JP5465595B2 - Non-contact transfer device - Google Patents

Description

  The present invention relates to a swirling flow forming body and a non-contact transfer device using the swirling flow forming body, and particularly to an FPD (flat panel display) such as a large liquid crystal display (LCD) or a plasma display (PDP) or a solar cell panel ( The present invention relates to a rail-shaped non-contact transfer device used in the production of solar panels).

  Conventionally, in the production of FPDs, solar battery panels, etc., a method of increasing production efficiency by enlarging one panel has been adopted. For example, in the case of liquid crystal glass, the size is 2850 × 3050 × 0.7 mm in the tenth generation. Therefore, as in the past, when liquid crystal glass is placed on a plurality of rollers and rolled and conveyed, a strong force acts locally on the liquid crystal glass due to deflection of the shaft supporting the rollers and variations in roller height, There is a risk of damaging the liquid crystal glass.

  The above-described rolling conveyance device using rollers cannot be employed in, for example, an FPD process process in which the device and the panel are required to be in non-contact. In recent years, an air levitation conveyance device has begun to be employed. Yes. As a non-contact conveyance device, there is a device that floats and conveys an FPD by ejecting air by using a porous material for a part of a plate-shaped rail and supplying air in communication with an air supply path. However, if this device is used, the FPD floats while moving in the vertical direction, so that it can be used in the transport process. However, for example, a high flying height of 30 to 50 μm is required. It cannot be used in process steps.

  In addition, if a hole for vacuuming is provided in the plate-shaped rail using the porous material, the structure of the apparatus becomes complicated, the apparatus itself becomes expensive, and the flying height is maintained with high accuracy. When the supply air pressure is increased, self-excited vibration related to the compressibility of high-rigid air is generated, and there is a problem that the flying height cannot be maintained with high accuracy.

  In addition, there are devices in which orifices (small-diameter holes) are alternately drilled with evacuation holes instead of porous materials, but static electricity is generated by the strong blown air from the orifices, and the environment of the clean room is disturbed. However, there is a problem that the operation cost increases due to an increase in the consumption flow rate.

  Therefore, in Patent Document 1, as a non-contact conveyance device that has a small fluid flow rate and energy consumption and can maintain the flying height with high accuracy, by ejecting fluid from the fluid ejection port, the surface side of the ring-shaped member is used. A non-contact transfer device provided with two or more swirl flow forming bodies on the transfer surface of the substrate that generate a swirl flow toward the separating direction and generate a fluid flow in the back surface direction in the vicinity of the opening on the front side of the ring-shaped member Has been proposed.

International Publication No. 2009/119377 pamphlet

  However, even when the non-contact conveyance device described in Patent Document 1 is used, it is not easy to maintain the flying height of a large FPD or the like with high accuracy in the process step, and there is room for improvement.

  Moreover, in the non-contact conveyance apparatus of the said patent document 1, the upper part which accommodated the swirling flow formation body in the recessed part formed in the conveyance surface of a base | substrate, and protruded the outer peripheral surface of this swirl flow formation body around the recessed part Therefore, it takes a long time to attach the swirling flow forming body to the substrate, which leads to an increase in the manufacturing cost of the non-contact conveyance device, and when swirling the swirling flow forming body to the substrate, There is a possibility that the accuracy of the flying height of the object to be transported may be reduced due to variations in the mounting angle of the formed body or warping of the swirl flow forming body or the base (rail).

  Accordingly, an object of the present invention is to provide a non-contact conveyance device suitable for use in a process step, which can maintain the flying height of a large FPD or the like with high accuracy. .

  In order to achieve the above object, the present invention is provided with a fluid ejection port, and forms a plurality of swirling flows that generate an upward swirling flow toward the surface away from the surface by ejecting fluid from the fluid ejection port. A non-contact conveyance device having a body on a conveyance surface of a substrate, wherein a plurality of suction holes for sucking fluid are provided on the conveyance surface of the substrate, and the suction holes and the swirl flow forming body are arranged in the width direction of the substrate. And alternately arranged along the longitudinal direction, and the base has a rhombic lattice-like fluid supply passage in plan view that communicates with the plurality of swirl flow forming bodies, and a rhombic lattice shape in plan view that communicates with the plurality of suction holes. A fluid suction passage is provided, and the fluid supply passage and the fluid suction passage are arranged at different heights, and are arranged so as to be alternated in a plan view.

  According to the present invention, the suction flow for sucking the fluid is provided, and the suction hole and the swirl flow forming body are alternately arranged along the width direction and the longitudinal direction of the base body. Thus, a small amount of the surrounding fluid can be sucked in vacuum by the suction hole while the object to be conveyed is levitated. By controlling both the action of increasing the floating amount of the conveyed object by the upward swirling flow and the action of decreasing the floating amount of the conveyed object by vacuum suction, the flying height of the conveyed object is increased. While maintaining the accuracy, the floating state of the conveyed object can be maintained with high rigidity, and can be suitably applied to a process step or the like.

  In addition, the fluid supply passage and the fluid suction passage are formed in a rhombus lattice shape in plan view, and these are arranged at different heights, and are arranged to be staggered in plan view. Each passage can be constituted by a single continuous path. As a result, the fluid passage can be easily designed, and the manufacturing cost of the substrate can be reduced.

  In the non-contact transfer device, the fluid supply passage and the fluid suction passage may be arranged so that an intersection of one passage is located in a lattice of the other passage in a plan view.

