CN103311373A - Device for improving sheet resistance uniformity - Google Patents
Device for improving sheet resistance uniformity Download PDFInfo
- Publication number
- CN103311373A CN103311373A CN2013102404734A CN201310240473A CN103311373A CN 103311373 A CN103311373 A CN 103311373A CN 2013102404734 A CN2013102404734 A CN 2013102404734A CN 201310240473 A CN201310240473 A CN 201310240473A CN 103311373 A CN103311373 A CN 103311373A
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- China
- Prior art keywords
- ball bowl
- uniformity
- exhaust end
- sheet resistance
- furnace tube
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention discloses a device for improving sheet resistance uniformity. The device comprises an air suction ball bowl comprising an air inlet end, a ball bowl part and an exhaust end. The air inlet end is mutually communicated with the ball bowl part, the exhaust end is U-shaped, a port at one end of the exhaust end is closed, a port at the other end of the same is connected with the ball bowl part, a valve is arranged at a joint of the exhaust end and the ball bowl part, and holes are formed on the lateral wall of the exhaust end. Since a structure of the air suction ball bowl inside a diffusion furnace tube is modified, to-be-diffused materials uniformly mixed in the air suction ball bowl are sprayed uniformly in the diffusion furnace tube, and high uniformity of diffusion sheet resistance pieces is realized with improvement of uniformity of the to-be-diffused materials in the diffusion furnace tube; the device for improving the sheet resistance uniformity greatly improves the uniformity inside the sheet resistance pieces, even for high sheet resistance pieces, and uniformity can still be maintained high inside the sheet resistance pieces.
Description
Technical field
The present invention relates to a kind of inhomogeneity device of high square resistance of carrying.
Technical background
Rising along with side's resistance resistance, diffusion uniformity in side's resistance sheet can be worse and worse, at present in the process of research solar battery sheet, find whether to obtain efficiently that can the main difficult point of solar battery sheet be the high square resistance that obtain low surface concentration, therefore how to put forward the meaning that the diffusion uniformity of high square resistance gets a good eye.
Summary of the invention
Goal of the invention: technical problem to be solved by this invention provides a kind of inhomogeneity method of high square resistance of putting forward, this method is by changing the structure of air inlet ball bowl in the diffusion furnace tube, improved and treated the uniformity of diffusate in diffusion furnace tube, thereby improved the interior uniformity of square resistance sheet.
Summary of the invention: for solving the problems of the technologies described above, the technical solution adopted in the present invention is:
A kind of inhomogeneity device of high square resistance of carrying, comprise the air inlet ball bowl that is positioned at diffusion furnace tube, described air inlet ball bowl comprises inlet end, ball bowl part and exhaust end, described inlet end and ball bowl partly are interconnected, described exhaust end is U-shaped, one end port closed, and other end port partly is connected with described ball bowl, junction in exhaust end and ball bowl part is provided with valve, and the sidewall of exhaust end is provided with the hole.
Wherein, the number in hole is 4 on the described exhaust end sidewall.
Wherein, described exhaust end has two relative sidewalls, and 4 holes are positioned on one of them sidewall, or lays respectively on two relative sidewalls.
Wherein, to seal the distance of an end port be 15-20mm for described valve and exhaust end.
Wherein, the length of described air inlet ball bowl is 200mm.
Wherein, the length of described inlet end is 31.5mm.
Reaction principle: treat that diffusate enters air inlet ball bowl from inlet end, the ball bowl partially mixed evenly after, owing to treat to contain in the diffusate gas, gas pressure is with the valve open of ball bowl part with the exhaust end junction, and will treat that diffusate evenly is sprayed onto in the diffusion furnace tube through the hole on the exhaust end sidewall, in diffusion furnace tube, form uniform air-flow, treat that the uniformity of diffusate in diffusion furnace tube improves, thereby realized the high uniformity of diffusion side's resistance sheet.Treat that diffusate is N
2, O
2And LN
2
Beneficial effect: than prior art, device of the present invention is by changing the structure of air inlet ball bowl in the diffusion furnace tube, make and treat that diffusate mixes the diffusate for the treatment of that will mix again and is sprayed onto in the diffusion furnace tube uniformly in air inlet ball bowl, by treating that the uniformity of diffusate in diffusion furnace tube improves, thereby realized the high uniformity of diffusion side's resistance sheet, device of the present invention has improved the uniformity in the square resistance sheet greatly, even the high square resistance sheet still can keep high uniformity in side's resistance sheet.
