JP2005166787A - Conveying equipment and method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide floating conveying equipment and method in which charging due to stripping is prevented and a panel can be conveyed while neutralizing local charging appropriately. <P>SOLUTION: The equipment for conveying a substrate 6 while floating from a conveyance table 1 comprises a first gas pipe 7 forming a hole 2 for jetting floating control gas of the substrate 6, a mechanism 3 for detecting local charging potential of the substrate 6, a mechanism 4 provided on the downstream side of the charging detection mechanism 3 in the conveying direction and neutralizing charging of the substrate 6, and a control section 5 as a control means connected with the charging detection mechanism 3 and the charging neutralization mechanism 4 and generating ions in the charging neutralization mechanism 4 depending on the charging potential of the substrate 6 detected by the charging detection mechanism 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a transport apparatus and a transport method, and more particularly to a transport apparatus and a transport method for transporting a glass substrate such as a liquid crystal panel substrate, a plasma display panel, and an electroluminescence display panel, and a substrate such as a semiconductor wafer.

  In panels used for liquid crystal displays, plasma displays, electroluminescent displays, etc., fine wiring is formed throughout the panel as a result of complicated manufacturing processes such as film formation, lithography, etching, doping, and wiring formation. A pattern is formed.

  In each of the above steps, the panel as the transported body is charged due to various factors. Examples of charging modes include contact charging that occurs in the process of bringing the panel into contact with the charged device table, peeling charging that occurs in the step of peeling the panel from the device table, and frictional charging that occurs in the rubbing process of the liquid crystal device. Is mentioned.

  When the panel is charged due to the above factors, for example, in a TFT liquid crystal panel or the like in which a fine wiring pattern is formed on a glass substrate, foreign matters such as dust adhere to the wiring pattern or due to electric discharge. The wiring pattern may be destroyed. As a result, a defect occurs in the wiring.

  Examples of conventional measures against the problem of charging of the transported member as described above include those disclosed in Japanese Patent Laid-Open No. 6-243988 (conventional example 1).

  In Conventional Example 1, a table made of a conductive material on which a TFT substrate is placed, a ground wire connecting the table and the ground, a capacitor provided on a ground wire between the table and the ground, and the capacitor There is disclosed an electrostatic neutralization device provided with ion supply amount control means for controlling the amount and polarity of ions supplied to the surface of a TFT substrate based on the charge stored in the TFT.

  However, the conventional example 1 has a problem that charging is generated again (peeling charging) by a process of peeling the panel (TFT substrate) from the table after neutralizing the charge by supplying ions.

  On the other hand, for example, in Japanese Patent Application Laid-Open No. 2000-62953 (conventional example 2), a groove provided on the conveyance surface and an electromagnetic wave ionizing a gas from the groove on the conveyance surface are installed in the groove. There is disclosed a levitation conveyance device including a charge neutralization device provided with a charge neutralization unit that outputs toward the conveyance space.

In Conventional Example 2, the transported body is lifted and transported from the table, so that the above-described peeling charging does not occur.
Japanese Patent Laid-Open No. 6-243988 JP 2000-62953 A

  However, the above conveying apparatus has the following problems.

  In Conventional Example 2, since there is no mechanism for detecting the charged potential of the transported body, there are cases where an appropriate amount of ions according to the charged potential cannot be generated. As a result, when the generation of ions is small, the charge of the conveyed object cannot be sufficiently neutralized. In addition, when a large amount of ions are generated, residual ions are generated, which in turn causes charging of the conveyed object.

  The present invention has been made in view of the above-described problems, and an object of the present invention is a floating-type transporting measure and transporting method in which charging due to peeling does not occur. It is an object of the present invention to provide a transport apparatus and a transport method that can transport a transported object while making them uniform.

