TWI376540B - - Google Patents

Description

1376540 IX. Description of the Invention: [Technical Field] The present invention relates to a drilling chuck device, for example, in the manufacture of a flat panel display such as a liquid crystal display (LCD) or a plasma display (PDP), A glass substrate such as a CF glass or a TFT glass, or a substrate assembly device of a substrate bonding machine that is held by a synthetic resin substrate driller, or a substrate transfer device that transports a substrate. Specifically, it relates to an adhesive chuck device in which a substrate is detachably held by a holding plate. [Prior Art] Conventionally, in a substrate bonding machine in which two substrates are overlapped, the substrate is held by an electrostatic chuck. However, it is difficult to produce a large-sized electrostatic disk that has been enlarged in size recently, and even if it can be fabricated It is also very expensive. Therefore, there has been an adhesive chuck device in which an adhesive material is used for substrate retention in order to solve these problems.

An example. After the upper substrate is attached and held, the film is fed and then 'by driving a plurality of engines' simultaneously with the above-mentioned rotating shaft and a roller in synchronization with the winding speed, thereby forming a sheet (for example, refer to the patent document)

After the unit is assembled and assembled, the two substrates 105526.doc 1376540 lift the tool table and the tool base plate from the plurality of actuators to the lower end position of the tool cutter by driving and winding of a plurality of actuators. Then, the blade is moved in the width direction of the adhesive sheet, and the sheet to which the upper substrate is attached is cut, and the unit is taken out in a state where the sheet is attached, and the adhesive sheet is peeled off from the unit at an appropriate timing. Moreover, there is another example such as 1". Opening a plurality of f-loads on the upper plate, respectively, have actuators in the openings, and the dry members are dry at the front end of the shaft extending downward from each actuation|| The action causes the adhesive member to descend in the opening, and if the lower surface of the adhesive member is in contact with the upper substrate, it is held in close contact with the shape of the lower surface of the pressure plate due to its adhesive action, and the bonding of the substrate When the adhesive material is peeled off from the upper substrate, if the adhesive member is raised in the opening by the actuator, the peripheral portion of the opening prevents the movement of the upper substrate, and the upper substrate is separated from the adhesive member (for example, 'refer to Patent Document 2). Further, a plurality of openings are formed in the upper pressure plate, and the rotation actuator and the vertical drive actuator are respectively provided in the openings, and the adhesion member is attached to the rotation extending downward from each of the rotation actuators. At the front end of the shaft, the respective adhesive members are lowered in the opening by the operation of the actuator for driving up and down, and the upper substrate is held by the suction and suction of the adhesive member, and is positioned and bonded 'and' the adhesive member is retracted to When the inside of the pressure plate is pressed, the adhesive member is rubbed against the substrate surface by the rotation actuator, or the upper and lower drive actuators are retracted, and the adhesive member is peeled off from the upper substrate (for example, refer to the patent document) 3). [Patent Document 1] Japanese Patent Laid-Open Publication No. 2001-133745 (pages 3 to 5, FIG. 1 to FIG. 7) 105526.doc 1376540 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2003-241 160 (page 5, 7) [Patent Document 3] Japanese Patent Laid-Open Publication No. Hei. No. 2, 2,735, No. 8 (page 5, Figs. 1 to 5) However, the conventional adhesive chuck device described above has the following problems. In Patent Document 1, in order to peel off the material member and the substrate, it is necessary to wind up the sheet at the same time as the winding speed, the horizontal direction of the winding speed (four), and the tool table and the tool base plate must be raised to use the cutter. Since the adhesive sheet is cut, the structure is more complicated because a plurality of driving sources such as a plurality of engines or actuators are required in each operation. Further, in Patent Document 2, in order to raise the stick member in the opening of the pressurizing plate, each of the adhesive members requires a plurality of actuators, and in Patent Document 3, The structure is further complicated by the fact that the adhesive member is retracted while the adhesive member is required to be retracted, and each of the adhesive members is required for the rotation actuator and the upper and lower drive actuators. Therefore, Patent Documents 1 to 3 have problems in that the peeling structure is particularly complicated, so that the failure rate is high, and in particular, when it is provided in a substrate assembly device or a substrate transfer device including a substrate bonding machine, A substrate holding mechanism such as an electrostatic chuck that has been set is difficult to replace with the dot chuck device of the present invention. Further, the above-mentioned actuator is susceptible to heat generation such as an electromagnetic motor such as an engine. For example, the glass substrate is very sensitive to thermal changes, and only about 1 μηπη is stretched and contracted by only one change, and it is difficult to properly align the positions between the substrates due to the influence of heat generation. . 105526.doc, when it is adhered and held in an atmosphere that reaches a certain degree of vacuum from atmospheric pressure, and is peeled off and opened, it changes from atmospheric pressure to a specific degree of vacuum, but if an electromagnetic actuator such as an engine is used, it is possible At some point in the vacuum, the plasma is discharged, which may cause damage to the glass substrate. In addition, even if the above-described actuation is a driving source such as an air cylinder, since it is a sealing structure that can be expanded and contracted by itself, it is difficult to achieve compaction. Therefore, the entire apparatus is increased in size and the manufacturing cost is increased. . However, 'especially when a large substrate is easily bent and deformed, and the easily deformable substrate is adhered and held openly, the adhesive member must be brought into contact with or peeled off from the substrate with a strong force. Powerful forces must make the actuators larger and become heavier. According to the invention of claim 1, the object of the invention is to accurately attach and detach a substrate by an air pressure mechanism having a simple configuration. The invention described in claim 2 is an object of obtaining the force required to peel the substrate accurately by the air pressure mechanism having a simple structure, in addition to the object of the invention described in the claim 1. According to the invention of claim 3, it is an object of the present invention to provide a suction piping system or suction control, and to securely hold the substrate, in addition to the object of the invention described in claim 2 or 2. The invention described in claim 4 is intended to stabilize the reciprocating motion of the rigid body portion by the purpose of the invention of the invention contained in claim 2 or 3, and to ensure adhesion to the substrate. Improvement of the performance and the peeling performance of the invention according to claim 5, which is an object of the invention according to claim 4, which is adhered to and adhered to the pressure change in the secondary space. Open the substrate. The invention described in claim 6 is based on the object of the invention described in the claims 〗, 3, 4 or 5, and the movable body itself is not enlarged, and the adhesion can be ensured. . Stripping the trip. The invention described in claim 7 is intended to facilitate the pressure control of the air pressure mechanism in addition to the object of the invention described in claim 1, 2, 3, 4, 5 or 6_. In order to achieve the above object, the invention of the present invention is characterized in that the movable film and the adhesive member are provided on the substrate side of the holding plate, and the movable film is opened in the opening portion on the side surface of the substrate. The member may be placed in a direction intersecting the side surface of the substrate, and the member may be adhered and held in opposition to the substrate, and the movable film may be reciprocated by the pressure difference between the primary side space and the secondary side space of the movable film. Adhesive table of the adhesive member: abutting against the substrate and peeling off and forcibly separating the two. The invention described in claim 2 is characterized by the request item! In addition to the configuration of the invention described above, the rigid body portion is provided opposite to the substrate on the portion of the movable film, and the front end surface of the rigid body portion is caused to escape from the opening portion of the holding plate by the reciprocating movement of the movable film. Abuts against the substrate. The invention according to claim 3, wherein the air passage of the reciprocating direction that penetrates the movable film is formed in a direction opposite to the substrate, in addition to the configuration of the invention described in the