CN103041940B - Fluid ejection apparatus - Google Patents
Fluid ejection apparatus Download PDFInfo
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- CN103041940B CN103041940B CN201210413634.0A CN201210413634A CN103041940B CN 103041940 B CN103041940 B CN 103041940B CN 201210413634 A CN201210413634 A CN 201210413634A CN 103041940 B CN103041940 B CN 103041940B
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Abstract
A kind of device, comprises the fluid feed port for providing fluid; Be connected to described fluid feed port to receive the entrance of described fluid; Be connected to the first buffer part of described entrance; Two or more connecting path be communicated with described first buffer part; The second buffer part be communicated with described connecting path; And be connected to described second buffer part so that described fluid is provided to on-chip outlet.
Description
require priority
The present invention requires apply for the 2011-0104523 korean patent application on October 13rd, 2011 and apply for the priority of 2011-0130789 korean patent application on December 8th, 2011 according to 35U.S.C. § 119, by the mode quoted in full, its content is incorporated in this.
Technical field
Embodiments of the invention relate to fluid ejection apparatus.Embodiments of the invention particularly relate to the fluid ejection apparatus that can prevent fluid breaks.
Technical background
Flat panel display equipment generally comprise there is liquid crystal liquid crystal display (LCD), utilize the plasma display equipment of plasma and there is the OLED (OLED) etc. of organic light-emitting structure.
In panel display apparatus, liquid crystal display is owing to having the advantage such as low in energy consumption, lightweight, operating voltage is low and being used widely in multiple electric device and electronic installation.Liquid crystal display generally includes and utilizes liquid crystal to show the display floater of image.This type of display floater generally by forming circuit structure and obtaining on the glass substrate of larger area.In the process manufacturing display floater, the multiple cell processing such as deposition process, light process, development treatment and etch processes can be repeated to form multiple circuit structure on a glass substrate.
After cell processing has been carried out to glass substrate, usually can carry out cleaning to the substrate with circuit structure.The dust, organic granular and/or the impurity that are attached to substrate can be removed by cleaning.Cleaning can comprise the cleaning step using cleaning solution, described cleaning solution contains deionized water or the chemical substance of dust, organic granular and/or impurity for removing substrate, cleaning also can comprise drying steps, and its jet drying gas (such as air) is to remove cleaning material residual on substrate or circuit structure.
As for cleaning, fluid ejection apparatus generally can be used to be provided on substrate by the fluid of cleaning solution or dry gas and so on.Fluid ejection apparatus can comprise the fluid comprising cleaning solution or dry gas is provided to on-chip nozzle.Like this, nozzle is connected to fluid storage tank by connecting path, and the fluid through connecting path in fluid storage tank is ejected on substrate by nozzle.But when having foreign matter or particle in connecting path, in connecting path, the flowing of fluid may be interfered, thus causes the fluid be present in nozzle to divide.Therefore, although carried out cleaning to whole substrate, and fluid may be provided to certain part of substrate, make display screen production declining also can cause circuit structure fault.
Summary of the invention
Illustrative examples of the present invention provides a kind of fluid ejection apparatus, and it is by preventing the efficiency improving cleaning from the fluid generation division two of nozzle ejection.
According to illustrative examples, provide a kind of fluid ejection apparatus.Described fluid ejection apparatus comprises the fluid feed port for providing fluid; Be connected to described fluid feed port to receive the entrance of described fluid; Be connected to the first buffer part of described entrance; Article two, the connecting path be communicated with described first buffer part more than; The second buffer part be communicated with described connecting path; And be connected to described second buffer part so that described fluid is provided to on-chip outlet.
In illustrative examples, described connecting path is provided for the fluid passage of described fluid respectively, and described fluid passage has substantially the same or close size respectively.
In illustrative examples, described connecting path comprises the first connecting path of narrow slit shape substantially and the second connecting path of narrow slit shape substantially, and described outlet is narrow slit shape substantially.First width of described first connecting path and the second width sum of described second connecting path are greater than the width of described outlet substantially, and described first width and described second width are less than the width of described outlet separately substantially.Such as, the first width of described first connecting path and the second width of described second connecting path are about 0.15mm separately, and the width of described outlet is about 0.2mm.
In illustrative examples, described first buffer part and described second buffer part respectively comprise multiple stop part.Such as described first buffer part comprises the first substantially mutually corresponding stop part and the second stop part, and described second buffer part comprises mutually corresponding the 3rd stop part substantially and the 4th stop part.
In illustrative examples, described first buffer part comprises the partition wall in multiple direction along described fluid flowing.Described partition wall prevents described fluid from flowing along the direction perpendicular to the direction of described fluid flowing.
