KR20100056609A

KR20100056609A - Apparatus for jetting fluid

Info

Publication number: KR20100056609A
Application number: KR1020080115488A
Authority: KR
Inventors: 이봉문
Original assignee: 세메스 주식회사
Priority date: 2008-11-20
Filing date: 2008-11-20
Publication date: 2010-05-28

Abstract

PURPOSE: A fluid sprayer is provided to stably spray fluid to a substrate with a uniform pressure while a foreign material is partially sealing a spraying nozzle without splitting. CONSTITUTION: A fluid sprayer comprises the following: a housing extended to one side; a buffer unit(120) filled with fluid supplied from an external source; a spraying nozzle(130) spraying the fluid filling the buffer unit while being connected to the buffer unit. The spraying nozzle has a concavo-convex structure to spray the fluid with an inclined angle. The cross section of the concavo-convex structure is a triangle.

Description

Apparatus for jetting fluid

The present invention relates to a fluid ejection apparatus, and more particularly, to a fluid ejection apparatus capable of ejecting at a uniform pressure when ejecting the fluid to the substrate.

In general, a flat panel display device includes a liquid crystal display device (LCD) using liquid crystal, a plasma display device (PDP) using plasma, an organic light emitting display device (OLED) using an organic light emitting element, and the like.

Recently, among them, a liquid crystal display device having low power consumption and volume and capable of low power driving has been widely used. The liquid crystal display device includes a display panel for substantially displaying an image. In order to form a circuit pattern on the substrate using a large-area substrate made of glass, the display panel repeatedly performs various unit processes such as a deposition process, a photo process, a developing process, an etching process, an etching process, and the like. To be prepared.

After the unit processes, the cleaning process may be usually accompanied. The cleaning process is generally a process for removing dust or organic matters on the substrate, and washing with a washing liquid or chemical, such as deionized water, and washing with spraying dry gas (for example, air) after the washing step. And a drying step of removing and drying the cleaning liquid remaining on the substrate.

Substrate processing fluids such as the chemical, the cleaning liquid, and the drying gas are usually supplied to the substrate using an injection device. The injection device has an injection nozzle for injecting a substrate processing fluid such as a chemical, a cleaning liquid, a dry gas, the injection nozzle is mainly used in the form of a long slit-shaped injection nozzle extending in one direction. In addition, the spray nozzle is generally manufactured in a length corresponding to the width of the substrate.

Here, the inner wall of the injection nozzle generally has a smooth surface. Therefore, the substrate processing fluid sprayed through the spray nozzle is sprayed in the vertical direction.

As such, when the inner wall surface of the spray nozzle has a smooth shape, the fluid for substrate processing is injected in the vertical direction, and when the foreign matter is caught in the spray nozzle, the fluid is sprayed and there is a problem of cracking. This causes a problem in which a process for supplying the substrate is not supplied when the processing process is performed on the substrate, thereby lowering the process yield for the substrate.

Therefore, the problem to be solved by the embodiments of the present invention is to provide a fluid injection device that can inject a fluid having a inclination angle to the substrate processing fluid to improve the separation of the injection fluid caused by the foreign matter in the injection nozzle. will be.

In order to achieve the above object of the present invention, a fluid injection device according to the present invention includes a housing, a buffer part, and an injection nozzle. The housing has a structure extending in one direction. The buffer part is formed in the housing along the one direction and is filled with a fluid flowing from an external source. The injection nozzle has a slit shape extending in the one direction and is connected to the buffer part to inject the fluid filled in the buffer part to the outside. In particular, the injection nozzle has a concave-convex shape extending in the inclination angle direction on the inner wall so that the fluid is injected with an inclination angle with respect to the one direction.

According to one embodiment of the invention, the cross-section of the concave-convex shape may have a triangular shape.

The fluid ejection apparatus according to the present invention configured as described above has a slit shape and forms irregularities in an oblique angle direction on an inner wall of an ejection nozzle for ejecting a fluid for treating a substrate, such as chemicals, cleaning fluids, and dry gases, thereby processing the substrate through the ejection nozzle. Induce fluid to be injected with an angle of inclination. Therefore, when foreign matter is stuck in the injection nozzle, the fluid may be injected and the splitting phenomenon may be reduced, thereby improving the stability of the equipment and the process yield.

Hereinafter, a fluid injection device according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the invention, and are actually shown in a smaller scale than the actual dimensions in order to explain the schematic configuration. The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described on the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, parts, or combinations thereof.

