CN203085500U - Diffusion quartz boat - Google Patents
Diffusion quartz boat Download PDFInfo
- Publication number
- CN203085500U CN203085500U CN 201220741791 CN201220741791U CN203085500U CN 203085500 U CN203085500 U CN 203085500U CN 201220741791 CN201220741791 CN 201220741791 CN 201220741791 U CN201220741791 U CN 201220741791U CN 203085500 U CN203085500 U CN 203085500U
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- quartz boat
- diffusion
- slot
- silicon chip
- utility
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Abstract
The utility model relates to a diffusion quartz boat used for placing silicon wafers and carrying out diffusion treatment. The diffusion quartz boat comprises a supporting framework and two panels located on two ends of the supporting framework, wherein through holes for air flow to pass through are opened in the two panels respectively, the supporting framework includes bottom fixing bars located on the bottom, supporting bars arranged on the bottom fixing bars and two side crossbars used for enclosing silicon wafers, and at least two keels are arranged between the two side crossbars. According to the utility model, the silicon wafer on the diffusion quartz boat and the air flow can be made parallel to each other so that air can flow uniformly among the silicon wafers, the uniformity of the diffusion resistance can be greatly improved, the conversion efficiency of cells is increased, the proportion of low-efficiency cells is reduced, and the cost of enterprises is saved.
Description
Technical field
The utility model relates to a kind of quartz boat, relates in particular to a kind of diffusion quartz boat.
Background technology
The solar cell diffusion is the core process during the battery sheet is made, and main purpose is to form PN junction to make electronics separate with the hole, and high-quality, the PN junction of high uniformity are the bases that produces high-efficiency battery.
Our employed conventional quartz boat at present, because air temperature and current skewness, therefore the uniformity of diffusion side's resistance is not fine, adjustable space is also little, process gas enters in the stove from afterbody, air-flow is perpendicular to silicon chip surface, process gas flows to fire door along silicon chips periphery, process gas is difficult to be arrived between silicon chip and the silicon chip, silicon chip central area gas density is lower than silicon chip four limits, thereby cause the side resistance of silicon chip third side resistance greater than four limits, side's resistance lack of homogeneity, thus battery sheet side resistance lack of homogeneity causes conversion efficiency low.
The utility model content
The technical problems to be solved in the utility model is: cause the low problem of battery sheet conversion efficiency in order to solve traditional quartz boat air temperature and current skewness, the utility model provides a kind of diffusion quartz boat that is used to produce solar battery sheet to solve the problems referred to above.
The technical scheme that its technical problem that solves the utility model adopts is: a kind of diffusion quartz boat, be used to place silicon chip and carry out DIFFUSION TREATMENT, comprise a support frame and two panels that are positioned at the support frame two ends, all have on described two panels and be used for the through hole that air communication is crossed, described support frame comprises the end fixed strip that is positioned at the bottom, is arranged on the support bar on the end fixed strip and is used to go along with sb. to guard him two side cross bars of silicon chip, is provided with at least two keel between described two side cross bars.
For the silicon chip placed is firm, have a plurality of first slots on the described support bar.
For the silicon chip placed is firm, described keel are provided with a plurality of second slots over against the direction of silicon chip.
Further, specifically, fixed strip of the described end is 2, and support bar is 6, and keel are 4, and described 4 keel are distributed on and will spread quartz boat on the cross bar of described side and be divided into three lattice, are provided with two support bars in every lattice.
Further, according to actual needs, the number of described first slot and second slot is 20-200.
Further, as preferably, the number of described first slot and second slot is 50.
Further, specifically, the width of described first slot and second slot is 0.1mm-3mm.
Further, the width as preferred described first slot and second slot is 1.5mm.
The beneficial effects of the utility model are, the utility model diffusion quartz boat, can be so that the gentle levelling of silicon chip be capable on the quartz boat, air-flow can flow between silicon chip uniformly like this, uniformity to the resistance of the side of diffusion has greatly improved, improve the conversion efficiency of battery sheet simultaneously, reduced the ratio of poor efficiency sheet, saved the cost of enterprise.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is the schematic diagram that the utility model diffusion quartz boat is put silicon chip;
Fig. 2 is the front view of the utility model diffusion quartz boat;
Fig. 3 is the left view of the utility model diffusion quartz boat;
Fig. 4 is this vertical view that uses novel diffusion quartz boat.
Among the figure 1, silicon chip, 2, panel, 3, end fixed strip, 4, the side cross bar, 5, support bar, 6. first slot, 7, keel, 8, second slot, 9, through hole.