According to illustrative examples, provide a kind of fluid ejection apparatus, it comprises the fluid feed port for providing fluid; Be connected to described fluid feed port to receive the entrance of described fluid; Be connected to the first buffer part of described entrance; Connecting path on connecting path and second on be communicated with described first buffer part first; The second buffer part be communicated with connecting path on described first and second; The first time connecting path be communicated with described second buffer part and second time connecting path; The 3rd buffer part be communicated with described first and second times connecting paths; And be connected to described 3rd buffer part so that described fluid is provided to on-chip outlet.
In illustrative examples, on first and second, connecting path is narrow slit shape substantially separately, and wherein first and second times connecting paths are narrow slit shape substantially separately, and described outlet is narrow slit shape substantially.
In illustrative examples, on described first connecting path the first width and described second on the second width sum of connecting path be substantially greater than the 3rd width of described first time connecting path and the 4th width sum of described second time connecting path, and described 3rd width and described 4th width sum are greater than the width of described outlet substantially.On described first, the first width of connecting path is substantially the same or close with the second width of connecting path on described second, and the 3rd width of described first time connecting path is substantially the same or close with the 4th width of described second time connecting path.Such as, described first width and described second width are about 0.2mm separately, and described 3rd width and described 4th width are about 0.15mm separately, and the width of described outlet is about 0.2mm.
In illustrative examples, described first buffer part, described second buffer part and described 3rd buffer part comprise a pair mutually corresponding stop part separately.
In illustrative examples, described in the first buffer part, described second buffer part and described 3rd buffer part one comprise the partition wall in multiple direction along described fluid flowing.Described partition wall prevents described fluid from flowing along the direction perpendicular to the direction of described fluid flowing.
Have in the fluid ejection apparatus according to the said structure of illustrative examples, many connecting paths can by be used for spraying a fluid into on-chip outlet be connected to for from fluid feed port by fluid towards exporting the entrance provided, the fluids such as cleaning solution, rinsing liquid, air can be supplied to entrance by described fluid feed port.Like this, described many connecting paths can be set to various structures, the multi-channel structure such as between entrance and exit or multilevel hierarchy.If foreign matter or particle are present in wherein in a connecting path, then this foreign matter or particle cannot arrive outlet, and fluid can sufficiently pass through the flowing of other connecting paths, thus effectively can prevent the division from outlet fluid out.Therefore, the operational stability of fluid ejection apparatus is promoted, and uses the productive rate of the process of this device to be increased.In addition, when many connecting paths are set to multilevel hierarchy, such as, arrange connecting path and many lower connecting paths on many in fluid ejection apparatus, the multistage connecting path with different cross section can hinder foreign matter and/or particle according to the size of foreign matter and/or particle.Simultaneously, when many connecting paths are set to multi-channel structure, such as, the first connecting path, the second connecting path and the 3rd connecting path being set in fluid ejection apparatus, advantageously controlling fluid pressure, fluid flow and fluid velocity by reducing the cross section of connecting path.
Accompanying drawing explanation
With reference to accompanying drawing, its other features above-mentioned of the present invention can be more clearly understood by describing specific embodiment of the present invention, wherein:
Fig. 1 is the plane of the fluid ejection apparatus illustrated according to the embodiment of the present invention;
Fig. 2 is the sectional view of the I-II line along Fig. 1 of fluid ejection apparatus;
Fig. 3 is the first connecting path of the fluid ejection apparatus that Fig. 2 is shown and the amplification view of the second connecting path;
Fig. 4 is the sectional view of the fluid ejection apparatus illustrated according to some illustrative examples;
Fig. 5 is the sectional view of the fluid ejection apparatus illustrated according to other illustrative examples.
Detailed description of the invention
See the accompanying drawing that embodiment is shown, hereafter various embodiment will be described in more detail.But the present invention can realize in many different forms, and should not be construed as by the restriction in the embodiment of this proposition.On the contrary, it is abundant and complete open in order to reach for proposing these embodiments, and makes those skilled in the art understand scope of the present invention completely.In these accompanying drawings, for clarity sake, may be exaggerated size and the relative size in layer and region.
Should understand, when element or layer are called another element or layer " on ", when " being connected to " or " being coupled to " another element or layer, it can be and directly connects or be coupled to other element or layer on another element or layer, directly, or there is the element or layer that occupy therebetween.In contrast, when element being called " directly on another element or layer ", " being connected directly to " or " coupling directly to " another element or layer, there is not the element or layer that occupy therebetween.In whole part description, close label represents close element.As used herein, term " and/or " comprise any or all combination of one or more relevant Listed Items.
Although should be understood that and use the statement such as first, second, third, fourth to describe multiple element, assembly, region, layer and/or part herein, these elements, assembly, region, layer and/or part are by the restriction of these terms.These terms only come for making an element, assembly, region, layer or partly distinguishing with another region, layer or part.Thus, hereafter be referred to as the first element, assembly, region, layer or part and also can be described as the second element, assembly, region, layer or part, and do not depart from instruction of the present invention.
