JP5740394B2 - Swirl flow forming body and non-contact transfer device - Google Patents

Description

  The present invention relates to a swirling flow forming body and a non-contact transfer device using the swirling flow forming body, and particularly to an FPD (flat panel display) such as a large liquid crystal display (LCD) or a plasma display (PDP) or a solar cell panel ( The present invention relates to a rail-shaped non-contact conveyance device used for production of a solar panel and the like, and a swirl flow forming body constituting the non-contact conveyance device.

  Conventionally, in the production of FPDs, solar battery panels, etc., a method of increasing production efficiency by enlarging one panel has been adopted. For example, in the case of liquid crystal glass, the size is 2850 × 3050 × 0.7 mm in the tenth generation. Therefore, as in the past, when liquid crystal glass is placed on a plurality of rollers and rolled and conveyed, a strong force acts locally on the liquid crystal glass due to deflection of the shaft supporting the rollers and variations in roller height, There is a risk of damaging the liquid crystal glass.

  The above-described rolling conveyance device using rollers cannot be employed in, for example, an FPD process process in which the device and the panel are required to be in non-contact. In recent years, an air levitation conveyance device has begun to be employed. Yes. As a non-contact conveyance device, there is a device that floats and conveys an FPD by ejecting air by using a porous material for a part of a plate-shaped rail and supplying air in communication with an air supply path. However, if this device is used, the FPD floats while moving in the vertical direction, so that it can be used in the transport process. However, for example, a high flying height of 30 to 50 μm is required. It cannot be used in process steps.

  In addition, if a hole for vacuuming is provided in the plate-shaped rail using the porous material, the structure of the apparatus becomes complicated, the apparatus itself becomes expensive, and the flying height is maintained with high accuracy. When the supply air pressure is increased, self-excited vibration related to the compressibility of high-rigid air is generated, and there is a problem that the flying height cannot be maintained with high accuracy.

  In addition, there are devices in which orifices (small-diameter holes) are alternately drilled with evacuation holes instead of porous materials, but static electricity is generated by the strong blown air from the orifices, and the environment of the clean room is disturbed. However, there is a problem that the operation cost increases due to an increase in the consumption flow rate.

  Therefore, in Patent Document 1, as a non-contact conveyance device that has a small fluid flow rate and energy consumption and can maintain the flying height with high accuracy, by ejecting fluid from the fluid ejection port, the surface side of the ring-shaped member is used. A non-contact transfer device provided with two or more swirl flow forming bodies on the transfer surface of the substrate that generate a swirl flow toward the separating direction and generate a fluid flow in the back surface direction in the vicinity of the opening on the front side of the ring-shaped member Has been proposed.

International Publication No. 2009/119377 pamphlet

  In the non-contact transfer device described in Patent Document 1, the swirl flow forming body is accommodated in a recess formed on the transfer surface of the substrate, and the outer peripheral surface of the swirl flow forming body is caulked by a raised portion protruding around the recess. Therefore, it takes a long time to attach the swirling flow forming body to the base, leading to an increase in the manufacturing cost of the non-contact transfer device, and the swirling flow forming body is joined when caulking the swirling flow forming body to the base. There is a problem that the mounting height of the object to be conveyed may vary, or the swirl flow forming body and the base body (rail) may be warped, resulting in a decrease in the accuracy of the flying height of the conveyed object.

  Therefore, the present invention has been made in view of the above-described problems in the prior art, and can reduce the manufacturing cost of the non-contact conveying device and prevent the decrease in the flying height accuracy of the object to be conveyed. An object of the present invention is to provide a swirl flow forming body and a non-contact transfer device using the swirl flow forming body.

In order to achieve the above object, the present invention is a swirl flow forming body, which is formed in a bowl shape having a circular hole opening in a plan view and having a projecting portion on a bottom surface, A main body comprising a plurality of projecting portions provided with an annular flange integrally formed on the outer peripheral edge of the opening, projecting from the outer peripheral surface of the annular collar toward the bottom surface, and having a locking projection at the tip ; A fluid jet opening that opens to an inner surface that forms the hole of the main body, and a fluid inlet that opens to the outer surface of the main body and communicates with the fluid jet outlet, and ejects fluid from the fluid jet outlet By doing so, an upward swirling flow is generated on the surface side of the main body in a direction away from the surface.

