CN102892693A - Swirl flow forming body and contactless conveyance device - Google Patents
Swirl flow forming body and contactless conveyance device Download PDFInfo
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- CN102892693A CN102892693A CN2011800186861A CN201180018686A CN102892693A CN 102892693 A CN102892693 A CN 102892693A CN 2011800186861 A CN2011800186861 A CN 2011800186861A CN 201180018686 A CN201180018686 A CN 201180018686A CN 102892693 A CN102892693 A CN 102892693A
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- eddy flow
- organizator
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- section
- main body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
- B65G49/064—Transporting devices for sheet glass in a horizontal position
- B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Abstract
Provided are a swirl flow forming body which enables a contactless conveyance device to be manufactured at reduced cost and which does not impair the accuracy of the lifted height of an object being conveyed, and the contactless conveyance device. A swirl flow forming body (1), etc. provided with: a bowl-like body (1a) having a hole (1b) open on the front surface side and having a circular shape in a plan view; a fluid ejection opening (1k) open in the inner surface which forms the hole of the body; and a fluid intake opening (1l) open in the outer surface of the body and communicating with the fluid ejection opening. The swirl flow forming body (1), etc. generate an ascending swirl flow on the front surface side of the body by ejecting fluid from the fluid ejection opening, the swirl flow moving in the direction in which the swirl flow is separated from the front surface. A contactless conveyance device can be configured by disposing on a conveyance surface (2a) of a base body (2) two or more swirl flow forming bodies including the swirl flow forming body (1) and also including a swirl flow forming body (4) which generates a swirl flow in the opposite direction in a plan view. The swirl flow forming bodies can be contained in recesses (containing sections (2b)) formed in the conveyance surface of the base body.
Description
Technical field
The present invention relates to the eddy flow organizator and use the contact-free transport device of this eddy flow organizator, particularly at FPD(flat-panel monitors such as large-scale Liquid Crystal Display (LCD) and/or plasma displays (PDP)) and/or the production of solar panel (solar panels) etc. in the railway line contact-free transport device that uses and the eddy flow organizator that consists of this contact-free transport device.
Background technology
In the past, when the production of FPD and/or solar panel etc., adopted the method by making a panel maximize to enhance productivity.For example, in the situation of liquid-crystalline glasses, in the tenth generation, can become the size of 2850 * 3050 * 0.7mm.Therefore, when loading liquid-crystalline glasses and roll when transporting arranging a plurality of rollers as in the past, can because of the fluctuation of the bending of the axle of backing roll and/or the roller height stronger power of effect partly on liquid-crystalline glasses, might damage liquid-crystalline glasses.
The above-mentioned rolling conveyer that is formed by roller is can not adopt in the treatment process of non-contacting, for example FPD requiring between this device and the panel, in recent years, is beginning the conveyer that adopts air to float.As contact-free transport device, thereby have in the part of tabular track with porous material and by making itself and air feed path be communicated with to come air feed FPD to be floated the device that transports by the ejection air.But, when using this device, on one side FPD becomes the state that swims at the upper and lower upward movement on one side, although therefore can in transporting operation, use, but can't in the treatment process of the high-precision levitation height that for example requires 30 ~ 50 μ m, adopt.
In addition, if state in the use the hole that vacuumizes usefulness be set on the tabular track of porous material, then the formation of device complicates, install the high price that self becomes, and, when improving supply gas pressure in order to keep levitation height accurately, the excited vibration that the compressibi1ity of high rigid air relates to occurs, existence can not keep the such problem of levitation height accurately.
Have again, although also exist with the hole that vacuumizes usefulness and alternately wear the device that cutoff port (hole of path) replaces porous material, but, existence produces static because of the stronger ejection air from cutoff port or disarrays the environment of clean room, and consumed flow increases and makes operating cost increase such problem.
So, in patent documentation 1, reduce and can keep accurately the contact-free transport device of levitation height as fluid flow and energy consumption, proposed such as lower device: the face that transports at matrix possesses two with the forward spin flow organizator, this eddy flow organizator is by producing the eddy flow towards the direction of leaving from the face side of endless member from fluid ejiction opening ejecting fluid, and produces the flow towards back side direction near the peristome of the face side of endless member.
The prior art document
Patent documentation 1: the international booklet that discloses No. 2009/119377.
