JPH11333774A - Sheet-like work suction and transfer hand - Google Patents

Abstract

PROBLEM TO BE SOLVED: To appropriately suck, hold and transfer a flexible sheet-like work. SOLUTION: In a sheet-like work suction and transfer hand 10, arm parts 12, 13 are arranged along both outer edge parts of a sheet-like work 14, vacuum suction pads 15 elastically deformable by a specified quantity in the direction of the arm parts 12, 13 are uniformly arranged on the arm parts 12, 13 with specified intervals, and when the vacuum pads 15 are closely attached to the sheet-like work 14, a vacuum piping to be communicated with a suction hole in the vacuum pad 15 corresponding to the size of the sheet-like work 14 out of a plurality of the vacuum suction pads 15, and the vacuum condition is supplied from a vacuum generator. Thus, only the vacuum suction pad 15 corresponding to the size of the sheet-like work 14 is in the vacuum condition to prevent the vacuum from being supplied to extra vacuum suction pads 15 and the degree of vacuum from being dropped, and at the same time, the vacuum suction pads 15 are elastically deformed, to appropriately suck the sheet-like work 14 even when there is a variance in the suction surface of the vacuum suction pads 15.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sheet-like work sucking / transferring hand, and more particularly, to a sheet-like work having a predetermined flexibility such as a plastic film for liquid crystal by appropriately sucking and holding. The present invention relates to a sheet-like work suction / transfer hand to be placed.

[0002]

2. Description of the Related Art Conventionally, when a liquid crystal glass substrate is transported, a liquid crystal glass substrate 3 is generally supported from below by using a hand 2 having a pair of arms 1 as shown in FIG. It is being transported.

However, in such a supporting method, when the object to be supported is a flexible sheet-like work, the outer edge of the sheet-like work is affected by the weight of the work, the wind pressure during movement, the curl of the work itself, and the like. Hangs down,
There is a problem that it hinders the transportation, and the liquid crystal glass substrate 3 which is a work from the work table to the work table.
It is necessary to provide a space below the work so that the arm 1 can be inserted below the liquid crystal glass base 3 when moving the work, a large work space is required, and the cost of the work table is high. there were.

In view of the above, various suction / transfer methods for sucking and transporting a work by a plurality of vacuum suction units have been conventionally proposed. For example, Japanese Patent Application Laid-Open No. H8-155873 discloses a vacuum box connected to a negative pressure source, a vacuum box provided with a number of suction holes communicating with the pressure reduction chamber and opening on the suction surface side, and a predetermined position. Vacuum suction, comprising a pattern sheet for covering a suction surface of the vacuum box, opening a predetermined suction hole among the suction holes, and closing the remaining suction holes. A device has been proposed. In this vacuum suction device, by using a pattern sheet, only suction holes at necessary positions are opened and non-suction holes are closed according to the size of the work, so that it is possible to cope with works of various sizes. .

Further, in a conventional vacuum suction and transfer apparatus for a work having a plurality of work suction ports provided in a header connected to a negative pressure forming means, a cylindrical main body is provided between the header and each of the work suction ports. And a sphere mounted in the main body so as to be movable in the longitudinal direction, and a valve seat formed on one end of the main body so as to engage with the sphere so as to prevent air flow, and A vacuum suction transfer device for a work, in which a valve structure provided with a connection port for connecting the work suction port at an end and a cross-sectional area of a main body is formed smaller than an air flow cross-sectional area of the work suction port has been proposed. (See JP-A-7-10315). In this vacuum suction conveyance device, only the suction port at the required position is opened according to the size of the work by a valve using a sphere, and the non-suction port is securely closed with the sphere, so that the work of various sizes Can be handled.

Further, in a hand for vacuum-holding a target component to a suction nozzle and holding the same, a plurality of suction nozzles are integrally provided, and the suction nozzles are individually or separately provided according to the sizes of a plurality of types of target components having different external shapes. A hand that is driven in combination has been proposed (JP-A-5-285278).
Reference).

[0007]

However, in such a conventional technique, a flexible sheet-like work is transferred while being appropriately sucked while preventing the outer peripheral edge of the work from hanging down. There was still a problem to do.

That is, in the technique described in Japanese Patent Application Laid-Open No. 8-155872, it is necessary to replace the pattern sheet every time the size or shape of the work is different, and it is difficult to automate the workability. However, there was a problem that the usability was poor.

Further, in the technique described in Japanese Patent Application Laid-Open No. 7-10315, since the non-suction port is closed by a sphere, the values of the size, weight, bypass channel diameter and the like of the sphere are reduced. If it is not set properly according to the number of pads and the capacity of the vacuum pump, the intended function cannot be secured, and it takes a certain amount of time for the sphere to operate, so the suction response is poor. There was a problem. Furthermore, since the sphere moves above the work, there is a problem that the sphere is not suitable for work requiring high cleanliness (cleanness).

Furthermore, in the technique described in Japanese Patent Application Laid-Open No. 5-285278, it is unknown how to arrange a plurality of suction pads and how to individually drive them.
There was a problem that it was not a sufficient solution.

Further, when a flexible sheet-like work is moved by vacuum suction with a suction / transfer hand, a gap due to a deviation between the suction surface on the hand side and the parallelism of the work surface, and the height of the vacuum suction pad. The number of suction pads due to gaps due to unevenness, leaks due to defective suction pads or adhesion of foreign matter, and leaks due to some of the suction pads coming off the work when a large external force is partially applied to the work As the number increases, a part of the leakage spreads to the whole, and the degree of vacuum may be greatly reduced.