  According to the present invention, the swirling flow forming body has a fluid jet opening on the inner surface of the bowl-shaped main body and a fluid intake port communicating with the fluid jet outlet on the outer surface. By accommodating the fluid in the recess of the substrate and taking in the fluid from the fluid intake port, the non-contact transport device can be easily configured, and the manufacturing cost of the non-contact transport device can be kept low. Further, when the swirl flow forming body is mounted on the base body, the outer surface of the main body of the swirl flow forming body is press-fitted into the inner surface of the housing portion of the base body, thereby The swirl flow forming body can be mounted on the base body without causing fluid leakage between the surface and the surface.

The front SL body is provided with a protrusion on the bottom, an annular flange portion formed integrally with the outer peripheral edge of the opening of the hole, towards the outer peripheral surface of the annular flange portion to the bottom side protrudes order to provide a plurality of protrusions having a locking projection at the tip, the swirling flow forming member can be mounted with one-touch on the substrate, thereby further reducing the manufacturing cost. Further, when the swirl flow forming body is mounted on the substrate, the conventional caulking joint is not used, so that the mounting angle of the swirl flow forming body does not vary and the swirl flow forming body and the substrate are not warped. The accuracy of the flying height of the conveyed object can be kept high.

  In the swirl flow forming body, the fluid ejection port is formed at a position opposite to each other diagonally across the center of the hole in the tangential direction of the cylindrical inner wall with the cylindrical inner wall of the hole. The openings can be formed in the recessed portions on the cylindrical inner wall surface side of the hole portions in opposite directions, respectively. In this way, by forming fluid ejection ports that open in opposite directions in the recesses, the fluid ejected from the fluid ejection ports abuts on the cylindrical inner wall surface, and the holes are clockwise or counterclockwise. Ascending swirl flow can be generated.

  Further, the swirl flow forming body can be integrally formed with a thermoplastic synthetic resin such as polyacetal resin, and the manufacturing cost of the swirl flow forming body can be further reduced.

  Furthermore, the present invention is a non-contact transfer apparatus comprising a base and two or more swirl flow forming bodies that generate an upward swirl flow that is mounted on a transport surface of the base and that are opposite to each other in plan view, The base body has a plurality of storage portions that are circular in plan view that open on the transport surface, a bottom surface of the storage portion, and a cylindrical inner wall surface of the storage portion that has a belt-like shape that is larger than the diameter of the opening portion of the storage portion. A plurality of engaging portions formed by a protrusion formed on a bottom surface of the main body of the swirling flow forming body abutting against a bottom surface of the housing portion of the base body and bending the main body. Each of the projections is accommodated in the cylindrical locking recess of the base body, and the main body returns to its original shape, whereby each of the plurality of locking projections is locked in the cylindrical locking recess, The swivel is performed by press-fitting the outer peripheral surface of the annular flange portion to the cylindrical inner wall surface of the housing portion of the base body. Forming body is characterized in that it is mounted in the accommodating portion of the substrate. According to the present invention, it is possible to provide a non-contact transfer apparatus that has a simple structure and reduced manufacturing costs.

  Further, in the non-contact conveyance device, the swirl flow forming body that generates the upward swirling flow in one direction and the fluid suction holes arranged alternately along the width direction of the base body and the rising in the other direction A row in which the swirl flow forming bodies for generating swirl flow and fluid suction holes are alternately arranged along the width direction of the base body are alternately arranged along the longitudinal direction of the base body, and the base body The fluid suction holes can be arranged between the swirling flow forming bodies that generate the rising swirling flow in the same direction as the width direction and the longitudinal direction. With this configuration, the surface spreading from the swirling flow forming body is flush with the plurality of swirling flow forming bodies, and the reference surface for levitating the conveyed object is the conveying surface of the substrate. In addition to being able to control with high accuracy, the flying height of the conveyed object can be controlled with high accuracy by vacuum suction of a small amount of surrounding fluid through the fluid suction hole, which is suitable for process steps etc. Can be applied.