  A transport apparatus according to the present invention is a transport apparatus that transports a transported object while levitating, a gas hole that ejects / sucks a gas that controls the floating of the transported object, and a local charging potential of the transported object. Connected to a charge detection mechanism for detecting the charge, a charge neutralization mechanism provided downstream of the charge detection mechanism with respect to the transport direction, and neutralizing the charge of the transported object, and a charge detection mechanism and a charge neutralization mechanism. And a control means for causing the charge neutralization mechanism to generate ions corresponding to the charged potential of the conveyed object detected by the charge detection mechanism.

  As a result, neutralization of the charge in the charge neutralization mechanism can be performed according to the result detected by the charge detection mechanism installed at an arbitrary position. The to-be-conveyed body can be conveyed while being unified.

  It is preferable that the charge detection mechanism includes a potential sensor that is not in contact with the transported body installed on the table.

  By detecting the charging potential in a non-contact state with the transported body, new charging due to friction is not generated. Therefore, the charged potential can be detected more accurately.

  It is preferable to provide a charging neutralization mechanism on the most downstream side with respect to the transport direction or on the downstream side of the gas hole.

  In the pipe connected to the gas hole, the gas that floats the transported body is charged due to the friction between the gas and the pipe, which causes charging of the transported body. On the other hand, with the structure as described above, after the charge of the transported body is neutralized by the charge neutralization mechanism, no new charge is generated by the gas ejected from the gas hole.

  In one aspect, the charging neutralization mechanism includes a gas tube as a ground electrode, a discharge electrode provided in the gas tube, and a voltage applying unit that applies a voltage between the ground electrode and the discharge electrode. preferable.

  By using the gas pipe for gas ejection in the charge neutralization mechanism as a ground electrode, charging of the gas due to friction with the gas pipe can be prevented. Therefore, in the charge neutralization mechanism, new charge is not generated on the conveyed object.

  The gas pipe preferably includes a gas pipe that generates positive ions and a gas pipe that generates negative ions.

  In the charge neutralization mechanism, ions having the opposite polarity to the charge of the conveyed object contribute to the neutralization of the charge. By generating positive ions and negative ions from separate gas tubes, a large number of ions having opposite polarities can be generated, so that the charge can be neutralized more efficiently.

  In another aspect, the charging neutralization mechanism may include ultraviolet irradiation means or X-ray irradiation means.

  By the ultraviolet irradiation means or the X-ray irradiation means, the gas in the vicinity of the transported body is excited to generate ions, and the ions can be brought into contact with the transported body. As a result, the charge of the conveyed object is neutralized.

  The inner wall of the gas hole is preferably grounded or covered with an antistatic film.

  Thereby, it is possible to prevent charging of the gas that is ejected from the gas hole and contributes to the floating of the conveyed object. As a result, it is possible to prevent the object to be transported from being charged by the gas.

  A transport method according to the present invention is a transport method for transporting while ejecting / sucking gas to float a transported body, and detecting a local charged potential of the transported body, and after detecting the charged potential A step of generating ions according to the charging potential and bringing the ions into contact with the transported body to neutralize the charge of the transported body.

  This makes it possible to neutralize the charge of the transported object according to the result of detecting the local charging potential, so that the transport of the transported object can be performed while appropriately neutralizing the local charge of the transported object. Can be performed.

  According to the present invention, since the charge of the conveyed object can be neutralized according to the result of detecting the local charged potential, the charged object can be conveyed while appropriately neutralizing the local charge of the conveyed object. The body can be transported.

Hereinafter, embodiments of a transport apparatus and a transport method according to the present invention will be described.

(Embodiment 1)
1 to 3 are diagrams showing the transfer device according to the first embodiment.

  The transport method according to the present invention is a transport method for transporting a substrate 6 as an object to be transported while jetting gas, and detecting a local charged potential of the substrate 6 and detecting the charged potential. A step of generating ions corresponding to the charged potential later and bringing the ions into contact with the substrate 6 to neutralize the charging of the substrate 6.

  Examples of the substrate 6 include a thin glass substrate such as a liquid crystal display panel and a plate member such as a semiconductor wafer.