As a characteristic of a flexible sheet-like work such as a plastic film sheet, the work is curled or wavy due to distortion such as thermal expansion, water absorption expansion and residual stress. The sheet-like work in a stable state is disclosed in JP-A-8-155873 and JP-A-7-157.
In a configuration in which an opening is formed in a suction table as in the vacuum suction transfer device disclosed in Japanese Patent No. 0315, etc., a gap is generated between the suction table and the work, and the work is appropriately suctioned. There was a problem that can not be.

Therefore, according to the present invention, a predetermined amount is provided on the lower surface of the hand main body formed at least in the vicinity of the outer edge of a sheet-like work having predetermined flexibility to be sucked and transferred. A vacuum suction pad is provided at a position corresponding to a substantially equal position at least three or more outermost edges of the outer edges of the sheet-like work projecting downward, and a vacuum is supplied to all of the vacuum suction pads. Thereby, when sucking and moving a flexible sheet-like work, the sheet-like work is prevented from sagging at the outer edge, turning up due to air resistance during movement, and flapping, Adsorbing and holding the outer edge of the sheet-like work, making the large area of the center part available as an effective area for the product, and performing stable and appropriate adsorption and transfer of the sheet-like work.
Suction / transfer while maintaining good quality of sheet-like work, and widening the effective area of the product of the sheet-like work so that sheet-like work can be sucked / transferred efficiently. The purpose is to provide a loading hand.

According to a second aspect of the present invention, the hand main body is formed in a shape extending near the outer edge of the maximum size of the sheet work of a plurality of sizes, and the vacuum suction pad is formed in a plurality of sizes of the sheet work. The vacuum suction pads provided at at least three or more outermost edges of the outer edge portions and corresponding to substantially equal positions, respectively, and provided at at least three or more outermost edges of each size, By connecting the vacuum to the vacuum generating means by an independent vacuum pipe and supplying vacuum selectively, the outer edge of the sheet-shaped work of different size hangs down, or it turns up or down due to air resistance during movement. In addition to adsorbing / transferring while preventing sheeting, the outer edge of sheet-shaped work of each size is adsorbed and held, making a large area at the center available as an effective area for the product. Suction and transfer of workpieces are performed stably and appropriately, and while maintaining the quality of sheet workpieces of each size in good condition, the effective area of product of sheet workpieces is widened. For efficient adsorption
It is an object of the present invention to provide a sheet-like work suction / transfer hand capable of performing transfer.

According to a third aspect of the present invention, the vacuum suction pad is formed so as to be elastically deformable by a predetermined amount in the direction of the sheet-like work and in the direction of the hand body, so that the degree of parallelism between the vacuum suction pad and the surface of the sheet-like work can be improved. Even if there is deviation or the height of the suction surface of the vacuum suction pad varies, the vacuum suction pad can properly and securely suction the sheet-like work, and the small and stable suction and transfer of the sheet-like work can be performed. It is an object of the present invention to provide a sheet-like work sucking / transferring hand that can perform.

According to a fourth aspect of the present invention, a sheet is provided on the lower surface of the hand main body by disposing a predetermined pressing plate protruding downward and extending to near the maximum deformation position of the vacuum suction pad in the hand main body direction. Even if the workpiece is curled or wavy, it can be sucked while the outer edge of the sheet workpiece is held down by the holding plate, and the sheet workpiece can be reliably and stably adsorbed and transferred. It is intended to provide a work suction / transfer hand.

According to a fifth aspect of the present invention, a vacuum pipe is connected to the vacuum generating means and extends in the direction of the vacuum suction pad. A branch pipe for connecting the suction pad to the suction pad, and a throttle valve is provided in each branch pipe so that the size of the sheet work can be reduced when various kinds of sheet work having different sizes are suctioned and transferred. The unnecessary supply of vacuum to the vacuum suction pad is suppressed or cut off by the throttle valve, and the reduction in the degree of vacuum by the vacuum generating means to the vacuum suction pad required for suctioning the sheet-like work of the size is suppressed, An object of the present invention is to provide a sheet-like work suction / transfer hand capable of reliably and stably picking up / transferring sheet-like works of various sizes.

According to a sixth aspect of the present invention, a vacuum pipe is connected to a vacuum generating means and extends in the direction of a vacuum suction pad. And a branch pipe for connecting the suction pad to the suction pad. By forming the pipe inner diameter of each branch pipe to be smaller than the main pipe by a predetermined amount, various kinds of sheet-like works having different sizes are suctioned and transferred. At the time, unnecessary supply of vacuum to the vacuum suction pad depending on the size of the sheet-like work is suppressed with a simple configuration, and the degree of vacuum generated by the vacuum generating means on the vacuum suction pad necessary for suctioning the sheet-like work of the size is reduced. It is an object of the present invention to provide a sheet-like work sucking / transferring hand capable of reliably and stably picking up / transferring sheet-like works of various sizes while suppressing a decrease in the size.

[0019]

According to a first aspect of the present invention, there is provided a sheet-like work sucking / transferring hand which sucks a sheet-like work having a predetermined shape and flexibility and moves it in a predetermined direction by a predetermined amount. In the sheet-like work sucking / transferring hand to be transferred, a hand main body formed to have a shape extending at least in the vicinity of an outer edge portion of the sheet-like work; A vacuum is supplied to all of the vacuum suction pads and a plurality of vacuum suction pads disposed at positions corresponding to at least three or more outermost edges of the sheet-like work and corresponding to substantially equal positions. The object is achieved by providing a vacuum pipe and vacuum generating means for supplying a vacuum to the vacuum suction pad via the vacuum pipe.

