CN108249746B - Transfer base and cutting method for cutting substrate by using same - Google Patents
Transfer base and cutting method for cutting substrate by using same Download PDFInfo
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- CN108249746B CN108249746B CN201810136770.7A CN201810136770A CN108249746B CN 108249746 B CN108249746 B CN 108249746B CN 201810136770 A CN201810136770 A CN 201810136770A CN 108249746 B CN108249746 B CN 108249746B
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
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Abstract
The embodiment of the invention provides a transfer base station and a cutting method for cutting a substrate by adopting the same, wherein the transfer base station comprises a base station body, and each air hole position of the base station body is provided with an air-tight protection part, an air pipe and a first connecting part; the air pipe is fixed at the air hole position of the base station body through the first connecting part; the airtight protection component is fixed between the air hole wall of the base station body and the outer wall of the air pipe. Because the setting of airtight protection part, trachea and first connecting part can realize that the gas flow direction is the same when the air supporting state, when making during the base plate cutting from the vacuum adsorption state switch the air supporting state, the base plate is the same with base station body friction direction, and the effectual base plate of having avoided takes place the skew because of the different rocks that cause of frictional force direction.
Description
Technical Field
The invention relates to the technical field of display, in particular to a transfer base station and a cutting method for cutting a substrate by adopting the transfer base station.
Background
The thinning of the display panel is the mainstream of the mobile electronic consumer products, and has a trend of being thinner, and the traditional thinning process is to thin the large substrate after cutting the large substrate into several medium-sized panels. With the development of the thinning process, the cost for thinning the large substrate is obviously reduced compared with the cost for thinning the panel with the medium size, and particularly, the large substrate needs to be thinned before the touch film layer is coated with a film due to the occurrence of the touch integrated process.
The thinned large substrate has a large size, and needs to be cut into a plurality of medium-sized panels, and the conventional process for cutting the thinned substrate into the plurality of medium-sized panels mainly comprises a base cutting process and a suspension cutting process, wherein the base cutting process is as shown in fig. 1, the thinned substrate 11 is adsorbed on an upstream base 14 and a downstream base 15, a cutter head drives a cutter wheel 12 to simultaneously cut the upper surface and the lower surface of the thinned substrate 11, and the cut and separation are realized by the movement of the downstream base 15 after cutting; among them, the loading part 13 is used to realize the movement of the thinned substrate 11 in the up-down direction and in the left-right direction.
In addition, in the suspension cutting process in the prior art, the base station does not adsorb the thinned substrate, the thinned substrate is in a suspension state, the thinned substrate is adsorbed and moved by the loading part, the moving direction of the thinned substrate is parallel to the direction of the knife flywheel, and the loading part moves the thinned substrate to pass through the knife flywheel while moving and cutting.
The inventor of the present invention finds that, when the thinned substrate is cut by the suspended cutting process in the prior art, the thinned substrate is easy to bend and deform downwards, and the cutting process cannot be well realized, and the thinned substrate can only be cut by the base cutting process at present.
The inventor of the invention finds that when a base station cutting process is selected to cut the thinned substrate at present, when the vacuum adsorption is switched to air floatation after the thinned substrate is cut, the thinned substrate is shifted due to shaking, and the problem that the alignment cannot be realized before the next cutting exists.
Disclosure of Invention
In view of the above, the present invention provides a transfer table and a method for cutting a substrate using the same, which are used to avoid the problem of the offset of a thinned substrate when the vacuum adsorption is switched to the air floatation after the thinned substrate is cut.
In order to achieve the purpose, the invention provides the following technical scheme:
a transfer base station is used for cutting a substrate and comprises a base station body, wherein each air hole position of the base station body is provided with an air-tight protection part, an air pipe and a first connecting part;
the air pipe is fixed at the air hole position of the base station body through the first connecting part;
the airtight protection component is fixed between the air hole wall of the base station body and the outer wall of the air pipe.
Preferably, the first connecting part is further used for adjusting an included angle between the air outlet direction of each air pipe and the plane where the base station body is located.
