CN103041940A - Apparatus for jetting fluid - Google Patents
Apparatus for jetting fluid Download PDFInfo
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- CN103041940A CN103041940A CN2012104136340A CN201210413634A CN103041940A CN 103041940 A CN103041940 A CN 103041940A CN 2012104136340 A CN2012104136340 A CN 2012104136340A CN 201210413634 A CN201210413634 A CN 201210413634A CN 103041940 A CN103041940 A CN 103041940A
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Abstract
Provided is an apparatus, comprising a fluid supply port for supplying fluid; an entrance connecting to the fluid supply port to receive the fluid; a first buffering part connecting to the entrance; two or at least two connecting passages in communication with the first buffering part; a second buffering part in communication with the connecting passages and an exit connecting to the second buffering part to provide the fluid to a substrate.
Description
Require priority
The present invention requires to apply for the 2011-0104523 korean patent application on October 13rd, 2011 and the priority that applies for the 2011-0130789 korean patent application on December 8th, 2011 according to 35U.S.C. § 119, by the mode that quotes in full its content is incorporated in this.
Technical field
Embodiments of the invention relate to fluid ejection apparatus.Embodiments of the invention relate in particular to the fluid ejection apparatus that can prevent the fluid division.
Technical background
Flat panel display equipment generally comprises liquid crystal display (LCD) with liquid crystal, utilizes the plasma display equipment of plasma and have OLED (OLED) of organic light-emitting structure etc.
In the panel display apparatus, liquid crystal display is used widely in multiple electric device and electronic installation owing to having the advantage such as low in energy consumption, lightweight, that operating voltage is low.Liquid crystal display generally includes the display floater that utilizes liquid crystal to show image.This type of display floater generally obtains by forming circuit structure at the larger area glass substrate.In making the process of display floater, can repeat deposition process, light processing, development treatment, and the multiple cell processing such as etch processes to form multiple circuit structure at glass substrate.
Glass substrate has been carried out usually can carrying out cleaning to the substrate with circuit structure after the cell processing.Can remove dust, organic granular and/or the impurity that is attached to substrate by cleaning.Cleaning can comprise the cleaning step that uses cleaning solution, described cleaning solution contains deionized water or the chemical substance that is useful on dust, organic granular and/or the impurity of removing substrate, cleaning also can comprise drying steps, and its jet drying gas (for example air) is to remove residual cleaning material on substrate or the circuit structure.
As for cleaning, generally can use fluid ejection apparatus that the fluid of cleaning solution or dry gas and so on is provided to substrate.Fluid ejection apparatus can comprise that the fluid that will comprise cleaning solution or dry gas is provided to on-chip nozzle.Like this, nozzle can be connected to fluid storage tank by connecting path, and the fluid through connecting path in the fluid storage tank can be by nozzle ejection to substrate.Yet when foreign matter or particle were arranged in the connecting path, flowing of fluid may be interfered in the connecting path, thereby the fluid that causes being present in the nozzle divides.Therefore, although whole substrate has been carried out cleaning, and may fluid not provided certain part to substrate, so that the display screen production declining also can cause the circuit structure fault.
Summary of the invention
Illustrative examples of the present invention provides a kind of fluid ejection apparatus, and it is by preventing from the fluid of nozzle ejection the efficient that division two improves cleaning occuring.
According to illustrative examples, provide a kind of fluid ejection apparatus.Described fluid ejection apparatus comprises be used to the fluid supply port that fluid is provided; Be connected to described fluid supply port to receive the entrance of described fluid; Be connected to the first buffer part of described entrance; Article two, the connecting path that is communicated with described the first buffer part more than; The second buffer part that is communicated with described connecting path; And be connected to described the second buffer part so that described fluid is provided to on-chip outlet.
In the illustrative examples, described connecting path is provided for respectively the fluid passage of described fluid, and described fluid passage has respectively substantially the same or close size.
In the illustrative examples, described connecting path comprises the first connecting path of narrow slit shape basically and the second connecting path of narrow slit shape basically, and described outlet is narrow slit shape basically.The second width sum of the first width of described the first connecting path and described the second connecting path is basically greater than the width of described outlet, and described the first width and described the second width are separately basically less than the width of described outlet.For example, the first width of described the first connecting path and the second width of described the second connecting path approximately 0.15mm that respectively does for oneself, and the width of described outlet is about 0.2mm.
In the illustrative examples, described the first buffer part and described the second buffer part respectively comprise a plurality of stop parts.For example described the first buffer part comprises basically mutually the first stop part and second stop part of correspondence, and described the second buffer part comprises basically the 3rd stop part and the 4th stop part of mutual correspondence.
In the illustrative examples, described the first buffer part comprises the partition wall of a plurality of directions along described Fluid Flow in A.Described partition wall prevents that described fluid edge is mobile perpendicular to the direction of the direction of described Fluid Flow in A.