  In the non-contact conveyance device, the base body includes an upper plate on which a plurality of accommodating portions for accommodating the plurality of swirling flow forming bodies and the plurality of suction holes are formed, and the fluid supply passage and the fluid suction passage. And a lower plate formed with a fluid supply port and a vacuum suction port respectively communicating with the fluid supply passage and the fluid suction passage, and the intermediate plate is formed on the upper surface of the intermediate plate with the fluid supply passage. A supply groove that communicates with the housing portion of the upper plate, a first communication hole that connects the supply groove with the fluid supply port of the lower plate, and the fluid suction passage on the lower surface of the middle plate A suction groove that communicates with the vacuum suction port of the lower plate, and a second communication hole that connects the suction groove to the suction hole of the upper plate.

  According to the above configuration, since the supply groove and the suction groove are provided on the upper and lower surfaces of the intermediate plate after the base is multi-layered, the production of the fluid supply passage and the fluid suction passage is facilitated, and the manufacturing cost can be further reduced. It becomes possible.

  In the non-contact conveyance device, the base body includes an upper plate on which a plurality of accommodating portions for accommodating the plurality of swirling flow forming bodies and the plurality of suction holes are formed, and the fluid supply passage and the fluid suction passage. And a lower plate formed with a fluid supply port and a vacuum suction port respectively communicating with the fluid supply passage and the fluid suction passage, and the intermediate plate is formed on the lower surface of the middle plate with the fluid supply passage. A supply groove that communicates with the fluid supply port of the lower plate, a first communication hole that connects the supply groove with the housing portion of the upper plate, and the fluid suction passage on the upper surface of the middle plate A suction groove that communicates with the suction hole of the upper plate, and a second communication hole that connects the suction groove to the vacuum suction port of the lower plate.

  According to the above configuration, since the supply groove and the suction groove are provided on the upper and lower surfaces of the intermediate plate after the base is multi-layered, the production of the fluid supply passage and the fluid suction passage is facilitated, and the manufacturing cost can be further reduced. It becomes possible.

  In the non-contact conveyance device, the first communication hole is arranged at a position not overlapping with the suction groove in a plan view, and the second communication hole is set at a position not overlapping with the supply groove in a plan view. Can be arranged. According to this configuration, since the first and second communication holes can be formed linearly in the thickness direction of the intermediate plate, the pressure distribution can be made uniform, and the first and second It is possible to facilitate the drilling process of the communication hole.

  In the non-contact conveyance device, the first row in which the first swirling flow forming bodies that generate the swirling flow in one direction and the suction holes are alternately arranged along the width direction of the base, and the other direction The second swirl flow forming bodies that generate the swirl flow and the second rows in which the suction holes are alternately disposed along the width direction of the substrate are alternately disposed along the longitudinal direction of the substrate. In addition, the suction holes can be arranged so that the suction holes are positioned between the adjacent first swirl flow forming bodies and between the adjacent second swirl flow forming bodies.

  In the non-contact conveyance device, a first swirl flow forming body that generates a swirling flow in one direction and a second swirl flow forming body that generates a swirling flow in the other direction are arranged in the width direction and the longitudinal direction of the base body. The suction holes can be arranged alternately along the direction and between the first swirl flow forming body and the second swirl flow forming body which are adjacent to each other.

  In the non-contact conveyance device, the swirl flow forming body includes a bowl-shaped main body, a hole formed in the main body and having a circular shape in a plan view that opens to the front surface side, and an opening side of the hole. An annular flange formed on the outer peripheral edge, a plurality of protrusions projecting downward from the outer peripheral surface of the annular collar, a locking projection at the tip, and a cylindrical inner wall surface of the hole, A recess provided at a position facing each other across the center of the hole, a fluid outlet formed in the recess and opening in an inner surface forming the hole, and communicating with the fluid outlet, And a fluid intake opening that opens to the outer peripheral surface of the main body.

  According to the above configuration, the non-contact transfer device can be easily configured by storing the swirl flow forming body in the housing portion of the base and taking in the fluid from the fluid intake port, and the manufacturing cost can be kept low. .

  In the non-contact conveyance device, the base body includes a circular accommodating portion that is open on the front surface side, and the accommodating portion is formed on an upper portion of the accommodating portion, and the annular flange portion of the swirling flow forming body A small-diameter hole having an inner diameter corresponding to the outer diameter and a cylindrical locking recess formed in a lower portion of the housing portion and having a diameter larger than the small-diameter hole, wherein the swirling flow forming body includes the annular flange portion. It is press-fitted into the small-diameter hole of the housing portion of the base body, and the locking protrusion of the protruding portion is locked to the cylindrical locking recess portion of the base body so that the base body is mounted on the housing portion. Can be configured.

  According to the above configuration, the swirling flow forming body can be attached to the base body with a single touch, and the swirling flow forming body can be easily attached, so that the manufacturing cost can be reduced. Further, when the swirl flow forming body is mounted on the base body, since the conventional caulking is not used, the mounting angle of the swirl flow forming body does not vary, and the swirl flow forming body and the base body are not warped. The accuracy of the flying height of the conveyed object can be kept high. In addition, the swirling flow forming body is fitted to the base body without causing fluid leakage between the circular saddle section and the small diameter hole because the swivel flow forming body annular flange portion is press-fitted into the small diameter hole of the housing portion of the base body. can do.