  As described above, according to the present invention, the swirling flow forming body capable of reducing the manufacturing cost of the non-contact transporting device and preventing the accuracy of the flying height of the conveyed object, and the swirling flow forming body. It is possible to provide a non-contact conveyance device using

It is a figure which shows one Embodiment of the swirl | vortex flow formation body which produces | generates the swirl | vortex flow of the clockwise view (clockwise direction) concerning planar view according to this invention, (a) is a front view, (b) is a top view, (c) is a bottom view, (d) is a cross-sectional view taken along line AA of (b), (e) is an enlarged cross-sectional view of part B of (c), and (f) is an enlarged cross-sectional view of part C of (d). It is. BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows one Embodiment of the swirl | vortex flow formation body which produces | generates the swirl | vortex flow of the plan view anticlockwise direction (counterclockwise direction) concerning this invention, (a) is a front view, (b) is a top view, (C) is a bottom view, (d) is a sectional view taken along the line DD of (c), (e) is an enlarged sectional view of the E portion of (c), and (f) is an enlarged sectional view of the F portion of (d). FIG. It is a figure which shows one Embodiment of the base | substrate which mounts a rotational flow formation body, (a) is a top view, (b) is the GG sectional view taken on the line of (a). It is a figure which shows other embodiment of the base | substrate which mounts a rotational flow formation body, Comprising: (a) is a top view, (b) is the HH sectional view taken on the line of (a). FIG. 4 is a cross-sectional view for explaining a procedure for mounting the swirling flow forming body shown in FIG. 1 on the base body shown in FIG. 3, wherein (a) shows a state where the entire swirling flow forming body is pushed down to the bottom surface of the housing portion of the base body; (B) shows a state in which the swirl flow forming body is mounted on the housing portion of the substrate. FIG. 4 is a cross-sectional view illustrating a state where the swirl flow forming body illustrated in FIG. 1 is mounted on the housing portion of the base body illustrated in FIG. 3. BRIEF DESCRIPTION OF THE DRAWINGS It is a top view which shows one Embodiment of the non-contact conveying apparatus concerning this invention, Comprising: (a) is a top view which shows a part of non-contact conveying apparatus for process processes, (b) is the non-including including a conveying process. It is a top view which shows the whole contact conveyance apparatus. It is a figure which shows the non-contact conveying apparatus for process steps shown in FIG. 7, Comprising: (a) is a top view, (b) is the II sectional view taken on the line of (a). It is a top view which shows other embodiment of the whole non-contact conveying apparatus including the conveyance process concerning this invention.

  Next, embodiments of the present invention will be described in detail with reference to the drawings. In the following description, air is used as the transport fluid and liquid crystal glass (hereinafter referred to as “glass”) is transported as an object to be transported.

  1 (a) to 1 (f) show a swirling flow forming body 1 that generates an upward swirling flow in a clockwise direction (clockwise direction) in a plan view in the swirling flow forming body according to the present invention. The formed body 1 includes, for example, a bowl-shaped main body 1a that is integrally formed of a thermoplastic synthetic resin such as polyacetal resin, a hole 1b that is located inside the main body 1a and has a circular shape in a plan view, and is open to one side. An annular collar 1c formed integrally with the outer peripheral edge of the opening of the hole 1b, and projecting downward from the outer peripheral surface 1d of the annular collar 1c, and having a locking projection 1e at the tip. Four projecting portions 1f formed opposite to each other in the radial direction, a cylindrical projecting portion 1h projecting slightly downward from the bottom surface 1g at the center of the bottom surface 1g of the main body 1a, and a hole in the main body 1a Tangent line of cylindrical inner wall surface 1i to cylindrical inner wall surface 1i of portion 1b The concave portions 1j and 1j formed at opposite positions on the diagonal line across the center O of the hole portion 1b and the respective concave portions 1j are formed on the cylindrical inner wall surface 1i side of the hole portion 1b. Air outlets 1k and 1k that open in opposite directions toward each other, and air inlets 1l and 1l that communicate with the outlet 1k and open on the outer peripheral surface of the main body 1a.