With the statement of space correlation, as " ... under ", " in ... below ", D score, " ... on ", " on " etc., using in this article is relation in order to easily state an element as shown in the figure or parts and another element or parts.Should be understood that the statement of these and space correlation is except orientation shown in figure, be also intended to contain this equipment in the different azimuth used or in work.Such as, if this equipment upset in figure, be described as other element or parts " below " or " under " equipment then can be defined as other element or parts " on ".Thus, this exemplary statement " ... below " can contain " ... top " with " ... below " both simultaneously.This equipment can be other towards (90-degree rotation or other towards), and used herein these also do corresponding explanation to the statement of space correlation.
Statement used herein only for describing specific embodiment, and is not intended to limit the present invention.As described herein, the article of singulative is intended to comprise plural form, unless its context is expressed.Will also be understood that, when using statement " comprising " in this description, specify that the parts described by existence, entirety, step, operation, element and/or assembly, but do not get rid of existence or be attached with other parts one or more, entirety, step, operation, element, assembly and/or their combination.
For embodiments of the invention, be describe with reference to the schematic sectional view of idealized embodiments of the present invention (and intermediate structure) herein.Like this, expection can produce the change such as caused because of manufacturing process and/or tolerance in shape.Thus, embodiments of the invention should not be construed as and are constrained to specific region shown in this article shape, also should comprise, the form variations such as caused because of manufacture.Such as, the implanted region showing for rectangle generally has and is formed as circular or curved part, and/or the gradient of its edge's implant concentration is not change from implanted region to the binary of non-implanted region.Similarly, by implant is formed imbed region and can imbed some implantation formed in the region occurring between region and surface to implant.Thus, the essence in the region shown in figure is schematic, and its shape be not intended to the true form that component area is shown, be also not intended to limit scope of the present invention.
Unless described in detail separately, it is consistent that the meaning and the those skilled in the art of all terms (comprising scientific and technical terminology) used herein understand usually.Should also be understood that the term defined in such as general dictionary should be interpreted as consistent with the meaning in correlative technology field, and should not be construed as Utopian or excessively mechanical implication, clearly define unless separately had in the text.
The present invention is described in detail hereinafter with reference to accompanying drawing.
Fig. 1 is the plane of the fluid ejection apparatus illustrated according to the embodiment of the present invention.Fig. 2 is the sectional view of the I-II line along Fig. 1 of fluid ejection apparatus.
With reference to figure 1 and Fig. 2, the fluid of knife-edge substantially can be provided to the substrate 10 for flat panel display equipment by fluid ejection apparatus 100.In illustrative examples, by the process manufacturing flat panel display equipment, while first direction D1 mobile substrate 10, fluid can be provided to the predetermined process of substrate 10 carrying out cleaning or rinsing process and so on to whole substrate 10.Such as, cleaning solution or rinsing liquid can be provided on substrate 10 by fluid ejection apparatus 100 in predetermined process.
In predetermined process, transmit substrate 10 by multiple transmission roller 20 along first direction D1.In one exemplary embodiment, multiple transfer roller 20 can be utilized to be predetermined angular twelve Earthly Branches support group ground 10, described predetermined angular is become tiltangleθ relative to the second direction D2 being substantially perpendicular to first direction D1, can easily move down from substrate 10 to make the fluid be provided on substrate 10.Such as, substrate 10 can be transmitted relative to the inclination angle of second direction D2 in about 5 ° ~ about 10 ° of scopes along first direction D1.
Fluid ejection apparatus 100 can extend along the direction being arranged essentially parallel to substrate 10.In illustrative examples, fluid ejection apparatus 100 can extend along the third direction D3 being substantially perpendicular to first direction D1.Herein, third direction D3 tiltable angle can be relative to second direction D2 in about 5 ° ~ about 10 ° scopes.
In illustrative examples, fluid ejection apparatus 100 can comprise top panel 110, lower panel 120, fluid feed port 150 etc.Because top panel 110 and lower panel 120 may be combined with, below can inlet porting 130, first buffer part 132, first connecting path 136, second connecting path 137, second buffer part 134 and export 138 between plate 120 and top panel 110.According to illustrative examples, entrance 130 can be narrow slit shape substantially, and to be provided on substrate 10 by fluid, and the first buffer part 132 can be connected to entrance 130.Such as, the first buffer part 132 can be flute profile substantially.First connecting path 136 can be communicated with the first buffer part 132 respectively with the second connecting path 137, and the second buffer part 134 is also communicated with the second connecting path 137 fluid with the first connecting path 136.Outlet 138 can from the second buffer part 134 to substrate 10 delivering fluids.Such as, outlet 138 also can be narrow slit shape substantially.
