CN204029781U - For the quartz boat of silicon chip diffusion - Google Patents
For the quartz boat of silicon chip diffusion Download PDFInfo
- Publication number
- CN204029781U CN204029781U CN201420406587.1U CN201420406587U CN204029781U CN 204029781 U CN204029781 U CN 204029781U CN 201420406587 U CN201420406587 U CN 201420406587U CN 204029781 U CN204029781 U CN 204029781U
- Authority
- CN
- China
- Prior art keywords
- silicon chip
- boat
- baffle plate
- quartz
- quartz boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
For a quartz boat for silicon chip diffusion, it is characterized in that, comprise boat frame, baffle plate and crossbeam, described boat frame is rectangle, and its one end is provided with hanging nose, and described baffle plate is fixed on hanging nose and boat frame intersection, baffle plate is provided with some through holes; Every two adjacent described crossbeams are one group of silicon chip seat, are relatively set with arc-shaped slot at the cross rail inner of each group silicon chip seat.The utility model can make silicon chip laterally be placed on boat frame, ensures gas circulate, improves silicon chip diffuser efficiency and quality; Every two adjacent beams can place silicon chip, improve the quantity that single quartz boat holds silicon chip; By coordinating of baffle plate and triangle hanging nose, quartz rod is facilitated to operate the push-and-pull of quartz boat.
Description
Technical field
the utility model relates to the quartz boat in a kind of silicon chip diffusion technology.
Background technology
Silicon chip diffusion technology is that silicon chip is put into high temperature dispersing furnace, passes to the gas such as nitrogen and POCL3, forms P-N knot after at high temperature decomposing at silicon chip surface.The pipeline of high temperature dispersing furnace is the circular pipe of quartz material, during diffusion, is first placed on quartz boat by silicon chip, then to be sent in pipeline by quartz boat by quartz rod or Metallic rod and toasts.Current quartz boat is all longitudinal arrangement silicon chip, because gas laterally circulates in the duct, therefore the silicon chip of longitudinal arrangement has stop to gas, affect the diffusion of silicon chip, and only there is an annulus one end of existing quartz boat, when quartz boat being pulled out from pipeline by the quartz rod of buckle or Metallic rod, hook in quartz rod or Metallic rod is difficult to aim at annulus, and operation pole blindly may damage quartz boat and silicon chip.
Utility model content
In order to overcome the shortcoming that above-mentioned prior art exists, the purpose of this utility model is to provide one can transversely arranged silicon chip, the convenient quartz boat for silicon chip diffusion with quartz rod push-and-pull.
In order to solve the problem, the utility model is by the following technical solutions: a kind of quartz boat for silicon chip diffusion, it is characterized in that, comprise boat frame, baffle plate and crossbeam, described boat frame is rectangle, its one end is provided with hanging nose, and described baffle plate is fixed on hanging nose and boat frame intersection, baffle plate is provided with some through holes; Every two adjacent described crossbeams are one group of silicon chip seat, are relatively set with arc-shaped slot at the cross rail inner of each group silicon chip seat.
Further, the bottom of the rear and front end of described boat frame is provided with support, the bottom of described support is the arc matched with the pipeline of high temperature dispersing furnace.
Preferably, described hanging nose is triangle.
The beneficial effects of the utility model are: silicon chip can laterally be placed on boat frame, ensure gas circulate, improve silicon chip diffuser efficiency and quality; Every two adjacent beams can place silicon chip, improve the quantity that single quartz boat holds silicon chip; By coordinating of baffle plate and triangle hanging nose, quartz rod is facilitated to operate the push-and-pull of quartz boat.
Accompanying drawing explanation
below in conjunction with drawings and Examples, the utility model is described further:
Fig. 1 is vertical view of the present utility model;
Fig. 2 is left view of the present utility model;
Fig. 3 is front view of the present utility model;
Fig. 4 is the cutaway view along A-A in Fig. 1.
