JP2526071B2 - Local circulation type clean room - Google Patents

Description

TECHNICAL FIELD The present invention relates to a local circulation type clean room.

“Prior Art” As shown in FIG. 5, a conventional general clean room having a partitioned clean zone 1a and a working area 1b adjacent to the clean zone 1a has a HEPA filter 2 on the room. The ceiling and the ceiling chamber 3, and below
It has a ventilated floor 4 and an underfloor return space 5, and a machine room 6 equipped with an air conditioner 7 is attached to the outside of the room. The upstream side of the air conditioner is the underfloor return space 5 and the downstream side is the ceiling chamber 3. The air is sent in series to the ceiling chamber 3, the temperature of which is controlled by the air conditioner 7, which is purified by the HEPA filter 2 and supplied to the indoor clean zone 1a and the working area 1b, and the air conditioning is performed via the underfloor return space 5. I'm trying to return to machine 7.

In the general clean room described above, a conventional local circulation type clean room without a machine room has a vertical air conditioner 8 arranged at an appropriate place in the room 1, as shown in FIG.
The vertical air conditioner 8 is connected to an underfloor return space 5 divided by a ventilation floor 4 on the upstream side and the ceiling chamber 3 is connected on the downstream side. I try to get the air circulation as in a clean room.

In Japanese Patent Laid-Open No. 58-127033, which has already been published, a room is divided into a clean zone and a working area while the room is used as a clean zone and a return space (not a working area) in a clean room of a clean tunnel type. Dividing and forming a ceiling chamber above the room, arranging a HEPA filter, a fan, etc. above the clean zone, and providing a ventilation floor and an underfloor return space under the room, the underfloor return space, the above room A return space and a ceiling chamber are connected to each other, and an air conditioner and the like are installed outside the room, and the outlet side of the air conditioner and the like are connected to the ceiling chamber, and the suction side is connected to the underfloor return space. In this case, the inside of the ceiling chamber is air-conditioned by the air conditioner and the fan is operated. To purify the air in a HEPA filter is supplied to the clean zone, under the floor return space,
It is circulated to the ceiling chamber through the indoor return space. In some cases, instead of the ventilation floor and the underfloor return space, a suction port for sucking indoor air may be provided below the partition wall of the indoor return space.

Japanese Utility Model Laid-Open No. 62-115028, which has already been published, has a temperature controller and a fan in the return space in the above-mentioned clean room that does not have a ventilated floor or an underfloor return space, and further has an air conditioner or the like outside the room. It is shown that the inside of the room is air-conditioned by the air conditioner or the like.

[Problems to be Solved by the Invention] However, in the above-mentioned clean room, since the machine room 6 is required outside, as shown in FIG. 4A, a large site is taken in the machine room and the building becomes large. The area efficiency and the building efficiency are poor, and the equipment is large-scaled, requires a large amount of power, and the equipment efficiency is poor, which is generally uneconomical.

 This also applies to the above cases and.

Further, in the local circulation type clean room, since the machine room is not required outside, as shown in FIG. 4B, the site and the building may be smaller than the former, but the vertical air conditioner 8 is installed in the room 1. Since it is installed, there is a dead space in the room, and there is a drawback that it is not convenient to use, and area efficiency and building efficiency are still not very good.

The present invention is intended to solve the problems.

"Means for Solving the Problems" To achieve the above object, the present invention has a clean zone 1a and a working area 1b adjacent to the clean zone in a room 1, and a ceiling of a HEPA filter 2 on the room. And a ceiling chamber 3, and a ventilation floor 4 and an underfloor return space 5 below the room, and in the local circulation type clean room equipped with an air conditioning means in the room, the working area 1b is also used as the return space. The lower end of the working area 1b communicates with the underfloor return space 5 on the upstream side through the ventilation floor 4, and the upper end communicates with the ceiling chamber 3 on the downstream side, and the working area
1b to place the fan 9 in the appropriate place in the ceiling chamber,
The working area 1b is configured to be kept at a lower pressure than the clean zone 1a, and further, in the ventilation floor 4 on the upstream side of the working area 1b, air conditioning is performed on the lower surface of the ventilation floor member 4a of the unit body forming the ventilation floor. The invention is characterized in that an appropriate number of air-conditioning temperature control devices 10 in which the coils 10a are incorporated and integrated are provided.

[Operation] With the above configuration, the operation of the fan 9 purifies the air in the ceiling chamber 3 by the HEPA filter 2 and supplies it to the clean zone 1a, and the air from the clean zone 1a is the underfloor return space 5, working area. It is circulated to the ceiling chamber through 1b, but by arranging the fan 9 downstream of the working area 1b, the clean zone 1a can be kept at a higher pressure than the working area 1b, and the working area 1b moves to the clean zone 1a. There is no backflow, and therefore there is no problem even if the working area 1b is also used as a return space.

Further, the air conditioning coil 10 is provided on the lower surface of the ventilation floor member 4a of the unit body.
The temperature control device 10 for air conditioning that incorporates and integrates a
In the construction of the ventilation floor 4, it enables the same easy assembly as the ventilation floor member of the unit body, and the working area.
Since the air conditioning coil 10a is provided on the ventilation floor 4 on the upstream side of 1b, the working area 1b is air-conditioned from below the floor, and the clean zone 1a is air-conditioned from the ceiling.

"Embodiment" FIGS. 1 to 3 show an embodiment of the present invention.