In illustrative examples, the upper surface of lower panel 120 can be formed with the lower surface of top panel 110 and contact, to make to form predetermined space between lower panel 120 and top panel 110.Entrance 130, first buffer part 132 and the second buffer part 134, first connecting path 136 and the second connecting path 137 and outlet 138 can be located in this space.
Entrance 130 can be communicated with fluid feed port.Entrance 130 can extend along second direction D2.First buffer part 132 can be connected to entrance 130.In illustrative examples, the first stop part 160 can be located in the first buffer part 132, and first stop part of fluid in the first buffer part 132 (dam portion) 160.Thus, can equably fluid be provided on substrate 10.
In some illustrative examples, the second stop part 161 can be additionally set in the first buffer part 132.Like this, the first stop part 160 can be positioned on lower panel 120 that second stop part 161 can be positioned under the second panel 110.The space that first stop part 160 can be given prominence to from lower panel 120 and enter between lower panel 120 and top panel 110.In addition, the second stop part 161 also can protrude into this space from top panel 110.First stop part 160 can be substantially corresponding with the second stop part 161.Such as, the first buffer part 132 can comprise multiple substantially mutually corresponding stop part.When the first buffer part 132 is according to the combination of lower panel 110 and top panel 120 and when arranging, the first stop part 160 substantially towards the second stop part 161, can flow through between the first stop part 160 and the second stop part 161 from entrance 130 to make fluid.Herein, measure-alike or close substantially with the second stop part 161 of the size of the first stop part 160.
In illustrative examples, the first connecting path 136 can be communicated with the first buffer part 132.Such as, the first connecting path 136 can extend along second direction D2, and can be narrow slit shape substantially.Second buffer part 134 can be communicated with the first connecting path fluid 136.The 3rd stop part 162 can be had to be arranged in the second buffer part 134, and fluid can through the 3rd stop part 162 in the second buffer part 134.Therefore, can equably fluid be provided on substrate 10.
In some illustrative examples, the 4th substantially corresponding with the 3rd stop part 162 stop part 163 in the second buffer part 134, can be provided with extraly.That is, the second buffer part 134 can comprise multiple substantially mutually corresponding stop part.3rd stop part 162 can be positioned on lower panel 120 that the 4th stop part 163 can be positioned under top panel 110.3rd stop part 162 can protrude from lower panel 120 and enter the space between lower panel 120 and top panel 110.In addition, the 4th stop part 163 also can protrude from top panel 110 and enter this space.When providing second buffer part 134 when lower panel 120 and top panel 110 being combined, the 3rd stop part 162 substantially towards the 4th stop part 163, can flow to make fluid between the 3rd stop part 162 and the 4th stop part 163.Herein, measure-alike or close substantially with the 4th stop part 163 of the size of the 3rd stop part 162.In other illustrative examples, the size of the first stop part ~ the 4th stop part 160,161,162,163 is all substantially the same or close.But the size of the first stop part ~ the 4th stop part 160,161,162,163 can change according to fluid type, plant bulk, treatment conditions etc.
Outlet 138 can extend along second direction D2, and can be communicated with the second buffer part 134.In illustrative examples, outlet 138 can comprise the nozzle of narrow slit shape substantially.Fluid is ejected on substrate 10 by the outlet 138 of narrow slit shape substantially, and the fluid of knife-edge substantially can be provided on substrate 10 thus.
First buffer part 132 between the first buffer part 132 and the second buffer part 134, and can be connected to the second buffer part 134 by the second connecting path 137.In illustrative examples, the second connecting path 137 can comprise and the fluid passage of the first connecting path 136 independently second fluid path.Such as, the first connecting path 136 can be connected with the bottom of the first buffer part 132 with the second buffer part 134, and the second connecting path 137 can be connected with the top of the first buffer part 132 with the second buffer part 134.Therefore, the first connecting path 136 can provide the first fluid path of fluid, and the second connecting path 137 can provide the second fluid path being different from first fluid path.
In illustrative examples, multiple partition wall 140 can be set in the first buffer part 132, to be provided on substrate 10 by fluid well-distributing.Herein, multiple partition wall 40 can be arranged on to equidistant intervals in the first buffer part 132 substantially.First buffer part 132 can be divided into multiple part by partition wall 140.The flow velocity (flow, flow fate) that partition wall 140 controllable flow body flows along second direction D2.Such as, the flow velocity of the fluid made by partition wall 140 remains constant.As previously mentioned, when fluid ejection apparatus 100 has the predetermined angular relative to second direction D2 one-tenth tiltangleθ, the flow velocity flowing through the fluid on fluid ejection apparatus 100 top is less than the flow velocity of the fluid flowing through fluid ejection apparatus 100 bottom substantially.Like this, partition wall 140 flows through the upper and lower of fluid ejection apparatus 100 with can making fluid well-distributing.That is, the flow velocity of the fluid on fluid ejection apparatus 100 top is substantially equal to or the flow velocity of fluid close to fluid ejection apparatus 100 bottom.
