CN104103563A - Quartz boat for silicon wafer diffusion - Google Patents
Quartz boat for silicon wafer diffusion Download PDFInfo
- Publication number
- CN104103563A CN104103563A CN201410350811.4A CN201410350811A CN104103563A CN 104103563 A CN104103563 A CN 104103563A CN 201410350811 A CN201410350811 A CN 201410350811A CN 104103563 A CN104103563 A CN 104103563A
- Authority
- CN
- China
- Prior art keywords
- boat
- silicon chip
- quartz
- baffle plate
- silicon wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
Abstract
The invention discloses a quartz boat for silicon wafer diffusion. The quartz boat for the silicon wafer diffusion comprises a boat rack, a baffle plate and a beam, the boat rack is rectangular, a hanging nose is arranged at one end of the boat rack, the baffle plate is fixed at the junction between the hanging nose and the boat rack, and the baffle plate is provided with a plurality of through holes; each two adjacent beams make up a group of silicon wafer seats, and the inner sides of the beams of each group of silicon wafer seats are oppositely provided with arc-shaped slots. By means of the quartz boat for the silicon wafer diffusion, silicon wafers can be transversely placed on the boat rack, the air flow is smooth, and the silicon wafer diffusion efficiency and quality are improved; silicon wafers can be placed on each two adjacent beams so that the number of the silicon wafers held by a single quartz boat is improved; through the matching between the baffle plate and the triangular hanging nose, a quartz rod is convenient to push and pull the quartz boat.
Description
Technical field
the present invention relates to the quartz boat of using in a kind of silicon chip diffusion technology.
Background technology
Silicon chip diffusion technology is that silicon chip is put into high temperature dispersing furnace, passes to the gases such as nitrogen and POCL3, after at high temperature decomposing, at silicon chip surface, forms P-N knot.The pipeline of high temperature dispersing furnace is the circular pipe of quartz material, during diffusion, first silicon chip is placed on quartz boat, then by quartz rod or Metallic rod, quartz boat is sent in pipeline and is toasted.Current quartz boat is all longitudinal arrangement silicon chip, due to gas laterally circulation in pipeline, therefore the silicon chip of longitudinal arrangement has and stops gas, affect the diffusion of silicon chip, and only there is an annulus one end of existing quartz boat, when the quartz rod with buckle or Metallic rod are pulled out quartz boat from pipeline, hook in quartz rod or Metallic rod is difficult to aim at annulus, and operation pole blindly may damage quartz boat and silicon chip.
Summary of the invention
The shortcoming existing in order to overcome above-mentioned prior art, the object of the present invention is to provide a kind of can transversely arranged silicon chip, the convenient quartz boat for silicon chip diffusion with quartz rod push-and-pull.
In order to address the above problem, the present invention is by the following technical solutions: a kind of quartz boat for silicon chip diffusion, it is characterized in that, comprise boat frame, baffle plate and crossbeam, described boat frame is rectangle, in its one end, be provided with hanging nose, described baffle plate is fixed on hanging nose and boat frame intersection, is provided with some through holes on baffle plate; Every two adjacent described crossbeams are one group of silicon chip seat, in the crossbeam inner side of each group silicon chip seat, are relatively set with arc-shaped slot.
Further, in the bottom of the rear and front end of described boat frame, be provided with support, the arc of the bottom of described support for matching with the pipeline of high temperature dispersing furnace.
Preferably, described hanging nose is triangle.
The invention has the beneficial effects as follows: silicon chip can laterally be placed on boat frame, guarantee gas circulate, improved silicon chip diffuser efficiency and quality; In every two adjacent beams, can place silicon chip, improve the quantity that single quartz boat holds silicon chip; By coordinating of baffle plate and triangle hanging nose, facilitate the push-and-pull operation of quartz rod to quartz boat.
Accompanying drawing explanation
below in conjunction with drawings and Examples, the present invention is described further:
Fig. 1 is vertical view of the present invention;
Fig. 2 is left view of the present invention;
Fig. 3 is front view of the present invention;
Fig. 4 is along the cutaway view of A-A in Fig. 1.
In figure, 1 boat frame, 11 hanging noses, 12 supports, 2 baffle plates, 21 through holes, 3 crossbeams, 31 arc-shaped slots, 4 silicon chip seats.
Embodiment
below in conjunction with accompanying drawing, the present invention is described in further details:
As shown in Figures 1 to 4, specific embodiments of the invention comprise boat frame 1, baffle plate 2 and crossbeam 3.