  FIG. 1 is a cross-sectional view of the transport apparatus according to the present embodiment.

  The transport apparatus according to the present embodiment is a transport apparatus that transports the substrate 6 while floating from the transport table 1, and, as shown in FIG. 1, jets a gas that controls the floating of the substrate 6 in the direction of the white arrow. A first gas pipe 7 that forms a gas ejection hole 2 to be formed, a charge detection mechanism 3 that detects a local charging potential of the substrate 6, and a downstream of the charge detection mechanism 3 with respect to the transport direction. 6 is connected to the charge neutralization mechanism 4 for neutralizing the charge of 6, the charge detection mechanism 3, and the charge neutralization mechanism 4, and neutralizes ions according to the charge potential of the substrate 6 detected by the charge detection mechanism 3. And a control unit 5 as a control means to be generated by the mechanism 4.

  The charging detection mechanism 3 converts a potential sensor 3a that is not in contact with the substrate 6 installed on the transfer table 1 and an analog signal that indicates the charging potential of the substrate 6 detected by the potential sensor 3a into a digital signal, and And a signal processing unit 3b that outputs the signal to the signal processing unit 5.

  The potential sensor 3 a is installed between the gas ejection hole 2 on the transfer table 1 and another gas ejection hole 2 at a position close to the substrate 6 so that the charged potential of the substrate 6 can be detected.

  As the potential sensor 3a, for example, a charging potential detection electrode (not shown in FIG. 1) is installed close to the substrate 6, and an electrostatic induction voltage obtained from the electrode is used as an FET (Field-Effect Transistor) or the like. Inductive electrode type that amplifies a direct current with an amplifier having a high input impedance or a high amplification factor.

  Further, the charging neutralization mechanism 4 includes a second gas pipe 8 as a ground electrode 4b made of a metal pipe such as stainless steel, and a metal such as tungsten provided in the second gas pipe 8 such as quartz. A discharge electrode 4a covered with an insulator, and a voltage application unit 4c as voltage application means for applying a high voltage that causes corona discharge between the ground electrode 4b and the discharge electrode 4a are provided.

  The discharge electrode 4a is connected to the voltage application unit 4c and has a structure supported in the ground metal 4b by an insulator.

  When transporting the substrate 6, a gas containing, for example, nitrogen, argon, dry air, or the like is fed into the first gas pipe 7 and ejected from the gas ejection hole 2, so that the substrate 6 is floated from the transport table 1. . Thereafter, by applying a force in a direction parallel to the main surface of the transport table 1, the substrate 6 is transported while floating from the transport table 1.

  FIG. 2 is a top view of the transport apparatus according to the present embodiment.

  As shown in FIG. 2, a plurality of gas ejection holes 2 are arranged on the entire transfer table 1 with substantially the same diameter and regular arrangement. The gas supplied from the first gas pipe 7 is ejected from the gas ejection hole 2 at a substantially constant pressure, and the substrate 6 is lifted from the transfer table 1 by a predetermined distance.

  Here, when the substrate 6 reaches just above the gas ejection hole 2, the resistance against gas ejection increases as compared with the case where the substrate 6 does not exist directly above. Here, if the gas pressure in the first gas pipe 7 is extremely small, it becomes difficult for gas to be ejected from the gas ejection holes 2 in which the substrate 6 is located immediately above. Therefore, the gas flow rate flowing through the gas ejection holes 2 without the substrate 6 directly above increases, and the gas flow rate flowing through the gas ejection holes 2 with the substrate 6 directly above decreases. As a result, the function of floating the substrate 6 is reduced.

  On the other hand, when the gas pressure in the first gas pipe 7 is increased and the flow rate of the gas flowing through the gas ejection hole 2 becomes extremely large, the substrate 6 is too far from the transfer table 1, and the charge detection mechanism 3. In this case, the charging potential of the substrate 6 cannot be detected, and the charging neutralization mechanism 4 cannot sufficiently bring the substrate 6 into contact with ions.

