WO2014102913A1

WO2014102913A1 - Actuator and adhesive chuck device

Info

Publication number: WO2014102913A1
Application number: PCT/JP2012/083536
Authority: WO
Inventors: 義和大谷; 謙司佐藤; 浩源; 一成青木; 勇二信安
Original assignee: 信越エンジニアリング株式会社; 入江工研株式会社
Priority date: 2012-12-25
Filing date: 2012-12-25
Publication date: 2014-07-03
Also published as: TW201442145A; CN104919189A; KR101991990B1; TWI598991B; KR20150099607A; JPWO2014102913A1; JP5395313B1; CN104919189B

Abstract

The purpose of the present invention is to drive a rotor in a contactless state without core deviation. A plurality of metal bellows (11, 11') having accordion-shaped sections (11a, 11a') are disposed concentrically one inside the other an expansion/contraction section (10), the inner peripheral ends (11b, 11b') and the outer peripheral ends (11c, 11c') of the accordion-shaped sections (11a, 11a') of the metal bellows (11, 11') are fixed by the expansion/contraction deformation of the metal bellows (11, 11'). The entirety of the expansion/contraction section (10) does not deform at all in the X,Y or θ direction other than the direction of expansion/contraction deformation (the Z direction), and thus a rotor (40) disposed across one end of the metal bellows (11, 11') with a rising/falling section (20) interposed therebetween can move reciprocally, without core deviation, in the X, Y and θ directions other than the direction of expansion/contraction deformation (the Z direction) within the central space (12) of the expansion/contraction section (10) and a through-hole (31) in a base section (30).

Description

Actuator and adhesive chuck device

The present invention relates to a plate-like workpiece such as a glass substrate or a resin substrate in the manufacturing process of a flat panel display (FPD) such as a liquid crystal display (LCD), an organic EL display (OLED), a plasma display (PDP), or a flexible display. Used for substrate assembly apparatuses including a substrate laminating machine for holding and adhering substrates together, and substrate conveying apparatuses for conveying an insulator such as a substrate, a workpiece such as a conductor or a semiconductor wafer (object to be processed), etc. The present invention relates to an actuator and an adhesive chuck device provided with the actuator.

Conventionally, as this type of adhesive chuck device, a plurality of apertures are provided in the upper pressure plate, actuators are provided in the apertures, and an adhesive member is provided at the tip of a shaft extending downward from the actuator. By operation, the adhesive member moves up and down in the opening, the upper substrate is held by the adhesive member, the upper and lower substrates are aligned within the vacuum chamber unit, and then bonded together. When peeling the member, if the adhesive member is raised (retracted) in the opening by the actuator, the peripheral edge of the opening of the pressure plate prevents the upper substrate from moving, so the substrate that easily separates the adhesive member from the upper substrate There is an assembly device (see, for example, Patent Document 1).
Also, a plurality of openings are provided in the upper pressure plate, rotation actuators and vertical drive actuators are provided in these openings, and an adhesive member is attached to the tip of the rotating shaft extending downward from the rotation actuator, In the chamber unit, bonding is performed while aligning the upper and lower substrates, and when the adhesive member is retracted into the pressure plate, the adhesive member is twisted or twisted with respect to the substrate surface by a rotation actuator. There is also a board assembly device that is retracted from the upper board by an actuator for driving up and down to peel off the adhesive member from the upper board (see, for example, Patent Document 2).

JP 2001-133745 A (5th page, FIG. 7) JP 2003-273508 A (page 3-5, FIG. 1-5)