Refer now to Fig. 1 and 2, fluid feed port 150 can pass top panel 110, then can be communicated with entrance 130.In addition, fluid feed port 150 can be connected to the fluid supply line 130 that fluid is fed into fluid ejection apparatus 100 by least one.In illustrative examples, fluid ejection apparatus 100 can comprise multiple along second direction D2 with the fluid feed port 150 be substantially equidistantly spaced.Herein, the distance between adjacent fluid supply port 150 is substantially the same with the distance between adjacent partition wall 140 or close.In addition, spaced walls 140 is preferably separately positioned between adjacent fluid supply port 150.The fluid supplied by each fluid feed port 150 can flow between adjacent partition wall 140, with make the fluid be provided on substrate 10 flow velocity can along second direction D2 evenly.
In fluid ejection apparatus 100, the fluid provided by fluid feed port 150 can pass entrance 130, first buffer part 132, first connecting path 136, second connecting path 137 and the second buffer part 134 successively.Then, fluid can be sprayed onto on substrate 10.Like this, after through at least one in the first connecting path 136 and the second connecting path 137, fluid can flow towards outlet 138.
Fig. 3 is the first connecting path 136 of the fluid ejection apparatus 100 that Fig. 2 is shown and the amplification view of the second connecting path 137.
With reference to figure 3, below between plate 120 and top panel 110, all edges defining the surface of the first buffer part 132 and the second buffer part 134 all have rounded shapes substantially.In addition, between the first buffer part 132 and the second buffer part 134, the first stop part ~ the 4th stop part 160,161,162,163 also has rounded shapes substantially.Therefore, although fluid flows through the first buffer part 132 and the second buffer part 134, can prevent the fluid in the first buffer part 132 and the second buffer part 134 from forming eddy current, and the fluid of flowing also can not generate bubble in the first buffer part 132 and the second buffer part 134.
Fluid can flow through the first supply port 150, entrance 130, first buffer part 132, first connecting path 136, second connecting path 137 and the second buffer part 134.Then, can spray a fluid into substrate 10 from outlet 138.In this case, the size of the first connecting path 136 is substantially the same or close with the size of the second connecting path 137, to make the first path-length of the fluid flowing through the first connecting path 136 can be substantially the same or close with the alternate path length of the fluid flowing through the second connecting path 137.Such as, the first connecting path 136 can have the first width, and the second connecting path 137 has second width substantially the same or close with the first width.In addition, the first connecting path 136 can separate substantially the same distance with the first buffer part 132 with the center of the second buffer part 134 respectively with the second connecting path 137.Moreover entrance 130 can be communicated with the central part fluid of the first buffer part 132.Therefore, the first path-length flowing through the fluid of the first connecting path 136 can be substantially the same or close with the alternate path length of the fluid flowing through the second connecting path 137.Thus this structure can prevent pressure drop, and can prevent from flowing through the loss producing the fluid flow caused by the difference of path-length in the fluid of the first connecting path 136 and the second connecting path 137.
According in the fluid ejection apparatus 100 of illustrative examples, the first width of the first connecting path 136 and the second width sum of the second connecting path 137 are greater than the width of outlet 138 substantially.Such as, the first width of the first connecting path 136 is about 0.15mm, and the second width of the second connecting path 137 is about 0.15mm.In addition, the width exporting 138 can be about 0.2mm.Because the first width of the first connecting path 136 and the second width sum of the second connecting path 137 are that the width that about 0.3mm exports 138 can be about 0.2mm; width is greater than the foreign matter of 0.15mm and/or particle can be stuck in the first connecting path 136 and the second connecting path 137; thus, the foreign matter of large-size and/or particle cannot arrive outlet 138.Like this, because the foreign matter of large-size and/or cannot being formed with outlet 138 of particle contact, therefore can effectively prevent from dividing from outlet 138 fluid out.But the above-mentioned size of the first connecting path 136, second connecting path 137 and outlet 138 can change according to the size of fluid ejection apparatus 100 and/or treatment conditions.In addition, the cross section of whole fluid passage can reduce from the first connecting path 136 and the second connecting path 137 towards outlet 138, and like this, while fluid flows from the first connecting path 136 and the second connecting path 137 towards outlet 338, fluid pressure increases.Therefore, due to the pressure drop of fluid and the flow loss of fluid can be reduced further, therefore can ensure that the fluid ejected from outlet 138 has suitable pressure and suitable flow.
Fig. 4 is the sectional view of the fluid ejection apparatus illustrated according to some illustrative examples.In Fig. 4, except the 3rd connecting path 239, the structure of fluid ejection apparatus 200 is substantially the same or close with the structure of the fluid ejection apparatus 100 described with reference to figure 1 ~ 3.