In figure, 1 boat frame, 11 hanging noses, 12 supports, 2 baffle plates, 21 through holes, 3 crossbeams, 31 arc-shaped slots, 4 silicon chip seats.
Embodiment
below in conjunction with accompanying drawing, the utility model is described in further details:
As shown in Figures 1 to 4, specific embodiment of the utility model comprises boat frame 1, baffle plate 2 and crossbeam 3.
Described boat frame 1 is rectangle, and its one end is provided with hanging nose 11, and described baffle plate 2 is fixed on hanging nose 11 and boat frame 1 intersection, baffle plate 2 is provided with some through holes 21, and the effect of through hole 21 is that the gas ensured in the pipeline of high temperature dispersing furnace is smooth.Certainly, the two ends of boat frame 1 all can arrange a hanging nose 11 and baffle plate 2.Preferably, described hanging nose 11 is designed to triangle, and like this, the hook on quartz rod can catch on hanging nose 11 easily.The effect of baffle plate 2 both can prevent quartz rod from encountering silicon chip when hook gets quartz boat, was touched off by silicon chip, also can block quartz rod, make it just in time fall in hanging nose 11.
Every two adjacent described crossbeams 3 are one group of silicon chip seat 4, be relatively set with arc-shaped slot 31, when circular silicon chip is placed on after on silicon chip seat 4, just in time snap in the arc-shaped slot 31 of the crossbeam 3 of the left and right sides inside the crossbeam 3 of each group silicon chip seat 4.As shown in Figure 1, the arc-shaped slot 31 of crossbeam 3 left and right sides is arranged for interval, can utilize the space of crossbeam so to greatest extent, make three crossbeams 3 can form two groups of silicon chip seats 4, make quartz boat to be placed more silicon chip.
In order to ensure that the air-flow in pipeline can pass through from the both sides up and down of quartz boat, the bottom of the rear and front end of described boat frame 1 is provided with support 12, the bottom of described support 12 is the arc matched with the pipeline of high temperature dispersing furnace, and the bottom of arc can ensure firm being placed in pipeline of quartz boat.In addition, add upper bracket 12 and also have another to act on: when the silicon chip that diameter is smaller is placed on silicon chip seat 4, if there is no support 12, the bottom of silicon chip may with tube contacts, cause silicon chip built on the sand, even topple over.
The above is preferred implementation of the present utility model; for those skilled in the art; under the prerequisite not departing from the utility model principle, can also make some improvements and modifications, these improvements and modifications are also regarded as protection range of the present utility model.
Claims (3)
1., for a quartz boat for silicon chip diffusion, it is characterized in that, comprise boat frame, baffle plate and crossbeam, described boat frame is rectangle, and its one end is provided with hanging nose, and described baffle plate is fixed on hanging nose and boat frame intersection, baffle plate is provided with some through holes; Every two adjacent described crossbeams are one group of silicon chip seat, are relatively set with arc-shaped slot at the cross rail inner of each group silicon chip seat.
2. the quartz boat for silicon chip diffusion according to claim 1, it is characterized in that, the bottom of the rear and front end of described boat frame is provided with support, the bottom of described support is the arc matched with the pipeline of high temperature dispersing furnace.
3. the quartz boat for silicon chip diffusion according to claim 1, it is characterized in that, described hanging nose is triangle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420406587.1U CN204029781U (en) | 2014-07-23 | 2014-07-23 | For the quartz boat of silicon chip diffusion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420406587.1U CN204029781U (en) | 2014-07-23 | 2014-07-23 | For the quartz boat of silicon chip diffusion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204029781U true CN204029781U (en) | 2014-12-17 |
Family
ID=52069612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420406587.1U Expired - Fee Related CN204029781U (en) | 2014-07-23 | 2014-07-23 | For the quartz boat of silicon chip diffusion |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204029781U (en) |
-
2014
- 2014-07-23 CN CN201420406587.1U patent/CN204029781U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20141217 Termination date: 20160723 |