Preferably, the transferring base station further comprises a second connecting part, a linkage rod and a linkage driving cylinder;
the linkage rod is crossed with each air pipe and is fixedly connected with the air pipes through the second connecting parts at the crossed positions;
the linkage driving cylinder is used for sending an adjusting signal for controlling the linkage rod to move;
and the second connecting part is used for adjusting an included angle between the air outlet direction of the air pipe and the plane where the base station body is located under the control of the adjusting signal.
Preferably, the transfer base station further comprises a gas three-way valve and a gas pipeline, and the gas three-way valve is arranged at the intersection position of the gas pipeline and the gas pipe.
Preferably, each first connecting part is arranged at the middle position of each air hole at the corresponding position of the base platform body;
each air hole of the base station body is set to be narrow in the middle and wide at the upper end and the lower end.
Preferably, all the pores of the base body are equal in size.
Preferably, the material of the airtight protection member comprises a flexible material.
Preferably, the first connecting member and the second connecting member have the same structure.
A cutting method for cutting a substrate by adopting the transfer base station comprises the following steps:
controlling the substrate to be cut to be adsorbed on the base station body, and cutting the substrate to be cut for the first time;
and controlling an included angle between the air outlet direction of the air pipe and the plane of the base station body to be a preset angle, and controlling the substrate to be cut after the first cutting to be separated from the base station body.
Preferably, before the substrate to be cut is controlled to be adsorbed on the base body, the method further includes:
the extending direction of the air pipe is controlled to be vertical to the plane of the base station body.
Compared with the prior art, the scheme of the invention has the following beneficial effects:
the transfer base station provided by the embodiment of the invention comprises an airtight protection part, an air pipe and a first connecting part, wherein the airtight protection part, the air pipe and the first connecting part are arranged at each air hole position of a base station body; the airtight protection component is fixed between the air hole wall of the base station body and the outer wall of the air pipe; when the thinned substrate is cut, particularly after the thinned substrate is cut, and the thinned substrate is switched to an air floatation state from a vacuum adsorption state, the air-tight protection part, the air pipe and the first connecting part are arranged to realize the same air flow direction in the air floatation state, so that the thinned substrate is in the same friction direction with the base table body when the thinned substrate is switched to the air floatation state from the vacuum adsorption state.
In addition, the embodiment of the invention can blow the tiny glass dust on the base station body away from the base station body in the air floatation state because the air flowing direction is the same in the air floatation state, thereby playing a good self-cleaning role on the base station body.
Besides, the first connecting part can fix the air pipes and is also used for adjusting the included angle between the air outlet direction of each air pipe and the plane of the base station body; like this, but the air flow direction regulation control during the air supporting state, when the thin substrate of different thickness cuts from the vacuum adsorption state switch to the air supporting state, thin substrate is the same and the angle is suitable with base station body friction direction, compares with prior art, and the effectual thin substrate of having avoided rocks because of the different causes of frictional force direction, and then has avoided the thin substrate to take place the problem of skew for the thin substrate of different thickness can accurate counterpoint before cutting next time.
Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention.
Drawings
The foregoing and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic view of a cutting process of a prior art abutment;
FIG. 2 is a schematic structural view of a thinned substrate in an air-floated state after being cut by a base cutting process in the prior art;
FIG. 3 is a schematic view of a prior art thinned substrate shifted after being cut by a base cutting process;
fig. 4 is a schematic structural view of a transfer base according to an embodiment of the present invention;
fig. 5 is a schematic view of another transfer base according to an embodiment of the present invention;
fig. 6 is a schematic structural view of another transfer base provided in the embodiment of the present invention;
fig. 7 is a schematic structural view illustrating a thinned substrate attached to a transfer stage according to an embodiment of the present invention;
fig. 8 is a schematic structural view of an air floating of a thinned substrate on a transfer stage according to an embodiment of the present invention;
fig. 9 is a flowchart of a method for cutting a thinned substrate by using a transfer table according to an embodiment of the present invention.