According to the above arrangement, at least a predetermined amount of the lower surface of the hand body, which is formed in a shape extending near the outer edge of the sheet-like work having a predetermined flexibility to be sucked and transferred, projects downward. The vacuum suction pads are disposed at the outermost edges of at least three or more of the outer edges of the sheet-like work and correspond to substantially equal positions, and vacuum is supplied to all of the vacuum suction pads. When sucking and moving the sheet-shaped work having the shape, the sheet-shaped work can prevent the outer edge portion from hanging down, turning over due to air resistance during movement, and fluttering, and can prevent the sheet-shaped work from moving. The outer edge of the work can be suctioned and held, and a large area in the center can be used as an effective area for the product. Wa It is possible to adsorb and transfer while satisfactorily retaining the quality of the click, and wide effective area of the product of the sheet-like work, it is possible to perform efficient adsorption and transfer.

In this case, for example, as described in claim 2, the hand main body is formed in a shape extending near the outer edge of the maximum size of the plurality of sizes of the sheet-like work, and the vacuum suction pad is And at least three or more outermost edges of the plurality of outer edges of each size of the sheet-shaped work, which are respectively disposed at positions corresponding to substantially equal positions, and at least three or more locations of each size. The vacuum suction pad provided at the outermost edge of the vacuum suction pad may be connected to the vacuum generating means by the independent vacuum pipe and selectively supplied with vacuum.

According to the above construction, the hand main body is formed in a shape extending near the outer edge of the maximum size of the sheet-like work of a plurality of sizes, and the vacuum suction pad is formed on the outer edge of the plurality of sizes of the sheet-like work. The vacuum suction pads provided at at least three or more outermost edges of the portion and corresponding to the substantially equal positions are respectively provided at least at three or more outermost edges of each size, The vacuum pipe is connected to the vacuum generating means to selectively supply vacuum, preventing the outer edges of the sheet-like workpieces of different sizes from sagging, turning up or down due to air resistance during movement. While picking and transferring while holding the outer edges of sheet-shaped workpieces of each size, making a large area at the center available as an effective product area. Door can be, adsorption and of the sheet-like work
By stably and appropriately performing transfer, it is possible to adsorb and transfer while maintaining the quality of the sheet work of each size well, and widen the effective area of the product of the sheet work, Efficient adsorption and transfer can be performed.

Further, for example, as described in claim 3, the vacuum suction pad may be formed so as to be elastically deformable by a predetermined amount in the direction of the sheet-like work and in the direction of the hand body.

According to the above configuration, the vacuum suction pad is formed so as to be elastically deformable by a predetermined amount in the direction of the sheet-like work and in the direction of the hand body, so that the parallelism between the vacuum suction pad and the surface of the sheet-like work is shifted. Even if the suction surface of the vacuum suction pad varies, the vacuum suction pad can properly and reliably suck the sheet-like work, and the small and stable suction and transfer of the sheet-like work can do.

Further, for example, as set forth in claim 4, the hand main body is provided with a predetermined pressing plate extending downward to protrude and extend to near a maximum deformation position of the vacuum suction pad in the direction of the hand main body. It may be provided on the lower surface.

According to the above arrangement, the lower surface of the hand body is
Since a predetermined holding plate is provided that protrudes downward and extends to near the maximum deformation position of the vacuum suction pad in the direction of the hand body, even if the sheet-like work is curled or wavy, the holding plate is provided. Thus, the sheet-like work can be sucked while its outer edge is suppressed, and the sheet-like work can be surely and stably sucked and transferred.

Further, for example, as set forth in claim 5, the vacuum pipe is connected to the vacuum generating means and is arranged to extend in the direction of the vacuum suction pad; A branch pipe that branches off from the pipe and connects the main pipe and the vacuum suction pad, and each of the branch pipes may include a throttle valve.

According to the above configuration, the vacuum pipe is connected to the vacuum generating means and is provided so as to extend in the direction of the vacuum suction pad. And a branch valve connecting each branch pipe, and a throttle valve is provided on each branch pipe, so that when various kinds of sheet-like works having different sizes are suctioned and transferred, depending on the size of the sheet-like work. Unnecessary supply of vacuum to the vacuum suction pad can be suppressed or cut off by the throttle valve, and a reduction in the degree of vacuum by means of vacuum generation to the vacuum suction pad required for suctioning a sheet-like work of the size is suppressed. Thus, it is possible to reliably and stably adsorb and transfer sheet-like works of various sizes.

Further, for example, as set forth in claim 6, the vacuum pipe is connected to the vacuum generating means and extends in the direction of the vacuum suction pad; A branch pipe that branches off from the pipe and connects the main pipe to the vacuum suction pad, wherein each of the branch pipes is formed to have a predetermined inner diameter smaller than the main pipe by a predetermined amount.

According to the above construction, the vacuum pipe is connected to the vacuum generating means and is provided so as to extend in the direction of the vacuum suction pad. And a branch pipe connecting each of the branch pipes, and the inside diameter of each branch pipe is formed to be smaller than the main pipe by a predetermined amount. In addition, unnecessary supply of vacuum to the vacuum suction pad due to the size of the sheet-like work can be suppressed with a simple configuration, and the vacuum generating means for the vacuum suction pad necessary for suctioning the sheet-like work of the size can be used. It is possible to reliably and stably adsorb and transfer sheet-shaped works of various sizes while suppressing a decrease in the degree of vacuum.

[0031]

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. It should be noted that the embodiments described below are preferred embodiments of the present invention, and therefore, various technically preferable limitations are added. However, the scope of the present invention is not limited to the following description. The embodiments are not limited to these embodiments unless otherwise specified.

