CN115552322B - Workpiece adhesion holding disk device and workpiece laminating machine - Google Patents
Workpiece adhesion holding disk device and workpiece laminating machine Download PDFInfo
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- CN115552322B CN115552322B CN202080100757.1A CN202080100757A CN115552322B CN 115552322 B CN115552322 B CN 115552322B CN 202080100757 A CN202080100757 A CN 202080100757A CN 115552322 B CN115552322 B CN 115552322B
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- adhering
- peeling
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- pressing
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- 238000010030 laminating Methods 0.000 title claims description 4
- 238000003825 pressing Methods 0.000 claims abstract description 98
- 239000000853 adhesive Substances 0.000 claims description 52
- 230000001070 adhesive effect Effects 0.000 claims description 52
- 239000012530 fluid Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 description 33
- 238000000926 separation method Methods 0.000 description 23
- 229920001971 elastomer Polymers 0.000 description 18
- 238000012545 processing Methods 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 239000004973 liquid crystal related substance Substances 0.000 description 5
- 238000000465 moulding Methods 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 229920003002 synthetic resin Polymers 0.000 description 3
- 239000000057 synthetic resin Substances 0.000 description 3
- 238000005422 blasting Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000000748 compression moulding Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229920001973 fluoroelastomer Polymers 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 238000012805 post-processing Methods 0.000 description 2
- 229920002943 EPDM rubber Polymers 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- 230000002776 aggregation Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- XTKDAFGWCDAMPY-UHFFFAOYSA-N azaperone Chemical compound C1=CC(F)=CC=C1C(=O)CCCN1CCN(C=2N=CC=CC=2)CC1 XTKDAFGWCDAMPY-UHFFFAOYSA-N 0.000 description 1
- 229920005549 butyl rubber Polymers 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013039 cover film Substances 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C65/00—Joining or sealing of preformed parts, e.g. welding of plastics materials; Apparatus therefor
- B29C65/78—Means for handling the parts to be joined, e.g. for making containers or hollow articles, e.g. means for handling sheets, plates, web-like materials, tubular articles, hollow articles or elements to be joined therewith; Means for discharging the joined articles from the joining apparatus
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manufacturing & Machinery (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Even a thin plate-like workpiece which is easy to deform can be smoothly peeled off from the adhesion surface of the adhesion part with relatively small flexural deformation. A workpiece adhering and holding disk device is characterized by comprising: a facing surface provided so as to be movable relative to the sheet-like workpiece (W) in a direction toward or away from the workpiece; an adhesion part provided on the opposite surface in such a manner as to be opposite to the surface of the workpiece; a plurality of peeling parts which are respectively arranged on the inner side and the outer side of the adhesion part in a mode of being capable of elastically deforming on the opposite surface; a peeling driving unit for projecting and deforming the plurality of peeling units toward the work, respectively; and a control unit for controlling the operation of the peeling driving unit, wherein the adhesion unit is formed in a ring shape or a frame shape and has an adhesion surface to which the holding surface is detachably adhered by contact with the surface of the workpiece, the peeling unit has a plurality of pressing surfaces which are deformed so as to protrude on the surface of the workpiece toward a plurality of non-adhesion portions adjacent to each other across the adhered portion held by adhesion by the adhesion surface, and the control unit controls the plurality of non-adhesion portions by: a plurality of pressing surfaces are pressed against a plurality of non-adhering portions, so that a space (S1) is formed between the adhering surface and the adhered portion, the space being widened from both end sides of the adhered portion continuous with the plurality of non-adhering portions.
Description
Technical Field
The present invention relates to a work adhering and holding tray device used in a substrate mounting device such as a substrate mounter or a substrate conveying device that conveys a sheet-like work (object to be processed), for example, a touch panel, a cover glass, a cover film, or another work such as an FPD, a sensor device such as a Liquid Crystal Display (LCD), an organic EL display (OLED), a Plasma Display (PDP), a flexible display, or a Flat Panel Display (FPD) or a sensor device, or a work such as a Liquid Crystal Module (LCM), a flexible printed circuit board (FPC), for example, a touch panel type FPD, a 3D (three-dimensional) display, an electronic book, or the like, and a work attaching machine provided with the work adhering and holding tray device.
Background
Conventionally, as such a substrate bonding machine, there is a substrate bonding apparatus including: a1 st flat plate for placing the 1 st substrate; a2 nd plate for mounting a2 nd substrate bonded to the 1 st substrate; a substrate holding plate having an adhesive rubber for fixing the 1 st substrate placed on the 1 st flat plate by adhesion; and an adhesion releasing means for inducing a force in a direction opposite to the adhesion force to detach the 1 st substrate from the adhesion rubber (for example, refer to patent document 1).