claim (4). Adsorbent 105525.doc 1376540 plate. According to the invention of claim 2, in addition to the configuration of the invention described in claim 2 or 3, the 11-cylinder portion is provided on the movable film and is formed on the side of the substrate. A partition wall facing the cylinder portion is provided in the opening, and the cylinder portion is reciprocally inserted and retracted with respect to the partition wall to be bearing. According to the invention of claim 5, in addition to the configuration of the invention described in claim 4, two movable films that are separated from each other are provided in the opening, and the cylinder portion is inserted and fixed in the movable film. The second movable film and the second air pressure chamber are respectively formed between the two movable films, and the two pressure movable films are simultaneously deformed by the pressure difference of the first air pressure chamber and the second air pressure chamber to reciprocate. The invention according to claim 6 is characterized in that, in addition to the configuration of the invention described in claim 2, 3, 4 or 5, the movable film can be placed on the side surface of the substrate of the holding plate. The direction is deformed by a bellows. The invention according to claim 7 is characterized in that, in addition to the configuration of the invention described in claim 2, 3, 3, 5, or 6, an urging member connected to the movable film is provided, and the urging member is provided The force member urges the movable film in either direction of its reciprocating motion. According to the invention of the present invention, in the invention of claim i, the movable film and the pointing member 'the movable film' are provided in the opening portion of the side surface of the substrate in the direction of the side surface of the substrate. Deformation, the dry member is held in opposition to the substrate, and the movable film is reciprocated by a pressure difference between the I05526.doc 1376540 secondary side space and the secondary side space of the movable film, thereby adhering the drilling member The surface abuts against the substrate and is adhered and held, and the two are forcibly separated, so that the substrate can be smoothly peeled off from the adhesive surface of the adhesive member. Therefore, the substrate can be accurately loaded and unloaded by a simple structure air pressure mechanism. As a result, the dry chuck device of the present invention has a simple peeling structure and can significantly reduce the occurrence rate of failure, compared to the conventional structure in which the adhesive member and the substrate are required to be driven by a plurality of engines or actuators. In particular, when it is provided in a substrate assembly device or a substrate transfer device including a substrate bonding machine, the substrate holding mechanism such as the electrostatic chuck provided can be easily replaced with the adhesive chuck device of the present invention, and the manufacturing cost can be achieved. Significantly reduced. Moreover, there is also the advantage of not actively generating static electricity because the substrate is not held by electrostatic adsorption. In addition, it is possible to avoid the influence of heat generated by the electromagnetic actuator and the risk of discharge, and to securely and accurately position the alignment between the substrates, and to achieve compaction and weight reduction, and to achieve miniaturization and seek of the entire device. Reduced manufacturing costs. Further, when the pressure is maintained and the adhesive is released from the atmospheric pressure to the atmosphere of a certain degree of vacuum, by setting the driving source to the air pressure, it is possible to achieve a closed degree from the atmospheric pressure to a specific degree of vacuum. The coexistence of the configuration of the space, such as an electromagnetic actuator or the like that requires wiring to be connected to the power source, reduces the number of members that penetrate the vacuum closed space, thereby preventing the occurrence of leakage of the vacuum 105526.doc 12 1376540. In the invention of claim 2, in addition to the effect of the invention of claim 1, the rigid body portion is disposed opposite to the substrate on the portion of the movable film, and the front end surface of the rigid body portion is made by the reciprocating motion of the movable motion The reciprocating motion of the movable film is transmitted to the substrate without being deformed by the rigid body member by being extended from the opening of the holding plate to be in contact with the substrate. Therefore, it is possible to obtain the force required to peel off the substrate with a simple structure of the air pressure mechanism. According to the invention of claim 3, in addition to the effect of the invention of claim 2 or 2, the air passage which is opened in the direction of the reciprocating motion of the movable film is opposed to the substrate, and the adsorption substrate is sucked by the air passage, and the member is used in combination. To maintain and maintain by vacuum adsorption. Therefore, it is easy to realize the suction piping system or the suction control, and to securely hold the substrate. Further, by controlling the vacuum gas pressure at the time of adsorption, the strength of the substrate and the strength of the substrate can be easily adjusted. According to the invention of claim 2, in addition to the effects of the invention of claim 2 or 3, the movable film is provided with a cylinder portion integrated with the rigid body portion, and the opening portion of the side surface of the substrate is provided opposite to the cylinder portion. In the partition wall, the cylinder portion is freely inserted and retracted by reciprocating movement with respect to the partition wall, and the rigid body portion reciprocates in a linear direction by the cylinder portion as the movable film is deformed. Therefore, the round-trip motion of the rigid body portion can be stabilized, and the adhesion performance to the substrate and the peeling performance can be improved. 105526.doc -13· 1^/6540 ° The invention of claim 5 is based on the effect of the invention of claim 4, and the opening is as described above. Two movable diaphragms are disposed in the p, and a solid cylinder portion is inserted into the movable membrane, and a second air pressure is formed between the two movable membranes and a second air pressure chamber, and the first air pressure is divided by the first air pressure. The pressure difference between the chamber and the second air pressure chamber is such that the two movable films are simultaneously deformed and reciprocated, so that the substrate is adhered and held, and the adhesion can be peeled off and opened. Therefore, the substrate can be adhered and peeled off regardless of the pressure change in the secondary side space. According to the invention of claim 6, in addition to the effects of the invention of claim 2, 3, 4, or 5, the movable movable film can be formed of a bellows that is deformed in a direction intersecting the side surface of the substrate of the holding plate, thereby The long-range reciprocating motion can be performed regardless of the size of the diameter of the entire movable film. Therefore, it is possible to ensure accurate adhesion without making the movable film itself large. The peeling stroke is very effective when a plurality of adhesive chuck devices are provided for holding a large substrate. In the invention of the present invention, in addition to the effects of the invention of claims 12, 3, 45 or 6, the urging member connected to the movable film is provided by: applying a member to reciprocate the movable film The force is applied in any direction of the movement, and the pressure difference between the right side space and the secondary side space causes the movable film to move in the direction of the urging force against the urging member, and then in the primary side space and the second time

When the pressure difference in the side space disappears, 2 L ^ — Hou' is forced to return by the restoring force of the urging member. Therefore, the moonlight color is now easy to control the pressure of the air pressure mechanism. 