FIGS. 1 to 4 are views showing a first embodiment of a sheet-like work suction / transfer hand according to the present invention. FIG. 1 is a diagram showing a sheet-like work suction / transfer hand according to the present invention. First
1 is a perspective view of a main part showing a schematic configuration of a sheet-like work suction / transfer hand 10 to which an embodiment of the present invention is applied.

In FIG. 1, a sheet-like work suction / transfer hand 10 has a pair of arm portions 1 in which a hand body 11 attached to a robot arm (not shown) extends in parallel.
The arm portions 12 and 13 have a length equal to or longer than the maximum length of the sheet-like work 14 to be suctioned and transferred, and have an interval covering about the maximum width of the sheet-like work 14 having the maximum size. It is arranged with a space. A plurality of vacuum suction pads 15 are provided on the lower surfaces of the pair of arms 12 and 13 at predetermined intervals in the longitudinal direction of the arms 12 and 13, respectively. As shown in FIG. 3, a so-called bellows-type pad having a bellows portion 16, a suction surface 17, and a suction hole 18 elastically deformed by a predetermined deformation amount (the amount indicated by d in FIG. 3).

As shown in FIG. 4, each of the arms 12 and 13 has three vacuum pipes 19a, 19b and 19c, respectively.
The vacuum pipe 19c is connected to the suction holes 18c of the vacuum suction pad 15 provided on the hand body 11 side (base end side) and the distal end side of the arms 12 and 13, respectively. The vacuum pipe 19b is connected to the arm 12,
13 second vacuum suction pad 15 from the base end and the tip end
The vacuum pipe 19a communicates with the suction holes 18a of all the vacuum suction pads 15 from the second to the innermost from the base end side and the tip end side of the arm portions 12 and 13, respectively. Piped in condition. FIG.
In, the suction holes 18a, 18b, and 18c are formed at positions corresponding to the minimum-size sheet-like work 14a, the intermediate-size sheet-like work 14b, and the maximum-size sheet-like work 14c, respectively, of the sheet-like works 14. Reference numerals are assigned to the suction holes 18 of the vacuum suction pad 15. That is, in the present embodiment, for the sake of simplicity, the vacuum suction pads 15 are arranged at positions corresponding to the three sizes of the sheet-like work 14 of large, medium, and small, and are attached to the sheet-like work 14 of each size. Applicable vacuum suction pad 1
The five suction holes 18a, 18b, and 18c are distinguished from each other by adding reference numerals a, b, and c to the numeral 18.

Then, the vacuum suction pad 15 is
As shown by the suction holes 18a to 18c, the sheet-shaped works 14a, 14b, 14c of each size are arranged at both ends in the width direction at a predetermined interval in the length direction. Workpieces 14a, 14
b, 14c, that is, at least three or more outermost edges among the outer edges of the sheet-like workpieces 14a, 14b, 14c of each size, which are disposed at positions corresponding to substantially equal positions. ing.

The sheet-like works 14a to 14c are, for example, plastic films for liquid crystal panels.

Each of the vacuum pipes 19a to 19c is connected to a vacuum generator (vacuum generating means) (not shown), and each vacuum suction pad 15 is operated to a vacuum state by the vacuum operation of each vacuum generator. This vacuum pipe 19a-
By individually driving and controlling the vacuum generators provided for each of the 19c, the vacuum suction pads 15 connected to the vacuum pipes 19a to 19c can be independently brought into a vacuum state. The vacuum generator is not limited to the one provided for each of the vacuum pipes 19a to 19c. For example, the vacuum pipes 19a and 19c may be connected to each other via an electromagnetic valve that connects and disconnects the vacuum pipes 19a to 19c. , And by controlling the operation of the solenoid valve, only the vacuum pipe 19a, only the vacuum pipe 19a and the vacuum pipe 19b, and all the vacuum pipes 19
The vacuum suction pads 15 connected to the vacuum pipes 19a to 19c may be independently brought into a vacuum state for each of the vacuum pipes 19a to 19c by switching a to 19c and connecting them to a vacuum generator.

Next, the operation of the present embodiment will be described. For example, when the sheet-like work 14 placed on a predetermined suction table is transferred onto another suction table by using the sheet-like work suction / transfer hand 10, the transfer target The transfer operation is started by inputting the size of the sheet-like work 14 using an operation unit (not shown). At this time, when the positions of the suction table of the transfer source and the suction table of the transfer destination of the sheet workpiece 14 to be transferred are fixed, the positions of the suction table of the transfer source and the suction table of the transfer destination are determined. The position is a sheet-like workpiece suction and transfer hand 1
If it is registered in memory 0, etc.
The transfer hand 10 automatically performs the position adjustment of the hand main body 11 and the arm portions 12 and 13 based on the registered and position data, and automatically performs the transfer operation process.

That is, the sheet-like work suction / transfer hand 10 holds the sheet-like work 1 with the position data of the transfer source suction table and the transfer destination suction table registered.
When the size data of No. 4 is input and a transfer start instruction is input, the robot arm is operated to move the hand body 11 and the arm units 12 and 13 onto the transfer source suction table. The units 12 and 13 are positioned right above the sheet-like work 14 on the suction table of the transfer source.

At this time, in the sheet-like work suction / transfer hand 10, the arm portions 12, 13 extend in parallel with the length direction of the sheet-like work 14, and the sheet-like work 1
4 so as to be positioned at equal positions on both outer edges in the width direction. In this state, the vacuum generator is driven so that the vacuum suction pad 15 is evacuated and the vacuum suction pad 15 is moved to the sheet-like work 14. In close contact. At this time, the vacuum generator may be driven after the vacuum suction pad 15 is brought into close contact with the sheet-like work 14.

