CN204959086U - Phosphorus oxychloride diffusion source bottle for solar cells - Google Patents
Phosphorus oxychloride diffusion source bottle for solar cells Download PDFInfo
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- CN204959086U CN204959086U CN201520584751.2U CN201520584751U CN204959086U CN 204959086 U CN204959086 U CN 204959086U CN 201520584751 U CN201520584751 U CN 201520584751U CN 204959086 U CN204959086 U CN 204959086U
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- source
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- phosphorus oxychloride
- source bottle
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Abstract
The utility model relates to a phosphorus oxychloride diffusion source bottle for solar cells, including thermotank, bush, source bottle body, the constant temperature trough side surface is equipped with the bush, and source bottle body sets up at constant temperature trough, bottle body top in source is equipped with air inlet, gas outlet, and the air inlet passes through intake pipe and source this body coupling of bottle, the intake pipe stretches into source bottle body bottom, and the intake pipe bottom is connected and is opened the annular anemostat that has the hole, outlet duct and source this body coupling of bottle are passed through to the gas outlet, the utility model provides a this internal source of source bottle utilize insufficient and solution even problem inadequately in the diffuse source bottle.
Description
Technical field
The utility model relates to a kind of diffusion source bottles, particularly relates to a kind of solar cell phosphorus oxychloride diffusion source bottles.
Background technology
Crystal silicon cell technology successful Application with commercially produce, greatly promoted the process that the mankind enjoy clean energy.The PN junction of crystal silicon cell is the core of its work, when rayed is on this PN junction, so-called photovoltaic effect can occur, and generation photo-induced voltage and photogenerated current supply and load.The design of emitting electrode is significant for the efficiency improving crystal silicon cell, and such as adopting laser assisted, phosphorus ink print etc. to form selectivity emissivity electrode is a kind of design effectively.
What generally adopt in current industry is the method that gas carries the diffusion of liquid phosphorus source.Pass into the quartz source bottle that liquid is housed by gas, carry phosphorus source steam after moistening and pass in diffusion furnace.
Ripe tubular diffusion furnace, the diffusion scheme provided is that gas carries source gas, and source gas at high temperature chemical reaction occurs, and then forms the core PN junction of crystal silicon cell.As carried out phosphorous diffusion on P-type silicon sheet, general employing be that nitrogen carries phosphorus oxychloride and brings tubular type boiler tube into, at high temperature phosphorus oxychloride and oxygen generation chemical reaction form phosphorus atom, this phosphorus atom at high temperature successively experienced by alternative diffusion, interstitial diffusion etc. and defines the N-type layer with certain Gradient distribution at silicon chip surface, then defines PN junction.Liquid phosphorus oxychloride is generally positioned in the source bottle of quartzy material, and its inlet pipe is the hollow tube of quartzy material.But existing diffusion source bottles has some defects, and such as inlet pipe is too short, a lot of remaining phosphorus oxychloride all can be had to remain in inside bottle at the bottom of causing using bottle can not make full use of at every turn, and solution is even not in diffusion source bottles.
Utility model content
The purpose of the present utility model is to provide a kind of solar cell phosphorus oxychloride diffusion source bottles, and this solar cell phosphorus oxychloride diffusion source bottles source solved in the bottle body of source utilizes insufficient and solution uniform not problem in diffusion source bottles.
In order to realize foregoing invention object, solar cell phosphorus oxychloride diffusion source bottles of the present utility model comprises thermostatic bath, lining, source bottle body, described thermostatic bath inner surface is provided with lining, source bottle body is arranged in thermostatic bath, inlet mouth, air outlet is provided with above the bottle body of described source, inlet mouth is connected with source bottle body by inlet pipe, described inlet pipe stretches into bottom the bottle body of source, inlet pipe bottom connects opens pertusate annular denuder, and described air outlet is connected with source bottle body by escape pipe.
Described lining is stainless steel lining.
Described source bottle body is provided with scale.
Described source bottle body is right cylinder.
Described annular denuder diameter is 2/3 of source bottle body diameter of section.
Adopt this solar cell phosphorus oxychloride diffusion source bottles, have the following advantages:
1, because source bottle body is arranged in thermostatic bath, can ensure that source bottle body is a fixing temperature like this, when temperature is fixed, the vapour pressure in the bottle body of source is just fixing, and like this when nitrogen is by source bottle body, the phosphorus source amount of taking out of will be substantially fixing;
2, because inlet mouth is connected with source bottle body by inlet pipe, described inlet pipe stretches into bottom the bottle body of source, can increase the utilization ratio in source like this;
3, open pertusate annular denuder because inlet pipe bottom connects, the utilization ratio in source can be improved so further, make solution more even in the bottle body of source.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
Fig. 1 is the structural representation of the utility model solar cell phosphorus oxychloride diffusion source bottles.
