CN201408773Y - Diffusion furnace with crystalline silicon solar battery - Google Patents
Diffusion furnace with crystalline silicon solar battery Download PDFInfo
- Publication number
- CN201408773Y CN201408773Y CN2009200417086U CN200920041708U CN201408773Y CN 201408773 Y CN201408773 Y CN 201408773Y CN 2009200417086 U CN2009200417086 U CN 2009200417086U CN 200920041708 U CN200920041708 U CN 200920041708U CN 201408773 Y CN201408773 Y CN 201408773Y
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- China
- Prior art keywords
- diffusion furnace
- diffusion
- furnace tube
- gas buffer
- silicon solar
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- Expired - Fee Related
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
Abstract
The utility model relates to solar battery production equipment, in particular to a diffusion furnace with a crystalline silicon solar battery, which comprises a diffusion furnace tube; a gas buffer device is arranged between the diffusion furnace tube and a diffusion source; a gas inlet and a gas outlet are respectively formed on two relative sides of the gas buffer device; and the gas outlet iscommunicated with the gas inlet of the diffusion furnace tube through a connecting tube. The diffusion source is fully mixed through the gas buffer device, so as to improve the saturated vapor pressure of the diffusion source leading into the diffusion furnace tube, thereby improving the diffusive doping uniformity of the diffusion furnace tube. The diffusion furnace tube has the advantages of simple structure, convenient installation and good safety.
Description
Technical field
The utility model relates to manufacture of solar cells equipment, especially a kind of crystal silicon solar energy battery diffusion furnace.
Background technology
Diffusion furnace tube be used in semiconductor device and the large scale integrated circuit manufacture process to silicon chip spread, oxidation, withdraw from a secret society or underworld gang, a kind of heat-processing equipment of technology such as alloy and sintering.In the crystal silicon solar energy battery production process, diffusion is the important process process of preparation PN junction.General solar cell diffusion furnace equipment comprises: the quartz ampoule that is used to provide source of the gas that the diffusion furnace boiler tube is connected with afterbody.The part but this equipment comes with some shortcomings: because diffusion furnace tube is single-ended Open architecture, load, unloading piece all will be from openning turnover inevitably in the technical process of handling silicon chip, time is longer, production efficiency is low, and the silicon chip turnover time can influence the uniformity of high concentration shallow junction diffusion.
In order to enhance productivity, should close the trend that die size enlarges, gradually adopt the continous way diffusion technology, the cleaning of continous way and diffusion technology can cooperate well, silicon chip behind the cleaning, drying can directly enter into diffusion system, saved a lot, improved production efficiency as links such as load, unloading pieces.But the continous way system usually adopts tunnel structure, and complex structure has increased the inhomogeneities that spreads.
The utility model content
Technical problem to be solved in the utility model is: in order to overcome the problem of existing diffusion furnace complex structure, diffusion uniformity difference etc., a kind of crystal silicon solar energy battery diffusion furnace is provided, can fully mix diffuse source, to improve the diffusion uniformity of product.
The technical scheme that its technical problem that solves the utility model adopts is: a kind of crystal silicon solar energy battery diffusion furnace, has diffusion furnace tube, be provided with gas buffer between diffuse source and the diffusion furnace tube, the relative both sides of gas buffer are respectively equipped with air admission hole and venthole, and venthole is communicated with the air inlet of diffusion furnace tube by tube connector.
Further, gas buffer can be cuboid or cylinder or axiolitic hollow body.
Further, the gas buffer bottom is provided with the constant temperature protective device, guarantees that the interior gas of whole gas buffer is in same temperature.
The beneficial effects of the utility model are; By gas buffer diffuse source is fully mixed, be passed into the saturated vapor pressure of diffuse source in the diffusion furnace tube with raising, thereby improve the uniform doping of the diffusion of diffusion furnace tube, and this device structure is simple, easy for installation, fail safe is good.