In a flat panel display substrate bonding machine or the like, a pair of substrates are aligned with each other with high accuracy on the order of microns, and the substrates are bonded with high accuracy while maintaining these alignment states.
However, in such a conventional adhesive chuck device and the actuator used therefor, in the case of Patent Document 1, when the shaft extending from the actuator is driven, the shaft slightly blurs in the direction intersecting the axial direction. Therefore, when the adhesive member is peeled from the upper substrate after the bonding of the upper and lower substrates is completed, if the shaft and the adhesive member are lifted (retracted) by the actuator, the upper substrate is displaced from the lower substrate due to the shaft core blurring. I will wake you up.
Accordingly, there is a problem that the bonding accuracy between the substrates is lowered and the yield is deteriorated.
In the case of Patent Document 2, when the adhesive member is peeled from the upper substrate after completion of the bonding of the upper and lower substrates, the rotary shaft is retracted while being twisted or twisted with the rotation actuator, and then the adhesive member is retracted. There is a problem that the upper substrate is likely to be displaced with respect to the lower substrate as the member rotates.
Furthermore, in the case of Patent Document 2, an annular sealing material is brought into contact with the outer peripheral surface of the rotating shaft, so that the rotating shaft is sealed up and down and rotatable, and at the same time, shaft rotation of the rotating shaft is prevented. However, since the rotating shaft and the sealing material rub each time the rotating shaft moves up and down and rotates, dust is easily generated due to wear.
As a result, when the substrates are bonded together in a sealed space such as a vacuum chamber unit, there is an adverse effect such as dust generated due to wear of the rotating shaft and the sealing material entering the bonding position between the substrates. There was a problem of fear.

The present invention has an object to deal with such a problem, and an object of the present invention is to drive the movable element in a non-contact state without causing a core blur.

In order to achieve such an object, the actuator according to the present invention includes a plurality of metal bellows having bellows portions with inner peripheral ends and outer peripheral ends fixed alternately. A base part having a through hole provided over the other end of the metal bellows, and a base part extending from the lift part through the central space of the telescopic part. And a movable element provided toward the through hole, wherein the movable element is reciprocated in the through hole of the base portion in accordance with the expansion and contraction of the expansion and contraction part.

In the actuator according to the present invention having the above-described features, a plurality of metal bellows having bellows portions are concentrically arranged inward and outward as expansion / contraction portions, and the bellows portions of the metal bellows are respectively expanded and contracted by expanding and deforming the metal bellows. Since the peripheral end and the outer peripheral end are alternately fixed, and the entire expansion / contraction part is not deformed at all in directions other than the expansion / contraction deformation direction, the mover is connected to the expansion / contraction part via an elevating part provided over one end of the metal bellows. In the central space and the through-hole of the base, it reciprocates in the direction other than the expansion / contraction deformation direction without causing a core blur.
Therefore, the mover can be driven in a non-contact state without causing a core blur.
As a result, the accuracy of bonding between substrates decreases even when used for adhesion peeling after completion of bonding in a flat panel display substrate bonding machine, etc., compared to conventional actuators that are prone to core blurring due to shaft drive. Therefore, the yield can be improved.
Furthermore, compared to conventional actuators that rub against the seal material when the shaft is driven, dust is not generated when the mover is driven, so substrates are bonded together in a sealed space such as a vacuum chamber unit. However, it is possible to prevent adverse effects such as foreign matters such as dust entering the bonding position between the substrates. In addition, since there is no sealing portion that wears due to rubbing, it is excellent in stability without causing wobbling even when used for a long time.
In particular, when a welded bellows in which the inner and outer edges of a large number of thin metal plates are alternately welded as a plurality of metal bellows arranged concentrically inward and outward, it expands and contracts in the axial direction. Although it deforms, it is highly rigid in the other directions and does not move and does not move, and by arranging multiple welding bellows concentrically inside and outside, the rigidity is further increased, thus completely preventing core movement of the mover it can.

BRIEF DESCRIPTION OF THE DRAWINGS It is explanatory drawing which shows the whole structure of the actuator which concerns on embodiment of this invention, and an adhesion chuck apparatus, (a) is a longitudinal front view which shows the state before a drive, (b) is a longitudinal front view which shows the state after a drive. is there. FIG. 2 is a cross-sectional plan view taken along line (2)-(2) in FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
The actuator A according to the embodiment of the present invention is a prime mover used for a substrate assembly apparatus, a substrate transfer apparatus, and the like including a substrate bonding machine for flat panel displays.
As shown in FIGS. 1 and 2, a plurality of actuators A are arranged at predetermined intervals so as to face a plate-like workpiece W made of a glass substrate, a resin substrate, or the like. Such an adhesive chuck device is configured.
More specifically, the actuator A according to the embodiment of the present invention can be stretched and deformed in the Z direction in which a plurality of metal bellows 11 and 11 'having