  Accordingly, the gas pressure in the first gas pipe 7 is increased to such an extent that the function of levitating the substrate 6 is not reduced, and the flow rate of the gas flowing through the gas ejection hole 2 is not excessively increased. It is necessary to increase the pipe resistance of the pipe 7 sufficiently.

  As shown in FIGS. 1 and 2, the charge detection neutralization unit 9 includes a charge detection mechanism 3 and a charge neutralization mechanism 4, and is charged downstream of the charge detection mechanism 3 with respect to the conveyance direction of the substrate 6. A neutralization mechanism 4 is provided.

  Here, the first gas pipe 7 and the second gas pipe 8 are separate pipes, and gas is ejected from both gas pipes. The gas pressure in the second gas pipe 8 is It is lower than the gas pressure in the gas pipe 7 and does not affect the floating of the substrate 6. Therefore, the charging neutralization mechanism 4 can be installed at any position on the transport table 1.

  FIG. 3 is a circuit block diagram of the transport apparatus according to the present embodiment.

  When the potential sensor 3a of the charge detection mechanism 3 detects the charge of the substrate 6, a charge detection signal that is an analog signal is sent from the potential sensor 3a to the signal processing unit 3b. The signal processing unit 3 b converts the analog signal into a digital signal and transmits it to the control unit 5.

Here, the traveling speed v (mm / sec) of the substrate 6 is constant, and the distance L (mm) from the potential sensor 3a to the discharge electrode 4a is known. Therefore, the time T (sec) from when a portion of the substrate 6 passes over the potential sensor 3a until it reaches the discharge electrode 4a is:
T (sec) = L (mm) / v (mm / sec)
Is required.

  On the other hand, the discharge electrode 4a of the charging neutralization mechanism 4 is connected to the voltage application unit 4c. When a voltage is applied to the discharge electrode 4a, corona discharge occurs between the second gas tube 8 as the ground electrode 4b. Like the first gas pipe 7, the second gas pipe 8 is fed with a gas containing nitrogen, argon, dry air, etc., and the ionized gas excited by the corona discharge is black in FIG. It is ejected in the direction of the arrow and sprayed onto the surface of the substrate 6.

  Here, the gas sent into the first and second gas pipes 7 and 8 needs to be an ultra-clean gas in order to prevent foreign matter from adhering to the substrate.

  The voltage application unit 4c applies an alternating voltage, and the gas in the second gas pipe 8 is ionized alternately into positive ions and negative ions. When the substrate 6 is positively charged, offset is performed so that the negative voltage of the AC voltage amplitude becomes larger than the positive voltage, and more negative ions are generated than the positive ions, so that the negative ions contribute to neutralization. . Further, when the substrate 6 is negatively charged, the positive voltage of the AC voltage amplitude is offset so as to be larger than the negative voltage to generate more positive ions than the negative ions, so that the positive ions contribute to neutralization. To. In any aspect, after the completion of neutralization, the same amount of positive ions and negative ions is generated. By doing so, ions having the same polarity as the original charging of the substrate 6 do not contribute to neutralization.

  Further, an applied voltage for generating ions corresponding to the charged potential of the substrate 6 is input to the control unit 5 in advance, and ions corresponding to the charged potential detected by the potential sensor 3a are detected from the detection T ( sec) and a signal is transmitted to the voltage application unit 4c so that it can be sprayed onto the surface of the substrate 6.

  Thereby, neutralization of the charge in the charge neutralization mechanism 4 can be performed according to the charge potential of the substrate 6 detected by the charge detection mechanism 3, and the distance between the potential sensor 3a and the discharge electrode 4a, and The timing for operating the voltage application unit 4c can be controlled according to the conveyance speed of the substrate 6. By repeating this every predetermined time, the local charge of the substrate 6 can be appropriately neutralized, and the substrate 6 can be transported while removing the entire charge of the substrate 6.