Wherein have: 1. thermostatic bath; 2. lining; 3. source bottle body; 4. inlet mouth; 5. inlet pipe; 6. annular denuder; 7. escape pipe; 8. air outlet.
Embodiment
The phosphorus oxychloride diffusion source bottles of solar cell shown in Fig. 1, comprise thermostatic bath 1, lining 2, source bottle body 3, described thermostatic bath 1 inner surface is provided with lining 2, source bottle body 3 is arranged in thermostatic bath 1, be provided with inlet mouth 4, air outlet 8 above described source bottle body 3, inlet mouth 4 is connected with source bottle body 3 by inlet pipe 5, and described inlet pipe 5 stretches into bottom source bottle body 3, inlet pipe 5 bottom connects opens pertusate annular denuder 6, and described air outlet 8 is connected with source bottle body 3 by escape pipe 7.
Described lining 2 is stainless steel lining.
Described source bottle body 3 is provided with scale.
Described source bottle body 3 is right cylinder.
Described annular denuder 6 diameter is 2/3 of source bottle body 3 diameter of section.
Nitrogen enters at inlet mouth 4 place, arrives in annular denuder 6 by inlet pipe 5, is then diffused in solution by the hole on annular denuder 6 and goes, and then nitrogen is carried phosphorus oxychloride and discharged from air outlet 8 by escape pipe 7.
Because source bottle body 3 is arranged in thermostatic bath 1, can ensure that source bottle body 3 is a fixing temperature like this, when temperature is fixed, the vapour pressure in source bottle body 3 is just fixing, like this when nitrogen is by source bottle body 3, the phosphorus source amount of taking out of will be substantially fixing; Because inlet mouth 4 is connected with source bottle body 3 by inlet pipe 5, described inlet pipe 5 stretches into bottom source bottle body 3, can increase the utilization ratio in source like this; Open pertusate annular denuder 6 because inlet pipe 5 bottom connects, the utilization ratio in source can be improved so further, make solution more even in source bottle body 3.
The technical characteristic described in detail is not had to be prior art in the application.Above-described embodiment is the principle of illustrative the application and effect thereof only, but not for limiting the application.Any person skilled in the art scholar all under the spirit and category of the application, can modify above-described embodiment or changes.Therefore, have in art and usually know that the knowledgeable modifies or changes not departing from all equivalences completed under the spirit and technological thought that the application discloses, must be contained by the claim of the application.
Claims (5)
1. a solar cell phosphorus oxychloride diffusion source bottles, it is characterized in that: comprise thermostatic bath, lining, source bottle body, described thermostatic bath inner surface is provided with lining, source bottle body is arranged in thermostatic bath, be provided with inlet mouth, air outlet above the bottle body of described source, inlet mouth is connected with source bottle body by inlet pipe, and described inlet pipe stretches into bottom the bottle body of source, inlet pipe bottom connects opens pertusate annular denuder, and described air outlet is connected with source bottle body by escape pipe.
2. according to solar cell phosphorus oxychloride diffusion source bottles according to claim 1, it is characterized in that: described lining is stainless steel lining.
3. according to solar cell phosphorus oxychloride diffusion source bottles according to claim 1, it is characterized in that: described source bottle body is provided with scale.
4. according to solar cell phosphorus oxychloride diffusion source bottles according to claim 1, it is characterized in that: described source bottle body is right cylinder.
5. according to solar cell phosphorus oxychloride diffusion source bottles according to claim 1, it is characterized in that: described annular denuder diameter is 2/3 of source bottle body diameter of section.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520584751.2U CN204959086U (en) | 2015-08-05 | 2015-08-05 | Phosphorus oxychloride diffusion source bottle for solar cells |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201520584751.2U CN204959086U (en) | 2015-08-05 | 2015-08-05 | Phosphorus oxychloride diffusion source bottle for solar cells |
Publications (1)
Publication Number | Publication Date |
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CN204959086U true CN204959086U (en) | 2016-01-13 |
Family
ID=55054163
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201520584751.2U Expired - Fee Related CN204959086U (en) | 2015-08-05 | 2015-08-05 | Phosphorus oxychloride diffusion source bottle for solar cells |
Country Status (1)
Country | Link |
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CN (1) | CN204959086U (en) |
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2015
- 2015-08-05 CN CN201520584751.2U patent/CN204959086U/en not_active Expired - Fee Related
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160113 Termination date: 20190805 |