JPWO2006046379A1 - Adhesive chuck device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To securely attach and detach a substrate with a pneumatic mechanism having a simple structure. A movable film 3 that can be deformed in a direction intersecting the substrate side surface 1a in an opening 1b opened on the substrate side surface 1a and a substrate A are adhesively held on the substrate side of the holding plate 1. An adhesive member 4 is provided, and the movable film 3 is reciprocated by a pressure difference between the primary space 5 and the secondary space S of the movable film 3 so that the adhesive surface 4a of the adhesive member 4 and the substrate A come into contact with each other. Then, the two are forcibly separated from each other, and the substrate A is peeled off from the adhesive surface 4a of the adhesive member 4 without difficulty. [Selection] Figure 1

Description

In the present invention, for example, a glass substrate such as CF glass or TFT glass or a substrate made of synthetic resin is bonded and bonded together in the manufacturing process of a flat panel display such as a liquid crystal display (LCD) or a plasma display (PDP). The present invention relates to an adhesive chuck device used for a substrate assembly apparatus including a bonding machine, a substrate transfer apparatus for transferring a substrate, and the like.
Specifically, the present invention relates to an adhesive chuck device that holds a substrate detachably with respect to a holding plate.

Conventionally, in a substrate bonding machine that superimposes two substrates, the substrate is held by an electrostatic chuck, but with the recent increase in size of the substrate, it becomes difficult to manufacture a large size electrostatic chuck, Even if it could be manufactured, it was very expensive.
Therefore, in order to solve these problems, there is an adhesive chuck device using an adhesive material for holding the substrate.
As an example of such an adhesive chuck device, the upper substrate is attached to and held on an adhesive sheet that is rewound over a pair of rollers, and then the upper substrate and the lower substrate are bonded together, and then a plurality of By driving the motor, the spindle is rotated to wind up the adhesive sheet, and at the same time, the spindle and one roller are moved horizontally in the same winding direction at a speed synchronized with the winding speed of the upper substrate. There is one that gradually peels the adhesive sheet from the upper surface (see, for example, Patent Document 1).
Then, instead of winding the adhesive sheet by the spindle described above, after the two substrates are bonded together to form a cell, the plurality of actuators drive the cutter table and the cutter base to the lower end position of the cutter blade. The adhesive sheet with the upper substrate attached is cut by moving the cutter in the width direction of the adhesive sheet, and the cell is taken out with the adhesive sheet attached, and the adhesive is adhered to the cell at an appropriate time. The sheet is peeled off.
As yet another example, a plurality of apertures are provided in the upper pressure plate, actuators are provided in the apertures, and an adhesive member is attached to the tip of a shaft extending downward from each actuator. When the adhesive member is lowered in the opening by the operation and the lower surface of the adhesive member comes into contact with the upper substrate, the adhesive member is held in close contact with the lower surface of the pressure plate by the adhesive action. When removing the adhesive member, when the adhesive member is lifted in the opening by the actuator, the peripheral portion of the opening prevents the upper substrate from moving and pulls the upper substrate away from the adhesive member (for example, see Patent Document 2). .
In addition, a plurality of openings are provided in the upper pressure plate, and a rotation actuator and a vertical drive actuator are provided in each of these openings, and an adhesive member is attached to the tip of the rotation shaft extending downward from each rotation actuator. When each adhesive member is lowered in the opening by the operation of the vertical drive actuator, the upper substrate is held by suction adhesion with these adhesive members, and bonding is performed while positioning, and the adhesive member is retracted into the pressure plate In some cases, the adhesive member is peeled from the upper substrate by twisting the adhesive member with respect to the substrate surface with a rotating actuator or by reversing the adhesive member with a vertical drive actuator (see, for example, Patent Document 3).

JP 2001-133745 A (page 3-5, FIG. 1 to FIG. 7) Japanese Patent Laying-Open No. 2003-241160 (5th page, FIG. 7) JP 2003-273508 A (5th page, FIG. 1-5)

However, in such a conventional adhesive chuck device, in the case of Patent Document 1, in order to peel off the adhesive member and the substrate, in the same winding direction at a speed synchronized with the winding speed while winding the adhesive sheet. It must be moved horizontally, or the cutter base and cutter base must be lifted and the adhesive sheet must be cut with the cutter. Each operation requires a large number of drive sources such as multiple motors and actuators, resulting in a complicated structure. There was a problem to do.
In the case of Patent Document 2, a plurality of actuators are required for each adhesive member to raise the adhesive member in the opening of the pressure plate, and in the case of Patent Document 3, the adhesive member is twisted. However, there is a problem that the structure of the actuator is complicated because the actuator for rotation and the actuator for vertical driving for retraction are necessary for each adhesive member.
Therefore, in Patent Documents 1 to 3, since the peeling structure is particularly complicated, not only the failure occurrence rate is high, but particularly when deployed in a substrate assembly apparatus or a substrate transport apparatus including a substrate bonding machine, There is a problem that it is difficult to replace the existing substrate holding mechanism such as an electrostatic chuck with the adhesive chuck device of the present invention.
Furthermore, when the actuator is an electromagnetic electric motor such as a motor, it is easy to generate heat. For example, a glass substrate is sensitive to heat change and expands and contracts by about 4 μm even if it is changed by 1 ° C. There is a problem that it is difficult to accurately align the substrates due to the influence of such heat generation.
Furthermore, when the adhesive is held in an atmosphere from atmospheric pressure to a predetermined degree of vacuum and the adhesive is peeled and released, the pressure changes from atmospheric pressure to a predetermined degree of vacuum. When a typical actuator is used, there is a possibility that plasma discharge may be caused at a certain timing in a vacuum, resulting in damage to the glass substrate.
Even if the actuator is a drive source such as an air cylinder, it is difficult to reduce the size because it is a sealed structure that can be expanded and contracted by itself. There was a problem of becoming up.
By the way, in particular, a large substrate is likely to bend and deform, and in order to securely hold and release such a deformable substrate, it is necessary to bring the adhesive member into contact with the substrate with a strong force or to release it. However, in order to obtain such a strong force, the size of the actuator has to be increased, resulting in a problem that the actuator becomes heavier.

The object of the present invention is to reliably attach and detach the substrate with a pneumatic mechanism having a simple structure.
In addition to the object of the invention described in claim 1, the invention described in claim 2 aims to obtain a force necessary to securely adhere and peel off the substrate with a pneumatic mechanism having a simple structure. It is.
In addition to the object of the invention described in claim 1 or 2, the invention described in claim 3 is intended to hold the substrate securely while easily realizing the suction piping system and suction control. .
In addition to the object of the invention described in claim 2 or 3, the invention described in claim 4 aims to improve the adhesion performance and the peeling performance with the substrate by stabilizing the reciprocation of the rigid body portion. It is.
In addition to the object of the invention described in claim 4, the invention described in claim 5 is intended to hold and peel and release the substrate regardless of the pressure change in the secondary space.
In addition to the object of the first, second, third, fourth, or fifth aspect, the sixth aspect of the invention secures a stroke for reliably performing adhesion and peeling without increasing the size of the movable film itself. It is for the purpose.
The seventh aspect of the invention is intended to facilitate the pressure control of the pneumatic mechanism in addition to the object of the first, second, third, fourth, fifth or sixth aspect.

