CN117615980A - Floating platform of display panel - Google Patents

Floating platform of display panel Download PDF

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Publication number
CN117615980A
CN117615980A CN202280048515.1A CN202280048515A CN117615980A CN 117615980 A CN117615980 A CN 117615980A CN 202280048515 A CN202280048515 A CN 202280048515A CN 117615980 A CN117615980 A CN 117615980A
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CN
China
Prior art keywords
vacuum
pressure
holes
air supply
display panel
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Pending
Application number
CN202280048515.1A
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Chinese (zh)
Inventor
黄熙珍
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Individual
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Individual
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Publication of CN117615980A publication Critical patent/CN117615980A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The invention relates to a display panel floating device, which comprises: the upper plate, in order to make the display panel float steadily, form a plurality of air supply holes and vacuum holes alternately; a pressure maintaining plate for stably maintaining the air supply pressure sprayed through the air supply holes on the upper plate and the vacuum pressure sucked through the vacuum holes, so as to form a plurality of pressure maintaining holes communicating with the air supply holes and the vacuum holes; a first lower plate fixed to a bottom surface of the pressure maintaining plate in order to supply vacuum pressure to the respective vacuum holes; a second lower plate fixed to a bottom surface of the first lower plate in order to supply air supply pressure to the respective air supply holes; and a plurality of manifolds fixed to a bottom surface of the second lower plate, and formed side by side with a vacuum supply flow path communicating with the first lower plate and a gas supply flow path communicating with the second lower plate.