Description of drawings
Below in conjunction with drawings and Examples the utility model is further specified.
Fig. 1 is the structural representation of preferred embodiment of the present utility model;
Wherein: 1. diffusion furnace tube, 2. gas buffer, 3. air admission hole, 4. venthole, 5. tube connector, 6. constant temperature protective device.
Embodiment
As shown in Figure 1; a kind of crystal silicon solar energy battery diffusion furnace; has diffusion furnace tube 1; be provided with gas buffer 2 between diffuse source and the diffusion furnace tube 1; the relative both sides of gas buffer 2 are respectively equipped with air admission hole 3 and venthole 4; venthole 4 is communicated with the air inlet of diffusion furnace tube 1 by tube connector 5, and gas buffer 2 bottoms are provided with constant temperature protective device 6.
Gas buffer 2 can be cuboid or cylinder or axiolitic hollow body.As shown in Figure 1, this gas buffer 2 is shaped as cuboid.
Gas by this gas buffer 2 can be big flow nitrogen, carry low discharge nitrogen and a kind of gas in the oxygen or the mist of several gases in source; The liquid state diffusion source that low discharge nitrogen carries can comprise phosphorous diffusion source and boron diffusion source; Will stop the regular hour fully to mix by the gas in this gas buffer 2 in this gas buffer 2, the venthole 4 from gas buffer 2 flows out again.
Adorn 2 by this gas buffer and can make big flow nitrogen, oxygen and carry the low discharge nitrogen in liquid state diffusion source and the phosphorus source is fully mixed in this gas buffer 2, and then enter in the diffusion furnace tube 1 by the air inlet of diffusion furnace tube 1.By the use of this device, can improve the saturated vapor pressure that is passed into diffuse source in the diffusion furnace tube 1, thereby improve the uniform doping of crystal-silicon solar cell tubular type diffusion.
Claims (3)
1. crystal silicon solar energy battery diffusion furnace, has diffusion furnace tube (1), it is characterized in that: be provided with gas buffer (2) between diffuse source and the diffusion furnace tube (1), the relative both sides of gas buffer (2) are respectively equipped with air admission hole (3) and venthole (4), and venthole (4) is communicated with the air inlet of diffusion furnace tube (1) by tube connector (5).
2. crystal silicon solar energy battery diffusion furnace according to claim 1 is characterized in that: described gas buffer (2) can be cuboid or cylinder or axiolitic hollow body.
3. crystal silicon solar energy battery diffusion furnace according to claim 1 is characterized in that: described gas buffer (2) bottom is provided with constant temperature protective device (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200417086U CN201408773Y (en) | 2009-04-01 | 2009-04-01 | Diffusion furnace with crystalline silicon solar battery |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2009200417086U CN201408773Y (en) | 2009-04-01 | 2009-04-01 | Diffusion furnace with crystalline silicon solar battery |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201408773Y true CN201408773Y (en) | 2010-02-17 |
Family
ID=41679719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2009200417086U Expired - Fee Related CN201408773Y (en) | 2009-04-01 | 2009-04-01 | Diffusion furnace with crystalline silicon solar battery |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201408773Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103311373A (en) * | 2013-06-18 | 2013-09-18 | 奥特斯维能源（太仓）有限公司 | Device for improving sheet resistance uniformity |
| CN103696020A (en) * | 2013-12-31 | 2014-04-02 | 北京七星华创电子股份有限公司 | Source flow control system for negative-pressure diffusion furnace |
-
2009
- 2009-04-01 CN CN2009200417086U patent/CN201408773Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103311373A (en) * | 2013-06-18 | 2013-09-18 | 奥特斯维能源（太仓）有限公司 | Device for improving sheet resistance uniformity |
| CN103696020A (en) * | 2013-12-31 | 2014-04-02 | 北京七星华创电子股份有限公司 | Source flow control system for negative-pressure diffusion furnace |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100217 Termination date: 20180401 |