JP5612172B1 - Adhesive chuck device - Google Patents

Adhesive chuck device Download PDF

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JP5612172B1
JP5612172B1 JP2013141143A JP2013141143A JP5612172B1 JP 5612172 B1 JP5612172 B1 JP 5612172B1 JP 2013141143 A JP2013141143 A JP 2013141143A JP 2013141143 A JP2013141143 A JP 2013141143A JP 5612172 B1 JP5612172 B1 JP 5612172B1
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bellows
expansion
contraction
workpiece
actuator
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JP2015015365A (en
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義和 大谷
義和 大谷
謙司 佐藤
謙司 佐藤
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Shin Etsu Engineering Co Ltd
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Abstract

【課題】可動子を無接触状態で芯ブレせずに駆動させてワークを着脱自在に粘着保持する。【解決手段】アクチュエータAの伸縮部10として、複数のベローズ11,11′が内外へ同心状に配置されるため、ベローズ11,11′を伸縮変形させることにより、伸縮部10の全体が伸縮変形方向(Z方向)以外のXYθ方向へ全く変形しないため、ベローズ11,11′の昇降部20を介して可動子40が、伸縮部10の中心空間12内で、伸縮変形方向(Z方向)以外のXYθ方向へは芯ブレせずに往復動する。伸縮部10の伸縮変形に伴い可動子40の押圧部41をワークWと接触させることで、粘着部材70による粘着保持などが行われる。これと逆の伸縮部10の伸縮変形に伴い可動子40の押圧部41をワークWから離すことで、粘着部材70との剥離開放などが行われる。【選択図】図1An object of the present invention is to hold a workpiece in a detachable manner by driving a mover in a non-contact state without causing a core blur. A plurality of bellows 11, 11 'are concentrically arranged inward and outward as an expansion / contraction part 10 of an actuator A, so that the entire expansion / contraction part 10 is elastically deformed by expanding / contracting the bellows 11, 11'. Since there is no deformation in the XYθ direction other than the direction (Z direction), the mover 40 is moved in the central space 12 of the expansion / contraction part 10 through the lifting / lowering part 20 of the bellows 11, 11 ′ except for the expansion / contraction deformation direction (Z direction). In the XYθ direction, reciprocates without blurring. By holding the pressing portion 41 of the movable element 40 in contact with the workpiece W along with the expansion / contraction deformation of the expansion / contraction portion 10, adhesion holding by the adhesive member 70 is performed. By separating the pressing portion 41 of the movable element 40 from the work W in accordance with the expansion and contraction of the expansion / contraction portion 10 opposite to this, the release from the adhesive member 70 is performed. [Selection] Figure 1

Description

本発明は、例えば液晶ディスプレイ(LCD)や有機ELディスプレイ(OLED)やプラズマディスプレイ(PDP)やフレキシブルディスプレイなどのフラットパネルディスプレイ(FPD)の製造過程において、ガラス基板か又は樹脂基板などの板状ワークを粘着保持して貼り合わせる基板貼り合わせ機を含む基板組立装置や、このような基板などの絶縁体、導電体又は半導体ウエハなどのワーク(被処理体)を搬送する基板搬送装置などに用いられるアクチュエータが具備される粘着チャック装置に関する。   The present invention relates to a plate-like workpiece such as a glass substrate or a resin substrate in the manufacturing process of a flat panel display (FPD) such as a liquid crystal display (LCD), an organic EL display (OLED), a plasma display (PDP), or a flexible display. Used for substrate assembly apparatuses including a substrate laminating machine for holding and adhering substrates together, and substrate conveying apparatuses for conveying an insulator such as a substrate, a workpiece such as a conductor or a semiconductor wafer (object to be processed), etc. The present invention relates to an adhesive chuck device provided with an actuator.

従来、この種の粘着チャック装置として、上方の加圧板に開孔を複数設け、これら開孔内にアクチュエータを備え、アクチュエータから下方に向かって伸びた軸の先に粘着部材が設けられ、アクチュエータの動作により開孔内で粘着部材が上下し、粘着部材で上基板を保持し、真空チャンバユニットの内部において、上下両基板の位置合わせをしてから貼り合わせを行い、貼り合わされた上基板から粘着部材を剥がす時は、アクチュエータにより開孔内で粘着部材を上昇(退行)させると、加圧板の開孔の周縁部が上基板の移動を阻止するので、簡単に粘着部材と上基板を引き離す基板組立装置がある(例えば、特許文献1参照)。
また、上方の加圧板に開口を複数設け、これら開口内に回転用アクチュエータと上下駆動用アクチュエータを夫々備え、回転用アクチュエータから下方に向かって伸びた回転軸の先端に粘着部材が取り付けられ、真空チャンバユニットの内部において、上下両基板の位置合わせを行いながら貼り合わせを行い、粘着部材を加圧板内に退行させる時は、粘着部材を基板面に対して回転用アクチュエータにより捻りながら、又は捻ってから上下駆動用アクチュエータにより退行させて、粘着部材を上基板から引き剥がす基板組立装置もある(例えば、特許文献2参照)。
Conventionally, as this type of adhesive chuck device, a plurality of apertures are provided in the upper pressure plate, actuators are provided in the apertures, and an adhesive member is provided at the tip of a shaft extending downward from the actuator. By operation, the adhesive member moves up and down in the opening, the upper substrate is held by the adhesive member, the upper and lower substrates are aligned within the vacuum chamber unit, and then bonded together. When peeling the member, if the adhesive member is raised (retracted) in the opening by the actuator, the peripheral edge of the opening of the pressure plate prevents the upper substrate from moving, so the substrate that easily separates the adhesive member from the upper substrate There is an assembly device (see, for example, Patent Document 1).
Also, a plurality of openings are provided in the upper pressure plate, rotation actuators and vertical drive actuators are provided in these openings, and an adhesive member is attached to the tip of the rotating shaft extending downward from the rotation actuator, In the chamber unit, bonding is performed while aligning the upper and lower substrates, and when the adhesive member is retracted into the pressure plate, the adhesive member is twisted or twisted with respect to the substrate surface by a rotation actuator. There is also a board assembly device that is retracted from the upper board by an actuator for driving up and down to peel off the adhesive member from the upper board (see, for example, Patent Document 2).

特開2001−133745号公報(第5頁、図7)JP 2001-133745 A (5th page, FIG. 7) 特開2003−273508号公報(第3−5頁、図1−5)Japanese Patent Laid-Open No. 2003-273508 (page 3-5, FIG. 1-5)

