CN100447622C - Adhesive chuck device - Google Patents

Abstract

The invention aims to surely mount and remove a board by a pneumatic mechanism having a simple structure. On a board side of a holding board (1), a movable film (3) which can be deformed in a direction intersecting with a board side plane (1a) in an opening part (1b) provided on the board side plane (1a), and an adhesive member (4) for holding a board (A) by adhesion by facing the board are provided. By reciprocating the movable film (3) by a pressure difference between a primary side space (5) and a secondary side space (S) of the movable film (3), an adhesive surface (4a) of the adhesive member (4) is permitted to abut to the board (A) to hold the board by adhesion, the adhesive surface and the board are forcibly separated and the board (A) is smoothly peeled from the adhesive surface (4a) of the adhesive member (4).

Description

Adhesive chuck device

Technical field

The present invention relates to a kind of adhesive chuck device, be used to base-board conveying device that comprises the substrate assembling apparatus of baseplate-laminating machine or transport substrate etc., the aforesaid substrate make-up machine is in the manufacture process of the flat-panel monitor of for example LCD (LCD) or plasma display (PDP) etc., and bonding keeps and the glass substrate or the synthetic resin system substrate of applying CF glass, TFT glass etc.

At length relate to respect to holding plate and load and unload the adhesive chuck device that keeps substrate freely by bonding.

Background technology

In the past, in the baseplate-laminating machine that two substrates are overlapped, kept substrate by electrostatic chuck, yet, along with the maximization of substrate in recent years, being difficult to make large-sized electrostatic chuck, and promptly enabling to make, cost also can be very high.

So,, the adhesive chuck device that uses binding material in the maintenance of substrate is arranged in order to address these problems.

Example as such adhesive chuck device, open the bonding sheet that is located on a pair of cylinder freely for batching, after pasting the maintenance upper substrate, implement the applying of upper substrate and infrabasal plate, after this, utilize the driving of a plurality of motors to make the axle rotation and when batching bonding sheet, by to move horizontally this axle and a side's cylinder to this take-up direction with the synchronous speed of its coiling speed, above upper substrate, peel off bonding sheet (for example, with reference to patent documentation 1) at leisure.

And, replace batching of the above-mentioned bonding sheet that is undertaken by axle, after can and forming element at the applying two substrates, with the driving of a plurality of actuators, make tool table and cutter base rise to the lower end position of cutter sword by a plurality of actuators, move cutter by Width then to bonding sheet, cut-out is pasted with the bonding sheet of upper substrate, take out the element that is stained with bonding sheet in this, in due course, peel off bonding sheet from element.

As other example, offer a plurality of perforates on the increased pressure board up, actuator is set respectively in these perforates, front end stickup at the axle that stretches out downwards from each actuator is equipped with the bonding parts, action by above-mentioned actuator makes the bonding parts descend in perforate, bonding parts following when contacting with upper substrate, be maintained with the shape of fluid-tight engagement below increased pressure board by its cohesive action, and behind the baseplate-laminating when upper substrate is peeled off binding material, if in perforate, make the words of bonding parts rising by actuator, then the circumference of perforate stops moving of upper substrate, and upper substrate is drawn back (for example, with reference to patent documentation 2) from the bonding parts.

In addition, increased pressure board up is provided with a plurality of openings, in these openings, possess actuator that rotates usefulness and the actuator that drives usefulness up and down respectively, front end at the turning axle that stretches out downwards from each actuator that rotates usefulness is equipped with the bonding parts, by the action that drives up and down with actuator the parts that respectively bond are descended, and by adsorbing and keep upper substrate with attractions of these bonding parts, position, fit simultaneously, when the bonding parts are retreated in increased pressure board, when reversing the bonding parts by the actuator that rotates usefulness with respect to real estate, or after reversing, it is retreated by the actuator that drives usefulness up and down, the parts that will bond are peeled off (for example, with reference to patent documentation 3) from upper substrate.

[patent documentation 1]: the spy opens 2001-133745 communique (3-5 page or leaf, Fig. 1-Fig. 7)

[patent documentation 2]: the spy opens 2003-241160 communique (the 5th page, Fig. 7)

[patent documentation 3]: the spy opens 2003-273508 communique (the 5th page, Fig. 1-5)

Yet, in such adhesive chuck device in the past, under the situation of patent documentation 1, there are the following problems, promptly, in order to peel off bonding parts and substrate, must be when bonding sheet be batched, by it is moved horizontally to identical take-up direction, tool table and cutter base are risen cut off bonding sheet by cutter with the synchronous speed of coiling speed, each action needs the drive source of a plurality of motors or actuator etc., causes structure complicated.

And, under the situation of patent documentation 2, for the bonding parts are risen, all need a plurality of actuators respectively at each bonding parts, and under the situation of patent documentation 3, each bonding parts all needs to be used to make the actuator of the rotation usefulness that the bonding parts retreat while rotate respectively and drives the actuator of usefulness up and down, so causes structure complicated.

Therefore, patent documentation 1～3, particularly because the lift-off structure complexity, therefore the incidence height of fault not only, and there are the following problems, that is, especially, be difficult to the substrate holding mechanism of original electrostatic chuck etc. is replaced as adhesive chuck device of the present invention being disposed under the situations such as the substrate assembling apparatus that comprises the baseplate-laminating machine or base board delivery device.

And there are the following problems, promptly, when above-mentioned actuator is the electromagnetic motor of for example motor etc., heating easily, such as the substrate of glass to the thermal distortion sensitivity, only change 1 ℃ and also can shrink about about 4 μ mm, this influence that brings because of heating is difficult to substrate contraposition correctly each other.

And there are the following problems, promptly, the environmental gas that is pressed onto the specified vacuum degree from atmosphere, bond maintenance, simultaneously this bonding is peeled off and when open, from change of atmospheric pressure to the specified vacuum degree, but if the electromagnetic actuators of use as motor, then a certain moment in a vacuum probably can cause plasma discharge, and this can cause the destruction of glass plate.

And there are the following problems, that is, even above-mentioned actuator is the drive source as cylinder etc. and since itself be can expanding-contracting action hermetically-sealed construction, therefore be difficult to miniaturization, become maximization and cause the raising of manufacturing cost so device is whole.

Yet, distorted deformation takes place in especially large-scale substrate easily, for positively boning, the substrate with easy deformation like this keeps and open peeling off, need make contact of bonding parts or separation in order to powerful power for substrate, and be to obtain powerful power like this actuator is maximized, thereby cause weight to become heavy.

Summary of the invention

Technical scheme 1 described invention of the present invention, its purpose be, positively loads and unloads substrate with the pneumatic mechanism of simple structure.

Technical scheme 2 described inventions, its purpose is, adds the purpose of technical scheme 1 described invention, obtains pneumatic mechanism by simple structure and substrate is positively bondd peels off needed power.

Technical scheme 3 described inventions, its purpose are, add technical scheme 1 or 2 described goals of the invention, and realization attracts with piping system or attracts control and positively keep substrate easily.

Technical scheme 4 described inventions, its purpose are, add technical scheme 2 or 3 described goals of the invention, make the to-and-fro movement of rigid section stable, and seek to improve adhesive property and stripping performance with substrate.

Technical scheme 5 described inventions, its purpose are, add technical scheme 4 described goals of the invention, change irrespectively bonding with the pressure in secondary side space and keep and peel off open substrate.

Technical scheme 6 described inventions, its purpose are, add technical scheme 1,2,3,4 or 5 described goals of the invention, and the movable film itself that need not maximize can be guaranteed the stroke of peeling off in order positively to bond.

Technical scheme 7 described inventions, its purpose are, add technical scheme 1,2,3,4,5 or 6 described goals of the invention, control the pressure of pneumatic mechanism easily.

In order to reach above-mentioned purpose, in technical scheme 1 described invention of the present invention, it is characterized in that, substrate-side at holding plate is provided with: can be to the movable film of the direction distortion that intersects with this substrate side surfaces and the bonding parts that bond opposite to each other and keep with substrate in the peristome that this substrate side surfaces is offered, this movable film to-and-fro movement of pressure official post in primary side space and secondary side space by above-mentioned movable film, make bonding bonding surface of parts and substrate butt and bond, simultaneously, the two pressure is drawn back and peeled off.