Summary of the invention
Invent problem to be solved
In the contact-free transport device of above-mentioned patent documentation 1 record, recess at the face that transports that is formed at matrix places the eddy flow organizator, be arranged at the outer peripheral face that recess protrusion ca(u)lk on every side engages this eddy flow organizator by giving prominence to, therefore, the eddy flow organizator is installed the manufacturing cost rising that needs to cause for a long time contact-free transport device to matrix, and when eddy flow organizator ca(u)lk is engaged in matrix, the setting angle of eddy flow organizator can produce inequality or can produce reflex action at eddy flow organizator and/or matrix (track), the problem that exists the precision of the levitation height of carried object to descend.
So, the present invention develops in view of above-mentioned the problems of the prior art, its purpose be the levitation height that the manufacturing cost that can reduce contact-free transport device is provided and prevents carried object precise decreasing the eddy flow organizator and use the contact-free transport device of this eddy flow organizator.
For achieving the above object, a kind of eddy flow organizator of the present invention is characterized in that possessing: bowl-shape main body, and it has in the rounded hole section of overlooking of face side opening; The fluid ejiction opening, the inside face opening of its described hole of formation in this main body section; Be taken into mouth with fluid, it is communicated with at the outside face opening of described main body and with described fluid ejiction opening, by from described fluid ejiction opening ejecting fluid, produces rising eddy flow towards the direction of leaving from this surface in the face side of described main body.
According to the present invention, the eddy flow organizator makes the fluid ejiction opening at the inside face opening of bowl-shape main body, and possess the fluid that is communicated with the fluid ejiction opening at outside face and be taken into mouth, therefore this eddy flow organizator is placed in the recess of matrix etc., and be taken into mouth from fluid and be taken into fluid, can consist of simply contact-free transport device thus, the manufacturing cost of contact-free transport device can be suppressed lower.In addition, when this eddy flow organizator is installed on matrix, the outside face of the main body of this eddy flow organizator is pressed into the inside face of the section that places of matrix, and the leakage ground that thus can not can produce fluid between the inside face of the section that places of the outside face of this main body and matrix is installed on described matrix with this eddy flow organizator.
In addition, in described eddy flow organizator, described main body possesses protrusion in the bottom surface, and possess the integrally formed annular flange portion of outer peripheral edges at the peristome of described hole section, it is outstanding and have a plurality of protrusions of locking protrusion at front end to described bottom surface side that this main body possesses outer peripheral face from this annular flange portion.According to this formation, the eddy flow organizator can be installed on the matrix with an operation, can further reduce manufacturing cost.In addition, when the eddy flow organizator is installed on matrix, do not use ca(u)lk in the past to engage, so the setting angle of eddy flow organizator can not produce inequality, eddy flow organizator and matrix and produce and can not produce reflex action yet, therefore can keep than the highland precision of the levitation height of carried object.
In described eddy flow organizator, on tangential direction on the cylindric internal face of described hole section, that be positioned at this cylindric internal face and the center that clips this hole section on diagonal line relatively to the position be formed with recess, be formed with respectively described fluid ejiction opening at this recess, the described peristome of described fluid ejiction opening is towards the cylindric internal face side of described hole section and direction towards the opposite respectively.Like this, by forming respectively the round about fluid ejiction opening of opening at this recess, from fluid and the internal face butt cylindraceous of this fluid ejiction opening ejection, can produce in this hole section the rising eddy flow of dextrorotation direction or left hand direction.
In addition, the eddy flow organizator can be one-body molded by thermoplastic synthetic resin, can further reduce the manufacturing cost of eddy flow organizator.
Have, contact-free transport device of the present invention comprises: matrix again; Overlook mutually two of being rightabout rising eddy flow with the generation of installing at the face that transports of this matrix and it is characterized in that with the forward spin flow organizator this matrix possesses: transporting the rounded a plurality of sections that place of overlooking of face opening; This places the bottom surface of section; Lock recess with the cylinder of band shape, it forms at the cylindric internal face that this places section, diameter is larger than the diameter of peristome that this places section, the bottom surface that the protrusion of the bottom surface of the described main body by being formed at described eddy flow organizator is connected to the section that places of described matrix makes this main body crooked, thereby described a plurality of locking protrusion is received upon respectively the cylinder of described matrix and locks in the recess, described a plurality of locking protrusions be limited to respectively this cylinder lock recess thereby return to original shape by this main body, thereby and the outer peripheral face of the annular flange portion of this main body this eddy flow organizator of cylindric internal face of being pressed into the section that places that is embedded in described matrix be installed in the section that places of described matrix.