bellows

11a and 11a' are concentrically arranged inward and outward, which can be deformed and stretched. Elastic part 10, elevating part 20 provided over one end of

metal bellows

11, 11 ′, base part 30 provided over the other end of

metal bellows

11, 11 ′, and elongating part 20 to elongating part 10. The movable element 40 provided toward the center of the base 30 through the central space 12 is provided as a main component.

The plurality of

metal bellows

11 and 11 ′ that become the expansion and contraction portion 10 is formed by corrugated cross-sections by alternately fixing the inner

peripheral ends

11 b and 11 b ′ and the outer

peripheral ends

11 c and 11 c ′ of a large number of thin metal plates that are punched into a ring shape. The

bellows parts

11a and 11a 'that can be expanded and contracted are formed by joining together.
The stretchable portion 10 is provided with a plurality of metal bellows 11 and 11 'having

bellows

11a and 11a' having different diameters, and the centers of the

bellows

11a and 11a 'are located at the same position. It is comprised by arrange | positioning so that it may become.
In the plurality of

metal bellows

11, 11 ′, a central space 12 is defined in a bellows portion 11 a having a minimum diameter that is the center of the stretchable portion 10. Between the large and

small bellows portions

11a and 11a 'of the plurality of metal bellows 11 and 11', an annular space 13 having excellent airtightness is defined.

As a specific example of the

metal bellows

11, 11 ′, it is preferable to use a welded bellows in which inner

peripheral ends

11b, 11b ′ and outer

peripheral ends

11c, 11c ′ of a large number of thin metal plates are welded alternately.
Further, in the example shown in FIGS. 1A and 1B and FIG. 2, a plurality of

cylindrical metal bellows

11 and 11 ′ are arranged concentrically in the radial direction.
Although not shown in the drawings as other examples, the metal bellows 11 and 11 'are formed in a rectangular tube shape other than a cylindrical shape, or three or more metal bellows 11 and 11' are located at the same center. It is also possible to arrange so that.

The elevating part 20 is formed of a plate material or other shape member that is connected in an airtight manner over one end (upper end) of the metal bellows 11, 11 '. It is supported so that it can reciprocate in the direction.
Furthermore, it is preferable that the raising / lowering part 20 restrict | limits the expansion-contraction deformation range of the metal bellows 11 and 11 'used as the expansion-contraction part 10 by making it contact with another member.

The base 30 is configured by a plate member or other shape member that is connected in an airtight manner over the other ends (lower ends) of the

metal bellows

11 and 11 ′, and supports the

metal bellows

11 and 11 ′.
A through hole 31 through which a later-described movable element 40 is inserted is opened at the center of the base 30.
Furthermore, it is preferable that a through hole 32 communicating with the annular space 13 formed between the plurality of

metal bellows

11, 11 ′ (the

bellows portions

11 a, 11 a ′) is formed in the base 30.

The mover 40 is composed of a bar having a circular cross section extending from the center of the elevating unit 20 to the through hole 31 of the base 30 through the central space 12 that is the center of the expandable unit 10 or other shapes such as a rectangular cross section. As the metal bellows 11, 11 ′, which becomes the expansion / contraction part 10, is reciprocated in the Z direction within the central space 12 of the expansion / contraction part 10 and the through hole 31 of the base part 30 in conjunction with the lifting / lowering part 20. Suspended.
Further, the mover 40 is arranged so that the tip 41 opposite to the connecting portion with the elevating part 20 is opposed to the workpiece W, and is reciprocated in the Z direction by the expansion and contraction of the metal bellows 11, 11 ′. It arrange | positions so that the front-end | tip 41 may contact the surface W1 of the workpiece | work W indirectly or directly.
In the example shown in FIGS. 1A and 1B, an adhesive member 70, which will be described later, is fixed to the tip 41 of the mover 40, and the workpiece W is brought into contact with the surface W <b> 1 of the workpiece W via the adhesive member 70. Removably held.
Although not shown as another example, the adhesive member 70 may not be fixed to the tip 41 of the mover 40, and the tip 41 may be pushed and moved in surface contact with the surface W1 of the workpiece W.

