JPS6446528A - Clean room - Google Patents

Clean room

Info

Publication number
JPS6446528A
JPS6446528A JP19971787A JP19971787A JPS6446528A JP S6446528 A JPS6446528 A JP S6446528A JP 19971787 A JP19971787 A JP 19971787A JP 19971787 A JP19971787 A JP 19971787A JP S6446528 A JPS6446528 A JP S6446528A
Authority
JP
Japan
Prior art keywords
air
treatment area
flow
work area
area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19971787A
Other languages
Japanese (ja)
Inventor
Yoshiiku Sano
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP19971787A priority Critical patent/JPS6446528A/en
Publication of JPS6446528A publication Critical patent/JPS6446528A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To keep dust from flying over to a treatment area from a work area in the clean room of a semiconductor device manufacturing plant by providing a device to change air flow between the work area and treatment area so as to develop an air flow from the treatment area to the work area. CONSTITUTION:Fresh air is blown out by a blower 15 through a supply duct 16, first air discharge duct 8, and HEPA filter 12 from a first air discharge port 10 to a treatment area 5 to form a vertically laminated flow. Part of the air from the first air discharge duct 8 goes through a second HEPA filter 13 to a second air discharge duct 9 and is discharged from an air discharge port 11 to the work area 4 as a vertically laminated flow. At this time, the strength of the vertically laminated flow in the treatment area 5 is set larger than the strength of the vertically laminated flow in the work area 4, and the air 3 is made to flow through a louver 30 from the treatment area 5 to the work area 4 in the manner of one way traffic. With this constitution it is possible to keep dust from flying over to the treatment area.
JP19971787A 1987-08-12 1987-08-12 Clean room Pending JPS6446528A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19971787A JPS6446528A (en) 1987-08-12 1987-08-12 Clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19971787A JPS6446528A (en) 1987-08-12 1987-08-12 Clean room

Publications (1)

Publication Number Publication Date
JPS6446528A true JPS6446528A (en) 1989-02-21

Family

ID=16412440

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19971787A Pending JPS6446528A (en) 1987-08-12 1987-08-12 Clean room

Country Status (1)

Country Link
JP (1) JPS6446528A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998050134A1 (en) * 1997-05-09 1998-11-12 Szatmary Michael A Isolation chamber air curtain apparatus
KR100643252B1 (en) * 2004-05-26 2006-11-10 알프스 덴키 가부시키가이샤 Clean unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998050134A1 (en) * 1997-05-09 1998-11-12 Szatmary Michael A Isolation chamber air curtain apparatus
KR100643252B1 (en) * 2004-05-26 2006-11-10 알프스 덴키 가부시키가이샤 Clean unit

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