Embodiment
In conjunction with the accompanying drawings the utility model is described in further detail now.These accompanying drawings are the schematic diagram of simplification, basic structure of the present utility model only is described in a schematic way, so it only show the formation relevant with the utility model.
As Figure 1-3, the utility model diffusion quartz boat, be used to place silicon chip 1 and carry out DIFFUSION TREATMENT, comprise a support frame and two panels 2 that are positioned at the support frame two ends, all have on two panels 2 and be used for the through hole that air communication is crossed, support frame comprises the end fixed strip 3 that is positioned at the bottom, is arranged on the support bar 5 on the end fixed strip 3 and is used to go along with sb. to guard him two side cross bars 4 of silicon chip 1, article two, be provided with at least two keel 7 between the side cross bar 4, have a plurality of first slots 6 on the support bar 5, keel 7 are provided with a plurality of second slots 8 over against the direction of silicon chip.
In the present embodiment, end fixed strip 3 is 2, support bar 5 is 6, keel 7 are 4,4 keel 7 are distributed on and will spread quartz boat on the side cross bar 4 and be divided into three lattice, the width that the number that is provided with two support bars, 5, the first slots 6 and second slot 8 in every lattice is 50, the first slots 6 and second slot 8 is 1.5mm.
Process gas enters in the stove from afterbody, utilizes through hole 9 turnover diffusion quartz boats, and air-flow is parallel to silicon chip 1 surface.
With above-mentioned foundation desirable embodiment of the present utility model is enlightenment, and by above-mentioned description, the related work personnel can carry out various change and modification fully in the scope that does not depart from this utility model technological thought.The technical scope of this utility model is not limited to the content on the specification, must determine its technical scope according to the claim scope.
Claims (8)
1. one kind spreads quartz boat, be used to place silicon chip (1) and carry out DIFFUSION TREATMENT, it is characterized in that: comprise a support frame and two panels (2) that are positioned at the support frame two ends, all have the through hole (9) that is used for air communication and crosses on described two panels (2), described support frame comprises the end fixed strip (3) that is positioned at the bottom, is arranged on the support bar (5) on the end fixed strip (3) and is used to go along with sb. to guard him two side cross bars (4) of silicon chip (1), is provided with at least two keel (7) between described two side cross bars (4).
2. diffusion quartz boat as claimed in claim 1 is characterized in that: have a plurality of first slots (6) on the described support bar (5).
3. diffusion quartz boat as claimed in claim 1 or 2 is characterized in that: described keel (7) are provided with a plurality of second slots (8) over against the direction of silicon chip.
4. diffusion quartz boat as claimed in claim 3, it is characterized in that: fixed strip of the described end (3) is 2, support bar (5) is 6, keel (7) are 4, described 4 keel (7) are distributed on and will spread quartz boat on the described side cross bar (4) and be divided into three lattice, are provided with two support bars (5) in every lattice.
5. diffusion quartz boat as claimed in claim 4 is characterized in that: the number of described first slot (6) and second slot (8) is 20-200.
6. diffusion quartz boat as claimed in claim 5 is characterized in that: the number of described first slot (6) and second slot (8) is 50.
7. diffusion quartz boat as claimed in claim 4 is characterized in that: the width of described first slot (6) and second slot (8) is 0.1mm-3mm.
8. diffusion quartz boat as claimed in claim 7 is characterized in that: the width of described first slot (6) and second slot (8) is 1.5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220741791 CN203085500U (en) | 2012-12-28 | 2012-12-28 | Diffusion quartz boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220741791 CN203085500U (en) | 2012-12-28 | 2012-12-28 | Diffusion quartz boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203085500U true CN203085500U (en) | 2013-07-24 |
Family
ID=48831315
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220741791 Expired - Lifetime CN203085500U (en) | 2012-12-28 | 2012-12-28 | Diffusion quartz boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN203085500U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105908260A (en) * | 2016-05-18 | 2016-08-31 | 广东爱康太阳能科技有限公司 | Diffusion furnace for crystalline silicon solar cells |
| CN108281375A (en) * | 2016-03-16 | 2018-07-13 | 浙江潮晨能源科技有限公司 | The structure improved production system for being used to prepare cell piece |
-
2012
- 2012-12-28 CN CN 201220741791 patent/CN203085500U/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108281375A (en) * | 2016-03-16 | 2018-07-13 | 浙江潮晨能源科技有限公司 | The structure improved production system for being used to prepare cell piece |
| CN105908260A (en) * | 2016-05-18 | 2016-08-31 | 广东爱康太阳能科技有限公司 | Diffusion furnace for crystalline silicon solar cells |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130724 |