In addition, in described contact-free transport device, alternately dispose the row that the described eddy flow organizator of the row that the described eddy flow organizator of the rising eddy flow that will produce a direction and the inhalant hole of fluid form along the Width alternate configurations of described matrix and the rising eddy flow that will produce other direction and the inhalant hole of fluid form along the Width alternate configurations of described matrix along the length direction of this matrix, and the inhalant hole of described fluid is arranged in and is positioned at: pressing between the described eddy flow organizator that equidirectional produces the rising eddy flow on the Width of this matrix and the length direction.According to this formation, the face that flows from the expansion of eddy flow organizator is coplanar at a plurality of eddy flow organizators, the reference plane that carried object is floated becomes the face that transports of matrix, therefore can control accurately the levitation height of carried object, and by utilizing the inhalant hole of fluid vacuum suction micro fluid on every side, just can control accurately the levitation height of carried object, can be applied to suitably treatment process etc.
The invention effect
As mentioned above, according to the present invention, the manufacturing cost that can reduce contact-free transport device can be provided and prevent carried object levitation height precise decreasing the eddy flow organizator and use the contact-free transport device of this eddy flow organizator.
Description of drawings
Fig. 1 is the figure of an embodiment of the generation that the present invention relates to of the expression eddy flow organizator of overlooking the eddy flow that is dextrorotation direction (clockwise direction), (a) be front view, (b) be birds-eye view, (c) be upward view, (d) be the A-A line cutaway view of (b), (e) be the amplification view of the B section of (c), (f) be the amplification view of C section.
Fig. 2 is the figure of an embodiment of the generation that the present invention relates to of the expression eddy flow organizator of overlooking the eddy flow that is left hand direction (anticlockwise direction), (a) be front view, (b) be birds-eye view, (c) be upward view, (d) be the D-D line cutaway view of (b), (e) be the amplification view of the E section of (c), (f) be the amplification view of F section.
Fig. 3 is the figure of an embodiment of expression matrix that the eddy flow organizator is installed, (a) is birds-eye view, (b) is the G-G line cutaway view of (a).
Fig. 4 is the figure of another embodiment of expression matrix that the eddy flow organizator is installed, (a) is birds-eye view, (b) is the H-H line cutaway view of (a).
Fig. 5 is the cutaway view that eddy flow organizator shown in Figure 1 is installed on the main points of matrix shown in Figure 3 for explanation, (a) expression is pressed the state of bottom surface of the section that places of matrix with whole eddy flow organizator, and (b) expression has been installed on the eddy flow organizator state of the section that places of matrix.
Fig. 6 is the cutaway view of state that represents eddy flow organizator shown in Figure 1 to be installed on the section that places of matrix shown in Figure 3.
Fig. 7 is the figure of an embodiment of the contact-free transport device that the present invention relates to of expression, (a) being the birds-eye view that the expression treatment process is used the part of contact-free transport device, (b) is to represent to comprise to transport operation at the birds-eye view of interior contact-free transport device integral body.
Fig. 8 is the figure that expression treatment process shown in Figure 7 is used contact-free transport device, (a) is birds-eye view, (b) is the I-I line cutaway view of (a).
Fig. 9 be expression the present invention relates to comprise and transport operation at the birds-eye view of another embodiment of interior contact-free transport device.
The specific embodiment
Below, on one side describe in detail with reference to accompanying drawing on one side about embodiments of the present invention.In addition, in the following description, lift and to use the air conduct to transport with fluid and transport liquid-crystalline glasses (hereinafter referred to as " glass ") to describe as example as the situation of carried object.