  As described above, according to the present invention, the levitation position of the swirling flow forming body and the vacuum suction position of the suction hole are regularly and alternately arranged, whereby the levitation (pushing) by the swirling flow forming body and the suction by the suction hole ( Even if it is a large FPD, etc., the flying height can be maintained with high accuracy and the flying state can be maintained with high rigidity, which can be preferably applied to process steps. A contact transfer device can be provided.

It is a figure which shows one Embodiment of the non-contact conveying apparatus concerning this invention, Comprising: It is a top view which shows the whole structure which consists of a conveyance process and a process process. It is a figure which shows the non-contact conveying apparatus for process steps of FIG. 1, Comprising: (a) is a top view, (b) is the sectional view on the AA line of (a). It is a figure which shows the swirl | vortex flow formation body which generate | occur | produces the swirl | vortex flow of the clockwise view (clockwise direction) used for the non-contact conveyance apparatus of this invention, Comprising: (a) is a front view, (b) is a plane. (C) is a bottom view, (d) is a cross-sectional view taken along the line BB of (b), (e) is an enlarged cross-sectional view of a D portion of (c), and (f) is an E portion of (d). It is an expanded sectional view. It is a figure which shows the swirl | vortex flow formation body which generate | occur | produces the swirl | vortex flow of the plan view anticlockwise direction (counterclockwise direction) used for the non-contact conveying apparatus of this invention, Comprising: (a) is a front view, (b) is a front view. (C) is a bottom view, (d) is a cross-sectional view taken along the line GG of (c), (e) is an enlarged cross-sectional view of the H portion of (c), and (f) is a J portion of (d). FIG. It is a figure which shows the upper board of FIG.2 (b), Comprising: (a) is sectional drawing of the upper board in the state which is not mounting | wearing with a swirl flow formation body, (b) is a top view in the state where the swirl flow formation body was mounted | worn. It is sectional drawing of a board. 2B is a cross-sectional view taken along the line KK in FIG. 7, and FIG. 8B is a cross-sectional view taken along the line LL in FIG. 8. FIG. 3 is a top view of the middle plate in FIG. FIG. 3 is a bottom view of the middle plate in FIG. It is a top view which shows the non-contact conveying apparatus for the conveyance process of FIG. It is a figure which shows the non-contact conveying apparatus for conveyance processes of FIG. 9, Comprising: (a) is an enlarged plan view of the state which is not mounting | wearing with the swirl | flow flow formation body, (b) is the NN sectional view taken on the line It is a figure (MM sectional view taken on the line of FIG. 9). It is a figure which shows the other structural example of the non-contact conveying apparatus for conveyance processes, Comprising: (a) is an enlarged plan view of the state which is not mounting | wearing with the swirl | flow flow formation body, (b) is PP of (a). It is line sectional drawing. It is a figure which shows levitation conveyance of glass, Comprising: (a) is levitation conveyance of the glass in a conveyance process, (b) is a figure which shows levitation conveyance of the glass in a process process. It is a figure which shows other embodiment of the non-contact conveying apparatus for process processes, Comprising: (a) is a top view, (b) is the QQ sectional view taken on the line of (a). FIG. 14 is a top view of the middle plate in FIG. It is a bottom view of the middle board of Drawing 13 (b). It is the RR sectional view taken on the line of FIG. It is a top view which shows other embodiment of the whole non-contact conveying apparatus including the conveyance process concerning this invention.

  Next, embodiments of the present invention will be described in detail with reference to the drawings. In the following description, air is used as the transport fluid and liquid crystal glass (hereinafter referred to as “glass”) is transported as an object to be transported.

  As shown in FIG. 1, the non-contact conveyance device 10 is used to convey the glass G in a non-contact manner. The non-contact conveyance devices 11 a and 13 a for the two conveyance steps 11 and 13, the conveyance steps 11, 13 and a non-contact transfer device 12a for the process step 12 sandwiched between the two.

  As shown in FIG. 2A, the non-contact transfer device 12a of the process step 12 includes a swirling flow forming body 2 that generates an upward swirling flow in a clockwise direction in plan view, and a vacuum suction diameter for sucking in a small amount of air. 1st row | line | column 4a which alternately arrange | positioned the suction hole 5 of about 1-2 mm along the width direction X of the base | substrate 4, the swirl flow formation body 3 which generate | occur | produces the upward swirl | vortex flow of a plan view left-handed direction, And suction holes 5 having a diameter of about 1 to 2 mm for sucking the air are arranged along the width direction X of the base 4 and the second rows 4b are alternately arranged. In order to make the drawing easier to see, the swirling flow forming body 3 that generates a swirling flow in the counterclockwise direction in plan view is shown in black.

  In these first and second rows 4a and 4b, the swirl flow forming bodies 2 that generate a clockwise swirl flow and the swirl flow formation bodies 3 that generate a counterclockwise swirl flow are alternately positioned. In this manner, the base members 4 are alternately arranged along the longitudinal direction Y. At this time, the suction hole 5 is between the swirl flow forming bodies 2 and 2 adjacent to each other in the width direction X and the longitudinal direction Y of the base body 4 (between swirl flow formation bodies that generate the rising swirl flow in the same direction), and It is located between the swirl flow forming bodies 3 and 3.