On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

Example

1 is a cross-sectional view schematically showing a fluid injection unit according to an embodiment of the present invention, Figure 2 is a side cross-sectional view schematically showing the fluid injection unit shown in Figure 1, Figure 3 is a fluid injection shown in Figure 1 A schematic view of the unit viewed from the spraying direction.

1, 2 and 3, the fluid injection device 100 according to an embodiment of the present invention is a fluid state material for the treatment of the substrate in the processing process for a flat substrate such as a skinned substrate It can be used to spray onto the substrate.

Examples of the treatment process include an etching process for removing a film or impurities on the substrate, a cleaning process for removing impurities on the substrate, a rinsing process for rinsing the substrate after etching or cleaning, a drying process for drying the substrate, and the like. have. That is, the fluid injected through the fluid injector 100 may be an etching solution, a cleaning solution, a rinse solution, a drying gas for drying. Although not shown, the treatment processes are generally performed while transferring the substrate in one direction through a transfer apparatus, and the fluid ejection apparatus 100 may be disposed on the substrate to be transferred.

Hereinafter, the case where the fluid injection device 100 is used in the cleaning process, that is, will be described based on the configuration for injecting the cleaning liquid.

The fluid injector 100 includes a housing 110, a buffer unit 120 filled with a cleaning liquid to be injected onto a substrate as an object, and an injection nozzle 130 for spraying the cleaning liquid.

The housing 110 has a structure extending in one direction (X direction). Since the fluid injector 100 is generally disposed and used in the width direction of the substrate, the housing 110 has a length corresponding to the width direction of the substrate. The housing 110 has a generally rectangular cross section in a direction (width direction, Y direction) perpendicular to the longitudinal direction (X direction) of the housing 110 on a horizontal plane, and a portion of a tip in the direction in which the cleaning liquid is sprayed is It has a triangular (or trapezoidal) shape. However, the cross-sectional shape of the housing 110 in the width direction (Y direction) is not limited to the aforementioned shape and may have various shapes.

The housing 110 has an assembly structure. For example, the housing 110 may include a first frame 110a and a second frame 110b. The first frame 110a and the second frame 110b each have a plate shape extending in the longitudinal direction (X direction) and having a predetermined width in the vertical direction (Z direction). In addition, the first frame 110 and the second frame 110b has grooves for forming the buffer unit 120 and the injection nozzle 130 on one side. The first fastening member 112 and the first frame 110a and the second frame 110b are in contact with each other so that the grooves therein may form the buffer unit 120 and the injection nozzle 130. Coupled by a second fastening member 114. The first fastening member 112 and the second fastening member 114 may be composed of a bolt and a nut. On the contrary, the first fastening member may be configured of only a bolt and may be fastened to a fastening groove (not shown) having a screw thread formed in the second frame 110b. On the other hand, the housing 110 may be formed integrally. However, in order to manufacture convenience and ease of handling, etc., it is common to manufacture the assembly type, and may have various assembly structures in addition to the assembly structures mentioned.

The housing 110 is connected to a supply pipe 104 for supplying a cleaning liquid into the housing 110. In the supply pipe 104, a plurality of supply pipes 104 may be connected at equal intervals along the length direction (X direction) of the housing 110. In addition, the supply pipe 104 may be connected through the upper surface of the housing 110, it may be connected through the side of the housing 110. The connection of the plurality of supply pipes 104 is to supply a uniform pressure with respect to the longitudinal direction (X direction) when the cleaning liquid is supplied into the housing 110. The supply pipes 104 are connected to an external cleaning liquid source 102. Therefore, the cleaning liquid supplied from the source 102 is uniformly supplied into the housing 102 through the supply pipes 104.

The buffer unit 120 is formed inside the housing 110 and extends along the longitudinal direction (X direction) of the housing 110. The buffer unit 120 is connected to an external source 102 through the supply pipe 104. Therefore, the buffer unit 120 is filled with the cleaning liquid supplied from the source (102). That is, the cleaning liquid supplied from the supply source 102 into the housing 110 is not sprayed directly to the outside, but stays in the buffer unit 120 and is sprayed. As a result, the buffer unit 120 provides a buffer space for the cleaning liquid flowing into the housing 110, so that even if the incoming cleaning liquid has a temporal pressure change within a predetermined range, it is buffered and sprayed at a uniform pressure. Induce to be.