105526.doc ^76540 In addition, when a low-vacuum pump and a high-vacuum pump are connected to a vacuum degree to be determined, such as a substrate laminating machine, the force applying member is applied regardless of the pressure difference between the primary side space and the secondary side space. When the urging force of the substrate is maintained, the high vacuum pump is blocked in the pipe, and the peeling operation of the substrate can be switched, whereby the damage of the high vacuum pump can be prevented even if air leakage occurs. [Embodiment] The adhesive chuck device displays a case where a substrate bonding machine that is adhered and adhered to a glass substrate such as a liquid crystal display (LCD) panel is adhered. As shown in FIG. 1 to FIG. 1B, the two substrate glass substrates A and B are respectively held by the holding surfaces la and '2a of the holding plates 1 and 2 arranged in the vertical direction, and are surrounded by the surrounding areas. After the specific vacuum degree (about 5 Pa) is reached in the closed space s formed, the upper and lower holding plates} and 2 are relatively moved in the χγβ direction (horizontal direction in the drawing) to perform the pair between the substrates A and Β. After that, the upper substrate Α is forcibly peeled off from the holding surface ia of the upper holding plate 1, and the annular adhesive (glue) C which is pressed against the lower substrate B is instantaneously φ, so that the two are sealed and overlapped. Then, the pressure difference between the inside and the outside of the two substrates A and B is pressed to a specific gap between the substrates A and B. Specifically, the upper and lower holding plates 1 and 2 are supported by the lifting means (not shown) in the two directions (the vertical direction of the drawing) so as to be relatively movable, and the atmospheric pressure is used to hold the upper and lower holding plates respectively. The holding surfaces la and 2a in a state in which the crucibles 2 are separated in the vertical direction are attached to the substrates A and B fed by a robot (not shown), and thereafter, the upper and lower holding plates are close to each other by the operation of the elevating means. The division forms a closed space S. 105526.doc •15· 1376540 Inhalation from the closed space s by suction means (not shown), when the air is sucked out to a certain degree of vacuum, the upper and lower sides are maintained by the operation of the horizontal moving means (not shown) Any one of the plates 1 and 2 is adjusted to move in the direction of χγθ, and as a positional alignment (alignment) between the substrates Α and Β held by the other, coarse adjustment and fine adjustment are sequentially performed. After the alignment is completed and the upper and lower substrates A and B are overlapped, air or nitrogen gas is supplied into the closed space S, and the atmosphere in the closed space 8 is returned to the atmospheric pressure, and the air pressure difference between the inside and the outside of the two substrates A and B is uniformly pressurized. The product is completed by pressing to a specific gap in a state where the liquid crystal is sealed. Further, on the substrate side of the holding plates 丨, 2, the adhesive chuck device of the present invention is provided. Detailed and detailed, as shown in Fig. 3, Fig. 4, Fig. 7, and Fig. 1A, on the substrate side of the holding plates 1, 2, that is, one of the holding faces la, 2a or both, every A plurality of openings lb are formed at slightly equal intervals, and the openings _ are respectively provided with a movable 臈 3 ′ which can be freely moved in the z direction to the holding surfaces 1 & 2a, and the substrate on the opening 1 b The side opening edge or the base of the movable film 3, the plate side surface, and the adhesion member 4 which is fixedly adhered to the surfaces A1 and Β1 of the upper and lower substrates A and B, are formed by sandwiching the movable film 3 The pressure difference between the secondary side space and the closed space S of the human side causes the movable film 3 to reciprocate, thereby causing the (4) member 4 to abut against one of the substrates A and B or the two, and The two are forcibly pulled apart so that one or both of the substrates A, B can be smoothly peeled off from the adhesive surface of the member 4. The embodiments of the present invention are described below based on the drawings. [Embodiment 1] J05526.doc -16 - 1376540 This embodiment 1 shows that, as shown in Figs. 1 (a) to (e), only a plurality of openings lb are provided on the holding surface 1a of the upper holding plate 1 to support the movable film. The outer peripheral portion of the movable film 3 is provided with a rigid body portion 3a facing the surface A1 of the substrate A and fixed along the opening edge of each opening portion jb located on the secondary side of the movable film 3, and is fixed in a ring shape. In the state in which the rigid body portion 3 a moves upward and does not enter the opening portion 1b, the adhesive member 4 abuts and holds the adhesive member 4 and the upper substrate A, and moves the movable jaw 3 toward the secondary side. The space (closed space) s is protruded and deformed downward, so that the substrate A held by the adhesive surface of the adhesive member 4 is forcibly peeled off. Further, in the example of the drawing, only the opening 1b and the movable film 3 opposed to the eighth end portion of the upper substrate are disposed in a space relationship, but the size of the upper substrate A is as long as it can be hung. Configure as much as possible. The movable film 3 is formed of an elastically deformable film made of a metal such as a non-recording steel or an elastic resin formed of a thin plate-shaped separator made of a synthetic resin such as rubber or engineering plastic, as shown in Fig. 2(a). The outer peripheral portion is bent in a mold shape by the holding member 1c provided in the opening portion 1b of the upper holding plate 1, or as shown in Fig. 2(b), the integrally formed engaging portion 3b is sandwiched. Fix so that it cannot fall off. And 'the movable film 3 is sandwiched therebetween, and the air pressure chamber 5 formed on the primary side (back) of the partition and the pressure difference formed in the closed space s formed on the secondary side can be elastically deformed in the Z direction. Let it move back and forth. In addition, as shown in FIG. 2(c), the above-described movable film 3' can be formed into a shape capable of adjusting the amount of deformation in the vertical direction by changing the thickness, and the primary side space (air pressure chamber) of the movable film 3 can be adjusted. 5 and the amount of deformation of the movable film 3 caused by the pressure difference between the secondary side space (closed 105526.doc -17-1376540) s, the central portion thereof and the entire front end of the rigid body portion 3a which will be described later in the portion Face, move parallel in the up and down direction. The rigid body portion 3a is protruded from the center portion facing the surface a of the substrate A of the movable film toward the secondary side space (closed space 1) S by a rigid body that cannot be deformed, and the front end surface thereof is protruded. It is opposed to the surface A1 of the upper substrate a in parallel. As an example, the upper substrate A is oriented so as not to hinder the deformation of the magazine in the vertical direction of the movable film 3, and the outer diameter gradually forms a trapezoidal shape having a large diameter, and then the front end surface is expanded to the opening lb. It is advisable to have a vicinity of the opening edge. The adhesive member 4 is an adhesive sheet composed of an adhesive material such as a hydrazine or an acryl, and the area of the adhesive surface 4a is adhered to the range of the adhesive force which the upper substrate A may hold. The inside is set as small as possible, and it is preferable that the adhesion surface 4a and the surface of the rigid body portion 3a of the movable film 3 are as close as possible. Further, as shown in the example, the fixed back surface 4b on the opposite side is directly adhered to the opening edge of each opening lb, or is fixed to the opening portion by a fixing member (not shown) that is detachable from the opening. Since the adhesive force of the adhesive side of the adhesive side on the opposite side is stronger than the adhesive force on the side of the adhesive surface which is in contact with the glass substrate A, the upper substrate A is adhered and not peeled off by the weight of the upper substrate A, but i needs to be easily exchanged corresponding to the attenuation of the adhesion of the dead surface 4a. At point k, as described above, if the adhesive member 4 is fixed to the adhesive back surface 4b by attaching and detaching the fixing member, the adhesive force corresponding to the adhesive force of the adhesive surface is 105526.doc 1376540 Attenuation' can be simply exchanged for the fixed unit . Further, although not shown, a plurality of suction holes are completely opened in the holding surface u of the upper holding plate, and vacuum suction is performed from the suction holes at a specific time point, and the suction holes may be caused at another time. A gas such as nitrogen gas is ejected toward the surface A1 of the upper substrate A. Next, the operation of such an adhesive chuck device for a vacuum laminator will be described. First, as shown by the solid line in Fig. 1(a), in the initial state in which the upper and lower holding plates 丨, 2 are separated in the vertical direction, the upper substrate A is attached to the holding surface u of the upper holding plate, and the rigid body portion 3a is raised upward. It moves and waits in the opening of the holding plate. - In the case of the example of the drawing, the internal pressure is lower than the secondary side space (closed space) 8 from the primary side space (air pressure chamber) 5, and the movable film 3 is directed toward the primary side space (air pressure chamber). 