In order to achieve the above-mentioned object, the invention according to claim 1 of the present invention is a movable film that can be deformed in the direction intersecting the substrate side surface in an opening formed on the substrate side surface of the holding plate. And an adhesive member that holds and holds the adhesive facing the substrate, and the adhesive surface of the adhesive member and the substrate are brought into contact with each other by reciprocating movement of the movable film due to a pressure difference between the primary side space and the secondary side space of the movable film. In addition, the two are forcibly separated and peeled off.
According to a second aspect of the present invention, in the configuration of the first aspect of the invention, a rigid body part is provided on a part of the movable film so as to face the substrate, and the distal end surface of the rigid body part is held by the reciprocating motion of the movable film. It is characterized by adding a configuration in which the substrate is brought into and out of the opening of the plate and is in contact with the substrate.
According to a third aspect of the present invention, in the configuration of the first or second aspect of the present invention, an air passage that penetrates the movable film in the reciprocating direction of the movable film is opened facing the substrate, and the substrate is sucked and adsorbed from the air passage. It is characterized by adding a configuration.
According to a fourth aspect of the present invention, in the configuration of the second or third aspect of the present invention, the movable film is provided with a cylinder portion integrated with a rigid body portion, and the cylinder portion is provided in an opening formed on a side surface of the substrate. The structure which added the structure which provided the partition which opposes, and penetrated the cylinder part with respect to this partition so that reciprocation was possible was added.
According to a fifth aspect of the invention, in the configuration of the fourth aspect of the invention, two movable films separated from each other are provided in the opening, and a cylinder part is inserted into the movable film to move both movable films. A first pneumatic chamber and a second pneumatic chamber are separately formed between the membranes, and both movable membranes are simultaneously deformed and reciprocated by a pressure difference between the first pneumatic chamber and the second pneumatic chamber. It is characterized by adding a configuration.
In the invention described in claim 6, the structure of the invention described in claim 1, 2, 3, 4 or 5 is added with a structure comprising a bellows that is deformable in a direction in which the movable film intersects the substrate side surface of the holding plate. It is characterized by that.
According to a seventh aspect of the invention, in the configuration of the first, second, third, fourth, fifth or sixth aspect of the invention, a biasing member linked to the movable film is provided, and the movable film is moved by the biasing member. It is characterized by the addition of a configuration biased toward either one of the reciprocating motions.

According to the first aspect of the present invention, on the substrate side of the holding plate, a movable film that can be deformed in a direction intersecting the substrate side surface in an opening formed on the substrate side surface, and an adhesive holding facing the substrate are provided. An adhesive member, and by reciprocating the movable film with a pressure difference between the primary side space and the secondary side space of the movable film, the adhesive surface of the adhesive member and the substrate are brought into contact with each other and adhered and held, Both of these are forcibly separated, and the substrate is peeled off from the adhesive surface of the adhesive member.
Therefore, the substrate can be reliably attached and detached with a pneumatic mechanism having a simple structure.
As a result, compared to conventional devices that require a large number of drive sources such as motors and actuators to separate the adhesive member and the substrate, the separation structure is particularly simple, so the failure rate can be significantly reduced. In the case of deployment to a substrate assembly apparatus or a substrate transport apparatus including an aligner, an existing substrate holding mechanism such as an electrostatic chuck can be easily replaced with the adhesive chuck apparatus of the present invention, which greatly increases the manufacturing cost. Reduction can be achieved.
Furthermore, since the substrate is not held by electrostatic attraction, there is an advantage that static electricity is not generated spontaneously.
In addition, the effects of heat generated by the electromagnetic actuator and the risk of discharge can be avoided, safe and accurate alignment between the substrates can be achieved, and the size and weight of the device can be reduced. The manufacturing cost can be reduced.
Furthermore, when the adhesive is held in an atmosphere from atmospheric pressure to a predetermined degree of vacuum and the adhesive is peeled off and opened, the drive source is set to air pressure, so that the atmospheric pressure is reduced to a predetermined degree of vacuum. Compared to the conventional type that requires wiring connection to the power supply like an electromagnetic actuator, the number of members that penetrate the vacuum closed space is reduced and the vacuum is reduced. The occurrence of leaks can be prevented.

According to a second aspect of the present invention, in addition to the effect of the first aspect of the invention, a rigid body portion is provided on a part of the movable film so as to face the substrate, and the distal end surface of the rigid body section is held by the reciprocating motion of the movable film. The reciprocating motion of the movable film is transmitted to the substrate through the rigid portion without being deformed by protruding and retracting from the opening and contacting the substrate.
Therefore, it is possible to obtain a force necessary for reliably adhering and peeling the substrate with a pneumatic structure having a simple structure.

In addition to the effect of the invention of claim 1 or 2, the invention of claim 3 is provided with a vent passage penetrating the movable film in the reciprocating direction of the movable film so as to face the substrate, and sucking and adsorbing the substrate from the vent passage. Thus, it is used in combination with adhesive holding by an adhesive member and holding by vacuum suction.
Therefore, the substrate can be reliably held while easily realizing the suction piping system and suction control.
Furthermore, by controlling the vacuum pressure at the time of adsorption, the strength of the adhesive force with the substrate can be easily adjusted.

According to a fourth aspect of the present invention, in addition to the effect of the second or third aspect of the invention, the movable film is provided with a cylinder portion integrated with the rigid body portion, and the cylinder portion and the cylinder portion are formed in the opening formed on the side surface of the substrate. By providing an opposing partition wall and inserting the cylinder portion into the partition wall so as to be able to reciprocate, the rigid body portion reciprocates in a linear direction via the cylinder portion as the movable film is deformed.
Therefore, it is possible to stabilize the reciprocating motion of the rigid body portion and improve the adhesion performance and the separation performance with the substrate.

According to the invention of claim 5, in addition to the effect of the invention of claim 4, two movable films separated from the opening are provided separately, and a cylinder portion is inserted into these movable films, By separately forming a first pneumatic chamber and a second pneumatic chamber in between, by simultaneously deforming and reciprocating both movable films due to a pressure difference between the first pneumatic chamber and the second pneumatic chamber, The substrate is adhered and held, and the adhesive is peeled off and released.
Therefore, the substrate can be held and peeled off and released regardless of the pressure change in the secondary space.

In addition to the effect of the first, second, third, fourth, or fifth aspect, the sixth aspect of the invention is movable by forming the movable film with a bellows that can be deformed in a direction intersecting the substrate side surface of the holding plate. Long stroke reciprocation is possible regardless of the overall diameter of the membrane.
Therefore, it is possible to secure a stroke for reliably performing adhesion and peeling without increasing the size of the movable film itself.
As a result, it is effective when it is necessary to provide a large number of adhesive chuck devices to adhere and hold a large substrate.

According to a seventh aspect of the invention, in addition to the effect of the first, second, third, fourth, fifth or sixth aspect of the invention, a biasing member linked to the movable film is provided, and the movable film is reciprocated by the biasing member. If the movable film is moved in a direction against the urging force of the urging member by the pressure difference between the primary side space and the secondary side space by urging toward one of the movements, the primary side space and the secondary side When the pressure difference in the side space disappears, the movable film is forcibly returned by the restoring force of the biasing member.
Therefore, pressure control of the pneumatic mechanism can be facilitated.
Furthermore, when a low vacuum pump and a high vacuum pump are interlocked to reach a predetermined degree of vacuum, such as a substrate bonding machine, the biasing member is not affected by the pressure difference between the primary side space and the secondary side space. If the adhesive holding state of the substrate is maintained by the urging force, it is possible to switch to the substrate peeling operation after shutting off the high vacuum pump on the piping, so that even if air leakage occurs, the high vacuum pump will be damaged. Can be prevented.

The case where the adhesive chuck device of the present invention is provided in a substrate laminating machine for adhering and holding a glass substrate such as a liquid crystal display (LCD) panel is shown.
In this substrate bonding machine, as shown in FIGS. 1 to 10, two glass substrates A and B are respectively held on holding surfaces 1a and 2a which are parallelly opposed to holding plates 1 and 2 arranged vertically. The upper and lower holding plates 1 and 2 are relatively adjusted and moved in the XYθ direction (horizontal direction in the drawing) after the inside of the closed space S partitioned around them reaches a predetermined degree of vacuum (about 0.5 Pa). The substrates A and B are aligned with each other, and thereafter, the upper substrate A is forcibly separated from the holding surface 1a of the upper holding plate 1 and instantaneously transferred to the annular adhesive (seal material) C on the lower substrate B. The two substrates A and B are pressurized and bonded to each other by a pressure difference generated between the inside and outside of the substrates A and B.

  More specifically, the upper and lower holding plates 1 and 2 are supported by an elevating means (not shown) so as to be relatively movable in the Z direction (up and down in the drawing). The substrates A and B transferred by the substrate transfer robot (not shown) are set on the respective holding surfaces 1a and 2a in a state where 2 is separated in the vertical direction, and then held up and down by the operation of the lifting means. The closed space S is partitioned by bringing the plates 1 and 2 close to each other.

