CN203270093U - Diffusion furnace and tail gas pipe for the same - Google Patents
Diffusion furnace and tail gas pipe for the same Download PDFInfo
- Publication number
- CN203270093U CN203270093U CN 201320181809 CN201320181809U CN203270093U CN 203270093 U CN203270093 U CN 203270093U CN 201320181809 CN201320181809 CN 201320181809 CN 201320181809 U CN201320181809 U CN 201320181809U CN 203270093 U CN203270093 U CN 203270093U
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- diffusion furnace
- offgas duct
- venting hole
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- model
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Abstract
The utility model discloses a tail gas pipe for a diffusion furnace. The tail gas pipe comprises at least three vent holes. When being used, the tail gas pipe for the diffusion furnace, disclosed by the utility model, is placed on the diffusion furnace, a to-be-diffused silicon wafer is placed in the diffusion furnace and located on one side of the tail gas pipe for the diffusion furnace; a diffusion source enters the diffusion furnace from air inlets of the diffusion furnace along with gas and is exhausted from the vent holes of the tail gas pipe for the diffusion furnace; and the at least three vent holes are provided, so that the square resistance difference of a furnace mouth and a furnace tail in the diffusion furnace can be effectively reduced, the uniformity of the square resistance can be improved, and the electrical property of a battery is improved. The utility model also provides the diffusion furnace.
Description
Technical field
The utility model relates to the crystal-silicon solar cell production technical field, relates in particular to a kind of diffusion furnace and diffusion furnace offgas duct thereof.
Background technology
Sun power is most important basic power source in various renewable energy sources.Sun power generally refers to the quantity of radiant energy of sunlight, generally is used as generating in the modern times.Form the biological just main light and heat existence that provides with the sun from the earth, and also understand with sun dry spare from the ancient human, and as the method for preserving food, as salt manufacturing and solarization cured fish etc.But under fossil oil reduces, just intentionally sun power is further developed.The utilization of sun power has Passive use (photo-thermal conversion) and opto-electronic conversion dual mode.Wherein, opto-electronic conversion is take solar battery sheet as main.
Wherein, it is higher that the crystal solar cell has efficiency of conversion, and the advantage of production technology maturation occupies the photovoltaic market share of the overwhelming majority.At present, the flow process of manufacturing solar cell is: surface cleaning and surface-texturing, diffusion, etching trimming, coated with antireflection film, screen printing electrode, sintering form ohmic contact, test.This commercialization solar cell manufacturing technology is relatively simple, cost is lower, is fit to industrialization, automatic production, thereby is widely applied.
In preparation crystal silicon solar energy battery process, it is core technology that PN junction is made in diffusion, and the key of diffusion system knot is to improve the homogeneity of square resistance.
Therefore, how providing a kind of diffusion furnace offgas duct, to improve the homogeneity of square resistance, is the technical problem that present those skilled in the art need to be resolved hurrily.
The utility model content
In view of this, the purpose of this utility model is to provide a kind of diffusion furnace offgas duct, to improve the homogeneity of square resistance.Another purpose of the present utility model is to provide a kind of diffusion furnace.
In order to achieve the above object, the utility model provides following technical scheme:
A kind of diffusion furnace offgas duct comprises venting hole, and the number of described venting hole is no less than 3.
Preferably, ascending being arranged in order of penetrating area of above-mentioned venting hole.
Preferably, the number of above-mentioned venting hole is 3-10.
Preferably, the summation area of the penetrating area of above-mentioned venting hole is not more than the cross-sectional area that described diffusion furnace is used offgas duct.
Preferably, above-mentioned venting hole is circular hole.
Preferably, the diameter of above-mentioned venting hole is 1mm-5mm.
Preferably, above-mentioned diffusion furnace offgas duct is the quartz material offgas duct.
Preferably, above-mentioned venting hole evenly distributes.
The utility model also provides a kind of diffusion furnace, comprises body of heater, fire door, stove tail and offgas duct, and described offgas duct is diffusion furnace offgas duct as described in above-mentioned any one.
Preferably, above-mentioned diffusion furnace with the penetrating area of the venting hole of offgas duct from described fire door to ascending being arranged in order of described stove tail.
The diffusion furnace offgas duct that the utility model provides comprises venting hole, and the number of described venting hole is no less than 3.During use, the diffusion furnace that the utility model is provided is placed on diffusion furnace with offgas duct, silicon chip to be spread is placed in diffusion furnace, the diffusion furnace that being positioned at the utility model provides one side of offgas duct, diffuse source enters into diffusion furnace with gas from the air inlet port of diffusion furnace, discharge from the venting hole of diffusion furnace with offgas duct that the utility model provides, due to venting hole for being no less than 3, so just can effectively reduce the square resistance difference of fire door stove tail in diffusion furnace, improve the square resistance homogeneity, improve battery electrical property.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, the below will do to introduce simply to the accompanying drawing of required use in embodiment or description of the Prior Art, apparently, accompanying drawing in the following describes is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
The structural representation of the diffusion furnace that Fig. 1 provides for the utility model embodiment.
In upper Fig. 1:
Fire door 1, silicon chip to be spread 2, stove tail 3, air inlet port 4, diffusion furnace offgas duct 5, venting hole 6.
Embodiment
The utility model embodiment provides a kind of diffusion furnace offgas duct, to improve the homogeneity of square resistance.The utility model also provides a kind of diffusion furnace.
