KR20200056042A - Air knife with dual slit - Google Patents

Abstract

The present invention relates to an air knife with dual slits, which comprises: a middle plate having a middle plate body, a first middle plate spray guiding unit, and a second middle plate spray guiding unit; a first cover having a first cover body, a first air inlet, and a first cover spray guiding unit; a second cover having a second cover body, a second air inlet, and a second cover spray guiding unit; a first pocket disposed between the middle plate body and the first cover body; a first slit and a first air flow path; a second pocket disposed between the middle plate body and the second cover body; a second slit and a second air flow path; a plurality of first reinforcing bosses arranged at the middle of the first air flow path; and a plurality of second reinforcing bosses arranged at the middle of the second air flow path. Here, the air spray angle of the first slit with respect to the surface of a substrate is smaller than the air spray angle of the second slit with respect to the surface of the substrate. Therefore, a cleaning solution on the surface of the substrate can be stably removed.

Description

Dual Slit Air Knife {AIR KNIFE WITH DUAL SLIT}

The present invention relates to an air knife, and more particularly, to a dual slit air knife capable of removing moisture or cleaning liquid on the surface of the substrate by spraying high-pressure dry air to the substrate.

In general, semiconductor wafers, substrates for flat panel displays such as LCDs and OLEDs, and various substrates such as glass plates are manufactured through various manufacturing processes. During the manufacturing process of the substrate, the surface of the substrate is contaminated with various particles or contaminants, so a cleaning process is performed before and after some manufacturing processes to remove particles or contaminants on the substrate surface.

The cleaning process is a process for cleaning the substrate surface, and usually includes a chemical treatment process, a rinse process, and a drying process. Among these, the drying process is a process of removing moisture or cleaning liquid remaining on the surface of the substrate through a chemical treatment process and a rinse process. In the drying process, dry air is jetted to the substrate surface at high pressure to remove moisture or cleaning liquid remaining on the substrate surface. In this drying process, an air knife that pressurizes and receives dry air from the outside is used.

In general, the air knife is disposed parallel to the width direction of the substrate on the upper side and the lower side of the substrate to be transferred after completing the chemical treatment process and the rinse process, and by spraying dry air at a high pressure to the surface of the substrate with slits formed at the ends. It removes moisture and cleaning liquid remaining on the surface of the substrate.

Recently, as the size of the substrate used for the flat panel display increases, the size of the area where the air knife needs to spray air increases, and thus, the substrate surface is not completely dried through one dry air injection. If the substrate is dried without moisture or cleaning solution being completely removed from the substrate surface, stains remain on the substrate surface and further cleaning is required.

In addition, the conventional air knife has a problem that the working speed is slow and the working time is long.

In addition, in order to dry a large-sized substrate, the length of the air knife must also be increased accordingly. When the length of the air knife is increased, the air knife is likely to bend, and when the dry air is sprayed while the air knife is bent, the entire air is uniform. Since the drying air is not sprayed, a problem in that the drying efficiency decreases occurs.

Published Patent Publication No. 2017-0087428 (2017. 07. 28)

The present invention has been devised in consideration of the above-described points, and a dual slit air knife capable of stably removing the cleaning liquid deposited on the surface of the substrate by performing a cleaning process and double spraying air on the surface of the substrate being transferred. It aims to provide.

The dual slit air knife according to the present invention for solving the above-described object, as a dual slit air knife for removing the cleaning liquid on the surface of the substrate by spraying air through the cleaning process and passing through the cleaning process, the middle plate A middle plate having a body, a first middle plate spraying guide portion provided at one end of one surface of the middle plate body, and a second middle plate spraying guide portion provided at one end of the other surface of the middle plate body; A first cover body coupled to the middle plate body so that one surface of the middle plate body faces one surface of the middle plate body, and air between one surface of the middle plate body and one surface of the first cover body. A first air inlet provided in the middle of the first cover body to supply the, and the first middle to guide the air supplied between the middle plate body and the first cover body to be sprayed on the surface of the substrate A first cover having a first cover injection guide portion provided at one end of the first cover body so as to be spaced apart from the plate injection guide portion; A second cover body coupled to the middle plate body so that one surface thereof faces the other surface of the middle plate body facing the other surface of the middle plate body, and air between the other surface of the middle plate body and one surface of the second cover body. A second air inlet provided in the middle of the second cover body to supply the, and the second middle to guide the air supplied between the middle plate body and the second cover body to be sprayed on the surface of the substrate A second cover having a second cover injection guide portion provided at one end of the second cover body so as to face away from the plate injection guide portion; A first pocket connected between the first air inlet and provided between the middle plate body and the first cover body to allow air to flow through the first air inlet; A first disposed between the first pocket and the first slit to guide the air in the first pocket to the first slit provided between the first middle plate injection guide portion and the first cover injection guide portion Air flow; A second pocket connected between the second air inlet and provided between the middle plate body and the second cover body to allow air to flow through the second air inlet; A second disposed between the second pocket and the second slit to guide the air in the second pocket to a second slit provided between the second middle plate injection guide portion and the second cover injection guide portion Air flow; A plurality of first reinforcement bosses spaced apart in the longitudinal direction of the middle plate in the middle of the first air flow path; And a plurality of second reinforcing bosses spaced apart in the longitudinal direction of the middle plate in the middle of the second air flow path, wherein the air injection angle of the first slit with respect to the surface of the substrate is the surface of the substrate. It characterized in that it is smaller than the air injection angle of the second slit for.