  Since the charging detection mechanism 3 detects the charging potential without contacting the substrate 6, it can detect the charging potential accurately without generating new charging due to friction.

  In addition, by using the second gas pipe 8 for gas ejection in the charging neutralization mechanism 4 as a ground electrode, charging of the gas due to friction with the second gas pipe 8 can be prevented. Therefore, the charging neutralization mechanism 4 does not cause a new charge on the substrate 6.

  As shown in FIG. 2, the charge detection neutralization units 9 including the charge detection unit 3 and the charge neutralization unit 4 are arranged in a line at equal intervals in a direction orthogonal to the conveyance direction of the substrate 6. 6 are arranged so as to reach the end portions on both sides of 6.

  Thereby, the charging of the substrate 6 can be neutralized over the entire substrate 6.

  Here, the direction in which the charge detection neutralizing units 9 are arranged is not limited to the direction orthogonal to the transport direction of the substrate 6, but intersects the transport direction and the left and right sides of the substrate 6 with respect to the transport direction. Any arrangement that reaches both ends may be used.

  Further, the interval between the charge detection neutralization units 9 is not limited to an equal interval, and various arrangements are possible.

  In FIG. 2, the charge detection neutralization unit 9 is provided on the upstream side of the gas ejection hole 2 provided on the most downstream side with respect to the transport direction, but more preferably on the transport direction. A structure in which the gas ejection hole 2 provided on the most downstream side or a charging detection neutralizing unit 9 including the charging neutralization mechanism 4 is provided on the downstream side of the gas hole is conceivable. As a result, while the substrate 6 is held at a certain distance from the table 1, the charge is neutralized by the charge detection neutralization unit 9, and then the portion where the charge has been neutralized again becomes the gas ejected from the gas ejection hole 2. The effect of neutralizing charging can be further enhanced without contact.

  In addition, the first gas pipe 7 at any other location can also be used as the second gas pipe 8.

  Further, the structure may be such that all the first gas pipes 7 are also used as the second gas pipes 8 and the substrate 6 is floated only by the second gas pipes. In this case, since the first gas pipe 7 can be omitted, the gas supply system can be reduced and the apparatus can be downsized.

  In addition, the timing of detecting the charging of the substrate 6 is not limited to the case where all the potential sensors 3a are simultaneously performed, and may be detected by shifting each individual potential sensor 3a. Further, the potential sensors 3a may be arranged so as to be shifted in the transport direction of the substrate 6, and the timings at which the potential sensor 3a detects the charging of the substrate 6 may be all at the same time. By doing in this way, since the voltage application part 4c can shift the timing which applies a voltage to the discharge electrode 4a, a voltage can be applied to all the discharge electrodes 4a by one voltage application part 4c. As a result, the apparatus can be reduced in size.

  FIG. 4 shows a modification of the transport apparatus according to the present embodiment.

  In FIG. 4, the charge neutralization mechanism 4 disposed on the downstream side of the charge detection mechanism 3 includes a positive ion generator 11 including a second gas pipe 8 as a ground electrode 4 b that generates positive ions, and negative ions. And a negative ion generator 12 including a second gas pipe 8 as a ground electrode 4b.

  Both the plus / minus ion generators 11 and 12 are provided with a discharge electrode 4a in the second gas pipe 8, and the discharge electrode 4a is connected to a positive voltage application unit 11a and a negative voltage application unit 12a, respectively. Has been. The control unit 5 controls the positive / negative voltage application units 11a and 12a separately, and a positive or negative DC voltage is applied to the discharge electrode 4a. As a result, positive ions and negative ions are supplied from separate second gas pipes 8 respectively.

  In the charge neutralization mechanism 4, ions having the opposite polarity to the charge of the substrate 6 contribute to charge neutralization. By generating positive ions and negative ions from separate gas tubes, a large number of ions having opposite polarities can be generated, so that the charge can be neutralized more efficiently.

  FIG. 5 shows another modification of the transport apparatus according to the present embodiment.