Fig. 1 (a) is the eddy flow organizator 1 of overlooking the rising eddy flow that is dextrorotation direction (clockwise direction) in the generation eddy flow organizator that the present invention relates to of expression to Fig. 1 (f), and this eddy flow organizator 1 possesses: with such as the integrated bowl-shape main body 1a of the thermoplastic synthetic resins such as polyacetal; Be positioned at the inside of main body 1a and at the rounded 1b of hole section of overlooking of side's opening; Be formed at main body 1a and at the integrally formed annular flange portion 1c of outer peripheral edges of the peristome of the 1b of this hole section; Four protrusion 1f, it is outstanding downwards from outer peripheral face 1d of this annular flange portion 1c, and has locking protrusion 1e and diametrically opposedly form to ground at front end; Protrusion 1h cylindraceous, its central portion at the bottom surface of main body 1a 1g is outstanding slightly downwards from this bottom surface 1g; Recess 1j, 1j, its on tangential direction on the cylindric internal face 1i of the hole of the main body 1a 1b of section, that be positioned at this cylindric internal face 1i and the center O that clips the 1b of this hole section on diagonal line relatively to the position form; Ejiction opening 1k, the 1k of air, it is formed at each recess 1j, towards the cylindric internal face 1i side of the 1b of hole section and opening round about respectively; Be communicated in ejiction opening 1k and be taken into a mouthful 1l, 1l at the air of the outer peripheral face opening of main body 1a.
Above-mentioned eddy flow organizator 1, be connected to respectively the cylindric internal face 1i of the 1b of hole section of main body 1a by be taken into a mouthful 1l, 1l via air from the air of ejiction opening 1k, 1k ejection, overlook the rising eddy flow (direction of arrow among Fig. 1 (b)) that is the dextrorotation direction and produce.
Fig. 2 (a) is the eddy flow organizator 4 of overlooking the rising eddy flow that is left hand direction in the generation eddy flow organizator that represents the present invention relates to Fig. 2 (f), this eddy flow organizator 4 is same with above-mentioned eddy flow organizator 1, possesses: with such as the integrated bowl-shape main body 4a of the thermoplastic synthetic resins such as polyacetal; Be positioned at the inside of main body 4a and at the rounded 4b of hole section of overlooking of side's opening; Annular flange portion 4c, it is formed at main body 4a, and integrally formed in the outer peripheral edges of the peristome of the 4b of this hole section; Four protrusion 4f, it is outstanding downwards from outer peripheral face 4d of this annular flange portion 4c, and has locking protrusion 4e and diametrically opposedly form to ground at front end; Protrusion 4h cylindraceous, its central portion at the bottom surface of main body 4a 4g is outstanding slightly downwards from this bottom surface 4g; Recess 4j, 4j, its on tangential direction on the cylindric internal face 4i of the hole of the main body 4a 4b of section, that be positioned at this internal face 4i and the center O that clips the 4b of this hole section on diagonal line relatively to the position form; Ejiction opening 4k, the 4k of air, it is formed at each recess 4j and distinguishes round about opening towards the cylindric internal face 4i side of the 4b of hole section; Be communicated in ejiction opening 4k and be taken into a mouthful 4l, 4l at the air of the outer peripheral face opening of main body 4a.
Above-mentioned eddy flow organizator 4, be connected to respectively the cylindric internal face 4i of the 4b of hole section of main body 4a by be taken into a mouthful 4l, 4l via air from the air of ejiction opening 4k, 4k ejection, overlook the rising eddy flow (direction of arrow among Fig. 2 (b)) that is the dextrorotation direction and produce.
Shown in Fig. 3 (a) and (b), the matrix 2 that above-mentioned eddy flow organizator 1 or 4 are installed possesses: overlook the conglobate 2b of section that places, it wears at the face 2a of transporting, and in upper surface open; This places the bottom surface 2d of the 2b of section; Banded cylindric engaging recessed part 2e, it forms at the cylindric internal face 2c that this places the 2b of section, and diameter is larger than the diameter of the peristome that places the 2b of section; With through hole 2g, its air supply that will supply with from the air flue 2f that pump (not shown) forms via the length direction along matrix 2 is to placing the 2b of section.
When the eddy flow organizator being installed on the 2b of the section that places of matrix 2, eddy flow organizator 1 is inserted the 2b of the section that places of matrix 2 from the locking protrusion 1e side of protrusion 1f, shown in Fig. 5 (a), behind the bottom surface 2d butt of the 2b of the section that places of the protrusion 1h that makes eddy flow organizator 1 and matrix 2, when pressing down eddy flow organizator 1, main body 1a will be crooked and locking protrusion 1e is inserted banded cylindric locking recess 2e.Then, when removing downwards the pressing force of eddy flow organizator 1, just shown in Fig. 5 (b), main body 1a can return to original shape, is limited at the locking protrusion 1e of eddy flow organizator 1 under the state of cylindric locking recess 2e of matrix 2 eddy flow organizator 1 is firmly fixed at matrix 2.At this moment, the cylindric internal face 2c of the 2b of the section that places of the outer peripheral face 1d of the annular flange portion 1c of the main body 1a of eddy flow organizator 1 and matrix 2 is pressed into chimeric, can prevent that therefore air is pressed into fitting portion from this and leaks.In addition, in the situation of the 2b of the section that places that eddy flow organizator 4 is installed on matrix 2, also can carry out with the method identical with the installation method that above-mentioned eddy flow organizator 1 is installed to the 2b of the section that places of matrix 2.
