201206808 六、發明說明： 【發明所屬之技術領域】 本發明係關於一種迴旋流形成體及使用該迴旋流形成 體的非接觸搬運裝置，尤其是關於一種用於大型液晶顯示 器（LCD)或電漿顯示器（PDP)等之FPD (平面顯示器 )或太陽電池板（solar panel)等之生產的軌條（rai〇 狀之非接觸搬運裝置、及構成該非接觸搬運裝置的迴旋流 形成體。 【先前技術】 習知以來，在生產FPD或太陽電池板等時，有採用 藉由將1片面板大型化以提高生產效率的方法。例如，在 液晶玻璃的情況時，第10代可達2850x3050x0.7mm的大 小。因此，如習知般，當將液晶玻璃載置於複數個並排的 輥子上而滾動搬運時，會因支撐輥子的軸之撓曲或輥子高 度的不均等而使較強之力局部在液晶玻璃起作用，而有傷 及液晶玻璃之虞》 依上述輥子之滾動搬運裝置，近年來已開始採用一種 被要求該裝置與面板爲非接觸之例如在FPD之處理步驟 中無法採用的氣浮式搬運裝置。作爲非接觸搬運裝置，有 存在如下的裝置：在板狀之軌條的一部分使用多孔質材料 ，藉由使其與供氣路徑連通而供氣，並利用噴出空氣將 FPD浮起搬運。但是，當使用該裝置時，由於FPD是成 ' 爲一邊朝上下方向移動一邊浮游的狀態，所以雖然能夠用 201206808 於搬運步驟，但是卻無法在例如被要求30〜50μπι之高精 度浮起高度的處理步驟中採用。 又，當在使用上述多孔質材料的板狀之軌條設置抽真 空用的孔時，裝置的構成就會變得複雜，且裝置本身會變 得高價，並且當爲了要高精度地維持浮起高度而提高供氣 壓力時，會有發生高剛性空氣之壓縮性的自激振動，而無 法高精度地保持浮起高度的問題。 更且，雖然也有存在將孔口（ orifice :小徑的口）取 代多孔質材料來與抽真空用的孔交互地穿設的裝置，但是 會有因來自孔口之較強的噴出空氣而發生靜電、或擾動無 塵室之環境、或消耗流量變大而使運轉成本高漲的問題。 因此，在專利文獻1中，有提出一種在基體之搬運面 具備2個以上之迴旋流形成體的非接觸搬運裝置，作爲流 體流量及能源消耗量少、且可高精度地維持浮起高度的非 接觸搬運裝置，而該迴旋流形成體係藉由使流體從流體噴 出口噴出，可產生朝向遠離環狀構件之表面側的方向之迴 旋流，並且在環狀構件之表面側的開口部近旁產生朝背面 方向的流體流動。 (專利文獻1 )國際公開第2009/1 1 93 77號文獻 【發明內容】 (發明所欲解決之問題） 在上述專利文獻1所記載的非接觸搬運裝置中，由於 是在形成於基體之搬運面的凹部容納迴旋流形成體，且藉 -6- 201206808 由突設於凹部周圍的隆起部將該迴旋流形成體斂縫接合， 所以要將迴旋流形成體裝設於基體需要長時間而關係著非 接觸搬運裝置之製造成本的升高，並且在將迴旋流形成體 斂縫接合於基體時，會在迴旋流形成體之安裝角度產生不 均等，或在迴旋流形成體或基體（軌條）發生向外彎曲使 得被搬運物之浮起高度的精度降低之虞的問題》 (解決問題之手段） 因此，本發明係有鑒於上述先前技術的問題點而開發 完成者，其目的在於提供一種可減低非接觸搬運裝置之製 造成本，且防止被搬運物之浮起高度之精度降低的迴旋流 形成體、及使用該迴旋流形成體的非接觸搬運裝置。 爲了達成上述目的，本發明提供一種迴旋流形成體， 其特徵爲，具備：呈碗狀的本體，其係具有開口於表面側 之俯視觀察呈圓形的穴部；及流體噴出口，其係開口於形 成該本體之前述穴部的內表面；以及流體取入口，其係開 口於前述本體之外表面，且與前述流體噴出口連通，並藉 由從前述流體噴出口噴出流體，俾於前述本體之表面側產 生朝向遠離該表面之方向的上升迴旋流。 依據本發明，由於迴旋流形成體，係使流體噴出口開 口於碗狀的本體之內表面，且於外表面具備與流體噴出口 連通的流體取入口，所以藉由將該迴旋流形成體容納於基 體之凹部等，且從流體取入口取入流體，就可簡單地構成 非接觸搬運裝置，且可將非接觸搬運裝置之製造成本抑制 201206808 得較低。又，正當將該迴旋流形成體裝設於基體時，藉由 將該迴旋流形成體之本體的外表面壓入於基體之容納部的 內表面，就不會在該本體的外表面與基體的容納部之內表 面之間產生流體的洩漏而使該迴旋流形成體被裝設於前述 基體》 又，在上述迴旋流形成體中，前述本體，係可於底面 具備突出部，並且具備一體形成於前述穴部之開口部外周 緣的環狀鍔部，且具備：從該環狀鍔部之外周面朝向前述 底面側突出，且於前端具有卡止突起的複數個突出部。藉 由該構成，就可以單觸操作（one touch)將迴旋流形成體 裝設於基體，且可更進一步減低製造成本。又，由於在將 迴旋流形成體裝設於基體時，並未如習知般地使用斂縫接 合，所以不會在迴旋流形成體之安裝角度產生不均等，或 在迴旋流形成體及基體發生向外彎曲，故可將被搬運物之 浮起高度的精度維持得較高。 在上述迴旋流形成體中，前述流體噴出口，是在前述 穴部之圓筒狀內壁面並位於該圓筒狀內壁面的切線方向， 也就是位於：在夾隔著該穴部中心並呈對角線上之相對向 之位置所形成的凹部處，使分別位在前述穴部之圓筒狀內 壁面側的前述開口部，分別朝向相反方向而形成。如此， 藉由在該凹部形成分別開口於相反方向的流體噴出口，就 可使從該流體噴出口噴出的流體抵接於圓筒狀內壁面，且 在該穴部產生右旋轉方向或是左旋轉方向的上升迴旋流。 又，迴旋流形成體，係可由聚縮醛共聚合物樹脂等之 -8 - 201206808 熱塑性合成樹脂一體成形，故可更進一步減低迴旋流形成 體的製造成本。 更且，本發明提供一種非接觸搬運裝置，係由基體、 與裝設於該基體的搬運面之可產生俯視觀察爲相互地呈相 反方向之上升迴旋流的2個以上之迴旋流形成體所構成， 其特徵爲：該基體係具備：俯視觀察呈圓形的複數個容納 部，其係開口於搬運面；及該容納部的底面；以及呈帶狀 的圓筒卡止凹部，其係形成於該容納部之圓筒狀內壁面且 直徑比該容納部之開口部之直徑還更大；且藉由形成於前 述迴旋流形成體的前述本體之底面的突出部抵接於前述基 體之容納部的底面以使該本體撓曲，而可將前述複數個卡 止突起之各個容納於前述基體之圓筒卡止凹部，且藉由該 本體回復到原來的形狀而使前述複數個卡止突起之各個可 卡止於該圓筒卡止凹部，並且藉由該本體之環狀鍔部的外 周面被壓入嵌合於前述基體之容納部的圓筒狀內壁面而使 該迴旋流形成體被裝設於前述基體之容納部。依據本發明 ，可提高一種構造簡單且減低製造成本的非接觸搬運裝置 〇 又，在上述非接觸搬運裝置中，將可產生一方向之上 升迴旋流的前述迴旋流形成體與流體吸入用孔，沿著前述 基體之寬度方向交互地配置而成的列；以及將可產生另一 方向之上升迴旋流的前述迴旋流形成體與流體吸入用孔， 沿著前述基體之寬度方向交互地配置而成的列，沿著該基 體之長度方向交互地配置，並且前述流體吸入用孔以位在 -9 - 201206808 :位於該基體之寬度方向及長度方向的同方向產生上升迴 旋流的前述迴旋流形成體之間的方式進行排列。藉由該構 成，由於從迴旋流形成體擴展流動的面在複數個迴旋流形 成體成爲同一平面，且使被搬運物浮起的基準變成爲基體 之搬運面，所以可高精度地控制被搬運物之浮起高度，並 且藉由以流體吸入用孔來真空吸附周圍的微量流體，就可 高精度地控制被搬運物之浮起高度，並可合適地應用於處 理步驟等中。 (發明效果） 如以上所述’依據本發明，可提供一種減低非接觸搬 運裝置之製造成本’且防止被搬運物之浮起高度之精度降 低的迴旋流形成體、及使用該迴旋流形成體的非接觸搬運 裝置。 【實施方式】 其次’就本發明的實施形態一邊參照圖式一邊詳細說 明。另外，在以下的說明中，係舉使用空氣作爲搬運用流 體’且搬運液晶玻璃（以下，稱爲「玻璃」）作爲被搬運 物的情況爲例加以說明。 第1圖（a)至第1圖（f)係顯示本發明之產生迴旋 流形成體中的俯視觀察呈右旋轉方向（順時鐘方向）之上 升迴旋流的迴旋流形成體1，而該迴旋流形成體1，係具 備：碗狀的本體la，其係以例如聚縮醛共聚合物樹脂等 -10- 201206808 之熱塑性合成樹脂一體成形；及俯視觀察呈圓形的穴部 lb，其係位於本體la之內部，並且開口於一方；及環狀 鍔部lc’其係形成於本體ia，且一體形成於該穴部ib之 開口部的外周緣；及4支突出部if,其係從該環狀鍔部 lc之外周面Id朝向下方突出，且於前端具有卡止突起le 並在徑向相對向而形成；及圓筒狀的突出部lh，其係在 本體la之底面lg的中央部從該底面18稍微朝下方突出 ;及凹部lj、lj’其係形成於本體la的穴部lb之圓筒狀 內壁面Π且形成於該圓筒狀內壁面li之切線方向並隔著 該穴部lb之中心〇而呈對角線上之相對向的位置；及空 氣的噴出口 lk、lk，其係形成於各自的凹部lj，且朝向 穴部lb之圓筒狀內壁面li側分別開口於相反方向；以及 空氣取入口 11、11，其係連通於噴出口 lk，且開口於本 體1 a之外周面。 上述迴旋流形成體1，係藉由夾介空氣取入口 11、11 分別從噴出口 lk、lk噴出的空氣抵接於本體la的穴部 lb之圓筒狀內壁面li，而產生俯視觀察呈右旋轉方向之 上升迴旋流（第1圖（b)中的箭頭方向）。 第2圖（a)至第2圖（f)係顯示本發明之產生迴旋 流形成體中的俯視觀察呈左旋轉方向之上升迴旋流的迴旋 流形成體4，而該迴旋流形成體4，係與前述迴旋流形成 體1同樣，具備：碗狀的本體4a，其係以例如聚縮醛共 聚合物樹脂等之熱塑性合成樹脂一體成形：及俯視觀察呈 圓形的穴部4b，其係位於本體4a之內部，並且開口於一 -11 - 201206808 方；及環狀鍔部4c，其係形成於本體4a，且一體形成於 該穴部4b之開口部的外周緣；及4支突出部4f，其係從 該環狀鍔部4c之外周面4d朝向下方突出，且於前端具有 卡止突起4e並在徑向相對向而形成；及圓筒狀的突出部 4h’其係在本體4a之底面4g的中央部從該底面4g稍微 朝下方突出；及凹部4j、4j，其係形成於本體4a的穴部 4b之圓筒狀內壁面4i且形成於該內壁面4i之切線方向並 隔著該穴部4b之中心Ο而呈對角線上之相對向的位置； 及空氣的噴出口 4k、4k’其係形成於各自的凹部4j，且 朝向該穴部4b之圓筒狀內壁面4i側分別開口於相反方向 ;以及空氣取入口 41、41，其係連通於噴出口 4k、4k， 且開口於本體4a之外周面。 上述迴旋流形成體4，係藉由夾介空氣取入口 41、41 分別從噴出口 4k、4k噴出的空氣抵接於本體4a的穴部 4b之圓筒狀內壁面4i，而產生俯視觀察呈左旋轉方向之 上升迴旋流（第2圖（b)中的箭頭方向）。 如第3圖（a)及（b)所示，裝設有上述迴旋流形成 體1或4的基體2，係具備：俯視觀察呈圓形的容納部2b ，其係穿設於搬運面2a，且開口於上面；及該容納部2b 的底面2d;及帶狀的圓筒狀卡止凹部2e，其係形成於該 容納部2b之圓筒狀內壁面2c，且形成直徑比容納部2b 之開口部的直徑還更大；以及貫通孔2g，其係將經由從 泵浦（未圖示）沿著基體2之長度方向而形成的空氣通路 2f供給的空氣供給至容納部2b。 -12- 201206808 在基體2之容納部2b裝設迴旋流形成體1時，係將 迴旋流形成體1從突出部If之卡止突起le側插入於基體 2之容納部2b，且如第5圖（a)所示，在使迴旋流形成 體1之突出部lh抵接於基體2的容納部2b之底面2d之 後’當將迴旋流形成體1下壓時，本體la就會撓曲而可 將卡止突起le插入於帶狀的圓筒狀卡止凹部2e。之後， 當解除迴旋流形成體1朝下方的按壓力時，就如第5圖（ b)所示，本體la會回復到原來的形狀，且在迴旋流形成 體1之卡止突起le卡止於基體2之圓筒狀卡止凹部2e的 狀態下迴旋流形成體1可牢固地固設於基體2。此時，由 於迴旋流形成體1的本體la之環狀鍔部lc之外周面Id 會與基體2的容納部2b之圓筒狀內壁面2c壓入嵌合，所 以可防止空氣從該壓入嵌合部洩漏。另外，在將迴旋流形 成體4裝設於基體2之容納部2b的情況，也可以與前述 迴旋流形成體1朝基體2之容納部2b的裝設方法相同的 方法來進行。 