CN106935535B - Quartz push-pull boat - Google Patents
Quartz push-pull boat Download PDFInfo
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- CN106935535B CN106935535B CN201511025863.5A CN201511025863A CN106935535B CN 106935535 B CN106935535 B CN 106935535B CN 201511025863 A CN201511025863 A CN 201511025863A CN 106935535 B CN106935535 B CN 106935535B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
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- Condensed Matter Physics & Semiconductors (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a quartz push-pull boat which comprises a first boat shaft, a second boat shaft, a connecting shaft, a first insert piece bridge set and a second insert piece bridge set, wherein the first boat shaft and the second boat shaft are arranged in parallel; the first boat shaft is provided with a plurality of first boat grooves, the second boat shaft is provided with a plurality of second boat grooves, the first boat grooves and the second boat grooves are correspondingly arranged, and the wafer is loaded on the quartz push-pull boat through the first boat grooves and the second boat grooves; first inserted sheet fender bridge group and second inserted sheet fender bridge group are fixed in the both ends of first boat axle and second boat axle respectively, and first boat groove and second boat groove set up in between first inserted sheet fender bridge group and second inserted sheet fender bridge group. The invention solves the problems that the accompanying wafers are inconvenient to manage and extremely easy to stain and damage, saves the cost and ensures the uniformity of temperature and air flow among the wafer wafers.
Description
Technical Field
The invention belongs to the technical field of quartz boat manufacturing, and relates to a quartz push-pull boat.
Background
The wafer diffusion process is to put the wafer into a high-temperature diffusion furnace, introduce nitrogen, POCL3 and other gases, decompose the wafer at high temperature and form P-N junctions on the surface of the wafer. The pipeline of the high-temperature diffusion furnace is a circular pipeline made of quartz materials, and during diffusion, a wafer is firstly placed on a quartz boat, and then the quartz boat is sent into the pipeline by a quartz rod or a metal rod to be baked.
At present, a quartz push-pull boat is commonly used on a production line, a normal wafer is placed in the middle of the quartz push-pull boat, and an unqualified wafer is placed in front of and behind the normal wafer as an accompanying wafer, so that the aim of uniform temperature and air flow in a furnace tube is fulfilled, and the consistency of parameters of wafer products is ensured. However, the process of using the quartz push-pull boat has many accompanying wafers, which is inconvenient to manage, and may have the situations of missing cleaning and repeated cleaning in the periodic cleaning process, and under the continuous operation situation, the accompanying wafers are easy to be contaminated and damaged, so that the uniformity of temperature and air flow is poor, and the parameters of the wafer are affected. In addition, the auxiliary wafer is thin and is a consumable product like a normal wafer, and the auxiliary wafer is often added, so that the cost is high.
Disclosure of Invention
In view of this, the invention provides a quartz push-pull boat, which solves the problems that the accompanying wafers are inconvenient to manage and easy to stain and damage, saves the cost, and ensures the uniformity of the temperature and the air flow among the wafer wafers.
In order to achieve the purpose, the invention adopts the following technical scheme:
on one hand, the embodiment of the invention provides a quartz push-pull boat, which comprises a first boat shaft and a second boat shaft which are arranged in parallel, connecting shafts connected to two ends of the first boat shaft and the second boat shaft, a first insert piece bridge set and a second insert piece bridge set, wherein the first insert piece bridge set and the second insert piece bridge set stretch across the first boat shaft and the second boat shaft, the first insert piece bridge set and the second insert piece bridge set respectively comprise a plurality of insert piece bridges, and quartz insert pieces are placed between adjacent insert piece bridges;
the first boat shaft is provided with a plurality of first boat grooves, the second boat shaft is provided with a plurality of second boat grooves, the first boat grooves and the second boat grooves are correspondingly arranged, and a plurality of wafers are borne on the quartz push-pull boat through the first boat grooves and the second boat grooves;
first inserted sheet fender bridge group with second inserted sheet fender bridge group is fixed in respectively first boat axle with the both ends of second boat axle, a plurality of first boats groove with a plurality of second boats groove set up in first inserted sheet fender bridge group with between the second inserted sheet fender bridge group.
Furthermore, the device also comprises a third boat shaft fixed below the first boat shaft and a fourth boat shaft fixed below the second boat shaft.
Further, the hanging device also comprises hanging noses arranged at the same ends of the first boat shaft and the second boat shaft.