  As shown in FIGS. 3 (a) to 3 (f), the swirling flow forming body 2 that generates the upward swirling flow in the clockwise direction is, for example, a bowl-shape formed integrally with a thermoplastic synthetic resin such as a polyacetal resin. A main body 2a, a circular hole 2b in a plan view that is located inside the main body 2a and is open to one side, and an annular bag formed in the main body 2a and integrally formed on the outer peripheral edge of the opening of the hole 2b. A projecting portion 2c, four projecting portions 2f that project downward from the outer peripheral surface 2d of the annular flange 2c, have a locking projection 2e at the tip, and are opposed to each other in the radial direction; and a main body 2a Concave portions 2h, 2h formed on the cylindrical inner wall surface 2g of the hole portion 2b in the tangential direction of the cylindrical inner wall surface 2g and opposite to each other on the diagonal line across the center O of the hole portion 2b; It is formed in each recess 2h, and toward the cylindrical inner wall surface 2g side of the hole 2b. Comprising air jets 2i which open in opposite directions, and 2i, spout 2i, communicates with the 2i, air inlet 2j opened to the outer peripheral surface of the main body 2a, and 2j.

  The swirl flow forming body 2 is rotated clockwise in plan view when air ejected from the ejection ports 2i and 2i through the air intake ports 2j and 2j abuts against the cylindrical inner wall surface 2g of the hole 2b of the main body 2a. An upward swirling flow in the direction (the direction of arrow C in FIG. 3B) is generated.

  Further, as shown in FIGS. 4A to 4F, the swirling flow forming body 3 that generates the upward swirling flow in the counterclockwise direction in plan view is similar to the swirling flow forming body 2, for example, polyacetal resin or the like. A bowl-shaped main body 3a integrally formed from the thermoplastic synthetic resin, a hole 3b that is located inside the main body 3a and has a circular shape in a plan view that opens to one side, and a hole 3b that is formed in the main body 3a. An annular flange 3c integrally formed on the outer peripheral edge of the opening of the opening, and an outer peripheral surface 3d of the annular flange 3c that protrudes downward, and has a locking projection 3e at the tip so as to face each other in the radial direction. The four protrusions 3f formed in this way, and the cylindrical inner wall surface 3g of the hole 3b of the main body 3a are tangential to the cylindrical inner wall surface 3g and sandwich the center O of the hole 3b. Formed in the recesses 3h and 3h formed at opposite positions and the respective recesses 3h. Air outlets 3i and 3i that open in opposite directions toward the cylindrical inner wall surface 3g of the hole 3b, and an air inlet 3j that communicates with the outlets 3i and 3i and opens on the outer peripheral surface of the main body 3a. 3j.

  The swirl flow forming body 3 is counterclockwise in plan view when the air ejected from the ejection ports 3i and 3i through the air intake ports 3j and 3j abuts against the cylindrical inner wall surface 3g of the hole 3b of the main body 3a. An upward swirling flow in the direction (the direction of arrow F in FIG. 4B) is generated.

  Returning to FIG. 2, the base 4 of the non-contact conveyance device 12 a has a three-layer structure including an upper plate 7, an intermediate plate 8 and a lower plate 9 as shown in FIG.

  As shown in FIG. 5 (a), the upper plate 7 includes a plurality of accommodating portions (holes) 7b that pass through the upper plate 7 and have a circular shape in plan view in which the swirling flow forming bodies 2 and 3 are accommodated. A plurality of suction holes 5 penetrating the plate 7 are formed. The accommodating part 7b is formed on the upper part of the accommodating part 7b, and has the same diameter as the outer diameter of the annular flanges 2c and 3c (see FIGS. 3B and 4B) of the swirl flow forming bodies 2 and 3, or A small-diameter hole 7c having an inner diameter slightly smaller than the outer diameter of the annular flanges 2c and 3c, and a cylindrical locking hole 7d formed in the lower part of the housing part 7b and having a larger diameter than the small-diameter hole 7c. .

  As shown in FIG. 5B, the swirling flow forming body 2 is attached by inserting the swirling flow forming body 2 into the accommodating portion 7b from the conveying surface 7a side of the upper plate 7 and engaging the swirling flow forming body 2. This is done by locking the stop protrusion 2e in the cylindrical locking hole 7d of the upper plate 7. At this time, since the annular flange 2c of the main body 2a of the swirling flow forming body 2 is press-fitted into the small diameter hole 7c of the housing portion 7b of the upper plate 7, from between the swirling flow forming body 2 and the housing portion 7b. Air does not leak. The swirling flow forming body 3 is also mounted by the same method as described above.

  As shown in FIG. 6A, the intermediate plate 8 has a semicircular cross-sectional supply groove 8b formed on the upper surface 8a of the intermediate plate 8, and a semicircular cross section formed on the lower surface 8c of the intermediate plate 8. And a suction groove 8f.

  As shown in FIG. 7, the supply grooves 8b are formed in a rhombus lattice shape in plan view in accordance with the arrangement of the swirl flow forming bodies 2 and 3 (see FIG. 2A). As shown in FIG. 6B, the bottom of the supply groove 8b is connected to a first communication hole 8d that opens to the lower surface 8c of the intermediate plate 8, and the first communication hole 8d is shown in FIG. Thus, only one is provided throughout the intermediate plate 8. The supply groove 8b communicates with each of the accommodating portions 7b of the upper plate 7 when the upper plate 7, the middle plate 8 and the lower plate 9 are laminated as shown in FIG.