Description

Floating platform of display panel
Technical Field
The present invention relates to a floating platform for a display panel, and more particularly, to a floating platform for a display panel, which can prevent a display panel from being stably floating without shaking by preventing a change in vacuum pressure and air supply pressure at a portion having resistance and a portion having no resistance in the floating display panel, and can stably maintain flatness of the display panel by spraying only air supply pressure without vacuum pressure on both sides of the display panel where sinking occurs.
Background
In general, in a flat panel display device used in a Television (TV), a display, a mobile phone, and the like, a grid pattern is formed over a transparent glass panel, a backlight is disposed on the rear side thereof, a liquid crystal is disposed between the two, and a color filter is disposed in front of the glass panel.
The liquid crystal may block or pass light of a specific location by means of an electric signal applied to the grid pattern, and the display panel device in this way is called a "light emitting diode (liquid crystal display panel)". Instead of liquid crystals, organic substances that emit light themselves upon receiving an electrical signal, and thus do not require a backlight, may also be used, and the display panel device in this manner is called an "Organic Light Emitting Diode (OLED)".
In order to manufacture the flat panel display device (FPD) as described above, it is necessary to undergo a plurality of processes, and in the process as described above, it is necessary to repeatedly move and inspect the glass panel. The method of moving the glass panel is also different depending on the process characteristics, and a Roller (Roller), an indexer (Index) or a robot arm may be used in the case of simple movement (Transfer), but since the process requires precise conveyance in inspection, non-contact conveyance is generally used, and in the non-contact conveyance apparatus, air pressure and a floating platform are included.
As several characteristics to be provided for the floating platform, it is necessary to flow out a small amount of air as much as possible in a state of having a proper pressure, and to suck the flowed out air without obstruction.
In recent years, with the increase in the size of display panels and the corresponding increase in precision, the requirements for the precision of panel transfer have become higher and higher.
If the glass panel is swayed when moving, the image entering the camera is degraded, so that the defect inspection quality is reduced.
That is, when the up-and-down shake of the panel occurs, the subject, i.e., the glass panel, may come out of focus of the lens, so that a satisfactory inspection image may not be obtained and thus a problem of a decrease in inspection capability may result.
Wherein, the floating platform is most closely related to the up-and-down shaking degree when the glass panel moves. When the amount of air flowing out through the floating platform is unstable or the air flow is not smooth, the glass panel is caused to shake.
The problem that arises as described above is the pressure and volume change between the floating platform and the glass panel.
Therefore, it is important to maintain proper pressure and minimize the amount of air while ensuring smooth air discharge from the floating platform.
The proper pressure means that the pressure has a resistance to the extent that the glass panel is prevented from contacting the floating platform. At lower pressures, transfer precision will increase, but the likelihood of contact with the floating platform will increase, while at higher pressures, although the likelihood of contact will decrease, floating stability will decrease.
In addition, when the pressure is too high, deformation of the floating platform may be induced for a long period of time in some designs. Therefore, maintaining proper pressure by performing adequate analysis of the glass panel and inspection precision and process is critical.
In addition, even in a state where the pressure is appropriate, if the air flow rate is large, there is a possibility that the turbulence increases during the air injection, and the glass panel may shake. Further, since a large amount of air cannot be discharged as soon as possible, a local air stagnation phenomenon occurs, resulting in a change in the interval between the glass panel and the floating platform. The phenomenon as described above also causes a decrease in stability of the floating, and thus it is difficult to obtain a good quality inspection image.
In order to reduce the air flow, it is necessary to provide a resistance body. The resistance body can simultaneously play the roles of forming pressure and adjusting air. Therefore, the resistance body is said to be the most important technical element in the floating platform.
Further, even when an appropriate pressure is formed and the air flow rate is small, the glass panel cannot be stably conveyed when suction is not possible.
When designing the floating platform, the portion that is normally ignored is the suction portion. The importance of inspiration is not inferior to the resistance.