  The swirl flow forming body 1 is rotated clockwise in plan view by the air ejected from the ejection ports 1k and 1k through the air intake ports 1l and 1l contacting the cylindrical inner wall surface 1i of the hole 1b of the main body 1a. An upward swirling flow in the direction (the arrow direction in FIG. 1B) is generated.

  2 (a) to 2 (f) show a swirling flow forming body 4 that generates an upward swirling flow in a counterclockwise direction in plan view in the swirling flow forming body according to the present invention. Like the swirl flow forming body 1, for example, a bowl-shaped main body 4a integrally formed from a thermoplastic synthetic resin such as polyacetal resin, and a circular hole 4b that is located inside the main body 4a and opens to one side, An annular flange 4c formed integrally with the outer peripheral edge of the opening of the hole 4b, and projecting downward from the outer peripheral surface 4d of the annular flange 4c, with a locking projection at the tip Four projecting portions 4f having 4e formed opposite to each other in the radial direction, and a cylindrical projecting portion 4h projecting slightly downward from the bottom surface 4g at the center of the bottom surface 4g of the main body 4a, The inner wall surface 4i is connected to the cylindrical inner wall surface 4i of the hole 4b of the main body 4a. Recesses 4j and 4j formed at diametrically opposed positions on the diagonal line with the center O of the hole 4b interposed therebetween, and the cylindrical inner wall surface 4i of the hole 4b. Air outlets 4k and 4k that open in opposite directions toward the sides, and air inlets 4l and 4l that communicate with the outlets 4k and 4k and open on the outer peripheral surface of the main body 4a.

  The swirl flow forming body 4 rotates counterclockwise in plan view by the air ejected from the ejection ports 4k and 4k through the air intake ports 4l and 4l contacting the cylindrical inner wall surface 4i of the hole 4b of the main body 4a. An upward swirling flow in the direction (the arrow direction in FIG. 2B) is generated.

  As shown in FIGS. 3 (a) and 3 (b), the base body 2 to which the swirl flow forming body 1 or 4 is attached is formed in the conveying surface 2a and has a circular accommodating portion 2b that is open in the top view and is circular in plan view. A bottom cylindrical surface 2d of the housing portion 2b, a belt-like cylindrical locking recess 2e formed on the cylindrical inner wall surface 2c of the housing portion 2b with a diameter larger than the diameter of the opening of the housing portion 2b, and a pump (not And a through hole 2g for supplying air supplied to the accommodating portion 2b through an air passage 2f formed along the longitudinal direction of the base 2 from the figure.

  In order to mount the swirling flow forming body 1 in the housing portion 2b of the base body 2, the swirling flow forming body 1 is inserted into the housing portion 2b of the base body 2 from the side of the locking projection 1e of the projecting portion 1f, as shown in FIG. As shown, when the swirl flow forming body 1 is pushed down after the projecting portion 1h of the swirling flow forming body 1 is brought into contact with the bottom surface 2d of the housing portion 2b of the base body 2, the main body 1a is bent and the locking projection 1e is strip-shaped. Is inserted into the cylindrical locking recess 2e. Thereafter, when the downward pressing force of the swirling flow forming body 1 is released, the main body 1a returns to its original shape as shown in FIG. The swirl flow forming body 1 is firmly fixed to the base body 2 in a state of being locked in the cylindrical locking recess 2e. At this time, since the outer peripheral surface 1d of the annular flange 1c of the main body 1a of the swirling flow forming body 1 is press-fitted to the cylindrical inner wall surface 2c of the housing portion 2b of the base 2, air from the press-fitting fitting portion Leakage is prevented. Note that the swirling flow forming body 4 is mounted in the housing portion 2b of the base body 2 in the same manner as the mounting method of the swirling flow forming body 1 in the housing portion 2b of the base body 2.