According to illustrative examples, a kind of fluid ejection apparatus is provided, it comprises be used to the fluid supply port that fluid is provided; Be connected to described fluid supply port to receive the entrance of described fluid; Be connected to the first buffer part of described entrance; Be communicated with described the first buffer part first on connecting path on the connecting path and second; The second buffer part that is communicated with connecting path on described first and second; First time connecting path and second time connecting path of being communicated with described the second buffer part; The 3rd buffer part that is communicated with described first and second times connecting paths; And be connected to described the 3rd buffer part so that described fluid is provided to on-chip outlet.
In the illustrative examples, respectively do for oneself basically narrow slit shape of connecting path on first and second, respectively do for oneself basically narrow slit shape of first and second times connecting paths wherein, and described outlet is narrow slit shape basically.
In the illustrative examples, the second width sum of connecting path is basically greater than the 4th width sum of the 3rd width and described second time connecting path of described first time connecting path on the first width of connecting path and described second on described first, and described the 3rd width and described the 4th width sum are basically greater than the width of described outlet.On described first on the first width of connecting path and described second the second width of connecting path substantially the same or close, the 3rd width of described first time connecting path is substantially the same or close with the 4th width of described second time connecting path.For example, described the first width and described the second width approximately 0.2mm that respectively does for oneself, described the 3rd width and described the 4th width approximately 0.15mm that respectively does for oneself, and the width of described outlet is about 0.2mm.
In the illustrative examples, described the first buffer part, described the second buffer part, and described the 3rd buffer part comprise separately the stop part of a pair of mutual correspondence.
In the illustrative examples, described in the first buffer part, described the second buffer part, and described the 3rd buffer part in a partition wall that comprises a plurality of directions along described Fluid Flow in A.Described partition wall prevents that described fluid edge is mobile perpendicular to the direction of the direction of described Fluid Flow in A.
In the fluid ejection apparatus that has according to the said structure of illustrative examples, many connecting path can spray a fluid into on-chip outlet is connected to be provided fluid for from the fluid supply port towards outlet entrance with being used for, and described fluid supply port can be supplied to entrance with fluids such as cleaning solution, rinsing liquid, air.Like this, described many connecting paths can be made as various structures, such as the multi-channel structure between the entrance and exit or multilevel hierarchy.If foreign matter or particle are present in wherein in the connecting path, then this foreign matter or particle can't arrive outlet, and fluid can flow by other connecting paths fully, thereby can effectively prevent from the division of outlet fluid out.Therefore, the operational stability of fluid ejection apparatus is promoted, and uses the productive rate of the processing of this device to be increased.In addition, when many connecting paths are set to multilevel hierarchy, for example, connecting path and many lower connecting paths on many are set in fluid ejection apparatus, the multistage connecting path with different cross section can hinder foreign matter and/or particle according to the size of foreign matter and/or particle.Simultaneously, when many connecting paths are set to multi-channel structure, for example, the first connecting path, the second connecting path are set in fluid ejection apparatus, reach the 3rd connecting path, can advantageously control by the cross section that reduces connecting path fluid pressure, fluid flow, reach fluid velocity.
Description of drawings
With reference to the accompanying drawings, can more clearly understand above-mentioned its other features of the present invention by describing specific embodiment of the present invention, wherein:
Fig. 1 is the plane that illustrates according to the fluid ejection apparatus of the embodiment of the invention;
Fig. 2 is the cutaway view along the I-II line of Fig. 1 of fluid ejection apparatus;
Fig. 3 illustrates the first connecting path of fluid ejection apparatus of Fig. 2 and the amplification view of the second connecting path;
Fig. 4 is the cutaway view that illustrates according to the fluid ejection apparatus of some illustrative examples;
Fig. 5 is the cutaway view that illustrates according to the fluid ejection apparatus of other illustrative examples.
The specific embodiment
Referring to the accompanying drawing that embodiment is shown, hereinafter various embodiment will be described in more detail.Yet the present invention can be with many multi-form realizations, and should not be construed as the restriction of the embodiment that is subjected in this proposition.On the contrary, it is abundant and complete open in order to reach proposing these embodiment, and makes those skilled in the art understand scope of the present invention fully.In these accompanying drawings, for clarity sake, may amplify size and the relative size in layer and zone.
Should understand, when with element or the layer be called another element or the layer " on ", " being connected to " or " being coupled to " another element or the layer in, it can be directly on another element or layer, directly connect or be coupled to other element or layer, perhaps has the element or the layer that occupy therebetween.In contrast, when element being called in " directly on another element or layer ", " being connected directly to " or " coupling directly to " another element or the layer, there are not the element that occupy therebetween or layer.Close label represents close element in the whole part of specification.As used herein, term " and/or " comprise any or all combination of the Listed Items that one or more is relevant.
Although should be understood that herein and explain to describe a plurality of elements, assembly, zone, layer and/or part with first, second, third, fourth grade, these elements, assembly, zone, layer and/or part are not subjected to the restriction of these terms.These terms only are used for making an element, assembly, zone, layer or part and another zone, layer or part difference to come.Thus, hereinafter be referred to as the first element, assembly, zone, layer or part and also can be described as the second element, assembly, zone, layer or part, and do not break away from instruction of the present invention.