Furthermore, the actuator A according to the embodiment of the present invention further includes a stopper 50 provided so that the elevating part 20 comes into contact with the expansion and contraction of the metal bellows 11, 11 ′ that becomes the elongating part 10 so as to face the elevating part 20. It is preferable that the movable element 40 is configured to stop moving when the elevating unit 20 comes into contact with the stopper 50.
That is, by moving the elevating part 20 in the Z direction in accordance with the expansion and contraction of the metal bellows 11, 11 ′ that becomes the elongating and contracting part 10, the elevating part 20 abuts against the stopper 50 and the moving range of the mover 40 is limited. The
The stopper 50 has a lower limit stopper 51a for setting the lower limit positions of the elevating unit 20 and the mover 40, and an upper limit stopper 52a for setting the upper limit positions of the elevating unit 20 and the mover 40.
The lower limit stopper 51a is stepped along the inner surface of the side wall 51 provided so as to surround the outer periphery of the metal bellows 11 and 11 'serving as the expansion / contraction part 10, as shown in FIGS. The movable element 40 is configured to stop moving downward by contacting the lower surface 21 of the elevating unit 20.
The upper limit stopper 52a is planar along the lower surface of the top plate 52 provided so as to cover the elevating part 20 across the upper end surface of the side wall part 51 in the cases shown in FIGS. The upper part 22 of the raising / lowering part 20 is made to contact | abut, and it is comprised so that the upward movement of the needle | mover 40 may be stopped.

Furthermore, the actuator A according to the embodiment of the present invention is for supplying the driving fluid F toward the annular space 13 formed between the plurality of metal bellows 11, 11 ′ (the

bellows portions

11a, 11a ′). It is preferable that the apparatus further includes a supply unit 61 and is configured to simultaneously expand and contract the metal bellows 11 and 11 ′ by supplying the driving fluid F from the supply unit 61 to the annular space 13.
That is, by supplying the driving fluid F from the supply unit 61 to the annular space 13, the metal bellows 11, 11 ′ serving as the expansion and contraction unit 10 simultaneously expands and deforms, and conversely, the driving fluid F is supplied from the annular space 13. By returning to the supply unit 61, the metal bellows 11 and 11 'are simultaneously shortened and deformed.
The supply unit 61 includes a supply source (not shown) that stores a driving fluid F made of a gas or liquid such as compressed air, and an annular space 13 between the supply source of the driving fluid F and the metal bellows 11, 11 ′. A supply path 61a formed over the supply path 61a, and a drive means such as a pump for supplying the drive fluid F only in one direction over the supply path 61a through the supply path 61a, or in and out in both directions (illustrated) Not).

In the example shown in FIGS. 1A and 1B and FIG. 2, as the supply unit 61, a supply path 61 a is defined in the inside of a chuck body 60 of an adhesive chuck device described later, and the penetration formed in the base 30. The supply path 61 a of the supply unit 61 and the annular space 13 communicate with each other through the hole 32.
In the state shown in FIG. 1A, the