第4圖（a)及（b)係顯示裝設有迴旋流形成體1或 4的基體2之另一實施形態，且具備：俯視觀察呈圓形的 容納部2b，其係穿設於搬運面2a，且開口於上面；及該 容納部2b的底面2d;及帶狀的圓筒狀卡止凹部2e，其係 形成於該容納部2b之圓筒狀內壁面2c，且形成直徑比容 納部2b之開口部的直徑還更大；以及空氣通路2f，其係 從泵浦（未圖示）沿著基體2之長度方向而形成，且一部 分開口於前述容納部2b。在該第4圖（a)及（b)所示 -13- 201206808 的基體2中，並不需要從前述第3圖（a)及（b)所示的 基體2中之空氣通路2f將空氣供給至容納部21)的貫通孔 2g。另外，該第4圖（a)及（b)所示之將迴旋流形成體 1或4裝設於基體2的方法，係與在前述第5圖及 (b)中說明的裝設方法相同。 其次’就上述迴旋流形成體1、與裝設有該迴旋流形 成體1的基體2之動作，參照第6圖加以說明。 從栗浦（未圖不）供給至基體2之空氣通路2f的空 氣，係經由連通於該空氣通路2f的貫通孔2g供給至容納 部2b’且從容納部2b經由迴旋流形成體1之空氣取入口 11、11(參照第1圖（e))分別從噴出口 Ik、lk噴出至 穴部lb。噴出後的空氣’係抵接於穴部lb之圓筒狀內壁 面Π，且在迴旋流形成體1之穴部lb的上方產生俯視觀 察呈右旋轉方向（順時鐘方向）之上升迴旋流，然後利用 該上升迴旋流使作爲被搬運物的玻璃3浮起。 其次，就本發明的非接觸搬運裝置之一實施形態，一 邊參照第7圖及第8圖一邊說明。 第7圖所示的非接觸搬運裝置1 〇，係供以非接觸方 式搬運玻璃3使用，且具備：二個搬運步驟11及13;以 及包夾於此等搬運步驟11及13的處理步驟12。 在二個搬運步驟11及13中，係並排地配置3座非接 觸搬運裝置21，該非接觸搬運裝置21係將迴旋流形成體 1、及可產生與該迴旋流形成體1逆向之迴旋流的迴旋流 形成體4，在基體2之搬運面2a遍及於2排’且在第7 -14- 201206808 圖之紙面上以上下左右交互地裝設複數個而構成。另外， 爲了易於圖解，以塗滿黑色顯示迴旋流形成體4。 另一方面，如第7圖（a)所示，處理步驟12中的非 接觸搬運裝置12，係具備基體2，該基體2係將可產生俯 視觀察呈右旋轉方向之上升迴旋流的迴旋流形成體1與吸 入微量空氣的流體吸入用之小徑孔31，沿著基體2之寬 度方向交互地配置而成的列；以及將可產生俯視觀察呈左 旋轉方向之上升迴旋流的迴旋流形成體4與流入微量空氣 的流體吸入用之小徑孔3 1，沿著基體2之寬度方向交互 地配置而成的列，沿著該基體2之長度方向交互地配置， 並且以直徑1〜2mm左右的小徑孔3 1位於和該基體2之寬 度方向及長度方向鄰接的迴旋流形成體1與1之間、以及 所鄰接的迴旋流形成體4與4之間的方式進行排列。如第 7圖（b )所示，該非接觸搬運裝置32，係並排地配置3 排而構成。 其次，就上述處理步驟12中的非接觸搬運裝置32之 詳細構造，一邊參照第8圖一邊說明。 對裝設於基體2之搬運面2a的迴旋流形成體1及4 ，經由在基體2之內部沿著基體2之長度方向而穿設的空 氣通路2f及泵浦（未圖示）供給空氣’且從第1圖（e) 所示的迴旋流形成體1之噴出口 lk、lk及第2圖（e)所 示的迴旋流形成體4之噴出口 4k、4k噴出至穴部lb及 4b。從此等噴出口 lk、lk及4k、4k噴出的空氣’係抵接 於該穴部lb及4b之圓筒狀內壁面1i及4i’藉此’該迴 -15- 201206808 旋流形成體1就會在穴部lb之上方產生俯視觀察呈右旋 轉方向之上升迴旋流，而迴旋流形成體4則會在穴部4b 之上方產生俯視觀察呈左旋轉方向之上升迴旋流。在此’ 如第8圖（b)所示，由於各空氣通路2f ’係相互地藉由 連通孔（未圖示）而連通，所以可均一地維持來自噴出口 lk、lk及4k、4k的空氣之噴出量，且可均一地維持玻璃 3之浮起高度。 又，如第8圖（b)所示，開口於基體2之搬運面2a 並以位於和該基體2之寬度方向及長度方向鄰接的迴旋流 形成體1與1之間、以及所鄰接的迴旋流形成體4與4之 間的方式進行排列的直徑1 ~2mm左右的小徑孔3 1 ’係連 通於沿著基體2之長度方向而穿設的空氣通路41，並且 該空氣通路41係藉由連通孔（未圖示）而連通。因而， 小徑孔3 1，係利用真空泵浦（未圖示）吸引迴旋流形成 體1及4之周邊的空氣，.藉此可均一地維持來自小徑孔 31的空氣之吸引量，且可既均一又高精度地控制玻璃3 之浮起高度。 如此在處理步驟中的非接觸搬運裝置32中，藉由控 制：利用對迴旋流形成體1及迴旋流形成體4之噴出口 lk、lk及4k、4k的供氣壓力來加大浮起量的作用；以及 利用來自小徑孔31的真空吸附壓力來減小浮起量的作用 之兩作用，就可高精度地控制30〜50μιη的被搬運物之浮 起高度》 其次，就具有上述構成的非接觸搬運裝置10之動作 -16- 201206808 ，參照第7圖加以說明。 在搬運步驟11之非接觸搬運裝置21中已浮起的狀態 下’藉由另外設置的空氣噴出裝置（未圖示）等而被搬運 的玻璃3，係當進入處理步驟12中的非接觸搬運裝置32 時，就會藉由產生於迴旋流形成體1及4的上升迴旋流而 浮起，並且利用位於各迴旋流形成體間的小徑孔31來真 空吸附周圍之微量空氣，藉此玻璃3就可高精度地控制在 3 0〜50μιη之浮起高度，且可進行各種檢查或加工。之後， 玻璃3，係在搬運步驟13之非接觸搬運裝置21中已浮起 的狀態下，藉由另外設置的空氣噴出裝置搬運至下一個步 驟》在此，厚度〇.7mm的玻璃3在第7圖（b)所示的處 理步驟12中，可獲得如下的實驗結果：在以迴旋流形成 體 1、4之穴部 lb、4b的直徑 φ 16mm、噴出口 lk、4k 之直徑0.35mm、供氣壓力50kPa、真空吸附壓力10kPa 之條件進行搬運的狀態中，可將玻璃3的彎曲起伏之振幅 抑制在3 Ομιη以下；相對於此，在前後的搬運步驟1 1及 13中，玻璃3的彎曲起伏之振幅會超過1〇〇 μπι。 第9圖係顯示第7圖（b)所示的非接觸搬運裝置10 之處理步驟12的另一實施形態，而在該處理步驟12中， 係在並排地排列3座的非接觸搬運裝置32更進一步排列 與該非接觸搬運裝置32鄰接之3座的非接觸搬運裝置32 。在排列2排的該非接觸搬運裝置32的處理步驟12中’ 係在非接觸搬運裝置3 2與3 2之間’進行例如照相穿透檢 查等的作業。 -17- 201206808 另外，在上述實施形態中，如第1圖及第2圖所示， 雖然是在迴旋流形成體1及4之穴部lb設置凹部lj及4j ，且在凹部lj及4j形成有噴出口 lk及4k，但是並不一 定要設置凹部lj及4j，亦可在穴部lb之圓筒狀內壁面U 及4i直接形成噴出口 lk及4k。 又，雖然在迴旋流形成體1及4之本體la及4a的環 狀鍔部lc及4c之外周面Id及4d於徑向相對向延伸設置 有4支具有卡止突起le及4e的突出部If及4f，但是突 出部If及4f的支數並未被限定於4支，亦可設爲3支或 5支以上。更且，正當將迴旋流形成體1及4裝設於基體 2時，並不使用具有卡止突起le及4e的突出部If及4f ，亦可採用其他的卡止構造。 更且，在上述各實施形態中，雖然已就使用空氣作爲 流體的情況加以說明，但是亦可使用空氣以外之氮氣等的 處理氣體。 【圖式簡單說明】 第1圖係顯示本發明之產生俯視觀察呈右旋轉方向（ 順時鐘方向）之迴旋流的迴旋流形成體之一實施形態的示 意圖；其中的（a)爲前視圖；（b)爲俯視圖；（c)爲 仰視圖；（d )爲（b )之A-A線剖視圖；（e )爲（c )之 B部的放大剖視圖；（f)爲（d )之C部的放大剖視圖。 第2圖係顯示本發明之產生俯視觀察呈左旋轉方向（ 逆時鐘方向）之迴旋流的迴旋流形成體之一實施形態的示 -18- 201206808 意圖；其中的（a)爲前視圖；（b)爲俯視圖；（Ο爲 仰視圖；（d )爲（c )之D - D線剖視圖；（e )爲（c )之 E部的放大剖視圖；（f)爲（d )之F部的放大剖視圖。 第3圖係顯示裝設迴旋流形成體的基體之一實施形態 的示意圖；其中的（a)爲俯視圖；（b)爲（a)之G-G 線剖視圖。 第4圖係顯示裝設迴旋流形成體的基體之另一實施形 態的示意圖；其中的（a)爲俯視圖；（b)爲（a)之H-H線剖視圖》 第5圖係用以說明將第1圖所示的迴旋流形成體裝設 於第3圖所示的基體之要領的剖視圖；其中的（a ).係顯 示將迴旋流形成體整體下壓在基體的容納部之底面的狀態 ;(b)係迴旋流形成體被裝設於基體之容納部的狀態。 第6圖係顯示將第1圖所示的迴旋流形成體裝設於第 3圖所示的基體之容納部的狀態之剖視圖。 第7圖係顯示本發明的非接觸搬運裝置之一實施形態 的俯視圖；其中的（a)係顯示處理步驟用非接觸搬運裝 置之一部分的俯視圖；（b)係顯示包含搬運步驟在內的 非接觸搬運裝置整體之俯視圖。 第8圖係顯示第7圖所示的處理步驟用非接觸搬運裝 置之示意圖；其中的（a)爲俯視圖；（b)爲（〇之Μ 線剖視圖。 第9圖係顯示本發明之包含搬運步驟在內的非接觸搬 運裝置整體之另一實施形態的俯視圖。 -19· 201206808 【主要元件符號說明】 I、 4 :迴旋流形成體 1 a、4a :本體 lb、 4b :穴部 lc、 4c :環狀鍔部 ld、 4d:環狀鍔部之外周面 1 e、4e :卡止突起201206808 VI. Description of the Invention: [Technical Field] The present invention relates to a swirling flow forming body and a non-contact conveying device using the same, particularly for a large liquid crystal display (LCD) or plasma a rail (Radio-like non-contact conveying device) produced by an FPD (flat display) such as a display (PDP) or a solar panel, and a swirling flow forming body constituting the non-contact conveying device. Conventionally, in the production of FPDs, solar panels, etc., there is a method of increasing the productivity by increasing the size of one panel. For example, in the case of liquid crystal glass, the 10th generation can reach 2850x3050x0.7mm. Therefore, as is conventionally, when the liquid crystal glass is placed on a plurality of side-by-side rolls and rolled and conveyed, a strong force is locally caused by the deflection of the shaft of the supporting roller or the unevenness of the height of the roller. The liquid crystal glass works, and there is a flaw in the liquid crystal glass. According to the rolling device of the above roller, in recent years, a device and a panel have been required to be used. Non-contact, for example, an air-floating conveying device that cannot be used in the processing steps of the FPD. As a non-contact conveying