JP2013140261A - Lamination method and apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a lamination method and apparatus for laminating two plate-like objects each including a film with high-accuracy alignment, and to improve production efficiency without any entrapment of air bubbles.SOLUTION: A housing 1 is decompressed to suck and retain a first plate-like object W1 on a screen 101. A stage 201 is decompressed to suck and retain a second plate-like object W2 on the stage 201. A micro-gap is formed between the first plate-like object W1 and the second plate-like object W2. An alignment camera 203 performs image processing, and an XYZ positioning mechanism 202 performs high-precision positioning. The micro-gaps between the first and second plat-like objects W1, W2 is then decompressed. Rolls 102, 103 are used to apply pressure from a surface of the screen 101 toward the second plate-like object W2, while the rolls 102, 103 are moved from the vicinity of the center of the first plate-like object W1 toward respective ends to laminate the two plate-like objects W1, W2.

Description

  The present invention relates to a method and an apparatus for laminating two plates including a film. It can be used mainly for manufacturing display panels, but it is not limited to that.

  In recent display devices, a plastic film having various functions is bonded to the surface of a display panel. In particular, when a film having some pattern is bonded to the display panel, high positioning accuracy and bonding accuracy are required.

  However, since a thin plastic film tends to bend or wrinkle, and easily expands and contracts, it has been difficult to accurately align and bond to a display panel.

  There exists patent document 1 as a member bonding method for a display. In this case, the film holding means is composed of slight adhesion. In this case, the display film often uses a relatively fragile material such as a TAC material. In the method of Patent Document 1, it is difficult to cleanly adhere the film to the slightly adhesive surface, and when wrinkles are formed, bubbles are mixed. Moreover, in order to prevent the above, there is a possibility of damaging the film when it is reapplied, and it is difficult to align the rough film during loading. Further, the adhesive force of the holding means may deteriorate with the passage of time, so that it is not stable over time. As a result, there is a problem that the yield is deteriorated.

  Further, in Patent Document 2, two plate-like objects including a film are put in a vacuum chamber, the diaphragm film is expanded from the upper part, and the gap between the two plate-like objects is reduced at the same time while reducing the gap between the two plate-like objects. An apparatus for aligning and bonding is described. In this case, if the expansion of the diaphragm film is not uniform, it is difficult to align the two plates, and if the compressed air and decompression timing do not match, it will cause misalignment and wrinkles, leading to poor yield. It was. In addition, since the decompression time is necessary, the tact time becomes longer, which causes a reduction in production efficiency.

  Patent Document 3 describes an apparatus that uses a mesh and a hard sheet to bond two plate-like objects with a roll. However, there is no alignment means and it cannot be bonded with high accuracy. Furthermore, there is a problem that the film is stretched in one direction in the bonding with the roll from the end face, and there is a problem of deteriorating accuracy.

Japanese Utility Model Publication No. 61-116663 JP 2009-294551A JP 2010-94910 A

  The present invention makes it possible to achieve high-precision alignment of two plate-like objects in bonding of two plate-like objects including a film, and to increase production efficiency without mixing bubbles. Propose a bonding method and device.

  In claim 1, a bonding method is adopted in which two plate-like objects are held in a plane, and the two plate-like objects are aligned and subjected to pressure transfer in a state where they are opposed to each other and spaced apart from each other.

  According to the invention which concerns on Claim 1, the alignment in the plane of two plate-shaped objects is enabled, and it can contribute to alignment accuracy improvement.

  According to the second aspect of the present invention, a screen is used for the perforated plate that holds one plate-like object.

  According to the invention which concerns on Claim 2, the plate used by screen printing can be diverted and the mesh screen generally used can be employ | adopted. Furthermore, since it is no longer a custom order, it also leads to price reductions in terms of distribution.

  According to a third aspect of the present invention, at least one of the two plate-like objects is a film.

  According to the invention which concerns on Claim 3, it becomes possible to use the bonding method of this invention for bonding of a thin film.

  In Claim 4, the method of pressurizing from the center vicinity of a plate-shaped object to an edge part is employ | adopted.

In general, when pressure application is performed from the end to the opposite end by a pressurizing means, the plate-like material is bonded while extending from the beginning to the end of the bonding. Thereby, since it bonds together in the position different from initial alignment, as a result, bonding accuracy will fall.
According to the fourth aspect of the present invention, since the bonding is performed from the center to the end, the amount of elongation is simply halved, and as a result, the bonding accuracy can be improved. Further, since the center alignment accuracy is improved, it is advantageous for a product that prioritizes the center position (FIG. 4).