Described boat frame 1 is rectangle, in its one end, is provided with hanging nose 11, and described baffle plate 2 is fixed on hanging nose 11 and boat frame 1 intersection, is provided with some through holes 21 on baffle plate 2, and the effect of through hole 21 is to guarantee that the gas in the pipeline of high temperature dispersing furnace is smooth.Certainly, the two ends of boat frame 1 all can arrange a hanging nose 11 and baffle plate 2.Preferably, described hanging nose 11 is designed to triangle, and like this, the hook on quartz rod can catch on hanging nose 11 easily.The effect of baffle plate 2 both can prevent that quartz rod from encountering silicon chip when hook is got quartz boat, and silicon chip is touched off, and also can block quartz rod, and it is just in time fallen in hanging nose 11.
Every two adjacent described crossbeams 3 are one group of silicon chip seat 4, in crossbeam 3 inner sides of each group silicon chip seat 4, are relatively set with arc-shaped slot 31, after circular silicon chip is placed on silicon chip seat 4, just in time snap in the arc-shaped slot 31 of crossbeam 3 of the left and right sides.As shown in Figure 1, the arc-shaped slot 31 of crossbeam 3 left and right sides is that interval arranges, and can utilize to greatest extent like this space of crossbeam, makes three crossbeams 3 can form two groups of silicon chip seats 4, makes to place on quartz boat more silicon chip.
In order to guarantee that the air-flow in pipeline can pass through from the both sides up and down of quartz boat, bottom in the rear and front end of described boat frame 1 is provided with support 12, the arc of the bottom of described support 12 for matching with the pipeline of high temperature dispersing furnace, the bottom of arc can guarantee firm being placed in pipeline of quartz boat.In addition, add upper bracket 12 and also have another effects: when the smaller silicon chip of diameter is placed on silicon chip seat 4, if there is no support 12, the bottom of silicon chip may with tube contacts, cause silicon chip built on the sand, even topple over.
The above is the preferred embodiment of the present invention, for those skilled in the art, under the premise without departing from the principles of the invention, can also make some improvements and modifications, and these improvements and modifications are also regarded as protection scope of the present invention.
Claims (3)
1. for a quartz boat for silicon chip diffusion, it is characterized in that, comprise boat frame, baffle plate and crossbeam, described boat frame is rectangle, in its one end, is provided with hanging nose, and described baffle plate is fixed on hanging nose and boat frame intersection, is provided with some through holes on baffle plate; Every two adjacent described crossbeams are one group of silicon chip seat, in the crossbeam inner side of each group silicon chip seat, are relatively set with arc-shaped slot.
2. the quartz boat for silicon chip diffusion according to claim 1, is characterized in that, in the bottom of the rear and front end of described boat frame, is provided with support, the arc of the bottom of described support for matching with the pipeline of high temperature dispersing furnace.
3. the quartz boat for silicon chip diffusion according to claim 1, is characterized in that, described hanging nose is triangle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410350811.4A CN104103563A (en) | 2014-07-23 | 2014-07-23 | Quartz boat for silicon wafer diffusion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410350811.4A CN104103563A (en) | 2014-07-23 | 2014-07-23 | Quartz boat for silicon wafer diffusion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104103563A true CN104103563A (en) | 2014-10-15 |
Family
ID=51671592
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410350811.4A Pending CN104103563A (en) | 2014-07-23 | 2014-07-23 | Quartz boat for silicon wafer diffusion |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104103563A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106935535A (en) * | 2015-12-31 | 2017-07-07 | 无锡华润华晶微电子有限公司 | A kind of quartzy push-and-pull boat |
| CN112497114A (en) * | 2020-12-17 | 2021-03-16 | 苏州博莱特石英有限公司 | Quartz bearing device |
-
2014
- 2014-07-23 CN CN201410350811.4A patent/CN104103563A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106935535A (en) * | 2015-12-31 | 2017-07-07 | 无锡华润华晶微电子有限公司 | A kind of quartzy push-and-pull boat |
| CN106935535B (en) * | 2015-12-31 | 2020-06-19 | 无锡华润华晶微电子有限公司 | Quartz push-pull boat |
| CN112497114A (en) * | 2020-12-17 | 2021-03-16 | 苏州博莱特石英有限公司 | Quartz bearing device |
| CN112497114B (en) * | 2020-12-17 | 2022-07-19 | 苏州博莱特石英有限公司 | Quartz bearing device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20141015 |
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| WD01 | Invention patent application deemed withdrawn after publication |