JPS56162336A - Air conditioner - Google Patents

Air conditioner

Info

Publication number
JPS56162336A
JPS56162336A JP6394080A JP6394080A JPS56162336A JP S56162336 A JPS56162336 A JP S56162336A JP 6394080 A JP6394080 A JP 6394080A JP 6394080 A JP6394080 A JP 6394080A JP S56162336 A JPS56162336 A JP S56162336A
Authority
JP
Japan
Prior art keywords
air
region
working
blown
floor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6394080A
Other languages
Japanese (ja)
Other versions
JPH0330060B2 (en
Inventor
Hiroshi Maejima
Hiroto Nagatomo
Jun Suzuki
Akira Tatsumi
Noboru Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Plant Technologies Ltd
Hitachi Architects and Engineers Co Ltd
Original Assignee
Hitachi Ltd
Hitachi Plant Technologies Ltd
Hitachi Architects and Engineers Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Plant Technologies Ltd, Hitachi Architects and Engineers Co Ltd filed Critical Hitachi Ltd
Priority to JP6394080A priority Critical patent/JPS56162336A/en
Publication of JPS56162336A publication Critical patent/JPS56162336A/en
Publication of JPH0330060B2 publication Critical patent/JPH0330060B2/ja
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed

Abstract

PURPOSE:To properly regulate the temperature and humidity of the air of a workroom as well as to clean the air according to the working requirement by dividing the workroom into plural working sections having different air cleannesses and utilizing the working sections as working or maintenance sections. CONSTITUTION:A building 1 has a region 3 where various treatment devices 2, e.g., photolithography device, heat treatment device, etc., are provided, a maintenance region 4 partitioned by a divider 7, and a working region 6 serving as a personnel's passage in combination. In each region, air cleaners 8 are each provided, by which air blown from the maintenance region 4 in an air blow-off portion 10 is cleaned by a cleaning unit 15 and blown out of a blow-off port 13. An air supply duct 18 is connected to the ceiling of the working region 6, and the air blown out of the duct 18 is blown-off toward floor through a filter 19. The floor, having a latticelike form, is connected through an exhaust duct 20 to an air conditioner 24 by which air blown in from the floor is cleaned and its temperature and humidity are also regulated.
JP6394080A 1980-05-16 1980-05-16 Air conditioner Granted JPS56162336A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6394080A JPS56162336A (en) 1980-05-16 1980-05-16 Air conditioner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6394080A JPS56162336A (en) 1980-05-16 1980-05-16 Air conditioner

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP61059218A Division JPS61211643A (en) 1986-03-19 1986-03-19 Air-conditioning device
JP61059217A Division JPS61211642A (en) 1986-03-19 1986-03-19 Air-conditioning device

Publications (2)

Publication Number Publication Date
JPS56162336A true JPS56162336A (en) 1981-12-14
JPH0330060B2 JPH0330060B2 (en) 1991-04-26

Family

ID=13243841

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6394080A Granted JPS56162336A (en) 1980-05-16 1980-05-16 Air conditioner

Country Status (1)

Country Link
JP (1) JPS56162336A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127033A (en) * 1982-01-25 1983-07-28 Hitachi Ltd Clean working room
JPS60107820A (en) * 1983-11-16 1985-06-13 Hitachi Ltd Down flow type dust-free chamber
JPS62276828A (en) * 1986-02-20 1987-12-01 Nec Corp Apparatus for manufacture of semiconductor device
JPH10311556A (en) * 1997-05-14 1998-11-24 Sanki Eng Co Ltd Air-conditioning method and air conditioner
JP2002089920A (en) * 2000-09-19 2002-03-27 Taisei Corp Clean room and method of manufacturing semiconductor device or liquid crystal display
JP2015224819A (en) * 2014-05-28 2015-12-14 ダイダン株式会社 Anti-contamination safety cabinet

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037451A (en) * 1973-08-03 1975-04-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5037451A (en) * 1973-08-03 1975-04-08

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58127033A (en) * 1982-01-25 1983-07-28 Hitachi Ltd Clean working room
JPS6314257B2 (en) * 1982-01-25 1988-03-30 Hitachi Ltd
JPS60107820A (en) * 1983-11-16 1985-06-13 Hitachi Ltd Down flow type dust-free chamber
JPS62276828A (en) * 1986-02-20 1987-12-01 Nec Corp Apparatus for manufacture of semiconductor device
JPH10311556A (en) * 1997-05-14 1998-11-24 Sanki Eng Co Ltd Air-conditioning method and air conditioner
JP2002089920A (en) * 2000-09-19 2002-03-27 Taisei Corp Clean room and method of manufacturing semiconductor device or liquid crystal display
JP4535477B2 (en) * 2000-09-19 2010-09-01 大成建設株式会社 Manufacturing method of clean room and semiconductor device or liquid crystal display
JP2015224819A (en) * 2014-05-28 2015-12-14 ダイダン株式会社 Anti-contamination safety cabinet

Also Published As

Publication number Publication date
JPH0330060B2 (en) 1991-04-26

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