device, there is a device in which a porous material is used in a part of a plate-shaped rail, and The gas path is connected to the air, and the FPD is lifted and transported by the air. However, when the device is used, the FPD is in a state of being floated while moving in the vertical direction. Therefore, it is possible to use the 201206808 in the carrying step. However, it cannot be used in a processing step in which, for example, a high-precision floating height of 30 to 50 μm is required. Further, when a hole for vacuuming is provided in a plate-shaped rail using the porous material, the configuration of the device is It becomes complicated, and the device itself becomes expensive, and when the supply pressure is increased in order to maintain the floating height with high precision, there is a self-excited vibration in which the compressibility of the high-rigidity air occurs, and the high-precision vibration cannot be maintained. The problem of the height of the float. Moreover, there is also the possibility of replacing the porous material with the orifice (the orifice of the small diameter) to interact with the hole for vacuuming. However, in the case of the device that is worn, there is a problem that static electricity is generated by the strong discharge air from the orifice, or the environment of the clean room is disturbed, or the consumption flow rate is increased, and the running cost is increased. A non-contact conveying device including two or more swirling flow forming bodies on a conveying surface of a base body is proposed as a non-contact conveying device capable of maintaining a floating height with high fluid flow rate and energy consumption. The swirling flow forming system generates a swirling flow in a direction away from the surface side of the annular member by ejecting the fluid from the fluid discharge port, and generates a fluid flow in the back direction in the vicinity of the opening on the surface side of the annular member. (Patent Document 1) International Publication No. 2009/1 1 93 77 [Disclosure of the Invention] The non-contact conveyance device described in Patent Document 1 is formed in a substrate. The concave portion of the surface accommodates the swirling flow forming body, and the vortex forming body is caulked by the bulging portion protruding around the concave portion by -6-201206808, so The installation of the swirling flow forming body on the base body takes a long time and is related to the increase in the manufacturing cost of the non-contact conveying device, and when the swirling flow forming body is caulked and joined to the base body, the mounting angle of the swirling flow forming body is not generated. Equal problem, or the problem that the swirling flow forming body or the base body (rail) is bent outward so that the accuracy of the height of the object to be transported is lowered. (Means for solving the problem) Therefore, the present invention is directed to the above prior art. The object of the development is to provide a swirling flow forming body which can reduce the manufacturing cost of the non-contact conveying device and prevent the accuracy of the floating height of the conveyed object from being lowered, and the use of the swirling flow forming body. Contact the handling device. In order to achieve the above object, the present invention provides a swirling flow forming body, comprising: a bowl-shaped body having a hole portion opened in a plan view on a surface side; and a fluid discharge port; Opening an inner surface of the cavity forming the body; and a fluid intake opening opening to the outer surface of the body and communicating with the fluid ejection port, and ejecting a fluid from the fluid ejection port The surface side of the body produces a rising swirling flow in a direction away from the surface. According to the present invention, the swirling flow forming body has a fluid discharge port opening to the inner surface of the bowl-shaped body and a fluid inlet port communicating with the fluid ejection port on the outer surface, so that the swirling flow forming body is accommodated The non-contact conveying device can be easily constructed by taking in the fluid from the fluid inlet and the like, and the manufacturing cost of the non-contact conveying device can be suppressed to be lower at 201206808. Further, when the cyclonic flow forming body is mounted on the base body, the outer surface of the body of the swirling flow forming body is pressed into the inner surface of the housing portion of the base body, and the outer surface of the main body and the base body are not In the swirling flow forming body, the main body has a protruding portion on the bottom surface and is integrated with the leakage of the fluid between the inner surfaces of the accommodating portion. The annular flange portion formed on the outer peripheral edge of the opening portion of the pocket portion includes a plurality of protruding portions that protrude from the outer peripheral surface of the annular flange portion toward the bottom surface side and have locking