  Then, when the air is drawn from the closed space S by the operation of the intake means (not shown) to reach a predetermined vacuum level, the upper and lower holding plates 1 and 2 are operated by the operation of the horizontal moving means (not shown). By adjusting and moving one of the substrates in the XYθ direction with respect to the other, rough alignment and fine alignment are sequentially performed as alignment (alignment) between the substrates A and B held by them.

  After these alignment is completed and the upper and lower substrates A and B are overlapped, both substrates are supplied by supplying air or nitrogen into the closed space S and returning the atmosphere in the closed space S to atmospheric pressure. Pressure is evenly applied by the pressure difference generated inside and outside of A and B, and the product is completed by being crushed to a predetermined gap while liquid crystal is sealed.

Furthermore, the adhesive chuck device of the present invention is provided on the substrate side of the holding plates 1 and 2.
More specifically, as shown in FIGS. 1, 3, 4, 7, and 10, an opening is formed in one or both of the holding surfaces 1a and 2a on the substrate side of the upper and lower holding plates 1 and 2. A plurality of 1b are provided at substantially equal intervals, and the movable film 3 is provided in the openings 1b so as to be deformable in the Z direction intersecting the holding surfaces 1a and 2a, respectively, An adhesive member 4 that adheres and holds the surfaces A1 and B1 of the upper and lower substrates A and B is fixed to the surface of the movable film 3 on the substrate side, and the primary side space 5 and the secondary formed with the movable film 3 interposed therebetween. By reciprocating the movable film 3 due to a pressure difference with the closed space S that is a side space, the adhesive surface of the adhesive member 4 and one or both of the substrates A and B are brought into contact with each other and adhered. One or both of the substrates A and B from the adhesive surface of the adhesive member 4 by forcibly pulling them apart It is to be peeled off without difficulty.
Embodiments of the present invention will be described below with reference to the drawings.

In the first embodiment, as shown in FIGS. 1A to 1C, a plurality of openings 1 b are formed only on the holding surface 1 a of the upper holding plate 1 to support the outer peripheral portion of the movable film 3. A rigid body 3a is provided on a part of the film 3 so as to face the surface A1 of the substrate A, and an annular adhesive member 4 is provided along the opening edge of each opening 1b located on the secondary side of the movable film 3. The adhesive member 4 and the upper substrate A are brought into contact with each other with the rigid body portion 3a moving upward and immersed in the opening portion 1b, and the movable film 3 is held in the secondary space. (Closed space) This shows a case where the substrate A which is adhesively held on the adhesive surface 4a of the adhesive member 4 is forcedly peeled off by projecting and deforming downward toward the closed space S.
In the illustrated example, only two openings 1b and the movable film 3 are arranged opposite to the end of the upper substrate A due to space, but the two are suspended corresponding to the size of the upper substrate A. It is arranged in the number that can be lowered.

The movable film 3 is, for example, an elastically deformable film made of metal such as stainless steel or an elastic film made of a diaphragm formed of a synthetic resin such as rubber or engineering plastic, and the outer peripheral portion thereof is shown in FIG. As shown in a), the holding member 1c provided in the opening 1b of the upper holding plate 1 is bent into a wedge shape and inserted, or as shown in FIG. 2B, the integrally formed engaging portion 3b is inserted. Fix it so that it cannot be removed.
Then, the movable film 3 is elastically deformed in the Z direction by a pressure difference between the pneumatic chamber 5 partitioned and formed on the primary side (rear side) of the movable film 3 and the closed space S partitioned and formed on the secondary side. Reciprocate.

  Further, as shown in FIG. 2 (c), the movable film 3 is formed into a shape in which the thickness of the movable film 3 is changed and the amount of deformation in the vertical direction can be adjusted. The deformation amount of the movable film 3 due to the pressure difference between the air pressure chamber (5) and the secondary space (closed space) S is adjusted, and the central portion and the entire distal end surface of a rigid body portion 3a provided on the center portion are described below. It is also possible to translate in the vertical direction.

The rigid body portion 3a is a rigid body that cannot be deformed, and is integrally protruded from the central portion facing the surface A1 of the substrate A of the movable film 3 toward the secondary space (closed space) S, and the tip surface thereof is It faces the surface A1 of the substrate A in parallel.
Like the example of illustration, it forms in the cross-sectional trapezoid shape in which an outer diameter becomes large gradually toward the upper board | substrate A so that the elastic deformation to the up-down direction of the movable film 3 may not be inhibited, The front end surface is each opening part 1b. It is preferable to expand to the vicinity of the opening edge.

The pressure-sensitive adhesive member 4 is a pressure-sensitive adhesive sheet made of, for example, a silicon-based or acrylic-based pressure-sensitive adhesive material, and the area of the pressure-sensitive adhesive surface 4a is as small as possible within a range where the upper substrate A has a pressure-sensitive adhesive force. It is desirable to set the adhesive surface 4a as close as possible to the surface of the rigid portion 3a of the movable film 3 while setting.
Further, as shown in the illustrated example, the opposite fixed back surface 4b is directly adhered and fixed to the opening edge of each opening 1b, or a fixing part (not shown) that is detachable from each opening 1b. ) To fix.

The adhesive strength of the opposite fixed back surface 4b is stronger than the adhesive strength of the adhesive surface 4a in contact with the glass substrate A, and does not peel off by its weight when the upper substrate A is adhesively held, but the adhesive surface 4a It is necessary to make it possible to easily replace it according to the attenuation of the adhesive strength.
In this respect, as described above, if the adhesive member 4 is fixed by adhering the fixed back surface 4b to a detachable fixed component, it can be easily replaced in units of fixed components in accordance with the attenuation of the adhesive force of the adhesive surface 4a. is there.

  Although not shown, the holding surface 1a of the upper holding plate 1 is provided with a number of suction holes over the entire surface, and vacuum suction is performed from these suction holes at a predetermined timing. It is also possible to eject a gas such as nitrogen gas toward the surface A1.

Next, the operation of such an adhesive chuck device for a vacuum bonding machine will be described.
First, as shown by the solid line in FIG. 1A, the upper substrate A is set on the holding surface 1a of the upper holding plate 1 in the initial state where the upper and lower holding plates 1 and 2 are separated in the vertical direction. The part 3a is moved upward to stand by in the opening 1b of the holding plate 1.

In the case of the illustrated example, suction is performed from the primary side space (pneumatic chamber) 5, the internal pressure thereof is made lower than that of the secondary side space (closed space) S, and the movable film 3 is moved to the primary side space (pneumatic chamber) 5. As a result, the distal end surface of the rigid portion 3 a is waiting in a concave shape with respect to the holding surface 1 a and the adhesive surface 4 a of the adhesive member 4.
Although not shown, by making the internal pressure of the primary side space (pneumatic chamber) 5 equal to the pressure of the secondary side space (closed space) S, the movable film 3 is not deformed and is brought into a substantially horizontal flat state. The distal end surface of the rigid portion 3a may stand by at a position substantially the same as the holding surface 1a and the adhesive surface 4a of the adhesive member 4, or may be waited slightly above.

  In this standby state, the upper substrate A is transferred by a substrate transfer robot (not shown), the surface A1 is moved toward the holding surface 1a of the upper holding plate 1, and a predetermined pressure is applied to the adhesive surface 4a of the adhesive member 4. If it is made to contact, it will be hold | maintained with the adhesive force of this adhesion surface 4a.

  At this time, if vacuum suction is performed from a suction hole (not shown) opened in the holding surface 1 a of the upper holding plate 1, the surface A 1 of the upper substrate A is more strongly brought into contact with the adhesive surface 4 a of the adhesive member 4. In addition to being held, the upper substrate A is sucked and held, making it difficult to fall.

  Thereafter, as indicated by the two-dot chain line in FIG. 1A, the upper and lower holding plates 1 and 2 approach each other and the secondary space (closed space) S reaches a predetermined degree of vacuum. One of the two is adjusted and moved in the XYθ direction with respect to the other, and the substrates A and B held by them are aligned.