The first reinforcement boss includes a first boss body disposed parallel to the air flow direction in the first air flow path, and a first boss provided convexly toward the first pocket at one end of the first boss body. An arch portion and a pair of first boss guide portions concavely recessed inside and outside the first boss body symmetrically left and right on both sides of the other end portion of the first boss body, wherein the second reinforcing boss includes the second The second boss body is disposed parallel to the air flow direction in the air flow path, the second boss arch provided convexly to the second pocket at one end of the second boss body, and the second boss body It may include a pair of second boss guide portions that are concavely recessed inwardly of the second boss body symmetrically left and right on both sides of the other end portion.

A first boss coupling hole is provided in the middle of the first boss body to which a fixing member for coupling the middle plate and the first cover is coupled, and the middle plate and the second cover are provided in the middle of the second boss body. A second boss coupling hole to which the fixing member for coupling is coupled may be provided.

The first pocket and the first air flow path are provided with one surface of the middle plate body partially dug, and the first reinforcement boss protrudes from one surface of the middle plate body to one surface side of the first cover body. It may be provided integrally with the middle plate body.

The second pocket and the second air flow path are provided in a partially dug shape of the second cover body, and the second reinforcement boss protrudes from one surface of the second cover body toward the other surface of the middle plate body. If possible, it may be provided integrally with the second cover body.

The first slit may be disposed upstream of the second slit with respect to the transfer direction of the substrate so that air can be injected to the substrate before the second slit.

The second slit may blow air perpendicular to the surface of the substrate.

The dual slit air knife according to the present invention has a simple structure, and by spraying air on the surface of the substrate with the first slit and the second slit, the substrate can be dried by effectively removing the cleaning liquid or moisture on the surface of the substrate. have.

Further, in the dual slit air knife according to the present invention, a plurality of first pockets are spaced apart in the longitudinal direction of the middle plate by a first pocket partition wall between one surface of the middle plate and the first cover, and in each first pocket By supplying air, air can be more strongly and uniformly injected through the first slit arranged in the width direction of the substrate. Further, a plurality of second pockets are spaced apart in the longitudinal direction of the middle plate by the second pocket partition wall between the other surface of the middle plate and the second cover, and air is supplied to each of the second pockets, thereby extending in the width direction of the substrate Through the second slit disposed, the air can be injected more strongly and uniformly. Therefore, the cleaning liquid removal and drying efficiency for the substrate is excellent, and the drying time of the substrate can be shortened.

Further, in the dual slit air knife according to the present invention, a plurality of first reinforcing bosses are spaced apart along the longitudinal direction of the middle plate between the middle plate and the first cover, and a plurality of agents are disposed between the middle plate and the second cover. 2 The reinforcing bosses are spaced apart along the longitudinal direction of the middle plate, so that the middle plate, the first cover, and the second cover can maintain a firm and stable coupling with each other.

In addition, the dual slit air knife according to the present invention allows a plurality of first reinforcing bosses to mutually support them between the middle plate and the first cover, and a plurality of second reinforcing bosses mutually support them between the middle plate and the second cover. By making it possible, it is not bent or deformed during use even though it has a structure that is longer in length than the width. Therefore, the first slit and the second slit can uniformly and stably blow air to the substrate while maintaining a straight shape in the width direction of the substrate.

In addition, the dual slit air knife according to the present invention is arranged in a structure capable of minimizing the flow resistance of air in the first air flow path through which the first reinforcement boss connects the first pocket and the first slit, thereby allowing the entire first slit As air is uniformly supplied, air may be uniformly injected toward the substrate through the entire first slit. In addition, the second reinforcing boss is disposed in a structure capable of minimizing the flow resistance of the air in the second air flow path connecting the second pocket and the second slit, so that air is uniformly supplied to the entire second slit and the second slit Air can be uniformly sprayed to the substrate through the whole. Therefore, it is possible to improve the drying efficiency of the substrate compared to the prior art.