ところで、フラットパネルディスプレイの基板貼り合わせ機などでは、一対の基板をミクロンオーダーの高精度で互いに位置合せし、これらの位置合わせ状態を保ったまま、基板同士の貼り合わせが高精度で行われる。
しかし乍ら、このような従来の粘着チャック装置では、特許文献1の場合、アクチュエータから伸びる軸の駆動時に、該軸がその軸方向と交差する方向にも僅かに芯ブレを生ずるため、上下基板の貼り合わせ完了後に上基板から粘着部材を剥がす際に、アクチュエータで軸及び粘着部材を上昇(退行)させると、軸の芯ブレにより上基板が下基板に対して位置ズレを起こしてしまう。
それによって、基板同士の貼り合わせ精度が低下し、歩留まりが悪くなるという問題があった。
また、特許文献2の場合には、上下基板の貼り合わせ完了後に上基板から粘着部材を剥がす際に、回転用アクチュエータで回転軸を捻りながら又は捻ってから上下駆動用アクチュエータにより退行させるため、粘着部材の回転移動に伴い上基板が下基板に対して位置ズレを起こし易いという問題があった。
さらに、特許文献2の場合には、回転軸の外周面に環状のシール材を当接させて、回転軸が上下及び回転自在にシールされると同時に回転軸の軸ブレを防止している。しかし、回転軸が上下移動及び回転移動をする度に回転軸とシール材が擦れるために、それらの摩耗によりゴミが発生し易い。
それによって、真空チャンバユニットなどの密閉空間内で基板同士の貼り合わせが行われる場合には、回転軸とシール材の摩耗で発生したゴミが基板同士の貼り合わせ箇所に混入するなど、悪影響を与えるおそれがあるという問題があった。
In a flat panel display substrate bonding machine or the like, a pair of substrates are aligned with each other with high accuracy on the order of microns, and the substrates are bonded with high accuracy while maintaining these alignment states.
However, in such a conventional adhesive chuck device, in the case of Patent Document 1, when the shaft extending from the actuator is driven, the shaft is slightly shaken also in the direction intersecting the axial direction. When the adhesive member is peeled from the upper substrate after completion of the bonding, if the shaft and the adhesive member are lifted (retracted) by the actuator, the upper substrate will be displaced with respect to the lower substrate due to the shaft core blurring.
Accordingly, there is a problem that the bonding accuracy between the substrates is lowered and the yield is deteriorated.
In the case of Patent Document 2, when the adhesive member is peeled from the upper substrate after completion of the bonding of the upper and lower substrates, the rotary shaft is retracted while being twisted or twisted with the rotation actuator, and then the adhesive member is retracted. There is a problem that the upper substrate is likely to be displaced with respect to the lower substrate as the member rotates.
Furthermore, in the case of Patent Document 2, an annular sealing material is brought into contact with the outer peripheral surface of the rotating shaft, so that the rotating shaft is sealed up and down and rotatable, and at the same time, shaft rotation of the rotating shaft is prevented. However, since the rotating shaft and the sealing material rub each time the rotating shaft moves up and down and rotates, dust is easily generated due to wear.
As a result, when the substrates are bonded together in a sealed space such as a vacuum chamber unit, there is an adverse effect such as dust generated due to wear of the rotating shaft and the sealing material entering the bonding position between the substrates. There was a problem of fear.

本発明は、このような問題に対処することを課題とするものであり、可動子を無接触状態で芯ブレせずに駆動させてワークを着脱自在に粘着保持すること、などを目的とするものである。   An object of the present invention is to cope with such a problem, and an object of the present invention is to drive the mover without contact and to keep the workpiece detachably attached without touching the core. Is.

このような目的を達成するために本発明による粘着チャック装置は、アクチュエータがワークと対向して配置され、粘着部材を介して前記ワークが着脱自在に保持される粘着チャック装置であって、前記アクチュエータは、複数のベローズが内外へ同心状に配置される伸縮変形可能な伸縮部と、前記ベローズの昇降部から前記伸縮部の中心空間を通るように設けられ、前記ワークに向け往復動自在に支持される押圧部を有する可動子と、前記ベローズの前記昇降部と対向して前記伸縮部の伸縮変形に伴い前記昇降部が当接するように設けられるストッパと、を備え、前記可動子は、前記伸縮部の伸縮変形と連動して前記可動子の前記押圧部を前記ワークと接触させ、前記伸縮部の逆の伸縮変形と連動して前記可動子の前記押圧部を前記ワークから離すように制御され、前記ストッパは、前記昇降部の当接に伴って前記可動子の前記押圧部が前記ワークに向かう移動を停止させる移動範囲制限部を有することを特徴とする。 In order to achieve such an object, an adhesive chuck device according to the present invention is an adhesive chuck device in which an actuator is arranged to face a workpiece, and the workpiece is detachably held via an adhesive member, the actuator Is provided so that a plurality of bellows are concentrically arranged inward and outward, and is capable of stretching and deforming, and is provided so as to pass through the central space of the telescopic portion from the lifting and lowering portion of the bellows, and reciprocally supports the workpiece. And a stopper provided so that the elevating part comes into contact with expansion / contraction deformation of the expansion / contraction part opposite to the elevating part of the bellows , The pressing part of the movable element is brought into contact with the work in conjunction with the expansion / contraction deformation of the expansion / contraction part, and the pressing part of the movable element is interlocked with the reverse expansion / contraction deformation of the expansion / contraction part. Is controlled to release al, the stopper is characterized in that it has a moving range limiting unit the pressing portion of the movable member with the contact stops the movement towards the workpiece of the elevating part.

前述した特徴を有する本発明による粘着チャック装置は、アクチュエータの伸縮部として、複数のベローズが内外へ同心状に配置されるため、ベローズを伸縮変形させることにより、伸縮部の全体が伸縮変形方向以外の方向へ全く変形しないため、ベローズの昇降部を介して可動子が、伸縮部の中心空間内で、伸縮変形方向以外の方向へは芯ブレせずに往復動する。伸縮部の伸縮変形に伴い可動子の押圧部をワークと接触させることで、粘着部材による粘着保持などが行われる。これと逆の伸縮部の伸縮変形に伴い可動子の押圧部をワークから離すことで、粘着部材との剥離開放などが行われる。
したがって、可動子を無接触状態で芯ブレせずに駆動させてワークを着脱自在に粘着保持することができる。
その結果、アクチュエータによる軸の駆動で芯ブレが生じ易い従来の粘着チャック装置に比べ、フラットパネルディスプレイの基板貼り合わせ機などにおいて貼り合わせ完了後の粘着剥離に使用しても、アクチュエータによる基板同士の貼り合わせ精度が低下せず、歩留まりを向上させることができる。
さらに、アクチュエータによる軸の駆動でシール材との間に擦れが生じる従来の粘着チャック装置に比べ、可動子の駆動に伴ってゴミが発生しないため、真空チャンバユニットなどの密閉空間内で基板同士の貼り合わせを行っても、ゴミなどの異物が基板同士の貼り合わせ箇所に混入するなどの悪影響を防止することができる。また、擦れにより摩耗する封止部分が無いため、長期間使用しても芯ブレを起こすことなく、安定性に優れる。
In the adhesive chuck device according to the present invention having the above-described features, a plurality of bellows are concentrically arranged inside and outside as the expansion / contraction part of the actuator. Therefore, the mover reciprocates in the central space of the expansion / contraction part without moving the core in the direction other than the expansion / contraction deformation direction through the lifting / lowering part of the bellows. Adhesion holding by an adhesive member or the like is performed by bringing the pressing portion of the mover into contact with the workpiece along with the expansion and contraction of the expansion and contraction portion. By separating the pressing part of the mover from the work in accordance with the expansion / contraction deformation of the expansion / contraction part opposite to this, the release from the adhesive member is performed.
Therefore, the work piece can be detachably adhered and driven by driving the mover in a non-contact state without causing the core movement.
As a result, compared to conventional adhesive chuck devices that are prone to core blurring when the shaft is driven by an actuator, even when used for adhesive peeling after completion of bonding in a flat panel display substrate bonding machine, The bonding accuracy is not lowered, and the yield can be improved.
Furthermore, as compared with the conventional adhesive chuck device in which the shaft is driven by the actuator and rubbing between the sealing materials, dust is not generated when the mover is driven. Even if the bonding is performed, it is possible to prevent adverse effects such as foreign matters such as dust entering the bonding position between the substrates. In addition, since there is no sealing portion that wears due to rubbing, the core does not shake even when used for a long period of time, and is excellent in stability.