5, and deformed upward, whereby the front end of the rigid body portion faces the holding surface U and the adhesive surface 4a of the adhesive member 4 stands by in a concave shape. In addition, the main body side (the internal pressure of the air pressure chamber and the pressure of the secondary side space (closed space) S are the same, and the movable film 3 is formed into a substantially horizontal plane state without deformation, and the rigid body portion is not shown. The front end surface of the 3a is placed at substantially the same height position as the holding surface 1a and the adhering surface 4& of the adhesive member 4, or may stand by at the upper side. In this standby state, the robot for transporting the substrate is used. (not shown), the upper substrate A is transferred, and when the surface A1 is moved toward the holding surface of the upper holding plate i, and the adhesive surface 4a of the adhesive member 4 is brought into contact with a specific pressure, the adhesive surface 4a is The adhesion is maintained. If the temple is vacuum-applied from the suction hole (not shown in Fig. 105526.doc • 19-1376540) of the holding plate 1 a, the surface A1 of the upper substrate A is adhered. While the adhesive surface 4a of the member 4 is more strongly contacted and held by the adhesive, the upper substrate a is adsorbed and held, and it is difficult to fall. Thereafter, as shown by the alternate long and short dash line in Fig. 1(a), the upper and lower sides are maintained. Plates, 2 are close to each other and secondary space (closed space) is 5 After the predetermined degree of vacuum, one of the upper and lower holding plates 1 and 2 is adjusted to move in the direction of χγβ, and the position between the substrates A and Β held by them is aligned. When the position of B is aligned and overlapped, as shown in FIG. 1(b), if a gas such as compressed air is supplied to the primary side space (air pressure chamber) 5, and the internal pressure is equal to the secondary side space (closed space) 8 When the upper holding plate 1 is raised or the lower holding plate 2 is lowered and the two are relatively separated, the movable film 3 is deformed downward toward the primary side space (closed space) s, and the front end surface of the rigid body portion h and the substrate are held. The state in which the surface A1 of A is in contact is pressed away from the adhesive surface 4a of the adhesive member 4. Further, 'this time' is given to the primary side space by the secondary side space (closed space) 8 at this time ( The gas supply amount of the air pressure chamber 5 is also small. Therefore, the upper substrate A which is held by the adhesive surface of the adhesive member 4 is forcibly pressed away from the adhesive surface 4& from the adhesive member 4 smoothly. At the same time as the upper substrate A is peeled off by the ground pressure, the movable film 3 and the rigid body portion are used "The protruding pressure causes the upper substrate A to be scrapped to the annular adhesive C on the lower substrate B and overlaps." At this time, 'the ejection hole that is opened to the holding surface 1a of the upper holding plate 1 is ejected toward the surface A1 of the substrate A, for example. A gas such as nitrogen is forcibly peeled off from the dry surface 4a of the adhesive member 4, and is instantly pressed against the annular adhesive c of I05526.doc 1376540 on the lower substrate β, and is sealed by β. As shown in Fig. 1(c), the primary side space (air pressure chamber) 5 is attracted so that the internal pressure is lower than the secondary side space (closed space), and the movable film 3 is directed toward the primary side space (air pressure). The chamber 5 is deformed upward, and the front end surface of the rigid body portion 3 & is concave in the holding surface 1a and returns to the initial state. Therefore, in the present embodiment t shown in Figs. 1 to 2, the force required for surely adhering and peeling off the upper substrate A can be obtained by using a simple structure without using an electromagnetic driving source. In addition, when the amount of elastic deformation of the movable film 3 is adjusted by controlling the amount of gas supplied to the air pressure chamber 5 formed on the secondary side of the movable film 3, the surface Ai of the upper substrate A and the adhering member 4 are adjusted. The contact pressure (pressing pressure) becomes adjustable, and the strength of adhesion and/or peeling of the substrate A can be easily adjusted. At this time, the adhesive force generated between the upper substrate Α and the adhesive member 4 is proportional to the contact area between the two, so that the adhesion surface of the adhesive member 4 is φ by the increase or decrease of the above-mentioned pressure. The structure in which the surface A1 of the upper substrate A is elastically deformed and the contact area is increased or decreased can more clearly adjust the strength of the adhesive force. [Embodiment 2] In the second embodiment, as shown in Figs. 3(a) to 3(d), an air passage 6& which penetrates in the reciprocating direction of the movable film 3 is provided, and vacuum suction is performed from the air passage & At the same time, the gas supply source of the gas such as nitrogen gas is supplied, and when the upper substrate A is attached, the upper substrate A is sucked and sucked from the air passage 6a of the vacuum suction means 6 to adsorb and hold the upper substrate A, and The configuration of the gas from the air passage 6a toward the surface of the upper substrate A or the like is required from 105526.doc - 21 · 1376540. This is the same as the first embodiment shown in Figs. 1 to 2 . The middle portion is different from the first embodiment in which the air passage 6a is opened so as to be ejected, for example, nitrogen gas when the peeling member 4 is peeled off, and the moving film is exemplified in the illustrated example. Further, the rigid body portion h of the portion is penetrated in the vertical direction. However, although the penetration position of the air passage 6a is not shown, the upper holding plate 1 can be turned up and down. 'When it is opened, the adhesive member 4 which is fixed at the opening edge of the opening portion 1b of the holding surface 1a is opened, and when the upper substrate A is mounted on the holding surface 1a of the upper holding plate 1, as shown in FIG. 3 ( As shown in a), the movable film 3 is deformed downward by supplying a gas such as compressed air to the primary side space (air pressure chamber) 5, and the front end surface of the rigid body 3a is moved toward the adhering surface 4a of the adhesive member 4 after the rigid body portion 3a is moved downward. In this state, the upper substrate A transferred by the robot for substrate transfer is removed and sucked by the vacuum suction from the air passage of the vacuum suction device 6 in this state. After that, as shown in FIG. 3(b), the movable film 3 is slightly horizontal according to the suction of the primary side space (air pressure chamber) 5 and the pressure of the secondary side space (closed space) s. The front end surface of the rigid body portion 3a is moved up at a position substantially the same as the holding surface and the adhesive surface 4a of the drilling member 4, and the upper substrate A is induced toward the pointing surface 4a of the dry member 4, as in the field. The surface A1 of the upper substrate a is brought into contact with the adhesive surface 4a of the adhesive member 4 by a specific pressure, and is held in accordance with the adhesive force of the adhesive surface 4a. Further, after the superposition of the upper and lower substrates A and B is completed, as shown in FIG. 3(c), a gas such as compressed air is supplied to the primary side space (air pressure chamber) 5 so as to have an internal pressure ratio of 105526.doc -22 to 1376540. When the secondary side space (closed space) s is high, the upper holding plate 1 is raised or the lower holding plate 2 is lowered to separate the two opposing faces, and the movable film 3 is opposed to the secondary side space (closed space) S direction. In the lower deformation, the front end face of the rigid body portion 3a comes into contact with the surface A1 of the upper substrate A and is pressed away from the adhesive surface 4& of the adhesive member 4 as it is. In addition, at the same time, if the gas passage 6a of the vacuum adsorption means 6 ejects a gas such as nitrogen gas onto the surface A1 of the substrate A, the upper substrate A adhered and held by the adhering surface 4a of the dry member 4 is forcibly The substrate A is smoothly peeled off from the adhesive surface 4a of the member 4 of the member. Thereafter, as shown by 襕3(d), the internal pressure is lower from the primary side space (air pressure chamber) 5 than the secondary side space (closed space) 8, and the movable film 3 is moved toward the secondary space. (The air pressure chamber is deformed upward, and the front end surface of the rigid body portion 3a is concave in the holding surface 1a, and returns to the initial state. Therefore, in the second embodiment shown in Figs. 3(a) to 3(d), the above-described figure can be obtained. The same effect as that of the first embodiment shown in Fig. 2, and the adhesion of the upper substrate a and the adhesion of the upper substrate 8 to the adhesion of the upper substrate can be easily performed by a different method from that of the first embodiment. Advantages of the adjustment. At this time, since the adhesive force generated between the upper substrate A and the adhesive member 4 is proportional to the contact area of the both, if the vacuum adsorption force is increased or decreased by the above, the surface A1 of the upper earth plate A is clicked. When the surface of the member 4 is elastically deformed to increase or decrease the contact area to form a structure, the strength of the dry force can be more clearly adjusted. [Embodiment 3]