  On the other hand, as shown in FIG. 8, the suction grooves 8f are formed in a rhombic lattice shape in plan view in accordance with the arrangement of the suction holes 5 (see FIG. 2A). In FIG. 8, for easy understanding of the positional relationship between the suction groove 8f and the supply groove 8b, the suction groove 8f is shown by a solid line, and the supply groove 8b is shown by a broken line.

  As shown in FIG. 6A, a plurality of holes having the same diameter as the suction hole 5 (see FIG. 5A) of the upper plate 7 and opening on the upper surface 8a of the middle plate 8 are formed in the upper portion of the suction groove 8f. The second communication hole 8e is connected. As shown in FIG. 2B, these second communication holes 8e communicate with the suction holes 5 of the upper plate 7 when the upper plate 7, the middle plate 8 and the lower plate 9 are laminated. In FIG. 8, the former is shown in black for easy understanding of the positional relationship between the second communication hole 8e of the suction groove 8f and the first communication hole 8d of the supply groove 8b.

  As shown in FIG. 8, the supply grooves 8b and the suction grooves 8f are arranged so as to be alternated in plan view, and are formed so that the intersection of one groove is located in the lattice of the other groove ( (See the relationship between the intersecting portion 8g of the supply groove 8b and the lattice 8i of the suction groove 8f, and the relationship between the intersecting portion 8h of the suction groove 8f and the lattice 8j of the supply groove 8b). The plurality of second communication holes 8e connected to the suction groove 8f are connected to the intersecting portion 8h and the corner portion 8k of the suction groove 8f, and are disposed at positions that do not overlap with the supply groove 8b. In addition, the first communication hole 8d connected to the supply groove 8b is also connected to the intersecting portion 8g of the supply groove 8b and is disposed at a position not overlapping the suction groove 8f.

  As shown in FIG. 2B, the lower plate 9 has an air supply that opens on the upper surface of the lower plate 9 and communicates with the first communication hole 8d (communication hole communicating with the supply groove 8b) of the middle plate 8. An air opening 9 a and a vacuum suction port 9 b that opens to the upper surface of the lower plate 9 and communicates with the suction groove 8 f of the intermediate plate 8 are formed.

  2B, the accommodating portion 7b formed on the upper plate 7 is communicated with the supply groove 8b on the upper surface 8a of the intermediate plate 8, and the suction hole 5 is opened on the upper surface 8a of the intermediate plate 8. The upper plate 7 is positioned on the upper surface 8a of the middle plate 8 so as to communicate with the second communication hole 8e, and the air supply port 9a of the lower plate 9 is connected to the first communication hole 8d opened on the lower surface 8c of the middle plate 8. And the vacuum suction port 9b is coupled to the suction groove 8f on the lower surface 8c of the middle plate 8 so that the middle plate 8 is positioned on the upper surface of the lower plate 9, whereby the base body 4 is formed. The base 4 is formed by fastening the upper plate 7, the middle plate 8 and the lower plate 9 with fixing means such as bolts.

  As described above, in the base 4, the supply grooves 8 b and the suction grooves 8 f are formed in a rhombus lattice shape in plan view, and the supply grooves 8 b and the suction grooves 8 f are arranged at different heights and are alternately arranged in plan view. In order to arrange, the grooves 8b and 8f are configured as a single continuous path while avoiding interference between the supply groove 8b and the suction groove 8f without complicatedly routing the supply groove 8b and the suction groove 8f. Therefore, the fluid passage can be easily designed. Further, since the supply groove 8b and the suction groove 8f can be configured as a continuous path, the connection between the supply groove 8b and the air supply port 9a and the connection between the suction groove 8f and the vacuum suction port 9b are sufficient at one place. Thus, the manufacturing cost of the substrate 4 can be reduced.

  Further, since the substrate 4 has a three-layer structure and the supply groove 8b and the suction groove 8f are provided on the upper and lower surfaces 8a and 8c of the intermediate plate 8, the supply groove 8b and the suction groove 8f can be easily manufactured, and the manufacturing cost is further reduced. It becomes possible.

  Further, the first communication hole 8d that connects the supply groove 8b to the air supply port 9a is disposed at a position that does not overlap with the suction groove 8f, and the second communication hole 8e that connects the suction groove 8f to the suction hole 5. Is disposed at a position that does not overlap with the supply groove 8 b, the first and second communication holes 8 d and 8 e can be formed linearly in the thickness direction of the intermediate plate 8. As a result, the pressure distribution can be made uniform and the drilling of the first and second communication holes 8d and 8e can be facilitated.

  Returning to FIG. 1, the non-contact conveying devices 11 a and 13 a in the two conveying steps 11 and 13 include the swirling flow forming body 2 that generates the ascending swirling flow in the clockwise direction in the plan view and the rising swirling flow in the counterclockwise direction in the plan view. The swirling flow forming bodies 3 that generate the above are alternately arranged in the vertical direction on the paper surface of FIG. In the transport steps 11 and 13 of FIG. 1, three non-contact transport devices 11a and 13a are arranged in parallel.