本発明の実施形態に係る粘着チャック装置の全体構成を示す説明図であり、(a)が駆動前の状態を示す縦断正面図、(b)が駆動後の状態を示す縦断正面図である。It is explanatory drawing which shows the whole structure of the adhesion chuck apparatus which concerns on embodiment of this invention, (a) is a longitudinal front view which shows the state before a drive, (b) is a longitudinal front view which shows the state after a drive. 図1の(2)−(2)線に沿える横断平面図である。FIG. 2 is a cross-sectional plan view taken along line (2)-(2) in FIG. 1.

以下、本発明の実施形態を図面に基づいて詳細に説明する。
本発明の実施形態に係る粘着チャック装置は、図1〜図2に示すように、フラットパネルディスプレイのガラス基板や樹脂基板などからなる板状のワークWと対向してアクチュエータAを配置することで、ワークWが着脱自在に粘着保持されるものである。
詳しく説明すると、本発明の実施形態に係る粘着チャック装置Aは、複数のベローズ11,11′が内外へ同心状に配置される伸縮変形可能な伸縮部10と、ベローズ11,11′の昇降部20から伸縮部10の中心空間12を通るように設けられる可動子40と、を主要な構成要素として備えている。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
As shown in FIGS. 1 to 2, the adhesive chuck device according to the embodiment of the present invention is configured by disposing the actuator A so as to face a plate-like workpiece W made of a glass substrate or a resin substrate of a flat panel display. The workpiece W is detachably adhered and held.
More specifically, the adhesive chuck device A according to the embodiment of the present invention includes a stretchable / deformable portion 10 in which a plurality of bellows 11, 11 'are concentrically arranged inward and outward, and an elevating portion of the bellows 11, 11'. The movable element 40 provided so as to pass through the central space 12 of the expansion / contraction part 10 from 20 is provided as a main component.

伸縮部10となる複数のベローズ11,11′は、環状に打ち抜き加工された多数の薄肉金属板の内周端11b,11b′と外周端11c,11c′をそれぞれ交互に固着して断面波状につなぎ合わすか、又はゴムや合成樹脂などの弾性材料で一体成形することにより、伸縮変形可能な蛇腹部11a,11a′が形成される。
伸縮部10は、径寸法が異なる蛇腹部11a,11a′を有するベローズ11,11′が複数個用意され、これらベローズ11,11′をそれぞれ蛇腹部11a,11a′の中心が同じ位置となるように配置することで構成される。
これら複数のベローズ11,11′において、伸縮部10の中心となる最小径の蛇腹部11aの内部には、中心空間12が区画形成されている。複数のベローズ11,11′における大小の蛇腹部11a,11a′の間には、気密性に優れた環状空間13が区画形成されている。
The plurality of bellows 11 and 11 ′ that become the expansion and contraction part 10 are fixed to the inner peripheral ends 11 b and 11 b ′ and outer peripheral ends 11 c and 11 c ′ of a large number of thin metal plates that are punched into an annular shape, respectively, in a corrugated shape. The bellows portions 11a and 11a 'that can be stretched and deformed are formed by joining them together or integrally forming them with an elastic material such as rubber or synthetic resin.
A plurality of bellows 11, 11 ′ having bellows 11 a, 11 a ′ having different diameter dimensions are prepared for the stretchable part 10, and the centers of the bellows 11 a, 11 a ′ are located at the same position. It is comprised by arranging in.
In the plurality of bellows 11, 11 ′, a central space 12 is defined in the inside of the bellows portion 11 a having the minimum diameter that is the center of the stretchable portion 10. Between the large and small bellows portions 11a and 11a 'of the plurality of bellows 11 and 11', an annular space 13 having excellent airtightness is defined.

ベローズ11,11′の具体例としては、多数の薄肉金属板の内周端11b,11b′と外周端11c,11c′がそれぞれ交互に溶接された溶接ベローズを用いることが好ましい。
さらに、図1(a)(b)及び図2に示される例では、円筒状に形成した二つのベローズ11,11′がその径方向へ複数それぞれ同心円上に配置されている。
また、その他の例として図示しないが、ベローズ11,11′として円筒状以外の角筒状に形成されたものを用いたり、三つ以上のベローズ11,11′をそれぞれの中心が同じ位置となるように配置したりすることも可能である。
As a specific example of the bellows 11, 11 ', it is preferable to use a welded bellows in which inner peripheral ends 11b, 11b' and outer peripheral ends 11c, 11c 'of a large number of thin metal plates are alternately welded.
Further, in the example shown in FIGS. 1A and 1B and FIG. 2, two cylindrical bellows 11 and 11 ′ are arranged concentrically in the radial direction.
Although not shown as other examples, the bellows 11 and 11 'are formed in a rectangular tube shape other than the cylindrical shape, or the centers of the three or more bellows 11 and 11' are at the same position. It is also possible to arrange them.

昇降部20は、ベローズ11,11′の可動端(上端)に亘って気密状に連結される板材か又はその他の形状の部材で構成され、ベローズ11,11′の伸縮変形に伴ってZ方向へ往復動自在に支持されている。
さらに、昇降部20は、他の部材に接触させることで、伸縮部10となるベローズ11,11′の伸縮変形範囲を制限することが好ましい。
The elevating part 20 is composed of a plate member or other shape member that is connected in an airtight manner over the movable ends (upper ends) of the bellows 11 and 11 ', and in the Z direction along with expansion and contraction of the bellows 11 and 11'. It is supported so that it can reciprocate freely.
Furthermore, it is preferable that the raising / lowering part 20 restrict | limits the expansion-contraction deformation range of bellows 11 and 11 'used as the expansion-contraction part 10 by making it contact with another member.

ベローズ11,11′の固定端(下端)には、それらに亘って基部30が設けられる。基部30は、ベローズ11,11′の固定端に亘って気密状に連結される板材か又はその他の形状の部材で構成され、ベローズ11,11′を後述するチャック本体60に対して移動不能に固定している。
基部30の中心部には、後述する可動子40が挿通する通孔31を貫通開穿している。
さらに、基部30には、複数のベローズ11,11′(蛇腹部11a,11a′)の間に形成された環状空間13と連通する貫通孔32を開穿することが好ましい。
A base 30 is provided over the fixed ends (lower ends) of the bellows 11 and 11 '. The base 30 is formed of a plate member or other shape member that is connected in an airtight manner over the fixed ends of the bellows 11 and 11 ′, so that the bellows 11 and 11 ′ cannot move with respect to a chuck body 60 described later. It is fixed.
A through hole 31 through which a later-described movable element 40 is inserted is opened at the center of the base 30.
Furthermore, it is preferable to open a through hole 32 communicating with the annular space 13 formed between the plurality of bellows 11, 11 ′ (the bellows portions 11a, 11a ′) in the base portion 30.