Further, a sheet-like work suction / transfer hand 1
Numeral 0 denotes a vacuum pipe 19 communicating with the suction holes 18a, 18b, 18c of the vacuum pad 15 corresponding to the size of the sheet-like work 14 to be transferred among the plurality of vacuum suction pads 15.
a, 19b and 19c are selected to supply the vacuum of the vacuum generator.

That is, when the sheet-like work 14 is the minimum size sheet-like work 14a, the sheet-like work suction / transfer hand 10 drives only the vacuum generator connected to the vacuum pipe 19a, or By controlling the operation of the solenoid valves connected to the vacuum pipes 19a, 19b, and 19c, the vacuum is supplied only to the vacuum pipe 19a. When the medium is a medium-sized sheet-like work 14b, the same control is performed. A vacuum is supplied to the pipe 19a and the vacuum pipe 19b, and when the sheet work 14c has the maximum size, the same control is performed so that all the vacuum pipes 19
a, 19b, and 19c are supplied with vacuum.

Therefore, the sheet-like work suction / transfer hand 10 can suck the sheet-like work 14 by setting only the vacuum suction pad 15 corresponding to the size of the sheet-like work 14 to a vacuum state, and thereby extra vacuum suction. Pad 1
5 is supplied with a vacuum, and the sheet-like workpiece 14 to be transferred is
Can be prevented from lowering the degree of vacuum applied to the vacuum suction pad 15 necessary for sucking the air.

Further, since the vacuum suction pad 15 can be elastically deformed by a predetermined deformation amount d, the suction surface 17 of the vacuum suction pad 15 varies, or the sheet-like work 14 and the vacuum suction pad 15 can be deformed. Even when the degree of parallelism with the suction surface 17 is deviated, the sheet-like work 1 can be appropriately applied by the vacuum suction pad 15 as long as it is within the range of the deformation amount d.
4 can be adsorbed.

The sheet-like workpiece suction / transfer hand 10 is
When the sheet-like work 14 is sucked, the robot arm is operated to move the hand body 11 and the arm units 12 and 13 onto the suction table of the transfer destination, and the arm units 12 and 13 are moved.
Is positioned directly above the transfer position of the sheet-like work 14 on the transfer destination suction table. In this state, the sheet-like work suction / transfer hand 10 stops the driving of the vacuum generator, and places the sheet-like work 14 sucked on the vacuum suction pad 15 on the suction table of the transfer destination.

At this time, the sheet-like work 14 is appropriately sucked by all the vacuum suction pads 15 arranged at predetermined intervals in the length direction at both ends in the width direction, and the sheet-like work 14 Since the sheet-like work 14 is sucked by the vacuum suction pad 15 disposed at a position corresponding to the corner, it is possible to prevent the sheet-like work 14 from hanging down, bending or fluttering due to air resistance or the like during the movement. Thus, the sheet-like work 14 can be stably conveyed and moved. Further, since the sheet-shaped work 14 is sucked by the vacuum suction pad 15 provided at a position corresponding to the outer edge of the sheet-shaped work 14, only the vacuum suction pad 15 is in the contact position, and the other portions are not. The sheet-like work 14 can be appropriately conveyed in a contact state, the contact portion of the sheet-like work 14 is minimized, the quality deterioration in the conveyance of the sheet-like work 14 is minimized, and a sheet such as a plastic film for a liquid crystal panel is formed. The effective area of the workpiece 14 as a product can be widely used.

FIGS. 5 to 7 are views showing a second embodiment of the sheet-like workpiece suction / transfer hand according to the present invention. In this embodiment, the maximum size of the vacuum suction pad in the hand body direction is shown. A pressing plate protruding downward and extending to near the deformation position is provided on the lower surface of the arm portion.

The present embodiment is applied to a sheet-like work suction / transfer hand similar to the sheet-like work suction / transfer hand of the first embodiment. In the description, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 5 is a perspective view of a main part showing a schematic configuration of a sheet-like work suction / transfer hand 20 to which the second embodiment of the sheet-like work suction / transfer hand of the present invention is applied. 5, the sheet-like workpiece suction / transfer hand 2
Reference numeral 0 denotes a pair of arm portions 12 and 13 in which a hand main body 11 attached to a robot arm (not shown) extends in parallel, similarly to the sheet-like workpiece suction / transfer hand 10 of the first embodiment. A plurality of bellows-type vacuum suction pads 15 are provided on the lower surfaces of the arms 12 and 13 at predetermined intervals in the longitudinal direction of the arms 12 and 13.

As described above, the vacuum suction pad 15 can be elastically deformed by a predetermined deformation amount d, but due to the elastic deformation of the vacuum suction pad 15, the suction surface 1 of the vacuum suction pad 15 can be deformed.
A holding member 21 extending to a position near the maximum position where the arm 7 moves in the direction of the arm portions 12 and 13 is provided.
3 and the arm portions 12, 1
3 are arranged in a state where the base end portions are connected to each other and the front end portions are connected to each other. Accordingly, the vacuum suction pad 15 is in a state of protruding downward from the pressing member 21 by substantially the deformation amount d.

Next, the operation of the present embodiment will be described. The sheet-like work suction / transfer hand 20 drives the robot hand when the sheet-like work 14 is suctioned from the suction table 22 and transferred onto another suction table 22,
The arms 12 and 13 are moved on the sheet-like work 14. Then, the sheet-like work suction / transfer hand 20 is
The vacuum suction pad 15 is pressed against the sheet-like work 14 on the suction table 22, and the vacuum generator is driven to bring the sheet-like work 14 into close contact with the vacuum suction pad 15.