Technical scheme 2 described inventions, it is characterized in that, on the formation of technical scheme 1 described invention, add following formation, promptly, a part and substrate at above-mentioned movable film are provided with rigid section opposite to each other, the front end face that the to-and-fro movement by this movable film makes this rigid section from the peristome of holding plate come in and go out and with the substrate butt.

Technical scheme 3 described inventions is characterized in that, add following formation on the formation of technical scheme 1 or 2 described inventions,, offer the airway that connects along the vibration-direction of above-mentioned movable film opposite to each other with substrate that is, attract the absorption substrate from this airway.

Technical scheme 4 described inventions, it is characterized in that, on the formation of technical scheme 2 or 3 described inventions, add following formation, promptly, cylinder portion in above-mentioned movable film setting and being integral of rigid section, in the peristome that substrate side surfaces is offered, be provided with and this cylinder portion next door in opposite directions, insert logical freely and axle bearing support cylinder portion with respect to this next door to-and-fro movement.

Technical scheme 5 described inventions, it is characterized in that, on the formation of technical scheme 4 described inventions, add following formation, promptly, two movable films disconnected from each other are set in above-mentioned peristome, insert the logical cylinder portion of installing at these movable films, between two movable films, divide respectively and form first pneumatic chamber and second pneumatic chamber, be out of shape two movable films simultaneously and it is moved back and forth by the pressure differential of this first pneumatic chamber and second pneumatic chamber.

According to technical scheme 6 described inventions, it is characterized in that add following formation on the formation of technical scheme 1,2,3,4 or 5 described inventions, that is, above-mentioned movable film is by constituting to the bellows of the direction distortion that intersects with the substrate side surfaces of holding plate.

Technical scheme 7 described inventions, it is characterized in that, on the formation of technical scheme 1,2,3,4,5 or 6 described inventions, add following formation, promptly, be provided with and the related force application part of above-mentioned movable film, with this force application part to this movable film to its reciprocating either direction application of force.

Technical scheme 1 described invention among the present invention, substrate-side at holding plate is provided with: can be to the movable film of the direction distortion that intersects with this substrate side surfaces and the bonding parts that bond opposite to each other and keep with substrate in the peristome that this substrate side surfaces is offered, move back and forth by the primary side space of above-mentioned movable film and this movable film of pressure official post in secondary side space, behind bonding bonding surface of parts and the substrate butt and bonding when keeping, the two pressure is drawn back, easily substrate is peeled off from the bonding surface of bonding parts.

Therefore, can positively load and unload substrate by the pneumatic mechanism of simple structure.

Its result, with need the conventional art of the drive source of a plurality of motors or actuator etc. to compare with substrate in order to peel off the bonding parts, because lift-off structure is simple especially, rate of breakdown is significantly reduced, particularly under the situation that is disposed at the substrate assembling apparatus that comprises the baseplate-laminating machine or base board delivery device etc., can be easily with the substrate holding mechanism and the adhesive chuck device of the present invention displacement of original electrostatic chuck etc., sought the low significantly of manufacturing cost and simplified.

And, owing to do not keep substrate by Electrostatic Absorption, so also have the advantage that can spontaneously not produce static.

And, not only can avoid because the influence that heating caused of electromagnetic actuators or the danger of discharge, and can be safely and correctly carry out substrate contraposition to each other, simultaneously, and can realize miniaturization and lightweight, can seek the miniaturization of device integral body thus and realize that the low of manufacturing cost simplifies.

And, the environmental gas that reaches the specified vacuum degree from atmospheric pressure, bond keep in, this bonding is peeled off and when open, by drive source is made as pneumatic type, can seek and the coexistence of structure that is pressed onto the confined space of specified vacuum degree from atmosphere, compare with the technology in the past that as electromagnetic actuators, needs distribution to be connected to power supply, can reduce the parts that connect vacuum sealing space and prevent vacuum leak etc.

The invention of technical scheme 2, add the effect of the invention of technical scheme 1, a part and substrate at above-mentioned movable film are provided with rigid section opposite to each other, the front end face that to-and-fro movement by this movable film makes this rigid section from the peristome of holding plate come in and go out and with the substrate butt, thereby the to-and-fro movement of movable film is passed on the substrate via rigid section indeformablely.

Therefore, can obtain pneumatic mechanism by simple structure positively bonds substrate and peels off needed power.

Technical scheme 3 described inventions, add the effect of the invention of technical scheme 1 or 2, offer the airway that connects along the vibration-direction of movable film opposite to each other with substrate, by attracting the absorption substrate from this airway, thus the maintenance that can utilize the bonding of implementing by the bonding parts to keep simultaneously and implement by vacuum suction.

Thereby, can realize easily attracting with piping system or attraction control, and can positively keep substrate.

And, by the vacuum pressure in when absorption control, can adjust power simply with the cohesive force of substrate.

Technical scheme 4 described inventions, add the effect of the invention of technical scheme 2 or 3, in movable film setting and the incorporate cylinder of rigid section portion, in the peristome that substrate side surfaces is offered, be provided with and this cylinder portion next door in opposite directions, by inserting logical freely with respect to this next door to-and-fro movement and axle bearing support cylinder portion, thereby along with the distortion of movable film, rigid section moves back and forth along rectilinear direction via cylinder portion.

Therefore, can make the to-and-fro movement of rigid section stable, seek raising with the adhesive property and the stripping performance of substrate.

The invention of technical scheme 5, add the effect of the invention of technical scheme 4, two movable films disconnected from each other are set in peristome, insert the logical cylinder portion of installing at these movable films, between two movable films, divide respectively and form first pneumatic chamber and second pneumatic chamber, be out of shape two movable films simultaneously and make its to-and-fro movement by the pressure differential of this first pneumatic chamber and second pneumatic chamber, thereby can and make this bonding peel off and open the substrate bonding maintenance.

Therefore, can irrespectively substrate bonding be kept and peel off opening with the pressure variation in secondary side space.

Technical scheme 6 described inventions, add the effect of the invention of technical scheme 1,2,3,4 or 5, by with movable film by can constituting to the bellows of the direction distortion that intersects with the substrate side surfaces of holding plate, thereby can with the radius size to-and-fro movement of long stroke irrespectively of movable film integral body.

Thereby the movable film itself that need not maximize also can be guaranteed the stroke that bonds and peel off for positively.

Its result, the occasion that is necessary to be equipped with a plurality of adhesive chuck devices keeping large substrate in order to bond is more effective.

Technical scheme 7 described inventions, add the effect of the invention of technical scheme 1,2,3,4,5 or 6, be provided with and the movable related force application part of film, by this force application part to this movable film to its reciprocating either direction application of force, if move the words of movable film to the direction of opposing force application part acting force by the pressure differential in primary side space and secondary side space, when then the pressure differential in primary side space and secondary side space disappears, movable film is replied forcibly.

Thereby, can control the pressure of pneumatic mechanism easily.

And, as baseplate-laminating machine etc., make roughing pump and high vacuum pump interlock and reach under the situation of specified vacuum degree, if irrespectively keep the words of the bonding hold mode of substrate by the acting force of force application part with the pressure differential in primary side space and secondary side space, then above-mentioned high vacuum pump can be transformed into the action of peeling off of substrate after blocking on the pipe arrangement, thus, even taking place, air sews the breakage that also can prevent high vacuum pump.

Description of drawings

Fig. 1 is the local vertical profile front elevation of embodiment 1 of expression adhesive chuck device of the present invention, and the operation step when being disposed at the baseplate-laminating machine by (a)～(c) expression.

Fig. 2 (a)～(b) is the local amplification view of modified example of the bearing method of the movable film of expression, (c) is the local amplification view of the modified example of the movable film of expression.

Fig. 3 is the local vertical profile front elevation of embodiment 2 of expression adhesive chuck device of the present invention, and the operation step when being disposed at the baseplate-laminating machine by (a)～(d) expression.

Fig. 4 is the local vertical profile front elevation of embodiment 3 of expression adhesive chuck device of the present invention, and the operation step when being disposed at the baseplate-laminating machine by (a)～(c) expression.

Fig. 5 is the local amplification view of the modified example of expression bonding parts.

Fig. 6 is the local amplification view of the modified example of expression bonding parts.

Fig. 7 is the local vertical profile front elevation of embodiment 4 of expression adhesive chuck device of the present invention, and the operation step when being disposed at the baseplate-laminating machine by (a)～(c) expression.