可動子40は、昇降部20の中心から伸縮部10の中心となる中心空間12を通って基部30の通孔31に向け延びる断面円形か、又は断面矩形などのその他の形状の棒材で構成され、伸縮部10となるベローズ11,11′の伸縮変形に伴い昇降部20と連動して、伸縮部10の中心空間12及び基部30の通孔31内でZ方向へ往復動するように吊持されている。
さらに、可動子40は、ワークWに向けて往復動自在に支持される押圧部41を有している。
押圧部41は、可動子40において昇降部20との連結部位と反対側の先端にワークWと対向するように形成され、ベローズ11,11′の伸縮変形によるZ方向へ往復動で、ワークWの表面W1に対して間接的又は直接的に接触させるように配置されている。
図1(a)(b)に示される例では、可動子40の押圧部41に後述する粘着部材70が固着され、粘着部材70を介してワークWの表面W1に接触させることにより、ワークWを着脱自在に保持している。
また、その他の例として図示しないが、可動子40の押圧部41に粘着部材70を固着せず、押圧部41をワークWの表面W1に面接触させて押し移動することも可能である。
The mover 40 is composed of a bar having a circular cross section extending from the center of the elevating unit 20 to the through hole 31 of the base 30 through the central space 12 that is the center of the expandable unit 10 or other shapes such as a rectangular cross section. As the bellows 11, 11 ′ that become the stretchable part 10 are stretched and deformed, the bellows 11 and 11 ′ are suspended so as to reciprocate in the Z direction in the central space 12 of the stretchable part 10 and the through-hole 31 of the base 30. It is held.
Furthermore, the mover 40 includes a pressing portion 41 that is supported so as to be reciprocally movable toward the workpiece W.
The pressing portion 41 is formed at the tip of the movable element 40 on the opposite side of the connecting portion with the lifting / lowering portion 20 so as to face the workpiece W. The pressing portion 41 is reciprocated in the Z direction by the expansion / contraction deformation of the bellows 11, 11 ′. It arrange | positions so that it may contact indirectly or directly with respect to the surface W1.
In the example shown in FIGS. 1A and 1B, an adhesive member 70 to be described later is fixed to the pressing portion 41 of the mover 40, and is brought into contact with the surface W <b> 1 of the workpiece W via the adhesive member 70. Is detachably held.
Although not shown in the drawings as another example, the pressing member 41 may be pushed and moved while being in surface contact with the surface W1 of the workpiece W without the adhesive member 70 being fixed to the pressing portion 41 of the mover 40.

そして、本発明の実施形態に係る粘着チャック装置におけるアクチュエータAは、昇降部20と対向して伸縮部10となるベローズ11,11′の伸縮変形に伴い昇降部20が当接するように設けられるストッパ50を更に備え、ストッパ50に昇降部20が当接することで可動子40を移動停止させるように構成することが好ましい。
つまり、伸縮部10となるベローズ11,11′の伸縮変形に伴って昇降部20をZ方向へ移動させることにより、昇降部20がストッパ50に突き合って可動子40の移動範囲が制限される。
ストッパ50は、昇降部20及び可動子40の下限位置を設定するための下限ストッパ51aと、昇降部20及び可動子40の上限位置を設定するための上限ストッパ52aを有している。
下限ストッパ51aは、図1(a)(b)及び図2に示される場合、伸縮部10となるベローズ11,11′の外周を囲むように設けられる側壁部51の内面に沿って段状に形成され、昇降部20の下面21を当接させることで、可動子40の下方移動が停止するように構成されている。
上限ストッパ52aは、図1(a)(b)及び図2に示される場合、側壁部51の上端面に亘って昇降部20を覆うように設けられたトッププレート52の下面に沿って面状に形成され、昇降部20の上面22を当接させることで、可動子40の上方移動が停止するように構成されている。
The actuator A in the adhesive chuck device according to the embodiment of the present invention is provided with a stopper provided so that the elevating part 20 comes into contact with the expansion / contraction deformation of the bellows 11, 11 ′ that becomes the elongating part 10 facing the elevating part 20. 50, and the movable element 40 is preferably configured to stop moving when the elevating unit 20 contacts the stopper 50.
That is, by moving the elevating part 20 in the Z direction in accordance with the expansion and contraction of the bellows 11, 11 ′ serving as the elongating and contracting part 10, the elevating part 20 abuts against the stopper 50 and the moving range of the mover 40 is limited. .
The stopper 50 has a lower limit stopper 51a for setting the lower limit positions of the elevating unit 20 and the mover 40, and an upper limit stopper 52a for setting the upper limit positions of the elevating unit 20 and the mover 40.
When the lower limit stopper 51a is shown in FIGS. 1A and 1B and FIG. 2, the lower limit stopper 51a is stepped along the inner surface of the side wall 51 provided so as to surround the outer periphery of the bellows 11 and 11 ′ serving as the extendable part 10. It is formed and configured to stop the downward movement of the mover 40 by bringing the lower surface 21 of the elevating part 20 into contact.
The upper limit stopper 52a is planar along the lower surface of the top plate 52 provided so as to cover the elevating part 20 across the upper end surface of the side wall part 51 in the cases shown in FIGS. The upper part 22 of the raising / lowering part 20 is made to contact | abut, and it is comprised so that the upward movement of the needle | mover 40 may be stopped.

さらに、アクチュエータAは、複数のベローズ11,11′(蛇腹部11a,11a′)の間に形成される環状空間13に向けて駆動用流体Fを供給するための供給部61を更に備え、供給部61から環状空間13への駆動用流体Fが供給されることでベローズ11,11′を同時に伸縮変形させるように構成することが好ましい。
つまり、供給部61から駆動用流体Fを環状空間13へ供給することにより、伸縮部10となるベローズ11,11′が同時に伸長変形し、これと逆に環状空間13から駆動用流体Fを供給部61へ戻すことで、ベローズ11,11′が同時に短縮変形する。
供給部61は、圧縮空気などの気体又は液体からなる駆動用流体Fが貯留される供給源(図示しない)と、駆動用流体Fの供給源からベローズ11,11′間の環状空間13に亘って形成される供給路61aと、供給路61aを経て供給源及び環状空間13に亘り駆動用流体Fを一方向のみに供給するか又は双方向へ出し入れするためのポンプなどの駆動手段(図示しない)と、を有している。
Further, the actuator A further includes a supply unit 61 for supplying the driving fluid F toward the annular space 13 formed between the plurality of bellows 11, 11 ′ (the bellows portions 11a, 11a ′). It is preferable that the bellows 11, 11 ′ be simultaneously expanded and contracted by supplying the driving fluid F from the portion 61 to the annular space 13.
That is, by supplying the driving fluid F from the supply unit 61 to the annular space 13, the bellows 11, 11 ′ serving as the expansion and contraction unit 10 are simultaneously expanded and deformed, and conversely, the driving fluid F is supplied from the annular space 13. By returning to the part 61, the bellows 11, 11 'are shortened and deformed simultaneously.
The supply unit 61 spans a supply source (not shown) in which a driving fluid F made of a gas or liquid such as compressed air is stored, and an annular space 13 between the supply source of the driving fluid F and the bellows 11 and 11 ′. A supply path 61a formed through the supply path 61a and a driving means such as a pump for supplying or removing the driving fluid F only in one direction over the supply source and the annular space 13 (not shown) ) And.