In the third embodiment, as shown in Fig. 1, L 閛 4Ha) (c), the fixing member 105526.doc • 23· 1376540 of the adhesive member 4 is positioned and replaced with the opening edge of the opening 1 b, and is changed to The front end surface of the rigid body portion 3a protruding from the central portion of the movable film 3, and the pressure difference ′ according to the primary side space (air pressure chamber) 5 and the secondary side space (closed space) S of the movable film 3 The dry surface 4a of the drill member 4 and the holding surface 1a are substantially flush with each other in a plane or slightly (about 100 μm), and the upper substrate a is abutted and adhered to the adhesive surface of the adhesive member 4. In the 4a, the movable film 3 is deformed upward in the primary side space (air pressure chamber) 5 so as to be recessed into the opening portion 1b, and the adhesive surface 4a of the adhesive member 4 is forcibly removed from the upper substrate A. The configuration ' is different from the first embodiment shown in FIGS. 1 to 2 and the second embodiment shown in FIG. 3, and the other configurations are the same as those of the first embodiment and the second embodiment. That is, the upper substrate A is mounted on the holding surface 1a of the upper holding plate 1, and as shown in Fig. 4(a), the internal pressure of the primary side space (air pressure chamber) 5 and the secondary side space (closed space) S are made. When the pressure is the same so that the movable film 3 is slightly deformed to be in a horizontal plane state, the dry surface 4 a of the dry member 4 fixed to the front end surface of the rigid body portion 3 a and the holding surface 1 a are substantially the same plane or slightly protruded. By bringing it into contact with the surface A1 of the upper substrate A with a specific pressure, it is held by the adhesive force of the adhesive surface 4a. When the overlap between the upper and lower substrates A and B is completed, as shown in FIG. 4(b), the internal pressure is lower than the secondary space (closed space) S due to suction from the primary side space (air pressure chamber) 5. The movable film 3 is deformed upward toward the primary side space (air pressure chamber) 5, and the front end of the rigid body portion 3a faces the holding surface 1a in a concave shape, and the front end surface of the rigid body portion 3a together with the adhesive member 4 The surface M of the upper substrate A is pressed away 'the adhesive surface 4a of the adhesive member 4 is smoothly peeled off from the upper substrate A. Thereafter, as shown in Fig. 4(c), let the upper holding plate 丨 rise or the lower holding plate 2 105526.doc • 24· 1376540 descend so that the two sides are separated, and the primary side space (air pressure chamber) (5) The gas such as compressed air is supplied to deform the movable film 3 downward, and the front end surface of the rigid body portion 3a is slightly planar or slightly protruded from the holding surface u, and is returned to the initial state. In order to apply an optimum point force to the upper substrate A like this, as shown in Figs. 4(a) to 4(c), it is shown that the shape of the adhesive member 4 is the front end surface of the rigid body portion 3a. All covered occasions. As another example, as shown in FIG. 5, the shape of the adhesive member 4 is covered by the peripheral portion of the front end surface of the rigid body portion 3 & and the annular portion 4b is covered with the rigid body portion 3a as shown in FIG. At the same time as the entire front end surface, the surface area is gradually reduced toward the adhesive surface 4a so that the shape of the adhesive member 4 is a trapezoidal shape. Further, although not shown, the second embodiment shown in FIG. 3 described above is provided with a vacuum suction means 6 formed by an air passage which penetrates the reciprocating direction of the movable film 3 and the air supply source 6b. When the upper substrate is mounted, the upper substrate A is vacuum-sucked by the vacuum suction means 6, and if necessary, when it is peeled off from the dry member 4, the surface A1 of the substrate A is ejected by the vacuum suction means 6. For example, a gas such as nitrogen. Therefore, as in the embodiment 3 shown in FIG. 4 to FIG. 6, the same effects as those of the embodiment shown in FIG. 2 and the embodiment 2 shown in FIG. 3 can be obtained, and according to the size of the upper substrate A. The weight and weight can be changed only by changing the adhesive member 4 to obtain an optimum dry force. Further, as in the above-described third embodiment, even in the embodiment 丨 and the second embodiment, it is possible to prepare a plurality of the same type of dryness according to the optimum adhesion force of the size and weight of the upper substrate A. The surface area of the surface 4 & 105526.doc • 25- Ϊ 376540 dry parts 4 for exchange. Further, in the peeling, the embodiment in which the front end surface of the rigid body portion 3a is protruded from the holding surface 1& and the substrate A is forcibly peeled off from the adhesive member 4 is compared with the second embodiment, and the substrate A does not have to be overlapped after completion. Further, it is partially pressurized, and there is an advantage that an accident such as a misalignment between the upper and lower substrates A and B and an abnormality in parallelism occur. [Embodiment 4] In the fourth embodiment, as shown in Figs. 7(a) to 7(c), according to the two elastic films 3c serving as the movable film 3 in the opening portion ratio, 3d is separated from the lower direction by a slightly parallel " X is set, and the first air pressure chamber 5a is formed as a primary side space of the movable film 3 between the two, and the second air-pressure chamber 5b is additionally partitioned as a secondary side space, and the control is performed to these The gas supply amount of the first air pressure chamber 5a and the second air pressure chamber 5b is configured such that the two movable films 3c, 3d are elastically deformed to reciprocate while generating a pressure difference therebetween, and the above-described embodiments 实施 to 3 Differences, other configurations and embodiments are the same as in Embodiment 3. • The fixed cylinder portion 7 is inserted into the central portion of the two movable films 3c and 3d, and the lower surface of the cylinder member 7 is integrally connected to the rigid body portion 3& and is formed in the opening portion 1b and the axial direction of the cylinder portion 7. The partition wall 8 is disposed opposite to the intermediate portion, and the cylinder portion 7 reciprocates in the two directions in the direction of the partition wall 8 and is inserted into the gas in a gas-tight manner to be bearing. The partition wall 8 is divided into the primary side (back). The second air pressure chamber 5& and the second air pressure chamber 5b on the secondary side. In the cylinder portion 7, the first air pressure chamber "and the second air pressure chamber 5b which are divided into the second air pressure chamber 5b are provided with a second passage for communication and a second passage, respectively, and 2 105526.doc • 26- The first passage 7a and the second passage 7b can adjust the internal dust of the i-th air chamber 5a and the second air pressure chamber 51) by supplying air or the like from the outside. Further, between the steam red member 7 and the opening portion lb The brake 7c provided with the mutual fastening restricts the stroke of the reciprocating motion of the cylinder portion 7 and the rigid body portion 3a integrated therewith. In the illustrated example, the peripheral portion of the cylinder portion 7 and the partition wall 8 are engaged with each other. The brake 7C restricts the amount of movement of the cylinder portion 7. Therefore, as shown in Fig. 7 (4) and (4), the gas in the first air pressure chamber 5a is sucked through the passage or the second passage 7 is supplied to the second air pressure chamber. Alternatively, by simultaneously performing the two, the internal pressure of the first air pressure chamber 5 & is lower than the internal pressure of the second air pressure chamber 5b, and the two movable membranes can be made irrespective of the pressure change of the secondary side space (closed space) s. 3c, 3 (1 is deformed upward at the same time, and the front end surface of the rigid body portion 3a is immersed in the opening from the holding surface la In contrast, as shown in FIG. 7(b), only the first air pressure chamber 5a gas is supplied through the λ passage 7a, or the gas in the second air pressure chamber is sucked through the second passage 7b. Alternatively, the internal pressure of the first air pressure chamber 5a is higher than the internal pressure of the second air pressure chamber 5b by the simultaneous operation, and the two movable films 3c, 3d can be simultaneously lowered regardless of the pressure change in the closed space s. The deformation causes the front end surface of the rigid body portion 3a to protrude from the holding surface la. In the illustrated example, as in the embodiment i shown in Fig. 2, the front end surface of the rigid body portion 3a is not The holding surface la is immersed in the opening lb, and the adhesive surface 4a of the adhesive member 4 and the upper substrate A are fixedly adhered and held along the opening edge of the opening lb, and the rigid body I05526.doc is additionally displayed. -27· 1376540 The front end surface of the portion 3a protrudes from the holding surface la, and the upper substrate A held by the dry surface 4a of the adhesive member 4 is forcibly peeled off. As another example, although not shown As shown in the embodiment 3 shown in FIG. 4 to FIG. 6 , the rigid body portion 3a is made by means of the holding surface u. The front end surface slightly protrudes, and the adhesive surface 4a of the adhesive member 4 fixed to the front end surface of the rigid body portion 3a abuts and adheres to the upper substrate a, and the front end surface of the rigid body portion 3a can be held from the holding surface. La is immersed in the opening portion, and the adhesive surface 4a of the adhesive member 4 is forcibly pulled and peeled from the upper substrate a. Although not shown, the