  In FIG. 5, the transport device includes an ultraviolet irradiation device 13 as a charging neutralization mechanism.

  The ultraviolet irradiation device 13 can excite the gas near the surface of the substrate 6 to generate ions, and the ions can be brought into contact with the substrate 6. As a result, the charging of the substrate 6 is neutralized. In addition, the irradiation time and irradiation intensity of ultraviolet rays and X-rays can be adjusted according to the charging potential to effectively neutralize charging.

  Moreover, you may use what irradiates weak X-ray instead of said ultraviolet irradiation device 13. FIG.

  The inner wall of the first gas pipe 7 and the surface of the transfer table 1 are preferably covered with a grounded good conductor thin film or an antistatic film.

  By preventing charging of the inner wall of the first gas pipe 7, it is possible to prevent charging of the gas ejected from the first gas pipe 7 and contributing to the floating of the substrate 6. As a result, it is possible to prevent the substrate 6 from being charged by the gas for floating the substrate 6.

  Further, by preventing charging due to the approach of the substrate 6 of the transfer table 1, the substrate 6 neutralized by charging is not charged again.

  In the present embodiment, according to the above configuration, it is possible to neutralize the charge of the transported object according to the result of detecting the local charging potential, so that the local charging of the panel is appropriately neutralized. It is possible to carry the panel while making it happen.

  In addition, the transport apparatus according to the present embodiment can be manufactured by making a slight improvement to the conventional transport apparatus, and can appropriately neutralize the charging of the panel without increasing the cost.

(Embodiment 2)
6 to 8 are diagrams illustrating the transfer device according to the second embodiment.

  FIG. 6 is a cross-sectional view of the transport apparatus according to the present embodiment.

  The transport apparatus in the present embodiment is a transport apparatus used in a transport method for transporting an object to be transported in the same manner as in the first embodiment, and controls the floating of the substrate 6 as shown in FIG. A first gas pipe 7 that forms a gas suction hole 10 for sucking gas in the direction of a white arrow, a charge detection mechanism 3 that detects a local charging potential of the substrate 6, and a charge detection mechanism with respect to the transport direction 3, connected to a gas ejection charge neutralization mechanism 14 that neutralizes the charging of the substrate 6 while the substrate 6 is levitated, and a charge detection mechanism 3 and a gas ejection charge neutralization mechanism 14. And a control unit 5 that causes the gas ejection charging neutralization mechanism 14 to generate ions corresponding to the charging potential of the substrate 6 detected by the mechanism 3.

  FIG. 7 is a top view of the transport apparatus according to the present embodiment.

  As shown in FIG. 7, the charge detection neutralization unit 9 including the gas ejection charge neutralization mechanism 14 including the discharge electrode 4a and the installation electrode 4b and the charge detection mechanism 3 is disposed over the entire substrate. Similarly, the gas suction holes 10 are arranged over the entire substrate. Thereby, since control by gas ejection and suction becomes possible, the distance of the substrate 6 from the transfer table 1 can be kept more constant than in the first embodiment.

  As a modified example of the transport apparatus according to the present embodiment, a structure including both a gas ejection hole and a gas suction hole is conceivable. In that case, it is good also as a structure which uses each gas hole for both ejection and suction, and is good also as a structure provided with a gas ejection hole and a gas suction hole separately.

  Also, the substrate 6 is transported below the transport table 1 while the transport device shown in FIGS. 6 and 7 is turned upside down and the substrate 6 is attracted to the transport table 1 by sucking gas from the gas suction holes 10. You can also. In that case, since the substrate 6 can be kept at a fixed distance from the transport table 1 only by the gas suction holes 10, the charge detection neutralization unit 9 is not limited to the case where it is disposed on the entire transport table 1, and the first embodiment Even if they are arranged in a row as in the case of the above, the function of neutralizing the charging of the substrate 6 is not impaired.

  FIG. 8 is a top view showing a modification of the transport apparatus according to the present embodiment.