The adhesion release device is provided on the 1 st flat plate and is composed of a heating expansion part which heats and expands in the direction of the adhesion surface of the 1 st substrate to release the 1 st substrate. The heating expansion part comprises an expansion member made of ductile material, and the expansion member expands toward the adhesion surface side of the 1 st substrate adhered to the adhesive rubber.
The adhesive rubber is provided in a plurality on the outer side of the heating expansion portion in a rectangular shape having a longer radial direction or in an arc shape having a longer circumferential direction. In addition, the adhesive rubber may be formed in the center portion, and the heating expansion portion may be annularly disposed around the adhesive rubber.
Regarding the operation of the substrate bonding apparatus, first, the 1 st substrate raised in a state of being adsorbed by the vacuum holding tray is attached to the adhesive rubber provided on the 1 st flat plate. Then, the heating expansion portion is expanded in a vacuum state, whereby the 1 st substrate is detached from the adhesive rubber and bonded with the 2 nd substrate located therebelow. After the 1 st substrate and the 2 nd substrate are bonded, the 1 st chamber and the 2 nd chamber are separated and opened to the atmosphere, and the bonded 1 st substrate and 2 nd substrate are carried out.
Prior art literature
Patent literature
Patent document 1: japanese patent application laid-open No. 2010-126342
Disclosure of Invention
Technical problem to be solved by the invention
In response to demands for downsizing, thinning, weight saving, and the like, recently, substrates such as LCDs have been made thinner, and thin plate-like workpieces including thinned substrates have become extremely easy to deform.
However, in patent document 1, the adhered portion of the 1 st substrate fixed (adhered and held) by the adhesive rubber is separated (pressed and peeled) only in one direction from one end side of the adhered portion continuous to the heating expansion portion due to expansion (protruding) deformation of the heating expansion portion adjacent to the adhesive rubber. Therefore, the adhered portion is liable to incline integrally with respect to the surface (adhering surface) of the adhering rubber.
In particular, in the case where the 1 st substrate is a thin plate-like workpiece that is easily deformed, when the workpiece is peeled off by pressing from the adhesion surface, the workpiece is locally deflected by being inclined as a whole from the adhered portion adhered and held on the adhesion surface to the non-adhered portion pressed by the protruding deformation of the heating expansion portion. In addition, when an LCD is manufactured by pressing and peeling the work from the adhesion surface and then bonding (adhering) the work to the 2 nd substrate located therebelow, the deflection of the work becomes relatively large, and therefore, liquid crystal flows out from the portion having a narrow space with the 2 nd substrate, and the possibility of occurrence of vacuum bubbles or unevenness becomes high. As a result, there is a problem that the yield of the product is lowered and a high-performance product cannot be produced.
Means for solving the technical problems
In order to solve the above problems, a work adhering and holding tray device according to the present invention is a work adhering and holding tray device for peeling a sheet-like work adhering and held in a vacuum atmosphere, and opening the periphery of the work to the atmosphere, the tray device comprising: a facing surface provided so as to be movable relative to the workpiece in a direction toward and away from the workpiece; an adhesion part provided on the opposite surface in such a manner as to be opposite to the surface of the workpiece; a plurality of peeling parts provided on the opposite surfaces so as to be elastically deformable inside and outside the adhesion part, respectively; a peeling driving unit that deforms the plurality of peeling units so as to protrude toward the work, respectively; and a control unit that controls the operation of the peeling driving unit, wherein the adhesion unit is formed in a ring shape or a frame shape and has an adhesion surface that is detachably adhered and held to the surface of the workpiece by contact with the surface, the plurality of peeling units have a plurality of pressing surfaces that are deformed so as to protrude toward a plurality of non-adhesion portions adjacent to the adhered portion held by adhesion on the surface of the workpiece via adhesion surfaces, and the plurality of non-adhesion portions are pressed, and wherein a pressing surface disposed outside the adhesion surface and the adhesion surface of the plurality of pressing surfaces have a pressing passage and an adhesion passage that are formed so as to communicate an outside space with an inside space via the outside pressing surface and the adhesion surface, and the control unit controls: by pressing the plurality of pressing surfaces against the plurality of non-adhering portions, space portions that are widened from both end sides of the adhered portion continuous with the plurality of non-adhering portions are formed between the adhering surface and the adhered portion.
Drawings
Fig. 1 is an explanatory view showing a work adhering and holding tray device according to an embodiment (first embodiment) of the present invention, fig. 1 (a) is a front vertical sectional view, fig. 1 (b) is a front vertical sectional view showing a state in which a peeling portion protrudes, and fig. 1 (c) is a bottom view.
Fig. 2 is an explanatory view showing a modification (second embodiment) of the work adhering and holding tray device according to the embodiment of the present invention, fig. 2 (a) is a front vertical sectional view, fig. 2 (b) is a front vertical sectional view showing a state in which the peeled portion is protruded, and fig. 2 (c) is a bottom view.