1 shows an example of using a dual slit air knife according to an embodiment of the present invention.
2 is a cross-sectional view showing a dual slit air knife according to an embodiment of the present invention.
Figure 3 shows a surface of the middle plate provided in the dual slit air knife according to an embodiment of the present invention.
4 is a cross-sectional view taken along line I-I of FIG. 3.
5 is a cross-sectional view taken along line II-II of FIG. 3.
Figure 6 shows the outer surface of the first cover provided in the dual slit air knife according to an embodiment of the present invention.
7 is a cross-sectional view taken along line III-III of FIG. 6.
8 shows one surface of the second cover provided in the dual slit air knife according to an embodiment of the present invention.
9 shows the other surface of the second cover provided in the dual slit air knife according to an embodiment of the present invention.
10 is a cross-sectional view taken along line IV-IV of FIG. 8.
11 is a cross-sectional view taken along line VV of FIG. 11.

Hereinafter, a dual slit air knife according to the present invention and a manufacturing method thereof will be described in detail with reference to the drawings.

1 shows an example of using a dual slit air knife according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view showing a dual slit air knife according to an embodiment of the present invention.

As shown in the figure, the dual slit air knife 100 according to an embodiment of the present invention is for drying the substrate 10 to be transferred through a cleaning process, the middle plate 110 and the middle plate 110 It includes a first cover 130 coupled to one surface of the, and the second cover 140 coupled to the other surface of the middle plate (110). Between the middle plate 110 and the first cover 130, a first pocket 113 through which air flows from the outside, and a first slit 160 for injecting air from the first pocket 113 are provided. , Between the middle plate 110 and the second cover 140 is provided with a second pocket 143 through which air flows from the outside, and a second slit 162 for injecting air from the second pocket 143 do.

The dual slit air knife 100 is disposed on the upper and lower portions of the substrate 10 which is transferred horizontally with respect to the ground by the transfer device 20 after the cleaning process is completed, and the first slit 160 and the second slit By spraying air to the substrate 10 by a dual air injection method through 162, it is possible to efficiently remove the cleaning liquid remaining on the surface of the substrate 10.

1 to 5, the middle plate 110 includes a middle plate body 111, a plurality of first pockets 113 provided on one surface of the middle plate body 111, and a middle plate body 111 ), A first air flow path 117 connected to a plurality of first pockets 113 and an air flow, and a plurality of first reinforcement bosses 120 disposed in the middle of the first air flow path 117 ), And a first middle plate spraying guide portion 125 and a second middle plate spraying guide portion 127 disposed at one end of the middle plate body 111.

The first pocket 113 is provided on one surface of the middle plate body 111 in a form in which one surface of the middle plate body 111 is partially dug. The first pocket 113 is divided into a plurality by the plurality of first pocket partition walls 114 disposed on one surface of the middle plate body 111. Each of the plurality of first pockets 113 defined by the plurality of first pocket partition walls 114 does not form an independent space, and is mutually connected to allow air flow. The first pocket 113 is closed by coupling the first cover 130 to one surface of the middle plate body 111. Air is introduced into the first pocket 113 through the first air inlet 132 provided in the first cover 130, and air from the first pocket 113 is removed through the first air flow path 117. It will flow into one slit (160).

The plurality of first pocket partition walls 114 are spaced apart in the longitudinal direction of the middle plate body 111. The first pocket partition wall 114 is disposed parallel to the air flow direction in the first air flow path 117. A first partition wall chamfer portion 115 is provided at an end of the first pocket partition wall 114. The first partition wall chamfer portions 115 are provided on both sides of the ends of the first pocket partition wall 114 in a curved shape, respectively. The air flowing into the first pocket 113 is guided by the intermediate portion of the first partition wall chamfer portion 115 and the first pocket partition wall 114 to smoothly flow toward the first air flow path 117. In addition, the plurality of first pocket partition walls 114 may serve to reinforce the strength of the middle plate 110 so that the middle plate 110 having a length longer than the width is not easily bent or deformed.

The first air flow path 117 is provided on one surface of the middle plate body 111 in a shape in which one surface of the middle plate body 111 is shallower than the first pocket 113. The first air flow path 117 is disposed between the first pocket 113 and the first slit 160 to guide the air in the first pocket 113 to the first slit 160.

The first reinforcement boss 120 is integrally provided with the middle plate body 111 so as to protrude from one surface of the middle plate body 111. A plurality of first reinforcing bosses 120 are spaced apart in the longitudinal direction of the middle plate body 111 in the middle of the first air flow path 117. The plurality of first reinforcement bosses 120 and the middle plate body 111 by contacting the first cover body 131 of the first cover 130 when the first cover 130 is coupled to the middle plate 110 The first cover body 131 may be supported.