Fig. 4 (a) and (b) represent to install another embodiment of the matrix 2 of eddy flow organizator 1 or 4, and possess: overlook the rounded 2b of the section that places, it wears at the face 2a of transporting, and in upper surface open; This places the bottom surface 2d of the 2b of section; Banded cylindric engaging recessed part 2e, it forms at the cylindric internal face 2c that this places the 2b of section, and diameter is larger than the diameter of the peristome that places the 2b of section; With air flue 2f, its length direction from pump (not shown) along matrix 2 forms and is a part of to the above-mentioned 2b of the section opening that places.In the matrix 2 shown in these Fig. 4 (a) and (b), do not need to supply air to the through hole 2g that places the 2b of section from air flue 2f in the matrix 2 shown in above-mentioned Fig. 3 (a) and (b).In addition, the installation method of eddy flow organizators 1 or 4 being installed to the matrix 2 shown in these Fig. 4 (a) and (b) is identical with the installation method that has illustrated in above-mentioned Fig. 5 (a) and (b).
Next, about above-mentioned eddy flow organizator 1 and the action that the matrix 2 of this eddy flow organizator 1 is installed, with reference to Fig. 6 on one side illustrate on one side.
Supply to the air of the air flue 2f of matrix 2 from pump (not shown), be fed into via the through hole 2g that is communicated with this air flue 2f and place the 2b of section, be taken into a mouthful 1l, 1l(with reference to Fig. 1 (e) from placing the 2b of section via the air of eddy flow organizator 1) be ejected into the 1b of hole section from ejiction opening 1k, 1k respectively.The air of ejection and the cylindric internal face 1i butt of the 1b of hole section produce above the 1b of of the hole of eddy flow organizator 1 and overlook the rising eddy flow that is dextrorotation direction (clockwise direction), with this rising eddy flow the glass 3 as carried object are floated.
Next, about an embodiment of the contact-free transport device that the present invention relates to, with reference to Fig. 7 and Fig. 8 on one side illustrate on one side.
Contact-free transport device shown in Figure 7 10 is used for transporting glass 3 with cordless, possesses two and transports operation 11 and 13 and transport treatment process 12 between operation 11 and 13 at this.
Transport in operation 11 and 13 at two, dispose side by side three contact-free transport devices 21, this contact-free transport device 21 constitutes, and the eddy flow organizator 4 of the reverse eddy flow of a plurality of eddy flow organizators 1 and generation and this eddy flow organizator alternately is installed on the paper in two row scopes, at Fig. 7 on the face that the transports 2a of matrix 2 up and down.In addition, for the ease of with the aid of pictures, blacking represents eddy flow organizator 4.
On the other hand, shown in Fig. 7 (a), contact-free transport device 32 in the treatment process 12 possesses matrix 2, in this matrix 2, the row that the inhalant diameter holes 31 of fluid of generation being overlooked the eddy flow organizator 1 of the rising eddy flow that is the dextrorotation direction and sucking micro-air forms along the Width alternate configurations of matrix 2; And the row that form along the Width alternate configurations of matrix 2 of the inhalant diameter holes 31 of fluid of generation being overlooked the eddy flow organizator 4 of the rising eddy flow that is left hand direction and sucking micro-air, length direction along matrix 2 alternately disposes, and the diameter holes about diameter 1 ~ 2mm 31 is arranged between the eddy flow organizator 1,1 adjacent on the Width that is located at this matrix 2 and the length direction and between the adjacent eddy flow organizator 4,4.Shown in Fig. 7 (b), this contact-free transport device 32 is that also row arrangement three is listed as and consists of.
Next, about the detailed construction of the contact-free transport device 32 in the above-mentioned treatment process 12, Yi Bian illustrate on one side with reference to Fig. 8.