  4 (a) and 4 (b) show another embodiment of the base 2 on which the swirl flow forming body 1 or 4 is mounted, and is a circular shape in plan view that is drilled in the transport surface 2a and opens on the upper surface. The housing portion 2b, the bottom surface 2d of the housing portion 2b, and the cylindrical inner wall 2c of the housing portion 2b are formed in a strip-like cylindrical locking recess 2e formed larger in diameter than the diameter of the opening of the housing portion 2b. And an air passage 2f that is formed along the longitudinal direction of the base 2 from a pump (not shown), and a part of which opens to the housing portion 2b. In the base body 2 shown in FIGS. 4 (a) and 4 (b), the through hole 2g for supplying air to the accommodating portion 2b from the air passage 2f in the base body 2 shown in FIGS. 3 (a) and 3 (b) is unnecessary. Become. The method for mounting the swirl flow forming body 1 or 4 on the base 2 shown in FIGS. 4 (a) and 4 (b) is the same as the mounting method described in FIGS. 5 (a) and 5 (b).

  Next, the operation of the swirl flow forming body 1 and the base 2 to which the swirl flow forming body 1 is mounted will be described with reference to FIG.

  The air supplied from the pump (not shown) to the air passage 2f of the base body 2 is supplied to the storage portion 2b through the through hole 2g communicating with the air passage 2f, and the air of the swirl flow forming body 1 is supplied from the storage portion 2b. It ejects to the hole 1b from the ejection ports 1k and 1k through the intake ports 1l and 1l (see FIG. 1E), respectively. The jetted air abuts on the cylindrical inner wall surface 1i of the hole 1b, and generates an upward swirling flow in the clockwise direction (clockwise direction) in plan view above the hole 1b of the swirling flow forming body 1, and this rise The glass 3 that is the object to be conveyed is levitated by the swirling flow.

  Next, an embodiment of a non-contact conveying apparatus according to the present invention will be described with reference to FIGS.

  A non-contact conveyance device 10 shown in FIG. 7 is used to convey the glass 3 in a non-contact manner, and includes two conveyance steps 11 and 13 and a process step 12 sandwiched between the conveyance steps 11 and 13.

  In the two conveying steps 11 and 13, the swirling flow forming body 1 and the swirling flow forming body 4 that generates a swirling flow opposite to the swirling flow forming body 1 are arranged in two rows on the conveying surface 2a of the base body 2. Three non-contact conveying devices 21 configured by alternately mounting a plurality of upper, lower, left, and right sides on the paper surface 7 are arranged in parallel. In order to make the drawing easier to see, the swirl flow forming body 4 is shown in black.

  On the other hand, as shown in FIG. 7A, the non-contact transfer device 32 in the process step 12 is used for sucking a fluid that sucks a swirling flow forming body 1 that generates an upward swirling flow in a clockwise direction in a plan view and a minute amount of air. Rows in which the small-diameter holes 31 are alternately arranged along the width direction of the base 2, the swirling flow forming body 4 that generates the upward swirling flow in the counterclockwise direction in plan view, and the small-diameter holes 31 for sucking in fluid that sucks in a small amount of air. Are alternately arranged along the longitudinal direction of the base 2 and the swirl flow forming bodies 1 adjacent to each other in the width and longitudinal directions of the base 2. 1 and the adjacent swirl flow forming bodies 4 and 4 are provided with a base body 2 arranged so that small-diameter holes 31 having a diameter of about 1 to 2 mm are located. As shown in FIG. 7B, the non-contact conveyance device 32 is configured by arranging three rows in parallel.

  Next, the detailed structure of the non-contact conveyance device 32 in the process step 12 will be described with reference to FIG.

  The swirl flow forming bodies 1 and 4 mounted on the transport surface 2a of the base body 2 are supplied with air through an air passage 2f formed in the base body 2 along the longitudinal direction of the base body 2 and a pump (not shown). Are ejected to the holes 1b and 4b from the spouts 1k and 1k of the swirling flow forming body 1 shown in FIG. 1 (e) and the spouts 4k and 4k of the swirling flow forming body 4 shown in FIG. 2 (e). . The air jetted from these jet outlets 1k, 1k and 4k, 4k abuts on the cylindrical inner wall surfaces 1i and 4i of the holes 1b and 4b, so that the swirl flow forming body 1 is flat above the hole 1b. The upward swirling flow in the clockwise direction in view is generated, and the swirl flow forming body 4 generates the upward swirling flow in the counterclockwise direction in plan view above the hole 4b. Here, as shown in FIG. 8 (b), the air passages 2f communicate with each other through communication holes (not shown), so that the amount of air ejected from the ejection ports 1k, 1k, 4k, and 4k is uniform. The flying height of the glass 3 can be controlled uniformly.