In this way, the plurality of first reinforcement bosses 120 connect the middle plate 110 and the first cover 130 between the middle plate 110 and the first cover 130, thereby making the middle longer than the width. The plate 110 and the first cover 130 are not bent or deformed, and a solid and stable bonding state can be maintained.

The first reinforcement boss 120 includes a first boss body 121 disposed parallel to the air flow direction in the first air flow path 117, and a first pocket at one end of the first boss body 121 (113) a pair of concavely recessed inside the first boss body 121 symmetrically left and right on both sides of the first boss arch portion 122 provided convexly to the side, and the other ends of the first boss body 121 It includes a first boss guide portion 123. The end of the first boss body 121 by the pair of first boss guide portions 123 is made to a shape that gradually decreases in width as it goes toward the first slit 160.

The structure of the first reinforcing boss 120 is a structure capable of minimizing the flow resistance of air flowing from the first pocket 113 to the first slit 160. That is, since the first boss arch portion 122 is formed in a substantially semicircular shape, and the curved portion thereof faces the first pocket 113, the air in the first pocket 113 is of the first boss arch portion 122. It is possible to smoothly enter the first air flow path 117 along the edge curved surface. In addition, since the pair of first boss guide portions 123 provided symmetrically to the other end of the first boss body 121 is formed in a concavely recessed shape inside the first boss body 121, the first boss Air flowing along both sides of the body 121 is smoothly collected in the direction of the central axis of the first boss body 121 along the concave curved surface of the first boss guide portion 123 to flow toward the first slit 160. .

Therefore, even if a plurality of first reinforcing bosses 120 are disposed in the first air flow path 117, the air in the first pocket 113 flows smoothly along the first air flow path 117, the first slit 160 Can flow to the side. In addition, air is uniformly supplied to the entire first slit 160, and air may be uniformly sprayed to the substrate 10 through the entire first slit 160.

A first boss coupling hole 124 is provided in the middle of the first boss body 121. The first boss coupling hole 124 may be provided in the form of a screw hole, the fixing member 170 for coupling the middle plate 110 and the first cover 130 to the first boss coupling hole 124 is screwed Can be combined.

Although the drawings show that the first boss body 121 is provided with two first boss coupling holes 124, the number of first boss coupling holes 124 provided in the first boss body 121 varies. Can be changed.

In addition, the shapes of the first boss body 121, the first boss arch portion 122, and the first boss guide portion 123 are not limited to those shown and may be variously changed.

The first middle plate injection guide unit 125 is provided at one end of one surface of the middle plate body 111 to guide air flowing along the first air flow path 117 to be sprayed on the surface of the substrate 10. . The first middle plate spraying guide unit 125 bends the flow direction of air flowing along the first air flow path 117 and guides it to the substrate 10 side. That is, the first middle plate injection guide unit 125 guides air flowing along the first air flow path 117 so that air is injected in an inclined direction with respect to the surface of the substrate 10. Therefore, air flowing along the first middle plate spraying guide portion 125 may be injected at an angle to the surface of the substrate 10.

The second middle plate spraying guide unit 127 is configured to guide the air flowing along the second air flow path 148 from the other surface of the middle plate body 111 to be sprayed on the surface of the substrate 10 ( 111) is disposed to face the first middle plate spraying guide portion 125 at one end of the other surface. The second middle plate injection guide unit 127 guides air flowing along the second air flow path 148 toward the substrate 10 in the flow direction. Therefore, air flowing along the second middle plate spraying guide portion 127 may be sprayed perpendicularly to the surface of the substrate 10.

In addition, a plurality of middle plate coupling holes 128 are provided in the middle plate 110. The plurality of middle plate coupling holes 128 are disposed at the edge and middle of the middle plate body 111 so that the fixing member 170 for coupling with the first cover 130 and the second cover 140 can be inserted. .

1, 2, 6 and 7, the first cover 130 includes a first cover body 131 coupled to one surface of the middle plate body 111 and a first of the middle plate 110. It has a first cover injection guide portion 134 corresponding to the middle plate injection guide portion 125. The first cover body 131 is coupled to the middle plate body 111 so that one surface thereof faces one surface of the middle plate body 111 facing the one surface of the middle plate body 111.

A first air inlet 132 for supplying air to the first pocket 113 disposed between the middle plate 110 and the first cover body 131 is provided in the middle of the first cover body 131. A plurality of first air inlets 132 are respectively disposed at positions corresponding to the plurality of first pockets 113 so as to supply air to each of the plurality of first pockets 113. The first air inlet 132 is connected to an external air supply device (not shown), and a first air supply pipe 180 for supplying air is connected.