The meaning of the various reference symbols of the embodiments of the invention is explained below:
11-thinning the substrate; 12-a cutter wheel; 13-a loading member; 14-an upstream abutment; 15-a downstream station; 21-base station; 22-vacuum automatic valve; 23-automatic valve for ventilation;
41-base station body; 411-the plane of the base station body; 42-air holes; 43-a gas-tight protection member; 44-trachea; 45-a first connecting member; 51-a linkage bar; 52-a second connecting member; 53-linkage driving cylinder; 71-gas three-way valve; 72-air channel pipeline of transfer base station.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are illustrative only and should not be construed as limiting the invention.
As used herein, the singular forms "a", "an", "the" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and/or groups thereof. It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may also be present. Further, "connected" or "coupled" as used herein may include wirelessly connected or wirelessly coupled. As used herein, the term "and/or" includes all or any element and all combinations of one or more of the associated listed items.
It will be understood by those skilled in the art that, unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the prior art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The inventors of the present invention have studied on the cutting of the thinned substrate by the base cutting process of the related art and found the following problems.
As shown in fig. 2, after the thinned substrate 11 is cut by the base cutting process, the vacuum automatic valve 22 is closed, the ventilation automatic valve 23 is opened, and the thinned substrate 11 is pulled upward by the loading part 13, the thinned substrate 11 is switched from the vacuum adsorption state to the air floatation state, and after the ventilation automatic valve 23 is opened, the gas flows along the gas path pipeline and the air holes of the base 21, and the specific flow direction is shown by the arrow direction in the figure.
As shown in fig. 2, the inventors of the present invention found that, at the moment of switching from the vacuum adsorption state to the air floating state, since the gas flow is not in a fixed direction, i.e., the friction force between the thinned substrate 11 and the base 21 is not in a fixed direction, the friction force has no significant effect when cutting the non-thinned substrate (the thickness of the box is generally greater than 0.8 millimeter (mm)), but when cutting the thinned substrate (the thickness of the box is less than 0.5mm), the friction force in the direction of no fixation causes the thinned substrate to shake, and further causes the thinned substrate to shift, as shown in fig. 3, the dashed line part in the figure represents the shift of the thinned substrate, and the thinned substrate cannot be precisely aligned before the next cutting.
The technical scheme of the embodiment of the invention is described below by combining the accompanying drawings.
In view of the disadvantages of the prior art, the present inventors provide a transfer base.
As shown in fig. 4, fig. 4 is a schematic structural diagram of a transfer base according to an embodiment of the present invention, the transfer base according to the embodiment of the present invention is used for cutting a thinned substrate 11, and includes a base body 41, and an airtight protection member 43, an air pipe 44 and a first connection member 45 are disposed at each air hole 42 of the base body 41; the air pipe 44 is fixed to the air hole 42 of the base body 41 by a first connecting member 45; the airtight protection member 43 is fixed between the porous wall of the base body 41 and the outer wall of the air pipe 44.
Since the transfer base according to the embodiment of the present invention includes the airtight protection member 43, the air pipe 44 and the first connection member 45 provided at the position of each air hole 42 of the base body 41, when the thinned substrate 11 is cut and switched from the vacuum adsorption state to the air floating state, the air-tight protection member 43, the air pipe 44 and the first connection member 45 according to the embodiment of the present invention can achieve the same air flow direction (for example, the air flow direction is synchronously toward the moving direction of the thinned substrate 11 to be cut) in the air floating state, so that the thinned substrate 11 and the base body 41 have the same friction direction when the thinned substrate 11 is switched from the vacuum adsorption state to the air floating state, compared with the prior art, the thin substrate effectively avoids shaking caused by different friction directions, and further, the problem of offset of the thinned substrate is avoided, so that the thinned substrate can be accurately aligned before the next cutting.
In addition, in the embodiment of the present invention, since the gas flowing direction is the same in the air floating state, the fine glass dust on the base table body 41 can be blown off from the base table body 41 in the air floating state, and the base table body 41 can be cleaned well.