bellows portions

11a and 11a ′ are compressed and deformed in the Z direction by the weight of the metal bellows 11 and 11 ′ and the lifting and lowering portion 20 and the elastic force of the metal bellows 11 and 11 ′. Since the elevating part 20 contacts the stopper 50 (lower limit stopper 51a), the mover 40 stops at the lower limit.
In the state shown in FIG. 1B, the driving means of the supply unit 61 is operated, and the driving fluid F is supplied from the supply source to the annular space 13 through the supply path 61a, and the internal pressure of the annular space 13 increases. The metal bellows 11 and 11 'are simultaneously expanded in the Z direction to expand and contract, and the elevating part 20 comes into contact with the stopper 50 (upper limit stopper 52a), so that the movable element 40 stops at the upper limit.
After that, the driving fluid F in the annular space 13 flows back to the supply source via the supply path 61a or is removed from another escape passage (not shown), and the internal pressure of the annular space 13 is lowered, whereby the bellows portion 11a. , 11a ′ are compressed and deformed in the Z direction, and returned to the state shown in FIG.
Although not shown as another example, instead of the supply path 61a in the chuck main body 60 and the through hole 32 of the base portion 30, the bellows portion 11a 'of the metal bellows 11' disposed on the outside and the lifting portion 20 are It is also possible to supply the driving fluid F to the annular space 13 as the supply unit 61 regardless of the chuck main body 60 of the adhesive chuck device, such as by directly connecting the supply pipeline of the supply unit 61 to the pipe.

According to the actuator A according to the embodiment of the present invention, since the plurality of metal bellows 11, 11 ′ having the

bellows portions

11 a, 11 a ′ are arranged concentrically inward and outward as the expansion / contraction part 10, the metal bellows 11 11 ′, the

bellows portions

11a, 11a ′ of the metal bellows 11, 11 ′ are alternately fixed to the inner peripheral ends 11b, 11b ′ and the outer peripheral ends 11c, 11c ′, respectively. 10 does not deform at all in the XYθ directions other than the expansion / contraction deformation direction (Z direction).
As a result, the movable element 40 moves in the expansion / contraction deformation direction (Z direction) in the central space 12 of the expansion / contraction section 10 and the through hole 31 of the base section 30 via the elevating / lowering section 20 provided over one end of the metal bellows 11, 11 ′. It reciprocates without swaying in the XYθ directions other than).
Therefore, the mover 40 can be driven without contact with the core in a non-contact state.
In particular, as a plurality of metal bellows 11 and 11 ′ arranged concentrically inside and outside, a welded bellows in which inner peripheral ends 11 b and 11 b ′ and outer peripheral ends 11 c and 11 c ′ of a large number of thin metal plates are alternately welded, respectively. When used, it expands and contracts in the axial direction (Z direction), but the other XYθ directions are rigid and do not move and do not move, and a plurality of welding bellows are arranged concentrically in and out. In this way, the rigidity is further increased, so that the core blur of the mover 40 can be completely prevented.

In addition, a stopper 50 is provided so as to be opposed to the elevating unit 20 so that the elevating unit 20 comes into contact with expansion / contraction deformation of the expansion / contraction unit 10, and when the elevating unit 20 comes into contact with the stopper 50, the mover 40 stops moving. When configured to move, the elevating unit 20 moves with the expansion / contraction deformation of the expansion / contraction unit 10, so that the elevating unit 20 abuts against the stopper 50 and the moving range of the movable element 40 is limited.
Therefore, the movement range of the mover 40 can be limited with a simple structure.
As a result, it is possible to prevent the mover 40 from colliding with the workpiece W and the like, so that no damage accident occurs and the safety can be improved.

In addition, a supply unit 61 that supplies the driving fluid F toward the annular space 13 formed between the metal bellows 11 and 11 ′ is further provided, and the driving fluid F is supplied from the supply unit 61 to the annular space 13. Thus, when the metal bellows 11, 11 ′ are configured to be expanded and contracted simultaneously, the metal bellows 11, 11 ′ is simultaneously expanded and deformed by supplying the driving fluid F from the supply unit 61 to the annular space 13. On the contrary, by returning the driving fluid F from the annular space 13 to the supply unit 61, the metal bellows 11 and 11 'are simultaneously shortened and deformed.
Therefore, the mover 40 can be smoothly reciprocated without causing a core shift with a simple structure.
As a result, a stable operation can be obtained even when used for a long period of time, and the operability is excellent.