Further, the hanging nose is triangular.
Further, the device also comprises at least two fixed shafts for fixing the first boat shaft and the second boat shaft.
Further, the openings of the plurality of first boats and the plurality of second boats are V-shaped.
Furthermore, the quartz insert is circular, and the radius of the quartz insert is larger than that of a wafer on the quartz push-pull boat.
Further, the surface of the quartz insert is subjected to sand blasting.
Further, the third boat shaft and the fourth boat shaft are cylindrical.
Furthermore, the inserted sheet bridge is trapezoidal.
Compared with the prior art, the technical scheme of the invention has the advantages that:
the quartz push-pull boat provided by the invention uses quartz insert pieces to replace the accompanying pieces which are easy to stain and defect in the prior art, a first insert piece gear bridge group and a second insert piece gear bridge group are respectively and fixedly arranged at two ends of a first boat shaft and a second boat shaft of the quartz push-pull boat, wherein the first insert piece gear bridge group and the second insert piece gear bridge group are respectively composed of a plurality of insert piece gear bridges, a certain gap is reserved between the adjacent insert piece gear bridges for placing the quartz insert pieces, a plurality of first boat grooves and a plurality of second boat grooves are respectively and correspondingly arranged on the first boat shaft and the second boat shaft between the first insert piece gear bridge group and the second insert piece gear bridge group for bearing wafer pieces, when the wafer pieces are subjected to oxidation diffusion, the wafer pieces are placed between the quartz insert pieces at two ends of the push-pull boat, the uniformity of temperature and air flow among the wafer pieces is ensured, and the quartz insert pieces can not stain and defect for a long time in continuous operation, the cost is saved.
Drawings
The above and other features and advantages of this invention will become more apparent to those of ordinary skill in the art by describing in detail exemplary embodiments thereof with reference to the attached drawings, in which:
FIG. 1 is a front view of a quartz push-pull boat according to an embodiment of the present invention;
FIG. 2 is a top view of a quartz push-pull boat according to an embodiment of the present invention;
FIG. 3 is a left side view of a quartz push-pull boat according to an embodiment of the present invention;
fig. 4 is a schematic view of a boat slot structure of a quartz push-pull boat according to an embodiment of the present invention;
FIG. 5 is a front view of a quartz push-pull boat according to a second embodiment of the present invention;
FIG. 6 is a top view of a quartz push-pull boat according to a second embodiment of the present invention;
FIG. 7 is a front view of a quartz insert according to a second embodiment of the present invention;
FIG. 8 is a side view of a quartz insert provided in accordance with a second embodiment of the present invention;
fig. 9 is a schematic structural view of an insert plate bridge according to a second embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions of the present invention will be clearly and completely described through embodiments with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example one
Fig. 1 shows a front view of a quartz push-pull boat according to a first embodiment of the present invention, fig. 2 shows a top view of the quartz push-pull boat according to a first embodiment of the present invention, fig. 3 shows a left view of the quartz push-pull boat according to a first embodiment of the present invention, as shown in fig. 1 to fig. 3, the quartz push-pull boat includes a first boat shaft 1 and a second boat shaft 2 arranged in parallel, a connecting shaft 3 connected to both ends of the first boat shaft 1 and the second boat shaft 2, a first insert-in bridge set 4 and a second insert-in bridge set 5 spanning the first boat shaft 1 and the second boat shaft 2, the first insert-in bridge set 4 and the second insert-in bridge set 5 respectively include a plurality of insert-in bridges 6, and a quartz insert (not shown in the drawings) is disposed between adjacent insert-in bridges 6.
Referring to fig. 4 (only the boat groove structure on the first boat shaft, the second boat shaft is the same as the first boat shaft), the first boat shaft 1 is provided with a plurality of first boat grooves 7, the second boat shaft 2 is provided with a plurality of second boat grooves, the plurality of first boat grooves 7 and the plurality of second boat grooves are correspondingly arranged, and the plurality of wafers are loaded on the quartz push-pull boat through the plurality of first boat grooves 7 and the plurality of second boat grooves.
The first inserting piece gear bridge group 4 and the second inserting piece gear bridge group 5 are respectively fixed at two ends of the first boat shaft 1 and the second boat shaft 2, and the plurality of first boat grooves 7 and the plurality of second boat grooves are arranged between the first inserting piece gear bridge group 4 and the second inserting piece gear bridge group 5.