Fig. 8 is that the vertical profile front elevation is amplified in the part of the embodiment 5 of expression adhesive chuck device of the present invention.

Fig. 9 is that the vertical profile front elevation is amplified in the part of the embodiment 5 of expression adhesive chuck device of the present invention.

Figure 10 is the local vertical profile front elevation of embodiment 6 of expression adhesive chuck device of the present invention, and the operation step when being disposed at the baseplate-laminating machine by (a)～(c) expression.

Figure 11 is the local vertical profile front elevation of embodiment 7 of expression adhesive chuck device of the present invention, and the operation step when being disposed at the baseplate-laminating machine by (a)～(c) expression.

Description of reference numerals

A substrate (upper substrate)

The A1 surface

B substrate (infrabasal plate)

The B1 surface

The agent of C cyclic adhesion

S secondary side space (confined space)

Holding plate on 1 (upper flat plate)

1a keeps face

The 1b peristome

The 1c hold assembly

The 1d cylinder

The 1e passage

1f spring carrier

2 times holding plates (dull and stereotyped down)

2a keeps face

3 movable films

The 3a rigid section

The 3b auxiliary section

The movable film of 3c, 3d

3e wrinkle portion

The 3f confined chamber

4 bonding parts

The 4a bonding surface

4b is the back side fixedly

5 primary side spaces (pneumatic chamber)

5a first pneumatic chamber

5b second pneumatic chamber

6 vacuum suction mechanisms

The 6a airway

The 6b air supply source

7 cylinder portions

The 7a first passage

The 7b second channel

The 7c detent

7d spring carrier

8 next doors

9 force application parts

Embodiment

Show the situation that adhesive chuck device of the present invention is configured in the baseplate-laminating machine of the glass substrate that is used for bonding maintenance and applying LCD (LCD) panel etc.

This baseplate-laminating machine such as Fig. 1～shown in Figure 10, at the holding plate 1 that disposes up and down, 2 in opposite directions maintenance face 1a abreast, keep two glass substrate A on the 2a respectively, B, after in the confined space S that division forms around them, reaching specified vacuum degree (about 0.5Pa), to holding plate 1 up and down, 2 relatively adjust to XY θ direction (horizontal direction in the drawing) and to move, carry out substrate A, B contraposition each other, then, upper substrate A is peeled off forcibly and moment is crimped onto on ring-type cementing agent (encapsulant) C on the infrabasal plate B from the maintenance face 1a of last holding plate 1, thus, to seal between the two and overlap, thereafter, by at two substrates A, the air pressure official post two substrates A of the inside and outside generation of B, be pressurized to predetermined gap between the B.

Explanation in further detail, holding plate 1,2 can relatively be supported to Z direction (above-below direction in the drawing) movably by elevating mechanism (not shown) up and down, in atmospheric environmental gas, make these up and down under holding plate 1,2 state that direction is left up and down, with respect to last substrate A, the B that sends with mechanical arm (not shown) by substrate transferring that be provided with of separately maintenance face 1a, 2a, thereafter, make by the action of above-mentioned elevating mechanism that holding plate 1,2 is approaching up and down, form confined space S thereby divide.

And, action by extraction sector (not shown), from this confined space S extracting air and when reaching specified vacuum and spending, effect by horizontal mobile mechanism (not shown), the either party of holding plate 1,2 is up and down moved towards the adjustment of XY θ direction with respect to the opposing party, remain on substrate A, B contraposition (alignment) each other on the holding plate in turn with this, that is, and thick contraposition and smart contraposition.

So finish contraposition, after upper and lower base plate A, B are overlapped, air or nitrogen are provided in confined space S, by making the gas in this confined space S be back to atmospheric pressure, the draught head that is used in the inside and outside generation of two substrates A, B pressurizes equably, finishes product thereby be squeezed to predetermined gap under the state of enclosing liquid crystal.

And the substrate-side at above-mentioned holding plate 1,2 possesses adhesive chuck device of the present invention.

Explain, as Fig. 1, Fig. 3, Fig. 4, Fig. 7 and shown in Figure 10, at holding plate 1 up and down, 2 maintenance face 1a as substrate-side, the either party of 2a or two sides, roughly equally spaced offer a plurality of peristome 1b, in these peristomes 1b to keeping face 1a with this, the Z direction that 2a intersects is out of shape respectively movable film 3 is set freely, on the substrate-side surface of the substrate-side opening edge of above-mentioned peristome 1b or movable film 3, fix and upper and lower base plate A, the surfaces A 1 of B, the bonding parts 4 that B1 bonds opposite to each other and keeps, by across these movable film 3 formed primary side spaces 5 with as the pressure differential of the confined space S in secondary side space, make this movable film 3 to-and-fro movements, thereby make the bonding surface and the substrate A of bonding parts 4, the side of B or two side's butts and bond, simultaneously, by the two is separated forcibly, peel off substrate A easily from the bonding surface of bonding parts 4, the side of B or two sides.

Below, various embodiments of the present invention are described with reference to the accompanying drawings.

Embodiment 1

This embodiment 1 shows following situation like that shown in Fig. 1 (a)～(c), promptly, only offer a plurality of peristome 1b at the maintenance face 1a of last holding plate 1, support the outer peripheral portion of movable film 3, in the part of this movable film 3 and the surfaces A 1 of substrate A rigid section 3a is set opposite to each other, simultaneously, along the fixing bonding parts 4 of ring-type of the opening edge of each the peristome 1b that more is positioned at secondary side than this movable film 3, move upward at above-mentioned rigid section 3a and enter under the state in the peristome 1b, these bonding parts 4 and upper substrate A butt and bonding are kept, by making movable film 3 towards the outstanding distortion of secondary side space (confined space) S downwards, the substrate A on the bonding surface 4a that remains on bonding parts 4 that bonds is peeled off forcibly in addition.

And because spatial relationship, peristome 1b and movable film 3 only are provided with two in the end mode in opposite directions with upper substrate A in illustrated example, still, can dispose the quantity that can hang corresponding to the size of upper substrate A.

Above-mentioned movable film 3, be to be the elastic membrane that laminal dividing plate constitutes by the film of the metal elastically deformable of for example stainless steel etc. or with the forming synthetic resin of rubber or engineering plastics etc., shown in Fig. 2 (a), using the hold assembly 1c of the peristome 1b that is provided in holding plate 1 to bend with wedge shape its outer peripheral portion sandwiches, perhaps shown in Fig. 2 (b), clamp integrally formed auxiliary section 3b and make it to fix with coming off.

And, clamp this movable film 3, utilize and divide the pressure differential that is formed at primary side (behind) pneumatic chamber 5 and divides the confined space S that is formed on secondary side, make its elastic deformation and to-and-fro movement to the Z direction.

And, shown in Fig. 2 (c), above-mentioned movable film 3, be configured as the shape of direction adjustment deflection up and down with changing its gauge, thereby adjust the deflection of this movable film 3 that the pressure differential because of the primary side space (pneumatic chamber) 5 of above-mentioned movable film 3 and secondary side space (confined space) S causes, also the front end face integral body of parallel mobile its core of direction and rigid section 3a described later disposed thereon up and down.

Above-mentioned rigid section 3a is the rigid body that can not be out of shape, and from establishing towards secondary side space (confined space) S is prominent integratedly with surfaces A 1 core in opposite directions of the substrate A of above-mentioned movable film 3, the surfaces A 1 that makes its front end face and upper substrate A abreast in opposite directions.

Example like that is preferably formed as to external diameter trapezoidally towards the section that upper substrate A becomes big footpath gradually as shown, makes not hinder movable film 3 direction elastic deformation up and down, its front end face is expanded open near the opening edge of each peristome 1b.

For above-mentioned bonding parts 4, wish that it is the bonding sheet that is made of for example binding materials such as silicon system or acrylic acid series, in having the scope that to hang the cohesive force of holding upper substrate A, set for the area of its bonding surface 4a as far as possible little, simultaneously, the surface of the rigid section 3a of this bonding surface 4a and above-mentioned movable film 3 being made as far as possible closely is configured.

And, as shown example like that, it is fixing that the fixedly back side 4b of opposition side is directly bondd with respect to the opening edge of each peristome 1b, perhaps is bonded and fixed at respect on each peristome 1b loading and unloading fixed part (not shown) freely.