Preferably, the first connecting part 45 in the embodiment of the present invention is a rotatable connecting part, and the first connecting part 45 is used for fixing the air pipes 44, and adjusting an included angle between an air outlet direction of each air pipe 44 and a plane 411 (i.e. a horizontal plane in the drawing) where the base body 41 is located; like this, but the air flow direction regulation control during the air supporting state, when the thin substrate 11 of different thickness cut from the vacuum adsorption state switch to the air supporting state, thin substrate 11 is the same and the angle is suitable with 41 friction direction of base station, compares with prior art, has effectually avoided the thin substrate to take place the problem of skew because of the different rocks that cause of frictional force direction for the thin substrate of different thickness can accurate counterpoint before next cutting.
Further, as shown in fig. 5, the transferring base station according to the embodiment of the present invention further includes a second connecting member 52, a linkage rod 51, and a linkage driving cylinder 53; the linkage rod 51 is arranged in a crossed manner with each air pipe 44, and is fixedly connected with the air pipes 44 through second connecting parts 52 at the crossed positions; the linkage driving cylinder 53 is used for sending an adjusting signal for controlling the linkage rod 51 to move; the second connecting component 52 is used for adjusting the included angle between the air outlet direction of the air pipe 44 and the plane of the base station body 41 under the control of the adjusting signal; thus, the inclination angles of all the air tubes 44 can be adjusted simultaneously, so that the air outlet directions of all the air tubes 44 are kept consistent, and when the thinned substrate 11 is switched from the vacuum adsorption state to the air floatation state after being cut, the thinned substrate 11 and the base body 41 have the same friction direction and a proper angle.
Specifically, the linkage driving cylinder 53 is controlled by a program, the second connecting component 52 can precisely adjust the inclination angle of the air pipe 44 under the control of an adjusting signal sent by the linkage driving cylinder 53, and the specific working process of the linkage driving cylinder 53 is similar to that of the prior art and is not described herein again.
Preferably, the first and second connecting members 45 and 52 are identical in structure; like this, in actual production process, can reduce adapting unit's the cost of selecting for use, and use the adapting unit of the same structure, installation time when can reducing adapting unit uses, very big saving manpower and time cost.
In the embodiment of the present invention, the first connecting part 45 and the second connecting part 52 are arranged, so that an included angle between the air outlet direction of the air pipe 44 and the plane of the base body 41 can be well adjusted, and in order to better adjust the air outlet direction of the air pipe 44 (i.e. the inclined direction of the air pipe 44), the embodiment of the present invention further improves and designs the shape of each air hole 42 of the base body 41.
Preferably, as shown in fig. 6, each air hole 42 of the abutment body 41 according to the embodiment of the present invention is configured to have a shape with a narrow middle and wide upper and lower ends, i.e. configured to have a shape of "8" as shown in fig. 6; each first connecting member 45 is provided at a middle position of each air hole 42 at a corresponding position of the base body 41; thus, the air outlet direction of the air pipe 44 can be better adjusted.
Preferably, in the embodiment of the present invention, all the air holes 42 of the base body 41 have the same size, so that the base body 41 is symmetrically disposed, which is easier to be implemented in the actual production process, and the uniformity of the stress of the airtight protection component 43 can be well ensured.
Since the air outlet direction of the air tube 44 is adjustable in the embodiment of the present invention, that is, the inclined direction of the air tube 44 is not fixed, it is necessary to select a soft material for the airtight protection member 43 fixed between the porous wall of the base body 41 and the outer wall of the air tube 44.
Preferably, the material of the airtight protection component 43 in the embodiment of the present invention includes a flexible material, and the flexible material is selected so that the airtight protection component 43 can be well deformed when the inclination direction of the air pipe 44 changes, thereby well ensuring the airtightness; in specific implementation, the airtight protection member 43 is made of a soft material such as PEEK (PolyEtherEtherKetone).
Preferably, as shown in fig. 7 and 8, the transfer base in the embodiment of the present invention further includes a gas three-way valve 71, which is disposed at the intersection position of the gas path pipeline 72 of the transfer base and the gas pipe 44; the specific arrangement mode of the air path pipeline 72 of the transfer base station is similar to that of the prior art, and is not described again; the gas three-way valve 71 can be arranged to realize a gas flow passage, and of course, other components can be selected to realize different gas flow passages in the actual production process.