projections at the tip end. With this configuration, the swirling flow forming body can be mounted on the base body in one touch, and the manufacturing cost can be further reduced. Further, since the whirling flow forming body is not attached to the base body, the caulking joint is not used as it is, so that unevenness is not generated at the mounting angle of the swirling flow forming body, or the swirling flow forming body and the base body are formed. The outward bending is performed, so that the accuracy of the floating height of the object to be transported can be maintained high. In the swirling flow formation body, the fluid discharge port is located in a tangential direction of the cylindrical inner wall surface of the pocket portion and is located at a center of the cylindrical inner wall surface, that is, at a center of the pocket portion In the concave portion formed at the opposite position on the diagonal line, the openings respectively located on the cylindrical inner wall surface side of the hole portion are formed in opposite directions. In this way, by forming the fluid ejection openings that are respectively opened in the opposite directions in the concave portion, the fluid ejected from the fluid ejection port can be brought into contact with the cylindrical inner wall surface, and the right rotation direction or the left rotation can be generated in the cavity portion. The upward gyration of the turning direction. Further, the swirling flow forming body can be integrally molded from a thermoplastic synthetic resin such as a polyacetal copolymer resin or the like, so that the manufacturing cost of the swirling flow former can be further reduced. Furthermore, the present invention provides a non-contact conveying device in which two or more swirling flow forming bodies are formed in a substrate and a conveying surface mounted on the base body so as to be mutually oppositely rising in a plan view. The base system includes a plurality of housing portions that are circular in plan view, and are open to the conveying surface; and a bottom surface of the housing portion; and a cylindrical locking recess portion in the form of a belt The cylindrical inner wall surface of the accommodating portion has a diameter larger than the diameter of the opening portion of the accommodating portion; and the protruding portion formed on the bottom surface of the body of the swirling flow forming body abuts the accommodating portion of the base body The bottom surface of the portion is configured to flex the body, and each of the plurality of locking protrusions is received in the cylindrical locking recess of the base body, and the plurality of locking protrusions are caused by the body returning to the original shape Each of the annular locking recesses can be locked, and the outer peripheral surface of the annular flange portion of the main body is press-fitted into the cylindrical inner wall surface of the housing portion of the base body to form the swirling flow. It is mounted to the receiving portion of the base body. According to the present invention, it is possible to improve a non-contact conveying device having a simple structure and a low manufacturing cost, and in the above-described non-contact conveying device, the swirling flow forming body and the fluid suction hole which can generate a swirling flow in one direction can be generated. a column that is alternately arranged along the width direction of the substrate; and the swirling flow forming body and the fluid suction hole that can generate the upward swirling flow in the other direction are alternately arranged along the width direction of the substrate The columns are alternately arranged along the length of the substrate, and the fluid suction holes are formed by the above-mentioned swirling flow forming body at a position of -9 - 201206808 : in the same direction in the width direction and the length direction of the substrate. The way between them is arranged. According to this configuration, the surface from which the swirling flow forming body expands and flows has the same plane on the plurality of swirling flow forming bodies, and the reference for lifting the object to be transported becomes the conveying surface of the base body, so that the conveyance can be controlled with high precision. By raising the height of the object and vacuum-absorbing the surrounding minute amount of fluid by the fluid suction hole, the floating height of the object to be transported can be controlled with high precision, and can be suitably applied to a processing step or the like. (Effect of the Invention) As described above, according to the present invention, it is possible to provide a swirling flow forming body which reduces the manufacturing cost of the non-contact conveying device and prevents the accuracy of the floating height of the object to be conveyed from being lowered, and the use of the swirling flow forming body Non-contact handling device. [Embodiment] Next, an embodiment of the present invention will be described in detail with reference to the