second embodiment shown in Fig. 3 is used. A vacuum suction means 6 formed by the air passages extending in the reciprocating direction of the movable film 3 and the air supply source 6b is provided. When the upper substrate A is mounted, vacuum suction is applied by the vacuum suction means 6 to adsorb and hold the upper substrate A. Further, when it is peeled off from the (four) member 4 as necessary, a gas such as nitrogen gas may be ejected onto the surface A1 of the substrate A by the vacuum suction means 6. Therefore, as in the fourth embodiment shown in Figs. 7(a) to (c), the same effects as those of the above-described practical examples 1 to 3 can be obtained, plus only the i-th air pressure chamber and the second Since the pressure difference of the air pressure chamber 5b makes a reciprocating motion, it is possible to prevent the pressure of the secondary side space (closed space) S from being changed irrespective of the change of the knife, so that the upper substrate A can be adhered and peeled off. . Further, in the illustrated example, the material 1 j T is attached to the opening lb which is opened on the upper holding plate 1 by the cylindrical body ld, and the movable film 3c, 3d is previously provided in the sense and the orthodontic body Id. The steam-rain portion 7, the rigid body portion 3 a, the components of the Du Yi-hi dry member 4 and the partition wall 8 are all integrally assembled, and are formed into a cover 70 body, if by means of loading and unloading means such as magnetic gas and a clamp device. (not shown), when the cylindrical body id 105526.doc • 28· 1376540 of the opening lb is attached and detached, the detachment of the dry member 4 is lowered. The holding surface la of the holding plate 1 has an advantage that it can be easily exchanged and installed in the correct position. [Embodiment 5] In the fifth embodiment, as shown in Figs. 8 and 9, a rigid body portion 3a and an integrated cylinder portion 7 are inserted into a central portion of the movable film 3, and the opening portion 1 and the The partition wall 8 is disposed at a position slightly opposite to the axial direction of the cylinder portion 7, and the cylinder portion 7 is freely reciprocated in the Z direction with respect to the partition wall 8, and is inserted and sealed in a gas-tight manner, and the deformation of the movable film 3 is performed. The configuration in which the rigid body portion 3a reciprocates in a straight line state is the same as the above-described embodiment 丨 to the fourth embodiment, and other configurations and embodiments are the same as in the fourth embodiment. In the example shown in FIG. 8, the primary side space 5 is partitioned between the movable film 3 and the partition wall 8 arranged in parallel, and the passage 7a connected to the primary side space 5 is provided in the cylinder portion 7, where The cylinder portion 7 and the opening portion 6 are further provided with brakes 7c that are engaged with each other, and the stroke of the reciprocating motion of the cylinder portion 7 and the rigid body portion 3a integrated therewith is restricted. In the example shown in Fig. 9, "two movable films 3c, 3d are provided in the upper and lower directions in the opening portion 丨b, and the partition walls 8 are arranged in a slightly parallel manner between the movable films 3c, 3d, from the movable film 3c. A side space 5 is formed between any one of the 3d and the partition wall 8, and a passage 7a communicating with the primary side turn 5 is provided in the cylinder portion 7, and is disposed between the cylinder member 7 and the opening portion 丨b The brakes 7c' that are engaged with each other restrict the stroke of the reciprocating motion of the cylinder portion 7 and the rigid body portion 3a formed therewith. In the illustrated example, 'and the embodiment i shown in FIG. 1 to FIG. 2 - the sample table 105526.doc -29 1376540 shows that the front end face of the rigid body portion 3a is immersed in the opening portion lb from the holding surface ia The inner surface of the rigid member 3a is brought into contact with the front surface of the rigid body portion 3a by the opening edge of the opening portion 1b, and the adhesive surface 4a of the fixed adhesive member 4 is abutted and held. The adhesion is maintained in a state where the upper substrate A of the drill's surface 4a of the adhesive member 4 is forcibly peeled off. As another example, although not shown, as in the third embodiment shown in FIGS. 4 to 6, the front end surface of the rigid body portion 3 & is slightly protruded from the holding surface la to be fixed to the front end of the rigid body portion 3a. The adhesive surface 4a of the adhesive member 4 on the surface abuts and adheres to the upper substrate a. Alternatively, the front end of the rigid body portion 3a can be immersed in the opening portion 1| from the holding surface la. The adhesive surface 4a of the adhesive member 4 is forcibly pulled and pulled on the upper substrate a. Further, although not shown, the vacuum suction means 6 formed by the air passage which penetrates the direction of the reciprocating motion of the movable film 3 and the air supply source 6b is provided in the second embodiment shown in FIG. When the substrate a is mounted, the upper substrate A is suction-held by the vacuum suction means 6, and if necessary, when it is peeled off from the adhesive member 4, the surface A1 of the substrate A is ejected, for example, by nitrogen or the like by the vacuum suction means 6. gas. Therefore, as in the fifth embodiment shown in Figs. 8 and 9, the same operational effects as those of the above-described first to fourth embodiments can be obtained, and the rigid body portion 3&amp is added to the cylinder portion 7 by the elastic deformation of the movable film 3. The reciprocating motion is performed in a straight line direction, and the reciprocating motion of the rigid body portion 3a is stabilized, and an advantage of improving the adhesion property and the peeling performance of the upper substrate A can be attempted. [Embodiment 6] In the sixth embodiment, as shown in Figs. 10(a) to 10(c), the movable film 3 is not a diaphragm 105526.doc • 30- but can be stretched and extended in the z direction by a bellows method. The deformed elastic body constitutes 'and a force member 9 that is connected to the rigid body portion 3a of the movable film 3, and the force applying member 9 constantly applies force to either side of the reciprocating motion of the movable film 3 The difference from the above-described first to fifth embodiments is the same as that of the first to fifth embodiments. In the illustrated example shown, the structure most similar to the embodiment 5 shown in Fig. 8 described above is provided by the cylinder portion 7 which is formed in the central portion of the movable film 3 and the rigid body portion 3a. The partition wall 8 in the opening portion 1b of the holding plate holding surface 1& is freely reciprocating in the up-down direction and is inserted in a gas-tight manner and is bearing-bearing, and between the cylinder portion 7 and the opening portion ib. By providing the brakes 7c that are engaged with each other, the deformation of the movable film 3 is a configuration in which the rigid body portion 3a is linearly reciprocated in a specific stroke. The movable film 3 including the elastic body which can be stretched and deformed in the Z direction by the bellows is formed into a cylindrical shape. The both open ends and the cylinder portion 7 are fixed in the opening portion 1b of the upper holding plate 1, respectively. It is not detachable, and it is attached so as to surround the periphery of the cylinder part 7, and the cylindrical part which surrounds the cylinder part 7 forms the snake belly 3e which expands and expands up-down direction. In the opening portion 1 b, the partition wall 8 is disposed opposite to the axial direction of the cylinder portion 7, and the cylinder portion 7 is reciprocated in the z direction with respect to the partition wall 8 and is gas-tightly inserted and bearing. A closed chamber 3f is formed between the partition wall 8 and the bellows 3e of the bellows 3, and is provided in the cylinder portion 7, and the sealed chamber 3f and the partition wall 8 are sandwiched therebetween to be on the secondary side (back side). The primary side space (air pressure chamber) 5 formed by the zone drawing communicates with the passage 7a. 105526.doc 31 The passage 7a from the primary side space (air pressure chamber) 5 supplies air or the like to the sealed chamber 3f 'through the primary side space (air pressure chamber) 5 and the closed chamber 3f and the second underside space (closed The pressure difference generated between the spaces S, the bellows 3e of the bellows 3 expands and contracts, and the cylinder portion 7 and the rigid body portion 3a reciprocate in the Z direction. Between the steam red portion 7 and the opening portion 1b, a brake 7c' that is engaged with each other is provided to restrict the stroke of the cylinder portion 7 and the rigid body portion 3a integrated therewith. The urging member 9 is, for example, a compression coil spring or the like, and is disposed to be stretchable in the vertical direction along the cylinder portion 7, and passes through the primary side space (air pressure chamber) 5, the closed chamber 3f, and the secondary side space (closed). The pressure difference of the space s is interlocked to cause the expansion and contraction deformation. The front end surface of the rigid body portion 3a between the cylinder portion 7 and the bellows 3 is set to be separated from the opening portion 1b of the holding