The cohesive force of the fixedly back side 4b of this opposition side is stronger than the cohesive force of the bonding surface 4a side that contacts with above-mentioned glass substrate A, when upper substrate A bonding is kept, can not peel off, decline and can easily change but need set for according to subtracting of the cohesive force of bonding surface 4a because of its weight.

In this, as described above, if on freely fixed part of loading and unloading fixedly back side 4b and the fixing parts 4 that bond of bonding, then the subtracting of cohesive force according to bonding surface 4a declines, and can change simply by fixed part unit.

And, though it is not shown, but also can be on above-mentioned in whole scope, wear a plurality of attractions hole on the maintenance face 1a of holding plate 1, attract holes to carry out vacuum attraction constantly with regulation from these, in addition in the other moment to surfaces A 1 ejection of upper substrate A for example with the gas of nitrogen etc.

Below, the action with adhesive chuck device describes for these vacuum abutted machines.

At first, shown in the solid line of Fig. 1 (a), under holding plate 1,2 A-stage that direction is separated up and down up and down, on the maintenance face 1a of last holding plate 1 upper substrate A is set, at this moment, the rigid section 3a that moves up makes its standby in the peristome 1b of holding plate 1.

Under the situation of illustrated example, attract and make its inner pressure ratio secondary side space (confined space) S low from primary side space (pneumatic chamber) 5, movable film 3 is out of shape upward towards primary side space (pneumatic chamber) 5, thus, the front end face of rigid section 3a is the concavity standby with respect to the bonding surface 4a that keeps face 1a and bonding parts 4.

And, though it is not shown, but can be by being set at the interior pressure of primary side space (pneumatic chamber) 5 and the pressure of secondary side space (confined space) S equal, do not make movable film 3 shifting grounds that it is held in the flat condition of approximate horizontal, thereby the front end face of rigid section 3a with the roughly the same height and position of the bonding surface 4a that keeps face 1a and bonding parts 4 on carry out standby, perhaps carry out standby on the position above leaning on a little than it.

Under this holding state, by substrate transferring mechanical arm (not shown) conveyance upper substrate A, the maintenance face 1a that its surfaces A 1 is made progress holding plate 1 moves, if with the pressure of regulation its bonding surface 4a with bonding parts 4 is contacted, then the cohesive force by this bonding surface 4a keeps.

At this moment, inhale if carry out vacuum from the attraction hole (not shown) that the maintenance face 1a at last holding plate 1 wears, then the surfaces A 1 of upper substrate A contacts more strongly and bonds and remains on the bonding surface 4a of bonding parts 4, simultaneously, upper substrate A is adsorbed maintenance, and is difficult to come off.

After this, shown in the double dot dash line of Fig. 1 (a), in that up and down holding plate 1,2 is approaching, after reaching the specified vacuum degree in the S of secondary side space (confined space), the either party of holding plate 1,2 is up and down moved towards the direction adjustment of XY θ with respect to the opposing party, keep substrate A, B contraposition each other thereon.

After finishing between substrate A as described above, the B contraposition each other and overlapping, such shown in Fig. 1 (b), the gas of pressurized air etc. is provided to primary side space (pneumatic chamber) 5, set to such an extent that be higher than secondary side space (confined space) S with pressing in it, simultaneously, make holding plate 1 rising or make down holding plate 2 relatively separate both with descending, movable film 3 is out of shape downwards towards secondary side space (confined space) S, the front end face of rigid section 3a with surfaces A 1 state of contact of upper substrate A under peel off from the bonding surface 4a of bonding parts 4.

In addition, at this moment,, therefore, at this time also can less to the quantity delivered of primary side space (pneumatic chamber) 5 gas supplied because secondary side space (confined space) S reaches the specified vacuum degree.

Thus, with bonding remain on the bonding parts 4 bonding surface 4a on upper substrate A draw back forcibly, upper substrate A is peeled off from the bonding surface 4a of bonding parts 4 easily, simultaneously, by the outstanding pressure of these movable films 3 and rigid section 3a the cyclic adhesion agent C that this upper substrate A is pressed on the infrabasal plate B is gone up and makes its coincidence.

At this moment, if spray the words of the gas of nitrogen for example etc. to the surfaces A 1 of upper substrate A from attraction hole that the maintenance face 1a at last holding plate 1 wears, then upper substrate A is forced to peel off and cyclic adhesion agent C on infrabasal plate B goes up the moment crimping from the bonding surface 4a of these bonding parts 4, will seal between the two.

After this, shown in Fig. 1 (c), by attract to make its inner pressure ratio secondary side space (confined space) S low from primary side space (pneumatic chamber) 5, movable film 3 is out of shape upward towards primary side space (pneumatic chamber) 5, and the front end face of rigid section 3a is returned to A-stage with respect to keeping face 1a depression.

Thereby the embodiment 1 shown in Fig. 1～2 as the simple structure of not using electromagnetic drive source, also can obtain to keep and peel off power required when open in that upper substrate A is positively bondd simultaneously.

And, if be controlled at the gas delivery volume that the primary side of above-mentioned movable film 3 forms to pneumatic chamber 5, adjust the elastic deformation amount's of this movable film 3 words, then can adjust the surfaces A 1 of upper substrate A and the contact pressure (press pressure) of bonding parts 4, can adjust simply and the bonding of upper substrate A and/or the power of peeling off.

At this moment, because the cohesive force and both contacts area that produce between upper substrate A and bonding parts 4 are proportional, therefore if make increase and decrease, make the bonding surface 4a elastic deformation of bonding parts 4 make the structure of contact area increase and decrease, then will adjust the power of cohesive force more clearly with respect to the surfaces A 1 of upper substrate A according to above-mentioned press pressure.

Embodiment 2

This embodiment 2 is shown in Fig. 3 (a)～(d), be provided with the airway 6a that connects by vibration-direction along above-mentioned movable film 3, with carry out vacuum attraction from this airway 6a and supply with the vacuum suction mechanism 6 that the air supply source 6b of gas such as nitrogen for example constitutes, when installing substrate A, carry out vacuum attraction and adsorb maintenance upper substrate A from the airway 6a of this vacuum suction mechanism 6, and then as required from bonding parts 4 when peeling off, spray for example gas such as nitrogen from this airway 6a to the surfaces A 1 of upper substrate A, the embodiment 1 of this structure and above-mentioned Fig. 1～shown in Figure 2 is different, and structure in addition is identical with embodiment 1.

In illustrated example, be equipped with airway 6a, so that connect above-mentioned movable film 3 and be arranged at rigid section 3a on its part at above-below direction, though it is not shown, but what can replace is, also the perforation position of this airway 6a can be worn towards bonding parts 4, these bonding parts 4 are fixed on perforation along the vertical direction and upward are opened on its opening edge that keeps the peristome 1b on face 1a on holding plate 1 ground.

Promptly, shown in Fig. 3 (a), when on the maintenance face 1a of last holding plate 1, upper substrate A being set, gases such as pressurized air are provided to primary side space (pneumatic chamber) 5 and movable film 3 is out of shape downwards, rigid section 3a moves downwards thus, make its front end face be convex standby highlightedly a little with respect to the bonding surface 4a of bonding parts 4, under this state, the upper substrate A that will come with the mechanical arm conveyance with substrate transferring is received by the vacuum attraction from the airway 6a of above-mentioned vacuum suction mechanism 6 and adsorbs maintenance.

After this, shown in Fig. 3 (b), attract to make its interior pressure roughly the same from primary side space (pneumatic chamber) 5 with the pressure of secondary side space (confined space) S, and movable film 3 is set as approximate horizontal, the front end face of rigid section 3a moves up towards the height and position identical with the bonding surface 4a that keeps face 1a and bonding parts 4 thus, upper substrate A is directed to bonding parts 4, under this state, with the surfaces A 1 of upper substrate A with the authorised pressure contact on the bonding surface 4a of bonding parts 4, keep according to the cohesive force of this bonding surface 4a.

And, shown in Fig. 3 (c), after finishing upper and lower base plate A, B coincidence each other, provide gas such as pressurized air to make to primary side space (pneumatic chamber) 5 and press in it and be higher than secondary side space (confined space) S, holding plate 1 is risen or make down holding plate 2 declines and relatively separate both, like this, movable film 3 is out of shape downwards towards secondary side space (confined space) S, the front end face of rigid section 3a under the state of the surfaces A 1 that is contacted with upper substrate A, from the bonding parts 4 bonding surface 4a peel off.

