CN112497114B - Quartz bearing device - Google Patents
Quartz bearing device Download PDFInfo
- Publication number
- CN112497114B CN112497114B CN202011496428.1A CN202011496428A CN112497114B CN 112497114 B CN112497114 B CN 112497114B CN 202011496428 A CN202011496428 A CN 202011496428A CN 112497114 B CN112497114 B CN 112497114B
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- Prior art keywords
- quartz
- groove
- transverse
- rods
- quartz rod
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
Abstract
The invention discloses a quartz bearing device, which comprises two supporting plates and a plurality of quartz rods, wherein a transverse through groove is formed in each supporting plate, each transverse through groove comprises a top wall and a bottom wall, a plurality of lower clamping grooves are formed in each bottom wall, lower rubber damping sheets are arranged in the lower clamping grooves, a pressing plate is arranged in each transverse through groove, a plurality of upper clamping grooves are formed in the bottom of each pressing plate, upper rubber damping sheets are arranged in the upper clamping grooves, compression springs are connected between the top walls and the pressing plates, the end parts of the quartz rods are inserted into the transverse through grooves, and the end parts of the quartz rods are clamped between the corresponding upper rubber damping sheets and the corresponding lower rubber damping sheets; be equipped with a plurality of groups of electron sheet locating component on the quartz rod, a plurality of groups of electron sheet locating component along the circumference equipartition of quartz rod, every group electron sheet locating component includes a plurality of locating pieces, forms the electron sheet constant head tank between two adjacent locating pieces, and the groove width diverse of electron sheet constant head tank among a plurality of groups of electron sheet locating component. The invention relates to a quartz bearing device which can bear electronic sheets with different sizes and specifications.
Description
Technical Field
The invention relates to a quartz bearing device.
Background
The quartz material has good physical and chemical stability, and is widely applied to the manufacture of various high-temperature resistant and corrosion resistant appliances in the semiconductor manufacturing and processing industry. The quartz bearing device in the prior art is customized according to the size of the electronic sheet to be borne, the customized quartz bearing device can only adapt to the electronic sheet of one specification, and when the specifications of the electronic sheets are different, the quartz bearing device needs to be replaced to bear the electronic sheet, so that the cost is increased.
Disclosure of Invention
The invention aims to provide a quartz bearing device which is reasonable in structure and can bear electronic sheets with different dimensions, so that the practicability of the quartz bearing device is improved.
In order to achieve the above purpose, the technical solution of the present invention is to design a quartz carrying device, which includes two supporting plates, and a plurality of quartz rods connected between the two supporting plates, where the plurality of quartz rods form a support area for accommodating an electronic sheet between the two supporting plates; the supporting plate is provided with a transverse through groove for inserting the quartz rod, the transverse through groove comprises a top wall and a bottom wall, the bottom wall is provided with a plurality of lower clamping grooves, each lower clamping groove is arc-shaped, and arc-shaped lower rubber damping fins are arranged in each lower clamping groove, a pressing plate is arranged in each transverse through groove, the bottom of the pressure plate is provided with a plurality of upper clamping grooves which are in one-to-one correspondence with the lower clamping grooves, each upper clamping groove is arc-shaped, and each upper clamping groove is positioned right above the corresponding lower clamping groove, an arc-shaped upper rubber damping sheet is arranged in each upper clamping groove, two spring mounting holes are arranged on the top wall, a compression spring is arranged in each spring mounting hole, the compression spring is vertically arranged, the lower end of the compression spring penetrates through the opening of the spring mounting hole and is fixedly connected with the pressure plate, the end part of the quartz rod is inserted into the transverse through groove, and the end part of the quartz rod is clamped between the corresponding upper rubber damping sheet and the corresponding lower rubber damping sheet; be equipped with a plurality of groups electronic sheet locating component on the quartz rod, this a plurality of groups electronic sheet locating component is along quartz rod's circumference equipartition, every group electronic sheet locating component includes a plurality of locating piece, and this a plurality of locating piece is equidistant along quartz rod's axial arranges, adjacent two form the electronic sheet constant head tank between the locating piece, and a plurality of groups the groove width diverse of electronic sheet constant head tank among the electronic sheet locating component.
Preferably, the end of the quartz rod extends in the axial direction to form a rotating head located outside the support plate.
Preferably, the outer wall of the quartz rod extends along the radial direction to form a limit stop ring positioned at the inner side of the support plate.
Preferably, the number of the electronic sheet positioning components on the quartz rod is four.