  In Claim 5, the method of decompressing the space between two plate-shaped objects is employ | adopted.

Depending on the state of the surface of the two plate-like objects, there are cases where bubbles are likely to be mixed in, and the moving speed of the pressurizing means needs to be significantly reduced to prevent this.
In the invention according to claim 5, by depressurizing the space between the two plate-like objects, it is possible to physically eliminate air and prevent air bubbles from entering, and increase the operation speed of the pressurizing means. be able to. However, since it takes time to depressurize, the degree of depressurization and the operation speed of the pressurizing means can be set by using this so that bubbles are not mixed, and overall productivity can be improved.

  7. A porous plate for adsorbing and holding two plate-like objects and a holding means for holding them in a plane, and an image processing means and a positioning means for performing alignment by providing a gap between the two plate-like objects. And the apparatus which comprises the pressurization means which pressurizes and bonds two plate-shaped objects is employ | adopted.

  According to the invention of claim 6, by aligning the two plate-like objects in a planar state, the positioning accuracy is improved, and the two plate-like objects can be bonded with high accuracy. Can be provided.

  According to a seventh aspect of the present invention, a screen is adopted as the plate-like object suction holding means.

  According to the invention which concerns on Claim 7, it becomes possible to employ | adopt the screen plate of the conventional as an adsorption | suction holding means, and can reduce cost. Furthermore, it is easy to bend in transfer and is advantageous.

  In Claim 8, the apparatus which comprises two or more pressurization means which bonds two plate-shaped objects together is employ | adopted.

  According to the invention which concerns on Claim 8, it becomes possible to bond from the center of a plate-shaped object, the elongation of a plate-shaped object can be reduced, and bonding accuracy can be improved.

  According to the ninth aspect of the present invention, an apparatus including a rubber roll, a metal roll, and a squeegee is used as the pressing means.

  According to the ninth aspect of the present invention, it is possible to select a pressurizing unit that may prevent air bubbles from being mixed in the bonding of two plate-like objects or lead to an improvement in bonding accuracy.

  According to a tenth aspect of the present invention, an apparatus including a pressure reducing amount adjusting means and a valve is adopted as the pressure reducing means.

  According to the tenth aspect of the present invention, the pressure reduction can be turned on and off, the amount of pressure reduction can be adjusted, and the holding force of the first plate-like object can be varied.

  In the eleventh aspect of the present invention, an apparatus is employed in which the decompression means includes a compressed air supply means and a vacuum generation means, and a means for switching them according to timing.

  According to the eleventh aspect of the present invention, it is possible to facilitate desorption by holding the plate-like object with the vacuum generating means and switching to the compressed air supply means when removing the plate-like object. is there.

  According to a twelfth aspect of the present invention, an apparatus including a pressure reducing tank as the pressure reducing means is employed.

  According to the twelfth aspect of the present invention, the decompression tank contributes to the improvement of the decompression speed and the stability of the decompression amount, thereby contributing to the improvement of the production speed.

  In claim 13, a pair of housings that respectively accommodate the first plate-like material and the second plate-like material together with the perforated plate and the holding means, and locations where openings of the same shape of each housing face each other The moving means for moving the other housing relative to the other housing and the first plate and the first plate in a state where the openings of the pair of housings are in contact with each other. A device including a housing decompression unit capable of decompressing the space between the two plate-like objects is employed.

  According to the invention which concerns on Claim 13, in bonding, the 1st plate-shaped object and the 2nd plate-shaped object are attached to the perforated panel and holding means of each housing | casing in the location where the opening part of both housing | casings does not oppose. Each can be held. Further, the housings are moved relative to each other where the openings face each other, and the two openings are brought into contact with each other. By depressurizing the space between them, air bubbles can be prevented from being mixed into the space between the first plate and the second plate, and the operation speed of the pressurizing means can be increased. . However, since time is required for decompression, it is possible to set the degree of decompression and the operating speed of the pressurizing means so that bubbles are not mixed, and overall productivity can be improved.

  15. The apparatus according to claim 14, wherein the housing pressure reducing means includes a pressure reducing amount adjusting means that makes it possible to adjust a pressure reducing amount in a space between the first plate-like object and the second plate-like object, and a valve. .

  According to the fourteenth aspect of the present invention, the pressure reduction in the space between the first plate-like object and the second plate-like object can be turned on and off with a valve, and the pressure reduction amount can be adjusted with the pressure reduction amount adjusting means. Therefore, it is possible to set a pressure reduction amount that prevents air bubbles from being mixed with the holding force of the first plate-like object.