After the alignment and superposition of the substrates A and B are completed, a gas such as compressed air is supplied to the primary side space (air pressure chamber) 5 as shown in FIG. When the upper holding plate 1 is raised or the lower holding plate 2 is lowered while being relatively higher than the secondary side space (closed space) S, the movable film 3 becomes the secondary side space (closed space). ) It is deformed downward toward S and is pushed away from the adhesive surface 4a of the adhesive member 4 while the front end surface of the rigid portion 3a is in contact with the surface A1 of the upper substrate A.
At this time, since the secondary space (closed space) S has reached a predetermined degree of vacuum, the amount of gas supplied to the primary space (air pressure chamber) 5 at this time may be small.

  As a result, the upper substrate A that is adhesively held on the adhesive surface 4a of the adhesive member 4 is forcibly pushed away, and the upper substrate A is pushed away from the adhesive surface 4a of the adhesive member 4 without difficulty. Then, the upper substrate A is pressed against the annular adhesive C on the lower substrate B by the projecting pressure of the rigid body portion 3a and overlapped.

  At this time, if a gas such as nitrogen gas is ejected from the suction hole opened in the holding surface 1a of the upper holding plate 1 to the surface A1 of the upper substrate A, the upper substrate A is forced from the adhesive surface 4a of the adhesive member 4 Is peeled off instantaneously and pressure-bonded instantaneously to the annular adhesive C on the lower substrate B, and the space between them is sealed.

  After that, as shown in FIG. 1C, the movable film 3 is sucked from the primary side space (pneumatic chamber) 5 and its internal pressure is made lower than that of the secondary side space (closed space) S so that the movable membrane 3 is moved to the primary side space (pneumatic pressure). By deforming upward toward the chamber 5, the distal end surface of the rigid portion 3 a is recessed with respect to the holding surface 1 a and returns to the initial state.

  Accordingly, the first embodiment shown in FIGS. 1 and 2 can obtain a force necessary to securely hold and release the upper substrate A while having a simple structure without using an electromagnetic drive source.

Further, if the amount of gas supplied to the pneumatic chamber 5 formed on the primary side of the movable film 3 is controlled to adjust the elastic deformation amount of the movable film 3, the surface A1 of the upper substrate A and the adhesive member 4 can be adjusted. Can be adjusted, and adhesion and / or peeling strength with the upper substrate A can be easily adjusted.
At this time, since the adhesive force generated between the upper substrate A and the adhesive member 4 is proportional to the contact area between the two, the adhesive surface of the adhesive member 4 with respect to the surface A1 of the upper substrate A due to the increase or decrease in the pressing pressure described above. If the 4a is elastically deformed to increase or decrease the contact area, the strength of the adhesive force can be adjusted more clearly.

  In the second embodiment, as shown in FIGS. 3A to 3D, a ventilation path 6a that penetrates the movable film 3 in the reciprocating direction, a vacuum suction from the ventilation path 6a, and a gas such as nitrogen gas, for example. A vacuum suction means 6 including an air supply source 6b for supplying the upper substrate A is provided, and when the upper substrate A is set, the upper substrate A is sucked and held by suction from the air passage 6a of the vacuum suction means 6, and further if necessary. Unlike the first embodiment shown in FIGS. 1 to 2, the structure in which a gas such as nitrogen gas is ejected from the air passage 6a toward the surface A1 of the upper substrate A when peeling from the adhesive member 4 is different. Other configurations are the same as those in the first embodiment.

  In the illustrated example, the air passage 6a is opened so as to penetrate the movable body 3 and the rigid body portion 3a provided at a part thereof in the vertical direction, but instead, the through position of the air passage 6a is illustrated. Although not shown, it is also possible to penetrate the upper holding plate 1 in the vertical direction toward the adhesive member 4 fixed to the opening edge of the opening 1b opened on the holding surface 1a.

  That is, when the upper substrate A is set on the holding surface 1a of the upper holding plate 1, a gas such as compressed air is supplied to the primary side space (air pressure chamber) 5 as shown in FIG. Is deformed downward, the rigid body portion 3a is moved downward, and the tip end surface of the adhesive member 4 protrudes slightly from the adhesive surface 4a of the adhesive member 4 to stand by. In this state, the substrate transfer robot The upper substrate A transferred in the above is received by vacuum suction from the air passage 6a of the vacuum suction means 6 and sucked and held.

  Thereafter, as shown in FIG. 3B, the movable membrane 3 is made substantially horizontal by sucking from the primary space (pneumatic chamber) 5 and making the internal pressure thereof substantially equal to the pressure in the secondary space (closed space) S. By doing so, the front end surface of the rigid portion 3a is moved up to the same height position as the holding surface 1a and the adhesive surface 4a of the adhesive member 4, and the upper substrate A is guided toward the adhesive member 4, and the upper substrate A is left as it is. The surface A1 is brought into contact with the pressure-sensitive adhesive surface 4a of the pressure-sensitive adhesive member 4 with a predetermined pressure, and is held by the pressure-sensitive adhesive force of the pressure-sensitive adhesive surface 4a.

  Then, after the superposition of the upper and lower substrates A and B is completed, as shown in FIG. 3C, a gas such as compressed air is supplied to the primary side space (air pressure chamber) 5 and the internal pressure is reduced to the secondary side. When the upper holding plate 1 is raised or the lower holding plate 2 is lowered while being relatively higher than the space (closed space) S, the movable film 3 moves to the secondary side space (closed space) S. The adhesive body 4 is pushed away from the adhesive surface 4a of the adhesive member 4 while the distal end surface of the rigid portion 3a is in contact with the surface A1 of the upper substrate A.

  At the same time, if a gas such as nitrogen gas is blown out from the air passage 6a of the vacuum suction means 6 toward the surface A1 of the upper substrate A, the upper substrate A adhered and held on the adhesive surface 4a of the adhesive member 4 is obtained. The upper substrate A is forcedly peeled off from the adhesive surface 4a of the adhesive member 4 by being forcedly released.

  Thereafter, as shown in FIG. 3D, the movable film 3 is sucked from the primary side space (air pressure chamber) 5 and its internal pressure is made lower than that of the secondary side space (closed space) S to move the movable membrane 3 to the primary side space (air pressure). By deforming upward toward the chamber 5, the distal end surface of the rigid portion 3 a is recessed with respect to the holding surface 1 a and returns to the initial state.

Therefore, in Example 2 shown in FIGS. 3A to 3D, the same effect as that of Example 1 shown in FIGS. 1 to 2 can be obtained, and in addition, adhesion and peeling of the upper substrate A can be performed. There is an advantage that the strength of the adhesive force with the upper substrate A can be easily adjusted by a method different from that of the first embodiment while assisting.
At this time, since the adhesive force generated between the upper substrate A and the adhesive member 4 is proportional to the contact area between the two, the adhesive member 4 adheres to the surface A1 of the upper substrate A by increasing or decreasing the vacuum adsorption force described above. If the surface 4a is elastically deformed to increase or decrease the contact area, the strength of the adhesive force can be adjusted more clearly.

  In the third embodiment, as shown in FIGS. 4A to 4C, a rigid body portion protruding from the central portion of the movable film 3 is used instead of the opening edge of the opening portion 1b instead of the fixing position of the adhesive member 4. The adhesive surface 4a of the adhesive member 4 is changed to the holding surface 1a by the pressure difference between the primary side space (pneumatic chamber) 5 and the secondary side space (closed space) S of the movable film 3 as well as the tip surface of 3a. The upper substrate A is brought into contact with and adhered to the adhesive surface 4a of the adhesive member 4 in a state of being substantially flush with or slightly convex (about 100 μm), and the movable film 3 is moved to the primary side space ( The structure in which the pressure-sensitive adhesive surface 4a of the pressure-sensitive adhesive member 4 is forcibly peeled off from the upper substrate A by being deformed upward toward the air pressure chamber 5 and recessed into the opening 1b is shown in FIGS. Unlike the first embodiment shown in FIG. 1 and the second embodiment shown in FIG. 3, the other configurations are the same as those in the first and second embodiments. Than is.

  That is, when the upper substrate A is set on the holding surface 1a of the upper holding plate 1, the internal pressure of the primary side space (air pressure chamber) 5 and the secondary side space (closed space) S are set as shown in FIG. Whether the adhesive surface 4a of the adhesive member 4 fixed to the distal end surface of the rigid portion 3a is substantially flush with the holding surface 1a by equalizing the pressure and making the movable film 3 flat without being deformed. Or it protrudes a little and it hold | maintains by the adhesive force of this adhesion surface 4a by making it contact with surface A1 of the upper board | substrate A with predetermined pressure.

