CN204097334U - A kind of glass wafer corrosion tool - Google Patents

A kind of glass wafer corrosion tool Download PDF

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Publication number
CN204097334U
CN204097334U CN201420490953.6U CN201420490953U CN204097334U CN 204097334 U CN204097334 U CN 204097334U CN 201420490953 U CN201420490953 U CN 201420490953U CN 204097334 U CN204097334 U CN 204097334U
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China
Prior art keywords
plate
square
square floor
back side
left plate
Prior art date
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Expired - Fee Related
Application number
CN201420490953.6U
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Chinese (zh)
Inventor
平尾诚
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Taikuni Cisco Electronics (suzhou) Co Ltd
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Taikuni Cisco Electronics (suzhou) Co Ltd
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Priority to CN201420490953.6U priority Critical patent/CN204097334U/en
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Publication of CN204097334U publication Critical patent/CN204097334U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a kind of glass wafer corrosion tool, comprise square floor, square top board, left plate, right side plate and back side panel, square floor and square top board structure identical central are equipped with manhole, and the upper surface of square top board is provided with handle; Left plate is identical with the width of right side plate, is the 1/3-1/2 of the square floor length of side; The width of back side panel is the 1/4-1/3 of the square floor length of side; Left plate, right side plate are all H1 mutually with the thickness of back side panel, and square floor is all H2 mutually with square top plate thickness, 2≤H1:H2≤5; The inner side of described left plate, right side plate and back side panel is evenly provided with the draw-in groove that multiple transverse direction runs through.The utility model cost is low, and result of use is better than import tool, and can corrode multiple product, corrosive fluid convection effects is good simultaneously, and corrosion speed is fast, and quality is high, reduces production cost.

Description

A kind of glass wafer corrosion tool
Technical field
The utility model is specifically related to a kind of corrosion tool for glass wafer.
Background technology
Opticglass wafer is mainly used in the fields such as accurate electronics, digital product, instrument and optical element, the surface requirements of wafer is had to the precision of high planeness, parallelism, roughness and punching.
In the manufacturing processed of glass wafer, etching process is also a wherein important ring.In etching process, need to corrode glass surface or corrode glass edge surface.When corroding glass edge surface, how glass is placed in etching tank just serves crucial effect to Corrosion results.Therefore, the manufacture of glass corrosion tool is more aobvious particularly important.
At present, company is higher from the tool cost of external import, and every platform tool once can only place a product, and cost is too high, and this tool is penetrating not, and corrosive fluid circulation is not smooth, and corrosive effect is unsatisfactory.
Utility model content
For solving the problems of the technologies described above, the utility model proposes a kind of glass wafer corrosion tool, this tool can corrode many pieces of products simultaneously, improve corrosion speed and quality product.
For achieving the above object, the technical solution of the utility model is as follows:
A kind of glass wafer corrosion tool, comprise square floor, square top board, left plate, right side plate and back side panel, described square floor is identical with described square top board structure, center is equipped with manhole, and the edge of described square floor and the manhole Edge Distance on it are 2-5cm; The upper surface of described square top board is provided with handle; Described left plate is identical with the width of right side plate, is the 1/3-1/2 of the square floor length of side; The width of described back side panel is the 1/4-1/3 of the square floor length of side; Described left plate, right side plate are all H1 mutually with the thickness of back side panel, and described square floor is all H2 mutually with square top plate thickness, 2≤H1:H2≤5; The inner side of described left plate, right side plate and back side panel is evenly provided with the draw-in groove that multiple transverse direction runs through, and described draw-in groove is parallel with described square floor, and the cross section of described draw-in groove is rectangle, and it is highly 3-10mm.
Preferably, the left hand edge that described left plate is arranged at square floor is anterior, and described left plate, described square floor are concordant with the edge of described square top board, and described right side plate is symmetricly set in opposite side; Described back side panel is located at the antemarginal center of described square floor.
Preferably, H1:H2=3.
Preferably, the height of described draw-in groove is 8mm.
Preferably, the material of described tool is tetrafluoroethylene.
Preferably, the front portion of described corrosion tool is provided with the slip-proofing device that can prevent product from skidding off from draw-in groove.
The utility model cost is low, and result of use is better than imported product.
The utility model advantage is compared with prior art:
Corroded by original single piece of product, become many pieces of products and corrode simultaneously, significantly improve output, reduce production cost.
Meanwhile, the simplification that the structure of this corrosion tool is tried one's best, the manhole that base plate and top board are provided with, makes corrosive fluid convection current accelerate; The width of left plate, right side plate and back side panel reduces its width while guarantee tool stability as far as possible, increases the degree of corrosive fluid convection current, improves corrosive effect, accelerate corrosion speed.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, be briefly described to the accompanying drawing used required in embodiment or description of the prior art below.
Fig. 1 is the perspective view of a kind of glass wafer corrosion tool disclosed in the utility model embodiment 1.
1. square floor 2. square top board 3. left plate 4. right side plate 5. back side panel 6. manhole 7. handle 8. draw-in groove
Embodiment
Below in conjunction with the accompanying drawing in the utility model embodiment, the technical scheme in the utility model embodiment is clearly and completely described.
Embodiment 1.
As shown in Figure 1, a kind of glass wafer corrosion tool, comprise square floor 1, square top board 2, left plate 3, right side plate 4 and back side panel 5, square floor is identical with square top board structure, center is equipped with large manhole 6, the edge of square floor and the manhole on it 6 Edge Distance are 3cm (also can be other numerical value of 2-5cm), and this width is the stability of conveniently inlaying back side panel and tool entirety;
In order to prevent corrosive fluid to be stained with to hand, the upper surface of square top board is provided with handle 7, is convenient to tool of taking;
Left plate 3 is identical with the width of right side plate 4, and structure is also identical, is symmetrical arranged, and is 1/3 (can also be 1/3-1/2) of the square floor length of side; The width of back side panel is 1/4 (also can be 1/4-1/3) of the square floor length of side; The restriction of these two width is to leave sufficient space to the convection current of corrosive fluid ensureing tool stability while as far as possible, improves corrosive fluid mobility, improves corrosive effect and corrosion speed;
Left plate, right side plate are identical with the thickness of back side panel is H1, and square floor is all H2 mutually with square top plate thickness, H1:H2=3 (valid interval is 2≤H1:H2≤5); H1 is greater than H2 and conveniently arranges draw-in groove, improves structural stability during the multiple product of carrying;
The inner side of left plate, right side plate and back side panel is evenly provided with the draw-in groove 8 that multiple transverse direction runs through, and draw-in groove is parallel with square floor, and the cross section of draw-in groove is rectangle, and the height of draw-in groove is 8mm (also can be other numeral between 3-10mm, as 5,6mm etc.).
The left hand edge that left plate is arranged at square floor is anterior, and described left plate, described square floor are concordant with the edge of described square top board, and described right side plate is symmetricly set in opposite side; Described back side panel is located at the antemarginal center of described square floor.
The material of described tool is corrosion resistant tetrafluoroethylene.
The front portion of corrosion tool is provided with the slip-proofing device that can prevent product from skidding off from draw-in groove, can for being fastened on pin on top board and base plate or like.
Cost of the present utility model is low, and result of use is better than the external product given a long price for.
The utility model advantage is compared with prior art:
Corroded by original single piece of product, become many pieces of products and corrode simultaneously, significantly improve output, reduce production cost.
Meanwhile, the simplification that the structure of this corrosion tool is tried one's best, the manhole that base plate and top board are provided with, makes corrosive fluid convection current accelerate; The width of left plate, right side plate and back side panel reduces its width while guarantee tool stability as far as possible, increases the degree of corrosive fluid convection current, improves corrosive effect, accelerate corrosion speed.
To the above-mentioned explanation of the disclosed embodiments, professional and technical personnel in the field are realized or uses the utility model.To be apparent for those skilled in the art to the multiple amendment of these embodiments, General Principle as defined herein when not departing from spirit or scope of the present utility model, can realize in other embodiments.Therefore, the utility model can not be restricted to these embodiments shown in this article, but will meet the widest scope consistent with principle disclosed herein and features of novelty.