The first cover injection guide part 134 is provided at one end of one surface of the first cover body 131 to guide air flowing along the first air flow path 117 to be sprayed on the surface of the substrate 10. . The first cover injection guide portion 134 is disposed to face the first middle plate injection guide portion 125 of the middle plate 110 and faces the first air flow path together with the first middle plate injection guide portion 125 The flow direction of air flowing along (117) is bent and guided toward the substrate (10). A first slit 160 for injecting air flowing along the first air flow path 117 toward the substrate 10 between the first cover injection guide portion 134 and the first middle plate injection guide portion 125 ) Is prepared. The air injected from the first slit 160 may be injected at an angle to the surface of the substrate 10.

In addition, a plurality of first cover coupling holes 135 are provided in the first cover 130. The plurality of first cover coupling holes 135 are arranged at the edges and middle of the first cover body 131 so that the fixing member 170 for coupling the middle plate 110 and the first cover 130 can be inserted. do.

1, 2, 8 to 11, the second cover 140 includes a second cover body 141 coupled to the other surface of the middle plate body 111 and a second cover body 141. A plurality of second pockets 143 provided on one surface, a second air flow path 148 connected to a plurality of second pockets 143 and an air flow to one surface of the second cover body 141, and 2 A plurality of second reinforcing bosses 150 disposed in the middle of the air flow path 148, and a second cover injection guide portion 156 corresponding to the second middle plate injection guide portion 127 of the middle plate 110 ). The second cover body 141 is coupled to the middle plate body 111 so that one surface thereof faces the other surface of the middle plate body 111 facing the other surface of the middle plate body 111.

The second pocket 143 is provided on one surface of the second cover body 141 in a partially dug shape of the second cover body 141. The second pocket 143 is divided into a plurality by the plurality of second pocket partition walls 144 disposed on one surface of the second cover body 141. Each of the plurality of second pockets 143 partitioned by the plurality of second pocket partition walls 144 does not form an independent space, and is mutually connected to allow air flow. The second pocket 143 is closed by bonding the other surface of the middle plate body 111 and one surface of the second cover body 141. The second pocket 143 receives air through the second air inlet 147 provided in the middle of the second cover body 141. A plurality of second air inlets 147 are respectively disposed at positions corresponding to the plurality of second pockets 143 so as to supply air to the plurality of second pockets 143, respectively. The second air inlet 147 is connected to an external air supply device, and a second air supply pipe 182 for supplying air is connected.

The plurality of second pocket partition walls 144 are spaced apart in the longitudinal direction of the second cover body 141. The second pocket partition wall 144 is disposed parallel to the air flow direction in the second air flow path 148. A second partition wall chamfer portion 145 is provided at an end of the second pocket partition wall 144. The second partition wall chamfer portions 145 are provided on both sides of the ends of the second pocket partition wall 144, respectively, in a curved shape. The air introduced into the second pocket 143 is guided by the middle portion of the second partition wall chamfer portion 145 and the second pocket partition wall 144 to smoothly flow toward the second air flow path 148. In addition, the plurality of second pocket partition walls 144 may serve to reinforce the strength of the second cover 140 so that the second cover 140 having a length longer than the width is not easily bent or deformed.

The second air flow path 148 is provided on one surface of the second cover body 141 in a shape in which one surface of the second cover body 141 is shallower than the second pocket 143. The second air flow path 148 is disposed between the second pocket 143 and the second slit 162 to guide the air in the second pocket 143 to the second slit 162.

The second reinforcing boss 150 is integrally provided with the second cover body 141 so as to protrude from one surface of the second cover body 141. A plurality of second reinforcing bosses 150 are spaced apart in the longitudinal direction of the second cover body 141 in the middle of the second air flow path 148. The plurality of second reinforcing bosses 150 come into contact with the other surfaces of the middle plate body 111 when the second cover 140 is coupled to the middle plate 110, thereby providing a middle plate body 111 and a second cover body 141. ). As such, a plurality of second reinforcing bosses 150 connect the middle plate 110 and the second cover 140 between the middle plate 110 and the second cover 140, thereby making the middle longer than the width. The plate 110 and the second cover 140 may not be bent or deformed, and a solid and stable bonding state may be maintained.

The second reinforcing boss 150 has a structure corresponding to the first reinforcing boss 120 described above. That is, the second reinforcing boss 150 includes a second boss body 151 disposed in parallel to the air flow direction in the second air flow path 148, and one end of the second boss body 151. 2 The second boss arch portion 152 provided convexly toward the pocket 143 and the other end of the second boss body 151 symmetrically left and right symmetrically inside the second boss body 151 It includes a pair of second boss guide portion 153. The end of the second boss body 151 by the pair of second boss guide portions 153 is formed to gradually decrease in width as it goes toward the second slit 162.

