 Tokyo Electron Limited Air cleaning apparatus
US5514196A (en) * 1993-02-04 1996-05-07 Tokyo Electron Limited Air cleaning apparatus
US5582865A (en) * 1988-12-12 1996-12-10 Extraction Systems, Inc. Non-woven filter composite
US5607647A (en) * 1993-12-02 1997-03-04 Extraction Systems, Inc. Air filtering within clean environments
US5626820A (en) * 1988-12-12 1997-05-06 Kinkead; Devon A. Clean room air filtering
US6090188A (en) * 1997-09-30 2000-07-18 Samsung Electronics Co., Ltd. Air intake apparatus of chemical vapor deposition equipment and method for removing ozone using the same
US6340381B1 (en) * 1991-12-02 2002-01-22 Ebara Research Co., Ltd. Method and apparatus for the preparation of clean gases
JP2007064619A (en) * 2006-09-21 2007-03-15 Oki Electric Ind Co Ltd Semiconductor element manufacturing device
JP2009250576A (en) * 2008-04-09 2009-10-29 Nippon Grande Co Ltd Charcoal power clean system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61234862A (en) * 1985-04-10 1986-10-20 Taikisha Kk Sterilization of air conditioner

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61234862A (en) * 1985-04-10 1986-10-20 Taikisha Kk Sterilization of air conditioner

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5582865A (en) * 1988-12-12 1996-12-10 Extraction Systems, Inc. Non-woven filter composite
US5626820A (en) * 1988-12-12 1997-05-06 Kinkead; Devon A. Clean room air filtering
JPH0445515U (en) * 1990-08-13 1992-04-17
JPH04126513A (en) * 1990-08-31 1992-04-27 Hitachi Ltd Clean room
JPH0491715U (en) * 1990-12-28 1992-08-10
US6340381B1 (en) * 1991-12-02 2002-01-22 Ebara Research Co., Ltd. Method and apparatus for the preparation of clean gases
US7029518B2 (en) 1992-12-02 2006-04-18 Ebara Research Co., Ltd. Method and apparatus for the preparation of clean gases
US6911064B2 (en) 1992-12-02 2005-06-28 Ebara Research Co., Ltd. Method and apparatus for the preparation of clean gases
US6733570B2 (en) 1992-12-02 2004-05-11 Ebara Research Co., Ltd. Method and apparatus for the preparation of clean gases
WO1994012265A1 (en) * 1992-12-02 1994-06-09 Ebara-Infilco Co., Ltd. Method and apparatus for preventing contamination of substrate or substrate surface
US5514196A (en) * 1993-02-04 1996-05-07 Tokyo Electron Limited Air cleaning apparatus
US5459943A (en) * 1993-02-04 1995-10-24 Tokyo Electron Limited Air cleaning apparatus
US5607647A (en) * 1993-12-02 1997-03-04 Extraction Systems, Inc. Air filtering within clean environments
US6090188A (en) * 1997-09-30 2000-07-18 Samsung Electronics Co., Ltd. Air intake apparatus of chemical vapor deposition equipment and method for removing ozone using the same
JP2007064619A (en) * 2006-09-21 2007-03-15 Oki Electric Ind Co Ltd Semiconductor element manufacturing device
JP4503568B2 (en) * 2006-09-21 2010-07-14 Okiセミコンダクタ株式会社 Clean room
JP2009250576A (en) * 2008-04-09 2009-10-29 Nippon Grande Co Ltd Charcoal power clean system

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