JP2536188B2 - Air purifier - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of use] The present invention relates to an air cleaning device incorporated in, for example, a clean bench, a clean booth or the like used in the field of semiconductor manufacturing.

[Conventional technology]

An air purifier installed on the above-mentioned clean bench, clean booth, etc. to supply clean air to the indoor work area from above as a blower, high-performance filter in the chamber case, and air conditioning arranged upstream of the filter. A clean unit configured by incorporating a guide is well known.

Fig. 3 is a schematic configuration diagram of a clean bench incorporating the clean unit according to Fig. 3.
1 is a clean bench, 2 is built-in equipment for manufacturing semiconductor devices installed in the work area of the room, 3 is a clean bench 1
Showing an operator who operates the embedded device 1 from the front aisle side of
On the ceiling side of the clean bench 1, there is provided a vertical laminar flow type clean unit 5 for blowing and supplying a clean air flow 4 from above toward a work area. Here, clean unit 5
In the chamber case 6, a blower 7, a high-performance filter (HEPA filter) 8 and an air conditioning guide 9 provided on the upstream side of the filter 8 are incorporated. In addition,
Reference numeral 10 is a hood such as a vinyl curtain that prevents air from being attracted from the surroundings.

Such a clean bench is well known, and the air blown by the blower 7 is removed in the ventilation process of passing through the high-performance filter 8 through the air conditioning guide 9, and is downflowed downward as the clean air flow 4 to clean the work area. Form a space.

Also, in order to ensure the required cleanliness in this case,
The wind velocity from the filter 8 is an important factor, and it is necessary to maintain the wind velocity balance so as to obtain a uniform vertical laminar flow without causing turbulence, vortex, and dust attraction from the passage side.

[Problems to be Solved by the Invention]

By the way, when the worker works in a local work area like the clean bench shown in FIG. 3, the worker 3 is the largest dust source. Therefore, when the clean unit 5 blows and supplies the clean air flow 4 at a uniform wind speed over the entire work area, dust generated by the movement of the worker 3 is prevented from diffusing into the work area. There is a risk of contaminating the product being manufactured without being able to prevent it positively.

On the other hand, as a countermeasure for this, as shown in FIG. 4, the work area in the clean bench is divided into a production area A in which dust contamination is extremely disliked and an operation area B in which a worker intervenes, and above the work area. Two clean units that supply clean air to each area A and B are installed in the area, and clean air whose blowing speed is higher than that in the operation area B is supplied to the production area A to generate the clean air from the workers. A method of preventing dust from being attracted to the production area A is known.

However, installing an independent clean unit for each area as in the above method not only increases the manufacturing cost of the air cleaning device, but also limits the size of the high-performance filter, making it a relatively narrow work such as a clean bench. It is often difficult to construct an independent clean unit corresponding to each area A and B within the area.

The present invention has been made in view of the above points, and while using a single clean unit, it is possible to obtain an appropriate blowing air velocity for each production area and operation area of a work area by simply adding a simple means to this. It is an object of the present invention to provide an air cleaning device that supplies clean air and can favorably prevent dust in an operation area from being attracted to a production area.

[Means for solving the problem]

In order to solve the above-mentioned problem, the present invention partitions the interior of the air conditioning guide incorporated in the chamber case so that the surface area of a single high-performance filter becomes a production area in the work area and an operation area in which a worker intervenes. In addition to classifying according to
The opening area of the air inflow port of the air conditioning guide leading to each section is set so that the blowing air speed to the production area is relatively higher than the blowing air speed to the operation area.

[Action]

As in the above configuration, in the configuration in which the air blowing surface area of the high-performance filter is divided into two sections and the ventilation path is divided into two systems inside the single clean unit, the air flow for each system is the air flow of the air conditioning guide. Ventilation is performed so that the total pressure loss that occurs during the process of flowing through the inlet and inside the filter is balanced between the two systems. Therefore, by relatively changing the opening area of the air inflow port of the air flow guide between each system, the blowing speed of the air flow blown out from each section of the filter relatively changes.

Therefore, the inside of the air conditioning guide is partitioned to divide the surface area of the high-performance filter into two parts, and the air inlet opening area on the system side corresponding to the production area of the work area is compared with the opening area on the system side corresponding to the operation area. By setting a relatively large area, the blowing air speed to the production area becomes relatively higher than the blowing air speed to the operation area. As a result, it is possible to reliably prevent the dust generated by the operator intervening in the operation area from being drawn into the production area.

During implementation, hang a vinyl curtain, etc. on the boundary between the production area and the operation area on the outlet side of the high-performance filter to prevent the occurrence of turbulence in the laminar flow due to mutual interference of air flows with different blowing wind speeds. Good to do.