The structure of the second reinforcing boss 150 is a structure capable of minimizing the flow resistance of air flowing from the second pocket 143 to the second slit 162. That is, since the second boss arch portion 152 is formed in a substantially semicircular shape, and the curved portion thereof faces the second pocket 143, the air in the second pocket 143 of the second boss arch portion 152 It is possible to smoothly enter the second air flow path 148 along the edge curved surface. In addition, since the pair of second boss guide portions 153 provided symmetrically to the other end of the second boss body 151 is formed in a concavely recessed shape inside the second boss body 151, the second boss Air flowing along both sides of the body 151 is smoothly collected in the direction of the central axis of the second boss body 151 along the concave curved surface of the second boss guide portion 153 to flow toward the second slit 162. . Therefore, even if a plurality of second reinforcing bosses 150 are disposed in the second air flow path 148, the air in the second pocket 143 is smoothly along the second air flow path 148, and the second slits 162 It can flow to the side, the air is uniformly supplied to the entire second slit 162, the air can be uniformly sprayed toward the substrate 10 through the entire second slit 162.

A second boss coupling hole 154 is provided in the middle of the second boss body 151. The second boss coupling hole 154 may be provided in the form of a screw hole, the fixing member 170 for coupling the middle plate 110 and the second cover 140 to the second boss coupling hole 154 is screwed Can be combined.

Although the drawings show that the second boss body 151 is provided with two second boss coupling holes 154, the number of second boss coupling holes 154 provided in the second boss body 151 varies. Can be changed.

In addition, the shapes of the second boss body 151, the second boss arch portion 152, and the second boss guide portion 153 are not limited to those shown and may be variously changed.

The second cover injection guide part 156 is provided on one surface of the second cover body 141 in a form in which one surface of the second cover body 141 is shallower than the second air flow path 148. The second cover injection guide part 156 is disposed at one end of the second cover body 141 to guide air flowing along the second air flow path 148 to be sprayed on the surface of the substrate 10. Can be. The second cover injection guide portion 156 is disposed to face the second middle plate injection guide portion 127 of the middle plate 110 and faces the second air flow path together with the second middle plate injection guide portion 127 Air flowing along (148) is guided toward the substrate (10). Between the second cover injection guide portion 156 and the second middle plate injection guide portion 127, a second slit 162 for injecting air flowing along the second air flow path 148 toward the substrate 10 side ) Is prepared. The air injected from the second slit 162 may be injected approximately perpendicular to the surface of the substrate 10.

In addition, a plurality of second cover coupling holes 158 are provided in the second cover 140. The plurality of second cover coupling holes 158 are arranged at the edges and the middle of the second cover body 141 so that the fixing member 170 for coupling the middle plate 110 and the second cover 140 can be inserted. do.

As described above, the dual slit air knife 100 according to an embodiment of the present invention is a substrate such that the first slit 160 and the second slit 162 face the substrate 10 as shown in FIG. 1. (10) is arranged during the transport path. Specifically, the dual slit air knife 100 is the transfer direction of the substrate 10 so that the air injected from the first slit 160 can be injected to the substrate 10 before the air injected from the second slit 162 With respect to the first slit 160 is disposed to be located upstream of the second slit 162.

During the drying operation, air injected from the first slit 160 is sprayed at an angle to the surface of the substrate 10 and wipes the cleaning liquid on the surface of the substrate 10 in a direction opposite to the transport direction of the substrate 10. In addition, the air injected from the second slit 162 is vertically injected to the surface of the substrate 10 to completely remove the cleaning solution that is not removed by the air injected from the first slit 160 from the surface of the substrate 10 Can be.

As described above, the dual slit air knife 100 according to an embodiment of the present invention has a simple structure, and doubles air on the surface of the substrate 10 with the first slit 160 and the second slit 162. By spraying, the substrate 10 can be dried by effectively removing the cleaning liquid or moisture remaining on the surface of the substrate 10.

In addition, in the dual slit air knife 100 according to an embodiment of the present invention, a plurality of first pockets 113 on one surface of the middle plate 110 is provided by the first pocket partition wall 114 of the middle plate 110. By being spaced apart in the longitudinal direction and being supplied with air to each of the first pockets 113, air can be more strongly and uniformly injected through the first slits 160 arranged in the width direction of the substrate 10. . In addition, a plurality of second pockets 143 are arranged on the other surface of the middle plate 110 in the longitudinal direction of the middle plate 110 by the second pocket partition wall 144, and air is provided in each second pocket 143. By being supplied, it is possible to blow the air more strongly and uniformly through the second slit 162 disposed long in the width direction of the substrate 10. Accordingly, the cleaning liquid removal and drying efficiency for the substrate 10 is excellent, and the drying time of the substrate 10 can be shortened.