In specific implementation, as shown in fig. 7 and 8, the loading component 13 is used for sucking the thinned substrate 11 to be cut by using a suction cup and moving the thinned substrate 11 to a set position, and when moving, the thinned substrate 11 needs to be vertically and upwardly sucked and lifted, so that a certain distance exists between the thinned substrate 11 and the base body 41, and the specific working mode of the loading component 13 is the same as the prior art, and is not described herein again.
In specific implementation, as shown in fig. 7 and 8, the vacuum automatic valve 22 is controlled by a program, and is opened when the base body 41 is vacuumized, and is closed when the thinned substrate 11 to be cut is switched from the vacuum absorption state to the air floatation state, and the specific operation manner of the vacuum automatic valve 22 is the same as that of the prior art, and is not described herein again. The automatic ventilation valve 23 is controlled by a program, and is closed when the base body 41 is vacuumized, and is opened when the thinned substrate 11 to be cut is switched from a vacuum adsorption state to an air floatation state, and the specific working mode of the automatic ventilation valve 23 is the same as that of the prior art, and is not described herein again.
Based on the same inventive concept, an embodiment of the present invention further provides a method for cutting a substrate using the transfer base, as shown in fig. 9, the method includes:
s901, controlling the substrate to be cut to be adsorbed on the base station body, and cutting the substrate to be cut for the first time;
s902, controlling an included angle between the air outlet direction of the air pipe and the plane of the base station body to be a preset angle, and controlling the substrate to be cut after the first cutting to be separated from the base station body.
Aiming at the step S901, controlling the substrate to be cut to be adsorbed on the base table body, and cutting the substrate to be cut for the first time:
preferably, before controlling the substrate to be cut to be adsorbed on the base body, the method further comprises: the extension direction of the control air pipe is vertical to the plane of the base station body; therefore, the inclination direction of the air pipe can be adjusted more conveniently subsequently.
The cutting method provided by the embodiment of the invention is described in detail below with reference to the accompanying drawings.
First, the thinned substrate 11 to be cut is moved to a predetermined position by the loading member 13, the thinned substrate 11 is large in size and generally needs to be cut into a plurality of medium-sized panels, and the arrow direction in the figure indicates the flow direction of the gas.
Next, the loading member 13 is lowered, the thinned substrate 11 covers the air holes 42 of the base body 41, and as shown in fig. 7, the linkage driving cylinder 53 is controlled to operate, so that the air pipe 44 is in a vertical state, that is, the extending direction of the air pipe is perpendicular to the plane of the base body; then, the automatic ventilation valve 23 is controlled to be closed, and the automatic vacuum valve 22 is controlled to be opened, so that the thinned substrate 11 is adsorbed on the base body, and the thinned substrate 11 is cut for the first time, and the specific process of the first cutting is similar to that of the prior art, and is not repeated here.
After the first cutting is completed, the thinned substrate 11 to be cut after the first cutting needs to be moved, so that the thinned substrate 11 after the first cutting needs to be further cut.
Specifically, the control linkage driving cylinder 53 sends an adjusting signal for controlling the linkage rod 51 to move, and the second connecting component 52 adjusts an included angle between the air outlet direction of the air pipe 44 and the plane of the base body 41 under the control of the adjusting signal, so that the included angle between the air outlet direction of the air pipe 44 and the plane of the base body is a preset angle, as shown in fig. 8, the preset angle can be set according to the thickness of the thinned substrate 11, and the thinner the thickness of the thinned substrate 11 is, the larger the downward deformation of the thinned substrate 11 is, so that the thinner the thickness of the thinned substrate 11 is, the larger the inclination angle of the air pipe 44 needs to be controlled.
As shown in fig. 8, the airtight protection member 43 has a corrugated shape, and when the inclination direction of the air tube 44 is adjusted, one side of the airtight protection member 43 is extended and the other side is compressed to ensure the airtightness of the air hole 42.