  Immediately after the superposition of the upper and lower substrates A and B is completed, as shown in FIG. 4B, suction is performed from the primary side space (pneumatic pressure chamber) 5 and the internal pressure is given to the secondary side space (closed space) S. The distal end surface of the rigid body portion 3a is recessed with respect to the holding surface 1a and the distal end surface of the rigid body portion 3a is adhered to the movable film 3 by deforming the movable film 3 upward toward the primary space (pneumatic chamber) 5 at a lower position. The adhesive member 4 is separated from the surface A1 of the upper substrate A together with the member 4, and the adhesive surface 4a of the adhesive member 4 is peeled off from the upper substrate A without difficulty.

  Thereafter, as shown in FIG. 4 (c), the upper holding plate 1 is raised or the lower holding plate 2 is lowered so that they are relatively separated from each other, and then compressed air is supplied to the primary side space (pneumatic chamber) 5. When the movable film 3 is deformed downward by supplying a gas such as the above, the distal end surface of the rigid portion 3a is substantially flush with the holding surface 1a or slightly protrudes to return to the initial state.

In order to obtain the optimum adhesive strength suitable for such an upper substrate A, in the example shown in FIGS. 4A to 4C, the shape of the adhesive member 4 is made to cover the entire tip surface of the rigid portion 3a. Shows the case.
As other examples, as shown in FIG. 5, the shape of the adhesive member 4 is formed in an annular shape in which the outer periphery of the distal end surface of the rigid portion 3a is partially covered, or as shown in FIG. The shape can be formed in a trapezoidal cross section so that the fixed back surface 4b covers the entire tip surface of the rigid portion 3a and the surface area gradually decreases toward the adhesive surface 4a.

  Although not shown, a vacuum suction means 6 comprising a ventilation passage 6a penetrating in the reciprocating direction of the movable film 3 described in the second embodiment shown in FIG. At the time of setting, vacuum suction is performed from the vacuum suction means 6 to hold the upper substrate A by suction. Further, when peeling from the adhesive member 4 as necessary, the vacuum suction means 6 is directed to the surface A1 of the upper substrate A, for example, nitrogen. It is also possible to eject a gas such as a gas.

Accordingly, the third embodiment shown in FIGS. 4 to 6 has the same effect as the first embodiment shown in FIGS. 1 and 2 and the second embodiment shown in FIG. There is an advantage that an optimum adhesive force can be obtained only by changing the adhesive member 4 in accordance with the size and weight of A.
As in the above-described third embodiment, in the first and second embodiments as well, a plurality of types with different surface areas of the adhesive surface 4a are obtained so that an optimum adhesive force can be obtained according to the size and weight of the upper substrate A. The adhesive member 4 may be prepared and exchanged.

  Further, the upper substrate in which the superposition is completed is compared with the first and second embodiments in which the tip surface of the rigid portion 3a protrudes from the holding surface 1a and the upper substrate A is forcibly pushed away from the adhesive member 4 at the time of peeling. Since A does not need to be partially repressurized, there is an advantage that there is no possibility of accidents such as misalignment between the upper and lower substrates A and B, or a deviation in parallelism.

  In Example 4, as shown in FIGS. 7A to 7C, two elastic films 3c and 3d as the movable film 3 are provided in the opening 1b so as to be separated in the vertical direction and substantially parallel to each other. Between these, the first pneumatic chamber 5a is defined as the primary space of the movable film 3, and the second pneumatic chamber 5b is separately defined as the secondary space, and these first pneumatic chambers 5a are formed. The configuration in which the movable films 3c and 3d are simultaneously elastically deformed and reciprocated by controlling the gas supply amount to the second pneumatic chamber 5b and generating a pressure difference therebetween is described above. Unlike the first to third embodiments, the other configurations are the same as those of the first to third embodiments.

  A cylinder portion 7 is inserted into the central portion of the two movable films 3c and 3d, and the rigid portion 3a is connected to and integrated with the lower surface of the cylinder portion 7, and the cylinder is placed in the opening 1b. A partition wall 8 is provided opposite to a substantially intermediate position in the axial direction of the portion 7, and the cylinder portion 7 can be reciprocated in the Z direction with respect to the partition wall 8, and is inserted in an airtight manner so as to hold the partition wall 8. Thus, a first pneumatic chamber 5a is formed on the primary side (back), and a second pneumatic chamber 5b is formed on the secondary side.

  The cylinder portion 7 is provided with a first passage 7a and a second passage 7b that communicate with the divided first pneumatic chamber 5a and the second pneumatic chamber 5b, respectively, and the first passage 7a and the second passage 7b are provided. The internal pressure of the first pneumatic chamber 5a and the second pneumatic chamber 5b is adjusted by supplying air or the like from the outside.

Further, a stopper 7c that engages with each other is provided between the cylinder portion 7 and the opening portion 1b to restrict the reciprocating stroke of the cylinder portion 7 and the rigid portion 3a integrated therewith.
In the case of the illustrated example, a stopper 7 c that engages with the partition wall 8 is provided on the outer periphery of the cylinder portion 7 to regulate the amount of movement of the cylinder portion 7.

  Thereby, as shown in FIGS. 7A and 7C, the gas in the first pneumatic chamber 5a is sucked through the first passage 7a, or the gas is supplied only to the second pneumatic chamber 5b through the second passage 7b. By supplying or making the internal pressure of the first pneumatic chamber 5a lower than the internal pressure of the second pneumatic chamber 5b by the simultaneous progression of these, both of them are movable regardless of the pressure change in the secondary space (closed space) S. The films 3c and 3d are simultaneously deformed upward, and the distal end surface of the rigid portion 3a is kept waiting while being immersed in the opening 1b from the holding surface 1a.

  On the contrary, as shown in FIG. 7B, gas is supplied only to the first pneumatic chamber 5a through the first passage 7a, or the gas in the second pneumatic chamber 5b is sucked through the second passage 7b. Or by making the internal pressure of the first pneumatic chamber 5a higher than the internal pressure of the second pneumatic chamber 5b by the simultaneous progress of these, both the movable films 3c and 3d are simultaneously lowered regardless of the pressure change in the closed space S. The distal end surface of the rigid portion 3a is protruded from the holding surface 1a.

  In the illustrated example, the leading end surface of the rigid portion 3a is immersed in the opening 1b from the holding surface 1a along the opening edge of each opening 1b, as in the first embodiment shown in FIGS. The adhesive surface 4a of the adhesive member 4 that is fixed and the upper substrate A are brought into contact with each other to be adhesively held, and the distal end surface of the rigid body portion 3a is protruded from the holding surface 1a so as to adhere to the adhesive surface 4a of the adhesive member 4 The case where the upper substrate A held is forcibly peeled off is shown.

  As an example other than that, although not shown, like the third embodiment shown in FIGS. 4 to 6, the distal end surface of the rigid body portion 3a is slightly projected from the holding surface 1a so that the distal end surface of the rigid body portion 3a is formed. The adhesive surface 4a of the fixed adhesive member 4 and the upper substrate A are brought into contact with each other to be adhered and held, and the distal end surface of the rigid body portion 3a is inserted into the opening 1b from the holding surface 1a, whereby the adhesive member 4 It is also possible to forcibly peel the adhesive surface 4a from the upper substrate A.

  Although not shown, a vacuum suction means 6 comprising a ventilation passage 6a penetrating in the reciprocating direction of the movable film 3 described in the second embodiment shown in FIG. At the time of setting, vacuum suction is performed from the vacuum suction means 6 to hold the upper substrate A by suction. Further, when peeling from the adhesive member 4 as necessary, the vacuum suction means 6 is directed to the surface A1 of the upper substrate A, for example, nitrogen. It is also possible to eject a gas such as a gas.

  Accordingly, in the fourth embodiment shown in FIGS. 7A to 7C, the same effects as those of the first to third embodiments described above can be obtained, and in addition, the first pneumatic chamber 5a and the second pneumatic pressure can be obtained. Since the reciprocating motion is performed only by the pressure difference in the chamber 5b, there is an advantage that the upper substrate A can be adhered and peeled and released regardless of the pressure change in the secondary space (closed space) S.