In addition, the dual slit air knife 100 according to an embodiment of the present invention has a plurality of first reinforcement bosses 120 between the middle plate 110 and the first cover 130, the length of the middle plate 110 A plurality of second reinforcing bosses 150 are spaced along the direction of the middle plate 110 between the middle plate 110 and the second cover 140, so that the middle plate 110 is spaced apart. ) And the first cover 130 and the second cover 140 may maintain a firmly coupled state with each other.

In addition, the dual slit air knife 100 according to an embodiment of the present invention allows a plurality of first reinforcement bosses 120 to mutually support them between the middle plate 110 and the first cover 130, and By allowing the second reinforcing boss 150 to mutually support them between the middle plate 110 and the second cover 140, they are not bent or deformed during use despite being formed in a structure having a length longer than the width. Accordingly, the first slit 160 and the second slit 162 can uniformly and stably blow air to the substrate 10 while maintaining a straight shape in the width direction of the substrate 10.

In addition, the dual slit air knife 100 according to an embodiment of the present invention includes a first air flow path 117 in which the first reinforcement boss 120 connects the first pocket 113 and the first slit 160. By being arranged in a structure capable of minimizing the flow resistance of air, air is uniformly supplied to the entire first slit 160 to uniformly spray air through the entire first slit 160 toward the substrate 10 side. have. In addition, the second reinforcing boss 150 is disposed in a structure capable of minimizing the flow resistance of air in the second air flow path 148 connecting the second pocket 143 and the second slit 162, so that the second Air is uniformly supplied to the entire slit 162 to uniformly jet air to the substrate 10 through the entire second slit 162. Therefore, it is possible to improve the drying efficiency of the substrate compared to the prior art.

The present invention has been described as a preferred example, but the scope of the present invention is not limited to the form described and illustrated above.

For example, in the drawing, a first pocket 113 and a first air flow path 117 disposed between the middle plate 110 and the first cover 130 partially form one surface of the middle plate 110. Although shown as being provided on one surface of the middle plate body 111, the first pocket and the first air flow path are provided in a groove shape on one surface of the first cover 130, or in various other forms. It may be provided between the middle plate 110 and the first cover 130.

In addition, in the drawing, the second pocket 143 and the second air flow path 148 disposed between the middle plate 110 and the second cover 140 are partially dug in one surface of the second cover 140. Although shown as being provided on one surface of the second cover body 141, the second pocket and the second air flow path may be provided in a groove shape on the other surface of the middle plate body 111, or in various other forms. It may be provided between the middle plate 110 and the second cover 140.

In addition, although the drawing shows that the first reinforcing boss 120 is integrally provided with the middle plate body 111 so as to protrude from one surface of the middle plate body 111, the first reinforcing boss 120 includes the first cover. It may be provided integrally with the first cover body 131 so as to protrude from one surface of the body 131, or may be provided between the middle plate 110 and the first cover 130 in various other forms.

In addition, although the drawing shows that the second reinforcing boss 150 is integrally provided with the second cover body 141 so as to protrude from one surface of the second cover body 141, the second reinforcing boss 150 is a middle It may be provided integrally with the middle plate body 111 to protrude from the other surface of the plate body 111, or may be provided between the middle plate 110 and the second cover 140 in various other forms.

In addition, in the drawing, although the first slit 160 injects air at an angle to the surface of the substrate 10, the second slit 162 shows air as perpendicular to the surface of the substrate 10, The air injection angles of the first slits 160 and the second slits 162 may be variously changed. In the case of the second slit 162, the configuration of injecting air perpendicular to the surface of the substrate 10 is not limited to the configuration, and the air injecting angle of the substrate 10 is greater than that of the first slit 160. It can be modified in a variety of different configurations that can inject air onto the surface.

In addition, in the drawing, the second cover spraying guide portion 156 is provided on one surface of the second cover body 141 in a form in which one surface of the second cover body 141 is shallower than the second air flow path 148. 2 It has been shown that the second slit 162 is formed together with the middle plate spraying guide portion 127, but the second cover spraying guide portion may be provided on the same surface as one surface of the second cover body 141. In this case, the second middle plate spraying guide portion may be provided in a groove shape on the other surface of the middle plate body to form a second slit together with the second cover spraying guide portion.

In addition, the number or shape of the first pocket 113 and the second pocket 143, the arrangement structure, the number or shape of the first air flow path 117 and the second air flow path 148, and the arrangement structure are illustrated. It is not limited to the above and can be variously changed.

Above, the present invention has been shown and described in connection with a preferred embodiment for illustrating the principles of the present invention, but the present invention is not limited to the configuration and operation as described and described as such. Rather, those skilled in the art will appreciate that many changes and modifications to the present invention are possible without departing from the spirit and scope of the appended claims.