Preferably, the number of the quartz rods is three, the three quartz rods are respectively a bottom support quartz rod and two side support quartz rods, and the two side support quartz rods are respectively located at two sides above the bottom support quartz rod.
Preferably, the plurality of lower clamping grooves are arranged at equal intervals in the transverse direction.
The invention has the advantages and beneficial effects that: the quartz bearing device is reasonable in structure and capable of bearing electronic sheets with different sizes, and therefore practicability of the quartz bearing device is improved.
When the electronic sheet positioning device is used, the edge of the electronic sheet is inserted into the electronic sheet positioning grooves of the three quartz rods so as to position the electronic sheet; the electronic sheets with different lengths can be borne by adjusting the distance between the two side supporting quartz rods, the side supporting quartz rods are lifted upwards by overcoming the elasticity of the compression spring during adjustment, so that the side supporting quartz rods are separated from the lower clamping groove, then the side supporting quartz rods are moved transversely to fall into the lower clamping groove at a proper position, the rear pressing plate is moved downwards under the elasticity of the compression spring, and the side supporting quartz rods are clamped and fixed between the upper rubber damping sheet and the lower rubber damping sheet; likewise, the position of the bottom supporting quartz rod can be adjusted, so that the bottom supporting quartz rod can better support the electronic sheet. In addition, the electronic sheets with different thicknesses can be borne by rotating the quartz rods; specifically, the quartz rods are driven to rotate by rotating the rotating head, so that a proper electronic sheet positioning assembly is selected for use, the groove width of an electronic sheet positioning groove in the selected electronic sheet positioning assembly is matched with the thickness of an electronic sheet, the groove widths of electronic sheet positioning grooves in the electronic sheet positioning assemblies used by the three quartz rods are consistent, and after the operation is finished, the edge of the electronic sheet can be inserted into the electronic sheet positioning groove of each quartz rod; and the end part of the quartz rod is clamped between the upper rubber damping sheet and the lower rubber damping sheet, and the upper rubber damping sheet and the lower rubber damping sheet can realize the damping effect on the rotation of the quartz rod, so that the quartz rod can be kept relatively fixed at any rotation angle, and the quartz rod which rotates in place is prevented from rotating automatically.
Drawings
FIG. 1 is a first schematic diagram of the present invention.
FIG. 2 is a second schematic diagram of the present invention.
Detailed Description
The following description of the embodiments of the present invention will be made with reference to the accompanying drawings. The following examples are only for illustrating the technical solutions of the present invention more clearly, and the protection scope of the present invention is not limited thereby.
The technical scheme of the specific implementation of the invention is as follows:
as shown in fig. 1 and 2, a quartz carrier device comprises two support plates 1, and a plurality of quartz rods connected between the two support plates 1, wherein the plurality of quartz rods form a support area for accommodating electronic sheets between the two support plates 1; the quartz rod supporting structure is characterized in that a transverse through groove 2 for inserting a quartz rod is arranged on the supporting plate 1, the transverse through groove 2 comprises a top wall 3 and a bottom wall 4, a plurality of lower clamping grooves are arranged on the bottom wall 4, each lower clamping groove is arc-shaped, a lower rubber damping sheet 5 which is arc-shaped is arranged in each lower clamping groove, a pressing plate 6 is arranged in the transverse through groove 2, a plurality of upper clamping grooves which are in one-to-one correspondence with the lower clamping grooves are arranged at the bottom of the pressing plate 6, each upper clamping groove is arc-shaped and is positioned right above the corresponding lower clamping groove, upper rubber damping sheets 7 which are arc-shaped are arranged in the upper clamping grooves, two spring mounting holes are arranged on the top wall 3, compression springs 8 are arranged in the spring mounting holes, the compression springs 8 are vertically arranged, the lower ends of the compression springs 8 penetrate through openings of the spring mounting holes and are fixedly connected with the pressing plate 6, the end portions of the quartz rod are inserted into the transverse through groove 2, and the end part of the quartz rod is clamped between the corresponding upper rubber damping sheet 7 and the lower rubber damping sheet 5; be equipped with a plurality of groups electron sheet locating component on the quartz rod, this a plurality of groups electron sheet locating component is along quartz rod's circumference equipartition, every group electron sheet locating component includes a plurality of locating piece 9, and this a plurality of locating piece 9 is arranged along quartz rod's axial equidistant, adjacent two form electron sheet constant head tank 10 between the locating piece 9, and a plurality of groups the groove width diverse of electron sheet constant head tank 10 among the electron sheet locating component.