図1(a)(b)及び図2に示される例では、供給部61として、後述するチャック本体60の内部に供給路61aを区画形成し、基部30に開穿された貫通孔32を介して供給部61の供給路61aと環状空間13が連通している。
図1(a)に示される状態では、ベローズ11,11′及び昇降部20の自重と、ベローズ11,11′が有する弾性力により、蛇腹部11a,11a′がZ方向へ圧縮変形し、昇降部20がストッパ50(下限ストッパ51a)と当接することで可動子40が下限制限で停止している。
図1(b)に示される状態では、供給部61の駆動手段が作動し、供給源から駆動用流体Fが供給路61aを経て環状空間13に供給され、環状空間13の内圧が上がることにより、ベローズ11,11′を同時にZ方向へ膨張して伸縮変形させ、昇降部20がストッパ50(上限ストッパ52a)と当接することで可動子40が上限制限で停止している。
その後、環状空間13内の駆動用流体Fが供給路61aを経て供給源に逆流させるか、又は別の逃がし通路(図示しない)から抜いて、環状空間13の内圧を下げることにより、蛇腹部11a,11a′がZ方向へ圧縮変形して、図1(a)に示される状態に戻される。
また、その他の例として図示しないが、チャック本体60内の供給路61aや基部30の貫通孔32に代えて、外側に配置されるベローズ11′の蛇腹部11a′や昇降部20に対し、供給部61の供給管路を直接的に配管接続するなど、供給部61としてチャック本体60と関係なく環状空間13に駆動用流体Fを供給することも可能である。
In the example shown in FIGS. 1A and 1B and FIG. 2, a supply passage 61 a is defined as a supply portion 61 inside a chuck body 60 to be described later, and through a through hole 32 opened in the base portion 30. Thus, the supply path 61a of the supply unit 61 and the annular space 13 communicate with each other.
In the state shown in FIG. 1 (a), the bellows parts 11a and 11a 'are compressed and deformed in the Z direction due to their own weights of the bellows 11 and 11' and the lifting part 20 and the elastic force of the bellows 11 and 11 '. Since the part 20 contacts the stopper 50 (lower limit stopper 51a), the mover 40 stops at the lower limit.
In the state shown in FIG. 1B, the driving means of the supply unit 61 is operated, and the driving fluid F is supplied from the supply source to the annular space 13 through the supply path 61a, and the internal pressure of the annular space 13 increases. The bellows 11, 11 'are simultaneously expanded in the Z direction to expand and contract, and the elevating part 20 comes into contact with the stopper 50 (upper limit stopper 52a), so that the mover 40 stops at the upper limit.
After that, the driving fluid F in the annular space 13 flows back to the supply source via the supply path 61a or is removed from another escape passage (not shown), and the internal pressure of the annular space 13 is lowered, whereby the bellows portion 11a. , 11a ′ are compressed and deformed in the Z direction, and returned to the state shown in FIG.
Although not shown in the drawings as another example, the supply is made to the bellows portion 11a ′ of the bellows 11 ′ arranged on the outside or the elevating portion 20 instead of the supply passage 61a in the chuck body 60 and the through hole 32 of the base portion 30 It is also possible to supply the driving fluid F to the annular space 13 as the supply unit 61 regardless of the chuck body 60, such as by directly connecting the supply pipe of the unit 61 to the pipe.

このような本発明の実施形態に係る粘着チャック装置のアクチュエータAによると、伸縮部10として、蛇腹部11a,11a′を有する複数のベローズ11,11′が内外へ同心状に配置されるため、ベローズ11,11′を伸縮変形させることにより、ベローズ11,11′の蛇腹部11a,11a′においてそれぞれの内周端11b,11b′及び外周端11c,11c′がそれぞれ交互に連結されているから、伸縮部10の全体が伸縮変形方向(Z方向)以外のXYθ方向へ全く変形しない。
それにより、ベローズ11,11′の可動端に亘って設けられる昇降部20を介して可動子40が、伸縮部10の中心空間12及び基部30の通孔31内で、伸縮変形方向(Z方向)以外のXYθ方向へは芯ブレせずに往復動する。
したがって、可動子40が無接触状態で芯ブレせずに駆動させることができる。
特に、内外へ同心状に配置される複数のベローズ11,11′として、多数の薄肉金属板の内周端11b,11b′と外周端11c,11c′がそれぞれ交互に溶接された溶接ベローズを用いた場合には、その軸方向(Z方向)へは伸縮変形するが、それ以外のXYθ方向へは剛性が高くて変形せず動かないとともに、複数の溶接ベローズを内外へ同心状に配置することで更に剛性が高まるため、可動子40の芯ブレを完全に防止できる。
According to the actuator A of the adhesive chuck device according to the embodiment of the present invention, since the plurality of bellows 11 and 11 ′ having the bellows portions 11a and 11a ′ are concentrically arranged inward and outward as the expansion and contraction portion 10, By expanding and contracting the bellows 11 and 11 ', the inner peripheral ends 11b and 11b' and the outer peripheral ends 11c and 11c 'are alternately connected to each other at the bellows portions 11a and 11a' of the bellows 11 and 11 '. The entire stretchable part 10 is not deformed at all in the XYθ direction other than the stretchable deformation direction (Z direction).
As a result, the movable element 40 moves in the expansion / contraction deformation direction (Z direction) in the central space 12 of the expansion / contraction section 10 and the through hole 31 of the base section 30 via the elevating / lowering section 20 provided over the movable ends of the bellows 11, 11 ′. It reciprocates without swaying in the XYθ directions other than).
Therefore, the mover 40 can be driven without contact with the core in a non-contact state.
In particular, as a plurality of bellows 11 and 11 'arranged concentrically inward and outward, a welded bellows in which inner peripheral ends 11b and 11b' and outer peripheral ends 11c and 11c 'of a number of thin metal plates are alternately welded is used. If this occurs, it will expand and contract in the axial direction (Z direction), but in the other XYθ directions, it will be rigid and will not move, and a plurality of welding bellows will be placed concentrically in and out. Since the rigidity is further increased, it is possible to completely prevent the armature 40 from being shaken.

さらに、昇降部20と対向して伸縮部10の伸縮変形に伴い昇降部20が当接するように設けられるストッパ50を更に備え、ストッパ50に昇降部20が当接することで可動子40を移動停止させるように構成した場合には、伸縮部10の伸縮変形に伴って昇降部20を移動させることにより、昇降部20がストッパ50に突き合って可動子40の移動範囲が制限される。
したがって、簡単な構造で可動子40の移動範囲を制限することができる。
その結果、可動子40がワークWなどの衝突することを防止することができて、破損事故などが発生せず、安全性の向上が図れる。
In addition, a stopper 50 is provided so as to be opposed to the elevating unit 20 so that the elevating unit 20 comes into contact with expansion / contraction deformation of the expansion / contraction unit 10, and when the elevating unit 20 comes into contact with the stopper 50, the mover 40 stops moving. When configured to move, the elevating unit 20 moves with the expansion / contraction deformation of the expansion / contraction unit 10, so that the elevating unit 20 abuts against the stopper 50 and the moving range of the movable element 40 is limited.
Therefore, the movement range of the mover 40 can be limited with a simple structure.
As a result, it is possible to prevent the mover 40 from colliding with the workpiece W and the like, so that no damage accident occurs and the safety can be improved.

また、ベローズ11,11′の間に形成される環状空間13に向けて駆動用流体Fを供給する供給部61を更に備え、供給部61から環状空間13に駆動用流体Fが供給されることでベローズ11,11′を同時に伸縮変形させるように構成した場合には、供給部61から駆動用流体Fを環状空間13へ供給することにより、ベローズ11,11′が同時に伸長変形し、これと逆に環状空間13から駆動用流体Fを供給部61へ戻すことで、ベローズ11,11′が同時に短縮変形する。
したがって、簡単な構造で可動子40を芯ブレせずにスムーズに往復させることができる。
その結果、長期間に亘って使用しても安定した作動が得られ、作動性に優れる。
In addition, a supply unit 61 that supplies the driving fluid F toward the annular space 13 formed between the bellows 11 and 11 ′ is further provided, and the driving fluid F is supplied from the supply unit 61 to the annular space 13. When the bellows 11 and 11 'are simultaneously expanded and deformed, the driving fluid F is supplied from the supply unit 61 to the annular space 13, whereby the bellows 11 and 11' are simultaneously expanded and deformed. On the contrary, by returning the driving fluid F from the annular space 13 to the supply unit 61, the bellows 11, 11 'are simultaneously shortened and deformed.
Therefore, the mover 40 can be smoothly reciprocated without causing a core shift with a simple structure.
As a result, a stable operation can be obtained even when used for a long period of time, and the operability is excellent.