  As shown in FIGS. 10 (a) and 10 (b), the base 15 of the non-contact transfer device 11a, 13a is formed in the transfer surface 15a and has a circular accommodating portion (hole) 15b that is open in the top view. And an air passage 15f formed along the longitudinal direction of the base body 15 and supplied with air from a supply pump (not shown), and a through hole 15g for supplying the air from the air passage 15f to the accommodating portion 15b. It is done. Unlike the substrate 4 of the non-contact transfer device 12a in the process step 12, the substrate 15 has a single layer structure.

  The accommodating portion 15b is formed in the upper portion of the accommodating portion 15b, and is formed in the small diameter hole 15h having the same diameter as the outer diameter of the annular flange portions 2c and 3c of the swirling flow forming bodies 2 and 3, and in the lower portion of the accommodating portion 15b. The cylindrical locking recess 15i is larger in diameter than the hole 15h. In addition, the mounting method of the swirl | vortex flow formation bodies 2 and 3 is the same as that of the case of the non-contact conveying apparatus 12a of the process process 12. FIG.

  11 (a) and 11 (b) show another configuration example of the base body 15. The base body 16 has a circular accommodating portion 16b that is formed in the transport surface 16a and opens on the upper surface, and a base body. And an air passage 16f that is formed along the longitudinal direction of 16 and partially opens to the housing portion 16b. The base body 16 does not require the through-hole 15g for supplying air from the air passage 15f in the base body 15 shown in FIGS. 10A and 10B to the accommodating portion 15b.

  Next, the operation of the non-contact transport apparatus 10 having the above configuration will be described with reference to FIGS.

  In conveying the glass G, air is supplied from the supply pump to the air passage 15f (see FIG. 10) in the non-contact conveying devices 11a and 13a of the conveying steps 11 and 13 shown in FIG. In the non-contact transfer device 12a, air is sucked from the vacuum suction port 9b (see FIG. 2B) by the vacuum pump while supplying air from the supply pump to the air supply port 9a (see FIG. 2B). .

  In the non-contact conveyance device 11a of the conveyance step 11, as shown in FIG. 12A, the air supplied from the supply pump to the air passage 15f of the base body 15 passes through the through hole 15g communicating with the air passage 15f. It is supplied to the accommodating part 15b. And the air supplied to the accommodating part 15b enters into the air inlets 2j and 3j (refer FIG.3 (e) and FIG.4 (e)) of the swirl | flow flow formation bodies 2 and 3, and passes through the jet outlets 2i and 3i. It ejects into the holes 2b and 3b. The jetted air abuts against the cylindrical inner wall surfaces 2g and 3g of the holes 2b and 3b, and generates an upward swirling flow in the clockwise direction in the plan view and the counterclockwise direction in the plan view above the holes 2b and 3b.

  The glass G brought into the conveying step 11 is floated by the upward swirling flow generated by the swirling flow forming bodies 2 and 3, and a propulsive force is applied by a separately provided air ejection device (not shown) or the like. It is conveyed toward.

  In the non-contact transfer device 12a of the process step 12, as shown in FIG. 12B, the air supplied from the supply pump to the air supply port 9a of the base body 4 communicates with the air supply port 9a. It enters the supply groove 8b formed in the middle plate 8 of the base 4 through the communication hole 8d. The air flowing through the supply groove 8b enters the accommodating portion 7b formed on the upper plate 7 of the base body 4, and the air intake ports 2j and 3j of the swirl flow forming bodies 2 and 3 (FIGS. 3E and 4E). ) From the jet outlets 2i and 3i.

  As a result, as in the case of the transport step 11, upward swirling flows in the clockwise direction in plan view and the counterclockwise direction in plan view are generated above the holes 2b and 3b of the swirling flow forming bodies 2 and 3. At this time, as shown in FIG. 8, the supply groove 8b to be supplied to the swirling flow forming bodies 2 and 3 is formed by a single continuous path, so that the amount of air ejected from the spouts 2i and 3i is swirled. Variations in the flow forming bodies 2 and 3 can be suppressed, and the flying height of the glass G can be controlled uniformly.

  At the same time, air is sucked from the vacuum suction port 9b of the base 4 by the vacuum pump, and the space above the suction hole 5 is passed through the suction groove 8f and the second communication hole 8e formed in the middle plate 8 of the base 4. Aspirate the air. At this time, as shown in FIG. 8, the suction groove 8 f that sucks air from the suction hole 5 is configured by a single continuous path, so that the suction amount of air from the suction hole 5 is different for each suction hole 5. The variation can be suppressed, and the attractive pressure of the glass G can be controlled uniformly.

  Then, the glass G that has entered the process step 12 floats by the upward swirling flow generated in the swirling flow forming bodies 2 and 3, and a small amount of air around the suction holes 5 positioned between the swirling flow forming bodies. By vacuum suction, the flying height is controlled with high accuracy to 30 to 50 μm. In the process step 12, various inspections and processing on the glass G are performed.

  Here, in the process step 12, a glass having a thickness of 0.7 mm as the object to be conveyed in a state where the diameter of the hole of the swirl flow forming body is 16 mm, the diameter of the ejection port is 0.35 mm, the supply pressure is 50 kPa, and the vacuum suction pressure is 10 kPa. When G is used, an experimental result has been obtained that the amplitude of the swell of the glass G can be suppressed to 30 μm or less.

  Thus, in the non-contact transfer device 12a of the process step 12, the flying height is generated by the supply air pressure to the jet outlets 2i and 3i (see FIGS. 3 (e) and 4 (e)) of the swirl flow forming bodies 2 and 3. By controlling both the action of increasing the height of the glass G and the action of reducing the flying height by the vacuum suction pressure from the suction hole 5, the flying height of the glass G is maintained with high accuracy and the floating state of the glass G Can be maintained with high rigidity.