With the statement of space correlation, as " ... under ", " in ... below ", D score, " ... on ", " on " etc., using in this article is for easily statement element as shown in the figure or the relation of parts and another element or parts.Should be understood that the statement of these and space correlation except orientation shown in the figure, also be intended to contain this equipment use or work in different azimuth.For example, if the upset of this equipment among the figure, be described as other element or parts " below " or " under " equipment then can be defined as other element or parts " on ".Thus, this exemplary statement " ... the below " can contain simultaneously " ... the top " with " ... the below " both.This equipment can be other towards (90-degree rotation or other towards), and corresponding explanation is also done in the statement of these and space correlation used herein.
Statement used herein only is used for describing specific embodiment, and and is not intended to limit the present invention.As described herein, the article of singulative is intended to comprise plural form, unless its context is expressed.Will also be understood that, in this specification, use in the statement " comprising ", offered some clarification on and had described parts, integral body, step, operation, element and/or assembly, do not existed or be attached with one or more other parts, integral body, step, operation, element, assembly and/or their combination but do not get rid of.
For embodiments of the invention, be to describe with reference to the schematic sectional view of idealized embodiment of the present invention (and intermediate structure) herein.Like this, expection for example can produce because of manufacturing process and/or tolerance and cause in shape variation.Thus, embodiments of the invention should not be construed as it is constrained to specific region shown in this article shape, also should comprise the form variations that for example causes because of manufacturing.For example, the implantation zone that is shown rectangle generally has and forms circular or curved part, and/or the gradient of its edge's implant concentration is not to be to change to the non-binary of implanting the zone from implanting the zone.Similarly, by implant some implantation that the zone can form of imbedding that form in imbedding the zone that occurs between zone and the surface to implant.Thus, the essence in the zone shown in the figure is schematically, and its shape and be not intended to illustrate the true form of component area, also is not intended to limit scope of the present invention.
Unless describe in detail separately, the meaning of employed all terms of this paper (comprising scientific and technical terminology) is consistent with those skilled in the art institute common understanding.Should also be understood that such as defined term in the general dictionary should be interpreted as with correlative technology field in aggregatio mentium, and should not be construed as Utopian or excessive mechanical implication, unless clearly definition is arranged in the text in addition.
Hereinafter describe the present invention in detail with reference to accompanying drawing.
Fig. 1 is the plane that illustrates according to the fluid ejection apparatus of the embodiment of the invention.Fig. 2 is the cutaway view along the I-II line of Fig. 1 of fluid ejection apparatus.
With reference to figure 1 and Fig. 2, fluid ejection apparatus 100 can provide the fluid of knife-edge basically to the substrate 10 that is used for flat panel display equipment.In the illustrative examples, by in making the process of flat panel display equipment, can be in first direction D1 mobile substrate 10, fluid is provided on the substrate 10 and whole substrate 10 is carried out the predetermined process that cleaning or rinsing are processed and so on.For example, fluid ejection apparatus 100 can be provided to cleaning solution or rinsing liquid on the substrate 10 in predetermined process.
In predetermined process, can transmit substrate 10 along first direction D1 by a plurality of transmission rollers 20.In the example embodiment, can utilize a plurality of transfer roller 20 to be predetermined angular ground and support base 10, described predetermined angular is for becoming tiltangleθ with respect to the second direction D2 that is substantially perpendicular to first direction D1, so that provide the fluid to the substrate 10 easily to move down from substrate 10.For example, can with respect to second direction D2 be approximately 5 °～approximately substrate 10 is transmitted along first direction D1 in the inclination angle of 10 ° of scopes.
Fluid ejection apparatus 100 can extend along the direction that is arranged essentially parallel to substrate 10.In the illustrative examples, fluid ejection apparatus 100 can extend along the third direction D3 that is substantially perpendicular to first direction D1.Herein, third direction D3 tiltable angle can be with respect to second direction D2 and is approximately 5 °～about 10 ° of scopes.
In the illustrative examples, fluid ejection apparatus 100 can comprise top panel 110, lower panel 120, fluid supply port 150 etc.Because top panel 110 and lower panel 120 are capable of being combined, but below inlet porting 130 between plate 120 and the top panel 110, the first buffer part 132, the first connecting path 136, the second connecting path 137, the second buffer part 134, and export 138.According to illustrative examples, entrance 130 can be narrow slit shape basically, and so that fluid is provided to substrate 10, and the first buffer part 132 can be connected to entrance 130.For example, the first buffer part 132 can be flute profile basically.The first connecting path 136 and the second connecting path 137 can be communicated with the first buffer part 132 respectively, and the second buffer part 134 also is communicated with the first connecting path 136 and the second connecting path 137 fluids.Outlet 138 can be from the second buffer part 134 to substrate 10 be supplied with fluids.For example, the outlet 138 narrow slit shapes that also can be basically.