Even if a small amount of air is discharged, it is accumulated on the floating platform after a certain time has elapsed. If suction is not possible, the glass panel will move in a state of being bent into an umbrella shape, and it will be difficult to obtain a high-quality inspection image. Therefore, it is necessary to ensure a flow path through which air flowing out from the bottom of the floating platform can be quickly sucked.
Disclosure of Invention
Technical problem
The present invention has been made to solve the above-mentioned conventional problems, and a first object of the present invention is to provide a display panel floating platform which can prevent a vacuum pressure and a gas supply pressure from being changed at a portion having resistance and a portion having no resistance in a floating display panel, thereby stabilizing the floating display panel without shaking.
A second object of the present invention is to provide a display panel floating platform capable of separating a pressure maintaining hole formed in a pressure maintaining plate into a pressure maintaining chamber and a passage having an inner diameter smaller than that of the pressure maintaining chamber, and eccentrically communicating the passage into the pressure maintaining chamber, thereby stably maintaining a supply pressure and a vacuum pressure under a vortex or a volume increase generated in the pressure maintaining chamber.
A third object of the present invention is to provide a display panel floating platform capable of stably maintaining flatness of a display panel by jetting only air supply pressure without vacuum pressure on both sides of the display panel where sinking occurs.
Problem solution
In order to achieve the above object, a first invention is characterized in that: relates to a display panel floating platform, including: the upper plate, in order to make the display panel float steadily, form a plurality of air supply holes and vacuum holes alternately; a pressure maintaining plate for stably maintaining the air supply pressure sprayed through the air supply holes on the upper plate and the vacuum pressure sucked through the vacuum holes, so as to form a plurality of pressure maintaining holes communicating with the air supply holes and the vacuum holes; a first lower plate fixed to a bottom surface of the pressure maintaining plate in order to supply vacuum pressure to the respective vacuum holes; a second lower plate fixed to a bottom surface of the first lower plate in order to supply air supply pressure to the respective air supply holes; and a plurality of manifolds fixed to a bottom surface of the second lower plate, and formed side by side with a vacuum supply flow path communicating with the first lower plate and a gas supply flow path communicating with the second lower plate.
The second invention is characterized in that: in the first aspect of the invention, vacuum lines are formed in the first lower plate at regular intervals in parallel, and first branch lines communicating with the vacuum holes are formed in a plurality of branches in a tree-like manner on both sides in the longitudinal direction of each of the vacuum lines.
The third invention is characterized in that: in the first aspect of the invention, the second lower plate is provided with air supply lines which are fixed to the bottom surface of the first lower plate at regular intervals so as to supply air supply pressure to the air supply holes, and second branch lines which communicate with the air supply holes by forming a plurality of branches in a tree-like shape on both sides in the longitudinal direction of each air supply line.
The fourth invention is characterized in that: in the first aspect of the invention, the pressure maintaining hole is formed by a pressure maintaining chamber formed in a lower portion and a passage eccentrically communicating to an upper portion of the pressure maintaining chamber, and the passage is formed with a relatively smaller inner diameter than the pressure maintaining chamber.
The fifth invention is characterized in that: in the fourth aspect of the invention, the passages formed in the pressure maintaining holes of the pressure maintaining plates are formed eccentrically to the left or right, so that the passages and eccentric positions of the stacked pressure maintaining plates are arranged in a zigzag manner.
The sixth invention is characterized in that: in the fourth aspect of the present invention, the pressure maintaining hole communicating with the vacuum hole is formed to have no passage and include only a single pressure maintaining chamber.
The seventh invention is characterized in that: in the first aspect of the invention, the upper plate is arranged such that only the air supply holes are arranged at a predetermined interval along the row of the lateral lines on both sides, and no vacuum holes are arranged.
Effects of the invention
The floating platform of the display panel can prevent the vacuum pressure and the air supply pressure on the part with resistance and the part without resistance in the floating display panel from changing, thereby leading the display panel to float stably without shaking.
Further, only the air supply pressure can be sprayed without vacuum pressure on both sides of the display panel where sinking occurs, thereby stably maintaining the flatness of the display panel.