100: dual slit air knife 110: middle plate
111: middle plate body 113: first pocket
114: first pocket partition wall 115: first partition wall chamfer
117: 1st air flow path 120: 1st reinforcement boss
121: 1st boss body 122: 1st boss arch part
123: 1st boss guide part 124: 1st boss coupling hole
125: 1st middle plate spraying guide part
127: 2nd middle plate spraying guide part
130: first cover 131: first cover body
132: 1st air inlet 134: 1st cover injection guide part
140: second cover 141: second cover body
143: second pocket 144: second pocket bulkhead
145: second partition wall chamfer 147: second air inlet
148: second air flow path 150: second reinforcement boss
151: 2nd boss body 152: 2nd boss arch part
153: 2nd boss guide part 156: 2nd cover spraying guide part
160: first slit 162: second slit
170: fixing member 180: first air supply pipe
182: second air supply pipe

Claims (7)

As a dual slit air knife for removing the cleaning liquid on the surface of the substrate by spraying air to the substrate to be transferred through a cleaning process,
A middle plate body, a middle plate having a first middle plate spraying guide portion provided at one end of the middle plate body, and a second middle plate spraying guide portion provided at one end of the other surface of the middle plate body;
A first cover body coupled to the middle plate body so that one surface of the middle plate body faces one surface of the middle plate body, and air between one surface of the middle plate body and one surface of the first cover body. A first air inlet provided in the middle of the first cover body to supply the air, and the first middle to guide air supplied between the middle plate body and the first cover body to be sprayed on the surface of the substrate A first cover having a first cover injection guide portion provided at one end of the first cover body so as to be spaced apart from the plate injection guide portion;
A second cover body coupled to the middle plate body so that one side thereof faces the other side of the middle plate body facing the other side of the middle plate body, and air between the other side of the middle plate body and one side of the second cover body. A second air inlet provided in the middle of the second cover body to supply the, and the second middle to guide the air supplied between the middle plate body and the second cover body to be sprayed on the surface of the substrate A second cover having a second cover injection guide portion provided at one end of the second cover body so as to face away from the plate injection guide portion;
A first pocket connected between the first air inlet and provided between the middle plate body and the first cover body to allow air to flow through the first air inlet;
A first disposed between the first pocket and the first slit to guide the air in the first pocket to the first slit provided between the first middle plate injection guide portion and the first cover injection guide portion Air flow;
A second pocket connected between the second air inlet and provided between the middle plate body and the second cover body to allow air to flow through the second air inlet;
A second disposed between the second pocket and the second slit to guide the air in the second pocket to a second slit provided between the second middle plate injection guide portion and the second cover injection guide portion Air flow;
A plurality of first reinforcement bosses spaced apart in the longitudinal direction of the middle plate in the middle of the first air flow path; And
It includes; a plurality of second reinforcement bosses spaced apart in the longitudinal direction of the middle plate in the middle of the second air flow path;
Dual slit air knife, characterized in that the air injection angle of the first slit to the surface of the substrate is less than the air injection angle of the second slit to the surface of the substrate.
According to claim 1,
The first reinforcing boss includes a first boss body disposed parallel to the air flow direction in the first air flow path, and a first boss provided convexly toward the first pocket at one end of the first boss body. An arch portion, and a pair of first boss guide portions concavely recessed inside and outside the first boss body symmetrically left and right on both sides of the other end portion of the first boss body,
The second reinforcing boss includes a second boss body disposed parallel to the air flow direction in the second air flow path, and a second boss provided convexly toward the second pocket at one end of the second boss body. A dual slit air knife comprising an arch portion and a pair of second boss guide portions that are concavely recessed into the inside of the second boss body symmetrically left and right on both sides of the other end portion of the second boss body.
According to claim 2,
In the middle of the first boss body, a first boss coupling hole is provided in which a fixing member for coupling the middle plate and the first cover is coupled,
A dual slit air knife characterized in that a second boss coupling hole is provided in the middle of the second boss body to which a fixing member for coupling the middle plate and the second cover is coupled.
According to claim 1,
The first pocket and the first air flow path are provided with one surface of the middle plate body partially dug, and the first reinforcement boss protrudes from one surface of the middle plate body to one surface side of the first cover body. Dual slit air knife characterized in that it is provided integrally with the middle plate body.
According to claim 1,
The second pocket and the second air flow path are provided in a partially dug shape of the second cover body, and the second reinforcing boss protrudes from one surface of the second cover body toward the other surface of the middle plate body. Dual slit air knife characterized in that it is provided integrally with the second cover body.
According to claim 1,
The first slit is a dual slit air knife characterized in that it is disposed upstream of the second slit with respect to the transfer direction of the substrate so that air can be injected to the substrate before the second slit.
According to claim 1,
The second slit air knife, characterized in that for injecting air perpendicular to the surface of the substrate.

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