To eddy flow organizator 1 and 4 air supplies installed at the face that the transports 2a of matrix 2, air is ejected into the 1b of hole section and 4b from ejiction opening 1k, the 1k of the eddy flow organizator 1 shown in Fig. 1 (e) and ejiction opening 4k, the 4k of the eddy flow organizator 4 shown in Fig. 2 (e) via the air flue 2f that wears along the length direction of matrix 2 in the inside of matrix 2 and pump (not shown).By from the air of this ejiction opening 1k, 1k and 4k, 4k ejection and cylindric internal face 1i and the 4i butt of this 1b of hole section and 4b, this eddy flow organizator 1 will produce above the 1b of hole section and overlook the rising eddy flow that is the dextrorotation direction, and eddy flow organizator 4 then can produce above the 4b of hole section and overlook the rising eddy flow that is left hand direction.Here, shown in Fig. 8 (b), be communicated with by intercommunicating pore (not shown) between each air flue 2f is mutual, therefore can keep equably the spray volume from the air of ejiction opening 1k, 1k and 4k, 4k, and can control equably the levitation height of glass 3.
In addition, shown in Fig. 8 (b), at the face that the transports 2a opening of matrix 2 and be arranged in diameter holes 31 between the eddy flow organizator 1 and 1 adjacent on the Width that is located at this matrix 2 and the length direction and between the adjacent eddy flow organizator 4 and 4, about diameter 1 ~ 2mm, be communicated with the air flue 41 that length direction along matrix 2 wears, and this air flue 41 is communicated with by intercommunicating pore (not shown).Therefore, diameter holes 31 just can be kept the uptake from the air of diameter holes 31 equably by draw eddy flow organizator 1 and 4 ambient airs with vacuum pump, and can be evenly and control accurately the levitation height of glass 3.
Like this, in the contact-free transport device 32 in treatment process, utilize to the supply gas pressure of ejiction opening 1k, the 1k of eddy flow organizator 1 and eddy flow organizator 4 and 4k, 4k air feed by control to increase the effect of floatation volume and to be used to reduce from the evacuated pressure of diameter holes 31 these two effects of effect of floatation volume, just can control accurately the levitation height of the carried object of 30 ~ 50 μ m.
Next, the action about contact-free transport device 10 with above-mentioned formation describes with reference to Fig. 7.
Under the state that floats in the contact-free transport device 21 in transporting operation 11, the glass 3 that is transported by the air blowoff (not shown) of other setting, when entering the contact-free transport device 32 for the treatment of process 12, will utilize the rising eddy flows that produce at eddy flow organizator 1 and 4 and float, and utilize the micro-air around diameter holes 31 vacuum suction that are positioned between each eddy flow organizator, thereby just glass 3 can be controlled to be accurately the levitation height of 30 ~ 50 μ m, and can carry out various inspections and/or processing.Then, under the state that floats in the contact-free transport device 21 of glass 3 in transporting operation 13, transported to subsequent processing by air blowoff of other setting etc.Here, can obtain following experimental result: with the glass 3 of 0.7mm thickness in the treatment process 12 shown in Fig. 7 (b), under the shipping situation under the condition of the diameter 0.35mm of the diameter phi 16mm of eddy flow organizator 1,4 the 1b of hole section, 4b, ejiction opening 1k, 4k, supply gas pressure 50kPa, evacuated pressure 10kPa, can be with the amplitude suppressing of glass 3 bending fluctuations below 30 μ m, relative with it, transporting in operation 11 and 13 of front and back, the amplitude of glass 3 bending fluctuations surpasses 100 μ m.
Another embodiment of the treatment process 12 of the contact-free transport device 10 Fig. 9 presentation graphs 7(b), in this treatment process 12, with respect to three contact-free transport devices 32 that are arranged side by side, be adjacent to arrange again three contact-free transport devices 32 with this contact-free transport device 32.Be listed as in the treatment process 12 of this contact-free transport device 32 in arrangement two, between contact- free transport device 32 and 32, carry out such as photographic camera through operations such as inspections.
In addition, in the above-described embodiment, as depicted in figs. 1 and 2, the 1b of is provided with recess 1j and 4j in the hole of eddy flow organizator 1 and 4, be formed with ejiction opening 1k and 4k at recess 1j and 4j, but, not necessarily recess 1j and 4j must be set, also can directly form ejiction opening 1k and 4k at cylindric internal face 1i and the 4i of the 1b of hole section.