Then, in the adhesive chuck device according to the embodiment of the present invention using such an actuator A, a plurality of actuators A are distributed on the chuck body 60 so as to face the workpiece W at predetermined intervals. The workpiece W is configured to be detachably held through the gap. Further, the adhesive chuck device is provided in a vacuum atmosphere, an atmosphere that reaches a predetermined degree of vacuum, or an air atmosphere.
In the example shown in FIGS. 1A, 1B, and 2, only one actuator A is arranged for the chuck body 60 of the adhesive chuck device, but other actuators A are also arranged in the same manner. Therefore, the other actuator A is omitted in the drawing.
The chuck main body 60 is formed of a platen having a thickness that does not bend and deform with a rigid body such as metal or ceramics, for example, and communicates with at least the through hole 31 of the base 30 of the actuator A and the movable element 40 passes therethrough. A plurality of communication holes 62 are provided.

In accordance with the expansion / contraction deformation of the metal bellows 11, 11 ′ serving as the expansion / contraction part 10, the actuator A causes the tips 41 of all the movers 40 to simultaneously protrude from the holding surface 60 a of the chuck main body 60 and contact the surface W 1 of the workpiece W, respectively. With the shortening deformation of the metal bellows 11, 11 ′ that becomes the expansion / contraction part 10, the tips 41 of all the movers 40 are controlled to be simultaneously immersed in the chuck body 60 and separated from the surface W 1 of the workpiece W, respectively. .
In other words, in the plurality of actuators A distributed in the chuck body 60, the metal bellows 11 and 11 'serving as the expansion / contraction part 10 are expanded and contracted, so that the tips 41 of all the movers 40 penetrate the communication holes 62. Simultaneously projecting from the holding surface 60a of the chuck main body 60, and each of the tips 41 of the mover 40 comes into contact with the surface W1 of the workpiece W, the adhesive holding by the adhesive member 70 is performed. By shortening and deforming the metal bellows 11, 11 ′, all the tips 41 of the movers 40 are simultaneously immersed in the communication holes 62 of the chuck body 60, and each of the tips 41 of the movers 40 is a surface W 1 of the workpiece W. The separation and release of the adhesive member 70 and the like are performed by moving away from.

In the example shown in FIGS. 1A and 1B and FIG. 2, a sheet-like adhesive member 70 is provided at the tip 41 of the mover 40 of each of the actuators A.
In the state shown in FIG. 1 (a), the adhesive member 70 projects and moves simultaneously from the holding surface 60 a of the chuck body 60 as the mover 40 moves downward due to the shortening deformation of the telescopic portion 10, and all the adhesive members 70 are moved. Are simultaneously adhered to the surface W1 of the workpiece W to hold the workpiece W in an adhesive state.
In the state shown in FIG. 1B, the adhesive member 70 is simultaneously immersed and moved into the communication hole 62 of the chuck body 60 as the mover 40 moves upward due to the expansion and deformation of the expansion / contraction part 10, and all the adhesive members 70 is simultaneously peeled off from the surface W1 of the workpiece W to open the workpiece W.
Although not shown in the drawings as another example, the adhesive member 70 is not provided at the tip 41 of the mover 40, but the adhesive member 70 is provided at or near the peripheral edge of the communication hole 62 in the holding surface 60a of the chuck body 60. In accordance with the movement of the movable element 40 due to the tenth deformation, the adhesive member 70 of the chuck main body 60 is adhered to the surface W1 of the work W to hold the work W, and the protrusion of the movable element 40 due to the shortening deformation of the expansion / contraction part 10 occurs. Along with the movement, the surface W1 of the workpiece W can be pushed away from the adhesive member 70 of the chuck body 60 to release the workpiece W.