In the illustrative examples, the upper surface of lower panel 120 can form with the lower surface of top panel 110 and contact, so that form predetermined space between lower panel 120 and the top panel 110.Entrance 130, the first buffer part 132 and the second buffer part 134, the first connecting path 136 and the second connecting path 137, and outlet 138 can be located in this space.
In some illustrative examples, the second stop part 161 can be set additionally in the first buffer part 132.Like this, the first stop part 160 can be positioned on the lower panel 120 and the second stop part 161 can be positioned under the second panel 110.The first stop part 160 can be outstanding and enter space between lower panel 120 and the top panel 110 from lower panel 120.In addition, the second stop part 161 also can be from top panel 110 outstanding this spaces that enter.The first stop part 160 can be basically corresponding with the second stop part 161.For example, the first buffer part 132 can comprise a plurality of basically mutual corresponding stop parts.When the first buffer part 132 arranged according to the combination of lower panel 110 and top panel 120, the first stop part 160 can be basically towards the second stop part 161, so that fluid can be flowed through between the first stop part 160 and the second stop part 161 from entrance 130.Herein, the size of the first stop part 160 measure-alike or close with the second stop part 161 basically.
In the illustrative examples, the first connecting path 136 can be communicated with the first buffer part 132.For example, the first connecting path 136 can extend along second direction D2, and can be narrow slit shape basically.The second buffer part 134 can be communicated with the first connecting path fluid 136.Can have the 3rd stop part 162 to be arranged in the second buffer part 134, and fluid can pass the 3rd stop part 162 in the second buffer part 134.Therefore, can equably fluid be provided to substrate 10.
In some illustrative examples, can be provided with extraly basically four stop part 163 corresponding with the 3rd stop part 162 in the second buffer part 134.That is, the second buffer part 134 can comprise a plurality of basically mutual corresponding stop parts.The 3rd stop part 162 can be positioned on the lower panel 120 and the 4th stop part 163 can be positioned under the top panel 110.The 3rd stop part 162 can enter from lower panel 120 protrusions the space between lower panel 120 and the top panel 110.In addition, the 4th stop part 163 also can protrude from top panel 110 and enter this space.In the situation that provide the second buffer part 134, the three stop parts 162 can be basically towards the 4th stop part 163, so that fluid can flow between the 3rd stop part 162 and the 4th stop part 163 with top panel 110 combinations lower panel 120.Herein, the size of the 3rd stop part 162 measure-alike or close with the 4th stop part 163 basically.In other illustrative examples, the first stop part～the 4th stop part 160,161,162,163 size are all substantially the same or close.Yet the first stop part～the 4th stop part 160,161,162,163 size can change according to fluid type, plant bulk, treatment conditions etc.
The second connecting path 137 can be between the first buffer part 132 and the second buffer part 134, and the first buffer part 132 can be connected to the second buffer part 134.In the illustrative examples, the second connecting path 137 can comprise and the fluid passage of the first connecting path 136 second fluid path independently.For example, the first connecting path 136 can link to each other with the bottom of the first buffer part 132 and the second buffer part 134, and the second connecting path 137 can link to each other with the top of the first buffer part 132 and the second buffer part 134.Therefore, the first connecting path 136 can provide the first fluid path of fluid, and the second connecting path 137 can provide the second fluid that is different from first fluid path path.
In the illustrative examples, a plurality of partition walls 140 can be set in the first buffer part 132, with fluid well-distributing provide to substrate 10.Herein, a plurality of partition walls 40 are arranged on to equidistant intervals in the first buffer part 132 basically.Partition wall 140 can be divided into a plurality of parts with the first buffer part 132.The flow velocity (flow, flow fate) that partition wall 140 controllable flow bodies flow along second direction D2.The flow velocity of the fluid that for example, can make by partition wall 140 remains constant.As previously mentioned, when fluid ejection apparatus 100 has when becoming the predetermined angular of tiltangleθ with respect to second direction D2, the flow velocity of the fluid on fluid ejection apparatus 100 tops of flowing through is basically less than the flow velocity of the fluid of fluid ejection apparatus 100 bottoms of flowing through.Like this, partition wall 140 can so that fluid well-distributing the upper and lower of the fluid ejection apparatus 100 of flowing through.That is, the flow velocity of the fluid on fluid ejection apparatus 100 tops is substantially equal to or close to the flow velocity of the fluid of fluid ejection apparatus 100 bottoms.
Refer now to Fig. 1 and 2, fluid supply port 150 can pass top panel 110, then can be communicated with entrance 130.In addition, fluid supply port 150 can be connected at least one fluid supply line 130 that fluid is fed into fluid ejection apparatus 100.In the illustrative examples, fluid ejection apparatus 100 can comprise a plurality of along the fluid supply port 150 of second direction D2 basically to be equidistantly spaced.Herein, the distance between the adjacent fluid supply port 150 is substantially the same or close with the distance between the adjacent partition wall 140.In addition, spaced walls 140 preferably is separately positioned between the adjacent fluid supply port 150.The fluid of being supplied with by each fluid supply port 150 can flow between adjacent partition wall 140, so that provide the flow velocity of the fluid to the substrate 10 can be more even along second direction D2.