For example, the first boat shaft 1 and the second boat shaft 2 may have a cylindrical shape with the same length and the same diameter of the cross section, and the length may be 498.3mm and the diameter may be 15 mm; the connecting shaft 3 can also be cylindrical, and the diameter a of the circular section of the connecting shaft can be 15 mm; the first insert bridge group 4 can comprise 4 insert bridges 6, the second insert bridge group 5 can comprise 3 insert bridges 6, the first insert bridge group 4 can be used for placing three quartz inserts, the second insert bridge group 5 can be used for placing two inserts, the thickness b of each insert bridge 6 can be 15mm, and the interval c between every two adjacent insert bridges 6 can be 2.5 mm; correspondingly, the length d of the boat shaft distributed with the boat groove structure is 380.8 mm.
In addition, referring to fig. 3, the quartz push-pull boat further includes at least two fixing shafts 8 for fixing the first boat shaft 1 and the second boat shaft 2 so as to prevent the first boat shaft 1 and the second boat shaft 2 from being deformed by heat. Wherein, the fixed shaft 8 can be cylindrical, and the section diameter thereof can be 8 mm.
Preferably, referring to fig. 4, the openings of the first plurality of boats 7 and the second plurality of boats are formed in a V shape to prevent the wafers placed in the boats from being broken by a sharp corner at a right-angled opening during the pushing and pulling process while the V-shaped opening easily places the wafers, and illustratively, the angle α of the V-shaped opening may be 60 °, the vertical depth g of the V-shaped opening may be 0.5mm, the vertical depth e of the boat may be 3.5mm, the width f of the boat may be 0.5 ± 0.05mm, and the maximum deviation angle β of the wafers placed in the boat from the vertical direction may be 3 °.
The quartz push-pull boat provided by the embodiment of the invention uses quartz insert pieces to replace accompanying pieces which are easy to stain and damage in the prior art, a first insert piece bridge set and a second insert piece bridge set are respectively and fixedly arranged at two ends of a first boat shaft and a second boat shaft of the quartz push-pull boat, wherein the first insert piece bridge set and the second insert piece bridge set are respectively composed of a plurality of insert piece bridges, a certain gap is reserved between every two adjacent insert piece bridges for placing the quartz insert pieces, a plurality of first boat grooves and a plurality of second boat grooves are respectively and correspondingly arranged on the first boat shaft and the second boat shaft between the first insert piece bridge set and the second insert piece bridge set and are used for bearing wafer pieces, when the wafer pieces are subjected to oxidation diffusion, the wafer pieces are placed between the quartz insert pieces at two ends of the push-pull boat, the uniformity of temperature and air flow among the wafer pieces is ensured, and further the consistency of the wafer pieces in the oxidation diffusion process is ensured, and the quartz insert can not be polluted and damaged for a long time in continuous operation, so that the cost is saved.
Example two
Fig. 5 is a front view of a quartz push-pull boat according to a second embodiment of the present invention, and fig. 6 is a top view of the quartz push-pull boat according to the first embodiment of the present invention, which is different from the first embodiment of the present invention in that the present embodiment further includes a third boat shaft fixed below the first boat shaft, and a fourth boat shaft fixed below the second boat shaft. As shown in fig. 5 and 6, the quartz push-pull boat includes a first boat shaft 1 and a second boat shaft 2 arranged in parallel, a connecting shaft 3 connected to two ends of the first boat shaft 1 and the second boat shaft 2, a first insertion piece bridge set 4 and a second insertion piece bridge set 5 crossing over the first boat shaft 1 and the second boat shaft 2, a third boat shaft 9 fixed below the first boat shaft 1, and a fourth boat shaft 10 fixed below the second boat shaft 2, wherein the first insertion piece bridge set 4 and the second insertion piece bridge set 5 respectively include a plurality of insertion piece bridges 6, and quartz insertion pieces (not shown in the figures) are placed between adjacent insertion piece bridges 6.
Referring to fig. 4 (only the boat groove structure on the first boat shaft, the second boat shaft is the same as the first boat shaft), the first boat shaft 1 is provided with a plurality of first boat grooves 7, the second boat shaft 2 is provided with a plurality of second boat grooves, the plurality of first boat grooves 7 and the plurality of second boat grooves are correspondingly arranged, and the plurality of wafers are loaded on the quartz push-pull boat through the plurality of first boat grooves 7 and the plurality of second boat grooves.
