CN202695516U - Flow-equalizing block piece - Google Patents
Flow-equalizing block piece Download PDFInfo
- Publication number
- CN202695516U CN202695516U CN2012203151673U CN201220315167U CN202695516U CN 202695516 U CN202695516 U CN 202695516U CN 2012203151673 U CN2012203151673 U CN 2012203151673U CN 201220315167 U CN201220315167 U CN 201220315167U CN 202695516 U CN202695516 U CN 202695516U
- Authority
- CN
- China
- Prior art keywords
- quartz
- flow
- equalizing
- block piece
- sharing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses a flow-equalizing block piece comprising two quartz sheets which are connected through a quartz column. The quartz sheets are parallel to each other and stagger a certain angle facing a certain direction. Each quartz sheet, close to the outer side of a quartz boat, is provided with flow-equalizing air holes arranged regularly, and a quartz hook which hangs the block piece on one side of the quartz boat. Compared with an existing flow-equalizing plate, the flow-equalizing block piece arranged at two ends of the quartz boat is durable and firm due to the quartz hooks, replaces silicon chips, and lowers cost. The quartz sheets arranged at the furnace tail portion of the quartz boat can stop phosphor mixing source airflow from directly bowing the silicon chips and causing sheet resistance at the furnace tail portion to be excessively low. The quartz sheets with the flow-equalizing air holes can promote even distribution of phosphorus source gas between the silicon chips and improves uniformity of the sheet resistance. The flow-equalizing block piece is large in area so that process gas can pass through the block piece with the small flow-equalizing holes and gas in a furnace tube can be even.
Description
Technical field
The utility model relates to a kind of production equipment of silicon solar cell, is specifically related to a kind of current-sharing catch for diffusion system knot operation.
Background technology
Solar energy can both infinitely be supplied every day, and quantity is huge.If utilize in large power plant, just reduced greenhouse effect, the expert of some energy expert and environmental protection then thinks, satisfying aspect the from now on energy demand of the mankind, the thermal impact of solar energy is more much smaller than the thermal impact of any other substitute.As a kind of free from environmental pollution, inexhaustible new forms of energy again, it is ubiquitous.Especially aspect electric power confession power, there is the expert to think that solar power generation accounts for 20% the most at last in supply of electric power.
Solar cell is a kind of luminous energy to be converted into the device of electric energy, and its basic principle is to utilize the photovoltaic effect of PN junction that light energy conversion is become electric energy.Crystal silicon solar energy battery occupies the share of the overwhelming majority in solar cell.
At present, in the production process of crystal silicon solar energy battery, the diffusion system knot operation that is used for the making PN junction is one of critical process.Solar cell is constantly being pursued the high efficiency while, and high square resistance is also constantly pursued in diffusion, and the square resistance uniformity is the primary goal that the diffusion high square resistance is pursued, and the inhomogeneity quality of sheet resistance can have a strong impact on the efficient of solar cell.Existing even flow plate all is unadjustable uniform flow pore opening, just can't change the diffusion air-flowing environment, thereby has reduced the controllability of the diffused sheet resistance uniformity.
The utility model content
The utility model purpose: the purpose of this utility model is for the deficiencies in the prior art, and a kind of current-sharing catch that is arranged on inside, quartz boat two ends is provided, and it both can improve diffusion uniformity, had again durability and fastness.
Technical scheme: a kind of current-sharing catch described in the utility model, comprise two bauerite sheets, connect with quartz column between the described quartz plate, described quartz plate is parallel to each other and is crisscross arranged each other, has the uniform flow pore of queueing discipline on the described quartz plate near the quartz boat outside and be provided with this catch is hung the quartz hook that is attached to quartz boat one side.
Further, the thickness of described quartz plate is 4-6mm.
Further, the diameter of described current-sharing pore is 4-6mm.
Further, described quartzy hook is shaped as square upright post type or cuboid upright post type.