drawings. In the following description, a case where air is used as the transport fluid ' and a liquid crystal glass (hereinafter referred to as "glass") is transported as a transported object will be described as an example. Figs. 1(a) to 1(f) are diagrams showing the swirling flow forming body 1 in the swirling flow forming body of the present invention which has a rising swirling flow in the right direction of rotation (clockwise direction) in plan view, and the swirling flow is shown in the present invention. The flow forming body 1 includes a bowl-shaped body la integrally formed of a thermoplastic synthetic resin such as a polyacetal copolymer resin such as -10-201206808, and a hole portion lb having a circular shape in plan view. Located inside the body la and opening at one side; and a ring-shaped crotch portion lc' formed on the body ia, and integrally formed on the outer periphery of the opening portion of the hole portion ib; and four protruding portions if, which are The outer circumferential surface Id of the annular crotch portion lc protrudes downward, and has a locking protrusion le at the distal end and is formed to face in the radial direction; and a cylindrical protruding portion lh is attached to the center of the bottom surface lg of the main body la The portion protrudes slightly downward from the bottom surface 18; and the recessed portions lj, lj' are formed on the cylindrical inner wall surface of the pocket portion 1b of the main body 1a and formed in the tangential direction of the cylindrical inner wall surface li and interposed therebetween The center of the hole lb is opposite to the diagonal position; and the air The discharge ports lk, lk are formed in the respective recesses lj, and are respectively opened in opposite directions toward the cylindrical inner wall surface li side of the pocket portion 1b; and the air intake ports 11, 11 are connected to the discharge port lk And opening on the outer circumference of the body 1 a. The swirling flow forming body 1 is in contact with the cylindrical inner wall surface li of the hole portion lb of the main body la by the air which is injected from the discharge ports lk and lk by the air inlets 11 and 11, respectively, and is formed in a plan view. The upward swirling flow in the right direction of rotation (the direction of the arrow in Fig. 1(b)). Figs. 2(a) to 2(f) are diagrams showing the swirling flow forming body 4 in the swirling flow forming body of the present invention which has a rising swirling flow in the left direction of rotation in plan view, and the swirling flow forming body 4, Similarly to the swirling flow forming body 1, the bowl-shaped main body 4a is integrally molded of a thermoplastic synthetic resin such as a polyacetal copolymer resin, and a hole portion 4b having a circular shape in plan view. Located inside the body 4a and opening at a side of -11 - 201206808; and an annular ridge 4c formed on the body 4a and integrally formed on the outer periphery of the opening of the hole portion 4b; and 4 protrusions 4f, which protrudes downward from the outer peripheral surface 4d of the annular flange portion 4c, and has a locking projection 4e at the distal end thereof and is formed to face in the radial direction; and a cylindrical projection 4h' is attached to the body 4a. The central portion of the bottom surface 4g protrudes slightly downward from the bottom surface 4g, and the concave portions 4j and 4j are formed in the cylindrical inner wall surface 4i of the cavity portion 4b of the main body 4a and are formed in the tangential direction of the inner wall surface 4i. The center of the hole 4b is located at the opposite position on the diagonal The air ejection ports 4k, 4k' are formed in the respective recesses 4j, and are respectively opened in opposite directions toward the cylindrical inner wall surface 4i side of the hole portion 4b; and the air intake ports 41, 41 are connected to each other. The discharge ports 4k and 4k are opened to the outer peripheral surface of the body 4a. The swirling flow forming body 4 is in contact with the cylindrical inner wall surface 4i of the hole portion 4b of the main body 4a by the air which is ejected from the ejection ports 4k and 4k by the air inlets 41 and 41, and is formed in a plan view. The upward swirling flow in the left direction of rotation (the direction of the arrow in Fig. 2(b)). As shown in Fig. 3 (a) and (b), the base 2 to which the swirling flow forming body 1 or 4 is attached is provided with a housing portion 2b which is circular in plan view and which is passed through the conveying surface 2a. And a bottom surface 2d of the accommodating portion 2b; and a strip-shaped cylindrical locking recess 2e formed in the cylindrical inner wall surface 2c of the accommodating portion 2b, and forming a diameter ratio accommodating portion 2b The diameter of the opening is also larger; and the through hole 2g is supplied to the accommodating portion 2b via air supplied from the pump (not shown) along the longitudinal direction of the base 2. -12- 201206808 When the swirling flow