Description of drawings
Fig. 1 is the structural representation of raising provided by the invention diffusion side resistance uniformity device.
Embodiment
Below in conjunction with specific embodiment, further illustrate the present invention, should understand these embodiment only is used for explanation the present invention and is not used in and limits the scope of the invention, after having read the present invention, those skilled in the art all fall within the application's claims institute restricted portion to the modification of the various equivalent form of values of the present invention.
As shown in Figure 1, a kind of inhomogeneity device of high square resistance of carrying, comprise the air inlet ball bowl 5 that is positioned at diffusion furnace tube, described air inlet ball bowl 5 comprises inlet end 1, ball bowl part 2 and exhaust end 3, described inlet end 1 and ball bowl part 2 are interconnected, described exhaust end 3 is U-shaped, one end port closed, other end port is connected with described ball bowl part 2, junction in exhaust end 3 and ball bowl part 2 is provided with valve 4, and the sidewall of exhaust end is provided with the hole, and the number in hole is 4 on exhaust end 3 sidewalls, exhaust end 3 has two relative sidewalls, 4 holes can be opened therein on the sidewall, also can open respectively on two relative sidewalls, and an end distance of described valve 4 and exhaust end 3 sealings is from being 15～20mm, the length of air inlet ball bowl 5 is 200mm, and the length of inlet end 1 is 31.5mm.
Reaction principle: treat that diffusate enters air inlet ball bowl 5 from inlet end 1, after ball bowl part 2 mixes, owing to treat to contain in the diffusate gas, gas pressure is opened ball bowl part 2 and the valve 4 of exhaust end 3 junctions, and will treat that diffusate evenly is sprayed onto in the diffusion furnace tube through the hole on exhaust end 3 sidewalls, in diffusion furnace tube, form uniform air-flow, treat that the uniformity of diffusate in diffusion furnace tube improves, thereby realized the high uniformity of diffusion side's resistance sheet.Treat that diffusate is N
2, O
2And LN
2
Device of the present invention is by changing the structure of air inlet ball bowl in the diffusion furnace tube, make and treat that diffusate mixes the diffusate for the treatment of that will mix again and is sprayed onto in the diffusion furnace tube uniformly in air inlet ball bowl, by treating that the uniformity of diffusate in diffusion furnace tube improves, realized the high uniformity of diffusion side's resistance sheet.Device of the present invention has improved the uniformity in the square resistance sheet greatly, even high side's resistance sheet still can keep high uniformity in side's resistance sheet.
Claims (6)
1. carry the inhomogeneity device of high square resistance for one kind, it is characterized in that: comprise the air inlet ball bowl that is positioned at diffusion furnace tube, described air inlet ball bowl comprises inlet end, ball bowl part and exhaust end, described inlet end and ball bowl partly are interconnected, described exhaust end is U-shaped, one end port closed, and other end port partly is connected with described ball bowl, junction in exhaust end and ball bowl part is provided with valve, and the sidewall of exhaust end is provided with the hole.
2. the inhomogeneity device of high square resistance of carrying according to claim 1, it is characterized in that: the number in hole is 4 on the described exhaust end sidewall.
3. the inhomogeneity device of high square resistance of carrying according to claim 1, it is characterized in that: described exhaust end has two relative sidewalls, and 4 holes are positioned on one of them sidewall, or lay respectively on two relative sidewalls.
4. the inhomogeneity device of high square resistance of carrying according to claim 1, it is characterized in that: the distance that described valve and exhaust end seal an end port is 15-20mm.
5. the inhomogeneity device of high square resistance of carrying according to claim 1, it is characterized in that: the length of described air inlet ball bowl is 200mm.