In addition, the pressure maintaining hole formed in the pressure maintaining plate may be separated into a pressure maintaining chamber and a passage having an inner diameter smaller than that of the pressure maintaining chamber, and the passage may be eccentrically connected to the pressure maintaining chamber, thereby stably maintaining the air supply pressure and the vacuum pressure under the vortex or volume increase occurring in the pressure maintaining chamber.
Drawings
Fig. 1 is an oblique view of a floating platform of a display panel according to the present invention.
Fig. 2 is a bottom perspective view of fig. 1.
Fig. 3 is an exploded perspective view of fig. 1.
Fig. 4 is a cross-sectional view illustrating the pressure maintenance plate taken from fig. 3.
Fig. 5 is a plan view illustrating the first lower plate extracted from fig. 3.
Fig. 6 is a plan view illustrating the second lower plate taken from fig. 3.
Fig. 7 is an oblique view illustrating the manifold taken from fig. 3.
Fig. 8 is a projection view illustrating a bottom surface of a floating platform of a display panel according to the present invention.
Fig. 9 is a sectional view illustrating a section of a floating platform of a display panel according to the present invention.
Fig. 10 is a photograph illustrating a lower plate of another embodiment.
Detailed Description
Next, the floating platform for a display panel according to the present invention will be described in detail with reference to the accompanying drawings.
Fig. 1 is an oblique view of a display panel floating platform according to the present invention, fig. 2 is an oblique view of a bottom surface of fig. 1, fig. 3 is an exploded oblique view of fig. 1, fig. 4 is a sectional view illustrating a pressure maintaining plate extracted from fig. 3, fig. 5 is a plan view illustrating a first lower plate extracted from fig. 3, fig. 6 is a plan view illustrating a second lower plate extracted from fig. 3, fig. 7 is an oblique view illustrating a manifold extracted from fig. 3, fig. 8 is a projected view illustrating a bottom surface of a display panel floating platform according to the present invention, and fig. 9 is a sectional view illustrating a section of a display panel floating platform according to the present invention.
As shown in fig. 1 to 9, the present invention relates to a display panel floating platform 100 which can prevent a vacuum pressure and a gas supply pressure from varying at a portion having resistance and a portion having no resistance in a floating display panel, thereby stably floating the display panel without shaking, and can stably maintain the flatness of the display panel 200 by spraying only the gas supply pressure without vacuum pressure on both sides of the display panel where sinking occurs.
The display panel floating platform 100 of the present invention as described above is generally composed of 5 parts, i.e., the upper plate 10, the pressure maintaining plate 20, the first lower plate 30, the second lower plate 40, and the manifold 50 are integrally coupled to each other by bolts.
As shown in fig. 1, the upper plate 10 is configured such that a plurality of air supply holes 11 and vacuum holes 12 are alternately formed so that the display panel 200 can stably float upward.
The air supply holes 11 and the vacuum holes 12 are arranged in a grid pattern in the embodiment, but may be arranged in a fixed pattern.
At this time, the air supply pressure generated in the air supply hole 11 should be relatively greater than the vacuum pressure generated in the vacuum hole 12 first, so as to ensure that the display panel 200 can float upward.
The pressure maintaining plate 20 is fixed to the bottom surface of the upper plate 10 by means of bolt bonding.
As shown in fig. 4, the pressure maintaining plate 20 has a structure in which a plurality of pressure maintaining holes 21 communicating with the respective air supply holes 11 and the vacuum holes 12 are formed in order to stably maintain the air supply pressure injected from the air supply holes 11 of the upper plate 10 and the vacuum pressure sucked from the vacuum holes 12.
The pressure maintaining hole 21 of the pressure maintaining plate 20 is formed with a pressure maintaining chamber 211 formed at a lower portion thereof and a passage 212 eccentrically communicating with an upper portion of the pressure maintaining chamber 211. At this time, the passage 212 is formed with a relatively smaller inner diameter than the pressure maintaining chamber 211.
The pressure maintaining hole 21 connected to the air supply hole 11 may function as a so-called resistance body that forms a vortex in the air supplied through the pressure maintaining chamber 211 and thereby reduces the pressure thereof.
Further, the passage 212 formed eccentrically to the pressure maintaining chamber 211 may function to reduce the flow rate of air at which the pressure is reduced.
The inner diameters of the pressure maintaining chamber 211 and the passage 212 may be changed according to the size and weight of the display panel 200.
Further, the pressure maintaining hole 21 connected to the vacuum hole 12 may prevent the vacuum pressure from rising by a pressure maintaining chamber, and the passage 212 may adjust the suction amount to be the same as the supply amount.