そして、このようなアクチュエータAを用いた本発明の実施形態に係る粘着チャック装置は、複数のアクチュエータAをチャック本体60にワークWと対向してそれぞれ所定間隔毎に分散配置し、粘着部材70を介してワークWが着脱自在に保持されるように構成することが好ましい。さらに、粘着チャック装置は、真空雰囲気や所定の真空度に到達した雰囲気か、又は大気雰囲気などに配備されている。
なお、図1(a)(b)及び図2に示される例では、粘着チャック装置のチャック本体60に対して一つのアクチュエータAのみを配置しているが、それと同様にその他のアクチュエータAも配置されるため、図面上では他のアクチュエータAを省略している。
チャック本体60は、例えば金属やセラミックスなどの剛体で撓み変形しない厚さの平板状に形成された定盤などからなり、少なくともアクチュエータAの基部30の通孔31と連通して可動子40が通るように設けられる複数の連通孔62を有している。
In the adhesive chuck device according to the embodiment of the present invention using such an actuator A, a plurality of actuators A are distributed on the chuck body 60 so as to face the workpiece W and are arranged at predetermined intervals, and the adhesive member 70 is provided. It is preferable that the workpiece W is configured to be detachably held through the gap. Further, the adhesive chuck device is provided in a vacuum atmosphere, an atmosphere that reaches a predetermined degree of vacuum, or an air atmosphere.
In the example shown in FIGS. 1A, 1B, and 2, only one actuator A is arranged for the chuck body 60 of the adhesive chuck device, but other actuators A are also arranged in the same manner. Therefore, the other actuator A is omitted in the drawing.
The chuck main body 60 is formed of a platen having a thickness that does not bend and deform with a rigid body such as metal or ceramics, for example, and communicates with at least the through hole 31 of the base 30 of the actuator A and the movable element 40 passes therethrough. A plurality of communication holes 62 are provided.

アクチュエータAは、伸縮部10となるベローズ11,11′の伸縮変形に伴い、すべての可動子40の押圧部41がチャック本体60の保持面60aから同時に突出してそれぞれワークWの表面W1と接触させ、伸縮部10となるベローズ11,11′の逆の伸縮変形に伴い、すべての可動子40の押圧部41がチャック本体60内へ同時に没入してそれぞれワークWの表面W1から離すように制御されている。
つまり、チャック本体60に分散配置される複数のアクチュエータAにおいて、伸縮部10となるベローズ11,11′を伸縮変形させることにより、すべての可動子40の押圧部41が連通孔62を貫通してチャック本体60の保持面60aから同時に突出し、可動子40の押圧部41のそれぞれがワークWの表面W1と接触することで、粘着部材70による粘着保持などが行われ、これと逆に伸縮部10となるベローズ11,11′を伸縮変形させることにより、すべての可動子40の押圧部41がチャック本体60の連通孔62内へ同時に没入し、可動子40の押圧部41のそれぞれがワークWの表面W1から離れることで、粘着部材70との剥離開放などが行われる。
In accordance with the expansion and contraction of the bellows 11, 11 ′ serving as the expansion / contraction part 10, the actuator A causes the pressing parts 41 of all the movable elements 40 to simultaneously protrude from the holding surface 60 a of the chuck body 60 and contact the surface W 1 of the workpiece W, respectively. As the bellows 11, 11 ′ serving as the expansion / contraction part 10 are reversely expanded / contracted, the pressing parts 41 of all the movers 40 are controlled to be simultaneously immersed in the chuck body 60 and separated from the surface W 1 of the workpiece W, respectively. ing.
That is, in the plurality of actuators A distributed in the chuck body 60, the bellows 11 and 11 'serving as the expansion / contraction part 10 are expanded and deformed so that the pressing parts 41 of all the movable elements 40 penetrate the communication holes 62. Simultaneously projecting from the holding surface 60a of the chuck body 60, and the pressing portions 41 of the mover 40 come into contact with the surface W1 of the workpiece W, the adhesive holding by the adhesive member 70 is performed. When the bellows 11 and 11 ′ are expanded and deformed, the pressing portions 41 of all the movable elements 40 are simultaneously immersed in the communication holes 62 of the chuck body 60, and the pressing portions 41 of the movable elements 40 are respectively connected to the workpiece W. By separating from the surface W1, separation from the adhesive member 70 and the like are performed.

図1(a)(b)及び図2に示される例では、複数のアクチュエータAの可動子40の押圧部41にシート状の粘着部材70をそれぞれ設けている。
図1(a)に示される状態では、伸縮部10の短縮変形による可動子40の下方移動に伴って、粘着部材70がチャック本体60の保持面60aから同時に突出移動し、すべての粘着部材70をワークWの表面W1へ同時に接着させて、ワークWを粘着保持している。
図1(b)に示される状態では、伸縮部10の伸長変形による可動子40の上方移動に伴って、粘着部材70がチャック本体60の連通孔62内へ同時に没入移動し、すべての粘着部材70をワークWの表面W1から同時に引き剥がしてワークWを開放している。
また、その他の例として図示しないが、可動子40の押圧部41に粘着部材70を設けずに、チャック本体60の保持面60aにおける連通孔62の周縁又はその近傍に粘着部材70を設け、伸縮部10の伸長変形による可動子40の没入移動に伴い、チャック本体60の粘着部材70をワークWの表面W1に接着させてワークWを粘着保持し、伸縮部10の短縮変形による可動子40の突出移動に伴い、ワークWの表面W1をチャック本体60の粘着部材70から押し剥がしてワークWを開放することも可能である。
In the example shown in FIGS. 1A and 1B and FIG. 2, a sheet-like adhesive member 70 is provided on each pressing portion 41 of the mover 40 of the plurality of actuators A.
In the state shown in FIG. 1 (a), the adhesive member 70 projects and moves simultaneously from the holding surface 60 a of the chuck body 60 as the mover 40 moves downward due to the shortening deformation of the telescopic portion 10, and all the adhesive members 70 are moved. Are simultaneously adhered to the surface W1 of the workpiece W to hold the workpiece W in an adhesive state.
In the state shown in FIG. 1B, the adhesive member 70 is simultaneously immersed and moved into the communication hole 62 of the chuck body 60 as the mover 40 moves upward due to the expansion and deformation of the expansion / contraction part 10, and all the adhesive members 70 is simultaneously peeled off from the surface W1 of the workpiece W to open the workpiece W.
Although not shown as another example, the pressure-sensitive adhesive member 70 is not provided in the pressing portion 41 of the mover 40, and the pressure-sensitive adhesive member 70 is provided at or near the periphery of the communication hole 62 in the holding surface 60a of the chuck body 60. As the mover 40 is moved in and out due to the extension and deformation of the part 10, the adhesive member 70 of the chuck body 60 is adhered to the surface W 1 of the work W to stick and hold the work W, and the mover 40 is shortened and deformed. As the protrusion moves, the surface W1 of the workpiece W can be pushed away from the adhesive member 70 of the chuck body 60 to release the workpiece W.