In this embodiment, as shown in FIG. 1, the room 1 is divided into a clean zone 1a and a working area 1b, a HEPA filter 2 is arranged on the ceiling of the clean zone 1a, and a fan 9 is installed on the ceiling of the working area 1b. And a common ceiling chamber 3 is formed on them.

In addition, a ventilation floor 4 of grating, punching metal, etc. is arranged under the clean zone 1a and the working area 1b, and a common underfloor return space 5 is formed. The temperature control device 10 is used in various places.

As shown in FIGS. 2 and 3, the temperature control device 10 is a unit ventilation floor member 4a made of grating, punching metal or the like having a predetermined area used to form a ventilation floor.
An air conditioning coil (dry coil) 10a is incorporated and integrated into the lower surface of the unit to form a unit, and the required number is appropriately arranged only in the ventilation floor 4 of the working area 1b. As the air conditioning coil 10a, a general cooling coil, a heating coil, an electric heater, a direct expansion coil or the like can be freely selected and incorporated according to the need for temperature control.

With the above configuration, when the fan 9 is operated, the air in the working area 1b in the room 1 is sent to the ceiling chamber 3, the inside of the ceiling chamber is pressurized, and the pressurized air is purified by the HEPA filter 2. Out into the clean zone 1a in the room 1.

Next, the air in the clean zone 1a flows into the underfloor return space 5 through the ventilation floor 4, and the temperature control device
10 Therefore, the temperature is controlled by the air conditioning coil 10a,
Returning to the working area 1b, it is sent to the ceiling chamber 3 again by the fan 9.

In the working area 1b, since the fan 9 is located on the ceiling on the downstream side of the working area 1b, it is always the clean zone 1a.
Maintained at a lower atmospheric pressure, the working area 1b fully functions as a return space and does not cause backflow to the clean zone.

According to the present invention, the working area 1b adjacent to the clean zone 1a is also used as a return space,
The fan 9 is arranged at a proper place on the downstream side of the working area,
Moreover, in the ventilation floor 4, which is the upstream side of the working area 1b,
Since the air conditioning temperature control device 10 in which the air conditioning coil 10a is incorporated and integrated is provided on the lower surface of the ventilation floor member 4a of the unit body, the following effects are achieved.

i) The working area 1b can be used as a return space without hindrance, no machine room is required outdoors, and no vertical air conditioner is required in the room 1. Therefore, as shown in FIG. Can be made much smaller than before,
In other words, it can be reduced to the minimum reasonably, the area efficiency and the building efficiency can be improved, the equipment can be minimized, and the power can be rationalized.

ii) Even in a local circulation type clean room having a working area 1b in the room 1, since a vertical air conditioner is not required in the room 1, no dead space is generated in the room 1 and usability does not deteriorate.

iii) The air-conditioning coil is controlled by the air-conditioning temperature control device 10 installed on the ventilation floor 4, which is the upstream side of the working area 1b.
The working area 1b can be air-conditioned from below the floor with 10a, and can be efficiently and quickly air-conditioned in a favorable environment.

iv) By the air conditioning temperature control device 10 in which the air conditioning coil 10a is incorporated and integrated on the lower surface of the ventilation floor member 4a of the unit,
The construction of the ventilation floor 4 can be carried out in the same manner as the construction of the ventilation floor member by the air-conditioning temperature control device 10, and the construction can be facilitated and the construction period can be shortened.

v) From the above, each member can be easily moved to quickly respond to the layout change.

vi) As a whole, costs and operating expenses can be reduced, and the economic value can be greatly improved.

[Brief description of drawings]

FIG. 1 is a vertical sectional side view showing an embodiment of the present invention, FIG. 2 is an enlarged sectional plan view of the same example and an essential part, FIG. 3 is an enlarged sectional side view of the same part, and FIG. FIG. 5, a comparative explanatory view of the same example and a conventional example, and FIG. 5 and FIG. 6 are longitudinal side views showing the conventional example, respectively. 1 …… indoor, 1a …… clean zone 1b …… working area, 2 …… HEPA filter 3 …… ceiling chamber, 4 …… ventilated floor 4a …… ventilated floor member, 5 …… under floor return space 6 …… machine room , 7 ... Air conditioner 8 ... Vertical air conditioner, 9 ... Fan 10 ... Temperature controller, 10a ... Air conditioning coil

Claims (1)

(57) [Claims] 1. A room 1 has a clean zone 1a and a working area 1b adjacent to the clean zone, a ceiling of a HEPA filter 2 and a ceiling chamber 3 above the room, and a ventilation floor below the room. 4 and an underfloor return space 5, in a local circulation type clean room equipped with an air conditioning means for the room, the working area 1b is also used as a return space, and the lower end of the working area 1b is upstream through the ventilation floor 4. In the above-mentioned underfloor return space 5 on the side,
In addition, the upper end is communicated with the ceiling chamber 3 which is the downstream side, and a fan 9 is arranged at an appropriate place in the working area 1b to the ceiling chamber so that the working area 1b is kept at a lower pressure than the clean zone 1a. Further, in the ventilation floor 4 on the upstream side of the working area 1b, an air conditioning temperature control device in which an air conditioning coil 10a is incorporated and integrated on the lower surface of the ventilation floor member 4a of the unit body forming the ventilation floor. A local circulation type clean room characterized by having an appropriate number of 10.