As shown in fig. 4 and 9, the pressure maintaining plate 20 is formed by at least two or more overlapped plates in order to stably maintain the air supply pressure and the vacuum pressure, and in the present invention, three pressure maintaining plates 20 are overlapped.
The pressure maintaining plate 20 may change the number of overlaps according to the required vacuum pressure and air supply pressure.
The passages 212 formed in the pressure maintaining holes 21 of the respective pressure maintaining plates 20 are formed eccentrically to the left or right, so that the passages 212 and eccentric positions of the stacked pressure maintaining plates 20 are arranged in a zigzag shape.
Thereby, the air discharged through the air supply hole 11 can stably maintain the air supply amount and the air supply pressure during the passage through the pressure maintaining holes 21 of the plurality of stages.
The air sucked through the vacuum holes 12 can also stably maintain the vacuum pressure and the suction amount during the process of passing through the pressure maintaining holes 21 of the plurality of stages.
As shown in fig. 4, in any of the pressure maintaining plates 20, the pressure maintaining holes 21 communicating with the vacuum holes 12 may be formed to include only a single pressure maintaining chamber 211 without the passage 212. The above-described structure is intended to generate a larger resistance to vacuum pressure, thereby expanding the volume of air sucked by vacuum and thereby maintaining the balance of the air supply amount and the suction amount.
Wherein, in order to increase the amount of air sucked, the inner diameter of the passage 212 of the pressure maintaining hole 21 communicating with the vacuum hole 12 may be relatively larger than the passage 212 of the pressure maintaining hole 21 communicating with the air supply hole 11 (as shown in fig. 4).
Accordingly, the upper plate 10 can prevent the vacuum pressure and the air supply pressure from being changed at the resistive portion and the non-resistive portion of the display panel 200, so that the display panel 200 stably floats up without shaking.
The passage 212 of the pressure maintaining hole 21 of the pressure maintaining plate 20 disposed on the bottom surface of the upper plate 10 is connected to the air supply hole 11 or the vacuum hole 12 to supply air or suck air, and the pressure maintaining chamber 211 is overlapped on the lower part or is communicated with the passage 212 of the pressure maintaining plate 20.
The pressure maintaining holes 21 of the pressure maintaining plate 20 disposed at the lowermost layer are configured to independently receive the supply pressure for the supply air and the vacuum pressure supply for the suction through communication with the first lower plate 30 and the second lower plate 40, respectively.
As shown in fig. 5, the first lower plate 30 is fixed to the bottom surface of the pressure maintaining plate 20 by sucking air through the vacuum holes 12 by negative pressure, and has a structure in which vacuum flow paths 31 are formed in parallel at a predetermined interval, and a plurality of branched first branch pipes 311 are formed in a tree shape on both sides of the vacuum flow paths 31 in the longitudinal direction.
The first branch pipes 311 may be individually connected to the pressure maintaining chamber 211 of the pressure maintaining plate 20 communicating with the vacuum holes 12, and thus may suck air by means of negative pressure.
A plurality of first connection pipes 312 independent of the first branch pipes 311 are formed in each vacuum flow path 31 of the first lower plate 30, and a first through hole 313 for receiving vacuum pressure is also formed in the first connection pipes 312.
At this time, as shown in fig. 6, the first through hole 313 is formed so as to extend to the second lower plate 40, thereby supplying the suction pressure for suction without interference of the second lower plate 40.
As shown in fig. 6, the second lower plate 40 is fixed to the bottom surface of the first lower plate 30 to supply air to the air supply holes 11, and includes air supply channels 41 formed in parallel at a predetermined interval, and second branch pipes 411 formed in a plurality of branches in a tree shape on both sides of the air supply channels 41 in the longitudinal direction.
The second branch pipes 411 may be individually connected to the pressure maintaining chamber 211 communicating with the air supply hole 11, and may be configured to supply air for supplying air.
Specifically, a plurality of second connection lines 412 independent of the second branch lines 411 are formed in each vacuum flow path 41 of the second lower plate 40, and a second through hole 413 for receiving the supply air pressure is also formed in the second connection lines 412.
The manifold 50 may be combined with one or more, and as shown in fig. 7, is fixed to the bottom surface of the second lower plate 40, and is formed with a supply air flow path 51 and a vacuum supply flow path 52 which are respectively communicated with the supply air flow path 41 of the first lower plate 30 and the vacuum flow path 31 of the second lower plate 40, side by side.
In which, as shown in fig. 8, the air supply line 51 may communicate with a second through hole 413 formed at each of the second connection lines 412 of the second base plate 40, thereby functioning to supply air supply pressure to each of the air supply lines 41.