For the purpose, technical scheme and the advantage that make the utility model embodiment clearer, below in conjunction with the accompanying drawing in the utility model embodiment, technical scheme in the utility model embodiment is clearly and completely described, obviously, described embodiment is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
Please refer to Fig. 1, the structural representation of the diffusion furnace that Fig. 1 provides for the utility model embodiment.Wherein, the arrow indication is gas flow direction.
The diffusion furnace that the utility model embodiment provides comprises venting hole 6 with offgas duct 5, and the number of venting hole 6 is no less than 3.During use, the diffusion furnace that the utility model is provided is placed on diffusion furnace with offgas duct 5, silicon chip 3 to be spread is placed in diffusion furnace, the diffusion furnace that being positioned at the utility model provides one side of offgas duct 5, diffuse source enters into diffusion furnace with gas from the air inlet port 4 of diffusion furnace, discharge from the diffusion furnace use venting hole 6 of offgas duct 5 that the utility model embodiment provides, due to venting hole 6 for being no less than 3, so just can effectively reduce the square resistance difference of the interior fire door 1 of diffusion furnace and stove tail 3, improve the square resistance homogeneity, improve battery electrical property.
Concrete, ascending being arranged in order of penetrating area of venting hole 6.Penetrating area refers to the hole size of venting hole 6, in use, the fire door 1 of the close diffusion furnace of venting hole that penetrating area is little, the stove tail 3 of the close diffusion furnace of venting hole that penetrating area is large, can better reduce like this square resistance difference of the interior fire door 1 of diffusion furnace and stove tail 3, improve the square resistance homogeneity, improve battery electrical property.
Concrete, the number of venting hole 6 is 3-10.This quantitative range is proper, if quantity is too much, and reduction square resistance difference that may be too much, effect is bad on the contrary.
Concrete, the summation area of the penetrating area of venting hole 6 is not more than diffusion furnace with the cross-sectional area of offgas duct 5, prevents that exhaust is excessive, reduction square resistance difference that may be too much, and effect is bad on the contrary.
Concrete, venting hole 6 is circular hole, and is easy to make.
Concrete, the diameter of venting hole 6 is 1mm-5mm, if diameter is too much, and reduction square resistance difference that may be too much, effect is bad on the contrary.
Concrete, diffusion furnace is the quartz material offgas duct with offgas duct 5.Quartz material physical properties and chemical property are all very stable, and work-ing life is longer.
Concrete, venting hole 6 evenly distributes, in order to play better scavenging action.
The utility model embodiment also provides a kind of diffusion furnace, comprise body of heater, fire door 1, stove tail 3 and offgas duct, offgas duct is diffusion furnace as described in above-mentioned any one embodiment offgas duct 5, can be good at reducing the square resistance difference of the interior fire door 1 of diffusion furnace and stove tail 3, improve the square resistance homogeneity, improve battery electrical property.
Concrete, diffusion furnace is arranged in order to stove tail 3 is ascending from fire door 1 with the penetrating area of the venting hole 6 of offgas duct 5, can better reduce like this square resistance difference of the interior fire door 1 of diffusion furnace and stove tail 3, improve the square resistance homogeneity, improve battery electrical property.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be apparent concerning those skilled in the art, and General Principle as defined herein can be in the situation that do not break away from spirit or scope of the present utility model, realization in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.
Claims (10)
1. a diffusion furnace offgas duct, is characterized in that, comprises venting hole (6), and the number of described venting hole (6) is no less than 3.
2. diffusion furnace offgas duct according to claim 1, is characterized in that, ascending being arranged in order of penetrating area of described venting hole (6).
3. diffusion furnace offgas duct according to claim 1, is characterized in that, the number of described venting hole (6) is 3-10.
4. diffusion furnace offgas duct according to claim 1, is characterized in that, the summation area of the penetrating area of described venting hole (6) is not more than the cross-sectional area that described diffusion furnace is used offgas duct (5).
5. diffusion furnace offgas duct according to claim 1, is characterized in that, described venting hole (6) is circular hole.
6. diffusion furnace offgas duct according to claim 5, is characterized in that, the diameter of described venting hole (6) is 1mm-5mm.
7. diffusion furnace offgas duct according to claim 1, is characterized in that, described diffusion furnace is the quartz material offgas duct with offgas duct (5).
8. diffusion furnace offgas duct according to claim 1, is characterized in that, described venting hole (6) evenly distributes.
9. a diffusion furnace, comprise body of heater, fire door (1), stove tail (3) and offgas duct, it is characterized in that, described offgas duct is diffusion furnace as described in above-mentioned claim 1-8 any one offgas duct (5).
10. diffusion furnace according to claim 9, is characterized in that, described diffusion furnace with the penetrating area of the venting hole of offgas duct (5) from described fire door (1) to ascending being arranged in order of described stove tail (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320181809 CN203270093U (en) | 2013-04-12 | 2013-04-12 | Diffusion furnace and tail gas pipe for the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201320181809 CN203270093U (en) | 2013-04-12 | 2013-04-12 | Diffusion furnace and tail gas pipe for the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203270093U true CN203270093U (en) | 2013-11-06 |
Family
ID=49500541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201320181809 Expired - Fee Related CN203270093U (en) | 2013-04-12 | 2013-04-12 | Diffusion furnace and tail gas pipe for the same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203270093U (en) |
-
2013
- 2013-04-12 CN CN 201320181809 patent/CN203270093U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20171114 Address after: The British Virgin Islands of Tortola Rodez VG1110 Patentee after: Fai Fai investment management company Address before: 214200 Jiangsu city of Wuxi province Yixing Qingyuan Road Economic Development Zone No. 27 (East) Patentee before: Zhejiang Yuhui Solar Energy Jiangsu Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131106 Termination date: 20190412 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |