KR20100059235A - Apparatus for jetting fluid - Google Patents

Apparatus for jetting fluid Download PDF

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Publication number
KR20100059235A
KR20100059235A KR1020080117932A KR20080117932A KR20100059235A KR 20100059235 A KR20100059235 A KR 20100059235A KR 1020080117932 A KR1020080117932 A KR 1020080117932A KR 20080117932 A KR20080117932 A KR 20080117932A KR 20100059235 A KR20100059235 A KR 20100059235A
Authority
KR
South Korea
Prior art keywords
fluid
housing
buffer unit
injection
substrate
Prior art date
Application number
KR1020080117932A
Other languages
Korean (ko)
Inventor
김병재
박종호
Original Assignee
세메스 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 세메스 주식회사 filed Critical 세메스 주식회사
Priority to KR1020080117932A priority Critical patent/KR20100059235A/en
Publication of KR20100059235A publication Critical patent/KR20100059235A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/027—Coating heads with several outlets, e.g. aligned transversally to the moving direction of a web to be coated
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/14—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation involving heating or cooling
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electroluminescent Light Sources (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

PURPOSE: A fluid spraying apparatus is provided to uniformly spray fluid on a substrate with a constant pressure by supplying the fluid using spraying nozzles with a reduced inflow sectional area. CONSTITUTION: A fluid spraying apparatus(100) comprises the following: a housing(110) extended toward one direction; a buffer unit(120) formed along the housing and filled with fluid inserted from an outer supplying source; and multiple spraying nozzles(130) located along the housing and connected with the buffer unit to spray the fluid to an exterior. The spraying nozzles have shapes which gradually expand to the spraying direction and fixed widths. The tip-ends of the spraying nozzles are connected to each other to form a slit shape.

Description

Apparatus for jetting fluid

The present invention relates to a fluid ejection apparatus, and more particularly, to a fluid ejection apparatus capable of ejecting at a uniform pressure when ejecting the fluid to the substrate.

In general, a flat panel display device includes a liquid crystal display device (LCD) using liquid crystal, a plasma display device (PDP) using plasma, an organic light emitting display device (OLED) using an organic light emitting element, and the like.

Recently, among them, a liquid crystal display device having low power consumption and volume and capable of low power driving has been widely used. The liquid crystal display device includes a display panel for substantially displaying an image. The display panel is generally manufactured by repeatedly performing various unit processes for forming a circuit pattern on the substrate using a large-area substrate made of glass, for example, a deposition process, a photo process, an etching process, and an etching process. do.

After the above unit processes, a cleaning process is usually accompanied. The cleaning process is generally a process for removing dust or organic matters on the substrate, and washing with a washing liquid such as deionized water, and spraying dry gas (for example, air) after the washing process to remain on the substrate. It comprises a drying step of removing and drying the cleaning liquid.

The cleaning liquid or dry gas is usually supplied to the substrate using a spray device. The injection device has an injection nozzle for injecting a cleaning liquid or dry gas, the injection nozzle is mainly used in the form of a long slit-shaped injection nozzle extending in one direction. That is, the injection nozzle has a long shape while having the same width. In addition, the spray nozzle is usually manufactured in a length corresponding to the width of the substrate, and uniform spray pressure is required for the entire spray nozzle.

Recently, due to the trend toward larger display devices, the area of a substrate for manufacturing the same has also increased, and as the area of the substrate increases, the length of the spray nozzle increases.

However, as the length of the injection nozzle is gradually increased, there is a problem that a pressure difference occurs in the longitudinal direction.

Therefore, the problem to be solved through embodiments of the present invention is to provide a fluid injection device that can be sprayed at a uniform pressure to the entire target region for spraying the cleaning liquid or dry gas.

In order to achieve the above object of the present invention, a fluid injection device according to the present invention includes a housing, a buffer part, and injection nozzles. The housing has a structure extending in one direction. The buffer part is formed in the housing along the one direction and is filled with a fluid flowing from an external source. The injection nozzles are disposed along the one direction, and are connected to the buffer part to inject the fluid filled in the buffer part to the outside. In particular, the spray nozzles have a shape that gradually expands in the spray direction.

According to an embodiment of the present invention, the spray nozzles may have a predetermined width, and the front ends of the spraying directions may be connected to each other to have a slit shape as a whole.

The fluid injection device according to the present invention configured as described above forms a plurality of injection nozzles to uniformly induce the injection pressure inside the device filled with a fluid such as a cleaning liquid or dry gas, and the injection nozzles are gradually expanded in the injection direction. By having, the area of the inlet end of the injection nozzles is reduced so that the fluid is supplied at a uniform pressure, thereby making the injection pressure uniform.

Hereinafter, a fluid injection device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the invention, and are actually shown in a smaller scale than the actual dimensions in order to explain the schematic configuration. The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described on the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, parts, or combinations thereof.

On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

Example

1 is a schematic view showing a fluid injection unit according to an embodiment of the present invention, Figure 2 is a cross-sectional view showing a fluid injection unit shown in Figure 1, Figure 3 is a fluid injection unit shown in Figure 1 It is a schematic drawing seen from a direction.

1, 2 and 3, the fluid ejection apparatus 100 according to an embodiment of the present invention is a fluid material for the treatment of the substrate in the treatment process for a flat substrate such as a glass substrate It can be used to spray onto the substrate.

Examples of the treatment process include an etching process for removing a film or impurities on the substrate, a cleaning process for removing impurities on the substrate, a rinsing process for rinsing the substrate after etching or cleaning, a drying process for drying the substrate, and the like. have. That is, the fluid injected through the fluid injector 100 may be an etching solution, a cleaning solution, a rinse solution, a drying dry gas, or the like. Although not shown, the treatment processes are generally performed while transferring the substrate in one direction through a transfer apparatus, and the fluid ejection apparatus 100 may be disposed on the substrate to be transferred.

Hereinafter, when the fluid injection device 100 is used in a drying step, it will be described based on the configuration for injecting the drying gas.

The fluid injector 100 includes a housing 110, a buffer unit 120 filled with a dry gas to be injected onto a substrate, and a plurality of injection nozzles 130 for spraying the dry gas.

The housing 110 has a structure extending in one direction (X direction). Since the fluid injector 100 is generally disposed and used in the width direction of the substrate, the housing 110 has a length corresponding to the width direction of the substrate. The housing 110 has a generally rectangular cross section in a direction (width direction, Y direction) perpendicular to the longitudinal direction (X direction) of the housing 110 on a horizontal plane, and a portion of a tip in a direction in which dry gas is injected. Has a triangular (or trapezoidal) shape. However, the cross-sectional shape of the housing 110 is not limited to the above-mentioned shape may have a variety of shapes. On the other hand, the housing 110 may be manufactured in one piece, and may be manufactured in an assembled type. Among them, it is common to manufacture the assembly type due to the convenience of manufacturing, the ease of handling and the like. For example, when the housing 110 is formed as an assembly type, two plate-like structures extending in the longitudinal direction (X direction) and having a predetermined width in the vertical direction (Z direction) are interviewed to form a fastening member such as a bolt. It can be formed by assembling through. In contrast, the housing 110 may be formed in various ways.

On the other hand, the housing 110 is connected to the supply pipe 104 for supplying a dry gas into the housing 110. In the supply pipe 104, a plurality of supply pipes 104 may be connected at equal intervals along the length direction (X direction) of the housing 110. The connection of the plurality of supply pipes 104 is for supplying a uniform pressure with respect to the longitudinal direction (X direction) when supplying dry gas into the housing 110. The supply pipes 104 are connected to an external dry gas source 102. Therefore, the dry gas supplied from the external source 102 is uniformly supplied into the housing 102 through the supply pipes 104.

The buffer unit 120 is formed inside the housing 110 and extends along the longitudinal direction (X direction) of the housing 110. The buffer unit 120 is connected to an external source 102 through the supply pipe 104. Therefore, the buffer unit 120 is filled with a dry gas supplied from the source (102). That is, the dry gas supplied from the source 102 into the housing 110 is not sprayed directly (immediately) to the outside, but stays in the buffer unit 120 and is sprayed. As a result, the buffer unit 120 provides a buffer space for the dry gas introduced into the housing 110, so that even if the incoming dry gas has a temporal pressure change within a predetermined range, the buffer unit 120 buffers the uniform pressure. To be sprayed on.

The buffer unit 120 includes a first buffer unit 122 provided at an inlet end of the dry gas and a second buffer unit 124 provided at an injection end of the dry gas to stay before the dry gas is injected to the outside. It may include. The first buffer part 122 and the second buffer part 124 extend in the longitudinal direction (X direction) of the housing 110. In addition, the cross section in the width direction (Y direction) of the housing 110 may have a square shape or a circular shape. In contrast, the cross section in the width direction (Y direction) may have various shapes. Capacities of the first buffer unit 122 and capacities of the second buffer unit 124 may be the same or different from each other. If the capacity of the first buffer unit 122 and the capacity of the second buffer unit 124 are different from each other, the capacity of the second buffer unit 124 may be smaller than that of the first buffer unit 122. Can be. This is because the first buffer unit 122 provided at the inlet end is buffered first, and the second buffer unit 124 provided at the injection end is buffered secondly, thereby acting as a buffer to the first buffer unit 122. Because it is concentrated. Alternatively, the capacity of the second buffer unit 124 may be larger than that of the first buffer unit 122.

The injection nozzles 130 are connected to the buffer unit 120 and serve to inject the dry gas filled in the buffer unit 120 to the outside. That is, the injection nozzles 130 are formed in the housing 110 to be connected to the second buffer unit 124 so that the dry gas filled in the second buffer unit 124 may be injected to the outside. Provide an injection passage. The spray nozzles 130 may be disposed along the longitudinal direction (X direction) of the housing 110, and may be disposed at equal intervals to uniformly spray the dry gas.