In the fluid ejection apparatus 100, the fluid that is provided by fluid supply port 150 can pass successively entrance 130, the first buffer part 132, the first connecting path 136, the second connecting path 137, reach the second buffer part 134.Then, fluid can be sprayed onto on the substrate 10.Like this, after at least one in passing the first connecting path 136 and the second connecting path 137, fluid can flow towards outlet 138.
Fig. 3 illustrates the first connecting path 136 of fluid ejection apparatus 100 of Fig. 2 and the amplification view of the second connecting path 137.
With reference to figure 3, between plate 120 and the top panel 110, all edges that define the surface of the first buffer part 132 and the second buffer part 134 all have basically rounded shapes below.In addition, between the first buffer part 132 and the second buffer part 134, the first stop part～the 4th stop part 160,161,162,163 also has basically rounded shapes.Therefore, although flow through the first buffer part 132 and the second buffer part 134, form eddy current can prevent the fluid in the first buffer part 132 and the second buffer part 134, and the fluid that flows can not generate bubble yet in the first buffer part 132 and the second buffer part 134.
Fluid can flow through the first supply port 150, entrance 130, the first buffer part 132, the first connecting path 136, the second connecting path 137, and the second buffer part 134.Then, can spray a fluid on the substrate 10 from exporting 138.In this case, the size of the first connecting path 136 is substantially the same or close with the size of the second connecting path 137, so that the first path-length of the fluid of first connecting path 136 of flowing through can be substantially the same or close with the alternate path length of the fluid of second connecting path 137 of flowing through.For example, the first connecting path 136 can be had the first width, and the second connecting path 137 has second width substantially the same or close with the first width.In addition, the first connecting path 136 and the second connecting path 137 can separate substantially the same distance with the center of the first buffer part 132 and the second buffer part 134 respectively.Moreover entrance 130 can be communicated with the central part fluid of the first buffer part 132.Therefore, flowing through first path-length of fluid of the first connecting path 136 can be substantially the same or close with the alternate path length of the fluid of second connecting path 137 of flowing through.Thereby this structure can prevent pressure drop, and produces the loss of the fluid flow that the difference by path-length causes in the fluid of can prevent from flowing through the first connecting path 136 and the second connecting path 137.
In the fluid ejection apparatus 100 according to illustrative examples, the second width sum of the first width of the first connecting path 136 and the second connecting path 137 is basically greater than the width that exports 138.For example, the first width of the first connecting path 136 is about 0.15mm, and the second width of the second connecting path 137 is about 0.15mm.In addition, the width of outlet 138 can be approximately 0.2mm.Owing to the second width sum of the first width of the first connecting path 136 and the second connecting path 137 can be approximately 0.2mm for about 0.3mm exports 138 width; width can be stuck in the first connecting path 136 and the second connecting path 137 greater than foreign matter and/or the particle of 0.15mm; thus, the foreign matter of large-size and/or particle can't arrive outlet 138.Like this, because can't forming with outlet 138 of the foreign matter of large-size and/or particle contact, so can effectively prevent from dividing from exporting 138 out fluids.Yet, the first connecting path 136, the second connecting path 137, and the above-mentioned size of outlet 138 can change according to size and/or the treatment conditions of fluid ejection apparatus 100.In addition, the cross section of whole fluid passage can reduce towards outlet 138 from the first connecting path 136 and the second connecting path 137, and like this, fluid pressure when outlet 338 is flowed increases from the first connecting path 136 and the second connecting path 137 when fluid.Therefore, owing to can reduce further the pressure drop of fluid and the flow loss of fluid, therefore can guarantee to have suitable pressure and suitable flow from exporting 138 fluids that eject.
Fig. 4 is the cutaway view that illustrates according to the fluid ejection apparatus of some illustrative examples.Among Fig. 4, except the 3rd connecting path 239, the structure of fluid ejection apparatus 200 is substantially the same or close with the structure of the fluid ejection apparatus 100 of describing with reference to figure 1～3.
With reference to figure 4, fluid ejection apparatus 200 can comprise top panel 210, lower panel 220, fluid supply port 250, entrance 230, the first buffer part 232, the first connecting path 236, the second connecting path 237, the 3rd connecting path 239, the second buffer part 234, reach outlet 238 etc.Herein, the first stop part 260 and the second stop part 261 can be located in the first buffer part 232, and the 3rd stop part 262 and the 4th stop part 263 can be located in the second buffer part 234.
In this illustrative examples, the 3rd connecting path 239 can be located between the first connecting path 236 and the second connecting path 237.The first～the 3rd connecting path 236,237, and 239 the first buffer part 232 can be connected to the second buffer part 234.The size of the 3rd connecting path 239 is substantially the same or close with the size of the first connecting path 236 and/or the second connecting path 237.For example, the 3rd connecting path 239 can have three width substantially the same or close with the second width of the first width of the first connecting path 236 and/or the second connecting path 237.
In the illustrative examples, the first～the 3rd connecting path 236,237, and the first width to the three width sums of 239 basically greater than the width of outlet 238.For example, the first width of the first connecting path 236 is about 0.1mm, and the second width of the second connecting path 237 is about 0.1mm, and the second width of the 3rd connecting path 239 is about 0.1mm.Herein, the width of outlet 238 can be approximately 0.2mm.The first～the 3rd connecting path 236,237, and the first width to the three width sums of 239 basically greater than the width of outlet 238.Therefore, width can be stuck in the first connecting path 236, the second connecting path 237, reach in the 3rd connecting path 239 greater than foreign matter and/or the particle of 0.1mm, and like this, can't passing of the foreign matter of large-size and/or particle exports 238.Like this, can effectively prevent because of dividing from exporting 238 out fluids of exporting that the foreign matter that has large-size in 238 and/or particle cause.Yet, the first～the 3rd connecting path 236,237, and 239 can change according to size and/or the treatment conditions of fluid ejection apparatus 200 with outlet 238 above-mentioned size.In addition, the cross section of whole fluid passage can be from the first～the 3rd connecting path 236,237, and 239 238 reduce towards outlet, so that the pressure of fluid is along with fluid flows and increases towards outlet 238.Therefore, owing to can reduce further the pressure drop of fluid and the flow loss of fluid, therefore can guarantee to have suitable pressure and suitable flow from exporting 238 fluids that eject.
Fluid ejection apparatus 100 shown in Fig. 1～3 or fluid ejection apparatus shown in Figure 4 200 are the same, in the fluid ejection apparatus according to other illustrative examples, quantity that can be by regulating connecting path, the size of connecting path, and the size of outlet obtain required Fluid injection and press and/or required flow.
Fig. 5 is the cutaway view that illustrates according to the fluid ejection apparatus of other illustrative examples.Except the 3rd buffer part 340, first time connecting path 341, second time connecting path 342, the 5th stop part 364, and the 6th stop part 365, the structure of fluid ejection apparatus 300 shown in Figure 5 is substantially the same or close with the structure with reference to the fluid ejection apparatus 100 of figure 1～3 description.
With reference to figure 5, fluid ejection apparatus 300 can comprise on top panel 310, lower panel 320, fluid supply port 350, entrance 330, the first buffer part 332, first connecting path 337 on the connecting path 336, second, the second buffer part 334, first time connecting path 341, second time connecting path 342, the 3rd buffer part 340, and outlet 338 etc.
In the illustrative examples, the 3rd buffer part 340 in the above in the space between plate 310 and the lower panel 320 after the direction of Fluid Flow in A is positioned at the first buffer part 332 and the second buffer part 334.For example, the second buffer part 334 can be located between the first buffer part 332 and the 3rd buffer part 340, and the 3rd buffer part 340 can be located at the second buffer part 334 and export between 338.Herein, the structure of the 3rd buffer part 340 is substantially the same or close with the structure of the first buffer part 332 and/or the second buffer part 334.
On first on the connecting path 336 and second connecting path 337 the first buffer part is connected to the second buffer part 334.For example, on first on the connecting path 336 and second structure of connecting path 337 substantially the same or close with the first connecting path 136 and the second connecting path 137 described with reference to figure 1～3 respectively.Simultaneously, first time connecting path 341 and second time connecting path 342 are connected to the 3rd buffer part 340 with the second buffer part 334.In the illustrative examples, the structure of first time connecting path 341 and second time connecting path 342 respectively with first on the connecting path 336 and second structure of connecting path 337 substantially the same or close.
According to illustrative examples, on first on the connecting path 336 and second the second width sum of connecting path 337 basically greater than the width sum of first time connecting path 341 and second time connecting path 342.In addition, the width sum of first time connecting path 341 and second time connecting path 342 is basically greater than the width that exports 338.For example, the first width of connecting path 336 is about 0.2mm on first, and the second width of connecting path 337 is about 0.2mm on second.The 3rd width of first time connecting path 341 is about 0.15mm, and the 4th width of second time connecting path 342 is about 0.15mm.In addition, the width of outlet 338 can be approximately 0.2mm.Therefore, on first on the connecting path 336 and second the second width sum of connecting path 337 be about 0.4mm, it is basically greater than the width sum of first time connecting path 341 and second time connecting path 342.The width sum of first time connecting path 341 and second time connecting path 342 is basically greater than the width that exports 338.Width can be stuck on first on the connecting path 336 and second in the connecting path 337 greater than the foreign matter of 0.2mm and/or particle; and width can be stuck in first time connecting path 341 and second time connecting path 342 greater than foreign matter and/or the particle of 0.15mm; like this, the foreign matter of large-size and/or particle can't arrive outlet 138.Therefore, the foreign matter by stoping large-size and/or particle enter outlet 338 and can effectively prevent from dividing from exporting 238 out fluids.In addition, the cross section of whole fluid passage can be on first on the connecting path 336 and second connecting path 337 roughly reduce towards outlet 338 via first time connecting path 341 and second time connecting path 342.When fluid from first on the connecting path 336 and second connecting path 337 fluid pressure when outlet 338 is flowed increase.Therefore, owing to prevented the pressure drop of fluid and the flow loss of fluid, thus can guarantee to have suitable pressure and suitable flow from the fluid that outlet is ejected.