forming body 1 is installed in the housing portion 2b of the base 2, the swirling flow forming body 1 is inserted into the housing portion 2b of the base body 2 from the locking projection le side of the protruding portion If, as in the fifth As shown in (a), after the protruding portion lh of the swirling flow forming body 1 abuts against the bottom surface 2d of the accommodating portion 2b of the base 2, when the swirling flow forming body 1 is pressed down, the body la is deflected. The locking projection le can be inserted into the belt-shaped cylindrical locking recess 2e. Thereafter, when the pressing force of the swirling flow forming body 1 is released downward, as shown in Fig. 5(b), the main body la returns to the original shape, and the locking projection le of the swirling flow forming body 1 is locked. In the state of the cylindrical locking recess 2e of the base 2, the swirling flow forming body 1 can be firmly fixed to the base 2. At this time, since the outer circumferential surface Id of the main body 1a of the swirling flow forming body 1 is press-fitted into the cylindrical inner wall surface 2c of the housing portion 2b of the base 2, air can be prevented from being pressed in. The fitting part leaks. Further, the case where the swirling flow formed body 4 is attached to the accommodating portion 2b of the base 2 may be carried out in the same manner as the method of attaching the swirling flow forming body 1 to the accommodating portion 2b of the base 2. Fig. 4 (a) and (b) show another embodiment of the base body 2 in which the swirling flow forming body 1 or 4 is attached, and includes a housing portion 2b which is circular in plan view and which is passed through the carrying portion. The surface 2a is open to the upper surface; and the bottom surface 2d of the accommodating portion 2b; and a strip-shaped cylindrical locking recess 2e formed in the cylindrical inner wall surface 2c of the accommodating portion 2b and formed to have a diameter ratio The opening of the portion 2b has a larger diameter; and the air passage 2f is formed from a pump (not shown) along the longitudinal direction of the base 2, and a part of the opening is formed in the housing portion 2b. In the base 2 of the -13 to 201206808 shown in Figs. 4(a) and (b), it is not necessary to take air from the air passage 2f in the base 2 shown in the above Figs. 3(a) and (b). The through hole 2g is supplied to the accommodating portion 21). Further, the method of attaching the swirling flow forming body 1 or 4 to the base 2 shown in Figs. 4(a) and 4(b) is the same as the mounting method described in the above Figs. 5 and 5(b). . Next, the operation of the above-described swirling flow forming body 1 and the base body 2 in which the swirling flow forming body 1 is mounted will be described with reference to Fig. 6. The air supplied from the chestnut (not shown) to the air passage 2f of the base 2 is supplied to the accommodating portion 2b' via the through hole 2g communicating with the air passage 2f, and the air of the forming body 1 is formed from the accommodating portion 2b via the swirling flow. The inlets 11 and 11 (see FIG. 1(e)) are ejected from the discharge ports Ik and lk to the hole portions 1b, respectively. The ejected air 'contacts the cylindrical inner wall surface of the pocket portion 1b, and generates a rising swirling flow in the right direction of rotation (clockwise direction) in a plan view above the hole portion 1b of the swirling flow forming body 1. Then, the rising swirling flow is used to float the glass 3 as the object to be transported. Next, an embodiment of the non-contact conveying device of the present invention will be described with reference to Figs. 7 and 8. The non-contact conveying device 1 shown in Fig. 7 is used for transporting the glass 3 in a non-contact manner, and includes two conveying steps 11 and 13 and a processing step 12 of carrying the conveying steps 11 and 13 . In the two transport steps 11 and 13, three non-contact transporting devices 21 are arranged side by side, and the non-contact transporting device 21 is a swirling flow forming body 1 and a swirling flow which can generate a reverse swirling flow with the swirling flow forming body 1. The swirling flow forming body 4 is configured by arranging a plurality of the conveying surfaces 2a of the base body 2 in a row of two rows and on the paper surface of the seventh to fourth sheets of the drawings. Further, for ease of illustration, the swirling flow forming body 4 is shown in black. On the other hand, as shown in Fig. 7(a), the non-contact conveying device 12 in the processing step 12 is provided with a base 2 which is capable of generating a swirling flow of a rising swirling flow in a right direction of rotation in plan view. The formation body 1 and the small diameter holes 31 for sucking in a small amount of air are sucked, and are arranged alternately in the width direction of the base body 2; and the swirling flow which can generate the upward swirling flow in the left rotation direction in a plan view is formed. The body 4 and