With reference to figure 4, fluid ejection apparatus 200 can comprise top panel 210, lower panel 220, fluid feed port 250, entrance 230, first buffer part 232, first connecting path 236, second connecting path 237, the 3rd connecting path 239, second buffer part 234 and outlet 238 etc.Herein, the first stop part 260 and the second stop part 261 can be located in the first buffer part 232, and the 3rd stop part 262 and the 4th stop part 263 can be located in the second buffer part 234.
In this illustrative examples, the 3rd connecting path 239 can be located between the first connecting path 236 and the second connecting path 237.First buffer part 232 can be connected to the second buffer part 234 by the first ~ three connecting path 236,237 and 239.The size of the 3rd connecting path 239 is substantially the same or close with the size of the first connecting path 236 and/or the second connecting path 237.Such as, the 3rd connecting path 239 can have three width substantially the same or close with the second width of the first width of the first connecting path 236 and/or the second connecting path 237.
In illustrative examples, the first width of the first ~ three connecting path 236,237 and 239 is greater than the width of outlet 238 substantially to the 3rd width sum.Such as, the first width of the first connecting path 236 is about 0.1mm, and the second width of the second connecting path 237 is about 0.1mm, and the second width of the 3rd connecting path 239 is about 0.1mm.Herein, the width exporting 238 can be about 0.2mm.First width of the first ~ three connecting path 236,237 and 239 is greater than the width of outlet 238 substantially to the 3rd width sum.Therefore, width is greater than the foreign matter of 0.1mm and/or particle can be stuck in the first connecting path 236, second connecting path 237 and the 3rd connecting path 239, like this, the foreign matter of large-size and/or particle cannot pass outlet 238.Like this, can effectively prevent because exporting in 238 the foreign matter and/or particle that there is large-size and dividing from outlet 238 fluid out of causing.But, can changing according to the size of fluid ejection apparatus 200 and/or treatment conditions with the above-mentioned size of outlet 238 of the first ~ three connecting path 236,237 and 239.In addition, the cross section of whole fluid passage can reduce from the first ~ three connecting path 236,237 and 239 towards outlet 238, increases to make the pressure of fluid flow towards outlet 238 along with fluid.Therefore, due to the pressure drop of fluid and the flow loss of fluid can be reduced further, therefore can ensure that the fluid ejected from outlet 238 has suitable pressure and suitable flow.
Fluid ejection apparatus 100 as shown in Figures 1 to 3 or the fluid ejection apparatus 200 shown in Fig. 4 are equally, according in the fluid ejection apparatus of other illustrative examples, by regulate the quantity of connecting path, the size of connecting path and outlet size and obtain required Fluid injection pressure and/or required flow.
Fig. 5 is the sectional view of the fluid ejection apparatus illustrated according to other illustrative examples.Except the 3rd buffer part 340, first time connecting path 341, second time connecting path 342, the 5th stop part 364 and the 6th stop part 365, the structure of the fluid ejection apparatus 300 shown in Fig. 5 is substantially the same or close with the structure of the fluid ejection apparatus 100 described with reference to figure 1 ~ 3.
With reference to figure 5, fluid ejection apparatus 300 can comprise connecting path 337, second buffer part 334, first time connecting path 341, second time connecting path 342, the 3rd buffer part 340 and outlet 338 etc. on connecting path 336, second in top panel 310, lower panel 320, fluid feed port 350, entrance 330, first buffer part 332, first.
In illustrative examples, the 3rd buffer part 340 can along after the direction that fluid flows be positioned at the first buffer part 332 and the second buffer part 334 in the space between top panel 310 and lower panel 320.Such as, the second buffer part 334 can be located between the first buffer part 332 and the 3rd buffer part 340, and the 3rd buffer part 340 can be located between the second buffer part 334 and outlet 338.Herein, the structure of the 3rd buffer part 340 is substantially the same or close with the structure of the first buffer part 332 and/or the second buffer part 334.
On first, on connecting path 336 and second, the first buffer part is connected to the second buffer part 334 by connecting path 337.Such as, connecting path 336 is substantially the same or close with the second connecting path 137 with the first connecting path 136 described with reference to figure 1 ~ 3 respectively with the structure of connecting path on second 337 on first.Meanwhile, the second buffer part 334 is connected to the 3rd buffer part 340 by first time connecting path 341 and second time connecting path 342.In illustrative examples, first time connecting path 341 is substantially the same or close with the structure of connecting path 337 on connecting path on first 336 and second respectively with the structure of second time connecting path 342.