In some illustrative examples, fluid ejection apparatus 300 also can additionally comprise the 5th stop part 364 and the 6th stop part 365.For example, the 3rd buffer part 340 can have the 5th stop part 364 and with the 5th stop part 364 corresponding the 6th stop part 365 basically.Like this, the 5th stop part 364 can be located on the lower panel 320, and the 6th stop part 365 can plate located in the above 310 times.When the combination according to lower panel 320 and top panel 310 arranges the 3rd buffer part 340, the 5th stop part 364 and the 6th stop part 365 can be arranged in the 3rd buffer part 340, the 5th stop part 364 can be basically towards the 6th stop part 365 simultaneously, like this, fluid can flow between the 5th stop part 364 and the 6th stop part 365.Herein, the size of the 5th stop part 364 is substantially the same or close with the size of the 6th stop part 365.According to other illustrative examples, the size of the 5th stop part 364 and the 6th stop part 365 is substantially the same or close with the size of the first stop part 360 and the second stop part 361 and/or the 3rd stop part 362 and the four or six stop part 363.
In the fluid ejection apparatus that has according to the said structure of illustrative examples, many connecting path can spray a fluid into on-chip outlet is connected to be provided fluid for from the fluid supply port towards outlet entrance with being used for, and described fluid supply port can be supplied to entrance with fluids such as cleaning solution, rinsing liquid, air.Like this, described many connecting paths can be made as various structures, such as the multi-channel structure between the entrance and exit or multilevel hierarchy.If foreign matter or particle are present in wherein in the connecting path, then this foreign matter or particle can't arrive outlet, and fluid can flow by other connecting paths fully, thereby can effectively prevent from the division of outlet fluid out.Therefore, the operational stability of fluid ejection apparatus is promoted, and uses the productive rate of the processing of this device to be increased.In addition, when in multilevel hierarchy, many connecting paths being set, for example, connecting path and many lower connecting paths on many are set in fluid ejection apparatus, can hinder foreign matter and/or particle by the multistage connecting path that has according to the different cross section of the size of foreign matter and/or particle.Simultaneously, when in multi-channel structure, many connecting paths being set, for example, the first connecting path, the second connecting path are set in fluid ejection apparatus, reach the 3rd connecting path, can advantageously control by the cross section that reduces connecting path fluid pressure, fluid flow, reach fluid velocity.
Preamble only is the explanation of embodiment, but not its restriction.Although already described some embodiment, those skilled in the art can easily recognize and can make many modifications to embodiment, and essence does not break away from instruction and the advantage with novelty of the present invention.Therefore, be intended to all such modifications are included in as in claims limited range.In claims, the sentence formula that structure adds function is intended to cover the structure of the described function of execution described herein, and not only comprises and also comprise the structure that is equal to by structural equivalent.Therefore, should be understood that preamble only is the explanation of embodiment, but not exposure is to the restriction of specific embodiment, and is intended to exposure to the modification of embodiment and other embodiment is included within the scope of appended claims.The present invention is by claims and comprise that the equivalent of claim is limited.
Claims (15)
1. fluid ejection apparatus comprises:
Be used for providing the fluid supply port of fluid;
Be connected to described fluid supply port to receive the entrance of described fluid;
Be connected to the first buffer part of described entrance;
Article two, the connecting path that is communicated with described the first buffer part more than;
The second buffer part that is communicated with described connecting path; And
Be connected to described the second buffer part so that described fluid is provided to on-chip outlet.
2. fluid ejection apparatus as claimed in claim 1, wherein said connecting path is provided for respectively the fluid passage of described fluid, and described fluid passage has respectively identical size.
3. fluid ejection apparatus as claimed in claim 1, wherein said connecting path comprises the first connecting path of narrow slit shape and the second connecting path of narrow slit shape, and described outlet is narrow slit shape.
4. fluid ejection apparatus as claimed in claim 3, the second width sum of the first width of wherein said the first connecting path and described the second connecting path is greater than the width of described outlet, and described the first width and described the second width are separately less than the width of described outlet.
5. fluid ejection apparatus as claimed in claim 4, the first width of wherein said the first connecting path and the second width of described the second connecting path approximately 0.15mm that respectively does for oneself, and the width of described outlet is about 0.2mm.
6. fluid ejection apparatus as claimed in claim 1, wherein said the first buffer part and described the second buffer part respectively comprise a plurality of stop parts.