The end of the quartz rod extends in the axial direction to form a rotating head 11 located outside the support plate 1.
The outer wall of the quartz rod extends radially to form a limit stop ring 12 located inside the support plate 1.
The number of the electronic sheet positioning assemblies on the quartz rod is four.
The number of the quartz rods is three, the three quartz rods are respectively a bottom supporting quartz rod 13 and two side supporting quartz rods 14, and the two side supporting quartz rods 14 are respectively positioned at two sides above the bottom supporting quartz rod 13.
The lower clamping grooves are arranged at equal intervals along the transverse direction.
The invention has the advantages and beneficial effects that: the quartz bearing device is reasonable in structure and capable of bearing electronic sheets with different sizes, and therefore practicability of the quartz bearing device is improved.
When the electronic sheet positioning device is used, the edge of an electronic sheet is inserted into the electronic sheet positioning grooves 10 of the three quartz rods so as to position the electronic sheet; moreover, the electronic sheets with different lengths can be loaded by adjusting the distance between the two side supporting quartz rods 14, when the electronic sheets are adjusted, the side supporting quartz rods 14 are lifted upwards against the elastic force of the compression spring 8, so that the side supporting quartz rods 14 are separated from the lower clamping groove, then the side supporting quartz rods 14 are moved transversely, the side supporting quartz rods 14 fall into the lower clamping groove at a proper position, the rear pressing plate 6 moves downwards under the elastic force of the compression spring 8, and the side supporting quartz rods 14 are clamped and fixed between the upper rubber damping sheet 7 and the lower rubber damping sheet 5; likewise, the position of the bottom support quartz rod 13 can be adjusted to make the bottom support quartz rod 13 better support the electronic sheet. In addition, the electronic sheets with different thicknesses can be borne by rotating the quartz rods; specifically, the quartz rods are driven to rotate by rotating the rotating head 11, so that a proper electronic sheet positioning assembly is selected for use, the groove width of an electronic sheet positioning groove 10 in the selected electronic sheet positioning assembly is matched with the thickness of an electronic sheet, the groove widths of the electronic sheet positioning grooves 10 in the electronic sheet positioning assemblies used by the three quartz rods are consistent, and after the completion, the edges of the electronic sheet can be inserted into the electronic sheet positioning grooves 10 of the quartz rods; moreover, the end part of the quartz rod is clamped between the upper rubber damping sheet 7 and the lower rubber damping sheet 5, and the upper rubber damping sheet 7 and the lower rubber damping sheet 5 can realize the damping effect on the rotation of the quartz rod, so that the quartz rod can be kept relatively fixed at any rotation angle, and the quartz rod which rotates in place is prevented from rotating automatically.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the technical principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (1)
1. A quartz bearing device comprises two supporting plates and a plurality of quartz rods connected between the two supporting plates, wherein a support area for accommodating electronic sheets is formed between the two supporting plates by the plurality of quartz rods, the quartz bearing device is characterized in that a transverse through groove for the quartz rods to insert is formed in each supporting plate, each transverse through groove comprises a top wall and a bottom wall, a plurality of lower clamping grooves are formed in the bottom wall, each lower clamping groove is arc-shaped, a lower rubber damping sheet in arc shape is arranged in each lower clamping groove, a pressing plate is arranged in each transverse through groove, a plurality of upper clamping grooves corresponding to the lower clamping grooves one by one are arranged at the bottom of the pressing plate, each upper clamping groove is arc-shaped and is positioned right above the corresponding lower clamping groove, an upper rubber damping sheet in arc shape is arranged in each upper clamping groove, two spring mounting holes are formed in the top wall, and a compression spring is arranged in each spring mounting hole, the compression spring is vertically arranged, the lower end of the compression spring penetrates through the opening of the spring mounting hole and is fixedly connected with the pressing plate, the end part of the quartz rod is inserted into the transverse through groove, and the end part of the quartz rod is clamped between the corresponding upper rubber damping sheet and the lower rubber damping sheet; the quartz rod is provided with a plurality of groups of electronic sheet positioning components which are uniformly distributed along the circumferential direction of the quartz rod, each group of electronic sheet positioning components comprises a plurality of positioning blocks which are arranged at equal intervals along the axial direction of the quartz rod, an electronic sheet positioning groove is formed between every two adjacent positioning blocks, and the groove widths of the electronic sheet positioning grooves in the plurality of groups of electronic sheet positioning components are different;