In addition, the spray nozzles 130 may be formed to be sprayed at a uniform pressure with respect to the longitudinal direction (X direction) of the housing 110, the drying gas is gradually expanded in the spray direction as shown in FIG. It has a shape. For example, the cross section cut along the longitudinal direction (X direction) may be formed to have a triangular (or trapezoidal) shape. That is, the injection nozzles 130 have a shape in which the inflow end thereof has a small area and gradually expands as the area progresses in the injection direction of the dry gas. Therefore, the injection nozzles 130 have a structure in which injection holes having a small area are arranged at equal intervals along the length direction (X direction) at the inflow end side in contact with the second buffer unit 124.

As a result, the drying gas is filled in the second buffer unit 124 and then the inlet end (for example, a small hole structure) of the injection nozzles 130 disposed at equal intervals along the longitudinal direction (X direction). It has a structure that is sprayed to the outside through. Thus, the area of the inlet end of the injection nozzles 130 is reduced, so that the dry gas is supplied to the inlet ends with a uniform pressure, so that the dry gas is supplied at a uniform injection pressure over the entire longitudinal direction (X direction). Can be sprayed.

In addition, the spray nozzles 130 may have a slit shape having a constant width (eg, a gap with respect to the Y direction in the substrate transport direction) as shown in FIGS. 1 and 3. In this case, the tip portions of the injection nozzles 130 in the spraying direction may be connected to each other. As a result, the front end portions of the injection nozzles 130 have a single slit shape as a whole. That is, when the drying gas is finally injected, it is possible to obtain the effect of spraying through one slit nozzle extending in the longitudinal direction (X direction). In contrast, the tip portions of the injection nozzles 130 may have a structure spaced apart from each other by a predetermined interval.

As such, the fluid injection device 100 according to the present invention has a small inlet end of the injection nozzles 130 for finally discharging the dry gas to the outside, the longitudinal direction (X direction) of the housing 110 Therefore, by being disposed at equal intervals, the drying gas is supplied at a uniform pressure to the injection nozzles 130. Thus, the drying gas may be injected at a uniform pressure as a whole with respect to the longitudinal direction of the housing 110.

Therefore, it is possible to obtain a uniform overall process efficiency during the substrate processing process.

As described above, the fluid injection device according to a preferred embodiment of the present invention by spraying the fluid flowing into the housing to the outside through the injection nozzles are arranged along the longitudinal direction of the housing and gradually expanding in the injection direction, The inlet end area of the spray nozzles is reduced to inject fluid at a uniform pressure.

Accordingly, when the fluid is injected into the substrate, the process yield can be improved by treating the substrate with uniform process efficiency by spraying at a uniform pressure.

While the foregoing has been described with reference to preferred embodiments of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.

1 is a schematic diagram illustrating a fluid injection unit according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view of the fluid injection unit illustrated in FIG. 1.

FIG. 3 is a schematic view of the fluid ejection unit shown in FIG. 1 as viewed from the ejection direction.

Explanation of symbols on the main parts of the drawings

100: fluid injector 102: fluid supply source

104: supply pipe 110: housing

120: buffer unit 122: first buffer unit

124: second buffer unit 130: injection nozzle

140: connection line

Claims (2)

A housing extending in one direction; A buffer part formed along the one direction inside the housing and filled with a fluid flowing from an external source; And Disposed along the one direction, the plurality of injection nozzles connected to the buffer unit for injecting the fluid filled in the buffer unit to the outside; And the spray nozzles have a shape that gradually expands in the spray direction. The fluid injection device of claim 1, wherein the injection nozzles have a constant width and the front ends of the injection directions are connected to each other to have a slit shape as a whole.
KR1020080117932A 2008-11-26 2008-11-26 Apparatus for jetting fluid KR20100059235A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020080117932A KR20100059235A (en) 2008-11-26 2008-11-26 Apparatus for jetting fluid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020080117932A KR20100059235A (en) 2008-11-26 2008-11-26 Apparatus for jetting fluid

Publications (1)

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KR20100059235A true KR20100059235A (en) 2010-06-04

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103041940A (en) * 2011-10-13 2013-04-17 细美事有限公司 Apparatus for jetting fluid
KR20150033130A (en) * 2013-09-23 2015-04-01 주식회사 엘지화학 Coating apparatus having slot-die
CN105903609A (en) * 2016-06-17 2016-08-31 佛山市联智新创科技有限公司 Automatic emulsion paint spray-coating device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103041940A (en) * 2011-10-13 2013-04-17 细美事有限公司 Apparatus for jetting fluid
KR20150033130A (en) * 2013-09-23 2015-04-01 주식회사 엘지화학 Coating apparatus having slot-die
CN105903609A (en) * 2016-06-17 2016-08-31 佛山市联智新创科技有限公司 Automatic emulsion paint spray-coating device

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