At this time, as shown in FIG. 6, the vacuum suction pad 15 moves in the direction of the arms 12 and 13, that is, in the direction of the pressing member 21 due to its elastic deformation, and the sheet-like work suction / transfer hand 20 is moved. In a state where the sheet-like work 14 is in close contact with the pressing member 21, the sheet-like work 14 is
To adsorb. Accordingly, the sheet-like work suction and transfer hand 20 sucks the sheet-like work 14 with the vacuum suction pad 15 in a state where the sheet-like work 14 is held down by the holding member 21, and when the sheet-like work 14 is curled or wavy. Also, the sheet-like work 14 can be appropriately sucked without causing wrinkles or breakage in the sheet-like work 14.

In this state, the sheet-like work suction / transfer hand 20 drives the robot arm to separate the vacuum suction pad 15 from the suction table 22 and move the vacuum suction pad 15 to the destination suction table 22. As described above, since the sheet-like work 14 is sucked by the vacuum suction pad 15 in a stretched state as described above, it is sucked by the vacuum suction pad 15 and supported by the pressing member 21 as shown in FIG. The sheet-like work 1 is moved while being moved.
4 can be prevented from sagging, bending or fluttering due to air resistance or the like, and the sheet-like work 14 can be stably transported and moved.

FIG. 8 is a view showing a third embodiment of a sheet-like work suction / transfer hand according to the present invention. In this embodiment, a vacuum pipe is connected from a main pipe to each vacuum suction pad. And a throttle valve provided in the branch pipe.

This embodiment is applied to a sheet-like work sucking / transferring hand similar to the sheet-like work sucking / transferring hand of the first embodiment. In the description, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 8 is a rear view of the arm portions 12 and 13 of the sheet-like work suction / transfer hand 30 to which the third embodiment of the sheet-like work suction / transfer hand according to the present invention is applied. 8, the sheet-like work suction / transfer hand 30 is the sheet-like work suction / transfer hand 30 of the first embodiment.
Similarly to the transfer hand 10, a hand body 11 (not shown) attached to a robot arm (not shown) includes a pair of arm portions 12 and 13 extending in parallel.
A plurality of bellows-type vacuum suction pads 15 (not shown) are arranged on the lower surface of the arm 13 at predetermined intervals in the longitudinal direction of the arms 12 and 13.

Each of the arms 12 and 13 is provided with a main pipe 31 of a vacuum pipe, and the main pipe 31 communicates with a vacuum generator (not shown). Each trunk 31 has a trunk 3
Branch pipes 32 are connected to each other and communicate with the suction holes 18 of the vacuum suction pad 15. A throttle valve 33 is disposed in each branch pipe 32. The throttle valve 33 reduces or shuts off the flow area of the branch pipe 32 to reduce or shut off the flow rate of air flowing through the branch pipe 32 provided with the throttle valve 33. Are operated manually or by remote operation by electric control or the like.

Next, the operation of the present embodiment will be described. When the sheet-like work suction / transfer hand 30 sucks the sheet-like work 14 from the suction table and transfers it to another suction table, the robot hand is driven to move the arm 12 onto the sheet-like work 14. , 13 are moved. Then, the sheet-like work suction / transfer hand 30 presses the vacuum suction pad 15 onto the sheet-like work 14 on the suction table, drives the vacuum generator, and drives the vacuum suction pad 1.
The sheet-like work 14 is brought into close contact with and sucked to the sheet work 5.

At this time, by adjusting the operation of the throttle valve 33 in accordance with the size of the sheet-like work 14, the branch pipe 32 communicating with the vacuum suction pad 15 which is not necessary for sucking the sheet-like work 14 of the size is adjusted. The flow rate of the flowing air is reduced or cut off, and the unnecessary inflow of air from the vacuum suction pad 15 into the main pipe 31 is suppressed, thereby preventing the vacuum capacity of the vacuum generator from being reduced. Therefore, it is possible to prevent the degree of vacuum applied to the vacuum suction pad 15 required for suctioning the sheet-like work 14 to be sucked / transferred from being reduced, and to appropriately and reliably suck the sheet-like work 14.

FIG. 9 is a view showing a fourth embodiment of a sheet-like work suction / transfer hand according to the present invention. In this embodiment, a vacuum pipe is branched from a main pipe and each pipe is branched from the main pipe. It is composed of a branch pipe that is connected to the vacuum suction pad and is thinner than the main pipe.

This embodiment is applied to a sheet-like work sucking / transferring hand similar to the sheet-like work sucking / transferring hand of the first embodiment. In the description, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

FIG. 9 is a rear view of the arm portions 12 and 13 of the sheet-like work suction / transfer hand 40 to which the fourth embodiment of the sheet-like work suction / transfer hand of the present invention is applied. In 9, the sheet-like work suction / transfer hand 40 is the sheet-like work suction / transfer hand of the first embodiment.
Similarly to the transfer hand 10, a hand body 11 (not shown) attached to a robot arm (not shown) includes a pair of arm portions 12 and 13 extending in parallel.
A plurality of bellows-type vacuum suction pads 15 (not shown) are arranged on the lower surface of the arm 13 at predetermined intervals in the longitudinal direction of the arms 12 and 13.

Each of the arms 12 and 13 is provided with a main pipe 41 of a vacuum pipe, and the main pipe 41 communicates with a vacuum generator (not shown). Each trunk 41 has a trunk 4
Branch pipes 42 are connected to each other and communicate with the suction holes 18 of the vacuum suction pad 15, and each branch pipe 42 is formed such that its flow passage area is smaller by a predetermined amount than the flow passage area of the main pipe 41.
Therefore, each vacuum suction pad 15 is connected to the main pipe 41 through the branch pipe 42, and is evacuated by the vacuum generator via the main pipe 41.