  16. The housing pressure reducing means according to claim 15, comprising two types of compressed air supply means and vacuum generating means for reducing the space between the first plate and the second plate, and the compression In order to switch between the air supply unit and the vacuum generation unit, an apparatus including a switching unit that can select either one is adopted.

  According to the fifteenth aspect of the present invention, the space between the first plate-like object and the second plate-like object is depressurized by the vacuum generating means and then switched to the compressed air supply source when the bonding is completed. The speed of destruction increases, and as a result productivity can be improved.

  In Claim 16, the apparatus which comprises a pressure reduction tank is employ | adopted in pressure_reduction | reduced_pressure of the space between a 1st plate-shaped object and a 2nd plate-shaped object as a housing pressure reduction means.

  According to the sixteenth aspect of the present invention, the decompression tank contributes to the improvement of the decompression speed and the stability of the decompression amount, thereby contributing to the improvement of the production speed.

  In Claim 17, the apparatus provided with the tension adjustment means which supports at least 1 side of a perforated plate and increases / decreases the tension | tensile_strength provided to a perforated plate according to the load added to a perforated plate is employ | adopted.

  According to the seventeenth aspect of the present invention, when an extra load is applied to the porous plate by the pressurizing means, an extra load is not applied to the porous plate by increasing or decreasing the tension applied to the porous plate by the tension adjusting means. It becomes possible. In particular, when pressure is applied in the vicinity of the end of the perforated plate, the load change in the surface of the perforated plate can be absorbed, which can contribute to improvement in accuracy and surface quality during bonding.

  In Claim 18, in the positioning means of the holding means for holding the second plate-like object in a plane, the alignment operation ends, and the pressurizing means such as a roll pressurizes the first plate-like object to the second plate-like object. At this time, an apparatus including means for releasing the load of the positioning motor, etc., and freeing the holding means or the second plate-like object in the plane direction is adopted.

The first plate may be distorted and pasted due to the difference in travel accuracy of a roll or the like and the flatness of the stage holding the second plate in a plane, and various other machine and product accuracy. This occurs because the running of the pressurizing means and the plane do not match.
According to the invention of claim 18, the positioning is performed at the initial stage of positioning, but after the first plate-like object and a part of the second plate-like object are installed by a roll or the like, the running accuracy of the roll or the like is set. Even when the flatness of the stage holding the flat surface of the second plate or the like is high to some extent, the first and second plate-like materials can be moved without causing distortion because the stage moves together with the meandering of a roll or the like. It becomes possible to paste them together.

  According to the present invention, it is possible to achieve high-accuracy alignment of two plate-like objects in the bonding of two plate-like objects including a film, and to increase production efficiency without mixing bubbles. Can be.

It is the schematic which shows the bonding apparatus which concerns on one Embodiment of this invention. It is explanatory drawing which shows an example of the operation | movement order of two rolls shown in FIG. It is an example of the mechanism built in the screen of FIG. 3, (a) is an initial state, (b) is a schematic diagram which each shows the state at the time of bonding. FIG. 3B shows the bonding operation of the two plate-like objects by a plane and a cross section, where FIG. 3A is an ideal bonding state, and FIG. 3B is a bonding when the roll is curved. The state (c) is a schematic diagram showing the bonding state when the curved travel of the roll is corrected by the XYZ positioning mechanism. (A)-(d) is the schematic which shows the bonding procedure of the two plate-shaped objects which concern on embodiment of this invention. (A)-(d) is the schematic which shows the bonding procedure of the two plate-shaped objects which concern on embodiment of this invention.

  Next, details of the embodiment of the present invention will be described. In the following description, the first plate-like material is a film, and the second plate-like material is a color filter for a liquid crystal display.

  First, the schematic of the bonding apparatus which concerns on embodiment of this invention is shown in FIG.