  Moreover, it opens in the conveyance surface 2a of the base body 2 and is located between the swirl flow forming bodies 1 and 1 adjacent to the width direction and the longitudinal direction of the base body 2 and between the adjacent swirl flow forming bodies 4 and 4. The small-diameter holes 31 having a diameter of about 1 to 2 mm arranged so as to communicate with each other are communicated with an air passage 41 formed along the longitudinal direction of the base body 2 as shown in FIG. The passage 41 communicates with a communication hole (not shown). Therefore, the small-diameter hole 31 can uniformly maintain the amount of air sucked from the small-diameter hole 31 by sucking the air around the swirling flow forming bodies 1 and 4 with a vacuum pump (not shown). 3 can be controlled uniformly and with high accuracy.

  Thus, in the non-contact transfer device 32 in the process step, the floating amount is increased by the supply air pressure to the jet outlets 1k, 1k, 4k, and 4k of the swirling flow forming body 1 and the swirling flow forming body 4, and the small diameter hole By controlling both actions of reducing the flying height by the vacuum suction pressure from 31, the flying height of the conveyed object of 30 to 50 μm can be controlled with high accuracy.

  Next, the operation of the non-contact transport apparatus 10 having the above configuration will be described with reference to FIG.

  When the glass 3 conveyed by an air blowing device (not shown) or the like separately provided in the non-contact conveying device 21 in the conveying step 11 enters the non-contact conveying device 32 in the process step 12, a swirl flow is formed. The glass 3 floats by 30 to 50 μm by being adsorbed by a small diameter hole 31 positioned between the swirl flow forming bodies and vacuumed by a small amount of surrounding air while being floated by the rising swirl generated in the bodies 1 and 4 The height is controlled with high accuracy, and various inspections and processing are performed. Thereafter, the glass 3 is conveyed to the next step by an air blowing device or the like separately provided in a state of being floated in the non-contact conveying device 21 in the conveying step 13. Here, in the process step 12 shown in FIG. 7B, the glass 3 having a thickness of 0.7 mm has a diameter φ16 mm of the holes 1b and 4b of the swirl flow formers 1 and 4 and the diameters of the jets 1k and 4k. In the conveyance state under the conditions of 0.35 mm, supply air pressure 50 kPa, and vacuum adsorption pressure 10 kPa, the amplitude of the undulation of the glass 3 can be suppressed to 30 μm or less, whereas in the front and rear conveyance steps 11 and 13, An experimental result has been obtained that the amplitude of the undulation exceeded 100 μm.

  FIG. 9 shows another embodiment of the process step 12 of the non-contact conveyance device 10 shown in FIG. 7B. In this process step 12, three non-contact conveyance devices 32 arranged in parallel are arranged. Three non-contact conveyance devices 32 are further arranged adjacent to the non-contact conveyance device 32. In the process step 12 in which the non-contact conveyance devices 32 are arranged in two rows, operations such as a camera transmission check are performed between the non-contact conveyance devices 32 and 32, for example.

  In the above embodiment, as shown in FIGS. 1 and 2, the recesses 1j and 4j are provided in the holes 1b of the swirl flow forming bodies 1 and 4, and the jets 1k and 4k are formed in the recesses 1j and 4j. However, the recesses 1j and 4j are not necessarily provided, and the jet outlets 1k and 4k can be directly formed on the cylindrical inner wall surfaces 1i and 4i of the hole 1b.

  Further, the projecting portions 1f and 4f having locking projections 1e and 4e on the outer peripheral surfaces 1d and 4d of the annular flanges 1c and 4c of the main bodies 1a and 4a of the swirl flow forming bodies 1 and 4 are opposed to each other in the radial direction. However, the number of the projecting portions 1f and 4f is not limited to four, and may be three or five or more. Furthermore, when the swirl flow forming bodies 1 and 4 are attached to the base body 2, other locking structures can be employed without using the protrusions 1f and 4f having the locking protrusions 1e and 4e.