According to such an adhesive chuck device according to the embodiment of the present invention, in the plurality of actuators A distributed in the chuck main body 60, the extensible portions 10 are expanded and deformed, whereby the tips of all the movable elements 40 are connected to the communication holes. By sticking out the holding surface 60a of the chuck body 60 through the 62 and contacting each of the workpieces W, adhesion holding by the adhesive member 70 is performed, and conversely, the expansion / contraction part 10 is shortened and deformed. The tips of all the movers 40 are simultaneously immersed in the communication holes 62 of the chuck main body 60, and each of them is separated from the workpiece W, so that the release from the adhesive member 70 is performed.
Therefore, the workpiece W can be detachably adhered and held without the core blur by the plurality of movers 40.
As a result, compared to conventional adhesive chuck devices that are prone to core blurring when the shaft is driven by an actuator, even when used for adhesive peeling after completion of bonding in a flat panel display substrate bonding machine, The bonding accuracy is not lowered, and the yield can be improved.
Further, as compared with the conventional adhesive chuck device in which the shaft is driven by the actuator and rubbing with the sealing material, dust is not generated when the mover 40 is driven, so that the substrates are placed in a sealed space such as a vacuum chamber unit. Even if bonding is performed, it is possible to prevent adverse effects such as foreign matters such as dust entering the bonding position between the substrates.

Next, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, as shown in FIGS. 1A and 1B and FIG. 2, the adhesive chuck device hermetically joins the base portions 30 of the plurality of actuators A to the chuck body 60, respectively. Are attached so that the supply portion 61 of the driving fluid F formed on the base portion 30 of the actuator A and the through hole 32 provided to communicate with the annular space 13 communicate with the base portion 30 of the actuator A. This is a network of the driving fluid F that becomes the driving path.
The chuck body 60 of the adhesive chuck device is attached to the supply portion 61 of the driving fluid F formed therein, a plurality of attachment portions 63 attached so that the base portion 30 of the actuator A is in contact, and the attachment portion 63. A plurality of communication holes 62 each opened so as to communicate with the through hole 31 of the base 30 of the actuator A and the supply unit 61 communicated with the through hole 32 of the base 30 of the actuator A attached to the attachment part 63. Thus, a plurality of supply holes 64 are provided.

The supply path 61a in the supply section 61 for the driving fluid F is formed so as to connect a plurality of actuators A attached to the chuck body 60, and a part of the supply path 61a is connected to a drive means such as a pump. A pipe is connected to the supply source of the driving fluid F.
The attachment portion 63 of the actuator A is a fixing means for positioning the base portion 30 of the actuator A with respect to the chuck body 60.
In the example shown in FIGS. 1A and 1B and FIG. 2, as the attachment portion 63, a plurality of locking holes 63 a opened in the chuck body 60 and the base 30 of the actuator A are inserted from the base portion 30 toward the locking holes 63 a. And a fastener 63b such as a screw or a bolt to be engaged. The base 63 of the actuator A is connected to the chuck main body 60 in an airtight manner by engaging (screwing) the fastener 63b inserted through the base 30 of the actuator A into the locking hole 63a.
Although not shown as another example, the base 30 of the actuator A is connected to the chuck body 60 in an airtight manner by using other connecting members instead of the locking holes 63a and the fasteners 63b as the mounting portions 63. It is also possible to do.

According to such an adhesive chuck device according to the embodiment of the present invention, the plurality of actuators A are attached to the plurality of attachment portions 63 in the chuck body 60 so that the respective base portions 30 are in contact with each other. The through hole 31 of the base 30 communicates with the communication hole 62 of the chuck main body 60, and the through hole 32 of the base 30 of each actuator A communicates with the supply hole 64 of the chuck main body 60, and is driven from the supply unit 61 of the chuck main body 60. When the working fluid F is supplied to the annular space 13 between the metal bellows 11 and 11 ', the metal bellows 11 and 11' of each actuator A is extended and deformed.
Therefore, it is possible to simultaneously install a plurality of actuators A and drive piping for them.
As a result, even in the case of an adhesive chuck device that holds a large workpiece with a side of several meters, there is no need for complicated pipe joining or the like in the drive path of many actuators A, and the drive path can be secured in a short time and reliably. There is an advantage that workability is excellent.