plate i. Further, in the case of the example, the movable film 3 is formed into a bottomed cylindrical shape, and the cylinder member 7 is inserted into the bottom surface portion thereof, and the partition wall 8 and the spring holder portion projecting to the upper end of the cylinder portion 7 are formed. The compression coil spring 9 is fitted between the 7d, and as shown in FIG. 10(a), the internal pressure in the primary side space (air pressure chamber) 5 and the closed chamber 3f is lower than the secondary side space (closed space) 3 or When the compression screw magazine 9 is extended and deformed, the cylinder portion 7 and the rigid body portion 3a are moved upward. The front end surface of the rigid body portion 3a is immersed in the opening portion 1b from the holding surface la and is immersed. State standby. Further, as shown in Fig. 10 (b), the internal pressures in the primary side space (air pressure chamber) 5 and the closed chamber 3f are made higher than the secondary side space (closed space) S, and the contraction coil spring 9 is compressed and deformed. The cylinder portion 7 and the rigid body portion 3a move downward, and the front end surface of the rigid body portion 3a protrudes from the holding surface la. When the substrate A is mounted, as shown in Fig. 10 (a), the front end surface of the rigid body portion 3a is immersed in the opening portion 1b from the holding surface u by the urging force of the compression coil spring 9, and Has been immersed in the state standby. The adhesive surface 粘 of the adhesive member 4 fixed to the opening edge of each opening is abutted and adhered to the upper substrate a, and the adhesive holding state of the upper substrate A is maintained by the urging force of the compression coil spring 9. After the superposition of the upper substrates A and B is completed, as shown in Fig. 1 (b), if necessary, the upper holding plate 1 and the lower holding plate 2 are slightly separated from each other while the front end surface of the rigid body portion 3 & U is slightly protruded (about 1 〇〇μπ1), and the upper substrate a held by the adhesive surface 4a of the adhesive member 4 is forcibly peeled off. Thereafter, as shown in FIG. 10(c), while the upper holding plate 丨 and the lower holding plate 2 are completely separated, the atmosphere in the secondary side space (closed space) 8 is returned to the atmospheric pressure, and the restoring force of the compression coil spring 9 is restored. The bellows 3 and the rigid body portion 3a are forcibly moved upward, and the front end surface of the rigid body portion 3a is returned to the opening portion 11 and returned to the initial state. Further, the vacuum suction means 6 formed by the air passage penetrating in the reciprocating direction of the movable film 3 and the air supply source 设置 is provided by the second embodiment shown in Fig. 3, and is passed through when the upper substrate a is mounted. The vacuum suction means 6 vacuum-sucks and holds the upper substrate A, and if necessary, when it is peeled off from the adhesive member 4, it is preferable to discharge a gas such as nitrogen gas to the surface of the substrate A by the vacuum suction means 6. Further, in the example of the drawing, the air passage ld inserted into the upper holding plate 1 or the opening portion 1b thereof penetrates the air passage in the upward and downward directions, and passes through the opening fixed to the opening portion ib. The edge of the adhesive member 4 is opened through the ventilation 105526.doc • 33· 1376540 lane 6a, and the reciprocating motion of the movable membrane 3 and the movement into the opening portion lb of the rigid body portion are not related to the standby. The upper holding plate 2 is adhered and held by the member 4. Therefore, as in the sixth embodiment shown in Figs. 10(4) to (c), the effects of the above-described (1) to the fifth embodiment can be obtained, and the movable effect can be obtained. When the film 3 is an elastic body which can be stretched and deformed in the Z direction by the corrugation method in a long way, compared with the case where the diaphragm is formed, the long stroke can be reciprocated regardless of the size of the movable film 3, and the movable film 3 can be moved. It is not necessary to increase the size of itself. The advantage of the stroke for the adhesion and peeling can be ensured. In particular, in the illustrated example, even if the size of the movable film 3 is small, it is ensured that the body is rigid. After the front end surface is not inside the opening part - for the The substrate A forcibly pulls and pulls the stroke required for the adhesive member 4. Further, if the pressure difference between the primary side space 5 and the secondary side space s is used to resist the biasing force of the urging member 9, the bellows and the rigid body portion of the movable membrane 3 are " When the upper and lower substrates A and B are superimposed, the pressure difference between the atmosphere in the secondary space (closed space) S and the primary side space 5 is zero, and the pressure is applied by the biasing member 9. The force of the bellows 3 and the rigid body portion can be forcibly returned upward, whereby there is an advantage that the pressure control of the air pressure mechanism can be easily performed. In particular, in the substrate bonding machine, in order to ensure the atmosphere in the closed space s When a specific degree of vacuum (about 0.5 Pa) is reached, first, by a single operation of a low-vacuum pump (not shown) such as a scroll vacuum pump, the vacuum is increased from atmospheric pressure to about 100 Pa, and then from about 50 Pa. A high vacuum pump (not shown) such as a turbo molecular pump increases the degree of vacuum to 〇 5 Pa. I05526.doc • 34 - 1376540 Even in the case like this, 'Example 6 is for the primary side space 5 and the secondary side space. The pressure difference of S is maintained by the urging force of the urging member 9 to maintain the adhesion holding state of the upper substrate A, and after the high vacuum pump is blocked on the nozzle, the peeling operation to the upper substrate A can be switched. Therefore, in the high vacuum atmosphere In the case of the peeling operation of the upper substrate A, for example, when the air leakage occurs in the movable film 3 or the like, the vacuum degree is reduced even if it is instantaneously low, and there is an advantage that the high vacuum pump is not damaged. [Embodiment 7] This embodiment 7 is As shown in FIGS. 11(a) to 11(c), the biasing member 9 is stretched and deformed, and the pressure of the primary side space (air pressure chamber) 5 and the secondary side space (closed space) S of the movable medium 3 is passed. After the movable film 3 formed of the bellows type elastic body is stretched and deformed in the Z direction, the front end surface of the rigid body portion 3a is slightly protruded from the holding surface 1a, and the dry member 4 fixed to the front end surface of the rigid body portion 3a is fixed. The adhesive surface 4a is in contact with and held by the upper substrate A, and the front end surface of the rigid body portion 3a is immersed in the opening portion 1b from the holding surface 1a, and is forcibly pulled from the upper substrate A as described above. Stripping the configuration of the standing surface 4a of the guttata member 4, and FIG. 10 described above The other configuration is the same as that of the sixth embodiment except that the embodiment 6 is different. In the example of the drawing, 'the partition 8' provided in the opening portion 1b of the upper holding plate 1 and the cylinder portion 7 integrated with the rigid body portion 3a are reciprocated in the up-down direction while being inserted freely. The spring holder portion 7d' at the upper end of the cylinder portion 7 reciprocates in the vertical direction with respect to the inner circumferential surface of the opening portion 1b, and is inserted and sealed in a gas-tight manner, and passes through the partition wall 8 and the spring holder portion. 7 d, the cylindrical openings 105526.doc • 35 - 1376540 of the movable film 3 were respectively fixed to the two open ends of the tube 3 and could not be detached. A closed chamber 3f' is formed between the snake abdomen 3e of the bellows 3 and the inner peripheral surface of the opening portion 丨b, and the sealed chamber is formed by the ridge bracket portion 7d being partitioned by the secondary side (back) The primary side space (air pressure chamber) 5 communicates with the spring holder portion 7d via the passage le and between the spring holder portions lf formed on the back side of the opening portion 11 of the upper holding plate, as the biasing member 9 Snap in and install the compression coil spring. Further, as shown in FIG. 11(a), the internal pressures in the primary side space (air pressure chamber) 5 and the closed chamber 3f are made higher than the secondary side space (closed space) 8, and the compression coil spring 9 is elongated and deformed. The cylinder portion 7 and the rigid body portion 3a are moved downward, and the front end surface of the rigid body portion 3a is protruded in a convex shape in a plane or slightly (about 1) from the holding surface 1&. Further, as shown in Fig. 11 (b), the internal pressures in the primary side space (air pressure chamber) 5 and the closed chamber 3f are made higher than the secondary side space (closed space) s, and the compression coil spring 9 is compressed and deformed. The cylinder portion 7 and the rigid body portion 3& are moved upward, and the front end surface of the rigid body portion 3a is recessed into the opening portion 1b from the holding surface 1a in a slightly concave shape (about _5 〇〇 μηη). That is, when the upper substrate A is mounted, as shown in Fig. 11(a), the biasing force of the compression coil spring 9 is the same as that of the third embodiment shown in Figs. 4 to 6, and the front end surface of the rigid body portion 3a is maintained. The surface ia is slightly flat or slightly protruded (about 1 〇〇^ claw) in a convex shape, and stands by in a protruding state, and the adhesive surface 4a of the adhesive member 4 fixed to the end surface of the rigid body portion 3a is abutted and adhered. The upper substrate A is held, and the adhesive holding state of the upper substrate a is maintained by the urging force of the compression coil spring 9. 