7. fluid ejection apparatus as claimed in claim 6, wherein said the first buffer part comprises the first stop part and second stop part of mutual correspondence, and described the second buffer part comprises the 3rd stop part and the 4th stop part of mutual correspondence.
8. fluid ejection apparatus as claimed in claim 1, wherein said the first buffer part comprise a plurality of partition walls that extend along the direction of described Fluid Flow in A, and described partition wall prevents that described fluid from flowing along the direction perpendicular to the direction of described Fluid Flow in A.
9. fluid ejection apparatus comprises:
Be used for providing the fluid supply port of fluid;
Be connected to described fluid supply port to receive the entrance of described fluid;
Be connected to the first buffer part of described entrance;
Be communicated with described the first buffer part first on connecting path on the connecting path and second;
With described first on connecting path is communicated with on the connecting path and second the second buffer part;
First time connecting path and second time connecting path of being communicated with described the second buffer part;
The 3rd buffer part that is communicated with described first time connecting path and second time connecting path; And
Be connected to described the 3rd buffer part so that described fluid is provided to on-chip outlet.
10. fluid ejection apparatus as claimed in claim 9, the connecting path narrow slit shape of respectively doing for oneself on wherein said first and second, described first and second times connecting paths narrow slit shape of respectively doing for oneself, and described outlet is narrow slit shape.
11. fluid ejection apparatus as claimed in claim 9, the second width sum of connecting path is greater than the 4th width sum of the 3rd width and described second time connecting path of described first time connecting path on the first width of connecting path and described second on wherein said first, and described the 3rd width and described the 4th width sum are greater than the width of described outlet.
12. fluid ejection apparatus as claimed in claim 11, on wherein said first on the first width of connecting path and described second the second width of connecting path identical, the 3rd width of described first time connecting path is identical with the 4th width of described second time connecting path.
The approximately 0.2mm 13. fluid ejection apparatus as claimed in claim 11, wherein said the first width and described the second width are respectively done for oneself, described the 3rd width and described the 4th width approximately 0.15mm that respectively does for oneself, and the width of described outlet is about 0.2mm.
14. fluid ejection apparatus as claimed in claim 9, wherein said the first buffer part, described the second buffer part, and described the 3rd buffer part comprise separately the stop part of a pair of mutual correspondence.
15. fluid ejection apparatus as claimed in claim 9, wherein said the first buffer part, described the second buffer part, and described the 3rd buffer part in one comprise a plurality of partition walls that extend along the direction of described Fluid Flow in A, described partition wall prevents that described fluid from flowing along the direction perpendicular to the direction of described Fluid Flow in A.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR20110104523 | 2011-10-13 | ||
| KR10-2011-0104523 | 2011-10-13 | ||
| KR1020110130789A KR101267464B1 (en) | 2011-10-13 | 2011-12-08 | Apparatus for jetting fluid |
| KR10-2011-0130789 | 2011-12-08 |
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| Publication Number | Publication Date |
|---|---|
| CN103041940A true CN103041940A (en) | 2013-04-17 |
| CN103041940B CN103041940B (en) | 2015-08-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210413634.0A Active CN103041940B (en) | 2011-10-13 | 2012-10-15 | Fluid ejection apparatus |
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| CN105629530A (en) * | 2016-01-19 | 2016-06-01 | 京东方科技集团股份有限公司 | Cleaning device and use method thereof |
| CN111085520A (en) * | 2019-11-23 | 2020-05-01 | 石家庄旭新光电科技有限公司 | Liquid crystal glass substrate cleaning system |
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| KR200305052Y1 (en) * | 2002-12-03 | 2003-02-19 | (주)케이.씨.텍 | Slit Type Device Nozzle for Jetting Fluid |
| JP2005131539A (en) * | 2003-10-30 | 2005-05-26 | Yoshinobu Shimoitani | Injection nozzle |
| CN1636639A (en) * | 2003-12-24 | 2005-07-13 | 显示器生产服务株式会社 | Panel processing system |
| KR20100059235A (en) * | 2008-11-26 | 2010-06-04 | 세메스 주식회사 | Apparatus for jetting fluid |
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| KR200305052Y1 (en) * | 2002-12-03 | 2003-02-19 | (주)케이.씨.텍 | Slit Type Device Nozzle for Jetting Fluid |
| JP2005131539A (en) * | 2003-10-30 | 2005-05-26 | Yoshinobu Shimoitani | Injection nozzle |
| CN1636639A (en) * | 2003-12-24 | 2005-07-13 | 显示器生产服务株式会社 | Panel processing system |
| KR20100059235A (en) * | 2008-11-26 | 2010-06-04 | 세메스 주식회사 | Apparatus for jetting fluid |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111085520A (en) * | 2019-11-23 | 2020-05-01 | 石家庄旭新光电科技有限公司 | Liquid crystal glass substrate cleaning system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103041940B (en) | 2015-08-26 |
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