Further, the vacuum supply lines 52 may communicate with first through holes 313 formed at the respective first connection lines 312 of the first lower plate 30, thereby functioning to supply vacuum pressure to the respective vacuum lines 31.
Further, a gas supply terminal hole 511 communicating with the gas supply line 51 and a vacuum terminal hole 521 communicating with the vacuum supply line 52 are also included in the bottom surface of the manifold 50.
At this time, a socket block 60 for connecting the vacuum hose 61 and the air supply hose 62 may be coupled to the vacuum terminal hole 521 and the air supply terminal hole 511 of the manifold 50.
In addition, the display panel floating platform 100 of the present invention can generate only the air supply pressure without vacuum pressure at both sides of the display panel 200 where sinking occurs, thereby maintaining the flatness of the display panel 200.
For this, as shown in fig. 1, the upper plate 10 is provided with only air supply holes 11 and no vacuum holes 12 at a certain interval along a row of lateral lines on both sides.
The air supply lines 41 disposed on both sides of the air supply line 41 of the second lower plate 40 are configured such that the auxiliary air supply line 42 without the second branch line 411 communicates with the respective air supply holes 11.
On the auxiliary air supply line 42 of the second lower plate 40 as described above, a third through hole 421 for receiving the air supply may be formed.
Further, an auxiliary supply line 53 for separately supplying air to the two auxiliary air supply lines 42 may be formed on the manifold 50.
Also, two auxiliary terminal holes 531 communicating with the auxiliary supply line 53 are formed at the upper side of the manifold 50, and auxiliary insertion hole blocks 70 for separately supplying the air supply pressure are respectively coupled to the two auxiliary terminal holes 531.
Thereby, the air supply holes 11 disposed along a row of the horizontal lines at both sides of the upper plate 10 can maintain the flatness of the display panel 200 by separately supplying air supply pressure, and can also function as a guide grid for linearly transferring the display panel 200 according to the size of the display panel 200.
The air supply and suction paths of the floating platform of the display panel according to the present invention as described above are as follows.
Next, description will be made with reference to fig. 8 and 9.
Inspiration: a vacuum tank (not shown) → an insertion hole block manifold (vacuum terminal hole→ supply flow path) → a first lower plate (first connection flow path→first through hole→first branch pipe-vacuum pipe) → a pressure maintaining plate (pressure maintaining hole (pressure maintaining chamber→passage))→an upper plate (vacuum hole)
And (3) air supply: a compression tank (not shown) → an insertion hole block manifold (gas supply terminal hole→ gas supply flow path) → a second lower plate (second connection flow path→second through hole→second branch line-gas supply line) → a pressure maintaining plate (pressure maintaining hole (pressure maintaining chamber→passage))→an upper plate (gas supply hole)
And (3) air supply of the outline edge of the upper plate: compression tank (not shown) → auxiliary insertion hole block → manifold (auxiliary terminal hole→ auxiliary supply line) → second lower plate (third through hole→ auxiliary supply line) → pressure maintenance plate (pressure maintenance hole (pressure maintenance chamber→passage)) → upper plate (supply hole)
Further, fig. 10 is a photograph illustrating a lower plate of another embodiment.
As shown in fig. 10, grooves 121 extending along the traveling direction of the display panel 200 may be formed in the respective vacuum holes 12 of the upper plate 10.
In the case where the end of the display panel 200 is bent, scratches may occur on the display panel or the upper plate 10 due to friction with the surface of the upper plate 10 at the position of the vacuum holes 12, and the respective grooves 121 may function to prevent the phenomenon as described above by slowing down the formation of vacuum pressure.
As described above, the floating platform for display panel of the present invention may be used in, for example, inspection instruments, logistics, special process devices, chemical liquid coating machines (coaters), and measuring instruments, depending on the purpose thereof.
In addition, as the gas used in the present invention, nitrogen may be used in addition to air, and liquids such as distilled water may be used.
Further, although the upper plate has a structure in which only the air supply holes are formed at both sides thereof in one row, it is also possible to make it function as the vacuum holes by supplying the vacuum pressure, or selectively supply the air supply pressure or the vacuum pressure to the air supply holes by connecting the vacuum hose or the air supply hose to the auxiliary insertion hole.
The embodiment described in the present specification and the configuration illustrated in the drawings are only a preferred embodiment of the present invention, and do not represent all the technical ideas of the present invention, and other equivalents and modifications may be possible at the time point of filing the present application.