このような本発明の実施形態に係る粘着チャック装置によると、チャック本体60に分散配置される複数のアクチュエータAにおいて、伸縮部10を伸縮変形させることにより、すべての可動子40の先端が連通孔62を貫通してチャック本体60の保持面60aから同時に突出し、それぞれがワークWと接触することで、粘着部材70による粘着保持などが行われ、これと逆に伸縮部10を伸縮変形させることにより、すべての可動子40の先端がチャック本体60の連通孔62内へ同時に没入し、それぞれがワークWから離れることで、粘着部材70との剥離開放などが行われる。
したがって、複数の可動子40で芯ブレせずにワークWを着脱自在に粘着保持することができる。
その結果、フラットパネルディスプレイの基板貼り合わせ機などにおいて貼り合わせ完了後の粘着剥離に使用しても、アクチュエータによる基板同士の貼り合わせ精度が低下せず、歩留まりを向上させることができる。
さらに、可動子40の駆動に伴ってゴミが発生しないため、真空チャンバユニットなどの密閉空間内で基板同士の貼り合わせを行っても、ゴミなどの異物が基板同士の貼り合わせ箇所に混入するなどの悪影響を防止することができる。
According to such an adhesive chuck device according to the embodiment of the present invention, in the plurality of actuators A distributed in the chuck main body 60, the extensible portions 10 are expanded and deformed, whereby the tips of all the movable elements 40 are connected to the communication holes. By sticking through the holder 62 and simultaneously projecting from the holding surface 60a of the chuck main body 60, and contacting each of the workpieces W, the adhesive member 70 performs adhesive holding and the like. The tips of all the movers 40 are simultaneously immersed in the communication holes 62 of the chuck main body 60, and each of them is separated from the workpiece W, so that the release from the adhesive member 70 is performed.
Therefore, the workpiece W can be detachably adhered and held without the core blur by the plurality of movers 40.
As a result, even if it is used for adhesive peeling after completion of bonding in a flat panel display substrate bonding machine or the like, the bonding accuracy between the substrates by the actuator does not decrease, and the yield can be improved.
Further, since no dust is generated as the movable element 40 is driven, foreign matter such as dust is mixed into the bonding position between the substrates even when the substrates are bonded in a sealed space such as a vacuum chamber unit. Can prevent adverse effects.

次に、本発明の一実施例を図面に基づいて説明する。
この実施例は、図1(a)(b)及び図2に示すように、粘着チャック装置が、チャック本体60に対し複数のアクチュエータAの基部30をそれぞれ気密接合させて、チャック本体60の内部に形成される駆動用流体Fの供給部61と、アクチュエータAの基部30に環状空間13と通じるように設けられる貫通孔32とが連通するように取り付けることにより、複数のアクチュエータAの伸縮部10の駆動経路となる駆動用流体Fのネットワークを構成したものである。
チャック本体60は、その内部に形成される駆動用流体Fの供給部61と、アクチュエータAの基部30が接触するように取り付けられる複数の取付部63と、取付部63に取り付けられたアクチュエータAの基部30の通孔31と連通するようにそれぞれ開設される複数の連通孔62と、取付部63に取り付けられたアクチュエータAの基部30の貫通孔32に向けて供給部61と連通するようにそれぞれ開設される複数の供給孔64を有している。
Next, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, as shown in FIGS. 1A, 1 </ b> B, and 2, the adhesive chuck device hermetically joins the base portions 30 of the plurality of actuators A to the chuck main body 60. Are attached so that the supply portion 61 of the driving fluid F formed on the base plate 30 of the actuator A and the through hole 32 provided so as to communicate with the annular space 13 communicate with the base portion 30 of the actuator A. The network of the driving fluid F that becomes the driving path is configured.
The chuck body 60 includes a supply portion 61 of the driving fluid F formed therein, a plurality of attachment portions 63 attached so that the base portion 30 of the actuator A is in contact, and the actuator A attached to the attachment portion 63. A plurality of communication holes 62 each opened so as to communicate with the through hole 31 of the base portion 30 and a supply portion 61 toward the through hole 32 of the base portion 30 of the actuator A attached to the attachment portion 63. A plurality of supply holes 64 are provided.

駆動用流体Fの供給部61における供給路61aは、チャック本体60に対して取り付けられる複数のアクチュエータAを相互につなぐように形成され、供給路61aの一部がポンプなどの駆動手段を介して駆動用流体Fの供給源に配管接続されている。
アクチュエータAの取付部63とは、チャック本体60に対してアクチュエータAの基部30をそれぞれ位置決めするための固定手段である。
図1(a)(b)及び図2に示される例では、取付部63として、チャック本体60に開設される複数の係止孔63aと、アクチュエータAの基部30から係止孔63aに向け挿通されて係合するネジやボルトなどの締結具63bを備えている。アクチュエータAの基部30に挿通した締結具63bを係止孔63aに係合(螺合)させることにより、アクチュエータAの基部30をチャック本体60に対して気密状に連結している。
また、その他の例として図示しないが、取付部63として係止孔63a及び締結具63bに代え、それ以外の連結部材を用いて、アクチュエータAの基部30をチャック本体60に対して気密状に連結することも可能である。
The supply path 61a in the supply section 61 for the driving fluid F is formed so as to connect a plurality of actuators A attached to the chuck body 60, and a part of the supply path 61a is connected to a drive means such as a pump. A pipe is connected to the supply source of the driving fluid F.
The attachment portion 63 of the actuator A is a fixing means for positioning the base portion 30 of the actuator A with respect to the chuck body 60.
In the example shown in FIGS. 1A and 1B and FIG. 2, as the attachment portion 63, a plurality of locking holes 63 a opened in the chuck body 60 and the base 30 of the actuator A are inserted from the base portion 30 toward the locking holes 63 a. And a fastener 63b such as a screw or a bolt to be engaged. The base 63 of the actuator A is connected to the chuck main body 60 in an airtight manner by engaging (screwing) the fastener 63b inserted through the base 30 of the actuator A into the locking hole 63a.
Although not shown as another example, the base 30 of the actuator A is connected to the chuck body 60 in an airtight manner by using other connecting members instead of the locking holes 63a and the fasteners 63b as the mounting portions 63. It is also possible to do.

このような本発明の実施例に係る粘着チャック装置によると、チャック本体60における複数の取付部63に対し、複数のアクチュエータAをそれぞれの基部30が接触するように取り付けることにより、各アクチュエータAの基部30の通孔31がチャック本体60の連通孔62と連通し、各アクチュエータAの基部30の貫通孔32がチャック本体60の供給孔64と連通して、チャック本体60の供給部61から駆動用流体Fが、ベローズ11,11′間の環状空間13へ供給されることで、各アクチュエータAのベローズ11,11′がそれぞれ伸長変形する。
したがって、複数のアクチュエータAの設置とそれらに対する駆動配管を同時に行うことができる。
その結果、一辺が数メートルの大型ワークを保持する粘着チャック装置であっても、多数のアクチュエータAの駆動経路に複雑な配管接合などは必要なく、駆動経路を短時間で且つ確実に確保できて、作業性に優れるという利点がある。
According to such an adhesive chuck device according to the embodiment of the present invention, the plurality of actuators A are attached to the plurality of attachment portions 63 in the chuck main body 60 so that the respective base portions 30 are in contact with each other. The through hole 31 of the base 30 communicates with the communication hole 62 of the chuck main body 60, and the through hole 32 of the base 30 of each actuator A communicates with the supply hole 64 of the chuck main body 60, and is driven from the supply unit 61 of the chuck main body 60. The working fluid F is supplied to the annular space 13 between the bellows 11 and 11 ', so that the bellows 11 and 11' of each actuator A is extended and deformed.
Therefore, it is possible to simultaneously install a plurality of actuators A and drive piping for them.
As a result, even in the case of an adhesive chuck device that holds a large workpiece with a side of several meters, there is no need for complicated pipe joining or the like in the drive path of many actuators A, and the drive path can be secured in a short time and reliably. There is an advantage that workability is excellent.