In addition, although main body 1a and the annular flange portion 1c of 4a and outer peripheral face 1d and the 4d of 4c in eddy flow organizator 1 and 4, the diametrically opposed extension to ground is provided with four protrusion 1f and 4f with locking protrusion 1e and 4e, but, the quantity of protrusion 1f and 4f is not limited to four, also can be made as more than 3 or 5.Have again, when eddy flow organizator 1 and 4 is installed on matrix 2, also can use protrusion 1f with locking protrusion 1e and 4e and 4f and adopt other to lock structure.
Have again, in the respective embodiments described above, although just use air to be illustrated as the situation of fluid, also can use the processing gases such as air nitrogen in addition.
Description of reference numerals:
1,4 eddy flow organizators
1a, 4a main body
1b, 4b annular flange portion
The outer peripheral face of 1d, 4d annular flange portion
1e, 4e locking protrusion
1f, 4f protrusion
1g, 4g bottom surface
1h, 4h protrusion
The cylindric internal face of 1i, 4i
1j, 4j recess
1k, 4k ejiction opening
1l, 4l air are taken into mouth
2 matrixes
2a transports face
2b places section
The cylindric internal face of 2c
The 2d bottom surface
The 2e cylinder locks recess
The 2f air flue
The 2g through hole
3 glass
10 contact-free transport devices
11,13 transport operation
12 treatment process
21 contact-free transport devices
31 diameter holes
32 contact-free transport devices
41 air flues
Claims (6)
1. eddy flow organizator is characterized in that possessing:
Bowl-shape main body, it has in the rounded hole section of overlooking of face side opening;
The fluid ejiction opening, the inside face opening of its described hole of formation in this main body section; With
Fluid is taken into mouth, and it is communicated with at the outside face opening of described main body and with described fluid ejiction opening,
By from described fluid ejiction opening ejecting fluid, produce rising eddy flow towards the direction of leaving from this surface in the face side of described main body.
2. eddy flow organizator according to claim 1 is characterized in that,
Described main body possesses protrusion in the bottom surface, and possesses the integrally formed annular flange portion of outer peripheral edges at the peristome of described hole section, and it is outstanding and have a plurality of protrusions of locking protrusion at front end to described bottom surface side also to possess outer peripheral face from this annular flange portion.
3. eddy flow organizator according to claim 1 and 2 is characterized in that,
On tangential direction on the cylindric internal face of described hole section, that be positioned at this cylindric internal face and the center that clips this hole section on diagonal line relatively to the position be formed with recess, be formed with respectively described fluid ejiction opening at this recess, the described peristome of described fluid ejiction opening is towards the cylindric internal face side of described hole section and direction towards the opposite respectively.
4. according to claim 1,2 or 3 described eddy flow organizators, it is characterized in that,
This eddy flow organizator is one-body molded by thermoplastic synthetic resin.
5. a contact-free transport device comprises: matrix; With install at the face that transports of this matrix, produce and overlook mutually two of being rightabout rising eddy flow and it is characterized in that with the forward spin flow organizator,
This matrix possesses: transporting the rounded a plurality of sections that place of overlooking of face opening; This places the bottom surface of section; Lock recess with the cylinder of band shape, it forms at the cylindric internal face that this places section, and diameter is larger than the diameter of peristome that this places section,
Described eddy flow organizator is each the described eddy flow organizator in the claim 2 to 4,
The bottom surface that the protrusion of the bottom surface by being formed at described main body is connected to the section that places of described matrix makes this main body crooked, thereby described a plurality of locking protrusion is received upon respectively the cylinder of described matrix and locks in the recess, described a plurality of locking protrusions be limited to respectively this cylinder lock recess thereby return to original shape by this main body, thereby and the outer peripheral face of the annular flange portion of this main body cylindric internal face that is pressed into the section that places that is embedded in described matrix this eddy flow organizator is installed on the section that places of described matrix.