Claims (6)

1. a glass wafer corrosion tool, it is characterized in that, comprise square floor, square top board, left plate, right side plate and back side panel, described square floor is identical with described square top board structure, center is equipped with manhole, and the edge of described square floor and the manhole Edge Distance on it are 2-5cm; The upper surface of described square top board is provided with handle; Described left plate is identical with the width of right side plate, is the 1/3-1/2 of the square floor length of side; The width of described back side panel is the 1/4-1/3 of the square floor length of side; Described left plate, right side plate are all H1 mutually with the thickness of back side panel, and described square floor is all H2 mutually with square top plate thickness, 2≤H1:H2≤5; The inner side of described left plate, right side plate and back side panel is evenly provided with the draw-in groove that multiple transverse direction runs through, and described draw-in groove is parallel with described square floor, and the cross section of described draw-in groove is rectangle, and it is highly 3-10mm.
2. a kind of glass wafer corrosion tool according to claim 1, it is characterized in that, the left hand edge that described left plate is arranged at square floor is anterior, and described left plate, described square floor are concordant with the edge of described square top board, and described right side plate is symmetricly set in opposite side; Described back side panel is located at the antemarginal center of described square floor.
3. a kind of glass wafer corrosion tool according to claim 1 and 2, is characterized in that, H1:H2=3.
4. a kind of glass wafer corrosion tool according to claim 3, it is characterized in that, the height of described draw-in groove is 8mm.
5. a kind of glass wafer corrosion tool according to claim 3, it is characterized in that, the material of described tool is tetrafluoroethylene.
6. a kind of glass wafer corrosion tool according to claim 4 or 5, it is characterized in that, the front portion of described corrosion tool is provided with the slip-proofing device that can prevent product from skidding off from draw-in groove.
CN201420490953.6U 2014-08-29 2014-08-29 A kind of glass wafer corrosion tool Expired - Fee Related CN204097334U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420490953.6U CN204097334U (en) 2014-08-29 2014-08-29 A kind of glass wafer corrosion tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420490953.6U CN204097334U (en) 2014-08-29 2014-08-29 A kind of glass wafer corrosion tool

Publications (1)

Publication Number Publication Date
CN204097334U true CN204097334U (en) 2015-01-14

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420490953.6U Expired - Fee Related CN204097334U (en) 2014-08-29 2014-08-29 A kind of glass wafer corrosion tool

Country Status (1)

Country Link
CN (1) CN204097334U (en)

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GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150114

Termination date: 20150829

EXPY Termination of patent right or utility model