6. the inhomogeneity device of high square resistance of carrying according to claim 1, it is characterized in that: the length of described inlet end is 31.5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013102404734A CN103311373A (en) | 2013-06-18 | 2013-06-18 | Device for improving sheet resistance uniformity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013102404734A CN103311373A (en) | 2013-06-18 | 2013-06-18 | Device for improving sheet resistance uniformity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103311373A true CN103311373A (en) | 2013-09-18 |
Family
ID=49136383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013102404734A Pending CN103311373A (en) | 2013-06-18 | 2013-06-18 | Device for improving sheet resistance uniformity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103311373A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105551948A (en) * | 2015-12-11 | 2016-05-04 | 合肥海润光伏科技有限公司 | Device and method for improving diffusion uniformity of solar cell |
| CN114744072A (en) * | 2021-01-07 | 2022-07-12 | 徐州中辉光伏科技有限公司 | Monocrystalline silicon battery piece diffusion efficiency improvement and diffusion post-treatment oxidation process |
| CN116504611A (en) * | 2023-06-28 | 2023-07-28 | 无锡松煜科技有限公司 | Boron diffusion equipment and application method thereof |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5223452A (en) * | 1989-12-21 | 1993-06-29 | Knepprath Vernon E | Method and apparatus for doping silicon spheres |
| KR20060055088A (en) * | 2004-11-18 | 2006-05-23 | 희성엥겔하드주식회사 | Nox reducing apparatus for exhaust gases from diesel engines |
| CN201408773Y (en) * | 2009-04-01 | 2010-02-17 | 常州天合光能有限公司 | Diffusion furnace with crystalline silicon solar battery |
| CN202465957U (en) * | 2011-12-27 | 2012-10-03 | 广东爱康太阳能科技有限公司 | Silicon wafer diffusion furnace |
| WO2012151410A1 (en) * | 2011-05-03 | 2012-11-08 | Sandvik Thermal Process, Inc | Novel doping process for solar cell manufacture |
| CN202940262U (en) * | 2012-10-31 | 2013-05-15 | 广东爱康太阳能科技有限公司 | Gas shower pipe for diffusion |
| CN203325958U (en) * | 2013-06-18 | 2013-12-04 | 奥特斯维能源（太仓）有限公司 | Device for enhancing square resistance uniformity |
-
2013
- 2013-06-18 CN CN2013102404734A patent/CN103311373A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5223452A (en) * | 1989-12-21 | 1993-06-29 | Knepprath Vernon E | Method and apparatus for doping silicon spheres |
| KR20060055088A (en) * | 2004-11-18 | 2006-05-23 | 희성엥겔하드주식회사 | Nox reducing apparatus for exhaust gases from diesel engines |
| CN201408773Y (en) * | 2009-04-01 | 2010-02-17 | 常州天合光能有限公司 | Diffusion furnace with crystalline silicon solar battery |
| WO2012151410A1 (en) * | 2011-05-03 | 2012-11-08 | Sandvik Thermal Process, Inc | Novel doping process for solar cell manufacture |
| CN202465957U (en) * | 2011-12-27 | 2012-10-03 | 广东爱康太阳能科技有限公司 | Silicon wafer diffusion furnace |
| CN202940262U (en) * | 2012-10-31 | 2013-05-15 | 广东爱康太阳能科技有限公司 | Gas shower pipe for diffusion |
| CN203325958U (en) * | 2013-06-18 | 2013-12-04 | 奥特斯维能源（太仓）有限公司 | Device for enhancing square resistance uniformity |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105551948A (en) * | 2015-12-11 | 2016-05-04 | 合肥海润光伏科技有限公司 | Device and method for improving diffusion uniformity of solar cell |
| CN105551948B (en) * | 2015-12-11 | 2018-05-15 | 合肥海润光伏科技有限公司 | A kind of devices and methods therefor for improving diffusion uniformity of solar battery |
| CN114744072A (en) * | 2021-01-07 | 2022-07-12 | 徐州中辉光伏科技有限公司 | Monocrystalline silicon battery piece diffusion efficiency improvement and diffusion post-treatment oxidation process |
| CN116504611A (en) * | 2023-06-28 | 2023-07-28 | 无锡松煜科技有限公司 | Boron diffusion equipment and application method thereof |
| CN116504611B (en) * | 2023-06-28 | 2023-09-01 | 无锡松煜科技有限公司 | Boron diffusion equipment and application method thereof |
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Application publication date: 20130918 |