According to illustrative examples, on first, on connecting path 336 and second, the second width sum of connecting path 337 is greater than the width sum of first time connecting path 341 and second time connecting path 342 substantially.In addition, the width sum of first time connecting path 341 and second time connecting path 342 is greater than the width of outlet 338 substantially.Such as, on first, the first width of connecting path 336 is about 0.2mm, and on second, second width of connecting path 337 is about 0.2mm.3rd width of first time connecting path 341 is about 0.15mm, and the 4th width of second time connecting path 342 is about 0.15mm.In addition, the width exporting 338 can be about 0.2mm.Therefore, on first, on connecting path 336 and second, the second width sum of connecting path 337 is about 0.4mm, and it is greater than the width sum of first time connecting path 341 and second time connecting path 342 substantially.The width sum of first time connecting path 341 and second time connecting path 342 is greater than the width of outlet 338 substantially.Width is greater than the foreign matter of 0.2mm and/or particle and is stuck on first on connecting path 336 and second in connecting path 337; and width is greater than the foreign matter of 0.15mm and/or particle can be stuck in first time connecting path 341 and second time connecting path 342; like this, the foreign matter of large-size and/or particle cannot arrive outlet 138.Therefore, can effectively prevent from by stoping the foreign matter of large-size and/or particle to enter outlet 338 dividing from outlet 238 fluid out.In addition, the cross section of whole fluid passage roughly can reduce towards outlet 338 from connecting path 337 on connecting path first 336 and second via first time connecting path 341 and second time connecting path 342.When on connecting path fluid is from first 336 and second, connecting path 337 flows towards outlet 338, fluid pressure increases.Therefore, due to the flow loss of the pressure drop and fluid that prevent fluid, thus can ensure, from exporting the fluid ejected, there is suitable pressure and suitable flow.
In some illustrative examples, fluid ejection apparatus 300 also additionally can comprise the 5th stop part 364 and the 6th stop part 365.Such as, the 3rd buffer part 340 can have the 5th stop part 364 and six stop part 365 substantially corresponding with the 5th stop part 364.Like this, the 5th stop part 364 can be located on lower panel 320, and the 6th stop part 365 can plate located in the above 310 times.When arranging the 3rd buffer part 340 according to the combination of lower panel 320 and top panel 310,5th stop part 364 and the 6th stop part 365 can be arranged in the 3rd buffer part 340,5th stop part 364 can substantially towards the 6th stop part 365 simultaneously, like this, fluid can flow between the 5th stop part 364 and the 6th stop part 365.Herein, the size of the 5th stop part 364 is substantially the same or close with the size of the 6th stop part 365.According to other illustrative examples, the size of the 5th stop part 364 and the 6th stop part 365 and the first stop part 360 and the second stop part 361 and/or the 3rd stop part 362 substantially the same or close with the size of the four or six stop part 363.
Have in the fluid ejection apparatus according to the said structure of illustrative examples, many connecting paths can by be used for spraying a fluid into on-chip outlet be connected to for from fluid feed port by fluid towards exporting the entrance provided, the fluids such as cleaning solution, rinsing liquid, air can be supplied to entrance by described fluid feed port.Like this, described many connecting paths can be set to various structures, the multi-channel structure such as between entrance and exit or multilevel hierarchy.If foreign matter or particle are present in wherein in a connecting path, then this foreign matter or particle cannot arrive outlet, and fluid can sufficiently pass through the flowing of other connecting paths, thus effectively can prevent the division from outlet fluid out.Therefore, the operational stability of fluid ejection apparatus is promoted, and uses the productive rate of the process of this device to be increased.In addition, when arranging many connecting paths in multilevel hierarchy, such as, connecting path and many lower connecting paths on many are set in fluid ejection apparatus, foreign matter and/or particle can be hindered by the multistage connecting path of the different cross section with the size according to foreign matter and/or particle.Simultaneously, when arranging many connecting paths in multi-channel structure, such as, the first connecting path, the second connecting path and the 3rd connecting path being set in fluid ejection apparatus, advantageously controlling fluid pressure, fluid flow and fluid velocity by reducing the cross section of connecting path.
Be only the explanation of embodiment above, but not its restriction.Although already described some embodiments, those skilled in the art easily can recognize and can make many amendments to embodiment, and essence does not depart from instruction and the advantage with novelty of the present invention.Therefore, be intended to all such modifications to be included in as defined in the claims in scope.In claims, the clause that structure adds function is intended to cover the structure of the described function of execution described herein, and not only comprises structural equivalent, also comprises equivalent structure.Therefore, should be understood that the explanation being only embodiment above, but not the disclosed restriction to specific embodiment, and be intended to the disclosed amendment to embodiment and other embodiment to be included within the scope of appended claims.The present invention limited by claims and the equivalent that comprises claim thereof.
Claims (13)
1. a fluid ejection apparatus, comprising:
For providing the fluid feed port of fluid;
Be connected to described fluid feed port to receive the entrance of described fluid;
Be connected to the first buffer part of described entrance;
Article two, the connecting path be communicated with described first buffer part more than;
The second buffer part be communicated with described connecting path; And
Be connected to described second buffer part so that described fluid is provided to on-chip outlet,
Wherein, described connecting path comprises the first connecting path of narrow slit shape and the second connecting path of narrow slit shape, and described outlet is narrow slit shape, and
First width of described first connecting path and the second width sum of described second connecting path are greater than the width of described outlet, and described first width and described second width are less than the width of described outlet separately.