And, meanwhile, if spray the gas of nitrogen for example etc. to the surfaces A 1 of upper substrate A from the airway 6a of above-mentioned vacuum suction mechanism 6, then the upper substrate A that remains on the bonding surface 4a of bonding parts 4 of bonding is separated forcibly, thereby can be easily upper substrate A be peeled off from the bonding surface 4a of bonding parts 4.

After this, shown in Fig. 3 (d), force down in it in secondary side space (confined space) S by attracting to make from primary side space (pneumatic chamber) 5, movable film 3 is out of shape upward towards primary side space (pneumatic chamber) 5, and the front end face of rigid section 3a returns back to A-stage with respect to keeping face 1a depression.

Therefore, the embodiment 2 shown in Fig. 3 (a)～(d) can obtain with at the same action effect of the embodiment 1 of above-mentioned Fig. 1～shown in Figure 2, and have the following advantages, promptly, the bonding of auxiliary upper substrate A and peeling off, simultaneously, use the mechanism different to adjust power with the cohesive force of upper substrate A simply with embodiment 1.

At this moment, the cohesive force and both contacts area that produce between upper substrate A and bonding parts 4 are proportional, therefore, if become increase and decrease, make the bonding surface 4a elastic deformation of bonding parts 4 make the structure of contact area increase and decrease, then can adjust the power of cohesive force more clearly with respect to the surfaces A 1 of upper substrate A according to above-mentioned vacuum adsorption force.

Embodiment 3

This embodiment 3 is shown in Fig. 4 (a)～(c), the opening edge that is arranged on peristome 1b is not put in the solid contraposition of above-mentioned bonding parts 4, but change be arranged on the front end face of the outstanding rigid section 3a that is arranged at movable film 3 cores, simultaneously, by the primary side space (pneumatic chamber) 5 of movable film 3 and the pressure differential of secondary side space (confined space) S, the bonding surface 4a of these bonding parts 4 with keep face 1a with under the same state planar or that (about 100 μ m) convex is outstanding a little roughly, make the maintenance that bonds of upper substrate A butt at the bonding surface 4a of these bonding parts 4, by being out of shape upward towards primary side space (pneumatic chamber) 5, movable film 3 enters in the peristome 1b in addition with being concavity, thereby the bonding surface 4a of the parts 4 that will bond peels off forcibly from upper substrate A, this structure is different from above-mentioned Fig. 1～embodiment 1 shown in Figure 2 and embodiment 2 shown in Figure 3, and structure in addition is identical with embodiment 1 and embodiment 2.

Promptly, shown in Fig. 4 (a), when on the maintenance face 1a of last holding plate 1, upper substrate A being set, interior pressure by making primary side space (pneumatic chamber) 5 and the pressure of secondary side space (confined space) S equate, make movable film 3 be held in the flat condition of approximate horizontal indeformablely, thus, the bonding surface 4a that is fixed in the bonding parts 4 on the front end face of rigid section 3a is roughly same planar or outstanding a little with keeping face 1a, by with authorised pressure contact on the surfaces A 1 of upper substrate A, thereby keep by the cohesive force of this bonding surface 4a.

And, shown in Fig. 4 (b), finish after upper and lower base plate A, the B coincidence each other, by attracting to make to force down in it in secondary side space (confined space) S from primary side space (pneumatic chamber) 5, movable film 3 is out of shape upward towards primary side space (pneumatic chamber) 5, thereby the front end face of rigid section 3a is with respect to keeping face 1a depression, the front end face of rigid section 3a together is stripped from from the surfaces A 1 of upper substrate A with bonding parts 4, can be easily the bonding surface 4a of bonding parts 4 be stripped down from upper substrate A.

Thereafter, shown in Fig. 4 (c), holding plate 1 is risen or make down holding plate 2 descend relative separation after both, by the gas of pressurized air etc. is provided to primary side space (pneumatic chamber) 5, movable film 3 is out of shape downwards, and the front end face of rigid section 3a is with to keep face 1a to become roughly same planar or outstanding a little and return back to A-stage thus.

Represent in the example shown in Fig. 4 (a)～(c),, bonding parts 4 are formed the shape of the front end face integral body that can cover rigid section 3a in order to obtain the most suitable cohesive force to upper substrate A.

As the example beyond it, also can be as shown in Figure 5, the shape of bonding parts 4 is formed the ring-type of the periphery of the front end face that partly covers rigid section 3a, in addition as shown in Figure 6, the shape of bonding parts 4 is formed fixing back side 4b and cover the front end face integral body of rigid section 3a, the section trapezoidal shape that the while surface area reduces gradually towards bonding surface 4a side.

And, though it is not shown, but be provided with the vacuum suction mechanism 6 that the airway 6a that connected by the vibration-direction along above-mentioned movable film 3 to above-mentioned embodiment shown in Figure 32 explanations and air supply source 6b constitute, when upper substrate A is set, carry out vacuum attraction from this vacuum suction mechanism 6, upper substrate A absorption is kept, and as required when bonding parts 4 are peeled off, can spray the gas of nitrogen for example etc. to the surfaces A 1 of upper substrate A from this vacuum suction mechanism 6.

Therefore, Fig. 4～embodiment 3 shown in Figure 6 can obtain with at the same action effect of above-mentioned Fig. 1～embodiment 1 shown in Figure 2 and embodiment shown in Figure 32, and following advantage arranged, promptly, change bonding parts 4 by size or weight, can obtain the most appropriate cohesive force corresponding to the upper substrate A that bonds.

In addition, with the foregoing description 3 similarly, in embodiment 1 and embodiment 2, for size or weight according to upper substrate A obtain the most appropriate cohesive force, the bonding parts 4 that also can prepare the different a plurality of kinds of the surface area of bonding surface 4a are to change.

And, when peeling off, give prominence to, again upper substrate A compared from embodiment 1 and the embodiment 2 that peels off with boning parts semi-finals system from keeping face 1a with the front end face that makes rigid section 3a, owing to needn't again the upper substrate A that finishes coincidence be carried out pressurized, so upper and lower base plate A, B offset each other can not take place, or accident such as the depth of parallelism is not normal.

Embodiment 4

This embodiment 4 is shown in Fig. 7 (a)～(c), by in above-mentioned peristome 1b as movable film 3 up and down direction separate and almost parallel two elastic membrane 3c are set, 3d, primary side spatial division as above-mentioned movable film 3 between them forms the first pneumatic chamber 5a, simultaneously, divide the formation second pneumatic chamber 5b respectively as the secondary side space, control quantity delivered respectively to these the first pneumatic chamber 5a and the second pneumatic chamber 5b gas supplied, produce pressure differential by between, make two movable film 3c, 3d while elastic deformation also makes its to-and-fro movement, this structure is different from the foregoing description 1～embodiment 3, and structure in addition is identical with embodiment 1～embodiment 3.

Core at these two movable film 3c, 3d inserts the cylinder portion 7 of installing, the above-mentioned rigid section 3a of connection makes it integrated below this cylinder portion 7, axial roughly next door 8 in opposite directions, centre position with this cylinder portion 7 is set in above-mentioned peristome 1b, insert logical cylinder portion 7 and it is carried out the axle supporting freely and with airtight shape along the to-and-fro movement of Z direction with respect to next door 8, thus, cut apart the formation first pneumatic chamber 5a across this next door 8 at its primary side (behind), cut apart the formation second pneumatic chamber 5b at secondary side.

In above-mentioned cylinder portion 7, first passage 7a and the second channel 7b that is communicated in the divided first pneumatic chamber 5a and the second pneumatic chamber 5b respectively is set, provide air etc. via first passage 7a and second channel 7b from the outside, adjust the interior pressure of the first pneumatic chamber 5a and the second pneumatic chamber 5b thus.

And, the detent 7c that works in coordination is set between above-mentioned cylinder portion 7 and peristome 1b, limit the to-and-fro movement stroke of this cylinder portion 7 and rigid section 3a incorporate with it.

Under the situation of illustrated example, in the outside of cylinder portion 7 the detent 7c that cooperates with next door 8 is set, limit the amount of movement of cylinder portion 7.