  The glass G that has been inspected and processed is transferred to the transfer step 13 and then transferred to the next step in a floating state, as in the transfer step 11.

  FIG. 13 to FIG. 16 show another embodiment of the non-contact conveyance device in the process step 12.

  In the non-contact conveyance device 17, as shown in FIG. 13A, the swirl flow forming body 2 that generates a swirl flow in the clockwise direction in plan view in both the width direction X and the longitudinal direction Y of the base 4, The swirling flow forming bodies 3 that generate the swirling flow in the counterclockwise direction are alternately arranged, and the suction holes 5 are disposed between the swirling flow forming bodies 2 and the swirling flow forming bodies 3 (see FIG. 13A). (See S section). In order to make the drawing easier to see, the swirling flow forming body 3 that generates a swirling flow in the counterclockwise direction in plan view is shown in black.

  As shown in FIG. 13B, the base 18 of the non-contact transfer device 17 is a three-layer structure composed of an upper plate 7, an intermediate plate 8, and a lower plate 9, similar to the base 4 described with reference to FIGS. It has a structure. As shown in FIGS. 14 to 16, the upper surface 8a of the intermediate plate 8 is provided with supply grooves 8b in a rhombic lattice shape in plan view in accordance with the arrangement of the swirl flow forming bodies 2 and 3 (see FIG. 13A). In addition, the lower surface 8c of the intermediate plate 8 is provided with suction grooves 8f formed in a rhombic lattice shape in plan view in accordance with the arrangement of the suction holes 5 (see FIG. 13A).

  Even in the non-contact transfer device 17 of this aspect, the glass G floats by the action of increasing the floating amount of the glass G by the air supply pressure to the swirl flow forming bodies 2 and 3 and the vacuum suction pressure from the suction hole 5. By controlling both the action and the action of reducing the amount, the flying height of the glass G can be controlled to a minute height of 30 to 50 μm with high accuracy.

  Further, since the middle plate 8 of the base 18 has the same configuration as the middle plate 8 of the base 4 described with reference to FIGS. 6 to 8, each groove is avoided while avoiding interference between the supply groove 8b and the suction groove 8f. 8b and 8f can be configured by a single continuous path, which makes it easy to design the fluid path and reduce the manufacturing cost.

  FIG. 17 shows another embodiment of the process step 12 of the non-contact conveyance device 10 shown in FIG. 1, and in this process step 12, the non-contact conveyance device 12a is arranged in parallel in the non-contact conveyance device 12a. Three other non-contact conveying devices 12a are arranged adjacent to the device 12a. In the process step 12 in which the non-contact conveyance devices 12a are arranged in two rows, for example, a camera transmission check or the like is performed between the non-contact conveyance devices 12a and 12a.

  In the above embodiment, as shown in FIGS. 6 to 8, in the base 4 of the non-contact transfer device 12a in the process step 12, the supply groove 8b is formed on the upper surface 8a of the intermediate plate 8, and the intermediate plate 8 Although the suction groove 8f is formed on the lower surface 8c, the suction groove 8f may be formed on the upper surface 8a of the intermediate plate 8, and the supply groove 8b may be formed on the lower surface 8c of the intermediate plate 8. In this case, since the supply groove 8b communicates (contacts) with the air supply port 9a of the lower plate 9, the first communication hole 8d connects the supply groove 8b to the accommodating portion 7b of the upper plate 7. It is formed. On the other hand, since the suction groove 8f communicates (contacts) with the suction hole 5 of the upper plate 7, the second communication hole 8e is formed so as to connect the suction groove 8f to the vacuum suction port 9b of the lower plate 9. The

  Further, as shown in FIGS. 3 and 4, protrusions 2 f having locking protrusions 2 e and 3 e on the outer peripheral surfaces 2 d and 3 d of the annular flanges 2 c and 3 c of the main bodies 2 a and 3 a of the swirl flow forming bodies 2 and 3, Although three 3f are extended in opposition to each other in the radial direction, the number of the projecting portions 2f and 3f is not limited to four, and can be three or five or more. Furthermore, when the swirl flow forming bodies 2 and 3 are mounted on the bases 4 and 15, other locking structures can be employed without using the protrusions 2f and 3f having the locking protrusions 2e and 3e.

  Moreover, in each said embodiment, although the case where air was used as a fluid was demonstrated, process gas, such as nitrogen other than air, can also be used.