Further, described quartz plate each other staggered angle be 2
o～4
o
The utility model compared with prior art, its beneficial effect is: (1) the utility model is compared with existing even flow plate, it is inner that this uniform flow catch is positioned over the quartz boat two ends, has durability; This uniform flow catch is provided with quartzy hook, has fastness; This uniform flow catch replaces silicon chip, saves material, and can reduce cost; The uniform flow catch that is placed on quartz boat stove tail place can stop phosphorus doping source air-flow directly to the purging of silicon chip, causes the sheet resistance at stove tail place excessively low; There is the quartz plate of uniform flow pore can promote the even distribution of phosphorus source atmosphere between silicon chip and silicon chip, thereby improves the uniformity of square resistance; The area of this uniform flow catch is larger, makes process gas as far as possible by the catch with the uniform flow aperture, makes gas uniform in the boiler tube; (2) the utility model is simple in structure, is convenient to preparation, and has good practicality, is suitable for applying.
Description of drawings
Fig. 1 is structural representation of the present utility model.
Embodiment
The below is elaborated to technical solutions of the utility model, but protection range of the present utility model is not limited to described embodiment.
As shown in Figure 1, a kind of current-sharing catch, comprise that two thickness are 5mm quartz plate 1, connect with quartz column 2 between the described quartz plate 1, described quartz plate 1 is parallel to each other and staggers along its length each other 5 °, the diameter that has queueing discipline on the quartz plate near the quartz boat outside is the uniform flow pore 3 of 5m and is provided with the quartz hook 4 that is shaped as the square upright post type that this catch extension is attached to quartz boat one side, prevents quartzy catch in the quartz boat slides within, squeezes broken silicon wafers.
As mentioned above, although the specific preferred embodiment of reference has represented and has explained the utility model that it shall not be construed as the restriction to the utility model self.Under the spirit and scope prerequisite of the present utility model that does not break away from the claims definition, can make in the form and details various variations to it.
Claims (5)
1. current-sharing catch, it is characterized in that, comprise two bauerite sheets, connect with quartz column between the described quartz plate, described quartz plate is parallel to each other and is crisscross arranged each other, has the uniform flow pore of queueing discipline on the described quartz plate near the quartz boat outside and be provided with this catch is hung the quartz hook that is attached to quartz boat one side.
2. current-sharing catch according to claim 1 is characterized in that, the thickness of described quartz plate is 4-6mm.
3. current-sharing catch according to claim 1 is characterized in that, the diameter of described current-sharing pore is 4-6mm.
4. current-sharing catch according to claim 1 is characterized in that, described quartzy hook be shaped as square upright post type or cuboid upright post type.
5. current-sharing catch according to claim 1 is characterized in that, the angle that described quartz plate interlocks each other is 2
o～4
o
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012203151673U CN202695516U (en) | 2012-07-02 | 2012-07-02 | Flow-equalizing block piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012203151673U CN202695516U (en) | 2012-07-02 | 2012-07-02 | Flow-equalizing block piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202695516U true CN202695516U (en) | 2013-01-23 |
Family
ID=47551088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012203151673U Expired - Lifetime CN202695516U (en) | 2012-07-02 | 2012-07-02 | Flow-equalizing block piece |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202695516U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103409803A (en) * | 2013-08-22 | 2013-11-27 | 天威新能源控股有限公司 | Flow homogenizing plate used for crystalline silicon diffusion and crystalline silicon diffusion technology furnace comprising same |
| CN111519005A (en) * | 2020-04-14 | 2020-08-11 | 中国科学院合肥物质科学研究院 | Large D-shaped Nb3Sn superconducting coil heat treatment equipment |