  In FIG. 1, a screen 101 (corresponding to the perforated plate in the claims) can hold the first plate-like object W1 by suction, and this screen 101 is accommodated inside a housing K1 having an opening K1a. Has been. This casing K1 is connected to a blower 115 (corresponding to the decompression means, casing decompression means, and vacuum generation means in the claims) in order to evacuate the interior of the casing K1. The blower 115 evacuates the inside of the housing K1 to adsorb the first plate W1 to the screen 101. Further, a stop valve 112 (corresponding to the valve of the decompression means in the claims) is installed to operate the vacuum between the blower 115 and the casing K1, and a decompression regulator 113 (in the claims) is used to adjust the degree of decompression. The pressure reducing means and the pressure reducing amount adjusting means of the housing pressure reducing means are installed. In order to create a vacuum state at an early stage, a buffer tank 114 (corresponding to the tank of the decompression means and the casing decompression means in the claims) is provided and a vacuum volume is provided in advance. In order to simplify the vacuum break, the pressure source 117 (corresponding to the compressed air supply means of the decompression means and the casing decompression means in the claims) and the regulator 116 are switched by the switching valve 111 (switching means of the decompression means in the claims). Equivalent). Further, as a means for pressurizing the first plate W1 through the screen 101, a pressurizing mechanism 104 and a pressurizing mechanism 105 are connected to the roll 102 and the roll 103 and arranged. Further, the roll 102 and the roll 103 can be driven by an actuator 106. For simplicity, only one mechanism is shown for the actuator 106, but when the combination is performed with a combination of a ball screw and a motor, a plurality of actuators 106 are arranged so that the roll 102 and the roll 103 can travel individually.

  On the other hand, the second plate-like object W2 is held flat on the stage 201 (corresponding to the holding means in the claims). The stage 201 is provided with a very small hole, and is connected to the blower 224, the decompression regulator 223, and the stop valve 222 in order to suck and fix the second plate-like object W2 by vacuum. The stage 201 is fixed to an XYZ positioning mechanism 202 (corresponding to the positioning means in the claims) and can be driven by image information of the alignment camera 203 processed by the control unit 218 (corresponding to the image processing means in the claims). Like that. Further, the stage 201 and the XYZ positioning mechanism 202 are accommodated in a housing K2 having an opening K2a having the same size as the opening K1a of the housing K1. The housing K2 has a structure that can depressurize the space between the first plate-like object W1 and the second plate-like object W2, and the depressurization mechanism is the switching valve 211 and the depressurization regulator 212 as in the case 1. (Corresponding to the decompression amount adjusting means of the casing decompression means in the claims), stop valve 213 (corresponding to the valve of the casing decompression means in the claims), buffer tank 214 (tank of the casing decompression means in the claims) , Blower 215 (corresponding to the casing decompression means in the claims, vacuum generation means of the casing decompression means), regulator 216, pressure air source 217 (corresponding to the compressed air supply means of the casing decompression means in the claims) ).

Finally, the first plate W1 and the second plate W2 are set on the screen 101 and the stage 201, respectively, and the first plate W1 and the second plate W2 are bonded together. Since K1 and the openings K1a and K2a of the housing K2 need to be moved closer to and away from each other, the housing K2 is moved closer to and away from the housing K1 by the housing moving actuator 221 (corresponding to the moving means in the claims). Be able to move in the direction you want.
FIG. 2 shows an example of the operation order of the two rolls 102 and 103. In FIG. 2A, the first plate-like object W1 and the second plate-like object W2 face each other to create a minute gap, and the first plate-like object W1 and the second plate-like object W2 are aligned. Next, as shown in FIG. 2B, bonding is performed from the vicinity of the center by the roll 102. Next, as shown in FIG. 2C, the roll 103 is caused to travel in the opposite direction to the roll 102. FIG. 2D shows a state in which the roll 102 and the roll 103 finally reach the end, and the bonding of the first plate W1 and the second plate W2 is completed.

The screen 101 may incorporate a mechanism as shown in FIG. FIG. 3 (a) has a tension adjusting mechanism 301 and a tension adjusting mechanism 302 (corresponding to the tension adjusting means in the claims) so that the tension of the perforated plate 101 is constant at the support portion of the perforated plate 101. It shows that. In FIG. 3 (b), the porous plate 101 is stretched by the roll 102 even though it is a very small amount. By increasing or decreasing the tension applied to the perforated plate 101 so that the tension adjusting mechanisms 301 and 302 absorb this elongation, the perforated plate 101 is always stretched at a constant tension, and an extra load in the plane is generated. It is absorbed by the tension adjusting mechanism 301.
FIG. 4 shows a process in which the alignment of the first plate-like object W1 and the second plate-like object W2 is completed and the roll 102 starts bonding. FIG. 4A shows an ideal roll travel. The upper figure of Fig.4 (a) is the figure seen from the upper surface of the 1st plate-shaped object W1, and the lower figure is a figure of AA cross section. As an ideal operation, the roll 102 preferably travels in parallel with the stage 201. However, in reality, there are variations in the roundness, deformation and running parallelism of the roll 102 and the flatness of the stage 201, and a deviation of several μm occurs. It is impossible to eliminate these, and as an actual track, as shown in the upper diagram of FIG. When it is going to bend and run, the perforated plate 101 and the first plate-like object W1 are distorted, and are pasted together as shown in the diagram of the BB cross section shown in the lower diagram of FIG. It leads to deterioration of accuracy. Therefore, as shown in the upper diagram of FIG. 4C, while the roll 102 is running after the alignment is completed, the stage 102 is made free in the X-axis direction or the Y-axis direction with respect to the XYZ positioning mechanism 201, so that the roll 102 is in the actual track. When it progresses by 102 ', the distortion of the perforated plate 101 and the 1st plate-shaped object W1 will be absorbed when the stage 201 follows the advancing load of the roll 102, and it will become possible to prevent the deterioration of bonding accuracy. .