the end part of the quartz rod extends along the axial direction to form a rotating head positioned outside the supporting plate;
the outer wall of the quartz rod extends along the radial direction to form a limiting baffle ring positioned on the inner side of the supporting plate;
the number of the electronic sheet positioning assemblies on the quartz rod is four;
the number of the quartz rods is three, the three quartz rods are respectively a bottom supporting quartz rod and two side supporting quartz rods, and the two side supporting quartz rods are respectively positioned at two sides above the bottom supporting quartz rod;
the plurality of lower clamping grooves are arranged at equal intervals along the transverse direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011496428.1A CN112497114B (en) | 2020-12-17 | 2020-12-17 | Quartz bearing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011496428.1A CN112497114B (en) | 2020-12-17 | 2020-12-17 | Quartz bearing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112497114A CN112497114A (en) | 2021-03-16 |
| CN112497114B true CN112497114B (en) | 2022-07-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011496428.1A Active CN112497114B (en) | 2020-12-17 | 2020-12-17 | Quartz bearing device |
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| Country | Link |
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| CN (1) | CN112497114B (en) |
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| US3949891A (en) * | 1974-07-22 | 1976-04-13 | Micro Glass Inc. | Semiconductor wafer transfer device |
| EP0228973A1 (en) * | 1986-01-06 | 1987-07-15 | CENTRE STEPHANOIS DE RECHERCHES MECANIQUES HYDROMECANIQUE ET FROTTEMENT Société anonyme | Process and means for seizing and conveying silicon wafers |
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| CN104103563A (en) * | 2014-07-23 | 2014-10-15 | 济南晶博电子有限公司 | Quartz boat for silicon wafer diffusion |
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| DE102019212796A1 (en) * | 2018-09-06 | 2020-03-12 | centrotherm international AG | Wafer boat |
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| US4261465A (en) * | 1979-08-29 | 1981-04-14 | C. R. Daniels, Inc. | Tote box for carrying different length circuit boards |
| US7249682B2 (en) * | 2002-12-10 | 2007-07-31 | 1546300 Ontario Limited | Compact clamping cartridge for panel-type products |
| US9284211B2 (en) * | 2013-08-08 | 2016-03-15 | Corning Incorporated | Methods of post processing a glass sheet |
| CN203818012U (en) * | 2013-12-27 | 2014-09-10 | 惠州市寰达光电显示科技有限公司 | Touch screen defoaming clamp |
| CN106829215B (en) * | 2017-03-01 | 2018-10-23 | 合肥鑫晟光电科技有限公司 | Panel storage device and its control method |
| CN211276785U (en) * | 2019-11-06 | 2020-08-18 | 陕西柯瑞达环保科技有限公司 | Pipeline cutting device that water and electricity installation engineering used |
| CN211469229U (en) * | 2020-01-14 | 2020-09-11 | 饶淑花 | Glass strorage device |
| CN111453980A (en) * | 2020-04-07 | 2020-07-28 | 东莞市微玻智能科技有限公司 | A semi-manufactured goods support frame for glass processing |
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2020
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Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3949891A (en) * | 1974-07-22 | 1976-04-13 | Micro Glass Inc. | Semiconductor wafer transfer device |
| EP0228973A1 (en) * | 1986-01-06 | 1987-07-15 | CENTRE STEPHANOIS DE RECHERCHES MECANIQUES HYDROMECANIQUE ET FROTTEMENT Société anonyme | Process and means for seizing and conveying silicon wafers |
| CN102655108A (en) * | 2011-02-28 | 2012-09-05 | 株式会社日立国际电气 | Attachment for substrates having different diameters, substrate processing apparatus, and method of manufacturing substrate or semiconductor device |
| CN104103563A (en) * | 2014-07-23 | 2014-10-15 | 济南晶博电子有限公司 | Quartz boat for silicon wafer diffusion |
| CN206976304U (en) * | 2017-04-12 | 2018-02-06 | 西安黄河光伏科技股份有限公司 | A kind of quartz boat for the diffusion of crystal silicon solar energy battery tubular type |
| CN207747014U (en) * | 2017-12-29 | 2018-08-21 | 铜陵群力机械有限公司 | A kind of pipeline making support device |
| DE102019212796A1 (en) * | 2018-09-06 | 2020-03-12 | centrotherm international AG | Wafer boat |
| CN209199893U (en) * | 2018-12-19 | 2019-08-02 | 吉林麦吉柯半导体有限公司 | A kind of silicon chip clamping device and silicon wafer rewinder |
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| Publication number | Publication date |
|---|---|
| CN112497114A (en) | 2021-03-16 |
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