Next, the operation of the present embodiment will be described. When the sheet-like work suction / transfer hand 40 sucks the sheet-like work 14 from the suction table and transfers it to another suction table, the robot hand is driven to move the arm 12 onto the sheet-like work 14. , 13 are moved. Then, the sheet-like work suction / transfer hand 40 presses the vacuum suction pad 15 onto the sheet-like work 14 on the suction table, drives the vacuum generator, and drives the vacuum suction pad 1.
Then, the sheet-like work 14 is brought into close contact with the work 5 and is sucked.

At this time, the vacuum suction pad 15 located at a portion corresponding to the size of the sheet-like work 14 is brought into a vacuum state by being brought into close contact with the sheet-like work 14 to suck the sheet-like work 14. Vacuum suction pad 15 at a position deviating from the size of sheet-like work 14
Means that air is sucked into the vacuum generator through the branch pipe 42 and the main pipe 41.

However, since the branch pipe 42 is formed to have a predetermined flow area smaller than the main pipe 41 by a predetermined amount, the branch pipe 42 is connected to the vacuum suction pad 15 from the vacuum suction pad 15 which does not contribute to suction of the sheet-like work 14. The flow rate of air sucked into the vacuum generator through the branched branch pipe 42 can be suppressed to a small value, and a reduction in the vacuum capacity of the vacuum generator can be prevented with a simple configuration. Therefore, the vacuum suction pad 1 necessary for suction of the sheet work 14 to be suctioned and transferred is required.
5 can be prevented with a simple configuration, and the sheet-like work 14 can be appropriately and reliably sucked by the inexpensive and small-sized sheet-like work suction / transfer hand 40.

Although the invention made by the inventor has been specifically described based on the preferred embodiments, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the invention. It goes without saying that it is possible.

For example, in each of the above embodiments, the sheet-like works 14a to 14c are square, and the vacuum suction pads 15 are provided at positions where at least four corners of the square sheet-like works 14a to 14c are sucked. But
The vacuum suction pads 15 are not limited to those arranged at positions corresponding to the four corners of the sheet-like work. For example, when the sheet-like work is circular, at least three or more of the outer edges of the sheet-like work It is sufficient that the outermost edge portion is disposed at a position corresponding to a substantially equal position.

The number of vacuum suction pads 15 is
It can be set appropriately according to the size, shape, degree of flexibility and the like of the sheet-like work to be transferred.

[0070]

According to the sheet-like work suction / transfer hand of the first aspect of the present invention, the shape extends at least in the vicinity of the outer edge of the sheet-like work having predetermined flexibility to be sucked / transferred. At least three of the outer edges of the sheet-like work protruding downward by a predetermined amount on the lower surface of the hand body formed at
A vacuum suction pad is disposed at a position corresponding to a substantially equal position at the outermost edge portion or more and a vacuum is supplied to all of the vacuum suction pads, so that a flexible sheet-like work is sucked and moved. When doing, it is possible to prevent the sheet-like work from hanging down at the outer edge, turning up or fluttering due to air resistance during movement, and adsorbing and holding the outer edge of the sheet-like work. , A large area in the center can be used as the effective area of the product, and the adsorption and transfer of the sheet-like work can be performed stably and appropriately.
The suction and transfer can be performed while maintaining the quality of the sheet-like work in a good condition, and the effective area of the product of the sheet-like work can be widened to efficiently perform the suction and transfer.

According to the second aspect of the present invention, the hand main body is formed in a shape extending near the outer edge of the maximum size of the plurality of sheet-like works, and the vacuum suction is performed. Pads are arranged at least at three or more outermost edges of a plurality of outer edges of each size of the sheet-like work and at positions corresponding to substantially equal positions, and at least three or more outermost edges of each size. The vacuum suction pads arranged on the outer edge are connected to vacuum generating means by independent vacuum piping to selectively supply vacuum, so sheet-shaped workpieces with different sizes are hanging or moving at the outer edge. Suction and transfer can be performed while preventing roll-up or flapping due to the air resistance of the work, and suction and holding of the outer edge of sheet-shaped work of each size. As a result, a large area in the center can be used as the effective area of the product, and the suction and transfer of the sheet-like work can be performed stably and appropriately to improve the quality of the sheet-like work of each size. The suction and transfer can be performed while being held, and the effective area of the product of the sheet-like work can be widened to perform the suction and transfer efficiently.

According to the sheet-like work suction / transfer hand of the third aspect of the present invention, the vacuum suction pad is formed to be elastically deformable by a predetermined amount in the sheet-like work direction and the hand body direction. Even if there is a deviation in the parallelism between the pad and the surface of the sheet-like work or the height of the suction surface of the vacuum suction pad varies, the vacuum suction pad can properly and reliably suck the sheet-like work, and it is compact. In addition, the sheet-like work can be stuck and transferred stably.

According to the sheet-like workpiece suction / transfer hand according to the fourth aspect of the present invention, the predetermined hand projecting downwardly from the lower surface of the hand main body to the vicinity of the maximum deformation position of the vacuum suction pad toward the hand main body. Since the holding plate is arranged, even if the sheet-like work is curled or wavy, it can be sucked while the outer edge of the sheet-like work is suppressed by the holding plate, and the sheet-like work can be absorbed. Adsorption and transfer can be performed reliably and stably.

According to the sheet-like workpiece suction / transfer hand of the invention, the vacuum pipe is connected to the vacuum generating means and is connected to the main pipe extending in the direction of the vacuum suction pad. And a branch pipe that branches off from the branch pipe and connects the main pipe and the vacuum suction pad. In addition, since a throttle valve is provided for each branch pipe, various types of sheet-like workpieces having different sizes are suctioned.・ When transferring, unnecessary supply of vacuum to the vacuum suction pad can be suppressed or cut off by the throttle valve depending on the size of the sheet work, and the vacuum suction pad required for suction of the sheet work of that size Thus, it is possible to reliably and stably adsorb and transfer sheet-like works of various sizes by suppressing a decrease in the degree of vacuum caused by the vacuum generating means.