  Further, in the illustrated example, a cylindrical body 1d is attached to the opening 1b opened in the upper holding plate 1, and movable films 3c and 3d, a cylinder part 7, a rigid part 3a, and an adhesive member 4 are attached to the cylindrical body 1d. In addition, all components such as the partition wall 8 and the like are integrally provided as a unit, and the cylindrical body 1d can be detachably attached to the opening 1b from an attaching / detaching means (not shown) such as magnetism or a clamp mechanism. For example, when the adhesive force of the adhesive member 4 is reduced, the entire unit can be detached from the holding surface 1a of the upper holding plate 1 so that it can be easily replaced and set at an accurate position.

  In the fifth embodiment, as shown in FIGS. 8 and 9, a cylinder portion 7 integrated with a rigid portion 3a is inserted into the central portion of the movable film 3, and the cylinder portion 7 is inserted into the opening 1b. A partition wall 8 facing the substantially intermediate position in the axial direction is provided, and the cylinder portion 7 can be reciprocated in the Z direction with respect to the partition wall 8 and is inserted in an airtight manner to be supported by the deformation of the movable film 3. The configuration in which the rigid body portion 3a is reciprocated linearly is different from the above-described first to fourth embodiments, and other configurations are the same as those in the first to fourth embodiments.

  In the example shown in FIG. 8, a primary space 5 is defined between the movable film 3 and the partition wall 8 arranged in parallel, and a passage 7 a communicating with the primary space 5 is provided in the cylinder portion 7. A stopper 7c that engages with each other is provided between the cylinder part 7 and the opening 1b to restrict the reciprocating stroke of the cylinder part 7 and the rigid part 3a integrated therewith.

  In the example shown in FIG. 9, two movable films 3c and 3d are provided in the opening 1b so as to be separated from each other in the vertical direction, and a partition wall 8 is disposed substantially in parallel between these movable films 3c and 3d. , 3d and a partition wall 8, a primary space 5 is defined, and a passage 7a communicating with the primary space 5 is provided inside the cylinder portion 7. The cylinder portion 7 and the opening 1b Between them, a stopper 7c that engages with each other is provided to restrict the reciprocating stroke of the cylinder portion 7 and the rigid portion 3a integrated therewith.

  In the illustrated example, the leading end surface of the rigid portion 3a is immersed in the opening 1b from the holding surface 1a along the opening edge of each opening 1b, as in the first embodiment shown in FIGS. The adhesive surface 4a of the adhesive member 4 that is fixed and the upper substrate A are brought into contact with each other to be adhesively held, and the distal end surface of the rigid body portion 3a is protruded from the holding surface 1a so as to adhere to the adhesive surface 4a of the adhesive member 4 The case where the upper substrate A held is forcibly peeled off is shown.

  As an example other than that, although not shown, like the third embodiment shown in FIGS. 4 to 6, the distal end surface of the rigid body portion 3a is slightly projected from the holding surface 1a so that the distal end surface of the rigid body portion 3a is formed. The adhesive surface 4a of the fixed adhesive member 4 and the upper substrate A are brought into contact with each other to be adhered and held, and the distal end surface of the rigid body portion 3a is inserted into the opening 1b from the holding surface 1a, whereby the adhesive member 4 It is also possible to forcibly peel the adhesive surface 4a from the upper substrate A.

  Although not shown, a vacuum suction means 6 comprising a ventilation passage 6a penetrating in the reciprocating direction of the movable film 3 described in the second embodiment shown in FIG. At the time of setting, vacuum suction is performed from the vacuum suction means 6 to hold the upper substrate A by suction. Further, when peeling from the adhesive member 4 as necessary, the vacuum suction means 6 is directed to the surface A1 of the upper substrate A, for example, nitrogen. It is also possible to eject a gas such as a gas.

  Therefore, the fifth embodiment shown in FIGS. 8 and 9 can obtain the same effects as those of the first to fourth embodiments described above, and in addition to the rigid body via the cylinder portion 7 due to the elastic deformation of the movable film 3. Since the part 3a reciprocates in the linear direction, there is an advantage that the reciprocation of the rigid body part 3a is stabilized and the adhesion performance and the peeling performance with the upper substrate A can be improved.

  In the sixth embodiment, as shown in FIGS. 10A to 10C, the movable film 3 is made of an elastic body that can be elongated and deformed in the Z direction, such as a bellows instead of a diaphragm. The configuration in which the urging member 9 linked to the provided rigid body portion 3a is provided and the movable film 3 is constantly urged toward one of the reciprocating movements by the urging member 9 is the above-described first embodiment. Unlike the fifth embodiment, the other configurations are the same as those of the first to fifth embodiments.

  In the illustrated example, the structure is most similar to the fifth embodiment shown in FIG. 8 described above, and the cylinder portion 7 integrated with the rigid portion 3 a is provided at the central portion of the movable film 3, and the holding surface 1 a of the upper holding plate 1. A stopper which is reciprocally movable in a vertical direction with respect to the partition wall 8 provided in the opening 1b opened in the shaft and is inserted in an airtight manner to be supported by the bearing, and is engaged between the cylinder portion 7 and the opening 1b. By providing 7c, the movable body 3 is deformed to reciprocate the rigid body portion 3a linearly over a predetermined stroke.

  The movable film 3 made of an elastic body that can be extended and contracted in the Z direction, such as the bellows, is formed in a cylindrical shape, and both opening ends thereof cannot be dropped into the cylinder portion 7 and the opening portion 1b of the upper holding plate 1, respectively. The cylinder portion 7 is attached so as to surround the outer periphery of the cylinder portion 7, and a bellows portion 3 e that can be expanded and contracted in the vertical direction is formed in the cylindrical portion surrounding the cylinder portion 7.

  A partition wall 8 is provided in the opening 1b so as to oppose a substantially intermediate position in the axial direction of the cylinder portion 7, and the cylinder portion 7 can be reciprocated in the Z direction with respect to the partition wall 8 and is inserted in an airtight manner. A sealed chamber 3f is defined between the partition wall 8 and the bellows portion 3e of the bellows 3, and is partitioned on the primary side (rear side) of the sealed chamber 3f and the partition wall 8 therebetween. A passage 7 a communicating with the primary side space (pneumatic chamber) 5 is provided in the cylinder portion 7.

  Air or the like is supplied from the primary side space (pneumatic chamber) 5 to the sealed chamber 3f via the passage 7a, and the primary side space (pneumatic chamber) 5 and the sealed chamber 3f and the secondary side space (closed space) are supplied. By generating a pressure difference with S, the bellows portion 3e of the bellows 3 expands and contracts to reciprocate the cylinder portion 7 and the rigid portion 3a in the Z direction.

  A stopper 7c that engages with each other is provided between the cylinder part 7 and the opening 1b to restrict the reciprocating stroke of the cylinder part 7 and the rigid part 3a integrated therewith.

  The urging member 9 is, for example, a compression coil spring or the like, and is disposed so as to be vertically extendable along the cylinder portion 7. The primary side space (pneumatic chamber) 5, the sealed chamber 3 f, and the secondary side space are arranged. (Closed space) By extending and contracting in conjunction with the pressure difference of S, the distal end surface of the rigid body part 3a is set so as to protrude from the opening 1b of the holding plate 1 via the cylinder part 7 and the bellows 3. Yes.

  Further, in the case of the illustrated example, the movable film 3 is formed in a bottomed cylindrical shape, and the cylinder portion 7 is inserted into the bottom surface portion of the movable film 3, and is projected from the partition wall 8 and the upper end of the cylinder portion 7. A compression coil spring 9 is interposed between the spring receiving portion 7d and the internal pressure of the primary side space (air pressure chamber) 5 and the sealed chamber 3f is changed to the secondary side space (closed space) S as shown in FIG. The cylinder portion 7 and the rigid body portion 3a are moved upward by extending or deforming the compression coil spring 9 so that the compression coil spring 9 is made lower or substantially equal, and the distal end surface of the rigid body portion 3a is moved from the holding surface 1a to the opening portion 1b. Immerse inside and wait in this immersive state.