  Further, in each of the embodiments described above, the case where air is used as the fluid has been described. However, a process gas such as nitrogen other than air can be used.

1, 4 swirl flow forming body 1a, 4a body 1b, 4b hole 1c, 4c annular flange 1d, 4d outer peripheral surface 1e, 4e annular protrusion 1f, 4f protrusion 1g, 4g bottom 1h, 4h protrusion Portions 1i, 4i Cylindrical inner wall surfaces 1j, 4j Recesses 1k, 4k Spouts 1l, 4l Air intake 2 Base body 2a Transport surface 2b Housing portion 2c Cylindrical inner wall surface 2d Bottom surface 2e Cylindrical locking recess 2f Air passage 2g Through hole 3 Glass 10 Non-contact conveying device 11, 13 Conveying step 12 Process step 21 Non-contact conveying device 31 Small-diameter hole 32 Non-contact conveying device 41 Air passage

Claims (5)

It is formed in a bowl shape having a circular hole portion in plan view that opens on the surface side, and has a protruding portion on the bottom surface, and an annular flange portion that is integrally formed on the outer peripheral edge of the opening portion of the hole portion. A main body provided with a plurality of protrusions protruding from the outer peripheral surface of the collar portion toward the bottom surface side and having a locking projection at the tip ;
A fluid spout opening in the inner surface forming the hole of the body;
A fluid intake opening that opens on an outer surface of the main body and communicates with the fluid ejection port;
A swirling flow forming body characterized in that an upward swirling flow is generated on the surface side of the main body in a direction away from the surface by ejecting a fluid from the fluid ejection port. The fluid jets are respectively formed in concave portions formed in diagonal positions opposite to each other on the cylindrical inner wall surface of the hole portion in the tangential direction of the cylindrical inner wall surface and sandwiching the center of the hole portion. swirl flow forming member according to claim 1, characterized in that it is formed toward the opening in the respective opposite directions cylindrical inner wall surface of the hole. Revolving circumfluence forming body, the swirl flow forming member according to claim 1 or 2, characterized in that it is integrally molded with a thermoplastic synthetic resin. A non-contact conveying apparatus comprising a substrate and two or more swirling flow forming bodies that are mounted on the conveying surface of the substrate and generate upward swirling flows in directions opposite to each other in a plan view. A plurality of accommodating portions having a circular shape in plan view, a bottom surface of the accommodating portion, a cylindrical inner wall surface of the accommodating portion, and a belt-like cylindrical locking recess having a diameter larger than the diameter of the opening portion of the accommodating portion. The swirling flow forming body is a swirling flow forming body according to any one of claims 1 to 3 , wherein a protrusion formed on a bottom surface of the main body abuts on a bottom surface of the housing portion of the base body. When the main body bends, each of the plurality of locking protrusions is accommodated in the cylindrical locking recess of the base body, and when the main body returns to its original shape, each of the plurality of locking protrusions becomes The outer peripheral surface of the annular collar portion of the main body is locked to the cylindrical locking recess, and the cylindrical shape of the housing portion of the base body Non-contact transport apparatus characterized by revolving circumfluence formed body is mounted in the accommodating portion of the base body by being press-fitted into the wall. The row | line | column which arrange | positioned the swirl | flow flow formation body in any one of the said Claim 1 thru | or 3 and the fluid suction hole which generate | occur | produces the upward swirl | flow flow of one direction alternately along the width direction of the said base | substrate, and another direction A row in which the swirling flow forming bodies according to any one of claims 1 to 3 and fluid suction holes arranged alternately along the width direction of the base are arranged to generate the upward swirling flow of the base. The fluid suction holes are located between the swirling flow forming bodies that are alternately arranged along the longitudinal direction and generate an upward swirling flow in the same direction as the width direction and the longitudinal direction of the base body. The non-contact transfer device according to claim 4 , wherein the non-contact transfer device is arranged as follows.

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