Thus, as Fig. 7 (a) (c) shown in, attract gas in the first pneumatic chamber 5a by first passage 7a, or only provide gas to the second pneumatic chamber 5b by second channel 7b, or carry out when utilizing them and make the first pneumatic chamber 5a in force down in the interior pressure of the second pneumatic chamber 5b, thereby irrespectively make two movable film 3c, 3d distortion upward simultaneously with the pressure variation of secondary side space (confined space) S, make front end face standby under the state that enters into from maintenance face 1a in the peristome 1b of rigid section 3a.

In contrast, shown in Fig. 7 (b), only provide gas by first passage 7a to the first pneumatic chamber 5a, or attract gas in the second pneumatic chamber 5b by second channel 7b, or carry out by them the time and make the interior pressure of the first pneumatic chamber 5a be higher than the interior pressure of the second pneumatic chamber 5b, thereby irrespectively make two movable film 3c, 3d distortion downwards simultaneously with the pressure variation of confined space S, the front end face that makes rigid section 3a is from keeping face 1a outstanding.

In following situation shown in the illustrated example, promptly, with similarly as the embodiment 1 of Fig. 1～shown in Figure 2, in peristome 1b, enter from keeping face 1a by the front end face that makes rigid section 3a, make along the bonding surface 4a of the fixing bonding parts 4 of the opening edge of each peristome 1b and upper substrate A butt and the maintenance that bonds, front end face by making rigid section 3a is from keeping face 1a outstanding in addition, and the upper substrate A on the bonding bonding surface 4a that remains in these bonding parts 4 is peeled off forcibly.

As the example beyond it, though it is not shown, but also can be with similarly as the embodiment 3 of Fig. 4～shown in Figure 6, outstanding a little by the front end face that makes rigid section 3a from maintenance face 1a, bonding surface 4a that makes at the fixing bonding parts 4 of the front end face of this rigid section 3a and upper substrate A butt and the maintenance that bonds, in peristome 1b, enter from keeping face 1a by the front end face that makes rigid section 3a in addition, the bonding surface 4a of these bonding parts 4 can be drawn back forcibly from upper substrate A and peel off.

And, though it is not shown, but the vacuum suction mechanism 6 that airway 6a that the vibration-direction by along above-mentioned movable film 3 that above-mentioned embodiment shown in Figure 32 explanations also can be set connects and air supply source 6b constitute, when upper substrate A is set, carrying out vacuum attraction from this vacuum suction mechanism 6 keeps upper substrate A absorption, and, can spray the gas of nitrogen for example etc. to the surfaces A 1 of upper substrate A from this vacuum suction mechanism 6 as required from bonding parts 4 when peeling off.

Therefore, can obtain the action effect same at the embodiment 4 shown in Fig. 7 (a)～(c) with the foregoing description 1～embodiment 3, and, have the following advantages, promptly, only the pressure differential by the first pneumatic chamber 5a and the second pneumatic chamber 5b moves back and forth, and irrespectively upper substrate A is bondd maintenance and peels off opening so can change with the pressure of secondary side space (confined space) S.

And, also have the following advantages in the illustrated example, promptly, with respect to the peristome 1b that wears at last holding plate 1 cylinder 1d is installed, on this cylinder 1d, be equipped with movable film 3c integratedly, 3d, cylinder portion 7, rigid section 3a, bonding parts 4 and next door 8 are waited all component parts and are carried out blocking, if in the mode of dismantling freely from for example charging crane such as magnetism or clamping device (not shown) cylinder 1d is installed with respect to above-mentioned peristome 1b, when the cohesive force of bonding parts 4 reduces, by maintenance face 1a loading and unloading whole unit, can change and be arranged on correct position easily from last holding plate 1.

Embodiment 5

This embodiment 5 is as Fig. 8 and shown in Figure 9, core at above-mentioned movable film 3 inserts installation and the incorporate cylinder of rigid section 3a portion 7, axial roughly next door 8 in opposite directions, centre position with this cylinder portion 7 is set in above-mentioned peristome 1b, insert logical cylinder portion 7 and it is carried out the axle supporting freely and with airtight shape to the to-and-fro movement of Z direction with respect to next door 8, thus, along with the distortion of movable film 3 makes rigid section 3a with the linearity to-and-fro movement, this formation is different with the foregoing description 1～embodiment 4, and formation in addition is identical with embodiment 1～embodiment 4.

In example shown in Figure 8, between the movable film 3 of configured in parallel and next door 8, divide and form primary side space 5, to be arranged at the inside of cylinder portion 7 to the passage 7a that this primary side space 5 is communicated with, the detent 7c that works in coordination is set between this cylinder portion 7 and above-mentioned peristome 1b, limits the to-and-fro movement stroke of this cylinder portion 7 and rigid section 3a incorporate with it.

In example shown in Figure 9, two movable film 3c, 3d are set in peristome 1b along the vertical direction separated from each otherly, almost parallel ground configuration next door 8 between these movable film 3c, 3d, between the either party of movable film 3c, 3d and next door 8, divide and form primary side space 5, to be arranged on the inside of cylinder portion 7 to the passage 7a that this primary side space 5 is communicated with, the detent 7c that works in coordination is set between this cylinder portion 7 and above-mentioned peristome 1b, limits the to-and-fro movement stroke of this cylinder portion 7 and rigid section 3a incorporate with it.

Following situation has been shown in illustrated embodiment, promptly, with the embodiment 1 of Fig. 1～shown in Figure 2 similarly, enter to peristome 1b from keeping face 1a by the front end face that makes rigid section 3a, thereby make along the bonding surface 4a of the fixing bonding parts 4 of the opening edge of each peristome 1b and upper substrate A butt and the maintenance that bonds, give prominence to from keeping face 1a by the front end face that makes rigid section 3a in addition, the upper substrate A that keeps that will bond on the bonding surface 4a of these parts 4 that bond peels off forcibly.

As the example beyond it, though it is not shown, but can with the embodiment 3 of Fig. 4～shown in Figure 6 similarly, outstanding a little by the front end face that makes rigid section 3a from maintenance face 1a, make on the front end face of this rigid section 3a the bonding surface 4a of fixing bonding parts 4 and upper substrate A butt and the maintenance that bonds, in peristome 1b, enter from keeping face 1a by the front end face that makes rigid section 3a in addition, the bonding surface 4a of these bonding parts 4 can be drawn back forcibly from upper substrate A and peel off.

And, though it is not shown, but the vacuum suction mechanism 6 that airway 6a that the vibration-direction by along above-mentioned movable film 3 that above-mentioned embodiment 2 explanations as shown in Figure 3 also can be set connects and air supply source 6b constitute, when upper substrate A is set, carrying out vacuum attraction from this vacuum suction mechanism 6 keeps upper substrate A absorption, and, can spray the gas of nitrogen for example etc. towards the surfaces A 1 of upper substrate A from this vacuum suction mechanism 6 as required from bonding parts 4 when peeling off.

Therefore, can obtain the action effect same at Fig. 8 and embodiment 5 shown in Figure 9 with the foregoing description 1～embodiment 4, and have the following advantages, promptly, along with the elastic deformation of movable film 3, via the 7 rigid section 3a of cylinder portion along the rectilinear direction to-and-fro movement, therefore, can seek the stable to-and-fro movement of rigid section 3a, and realize the raising with adhesive property and the stripping performance of upper substrate A.

Embodiment 6

This embodiment 6 is shown in Figure 10 (a)～(c), above-mentioned movable film 3 is not to be made of dividing plate, but by as bellows can to the Z direction more longways the elastic body of dilatation constitute, simultaneously, be provided with and the related force application part 9 of rigid section 3a that on this movable film 3, is provided with, to its reciprocating either party application of force often, this formation is different from the foregoing description 1～embodiment 5 by 9 pairs of these movable films 3 of this force application part, and formation in addition is identical with embodiment 1～embodiment 5.

In illustrated example, structure is to the most similar at above-mentioned embodiment shown in Figure 85, its structure is as follows, promptly, with respect to the next door 8 in the peristome 1b that on the maintenance face 1a of last holding plate 1, offers, core and the incorporate cylinder of the rigid section 3a portion 7 be connected with at movable film 3 inserted in the direction to-and-fro movement freely and with airtight shape up and down, and it is carried out axle support, simultaneously, between these cylinder portions 7 and peristome 1b, the detent 7c that setting is worked in coordination, thus by the distortion of movable film 3 make rigid section 3a in the prescribed stroke scope with the linearity to-and-fro movement.