  Then, as shown in FIG. 10B, the compression coil spring 9 is compressed and deformed by making the internal pressure of the primary side space (pneumatic chamber) 5 and the sealed chamber 3f higher than the secondary side space (closed space) S. As a result, the cylinder portion 7 and the rigid body portion 3a are moved downward, and the distal end surface of the rigid body portion 3a is projected from the holding surface 1a.

  That is, when the upper substrate A is set, as shown in FIG. 10 (a), the front end surface of the rigid body portion 3a is placed in the opening 1b from the holding surface 1a by the urging force of the compression coil spring 9, and is kept waiting. The adhesive surface 4a of the adhesive member 4 fixed to the opening edge of each opening 1b and the upper substrate A are brought into contact with each other to be adhered and held, and the adhesive holding state of the upper substrate A is maintained by the biasing force of the compression coil spring 9. Yes.

  Immediately after the completion of the overlapping of the upper and lower substrates A and B, as shown in FIG. 10 (b), the distal end surface of the rigid portion 3a is held while the upper holding plate 1 and the lower holding plate 2 are slightly separated as required. By slightly projecting from the surface 1a (about 100 μm), the upper substrate A that is adhesively held on the adhesive surface 4a of the adhesive member 4 is forcibly peeled off.

  After that, as shown in FIG. 10C, when the upper holding plate 1 and the lower holding plate 2 are completely separated and the atmosphere in the secondary side space (closed space) S returns to the atmospheric pressure, the compression coil spring 9 The bellows 3 and the rigid body portion 3a are forcibly moved upward by the restoring force, and the distal end surface of the rigid body portion 3a is immersed in the opening 1b to return to the initial state.

  Further, a vacuum suction means 6 comprising a ventilation path 6a penetrating in the reciprocating direction of the movable film 3 described in the second embodiment shown in FIG. 3 and an air supply source 6b is provided. Vacuum suction from the vacuum suction means 6 holds the upper substrate A by suction, and if necessary, when peeling from the adhesive member 4, a gas such as nitrogen gas is directed from the vacuum suction means 6 to the surface A1 of the upper substrate A. It is preferable to blow out.

  In the illustrated example, the air passage 6a is vertically penetrated through the cylindrical body 1d inserted into the upper holding plate 1 or its opening 1b, and is fixed to the opening edge of the opening 1b. By opening toward the member 4, the adhesive member 4 of the upper holding plate 1 can be adhesively held regardless of the reciprocating movement of the movable film 3 and the waiting for the immersion of the rigid body portion 3 a into the opening portion 1 b. Yes.

Accordingly, in the sixth embodiment shown in FIGS. 10A to 10C, the same effects as those of the first to fifth embodiments described above can be obtained, and in addition, the movable film 3 is moved in the Z direction like a bellows. If it is made of an elastic body that can be stretched and deformed for a long time, it can reciprocate for a long stroke regardless of the diameter of the movable film 3 compared to that made of a diaphragm. There is an advantage that a stroke for reliably performing the separation can be secured.
In particular, in the case of the illustrated example, the stroke for forcibly peeling the adhesive member 4 from the upper substrate A by immersing the distal end surface of the rigid portion 3a into the opening 1b, and the diameter of the movable film 3 being small. But it can be secured.

  Further, if the bellows and the rigid body portion 3a, which are the movable film 3, are pushed downward against the urging force of the urging member 9 due to the pressure difference between the primary side space 5 and the secondary side space S, the upper and lower substrates A, B After the overlapping, the atmosphere in the secondary side space (closed space) S returns to the atmospheric pressure and the pressure difference with the primary side space 5 disappears. Therefore, the restoring force of the biasing member 9 causes the bellows 3 and the rigid body part. There is an advantage that 3a can be forcibly returned in the upward direction, thereby facilitating the pressure control of the pneumatic mechanism.

  In particular, in the substrate bonding machine, in order to ensure that the atmosphere in the closed space S reaches a predetermined degree of vacuum (about 0.5 Pa), first, a single low vacuum pump (not shown) such as a scroll vacuum pump is used. The vacuum level is increased from atmospheric pressure to less than about 100 Pa by operation, and then the vacuum level is increased from about 50 Pa to 0.5 Pa by interlocking with a high vacuum pump (not shown) such as a turbo molecular pump. Is increasing.

Even in such a case, in Example 6, the adhesive holding state of the upper substrate A is maintained by the urging force of the urging member 9 regardless of the pressure difference between the primary side space 5 and the secondary side space S. After the pump is shut off on the pipe, the operation can be switched to the peeling operation of the upper substrate A.
Accordingly, when switching to the peeling operation of the substrate A in this high vacuum atmosphere, even if the air leakage occurs, for example, a hole is formed in the movable film 3, the high vacuum pump is not damaged even if the vacuum level is lowered at a stroke. There is also an advantage of not.

  In the seventh embodiment, as shown in FIGS. 11A to 11C, the primary side space (pneumatic chamber) 5 and the secondary side space (closed space) of the movable film 3 while the urging member 9 is expanded and deformed. ) The movable film 3 made of an elastic body such as bellows is expanded and contracted in the Z direction by a pressure difference with S, and the distal end surface of the rigid body portion 3a is slightly protruded from the holding surface 1a. The pressure-sensitive adhesive surface 4a of the pressure-sensitive adhesive member 4 fixed to the front end surface is brought into contact with the upper substrate A to be held in a pressure-sensitive manner, and the tip surface of the rigid portion 3a is immersed in the opening 1b from the holding surface 1a. The configuration in which the adhesive surface 4a of the member 4 is forcibly peeled off from the upper substrate A is different from the sixth embodiment shown in FIG. 10, and other configurations are the same as the sixth embodiment.

  In the illustrated example, the cylinder portion 7 integrated with the rigid portion 3a is inserted into the partition wall 8 provided in the opening 1b of the upper holding plate 1 so as to be reciprocally movable in the vertical direction. The spring receiving portion 7d protruding from the upper end is reciprocated in the vertical direction with respect to the inner peripheral surface of the opening 1b and is inserted in an airtight manner so as to be supported, and spans between the partition wall 8 and the spring receiving portion 7d. The both open ends of the cylindrical bellows are fixed as the movable film 3 so as not to fall off.

  A sealed chamber 3f is defined between the bellows portion 3e of the bellows 3 and the inner peripheral surface of the opening 1b. The sealed chamber 3f and the spring receiving portion 7d are sandwiched between the primary chamber (back). A primary side space (pneumatic chamber) 5 that is partitioned is communicated by a passage 1e, and between the spring receiving portion 7d and a spring receiving portion 1f formed on the back side of the opening 1b of the upper holding plate 1. The biasing member 9 is provided with a compression coil spring.

  Further, as shown in FIG. 11A, the internal pressure of the primary space (pneumatic chamber) 5 and the sealed chamber 3f is made higher than that of the secondary space (closed space) S, and the compression coil spring 9 is extended and deformed. As a result, the cylinder portion 7 and the rigid body portion 3a are moved downward, and the distal end surface of the rigid body portion 3a is substantially flush with the holding surface 1a or slightly (about 100 μm) protruding.

  And as shown in FIG.11 (b), the internal pressure of the primary side space (pneumatic pressure chamber) 5 and the sealing chamber 3f is made higher than the secondary side space (closed space) S, and the compression coil spring 9 is compressed and deformed. As a result, the cylinder portion 7 and the rigid body portion 3a are moved upward, and the tip surface of the rigid body portion 3a is slightly recessed (about −500 μm) from the holding surface 1a into the opening 1b.

  That is, when the upper substrate A is set, as shown in FIG. 11 (a), the urging force of the compression coil spring 9 causes the distal end surface of the rigid portion 3a to be moved in the same manner as in the third embodiment shown in FIGS. The adhesive surface 4a and the upper substrate A of the adhesive member 4 fixed to the distal end surface of the rigid body portion 3a are made to stand by with the holding surface 1a substantially flush with the holding surface 1a or slightly protruding (about 100 μm). The upper substrate A is kept in the adhesive holding state by the urging force of the compression coil spring 9.