The first inserting piece gear bridge group 4 and the second inserting piece gear bridge group 5 are respectively fixed at two ends of the first boat shaft 1 and the second boat shaft 2, and the plurality of first boat grooves 7 and the plurality of second boat grooves are arranged between the first inserting piece gear bridge group 4 and the second inserting piece gear bridge group 5.
The third boat shaft 9 and the fourth boat shaft 10 may be fixed below the first boat shaft 1 and the second boat shaft 2, respectively, by quartz, and the third boat shaft 9 and the fourth boat shaft 10 may have a cylindrical shape, and the length and diameter thereof may be the same as those of the first boat shaft 1. The third boat shaft 9 and the fourth boat shaft 10 which are cylindrical can be matched with the inner wall of the furnace tube, so that the quartz push-pull boat can be stably placed in the furnace tube, and meanwhile, the third boat shaft 9 and the fourth boat shaft 10 can lift the overall height of the quartz push-pull boat, so that the center of the wafer and the center of the furnace tube are at the same horizontal height, and the uniform distribution of the temperature and the airflow among the wafer pieces is facilitated.
The setting of the above structural parameters can refer to the first embodiment, and is not described herein again.
Further, the quartz push-pull boat in the embodiment further comprises a hanging nose 11 arranged at the same end of the first boat shaft 1 and the second boat shaft 2. Preferably, the hanging nose 11 is triangular, so that the push-pull rod can be hung conveniently. Wherein, the thickness h of the nose 11 at the nose tip can be 13mm, and the length i of the nose 11 along the direction of the quartz push-pull boat can be 25 mm.
Further, referring to fig. 7, the quartz insert 12 in this embodiment may be circular and have a radius larger than the radius of the wafer on the quartz push-pull boat to maintain the temperature stability around the wafer. Wherein, the radius of the quartz insert 12 can be 62.8mm, and the radius of the wafer can be 62.5 mm. Referring to FIG. 8, the thickness j of the quartz insert 12 may be 2 mm.
Preferably, the quartz insert 12 is surface-blasted to prevent contamination and to facilitate cleaning.
In addition, referring to fig. 9, in the present embodiment, the inserting piece bridge 6 may be trapezoidal (without a lower bottom), preferably isosceles trapezoidal, so that it is stably fixed on the boat shaft. Wherein, the thickness k of the upper bottom of the insert retaining bridge 6 can be 3.5mm, the height l of the insert retaining bridge 6 can be 42mm, and the included angle gamma between the two waists of the insert retaining bridge 6 and the horizontal plane can be 60 degrees.
According to the quartz push-pull boat provided by the second embodiment of the invention, the third boat shaft and the fourth boat shaft are respectively fixed below the first boat shaft and the second boat shaft, and are designed into cylinders, so that the third boat shaft and the fourth boat shaft can be matched with the inner wall of the furnace tube, the quartz push-pull boat can be stably placed in the furnace tube, meanwhile, the third boat shaft and the fourth boat shaft can lift the overall height of the quartz push-pull boat, the centers of the wafers and the center of the furnace tube are at the same horizontal height, the uniform distribution of temperature and airflow among the wafers is facilitated, and the uniformity of the wafers in the oxidation diffusion process is further ensured.
The above description is only for the purpose of illustrating specific embodiments of the present invention, and should not be construed as limiting the scope of the present invention, and all equivalent changes, modifications, or equivalent scaled-up or down made according to the design spirit of the present invention should be considered as falling within the scope of the present invention.
Claims (8)
1. A quartz push-pull boat is characterized by comprising a first boat shaft, a second boat shaft, a connecting shaft, a first inserting piece bridge set and a second inserting piece bridge set, wherein the first boat shaft and the second boat shaft are arranged in parallel, the connecting shaft is connected to two ends of the first boat shaft and the second boat shaft, and the first inserting piece bridge set and the second inserting piece bridge set stretch across the first boat shaft and the second boat shaft;
the first boat shaft is provided with a plurality of first boat grooves, the second boat shaft is provided with a plurality of second boat grooves, the first boat grooves and the second boat grooves are correspondingly arranged, and a plurality of wafers are borne on the quartz push-pull boat through the first boat grooves and the second boat grooves;
the first insert piece gear bridge group and the second insert piece gear bridge group are respectively fixed at two ends of the first boat shaft and the second boat shaft, and the plurality of first boat grooves and the plurality of second boat grooves are arranged between the first insert piece gear bridge group and the second insert piece gear bridge group;
the quartz insert is round and has a radius larger than that of a wafer on the quartz push-pull boat;
the device also comprises a third boat shaft fixed below the first boat shaft and a fourth boat shaft fixed below the second boat shaft.