By as above-mentioned bellows can to the Z direction more longways the movable film 3 that constitutes of the elastic body of dilatation form cylindric, by its two openend is fixed on the peristome 1b of above-mentioned cylinder portion 7 and above-mentioned holding plate 1 respectively in the mode that can't come off, install outside around this cylinder portion 7, forms the flexible 3e of wrinkle portion of direction up and down in the barrel around this cylinder portion 7.

Axial roughly next door 8 in opposite directions, centre position with this cylinder portion 7 is set in above-mentioned peristome 1b, insert logical cylinder portion 7 and it is carried out the axle supporting freely and with airtight shape to the to-and-fro movement of Z direction with respect to next door 8, between the 3e of wrinkle portion of this next door 8 and bellows 3, divide and form confined chamber 3f, the passage 7a that is provided with in the inside of cylinder portion 7, this passage 7a are communicated with this confined chamber 3f and divide the primary side space (pneumatic chamber) 5 that forms at its primary side (behind) across this next door 8.

5 provide air etc. via passage 7a from this primary side space (pneumatic chamber) to confined chamber 3f, produce pressure differential between these primary side spaces (pneumatic chamber) 5 and confined chamber 3f and secondary side space (confined space) S, the 3e of wrinkle portion of bellows 3 stretches and cylinder portion 7 and rigid section 3a is moved back and forth to the Z direction.

The detent 7c that works in coordination is set between above-mentioned cylinder portion 7 and above-mentioned peristome 1b, limits the to-and-fro movement stroke of this cylinder portion 7 and rigid section 3a incorporate with it.

Above-mentioned force application part 9 for example is a compression helical spring etc., along above-mentioned cylinder portion 7 up and down direction dispose elastically, by carrying out dilatation linkedly with the pressure differential of above-mentioned primary side space (pneumatic chamber) 5 and confined chamber 3f and secondary side space (confined space) S, thereby the front end face that makes rigid section 3a via above-mentioned cylinder portion 7 and bellows 3 is come in and gone out from the peristome 1b of holding plate 1.

And, under the situation of illustrated example, above-mentioned movable film 3 has been formed bottom tube-like, insert the logical cylinder portion 7 of installing in its bottom surface sections, simultaneously, in above-mentioned next door 8 be based between the spring carrier 7d of cylinder portion 7 upper ends and clamp compression helical spring 9, shown in Figure 10 (a), make primary side space (pneumatic chamber) 5 and confined chamber 3f in force down in secondary side space (confined space) S or about equally, by making this compression helical spring 9 elongation strains, cylinder portion 7 and rigid section 3a are moved upward, and the front end face of rigid section 3a is entered in peristome 1b from keeping face 1a, carry out standby under this gets the hang of.

And, shown in Figure 10 (b), make the interior pressure of primary side space (pneumatic chamber) 5 and confined chamber 3f be higher than secondary side space (confined space) S, by making compression helical spring 9 compression deformations, cylinder portion 7 and rigid section 3a move downwards, and the front end face that makes rigid section 3a is from keeping face 1a outstanding.

Promptly, when upper substrate A is set, shown in Figure 10 (a), by by the acting force of compression helical spring 9 with the standby under the state that keeps face 1a and in peristome 1b, enter of the front end face of rigid section 3a, make the bonding surface 4a of bonding parts 4 of the opening edge that is fixed in each peristome 1b and upper substrate A butt and the maintenance that bonds, keep the bonding hold mode of this upper substrate A by the acting force of compression helical spring 9.

Finish after upper and lower base plate A, B overlap each other, shown in Figure 10 (b), holding plate 1 is relatively separated a little with following holding plate 2, simultaneously, with the front end face of rigid section 3a from keep face 1a a little (about 100 μ m) outstanding, the upper substrate A pressure that thus bonding is remained on the bonding surface 4a of these bonding parts 4 is peeled off.

Thereafter, shown in Figure 10 (c), when last holding plate 1 separates fully with following holding plate 2, environmental gas in the S of secondary side space (confined space) is returned to atmospheric pressure, like this, restoring force by compression helical spring 9 moves bellows 3 and rigid section 3a upward forcibly, makes the front end face of rigid section 3a enter and return back to A-stage in peristome 1b.

And, the vacuum suction mechanism 6 that airway 6a that the vibration-direction by along above-mentioned movable film 3 of above-mentioned embodiment shown in Figure 32 explanations connects and air supply source 6b constitute is set, when upper substrate A is set, carry out vacuum attraction and adsorb maintenance upper substrate A from this vacuum suction mechanism 6, and as required from bonding parts 4 when peeling off, from this vacuum suction mechanism 6 to surfaces A 1 ejection of upper substrate A for example with the gas of nitrogen etc., so comparatively desirable.

And, in illustrated example, by making above-mentioned airway 6a with respect to inserting the logical cylinder 1d direction perforation up and down that is installed in holding plate 1 or its peristome 1b, bonding parts 4 towards the opening edge that is fixed in this peristome 1b wear, thereby can with the peristome 1b of the to-and-fro movement of movable film 3 and the rigid section 3a that accompanies with it in enter standby irrespectively, the maintenance that bonds of the bonding parts 4 of using holding plate 1.

Therefore, can obtain the action effect same at the embodiment 6 shown in Figure 10 (a)～(c) with the foregoing description 1～embodiment 5, and have the following advantages, promptly, if with movable film 3 by as bellows can to the Z direction more longways the elastic body of dilatation constitute, then with by the film that dividing plate constituted compare, can with the diameter dimension to-and-fro movement of long stroke irrespectively of movable film 3, need not make movable film 3 maximizations own can guarantee the stroke that being used for positively bonds peels off.

Especially, under the situation of illustrated example,, also can guarantee to be used to that the front end face of rigid section 3a is entered in peristome 1b even the diameter dimension of movable film 3 is small-sized, the parts 4 that will bond draw back the stroke of peeling off forcibly from upper substrate A.

And, have the following advantages, promptly, to push mobile downwards if resist as the bellows and the rigid section 3a of movable film 3 in the acting force of force application part 9 by the pressure differential of primary side space 5 and secondary side space S, then after finishing upper and lower base plate A, B coincidence each other, environmental gas in the S of secondary side space (confined space) is returned to atmospheric pressure, disappear with the pressure differential in primary side space 5, so, bellows 3 and rigid section 3a are replied upward forcibly, can control the pressure of pneumatic mechanism thus easily.

Especially, in the baseplate-laminating machine, in order to make the environmental gas in the confined space S positively reach specified vacuum degree (about 0.5Pa), at first, by the single movement of roughing pumps (not shown) such as for example scroll vacuum pump, bring up to about 100Pa below from atmospheric pressure vacuum tightness after, then, from about about 50Pa, begin to make for example high vacuum pump (not shown) interlock such as turbomolecular pump, vacuum tightness is brought up to 0.5Pa till.

Even in this case, embodiment 6 is owing to irrespectively kept the bonding hold mode of upper substrate A with the pressure differential of primary side space 5 and secondary side space S by the acting force of force application part 9, therefore, can with above-mentioned high vacuum pump after blocking on the pipe arrangement, be transformed into the action of peeling off of upper substrate A.

Thus, have following advantage, that is, under this high vacuum environment gas, be transformed into when action of peeling off of substrate A, even for example take place to sew and cause vacuum tightness to descend at air such as movable film 3 perforatings quickly, high vacuum pump also can be damaged.

Embodiment 7

This embodiment 7 is shown in Figure 11 (a)～(c), make above-mentioned force application part 9 dilatations, simultaneously, by the such movable film 3 that constitutes by elastic body of the pressure official post bellows of the primary side space (pneumatic chamber) 5 of movable film 3 and secondary side space (confined space) S to Z direction dilatation, outstanding a little by the front end face that makes rigid section 3a from maintenance face 1a, bonding surface 4a that makes at the fixing bonding parts 4 of the front end face of this rigid section 3a and upper substrate A butt and the maintenance that bonds, in peristome 1b, enter from keeping face 1a by the front end face that makes rigid section 3a in addition, the bonding surface 4a of these bonding parts 4 drawn back forcibly from upper substrate A peel off, this formation is different from above-mentioned embodiment shown in Figure 10 6, and the formation beyond it is identical with embodiment 6.