the small diameter holes 31 for inhaling the fluid for inflowing a small amount of air are alternately arranged along the width direction of the base body 2, and are arranged alternately along the longitudinal direction of the base body 2, and have a diameter of 1 to 2 mm. The left and right small diameter holes 31 are arranged between the swirling flow forming bodies 1 and 1 adjacent to the width direction and the longitudinal direction of the base 2 and between the adjacent swirling flow forming bodies 4 and 4. As shown in Fig. 7(b), the non-contact conveying device 32 is configured by arranging three rows in parallel. Next, the detailed structure of the non-contact conveying device 32 in the above-described processing step 12 will be described with reference to Fig. 8. The swirling flow forming bodies 1 and 4 attached to the conveying surface 2a of the base 2 are supplied with air through an air passage 2f and a pump (not shown) which are bored in the longitudinal direction of the base 2 inside the base 2 The discharge ports lk and lk of the swirling flow forming body 1 shown in Fig. 1(e) and the discharge ports 4k and 4k of the swirling flow forming body 4 shown in Fig. 2(e) are ejected to the hole portions lb and 4b. . The air ejected from the discharge ports lk, lk, and 4k, 4k is in contact with the cylindrical inner wall surfaces 1i and 4i' of the pocket portions 1b and 4b, thereby the -15-201206808 swirling flow forming body 1 The upward swirling flow in the right direction of rotation is generated above the hole portion lb, and the swirling flow forming body 4 generates a rising swirling flow in the left direction of rotation in a plan view above the hole portion 4b. Here, as shown in Fig. 8(b), since the air passages 2f' are communicated with each other via a communication hole (not shown), the discharge ports lk, lk, and 4k, 4k can be uniformly maintained. The amount of air ejected, and the floating height of the glass 3 can be uniformly maintained. Further, as shown in Fig. 8(b), the conveying surface 2a of the base body 2 is opened between the swirling flow forming bodies 1 and 1 adjacent to the width direction and the longitudinal direction of the base body 2, and the adjacent maneuvers The small diameter hole 3 1 ' having a diameter of about 1 to 2 mm arranged in a manner between the flow forming bodies 4 and 4 is in communication with the air passage 41 which is bored along the longitudinal direction of the base body 2, and the air passage 41 is borrowed. It is connected by a communication hole (not shown). Therefore, the small diameter hole 311 absorbs the air around the swirling flow forming bodies 1 and 4 by vacuum pumping (not shown), whereby the amount of suction of the air from the small diameter hole 31 can be uniformly maintained, and The floating height of the glass 3 is controlled uniformly and with high precision. In the non-contact conveying device 32 in the processing step, the amount of floating is increased by the supply pressure of the discharge ports lk, lk, and 4k, 4k of the swirling flow forming body 1 and the swirling flow forming body 4 by the control. And the effect of reducing the amount of floating by the vacuum adsorption pressure from the small diameter hole 31, so that the floating height of the object to be transported 30 to 50 μm can be controlled with high precision. The operation of the non-contact handling device 10-16-201206808 will be described with reference to FIG. In the state in which the non-contact conveyance device 21 of the conveyance step 11 has been floated, the glass 3 conveyed by the separately provided air ejection device (not shown) or the like is subjected to the non-contact conveyance in the processing step 12. In the case of the device 32, the floating swirl flow generated by the swirling flow forming bodies 1 and 4 is floated, and the small amount of air passing between the respective swirling flow forming bodies is used to vacuum-adsorb the surrounding minute air. 3, the floating height of 30 to 50 μm can be controlled with high precision, and various inspections or processes can be performed. Thereafter, the glass 3 is transported to the next step by a separately provided air ejection device in a state where the non-contact conveying device 21 of the transporting step 13 has been floated. Here, the glass 3 having a thickness of 77 mm is in the first 7 In the processing step 12 shown in (b), the following experimental results are obtained: the diameters of the holes lb, 4b of the swirling flow forming bodies 1 and 4 are φ 16 mm, and the diameters of the ejection ports lk and 4k are 0.35 mm. In the state where the air supply pressure is 50 kPa and the vacuum suction pressure is 10 kPa, the amplitude of the bending fluctuation of the glass 3 can be suppressed to 3 Ομη or less. In contrast, in the front and rear conveying steps 1 1 and 13, the glass 3 is The amplitude of the bending undulation will exceed 1 〇〇μπι. Fig. 9 is a view showing another embodiment of the processing step 12 of the non-contact conveying device 10 shown in Fig. 7(b), and in the processing