105526.doc •36· 1376540 After the superposition of the upper substrates A and B is completed, as shown in Fig. 7(b), the front end surface of the rigid body portion 3a is slightly smaller than the holding surface la (_5〇〇μηη) The insertion into the opening portion 1b is forcibly pulled away from the upper substrate a to the peeling surface 4a of the adhesive member 4. Thereafter, as shown in FIG. 11(c), when the upper holding plate 丨 and the lower holding plate 2 are relatively separated, and the atmosphere in the secondary side space (closed space) s returns to the atmospheric pressure, the restoring force of the compression coil spring 9 is restored. The front end surface of the rigid body portion 3 & and the holding surface la are raised to the same plane or slightly convexly projected to return to the initial state. Further, in the second embodiment shown in FIG. 3, the vacuum suction means 6 formed by the air passage q and the air supply source 6b penetrating the rigid body portion 3a and the cylinder portion 7 in the reciprocating direction of the movable film 3 is installed. In the case of the upper substrate a, the upper substrate A is vacuum-sucked from the vacuum suction means 6 and sucked and held, and if necessary, when the film is peeled off from the adhesive member 4, a gas such as nitrogen gas is ejected from the vacuum adsorption means 6 to the surface A1 of the substrate A. good. Therefore, as in the seventh embodiment shown in Figs. 11(a) to (c), the same operational effects as those of the above-described sixth embodiment can be obtained, plus when the upper substrate a is peeled off, and the front end surface of the rigid body portion 3a is Compared with the embodiment 6 in which the holding surface la protrudes and forcibly peels the upper substrate a from the adhesive member 4, it is not necessary to perform partial pressurization after the substrate A is superposed, and there is no fear of occurrence of misalignment between the respective upper substrates A and B. The advantages of accidents such as parallelism. Further, the present invention is a case where the chuck device is disposed, and the substrate bonding machine disposed on the glass substrate such as a liquid crystal display (LCD) panel is adhered to the substrate, but the present invention is not limited thereto. In the substrate assembly apparatus other than the substrate bonding machine, the substrate transfer apparatus that transports the substrate may be adhered to a substrate other than the glass substrate for LCD panel, 105526.doc • 37· 1376540. In addition, although the substrate bonding machine in which the substrates A and B are bonded in a vacuum is described, the present invention is not limited thereto, and a substrate bonding machine that bonds the substrates A and B in the air is also possible even in this case. The same effects as those of the vacuum laminator described above can be obtained. In the above-described embodiment, the movable film 3 is disposed only after the opening ib is formed in the holding surface 1a of the upper holding plate 1 to prevent adhesion and peeling of the upper substrate a. However, the present invention is not limited thereto. The holding surface 2a of the lower holding plate 2 is also the same, and the movable film can be disposed after the opening portion is formed opposite to the holding surface B of the lower substrate b, and the lower substrate B can be adhered and detached. Further, although only the embodiment 5 shown in FIG. 7, the embodiment 5 shown in FIG. 8 and FIG. 9, and the embodiment 6 shown in FIG. 10 are shown, the opening portion 1b which is opened by the upper holding plate is mounted. In the cylindrical body Id, all of the constituent members such as the movable films 3c, 3d, and 3 and the adhesive member 4 are integrally unitized, but the present invention is not limited thereto. In the same manner, the cylindrical body is attached to the opening 11 which is opened by the upper holding plate 1 (the cylindrical member is not shown, and the components such as the movable film 3 and the adhesive member 4 are integrally provided as a unit. (4) 'The cylindrical body of the opening lb is attached by a loading and unloading means (not shown) such as magnetic gas and clamping I, etc.

It can be detached freely, and when the adhesive force of the adhesive member 4 is lowered, the holding surface (four) of the upper holding plate 1 is unloaded and exchanged. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a partial longitudinal view 105526.doc -38-1376540 showing the implementation of the (4) chuck device of the present invention. The front view of the cross-section of the substrate bonding machine is as follows: (a) ~ (c) FIG. 2 (a) to (b) are partially enlarged cross-sectional views showing a modified example of the method of supporting the movable film, and (c) is a partially enlarged cross-sectional view showing a modified example of the movable film. 3 is a partial green cross-sectional front view showing a second embodiment of the adhesive chuck device of the present invention, and the operation steps when the substrate bonding machine is provided are as shown in (a) to (d). FIG. 4 is a view showing the present invention. A partial longitudinal cross-sectional front view of the third embodiment of the present invention relates to an operation step of the substrate bonding machine as shown in (a) to (c). Fig. 5 is a partially enlarged cross-sectional view showing a modified example of a dry member. Fig. 6 is a partially enlarged cross-sectional view showing a modified example of a pointing member. Fig. 7 is a partial longitudinal cross-sectional front view showing a fourth embodiment of the adhesive chuck device of the present invention, and the operation steps provided in the substrate bonding machine are as shown in (a) to (〇). Fig. 8 is a partially enlarged longitudinal cross-sectional front view showing a fifth embodiment of the adhesive chuck device of the present invention. Fig. 9 is a partially enlarged longitudinal cross-sectional front view showing a fifth embodiment of the stick-and-loss device of the present invention. Fig. 10 is a partial longitudinal cross-sectional front view showing a sixth embodiment of the dot-and-sink apparatus of the present invention, and the operation steps in the case of being provided in the substrate bonding machine are as shown in (a) to (f). Fig. " is a partial longitudinal cross-sectional front view showing a seventh embodiment of the dry disk apparatus of the present invention, and the operation steps provided in the substrate bonding machine are as shown in (4) to (4) 105526.doc • 39 to 1376540. [Main component symbol description]

A substrate (upper substrate) A1 surface B substrate (lower substrate) B1 surface C annular adhesive S secondary side space (closed space) 1 upper holding plate (upper plate) la - holding surface lb opening 1 c clip Holding member Id cylinder 1 e passage If magazine holder 2 lower holding plate 2a holding surface 3 movable film 3a rigid body portion 3b fastening portion 3c, 3d movable film 3e snake belly 3f airtight chamber 4 adhesive member 105526.doc • 40· 1376540

4a 4b 5 5a 5b 6 6a 6b 7 7a 7b 7c 7d 8 9 Adhesive surface cemented back side primary space (air pressure chamber) 1st air pressure chamber 2nd air pressure chamber vacuum adsorption means air supply source cylinder section - First passage second passage brake spring bracket portion partition force member

105526.doc •41 ·

Claims (1)

1376540 Patent Application No. 094,134,826, the entire disclosure of the patent application, the "year" 曰 revision, the scope of the patent application: a dead-and-loss device that detachably holds the substrate on the holding plate by adhesion, and its characteristics The movable film 'the rigid body portion and the dry member are provided on the substrate side of the holding plate; and the movable film is deformable in a direction intersecting the side surface of the substrate in the opening formed in the side surface of the substrate; The rigid body portion is disposed on a part of the movable film such that a front end surface thereof faces the substrate in parallel; the adhesive member is disposed on a front end surface of the rigid body portion; and the primary side space and the secondary side space of the movable film are The reciprocating motion of the movable film caused by the pressure difference causes the front end surface of the rigid body portion and the adhesive member to be ejected from the opening of the holding plate, and the adhesive surface is brought into contact with the substrate in parallel to be adhered and held, and The two are forcibly separated and peeled off. 2. The adhesive chuck device of claim 1, wherein the substrate is opened opposite to the substrate The ventilation channel reciprocates the movable direction of the film, the substrate attracted by the suction of the ventilation duct. 105526-10I0727.doc