In illustrated example, the next door 8 that is provided with in the peristome 1b with respect to last holding plate 1, logical and the incorporate cylinder of rigid section 3a portion 7 are inserted in the direction to-and-fro movement freely up and down, simultaneously, with respect to the inner peripheral surface of above-mentioned peristome 1b up and down the direction to-and-fro movement insert freely and with airtight shape and lead to the spring carrier 7d that distal process is established in this cylinder portion 7 and carry out axle and support, through these next doors 8 and spring carrier 7d, can not fix two openends respectively as the cylindric bellows of above-mentioned movable film 3 with coming off.

Between the inner peripheral surface of the 3e of wrinkle portion of these bellows 3 and peristome 1b, divide and form confined chamber 3f, with passage 1e be communicated with this confined chamber 3f and across above-mentioned spring carrier 7d in the primary side space (pneumatic chamber) 5 that its primary side (behind) divide to form, this spring carrier 7d and the compression helical spring that between the spring carrier 1f of the rear side formation of the peristome 1b of last holding plate 1, clamps as above-mentioned force application part 9.

And, shown in Figure 11 (a), make the interior pressure of primary side space (pneumatic chamber) 5 and confined chamber 3f be higher than secondary side space (confined space) S, by making compression helical spring 9 elongation strains, cylinder portion 7 and rigid section 3a move downwards, the front end face that makes rigid section 3a with keep face 1a be roughly same planar or a little (about 100 μ m) to be convex outstanding.

And, shown in Figure 11 (b), make the interior pressure of primary side space (pneumatic chamber) 5 and confined chamber 3f be higher than secondary side space (confined space) S, by making compression helical spring 9 compression deformations, cylinder portion 7 and rigid section 3a are moved upward, the front end face that makes rigid section 3a from keep face 1a in peristome 1b a little (about 500 μ m) be concavity and enter.

Promptly, when upper substrate A is set, shown in Figure 11 (a), acting force by compression helical spring 9, same with the embodiment 3 of above-mentioned Fig. 4～shown in Figure 6, by with the front end face of rigid section 3a with keep face 1a be roughly same planar or a little (about 100 μ m) be standby under the outstanding state of convex, the bonding hold mode of this upper substrate A is kept in bonding surface 4a that makes at the fixing bonding parts 4 of the front end face of this rigid section 3a and upper substrate A butt and the maintenance that bonds by the acting force of compression helical spring 9.

After finishing upper and lower base plate A, B coincidence each other, shown in Figure 11 (b), front end face by making rigid section 3a from keep face 1a in peristome 1b a little (about 500 μ m) enter, thereby the bonding surface 4a of the parts 4 that will bond draws back forcibly from upper substrate A and peels off.

After this, shown in Figure 11 (c), last holding plate 1 relatively separates with following holding plate 2, simultaneously, environmental gas in the S of secondary side space (confined space) is returned to atmospheric pressure, like this, the front end face that makes rigid section 3a by the restoring force of compression helical spring 9 roughly becomes same planar or outstanding and return back to A-stage to be a little convex with keeping face 1a.

And, the vibration-direction by along above-mentioned movable film 3 that above-mentioned embodiment shown in Figure 32 explanations are set connects rigid section 3a and the airway 6a of cylinder portion 7 and the vacuum suction mechanism 6 that air supply source 6b constitutes, when upper substrate A is set, carry out vacuum attraction and adsorb maintenance upper substrate A from this vacuum suction mechanism 6, and, preferably spray the gas of nitrogen for example etc. to the surfaces A 1 of upper substrate A from this vacuum suction mechanism 6 as required from bonding parts 4 when peeling off.

Therefore, embodiment 7 shown in Figure 11 (a)～(c) can obtain the action effect same with the foregoing description 6, and have the following advantages, promptly, when peeling off upper substrate A, the embodiment 6 that upper substrate A peels off is forcibly compared from keeping face 1a to give prominence to from bonding parts 4 with the front end face that makes rigid section 3a, owing to there is no need the upper substrate A that finishes coincidence is carried out pressurized once more, therefore, upper and lower base plate A, B offset or accident such as the depth of parallelism is not normal each other can not take place.

In addition, though show adhesive chuck device of the present invention is provided in situation in the make-up machine, wherein this make-up machine bonding keeps and fits the glass substrate of liquid crystal display (LCD) panel etc., but be not limited to this, also can be provided in the base board delivery device of substrate assembling apparatus except that this baseplate-laminating machine or conveyance substrate, perhaps bonding keeps the LCD panel with the substrate beyond the glass substrate.

In addition, although understand the baseplate-laminating machine of adhesive substrates A, B in a vacuum, but be not limited thereto, also can be the baseplate-laminating machine of adhesive substrates A, B in atmosphere, even also can obtain and the identical action effect of above-mentioned vacuum abutted machine in this case.

And, among the embodiment shown in above-mentioned, by only offering peristome 1b and dispose movable film 3 at the maintenance face 1a of last holding plate 1, thereby carry out the bonding maintenance of upper substrate A and peel off opening, but be not limited to this, at the maintenance face 2a of following holding plate 2 too, can by offer with the surperficial B1 of infrabasal plate B in opposite directions peristome and dispose movable film, the bonding of carrying out infrabasal plate B keeps and peels off opening.

In addition, though only show at embodiment shown in Figure 74 and Fig. 8 and embodiment 5 shown in Figure 9 and embodiment 6 shown in Figure 10, with respect to the peristome 1b erecting device cylinder 1d that wears at last holding plate 1, be equipped with movable film 3c in this cylinder 1d one, 3d, 3 or bonding parts 4 wait the situation of all component parts and blocking, but be not limited thereto, other embodiment too, can cylinder (not shown) be installed with respect to the peristome 1b that wears at last holding plate 1, on this cylinder one be equipped with movable film 3 or the bonding parts 4 wait all component parts and carry out blocking, simultaneously, in the mode of loading and unloading freely cylinder is installed with respect to above-mentioned peristome 1b from for example charging crane such as magnetism or clamping device (not shown), thus, when the cohesive force of bonding parts 4 reduces, can and change from the maintenance face 1a loading and unloading whole unit of last holding plate 1.

Claims (6)

1. adhesive chuck device, this adhesive chuck device remains on the substrate loading and unloading on the holding plate freely by bonding, it is characterized in that:

Substrate-side at above-mentioned holding plate is provided with: movable film, this movable film can be out of shape to the direction of intersecting with this substrate side surfaces in being opened in the peristome of this substrate side surfaces; Rigid section, this rigid section are configured to the front end face of this rigid section and substrate in opposite directions on the part of this movable film; With the bonding parts, these bonding parts are configured on the front end face of this rigid section;

The to-and-fro movement of this movable film that utilization is produced by the pressure differential in the primary side space of above-mentioned movable film and secondary side space, the front end face and the bonding parts of above-mentioned rigid section are come in and gone out from the peristome of holding plate, make the bonding surface of above-mentioned bonding parts and substrate butt and keep the bonding surface and the substrate of above-mentioned bonding parts by bonding abreast, simultaneously, peel off by bonding surface and the substrate forcing to draw back above-mentioned bonding parts.

2. adhesive chuck device according to claim 1 is characterized in that: offer the airway that connects along the vibration-direction of above-mentioned movable film opposite to each other with substrate, attract the absorption substrate from this airway.

3. adhesive chuck device according to claim 2, it is characterized in that: in above-mentioned movable film, be provided with and the incorporate cylinder of rigid section portion, in being opened in the peristome of substrate side surfaces, be provided with and this cylinder portion next door in opposite directions, this cylinder portion to-and-fro movement is inserted freely and is led in this next door, thereby makes this cylinder portion axle be supported on above-mentioned next door.

4. adhesive chuck device according to claim 3, it is characterized in that: in above-mentioned peristome, be provided with two movable films disconnected from each other, in these movable films, insert the logical cylinder portion that is equipped with, divide respectively between two movable films and form first pneumatic chamber and second pneumatic chamber, the pressure differential by this first pneumatic chamber and second pneumatic chamber makes two movable films distortion simultaneously and it is moved back and forth.

5. according to claim 1,2,3 or 4 described adhesive chuck devices, it is characterized in that: above-mentioned movable film is by constituting to the bellows of the direction distortion that intersects with the substrate side surfaces of holding plate.

6. according to claim 1,2,3 or 4 described adhesive chuck devices, it is characterized in that: be provided with and the related force application part of above-mentioned movable film, utilize this force application part to this movable film to its reciprocating either direction application of force.

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