step 12, three non-contact conveying devices 32 are arranged side by side. Further, the three non-contact conveying devices 32 adjacent to the non-contact conveying device 32 are arranged. In the processing step 12 of the non-contact conveying device 32 in which two rows are arranged, 'the operation between the non-contact conveying devices 3 2 and 32' is performed, for example, a photographing penetration inspection or the like. Further, in the above-described embodiment, as shown in Figs. 1 and 2, the concave portions lj and 4j are provided in the hole portions lb of the swirling flow forming bodies 1 and 4, and the concave portions lj and 4j are formed. Although the discharge ports lk and 4k are provided, the recesses lj and 4j are not necessarily provided, and the discharge ports lk and 4k may be directly formed on the cylindrical inner wall surfaces U and 4i of the pocket portion 1b. Further, in the main bodies la of the swirling flow forming bodies 1 and 4 and the annular weir portions lc and 4c of the 4a, the peripheral surfaces Id and 4d extend in the radial direction so as to extend four protruding portions having the locking projections le and 4e. If and 4f, the number of the protrusions If and 4f is not limited to four, and may be three or five or more. Further, when the swirling flow forming bodies 1 and 4 are attached to the base 2, the protruding portions If and 4f having the locking projections le and 4e are not used, and other locking structures may be employed. Furthermore, in the above embodiments, the case where air is used as the fluid has been described, but a processing gas such as nitrogen other than air may be used. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing an embodiment of a swirling flow forming body of the present invention which produces a swirling flow in a right direction of rotation (clockwise direction) in plan view; wherein (a) is a front view; (b) is a plan view; (c) is a bottom view; (d) is a cross-sectional view taken along line A of (b); (e) is an enlarged cross-sectional view of a portion B of (c); (f) is a portion C of (d) Zoom in on the section view. Fig. 2 is a view showing an embodiment of the present invention for generating a swirling flow forming body having a swirling flow in a left direction of rotation (counterclockwise direction) in plan view; wherein (a) is a front view; b) is a top view; (Ο is a bottom view; (d) is a cross-sectional view of the D-D line of (c); (e) is an enlarged cross-sectional view of the E portion of (c); (f) is the F portion of (d) Fig. 3 is a schematic view showing an embodiment of a base body in which a swirling flow forming body is mounted; (a) is a plan view; (b) is a cross-sectional view taken along line GG of (a). Fig. 4 is a view showing installation A schematic view of another embodiment of the matrix of the swirling flow forming body; wherein (a) is a plan view; (b) is a cross-sectional view taken along line HH of (a), and FIG. 5 is a view for explaining the swirling flow shown in FIG. A cross-sectional view of a method of forming a substrate provided with a body shown in Fig. 3; wherein (a) is a state in which the entire swirling flow forming body is pressed down on the bottom surface of the housing portion of the base body; (b) a swirling flow is formed. The body is mounted in the state of the housing portion of the base body. Fig. 6 shows the formation of the swirling flow forming body shown in Fig. 1. Fig. 7 is a plan view showing an embodiment of a non-contact conveying device of the present invention; wherein (a) is a non-contact conveying device for displaying a processing step; (a) is a plan view showing the entire non-contact conveying device including the conveying step. Fig. 8 is a schematic view showing the non-contact conveying device for the processing step shown in Fig. 7; wherein (a) is (b) is a cross-sectional view taken along line 。. Fig. 9 is a plan view showing another embodiment of the non-contact conveying device including the conveying step of the present invention. -19·201206808 [Description of main component symbols] I, 4: gyro flow forming body 1 a, 4a: body lb, 4b: hole portion lc, 4c: annular rim portion ld, 4d: annular dam portion outer peripheral surface 1 e, 4e: locking protrusion
If、4f :突出部 1 g、4g :底面 lh、 4h :突出部 li、 4i :圓筒狀內壁面 lj 、 4j :凹部 lk、4k :噴出口 II、 41 :空氣取入口 2 :基體 2 a :搬運面 2b :容納部 2c :圓筒狀內壁面 2d :底面 2e :圓筒卡止凹部 2f :空氣通路 2g :貫通孔 3 :氣體 1 〇 :非接觸搬運裝置 -20 201206808 1 1、1 3 :搬運步驟 1 2 :處理步驟 2 1 =非接觸搬運裝置 3 1 :小徑孔 32 :非接觸搬運裝置 41 :空氣通路If, 4f: protruding portion 1 g, 4g: bottom surface lh, 4h: protruding portion li, 4i: cylindrical inner wall surface lj, 4j: concave portion lk, 4k: discharge port II, 41: air intake port 2: base body 2 a : conveying surface 2b : housing portion 2 c : cylindrical inner wall surface 2d : bottom surface 2e : cylinder locking recess 2f : air passage 2 g : through hole 3 : gas 1 〇 : non-contact conveying device -20 201206808 1 1 , 1 3 : conveying step 1 2 : processing step 2 1 = non-contact conveying device 3 1 : small diameter hole 32 : non-contact conveying device 41 : air passage