2. The quartz push-pull boat according to claim 1, further comprising a hanging nose disposed at the same end of the first boat shaft and the second boat shaft.
3. The quartz push-pull boat according to claim 2, wherein the nose is triangular.
4. The quartz push-pull boat of claim 1, further comprising at least two fixed shafts for fixing the first boat shaft and the second boat shaft.
5. The quartz push-pull boat of claim 1, wherein the openings of the first plurality of boats and the second plurality of boats are V-shaped.
6. The quartz push-pull boat according to claim 1, wherein the quartz insert is surface blasted.
7. The quartz push-pull boat of claim 1, wherein the third boat shaft and the fourth boat shaft are cylindrical.
8. The quartz push-pull boat according to any one of claims 3-7, wherein the blade stopper bridge is trapezoidal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511025863.5A CN106935535B (en) | 2015-12-31 | 2015-12-31 | Quartz push-pull boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511025863.5A CN106935535B (en) | 2015-12-31 | 2015-12-31 | Quartz push-pull boat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106935535A CN106935535A (en) | 2017-07-07 |
| CN106935535B true CN106935535B (en) | 2020-06-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201511025863.5A Active CN106935535B (en) | 2015-12-31 | 2015-12-31 | Quartz push-pull boat |
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| CN (1) | CN106935535B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111785666B (en) * | 2020-07-29 | 2023-08-11 | 福建晶安光电有限公司 | Method for making wafer etching uniform and etching furnace machine |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6607381B2 (en) * | 2001-05-16 | 2003-08-19 | Mitsubishi Denki Kabushiki Kaisha | Auxiliary heat-insulating jig |
| CN202307996U (en) * | 2011-10-09 | 2012-07-04 | 梁岳 | Solar grade quartz long boat for automatically assembling, disassembling and spreading silicon wafers |
| CN202651077U (en) * | 2011-12-28 | 2013-01-02 | 无锡华润华晶微电子有限公司 | Quartz mother boat with supporting feet |
| CN203562411U (en) * | 2013-10-14 | 2014-04-23 | 浙江鸿禧光伏科技股份有限公司 | Diffusion quartz boat structure |
| CN103854977A (en) * | 2012-12-04 | 2014-06-11 | 无锡华润华晶微电子有限公司 | Stop piece boat assembly of oxidation diffusion technology for semiconductor wafer manufacturing process |
| CN104103563A (en) * | 2014-07-23 | 2014-10-15 | 济南晶博电子有限公司 | Quartz boat for silicon wafer diffusion |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6085538A (en) * | 1983-10-18 | 1985-05-15 | Nec Kansai Ltd | Manufacture of semiconductor |
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2015
- 2015-12-31 CN CN201511025863.5A patent/CN106935535B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6607381B2 (en) * | 2001-05-16 | 2003-08-19 | Mitsubishi Denki Kabushiki Kaisha | Auxiliary heat-insulating jig |
| CN202307996U (en) * | 2011-10-09 | 2012-07-04 | 梁岳 | Solar grade quartz long boat for automatically assembling, disassembling and spreading silicon wafers |
| CN202651077U (en) * | 2011-12-28 | 2013-01-02 | 无锡华润华晶微电子有限公司 | Quartz mother boat with supporting feet |
| CN103854977A (en) * | 2012-12-04 | 2014-06-11 | 无锡华润华晶微电子有限公司 | Stop piece boat assembly of oxidation diffusion technology for semiconductor wafer manufacturing process |
| CN203562411U (en) * | 2013-10-14 | 2014-04-23 | 浙江鸿禧光伏科技股份有限公司 | Diffusion quartz boat structure |
| CN104103563A (en) * | 2014-07-23 | 2014-10-15 | 济南晶博电子有限公司 | Quartz boat for silicon wafer diffusion |
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| CN106935535A (en) | 2017-07-07 |
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