  In FIG. 8, the transport table 1 in FIG. 7 is a table unit 15, and the table units 15 are arranged side by side. Thereby, a larger substrate 6 (for example, a large liquid crystal panel substrate) can be transported.

  In the present embodiment, according to the above configuration, it is possible to neutralize the charge of the transported object according to the result of detecting the local charging potential, so that the local charging of the panel is appropriately neutralized. It is possible to carry the panel while making it happen.

  In addition, the transport apparatus according to the present embodiment can be manufactured by making a slight improvement to the conventional transport apparatus, and can appropriately neutralize the charging of the panel without increasing the cost.

  Although the embodiments of the present invention have been described above, it is planned from the beginning to appropriately combine the characteristic portions of the above-described embodiments. Moreover, it should be thought that embodiment disclosed this time is an illustration and restrictive at no points. The scope of the present invention is defined by the terms of the claims, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

It is sectional drawing of the conveying apparatus which concerns on Embodiment 1 of this invention. It is a top view of the conveying apparatus which concerns on Embodiment 1 of this invention. It is a circuit block diagram of the conveying apparatus which concerns on Embodiment 1 of this invention. It is sectional drawing of the modification of the conveying apparatus which concerns on Embodiment 1 of this invention. It is sectional drawing of the other modification of the conveying apparatus which concerns on Embodiment 1 of this invention. It is sectional drawing of the conveying apparatus which concerns on Embodiment 2 of this invention. It is a top view of the conveying apparatus which concerns on Embodiment 2 of this invention. It is a top view of the modification of the conveying apparatus which concerns on Embodiment 2 of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Transfer table 2 Gas ejection hole 3 Charge detection mechanism 3a Potential sensor 3b Signal processing part 4 Charge neutralization mechanism 4a Discharge electrode 4b Ground electrode 4c Voltage application part 5 Control part 6 Substrate 7 1st gas pipe, 8 2nd gas pipe, 9 Charge detection neutralization unit, 10 Gas suction hole, 11 Positive ion generation part, 11a Positive voltage application part, 12 Negative ion generation part, 12a Negative voltage application part, 13 Ultraviolet (weak X-ray) irradiation device, 13a driving unit, 14 gas ejection charging neutralization mechanism, 15 table unit.

Claims (8)

A transport device that transports a transported object while floating,
A gas hole for ejecting / sucking a gas for controlling the floating of the conveyed object;
A charge detection mechanism for detecting a local charge potential of the conveyed object;
A charge neutralization mechanism that is provided downstream of the charge detection mechanism with respect to the transport direction and neutralizes the charge of the transported body;
A transport unit connected to the charge detection mechanism and the charge neutralization mechanism, and having a control means for generating, in the charge neutralization mechanism, ions corresponding to the charged potential of the transported body detected by the charge detection mechanism. apparatus.   The transport apparatus according to claim 1, wherein the charge detection mechanism includes a potential sensor that is not in contact with the transported body installed on a table.   The transport device according to claim 1, wherein the charging neutralization mechanism is provided on the downstream side of the gas hole provided on the most downstream side with respect to the transport direction. The charging neutralization mechanism is
A gas pipe as a ground electrode;
A discharge electrode provided in the gas tube;
The transport apparatus according to claim 1, further comprising a voltage applying unit that applies a voltage between the ground electrode and the discharge electrode. The gas pipe is
A gas pipe that generates positive ions;
The transport apparatus according to claim 4, further comprising a gas pipe that generates negative ions.   The transport apparatus according to claim 1, wherein the charging neutralization mechanism includes ultraviolet irradiation means or X-ray irradiation means.   The transport apparatus according to claim 1, wherein an inner wall of the gas hole is grounded or covered with an antistatic film. A transport method for transporting gas while jetting / sucking it and floating the transported object,
Detecting a local charging potential of the conveyed object;
And a step of generating ions corresponding to the charged potential after detecting the charged potential, and bringing the ions into contact with the transported body to neutralize the charge of the transported body.

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