  Next, FIG.5 and FIG.6 shows the operation | movement schematic of embodiment of this invention.

  In FIG. 5A, the first plate W1 is set on the screen 101, the switching valve 111 is switched to the vacuum side, the stop valve 112 is opened, and the blower 113 is operated. Further, in order to adjust the holding force, the pressure reduction amount is adjusted by the pressure reduction regulator 113. Further, the second plate-like object W <b> 2 is sucked and held on the stage 201 using the stop valve 222, the decompression regulator 223, and the blower 224. This completes the work set.

  In FIG. 5B, the casing K2 is transported to the top of the casing K1 using the casing moving actuator 221.

  In FIG.5 (c), the housing | casing K1 and the housing | casing K2 are joined, First, with the XYZ positioning mechanism 202, the gap G1 (gap) is taken between the 1st plate-shaped object W1 and the 2nd plate-shaped object W2, The marks of the first plate-like object W1 and the second plate-like object W2 are read by the alignment camera 203 and fed back to the XYZ positioning mechanism 202, and the first plate-like object W1 and the second plate-like object W2 are aligned. By setting the gap G1 to a minimal gap, the bonding accuracy is improved. After the alignment is completed, the space between the first plate-like object W1 and the second plate-like object W2 is decompressed in advance using the switching valve 211, the stop valve 212, the decompression regulator 213, and the blower 215. . At this time, by closing the stop valve 212 and operating the blower 215 in advance, a decompression space is created in the buffer tank 214, and the decompression speed at this time can be increased, leading to an improvement in productivity. . In addition, it is possible to obtain an effect of preventing air bubbles from being mixed due to accurate planar positioning and reduced pressure.

  In FIG. 5D, the first plate W1 is pressed against the second plate W2 from the vicinity of the center of the stage 201 to the peripheral edge through the mesh 101 using the roll 102 and the pressure mechanism 104. Thereafter, as shown in FIG. 4C, the X and Y directions of the XYZ positioning mechanism 202 can be made free.

  In FIG. 6A and FIG. 6B, after the roll 102 travels in the direction of the end of the mesh 101, the roll 103 is similarly pressed by the pressurizing mechanism 105 and travels in the direction opposite to the roll 102. As a result, the first plate-like object W1 can be bonded to the second plate-like object W2 from the center, and the improvement of the bonding accuracy can be aimed at. Thereby, the first plate-like object W1 and the second plate-like object W2 are completely pasted together.

  In FIG.6 (c), in order to take out the completed body which joined the 1st plate-shaped object W1 and the 2nd plate-shaped object W2, the switching roll 102 and the roll 103 are taken out of a ground state, and the switching valves 111 and 211 are used, Switching to the pressurized air sources 117 and 217 and the regulators 116 and 216, the vacuum breaking of the casing K1 and the casing K2 is instantaneously performed. When the atmospheric pressure is reached, the switching valves 111 and 211 and the stop valves 112 and 212 are used to stop the air flow.

  Finally, as shown in FIG. 6 (d), the housing K2 is opened by the housing moving actuator 221, and the finished product obtained by joining the first plate-like object W1 and the second plate-like object W2 can be taken out.

  Thereby, it becomes possible to perform highly accurate bonding of the 1st plate-like object W1 and the 2nd plate-like object W2, and it becomes possible to improve productivity, preventing bubble mixing simultaneously.