6. contact-free transport device according to claim 5 is characterized in that,
Produce the row that the described eddy flow organizator of any one in the described claim 2 to 4 of the row that the described eddy flow organizator of any one in the described claim 2 to 4 of rising eddy flow of a direction and the inhalant hole of fluid form along the width alternate configurations of described matrix and the rising eddy flow that will produce other direction and the inhalant hole of fluid form along the width alternate configurations of described matrix, length direction along this matrix alternately configures, and the inhalant hole of described fluid is arranged in and is positioned at: pressing between the described eddy flow organizator that equidirectional produces the rising eddy flow on the width of this matrix and length direction.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010092726 | 2010-04-14 | ||
| JP092726/2010 | 2010-04-14 | ||
| PCT/JP2011/054095 WO2011129152A1 (en) | 2010-04-14 | 2011-02-24 | Swirl flow forming body and contactless conveyance device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102892693A true CN102892693A (en) | 2013-01-23 |
| CN102892693B CN102892693B (en) | 2014-09-10 |
Family
ID=44798531
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201180018686.1A Expired - Fee Related CN102892693B (en) | 2010-04-14 | 2011-02-24 | Swirl flow forming body and contactless conveyance device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5740394B2 (en) |
| KR (1) | KR20130059318A (en) |
| CN (1) | CN102892693B (en) |
| TW (1) | TWI503269B (en) |
| WO (1) | WO2011129152A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103662835A (en) * | 2013-09-03 | 2014-03-26 | 浙江大学 | Cyclonic air current suspension device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5536516B2 (en) * | 2010-04-14 | 2014-07-02 | オイレス工業株式会社 | Non-contact transfer device |
| KR101469688B1 (en) * | 2014-03-21 | 2014-12-05 | 한국뉴매틱(주) | Check-valve assembly for vacuum system |
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|---|---|---|---|---|
| JPH0276242A (en) * | 1988-09-12 | 1990-03-15 | Nippon Telegr & Teleph Corp <Ntt> | Conveying method of base board and apparatus therefor |
| CN1765013A (en) * | 2004-03-03 | 2006-04-26 | 秋山泉 | Non-contact holding device, and non-contact holding and conveying device |
| WO2007074855A1 (en) * | 2005-12-27 | 2007-07-05 | Harmotec Co., Ltd. | Non-contact delivery device |
| WO2009119377A1 (en) * | 2008-03-24 | 2009-10-01 | オイレス工業株式会社 | Non-contact carrier device |
| WO2010004800A1 (en) * | 2008-07-10 | 2010-01-14 | オイレス工業株式会社 | Swirl flow forming body and non-contact conveying device |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI222423B (en) * | 2001-12-27 | 2004-10-21 | Orbotech Ltd | System and methods for conveying and transporting levitated articles |
| JP2009028862A (en) * | 2007-07-27 | 2009-02-12 | Ihi Corp | Non-contact carrier |
| TWM341017U (en) * | 2007-12-25 | 2008-09-21 | Jin-Wei Huang | Fan air-floating device for glass substrate transportation |
-
2011
- 2011-02-24 JP JP2012510594A patent/JP5740394B2/en active Active
- 2011-02-24 KR KR1020127024087A patent/KR20130059318A/en active IP Right Grant
- 2011-02-24 CN CN201180018686.1A patent/CN102892693B/en not_active Expired - Fee Related
- 2011-02-24 WO PCT/JP2011/054095 patent/WO2011129152A1/en active Application Filing
- 2011-03-17 TW TW100109124A patent/TWI503269B/en not_active IP Right Cessation
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0276242A (en) * | 1988-09-12 | 1990-03-15 | Nippon Telegr & Teleph Corp <Ntt> | Conveying method of base board and apparatus therefor |
| CN1765013A (en) * | 2004-03-03 | 2006-04-26 | 秋山泉 | Non-contact holding device, and non-contact holding and conveying device |
| WO2007074855A1 (en) * | 2005-12-27 | 2007-07-05 | Harmotec Co., Ltd. | Non-contact delivery device |
| WO2009119377A1 (en) * | 2008-03-24 | 2009-10-01 | オイレス工業株式会社 | Non-contact carrier device |
| WO2010004800A1 (en) * | 2008-07-10 | 2010-01-14 | オイレス工業株式会社 | Swirl flow forming body and non-contact conveying device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103662835A (en) * | 2013-09-03 | 2014-03-26 | 浙江大学 | Cyclonic air current suspension device |
| CN103662835B (en) * | 2013-09-03 | 2015-07-29 | 浙江大学 | Cyclonic air current suspension device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5740394B2 (en) | 2015-06-24 |
| CN102892693B (en) | 2014-09-10 |
| WO2011129152A1 (en) | 2011-10-20 |
| JPWO2011129152A1 (en) | 2013-07-11 |
| KR20130059318A (en) | 2013-06-05 |
| TWI503269B (en) | 2015-10-11 |
| TW201206808A (en) | 2012-02-16 |
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