Claims (7)

1. A display panel floating device, comprising:
the upper plate, in order to make the display panel float steadily, form a plurality of air supply holes and vacuum holes alternately;
a pressure maintaining plate for stably maintaining the air supply pressure sprayed through the air supply holes on the upper plate and the vacuum pressure sucked through the vacuum holes, so as to form a plurality of pressure maintaining holes communicating with the air supply holes and the vacuum holes;
a first lower plate fixed to a bottom surface of the pressure maintaining plate in order to supply vacuum pressure to the respective vacuum holes;
a second lower plate fixed to a bottom surface of the first lower plate in order to supply air supply pressure to the respective air supply holes; the method comprises the steps of,
a plurality of manifolds fixed to the bottom surface of the second lower plate, and formed side by side with a vacuum supply flow path communicating with the first lower plate and a gas supply flow path communicating with the second lower plate.
2. The display panel floating platform of claim 1, wherein:
the first lower plate is provided with vacuum pipes formed in parallel at a certain interval, and first branch pipes which are formed in a tree-like shape at two sides of the length direction of each vacuum pipe and communicated with the vacuum holes.
3. The display panel floating platform of claim 1, wherein:
the second lower plate is formed with air supply lines which are fixed to the bottom surface of the first lower plate and are arranged at a predetermined interval in order to supply air supply pressure to the air supply holes, and second branch lines which are formed in a tree-like shape on both sides of the respective air supply lines in the longitudinal direction and communicate with the air supply holes.
4. The display panel floating platform of claim 1, wherein:
the pressure maintaining hole is formed by a pressure maintaining chamber formed at a lower portion and a passage eccentrically communicating to an upper portion of the pressure maintaining chamber, the passage being formed at a relatively smaller inner diameter than the pressure maintaining chamber.
5. The display panel floating platform according to claim 4, wherein:
the passages formed in the pressure maintaining holes of the respective pressure maintaining plates are eccentrically formed to the left or right so that the passages and eccentric positions of the stacked pressure maintaining plates are arranged in a zigzag shape.
6. The display panel floating platform according to claim 4, wherein:
in one of the pressure maintaining plates, the pressure maintaining hole communicating with the vacuum hole is formed in a form including only a single pressure maintaining chamber without the passage.
7. The display panel floating platform of claim 1, wherein:
grooves extending in the traveling direction of the display panel are also formed in each of the vacuum holes of the upper plate.
CN202280048515.1A 2021-11-17 2022-10-19 Floating platform of display panel Pending CN117615980A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR10-2021-0158173 2021-11-17
KR1020210158173A KR102396254B1 (en) 2021-11-17 2021-11-17 Display panel floating stage
PCT/KR2022/015924 WO2023090657A1 (en) 2021-11-17 2022-10-19 Display panel floating stage

Publications (1)

Publication Number Publication Date
CN117615980A true CN117615980A (en) 2024-02-27

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Application Number Title Priority Date Filing Date
CN202280048515.1A Pending CN117615980A (en) 2021-11-17 2022-10-19 Floating platform of display panel

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CN (1) CN117615980A (en)
WO (1) WO2023090657A1 (en)

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Publication number Priority date Publication date Assignee Title
KR102396254B1 (en) * 2021-11-17 2022-05-09 황희진 Display panel floating stage

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KR100829413B1 (en) * 2006-09-27 2008-05-15 주식회사 에스에프에이 Printer
JP5998086B2 (en) * 2012-04-03 2016-09-28 オイレス工業株式会社 Air plate for levitation
JP6226419B2 (en) * 2013-08-22 2017-11-08 オイレス工業株式会社 Levitation transfer device
KR101517992B1 (en) 2013-12-20 2015-05-06 한국기계연구원 Floating plate being used for substrate floating apparatus
US10513011B2 (en) * 2017-11-08 2019-12-24 Core Flow Ltd. Layered noncontact support platform
KR102396254B1 (en) * 2021-11-17 2022-05-09 황희진 Display panel floating stage

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