As shown in fig. 8, the automatic vent valve 23 is controlled to open, the automatic vacuum valve 22 is controlled to close, the loading member 13 sucks the thinned substrate 11 after the first cutting and lifts up for a certain distance (generally about 1 mm), so that the thinned substrate 11 after the first cutting is separated from the base body, and the loading member 13 sucks the thinned substrate 11 after the first cutting and moves to a predetermined next position, so as to perform the next cutting on the thinned substrate 11 after the first cutting.
In summary, the transfer base station provided in the embodiments of the present invention at least has the following advantages:
first, through the setting of airtight protection part, trachea and first connecting part, the gas flow direction is the same when realizing the air supporting state, when avoiding switching over from the vacuum adsorption state to the air supporting state, because the different thinization base plate that causes of frictional force direction takes place the problem of skew.
The second and the first connecting parts can adjust the air outlet direction of the air pipe so as to be suitable for thinned substrates with various thicknesses, and when the vacuum adsorption state is switched to the air floatation state, the problem that the thinned substrates with various thicknesses are deviated due to different directions of friction force is avoided, so that the thinned substrates with various thicknesses can be accurately aligned before next cutting.
Thirdly, because the gas flow direction is the same when in the air floatation state, the micro glass dust on the base station body can be blown away from the base station body when in the air floatation state, thereby playing a good self-cleaning role for the base station body and canceling the cleaning of a mechanical brush mechanism.
The foregoing is only a partial embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (9)
1. A transfer base station is used for cutting a substrate and is characterized by comprising a base station body, wherein each air hole position of the base station body is provided with an air-tight protection part, an air pipe and a first connecting part;
the air pipes are fixed at the air hole positions of the base station body through the first connecting parts, and the first connecting parts are used for adjusting included angles between the air outlet directions of the air pipes and the plane of the base station body;
the airtight protection component is fixed between the air hole wall of the base station body and the outer wall of the air pipe, and the airtight protection component is made of a soft material.
2. The transfer base according to claim 1, further comprising a second connecting member, a linkage rod, and a linkage driving cylinder;
the linkage rod is crossed with each air pipe and is fixedly connected with the air pipes through the second connecting parts at the crossed positions;
the linkage driving cylinder is used for sending an adjusting signal for controlling the linkage rod to move;
and the second connecting part is used for adjusting an included angle between the air outlet direction of the air pipe and the plane where the base station body is located under the control of the adjusting signal.
3. The transfer base according to claim 1, further comprising a gas three-way valve and a gas line pipe, wherein the gas three-way valve is provided at a position where the gas line pipe intersects with the gas line pipe.
4. The transfer base according to any one of claims 1 to 3, wherein each of the first connecting members is provided at a position intermediate to each of the air holes at the corresponding position of the base body;
each air hole of the base station body is set to be narrow in the middle and wide at the upper end and the lower end.
5. The transfer base according to claim 4, wherein all the pores of the base body are equal in size.
6. The transfer base according to claim 1, wherein the material of the airtight protection member comprises a flexible material.
7. The transfer base according to claim 2, wherein the first connection member and the second connection member have the same structure.
8. A method for cutting a substrate using the transfer base according to any one of claims 1 to 7, comprising:
controlling the substrate to be cut to be adsorbed on the base station body, and cutting the substrate to be cut for the first time;
and controlling an included angle between the air outlet direction of the air pipe and the plane of the base station body to be a preset angle, and controlling the substrate to be cut after the first cutting to be separated from the base station body.
9. The cutting method according to claim 8, wherein before controlling the substrate to be cut to be adsorbed on the submount body, the method further comprises:
the extending direction of the air pipe is controlled to be vertical to the plane of the base station body.
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| CN201810136770.7A CN108249746B (en) | 2018-02-09 | 2018-02-09 | Transfer base and cutting method for cutting substrate by using same |
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| CN201810136770.7A CN108249746B (en) | 2018-02-09 | 2018-02-09 | Transfer base and cutting method for cutting substrate by using same |
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| CN108249746A (en) | 2018-07-06 |
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