According to the sheet-like work sucking / transferring hand of the invention, the vacuum pipe is connected to the vacuum generating means and extends along the vacuum suction pad. And a branch pipe that branches off from the branch pipe and connects the main pipe and the vacuum suction pad, and the pipe inner diameter of each branch pipe is formed smaller than the main pipe by a predetermined amount.
When suctioning and transferring various types of sheet-like workpieces having different sizes, unnecessary supply of vacuum to the vacuum suction pad can be suppressed with a simple configuration depending on the size of the sheet-like workpiece. It is possible to reliably and stably adsorb and transfer sheet-shaped works of various sizes by suppressing a decrease in the degree of vacuum caused by a vacuum generating means on a vacuum suction pad necessary for suction of the workpiece.

[Brief description of the drawings]

FIG. 1 is a perspective view of a main part of a sheet-like work suction / transfer hand to which a first embodiment of a sheet-like work suction / transfer hand according to the present invention is applied.

FIG. 2 is an enlarged front sectional view of the vacuum suction pad of FIG. 1 in an extended state.

FIG. 3 is an enlarged front sectional view of the vacuum suction pad of FIG. 1 in a reduced state.

FIG. 4 is a rear view of an arm portion of the sheet-like workpiece suction / transfer hand of FIG. 1;

FIG. 5 is a perspective view of a main part of a sheet-like work suction / transfer hand to which a second embodiment of the sheet-like work suction / transfer hand according to the present invention is applied.

6 is a front partial cross-sectional view showing a state where the sheet-like work is pressed against a suction table by a vacuum suction pad of the sheet-like work suction / transfer hand of FIG. 5;

7 is a front partial sectional view of a state in which the sheet-like work is sucked by a vacuum suction pad of the sheet-like work suction / transfer hand of FIG. 5 and is separated from a suction table;

FIG. 8 is a rear view of an arm portion of the sheet-like work suction / transfer hand to which the third embodiment of the sheet-like work suction / transfer hand according to the present invention is applied.

FIG. 9 is a rear view of an arm portion of the sheet-like work suction / transfer hand to which the fourth embodiment of the sheet-like work suction / transfer hand according to the present invention is applied.

FIG. 10 is a perspective view of a conventional liquid crystal glass substrate transfer device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Sheet-shaped work suction / transfer hand 11 Hand main body 12, 13 Arm part 14, 14a, 14b, 14c Sheet-shaped work 15 Vacuum suction pad 16 Bellows part 17 Suction surface 18, 18a, 18b, 18c Suction hole 19a, 19b, 19c Vacuum piping 20 Sheet-like work suction / transfer hand 21 Holding member 22 Suction table 30 Sheet-like work suction / transfer hand 31 Main pipe 32 Branch pipe 33 Throttle valve 40 Sheet-like work suction / transfer hand 41 Main pipe 42 Branch tube

Claims (6)

[Claims] 1. A sheet-like work suction and transfer hand for vacuum-sucking a sheet-like work having a predetermined shape and moving the sheet-like work by a predetermined amount in a predetermined direction to transfer the work, and at least an outer edge portion of the sheet-like work. A hand body formed in a shape extending to the vicinity, and at least three or more outermost edges of the outer edges of the sheet-like work provided to project downward by a predetermined amount on the lower surface of the hand body, and A plurality of vacuum suction pads arranged at positions corresponding to the equal position, a vacuum pipe for supplying a vacuum to all of the vacuum suction pads, and a vacuum generator for supplying a vacuum to the vacuum suction pad via the vacuum pipe Means for adsorbing and transferring a sheet-like workpiece. 2. The hand body is formed in a shape extending near an outer edge of a maximum size of the sheet-like work of a plurality of sizes, and the vacuum suction pad is formed of a plurality of sheets of the sheet-like work of a plurality of sizes. The vacuum provided at at least three or more outermost edges of the outer edges and corresponding to substantially equal positions, and the vacuum provided at at least three or more outermost edges of each size. 2. The sheet-like workpiece suction / transfer hand according to claim 1, wherein the suction pad is connected to the vacuum generating means by the independent vacuum pipe to selectively supply a vacuum. 3. The sheet-like work suction according to claim 1, wherein the vacuum suction pad is formed so as to be elastically deformable by a predetermined amount in the direction of the sheet-like work and in the direction of the hand main body.・ Transfer hand. 4. The hand body is characterized in that a predetermined pressing plate protruding downward and extending to near a maximum deformation position of the vacuum suction pad in the direction of the hand body is provided on the lower surface. The sheet-like workpiece suction / transfer hand according to claim 3. 5. The vacuum pipe is connected to the vacuum generating means and extends in the direction of the vacuum suction pad, and the main pipe is branched from the branch pipe and is connected to the main pipe. 5. The suction and transfer of a sheet-like work according to claim 1, further comprising: a branch pipe for connecting the suction pad with the suction pad. 6. hand. 6. The vacuum pipe is connected to the vacuum generating means and is arranged to extend in the direction of the vacuum suction pad. The main pipe is branched from the branch pipe and the main pipe is connected to the vacuum pipe. 5. A branch pipe for connecting to a suction pad, wherein each of the branch pipes is formed to have a smaller pipe inner diameter by a predetermined amount than the main pipe. 6. The sheet-like work suction and transfer hand described in the table.