| CN115233186A (en) * | 2022-07-20 | 2022-10-25 | 无锡松煜科技有限公司 | Method for improving LPCVD surface coating process |
-
2012
- 2012-07-02 CN CN2012203151673U patent/CN202695516U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103409803A (en) * | 2013-08-22 | 2013-11-27 | 天威新能源控股有限公司 | Flow homogenizing plate used for crystalline silicon diffusion and crystalline silicon diffusion technology furnace comprising same |
| CN103409803B (en) * | 2013-08-22 | 2016-12-28 | 天威新能源控股有限公司 | Even flow plate and crystalline silicon diffusion technique stove thereof for crystalline silicon diffusion |
| CN111519005A (en) * | 2020-04-14 | 2020-08-11 | 中国科学院合肥物质科学研究院 | Large D-shaped Nb3Sn superconducting coil heat treatment equipment |
| CN115233186A (en) * | 2022-07-20 | 2022-10-25 | 无锡松煜科技有限公司 | Method for improving LPCVD surface coating process |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202695516U (en) | Flow-equalizing block piece | |
| CN101629551B (en) | Solar hot gas flow generating device | |
| CN204715869U (en) | A kind of pneumatic membrane building of novel flexible thin-film solar cells | |
| CN204668282U (en) | A kind of high-temperature low-pressure disperser | |
| CN201474860U (en) | Solar hot air flow power generating device | |
| CN106301186A (en) | High-efficiency solar electricity generation system | |
| CN106196919A (en) | A kind of solar drying apparatus | |
| CN207262996U (en) | One kind is variable to flow to formula solid heat storage device | |
| CN203674241U (en) | Device for improving diffusion sheet resistance uniformity of silicon wafer | |
| CN201638832U (en) | Solar panel | |
| CN103436967B (en) | A kind of method optimizing solar battery sheet tubular diffusion furnace air flow method | |
| CN201956382U (en) | Flow homogenizing plate for phosphorus diffusion | |
| CN102934598A (en) | Solar greenhouse constant temperature system without energy consumption | |
| CN203130377U (en) | Temperature difference ventilation power generation system for bottom layer of high-rise building | |
| CN202949787U (en) | Energy-consumption-free solar greenhouse constant temperature system | |
| CN202536042U (en) | Solar-energy and wind-energy airflow low-temperature drying device | |
| CN205945647U (en) | Roof heat -retaining water pitcher installs flexible solar cell's photovoltaic power generation device on surface additional | |
| CN202352683U (en) | Solar cell assembly | |
| CN203270093U (en) | Diffusion furnace and tail gas pipe for the same | |
| CN204073798U (en) | A kind of solar powered plant floor drying device | |
| CN202298935U (en) | Building integrated solar ventilation cooling system | |
| CN204593903U (en) | Multifuctional solar heating and heater | |
| CN204118189U (en) | A kind of hydrogen fuel cell hot water utilization system | |
| CN203574600U (en) | Porous type solar photovoltaic photo-thermal integrated assembly | |
| CN209493653U (en) | A kind of stabilization input and output gas device of boiler tube |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Assignee: CECEP SOLAR ENERGY TECHNOLOGY (ZHENJIANG) Co.,Ltd. Assignor: CECEP SOLAR ENERGY TECHNOLOGY Co.,Ltd. Contract record no.: 2014990000106 Denomination of utility model: Flow-equalizing block piece Granted publication date: 20130123 License type: Common License Record date: 20140304 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| C56 | Change in the name or address of the patentee |
Owner name: CECEP SOLAR ENERGY TECHNOLOGY CO., LTD. Free format text: FORMER NAME: CECEP SOLAR ENERGY TECHNOLOGY CO., LTD. |
|
| CP01 | Change in the name or title of a patent holder |
Address after: 100041, No. 1, building No. 3, West well road, Badachu hi tech park, Beijing, Shijingshan District Patentee after: CECEP SOLAR ENERGY TECHNOLOGY Co.,Ltd. Address before: 100041, No. 1, building No. 3, West well road, Badachu hi tech park, Beijing, Shijingshan District Patentee before: CECEP SOLAR ENERGY TECHNOLOGY Co.,Ltd. |
|
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 100041, No. 1, building No. 3, West well road, Badachu hi tech park, Beijing, Shijingshan District Patentee after: CECEP SOLAR ENERGY TECHNOLOGY Co.,Ltd. Address before: 100041, No. 1, building No. 3, West well road, Badachu hi tech park, Beijing, Shijingshan District Patentee before: CECEP SOLAR ENERGY TECHNOLOGY Co.,Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130123 |