2, 3 Swirl flow forming body 2a, 3a Main body 2b, 3b Hole 2c, 3c Annular flange 2d, 3d Outer peripheral surface 2e, 3e Locking protrusion 2f, 3f Protruding part 2g, 3g Cylindrical inner wall surface 2h 3h Recess 2i, 3i Jet 2j, 3j Air intake 4 Base 4a First row 4b Second row 5 Suction hole 7 Upper plate 7a Conveying surface (upper surface)
7b Accommodating portion 7c Small-diameter hole 7d Columnar locking hole 8 Middle plate 8a Upper surface 8b Supply groove 8c Lower surface 8d First communication hole 8e Second communication hole 8f Suction groove 8g, 8h Intersections 8i, 8j Grid 8k Corner 9 Lower plate 9a Air supply port 9b Vacuum suction port 10 Non-contact transfer device 11, 13 Transfer process 12 Process steps 11a, 12a, 13a, 17 Non-contact transfer device 15, 16 Base 15a, 16a Transfer surface (upper surface)
15b, 16b accommodating portion 15f, 16f air passage 15g through hole 15h small diameter hole 15i cylindrical locking recess 18 base G glass

Claims (9)

Non-contact provided with a plurality of swirling flow forming bodies on the transport surface of the base body, each having a fluid spout, and generating a swirling flow that is directed toward the surface away from the surface by ejecting fluid from the fluid spout A conveying device,
A plurality of suction holes for fluid suction are provided in the transport surface of the base body, and the suction holes and the swirl flow forming body are alternately arranged along the width direction and the longitudinal direction of the base body,
A fluid supply passage in a plan view rhombus lattice that communicates with the plurality of swirling flow forming bodies and a fluid suction passage in a plan view rhombus lattice that communicates with the plurality of suction holes are provided in the base body, and the fluid supply passage And the non-contact conveyance apparatus characterized by arrange | positioning so that it may be alternated by planar view while arrange | positioning a fluid suction passage at different height.   2. The non-contact transfer device according to claim 1, wherein the fluid supply passage and the fluid suction passage are arranged so that an intersection of one passage is located in a lattice of the other passage in a plan view. . The base includes an upper plate in which a plurality of accommodating portions for accommodating the plurality of swirling flow forming bodies and the plurality of suction holes are formed, an intermediate plate in which the fluid supply passage and a fluid suction passage are formed, A fluid supply passage and a lower plate formed with a vacuum suction port respectively communicating with the fluid supply passage and the fluid suction passage;
The intermediate plate is provided on the upper surface of the intermediate plate as the fluid supply passage, and includes a supply groove that communicates with the housing portion of the upper plate, and a first that connects the supply groove to the fluid supply port of the lower plate. A communication groove, a suction groove provided in the lower surface of the middle plate as the fluid suction passage, communicating with the vacuum suction port of the lower plate, and a second connecting the suction groove to the suction hole of the upper plate. The non-contact transfer device according to claim 1, further comprising a communication hole. The base includes an upper plate in which a plurality of accommodating portions for accommodating the plurality of swirling flow forming bodies and the plurality of suction holes are formed, an intermediate plate in which the fluid supply passage and a fluid suction passage are formed, A fluid supply passage and a lower plate formed with a vacuum suction port respectively communicating with the fluid supply passage and the fluid suction passage;
The intermediate plate is provided on the lower surface of the intermediate plate as the fluid supply passage, and includes a supply groove that communicates with the fluid supply port of the lower plate, and a first that connects the supply groove to the housing portion of the upper plate. A communication groove, a suction groove provided on the upper surface of the intermediate plate as the fluid suction passage, communicating with the suction hole of the upper plate, and a second connecting the suction groove to the vacuum suction port of the lower plate. The non-contact transfer device according to claim 1, further comprising a communication hole.   The first communication hole is arranged at a position not overlapping with the suction groove in a plan view, and the second communication hole is arranged at a position not overlapping with the supply groove in a plan view. The non-contact transfer device according to claim 3 or 4.   A first row in which first swirl flow forming bodies that generate a swirl flow in one direction and the suction holes are alternately arranged along the width direction of the base body, and a first row that generates a swirl flow in the other direction. Second swirl flow forming bodies and second rows in which the suction holes are alternately arranged along the width direction of the base body are alternately arranged along the longitudinal direction of the base body, and adjacent to each other. The arrangement according to claim 1, wherein the suction holes are arranged so as to be positioned between the first swirl flow forming bodies and between the second swirl flow forming bodies adjacent to each other. The non-contact conveyance apparatus in any one.   A first swirl flow forming body that generates a swirl flow in one direction and a second swirl flow formation body that generates a swirl flow in the other direction are alternately arranged along the width direction and the longitudinal direction of the base body. The suction hole is disposed between the first swirl flow forming body and the second swirl flow forming body, which are adjacent to each other. Non-contact transfer device.   The swirl flow forming body includes a bowl-shaped main body, a circular hole formed in the main body and opened to the surface side, and a circular hole formed on the outer peripheral edge of the hole portion on the opening side. A flange, a plurality of protrusions protruding downward from the outer peripheral surface of the annular flange and having a locking protrusion at the tip, and a cylindrical inner wall surface of the hole, sandwiching the center of the hole A recess provided at a position facing each other, a fluid jet opening formed in the recess and opening in the inner surface forming the hole, and communicating with the fluid jet opening and opening in the outer peripheral surface of the main body The non-contact transfer device according to claim 1, further comprising a fluid intake port. The base body includes a housing portion having a circular shape in plan view that opens on the surface side, and the housing portion is formed at an upper portion of the housing portion, and has an inner diameter corresponding to the outer diameter of the annular flange portion of the swirling flow forming body A small-diameter hole having a small diameter hole, and a cylindrical locking recess formed in a lower portion of the accommodating portion and having a larger diameter than the small-diameter hole,
In the swirl flow forming body, the annular flange is press-fitted into a small-diameter hole of the housing portion of the base, and the locking protrusion of the protrusion is locked to the cylindrical locking recess of the base. The non-contact transfer device according to claim 8, wherein the non-contact transfer device is attached to a housing portion of the base.

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