  Immediately after the completion of the overlapping of the upper and lower substrates A and B, as shown in FIG. 11 (b), the distal end surface of the rigid portion 3a is slightly immersed (about −500 μm) from the holding surface 1a into the opening 1b. The adhesive surface 4a of the adhesive member 4 is forcibly separated from the upper substrate A and is peeled off.

  After that, as shown in FIG. 11C, when the upper holding plate 1 and the lower holding plate 2 are relatively separated from each other and the atmosphere in the secondary side space (closed space) S returns to the atmospheric pressure, the compression coil spring 9 Due to the restoring force, the distal end surface of the rigid body portion 3a is made to be substantially flush with the holding surface 1a or slightly convex so as to return to the initial state.

  In addition, a vacuum suction means 6 comprising an air passage 6a penetrating the rigid body portion 3a and the cylinder portion 7 and an air supply source 6b in the reciprocating direction of the movable film 3 described in the second embodiment shown in FIG. When the upper substrate A is set, the upper substrate A is sucked and held by the vacuum suction means 6 and further, when peeled from the adhesive member 4 as necessary, the surface A1 of the upper substrate A from the vacuum suction means 6 For example, a gas such as nitrogen gas is preferably blown out.

  Therefore, in Example 7 shown in FIGS. 11A to 11C, the same effects as those of Example 6 described above can be obtained, and in addition, when the upper substrate A is peeled off, the distal end surface of the rigid portion 3a is held. Compared with the sixth embodiment in which the upper substrate A is protruded from the surface 1a and forcedly peeled off from the adhesive member 4, it is not necessary to partially pressurize the upper substrate A that has been overlapped. There is an advantage that there is no possibility of accidents such as misalignment of each other or inaccuracy in parallelism.

Although the case where the adhesive chuck device of the present invention is provided in a substrate laminating machine for adhering and holding a glass substrate such as a liquid crystal display (LCD) panel is shown, the present invention is not limited to this. You may arrange | position to board | substrate assembly apparatuses other than a matching machine, the board | substrate conveyance apparatus which conveys a board | substrate, and may adhere | attach and hold | maintain board | substrates other than the glass substrate for LCD panels.
Furthermore, although the board | substrate bonding machine which bonds the board | substrates A and B in the vacuum was demonstrated, it is not limited to this, The board | substrate bonding machine which bonds the board | substrates A and B in air | atmosphere may be sufficient. The same effect as a vacuum bonding machine can be obtained.

  Moreover, in the previous embodiment, the upper substrate A was adhesively held and peeled open by opening the opening 1b only on the holding surface 1a of the upper holding plate 1 and arranging the movable film 3, but this Without being limited, similarly, the holding surface 2a of the lower holding plate 2 similarly opens the opening facing the surface B1 of the lower substrate B, and arranges the movable film, thereby holding the lower substrate B in adhesion and releasing it. You can go.

  Further, only the fourth embodiment shown in FIG. 7 and the fifth embodiment shown in FIG. 8 and FIG. 9 and the sixth embodiment shown in FIG. 10 are fitted with the cylindrical body 1d in the opening 1b opened in the upper holding plate 1. The case where the movable body 3c, 3d, 3 and all the components such as the adhesive member 4 are integrally provided as a unit is illustrated in the cylindrical body 1d. However, the present invention is not limited to this. Similarly, in the embodiment, a cylindrical body (not shown) is attached to the opening 1b opened in the upper holding plate 1, and all the components such as the movable film 3 and the adhesive member 4 are attached to the cylindrical body. The adhesive member 4 can be integrated into a unit and attached to the opening 1b by detachably attaching the cylindrical body from an attaching / detaching means (not shown) such as a magnetism or a clamp mechanism. When lowered, the entire unit is detached from the holding surface 1a of the upper holding plate 1 It may be on to replace Te.

It is a partial vertical front view which shows Example 1 of the adhesion chuck apparatus of this invention, and the operation process at the time of being arrange | positioned at a board | substrate bonding machine is shown to (a)-(c). (A)-(b) is the elements on larger scale which show the modification of the support method of a movable film, (c) is the elements on larger scale which show the modification of a movable film. It is a partial longitudinal front view which shows Example 2 of the adhesion chuck apparatus of this invention, and the operation process at the time of being arrange | positioned at a board | substrate bonding machine is shown to (a)-(d). It is a partial vertical front view which shows Example 3 of the adhesion chuck apparatus of this invention, and the operation process at the time of being arrange | positioned at a board | substrate bonding machine is shown to (a)-(c). It is a partial expanded sectional view which shows the modification of an adhesive member. It is a partial expanded sectional view which shows the modification of an adhesive member. It is a partial vertical front view which shows Example 4 of the adhesion chuck apparatus of this invention, and the operation process at the time of being arrange | positioned at a board | substrate bonding machine is shown to (a)-(c). It is a partial expanded longitudinal front view which shows Example 5 of the adhesion chuck apparatus of this invention. It is a partial expanded longitudinal front view which shows Example 5 of the adhesion chuck apparatus of this invention. It is a partial vertical front view which shows Example 6 of the adhesion chuck apparatus of this invention, and the operation process at the time of being arrange | positioned at a board | substrate bonding machine is shown to (a)-(c). It is a partial vertical front view which shows Example 7 of the adhesion chuck apparatus of this invention, and the operation process at the time of being arrange | positioned at a board | substrate bonding machine is shown to (a)-(c).

Explanation of symbols

A board (upper board) A1 surface B board (lower board) B1 surface C annular adhesive S secondary space (closed space)
DESCRIPTION OF SYMBOLS 1 Upper holding plate (upper surface plate) 1a Holding surface 1b Opening part 1c Holding member 1d Cylindrical body 1e Passage 1f Spring receiving part 2 Lower holding plate (Lower surface plate)
2a Holding surface 3 Movable membrane 3a Rigid body portion 3b Engaging portion 3c, 3d Movable membrane 3e Bellows portion 3f Sealed chamber 4 Adhesive member 4a Adhesive surface 4b Adhering back surface 5 Primary side space (air pressure chamber) 5a First pneumatic chamber 5b First 2 Pneumatic chamber 6 Vacuum adsorbing means 6a Ventilation path 6b Air supply source 7 Cylinder portion 7a First passage 7b Second passage 7c Stopper 7d Spring receiving portion 8 Bulkhead 9 Energizing member

Claims (7)

In the adhesive chuck device that holds the substrate detachably on the holding plate with adhesive,
Provided on the substrate side of the holding plate is a movable film that can be deformed in a direction intersecting the substrate side surface in an opening provided on the side surface of the substrate, and an adhesive member that holds the adhesive while facing the substrate. The movable film is reciprocated by the pressure difference between the primary side space and the secondary side space to bring the adhesive surface of the adhesive member into contact with the substrate and adhere to each other. Adhesive chuck device. The rigid body portion is provided on a part of the movable film so as to face the substrate, and the distal end surface of the rigid body portion protrudes and retracts from the opening of the holding plate by the reciprocating motion of the movable film, and contacts the substrate. Adhesive chuck device. The pressure-sensitive adhesive chuck device according to claim 1, wherein an air passage that penetrates the movable film in a reciprocating direction is opened to face the substrate, and the substrate is sucked and adsorbed from the air passage. A cylinder part integrated with the rigid part is provided on the movable film, and a partition wall facing the cylinder part is provided in an opening formed on the side surface of the substrate, and the cylinder part is reciprocably inserted into the partition wall. 4. The adhesive chuck device according to claim 2 or 3, wherein the adhesive chuck device is bearing. Two movable films separated from each other are provided in the opening, and a cylinder part is inserted into these movable films, and the first pneumatic chamber and the second pneumatic chamber are separately partitioned between the two movable films. The adhesive chuck device according to claim 4, wherein the movable chuck is formed and reciprocated by simultaneously deforming both movable films by a pressure difference between the first pneumatic chamber and the second pneumatic chamber. 6. The adhesive chuck device according to 1, 2, 3, 4 or 5, wherein the movable film is formed of a bellows that can be deformed in a direction intersecting a substrate side surface of the holding plate. The biasing member linked with the said movable film | membrane was provided, and this movable member urged | biased this movable film | membrane toward any one of the reciprocation. Adhesive chuck device.

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