さらに、図1(a)(b)及び図2に示されるように、複数のアクチュエータAの可動子40の押圧部41に粘着部材70を設け、伸縮部10の伸長変形による可動子40の没入移動に伴い、粘着部材70からワークWを引き剥がして開放する場合には、図示しないが、伸縮部10の短縮変形による可動子40の突出移動に伴い、チャック本体60の保持面60aに設けられた粘着部材70からワークWを押し剥がして開放する場合に比べて、粘着部材70によるワークWの接着面積が小さくなるため、ワークWの変形量を制限しながら可動子40の移動ストロークが短くてもワークWを確実に剥離開放できる。
それにより、可動子40の芯ブレを皆無にすることができる。
さらに、ワークWが有機ELディスプレイ(OLED)や高精細の液晶ディスプレイ(LCD)などのような、一対の基板の間にスペーサの無い液材が挟み込まれるものであっても、可動子40の押し剥がしに伴う潰れを防止できる。
Further, as shown in FIGS. 1A and 1B and FIG. 2, an adhesive member 70 is provided on the pressing portion 41 of the movable element 40 of the plurality of actuators A, and the movable element 40 is immersed due to the expansion and deformation of the expansion / contraction part 10. When the workpiece W is peeled off from the adhesive member 70 to be released along with the movement, the workpiece W is provided on the holding surface 60a of the chuck body 60 as the movable element 40 protrudes due to the shortening deformation of the expansion / contraction part 10 although not shown. Compared with the case where the workpiece W is peeled off from the adhesive member 70 and released, the adhesion area of the workpiece W by the adhesive member 70 is reduced, so that the moving stroke of the mover 40 is shortened while limiting the deformation amount of the workpiece W. Also, the workpiece W can be reliably peeled and released.
Thereby, the core blur of the mover 40 can be completely eliminated.
Furthermore, even if the workpiece W is a material in which a liquid material without a spacer is sandwiched between a pair of substrates such as an organic EL display (OLED) or a high-definition liquid crystal display (LCD), the pressing of the movable element 40 The crushing accompanying peeling can be prevented.

なお、前示実施例では、チャック本体60の供給部61に通じる供給孔64と、アクチュエータAの基部30の貫通孔32とをそれぞれ気密状に連通させたが、これに限定されず、アクチュエータAにおける外側の蛇腹部11a′や昇降部20を貫通して環状空間13と通じるように供給部61の供給管路を直接的に配管接続するなど、供給部61としてチャック本体60と関係なく環状空間13に駆動用流体Fを供給しても良い。   In the previous embodiment, the supply hole 64 communicating with the supply part 61 of the chuck body 60 and the through hole 32 of the base part 30 of the actuator A are communicated in an airtight manner, but the present invention is not limited to this. The supply space of the supply portion 61 is directly connected to the annular space 13 so as to pass through the outer bellows portion 11a ′ and the elevating portion 20 and communicate with the annular space 13. The driving fluid F may be supplied to 13.

A アクチュエータ 10 伸縮部
11,11′ ベローズ 12 中心空間
13 環状空間 20 昇降部
30 基部 31 通孔
32 貫通孔 40 可動子
50 ストッパ 60 チャック本体
61 供給部 62 連通孔
63 取付部 64 供給孔
70 粘着部材 F 駆動用流体
W ワーク
A Actuator 10 Extendable part 11, 11 'Bellows 12 Central space 13 Annular space 20 Lifting part 30 Base part 31 Through hole 32 Through hole 40 Movable element 50 Stopper 60 Chuck body 61 Supply part 62 Communication hole 63 Attachment part 64 Supply hole 70 Adhesive member F Drive fluid W Workpiece

Claims (3)

アクチュエータがワークと対向して配置され、粘着部材を介して前記ワークが着脱自在に保持される粘着チャック装置であって、
前記アクチュエータは、複数のベローズが内外へ同心状に配置される伸縮変形可能な伸縮部と、
前記ベローズの昇降部から前記伸縮部の中心空間を通るように設けられ、前記ワークに向け往復動自在に支持される押圧部を有する可動子と、
前記ベローズの前記昇降部と対向して前記伸縮部の伸縮変形に伴い前記昇降部が当接するように設けられるストッパと、を備え、
前記可動子は、前記伸縮部の伸縮変形と連動して前記可動子の前記押圧部を前記ワークと接触させ、前記伸縮部の逆の伸縮変形と連動して前記可動子の前記押圧部を前記ワークから離すように制御され
前記ストッパは、前記昇降部の当接に伴って前記可動子の前記押圧部が前記ワークに向かう移動を停止させる移動範囲制限部を有することを特徴とする粘着チャック装置。
An adhesive chuck device in which an actuator is arranged to face a workpiece, and the workpiece is detachably held via an adhesive member,
The actuator includes a plurality of bellows that are concentrically arranged inside and outside, and a stretchable part that can be deformed and stretched.
A mover having a pressing portion that is provided so as to pass through the central space of the expansion / contraction portion from the lifting portion of the bellows and is supported so as to be reciprocally movable toward the workpiece;
A stopper provided so that the elevating part contacts the elevating part of the bellows in association with the elastic deformation of the elastic part ,
The mover brings the pressing portion of the mover into contact with the work in conjunction with the expansion / contraction deformation of the expansion / contraction portion, and the pressing portion of the movable element in conjunction with the reverse expansion / contraction deformation of the expansion / contraction portion. Controlled to move away from the workpiece ,
The adhesive chuck device according to claim 1, wherein the stopper includes a movement range limiting portion that stops the movement of the pressing portion of the mover toward the workpiece with the contact of the elevating portion .
前記ベローズの間に形成される環状空間に向けて駆動用流体を供給する供給部を更に備え、前記供給部から前記環状空間に前記駆動用流体が供給されることで前記ベローズを同時に伸縮変形させるように構成したことを特徴とする請求項1記載の粘着チャック装置。 The apparatus further includes a supply unit that supplies a driving fluid toward an annular space formed between the bellows, and the driving fluid is supplied from the supply unit to the annular space to simultaneously expand and contract the bellows. adhesive chuck device according to claim 1 Symbol mounting characterized by being configured. 前記アクチュエータがチャック本体に前記ワークと対向して複数それぞれ分散配置される粘着チャック装置であって、
前記アクチュエータは、前記ベローズの基部に前記環状空間と通じるように設けられる貫通孔を有し、
前記チャック本体は、その内部に形成される前記駆動用流体の前記供給部と、前記アクチュエータの前記基部が接触するように取り付けられる複数の取付部と、前記取付部に取り付けられた前記アクチュエータの前記基部の通孔と連通するようにそれぞれ開設される複数の連通孔と、前記取付部に取り付けられた前記アクチュエータの前記基部の前記貫通孔に向けて前記供給部と連通するようにそれぞれ開設される複数の供給孔を有することを特徴とする請求項記載の粘着チャック装置。
A plurality of the above-mentioned actuators are arranged in a chuck body so as to be opposed to the workpiece, and each of them is an adhesive chuck device,
The actuator has a through hole provided at the base of the bellows so as to communicate with the annular space,
The chuck body includes the supply portion of the driving fluid formed therein, a plurality of attachment portions attached so that the base portion of the actuator contacts, and the actuator attached to the attachment portion. A plurality of communication holes each opened to communicate with the through hole of the base part, and each of the actuators attached to the attachment part are opened to communicate with the supply part toward the through hole of the base part. The adhesive chuck device according to claim 2 , further comprising a plurality of supply holes.
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