The buffer unit 120 may include a first buffer unit 122 provided at the inlet of the cleaning liquid and a second buffer unit 124 provided at the injection end of the cleaning liquid and staying before the cleaning liquid is injected to the outside. . The first buffer part 122 and the second buffer part 124 extend in the longitudinal direction (X direction) of the housing 110. In addition, the cross section in the width direction (Y direction) of the housing 110 may have a square shape or a circular shape. In contrast, the cross section in the width direction (Y direction) may have various shapes. Capacities of the first buffer unit 122 and capacities of the second buffer unit 124 may be the same or different from each other. If the capacity of the first buffer unit 122 and the capacity of the second buffer unit 124 are different from each other, the capacity of the second buffer unit 124 may be smaller than that of the first buffer unit 122. Can be. This is because the first buffer portion 122 provided at the inlet end is first buffered, and the second buffer unit 124 provided at the injection end is secondly buffered, thereby acting as a buffer to the first buffer unit 122. Because it is concentrated. Alternatively, the capacity of the second buffer unit 124 may be larger than that of the first buffer unit 122.

The spray nozzle 130 is connected to the buffer unit 120 and serves to spray the cleaning liquid to the outside. That is, the injection nozzles 130 are formed in the housing 110 so as to be connected to the second buffer unit 124 so that the cleaning liquid filled in the second buffer unit 124 may be injected to the outside. to provide. The injection nozzle 130 has a slit shape extending in the longitudinal direction (X direction) of the housing 110.

In particular, the injection nozzle 130 is formed in a concave-convex shape without having a smooth inner wall so that the cleaning liquid may be injected with an inclination angle with respect to the longitudinal direction (X direction). That is, the concave-convex shape formed on the inner wall of the injection nozzle 130 has a structure having an inclination angle by a predetermined angle in the longitudinal direction of the housing 110, as shown in FIG. The concave-convex shape may be formed on one inner wall of the injection nozzle 110, and may be formed on both sides of the inner wall of the injection nozzle 110. When the concave-convex shape is formed on both sides of the inner wall of the spray nozzle 110, the inclination angles are formed to correspond to each other.

As a result, the cleaning liquid sprayed to the outside through the injection nozzle 130 is guided by the uneven shape formed on the inner wall is injected with an inclination angle with respect to the longitudinal direction (X direction).

As shown in FIG. 3, the uneven shape may have a triangular shape in cross section. However, the cross-sectional shape of the concave-convex shape is not limited to a triangular shape, and may have various shapes capable of inducing the cleaning solution to be sprayed with an inclination angle such as a semicircle shape and a trapezoidal shape.

As such, the fluid injection device 100 according to the present invention has a slit shape in which the injection nozzle 130 for discharging the cleaning liquid introduced into the housing 110 to the outside extends in one direction (X direction), and the inner wall is By being formed in an uneven shape having an inclination angle with respect to one direction (X direction), when the cleaning liquid is injected, the spraying direction is guided by the uneven shape to be sprayed with an inclination angle with respect to the longitudinal direction (X direction).

As described above, the fluid ejection apparatus according to the preferred embodiment of the present invention, when injecting the fluid flowing into the housing to the outside through a slit-shaped spray nozzle extending in the longitudinal direction of the housing, to the inner wall of the spray nozzle By forming the uneven shape having the inclined angle, the cleaning liquid is injected with the inclined angle along the inclined angle direction of the uneven shape.

Therefore, even when foreign matter is stuck in the injection nozzle, the fluid is suppressed when the fluid is injected, thereby improving the stability of the equipment to prevent the process failure, and improve the process yield.

While the foregoing has been described with reference to preferred embodiments of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.

1 is a cross-sectional view schematically showing a fluid injection unit according to an embodiment of the present invention.

FIG. 2 is a side cross-sectional view schematically showing the fluid ejection unit shown in FIG. 1.

FIG. 3 is a schematic view of the fluid ejection unit shown in FIG. 1 as viewed from the ejection direction.

Explanation of symbols on the main parts of the drawings

100: fluid injector 102: fluid supply source

104: supply pipe 110: housing

110a: first frame 110b: second frame

112: first fastening member 114: second fastening member

120: buffer unit 122: first buffer unit

124: second buffer unit 130: injection nozzle

140: connection line

Claims

A housing extending in one direction;

A buffer part formed along the one direction inside the housing and filled with a fluid flowing from an external source; And

A spray nozzle having a slit shape extending in the one direction and connected to the buffer part to inject the fluid filled in the buffer part to the outside;

And the injection nozzle has a concave-convex shape extending in the inclination angle direction on an inner wall such that the fluid is injected with an inclination angle with respect to the one direction.

The fluid injection device according to claim 1, wherein the cross-sectional shape of the uneven shape has a triangular shape.