Further, as shown in FIGS. 1A and 1B and FIG. 2, an adhesive member 70 is provided at the tip 41 of the mover 40 of the plurality of actuators A, and the mover 40 is moved in and out due to the expansion and deformation of the extendable portion 10. Accordingly, when the workpiece W is peeled off from the adhesive member 70 and released, the workpiece W is provided on the holding surface 60a of the chuck body 60 as the movable member 40 protrudes due to the shortening deformation of the expansion / contraction part 10 (not shown). Compared with the case where the workpiece W is released by being peeled off from the adhesive member 70, the adhesion area of the workpiece W by the adhesive member 70 is reduced. Therefore, even if the moving stroke of the mover 40 is short while limiting the deformation amount of the workpiece W. The workpiece W can be reliably peeled open.
Thereby, the core blur of the mover 40 can be completely eliminated.
Furthermore, even if the workpiece W is a material in which a liquid material without a spacer is sandwiched between a pair of substrates such as an organic EL display (OLED) or a high-definition liquid crystal display (LCD), the pressing of the movable element 40 The crushing accompanying peeling can be prevented.

In the previous embodiment, the supply hole 64 communicating with the supply part 61 of the chuck body 60 and the through hole 32 of the base part 30 of the actuator A are communicated in an airtight manner, but the present invention is not limited to this. The supply space of the supply portion 61 is directly connected to the annular space 13 so as to pass through the outer bellows portion 11a ′ and the elevating portion 20 and communicate with the annular space 13. The driving fluid F may be supplied to 13.

A Actuator 10 Telescopic part 11, 11 'Metal bellows 11a, 11a' Bellows

part

11b, 11b 'Inner

peripheral end

11c, 11c' Outer peripheral end 12 Central space 13 Annular space 20 Lifting part 30 Base 31 Through hole 32 Through hole 40 Movable element 50 Stopper 60 Chuck Body 60a Holding Surface 61 Supply Portion 62 Communication Hole 63 Mounting Portion 64 Supply Hole 70 Adhesive Member F Driving Fluid W Workpiece

Claims

A plurality of metal bellows having a bellows portion with an inner peripheral end and an outer peripheral end fixed alternately, and a stretchable and deformable stretchable portion arranged concentrically inward and outward;
An elevating part provided across one end of the metal bellows;
A base having a through hole provided over the other end of the metal bellows;
A movable element provided from the elevating part through the central space of the telescopic part toward the through hole of the base part,
An actuator characterized in that the movable element is reciprocated in the through hole of the base portion in accordance with expansion and contraction of the expansion and contraction portion.
A stopper is provided so as to be opposed to the elevating part so that the elevating part comes into contact with expansion and contraction of the elongating part, and the mover is stopped when the elevating part comes into contact with the stopper. The actuator according to claim 1, wherein the actuator is configured.
The apparatus further comprises a supply unit that supplies a driving fluid toward an annular space formed between the metal bellows, and the metal bellows is simultaneously expanded and contracted by supplying the driving fluid from the supply unit to the annular space. The actuator according to claim 1, wherein the actuator is configured to be deformed.
A pressure-sensitive adhesive chuck device in which the actuators according to claim 1, 2, or 3 are arranged in a distributed manner on the chuck body so as to face the workpiece, and the workpiece is detachably held via an adhesive member,
The chuck body has a plurality of communication holes provided so as to pass through the movable element in communication with the base portion of the actuator.
The actuator is configured so that the tips of all the movers protrude from the holding surface of the chuck main body and come into contact with the work as the extension / contraction of the extension / contraction part, and the tips of all the movers follow the shortening deformation of the extension / contraction part. Is controlled so as to be immersed in the chuck main body and separated from the workpiece.
The actuator according to claim 3, wherein the actuator is dispersedly disposed on the chuck body so as to face the workpiece, and the workpiece is detachably held via an adhesive member.
The actuator has a through hole provided in the base portion so as to communicate with the annular space,
The chuck body includes the supply portion of the driving fluid formed therein, a plurality of attachment portions attached so that the base portion of the actuator contacts, and the actuator attached to the attachment portion. A plurality of communication holes each opened to communicate with the through hole of the base part, and each of the actuators attached to the attachment part are opened to communicate with the supply part toward the through hole of the base part. The adhesive chuck device according to claim 4, further comprising a plurality of supply holes.