2. fluid ejection apparatus as claimed in claim 1, wherein said connecting path is provided for the fluid passage of described fluid respectively, and described fluid passage has identical size respectively.
3. fluid ejection apparatus as claimed in claim 1, the first width of wherein said first connecting path and the second width of described second connecting path are about 0.15mm separately, and the width of described outlet is about 0.2mm.
4. fluid ejection apparatus as claimed in claim 1, wherein said first buffer part and described second buffer part respectively comprise multiple stop part.
5. fluid ejection apparatus as claimed in claim 4, wherein said first buffer part comprises the first mutually corresponding stop part and the second stop part, and described second buffer part comprises the 3rd mutually corresponding stop part and the 4th stop part.
6. fluid ejection apparatus as claimed in claim 1, wherein said first buffer part comprises the partition wall that multiple direction along described fluid flowing extends, and described partition wall prevents described fluid from flowing along the direction perpendicular to the direction of described fluid flowing.
7. a fluid ejection apparatus, comprising:
For providing the fluid feed port of fluid;
Be connected to described fluid feed port to receive the entrance of described fluid;
Be connected to the first buffer part of described entrance;
Connecting path on connecting path and second on be communicated with described first buffer part first;
The second buffer part be communicated with connecting path on connecting path and second on described first;
The first time connecting path be communicated with described second buffer part and second time connecting path;
The 3rd buffer part be communicated with second time connecting path with described first time connecting path; And
Be connected to described 3rd buffer part so that described fluid is provided to on-chip outlet.
8. fluid ejection apparatus as claimed in claim 7, on wherein said first and second, connecting path is narrow slit shape separately, and described first and second times connecting paths are narrow slit shape separately, and described outlet is narrow slit shape.
9. fluid ejection apparatus as claimed in claim 7, on wherein said first connecting path the first width and described second on the second width sum of connecting path be greater than the 3rd width of described first time connecting path and the 4th width sum of described second time connecting path, and described 3rd width and described 4th width sum are greater than the width of described outlet.
10. fluid ejection apparatus as claimed in claim 8, on wherein said first, the first width of connecting path is identical with the second width of connecting path on described second, and the 3rd width of described first time connecting path is identical with the 4th width of described second time connecting path.
11. fluid ejection apparatus as claimed in claim 9, wherein said first width and described second width are about 0.2mm separately, and described 3rd width and described 4th width are about 0.15mm separately, and the width of described outlet is about 0.2mm.
12. fluid ejection apparatus as claimed in claim 7, wherein said first buffer part, described second buffer part and described 3rd buffer part comprise a pair mutually corresponding stop part separately.
13. fluid ejection apparatus as claimed in claim 7, one in wherein said first buffer part, described second buffer part and the described 3rd buffer part partition wall comprising multiple direction along described fluid flowing and extend, described partition wall prevents described fluid from flowing along the direction perpendicular to the direction of described fluid flowing.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2011-0104523 | 2011-10-13 | ||
| KR20110104523 | 2011-10-13 | ||
| KR10-2011-0130789 | 2011-12-08 | ||
| KR1020110130789A KR101267464B1 (en) | 2011-10-13 | 2011-12-08 | Apparatus for jetting fluid |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103041940A CN103041940A (en) | 2013-04-17 |
| CN103041940B true CN103041940B (en) | 2015-08-26 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210413634.0A Active CN103041940B (en) | 2011-10-13 | 2012-10-15 | Fluid ejection apparatus |
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| CN (1) | CN103041940B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105629530B (en) * | 2016-01-19 | 2020-01-24 | 京东方科技集团股份有限公司 | Cleaning device and using method thereof |
| CN111085520A (en) * | 2019-11-23 | 2020-05-01 | 石家庄旭新光电科技有限公司 | Liquid crystal glass substrate cleaning system |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1636639A (en) * | 2003-12-24 | 2005-07-13 | 显示器生产服务株式会社 | Panel processing system |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200305052Y1 (en) * | 2002-12-03 | 2003-02-19 | (주)케이.씨.텍 | Slit Type Device Nozzle for Jetting Fluid |
| JP2005131539A (en) * | 2003-10-30 | 2005-05-26 | Yoshinobu Shimoitani | Injection nozzle |
| KR20100059235A (en) * | 2008-11-26 | 2010-06-04 | 세메스 주식회사 | Apparatus for jetting fluid |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1636639A (en) * | 2003-12-24 | 2005-07-13 | 显示器生产服务株式会社 | Panel processing system |
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