101 ... perforated plate (screen)
DESCRIPTION OF SYMBOLS 102 ... Roll 102 '... Actual roll track 103 ... Roll 104 ... Pressure mechanism 105 ... Pressure mechanism 106 ... Actuator (Roll 1 / Roll 2)
DESCRIPTION OF SYMBOLS 111 ... Switching valve 112 ... Stop valve 113 ... Pressure reduction regulator 114 ... Buffer tank 115 ... Pressure reduction blower 116 ... Regulator 117 ... Pressure air source 201 ... Stage 202 ... XYZ positioning mechanism 203 ... Alignment camera 211 ... Switching valve 212 ... Stop valve 213 ... Pressure reduction Regulator 214 ... Buffer tank 215 ... Pressure reducing blower 216 ... Regulator 217 ... Pressure air source 218 ... Control unit 221 ... Housing movement actuator 222 ... Stop valve 223 ... Pressure reducing regulator 224 ... Pressure reducing blower 301 ... Tension adjusting mechanism 302 ... Tension adjusting mechanism G1 ... Gap K1 ... Case K1a ... Opening K2 ... Case K2a ... Opening W1 ... First plate W2 ... Second plate

Claims (18)

A laminating method for laminating two plate-like objects,
The first plate-like object is adsorbed and held on the perforated plate, the second plate-like object is disposed at a position facing the first plate-like object, and the first plate-like object and the second plate-like object are arranged. After the first plate and the second plate are aligned with a gap between the first plate and the plate, the first plate is moved to the second plate. A laminating method characterized by laminating two plate-like objects by pressure-transferring to an object.   The laminating method according to claim 1, wherein the perforated plate for adsorbing and holding the first plate-like object is a screen.   The bonding method according to claim 1, wherein at least one of the two plate-like objects is a film.   The bonding method according to any one of claims 1 to 3, wherein the two plate-shaped objects are pressure-transferred and bonded from the vicinity of the center of at least one of the two plate-shaped objects to the end portion.   The bonding method according to claim 1, wherein the space between the first plate and the second plate is decompressed. An apparatus for laminating two plate-like objects,
A porous plate for holding the first plate-like object, a decompression means for allowing the first plate-like object to be adsorbed to the porous plate, a holding means for holding the second plate-like object in a plane, and the first The plate-like object and the second plate-like object are arranged face-to-face so that alignment is possible with a gap between the first plate-like object and the second plate-like object. An image processing means, a positioning means, and a pressure means for pressure-transferring the first plate-like material to the second plate-like material.   The bonding apparatus according to claim 6, wherein the perforated plate for adsorbing and holding the first plate-like object is a screen.   The pasting apparatus according to any one of claims 6 to 7, comprising at least two pressurizing means.   The laminating apparatus according to any one of claims 6 to 8, further comprising a drive unit that uses at least one of a rubber roll, a metal roll, and a squeegee as the pressurizing unit and causes the pressurizing unit to travel.   The bonding apparatus according to any one of claims 6 to 9, wherein the pressure reducing means includes a pressure reducing amount adjusting means and a valve.   The pressure reducing means includes two kinds of compressed air supply means and vacuum generation means, and further comprises switching means for selecting either the compressed air supply means or the vacuum generation means. The bonding apparatus in any one of 6 thru | or 10.   The bonding apparatus according to claim 6, further comprising a tank as the decompression unit.   A pair of housings each having an opening of the same shape in the facing portion, the porous plate being accommodated in one inside and the holding means being accommodated in the other, the first plate-like object and the One of the pair of casings with respect to the other is disposed between a position where the second plate-like object is disposed facing each other and the openings of the pair of casings face each other and the other positions. A casing that enables decompression of the space between the first plate-like object and the second plate-like object in a state in which the moving means for relative movement and the openings of the pair of cases are in contact with each other. The bonding apparatus according to any one of claims 6 to 12, further comprising body decompression means.   The bonding apparatus according to claim 13, further comprising: a decompression amount adjusting unit and a valve as the casing decompression unit.   The casing decompression means includes two types of compressed air supply means and vacuum generation means, and further includes switching means that allows selection of either the compressed air supply means or the vacuum generation means. The bonding apparatus according to any one of claims 13 to 14.   The bonding apparatus according to claim 13, further comprising a tank as the casing decompression unit.   The tension adjusting means for supporting at least one side of the perforated plate and increasing or decreasing the tension applied to the perforated plate according to a load applied to the perforated plate is provided. The bonding apparatus as described.   In the positioning means of the holding means for holding the second plate-like object in a plane, the positioning load on the second plate-like object in the plane direction by the positioning means is eliminated during pressurization of the pressurizing means. The bonding apparatus according to any one of claims 6 to 17, characterized in that

Images