〔Example〕

FIG. 1 is a sectional view showing the construction of an air purifying apparatus according to an embodiment of the present invention, and FIG. 2 is an enlarged perspective view of an essential part in FIG. 1, and the same members corresponding to FIG. It is attached.

That is, with respect to the air conditioning guide 9 which is arranged on the upstream side of the high performance filter 8 and is incorporated in the chamber case 6 of the clean unit 5, a partition wall indicated by reference numeral 11 is provided inside thereof. The partition wall 11 is for dividing the surface area of the high-performance filter 8 into areas corresponding to the production area A and the operation area B of the work area. On the other hand, the air inlets 9A and 9B (see FIG. 2) opened on both the left and right sides of the air conditioning guide 9 with the partition wall 11 interposed therebetween have an opening area of the air inlet 9A smaller than that of the air inlet 9B. The opening width a is set to be larger than b so as to be relatively large.
Further, on the lower surface side of the high-performance filter 8, the work area A and the operation area B are aligned with the partition wall 11 described above.
An air-blowing partition member 12 made of, for example, a vinyl curtain or the like and having an appropriate length is suspended and supported at the boundary with the.

With this configuration, inside the clean unit 5,
Right air inlet opening from blower 6 to air conditioning guide 9
9A, and a ventilation system that blows out a clean air flow 4A to the work area A through the right half surface area of the high-performance filter 8 that is partitioned via the partition wall 11, and an air inlet on the left side of the air conditioning guide 9 from the same blower 6 9B, and the ventilation system that blows the clean air flow 4B to the operation area B through the left half surface area of the high-performance filter will be defined.

By the way, the airflow passing through each of the above systems is adjusted by the air flow guide 9
Assuming that the pressure loss generated when passing through the air inlets 9A and 9B of the above is ΔP _A and ΔP _B , and the pressure loss generated when passing through the inside of the high-performance filter 8 is ΔP _FA and ΔP _FB , respectively,
Ventilation is performed between them by pressure balance so that the relationship of ΔP _A + ΔP _FA = ΔP _B + ΔP _FB is established.

Therefore, as described above, the opening area of the air inlet 9A in the air conditioning guide 9 is set relatively to the air inlet 9B in advance.
By setting the opening area of the clean air flow 4A larger than the opening area of the clean air flow 4A from the high-performance filter 8 toward the production area A, the wind speed of the clean air flow 4B necessarily blows toward the operation area B. Will be greater than. Since the blowing partition member 12 is provided at the boundary between the production area A and the operation area B on the blowing side of the high-performance filter 8, the clean air flows 4A and 4B having different blowing wind speeds mutually interfere with each other to form a laminar flow. There is almost no danger of disturbing.

By incorporating the clean unit 5 having such a configuration into the clean bench 1 described in FIG. 3, for example, the dust is not attracted to the production area A from the worker 3 who intervenes in the operation area B.

〔The invention's effect〕

Since the air cleaning device of the present invention is configured as described above, it has the following effects.

(1) While using a single clean unit, it is possible to reliably prevent dust generated in the operation area in the work area from being attracted to the production area and contaminating it, thereby improving quality control of the product.

(2) Further, structurally, a partition wall is provided inside the air conditioning guide incorporated in the clean unit, and the opening area of the air inlet opening on both sides of the air conditioning guide is relatively changed with the partition wall interposed therebetween. This is sufficient, and a significant cost reduction can be achieved compared to the conventional method in which an independent clean unit is installed in each area.

[Brief description of drawings]

FIG. 1 is a structural cross-sectional view of an air purifying device according to an embodiment of the present invention, FIG. 2 is an enlarged perspective view of a main part in FIG. 1, and FIG. 3 is a structural cross-sectional view of a conventional air purifying device adopted in a clean bench. FIG. 4 is a plan view of the work area in FIG. In the figure, 1: Clean bench, 2: Embedded device, 3: Worker, 4, 4A, 4B: Clean air flow, 5: Clean unit, 6: Chamber case, 7:
Blower, 8: High performance filter, 9: Air conditioning guide, 11: Partition partition, A: Production area, B: Operation area.

Claims (1)

(57) [Claims] 1. A local vertical laminar flow type air cleaning device for supplying clean air to a work area from above, including a blower, a high performance filter in a chamber case, and an air conditioning guide arranged upstream of the filter. In which the inside of the air conditioning guide is partitioned to divide the surface area of the high-performance filter into the production area in the work area and the operation area in which the operator intervenes, and the section leading to each section An air purifying device, characterized in that an opening area of an air inlet of the air conditioning guide is set so that a blowing wind speed to a production area is relatively higher than a blowing wind speed to an operation area.