Fig. 3 is an explanatory view showing a modification (third embodiment) of the work adhering and holding tray device according to the embodiment of the present invention, and is a bottom view of the peeled portion in a protruding state and viewed through the work.
Fig. 4 is a front view of a reduced longitudinal section of a workpiece mounter according to an embodiment of the present invention.
Detailed Description
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.
As shown in fig. 1 to 3, the work adhering and holding tray device a according to the embodiment of the present invention is a work holding device, and is configured to firmly and detachably adhere and hold and receive a work W by contacting a thin plate-shaped work W made of, for example, a substrate of a Liquid Crystal Display (LCD) or the like with an adhering portion 2 provided on a facing surface 11a of a holding plate 1, and to press and peel the work W from the adhering portion 2 by protruding deformation of a peeling portion 3 toward the work W, thereby transferring the work W.
As shown in fig. 4, the work adhering and holding tray device a is used for a work bonder B for bonding substrates to each other, a work conveying device for conveying substrates, and the like.
Specifically, the work adhering and holding tray device a according to the embodiment of the present invention includes, as main constituent elements: the opposing surface 11a of the holding plate 1 is provided so as to be movable relative to the workpiece W in a direction toward and away from the workpiece W; an adhesion part 2 provided on the opposite surface 11a so as to face the surface W1 of the workpiece W; and a plurality of peeling parts 3 provided on the opposing surface 11a so as to be elastically deformable.
Further, the present invention preferably includes: a contact/separation driving unit 4 for relatively moving one or both of the opposing surface 11a of the holding plate 1 and the workpiece W toward and away from each other; a peeling driving unit 5 for projecting and deforming the plurality of peeling units 3 toward the work W; and a control unit 6 for controlling the operations of the contact or separation driving unit 4, the peeling driving unit 5, and the like.
The opposing surface 11a of the holding plate 1 is generally disposed to face the workpiece W in the vertical direction, and the opposing direction of the opposing surface 11a and the workpiece W is hereinafter referred to as "Z direction". The direction along the opposing surface 11a or the workpiece W intersecting the Z direction is hereinafter referred to as the "XY direction".
The holding plate 1 is formed of a flat plate or the like formed of a hard material such as metal, ceramic, or hard synthetic resin.
A holding disk main body 11 is provided on either one of the front and back smooth surfaces 1a side of the holding plate 1.
The holding disk main body 11 is formed in a plate shape having a circular shape or a rectangular shape (including a rectangle and a square having a right angle) and formed of a hard material such as metal, ceramic, or hard synthetic resin, and has a facing surface 11a on either side of the front and back thereof.
As shown in fig. 1 (a), 1 (b), and the like, the holding tray main body 11 is preferably constituted by a plurality of support plates 11b that are detachably coupled to each other, and a plurality of peeling sections 3 described later are detachably attached between the plurality of support plates 11 b.
In the illustrated example, the holding plate body 11 of the holding plate 1 is assembled and the plurality of support plates 11b are coupled to each other by fastening members 1c such as screws or bolts.
The adhesive portion 2 is an adhesive sheet formed entirely or partially of an adhesive material such as a rubber-based material such as fluororubber or butyl rubber, an elastomer, a photosensitive resin, an acrylic material, or a silicon material.
The adhesion portion 2 is formed in a frame shape such as a circular shape, an elliptical shape, or the like, a square shape, or a polygonal shape along the opposing surface 11a of the holding disk main body 11.
Further, the adhesion part 2 has: an adhesion surface 2a formed on a surface side facing the surface W1 of the workpiece W in the Z direction; and a mounting surface 2b formed on the back surface side of the adhesion surface 2a. The mounting surface 2b is fixed so as not to move in the Z direction and XY direction relative to the opposing surface 11a of the holding disk main body 11.
The adhering surface 2a of the adhering portion 2 is configured to be adhered to a portion contacted with the surface W1 of the workpiece W by contacting the surface W1 with a part thereof, so as to hold the adhered portion W2 detachable.
As a specific example of the adhesion surface 2a, in the case shown in fig. 1 (a) to 1 (c) and the like, the surface is formed in a concave-convex shape by surface processing at the time of molding rubber. Thereby, the contact area of the adhesion surface 2a with respect to the surface W1 of the workpiece W is reduced to control the adhesion force, so that the pressing peeling by the plurality of peeling portions 3 described later is facilitated.
Further, although not shown in the drawings, the adhesion surface 2a may be formed in a concave-convex shape by post-processing such as blasting, laser processing, etching processing, or the like instead of the surface processing at the time of molding, or the adhesion surface 2a may be formed in a concave-convex shape or structure other than the one shown in the drawings.
The plurality of separation portions 3 are formed entirely or partially of a thin plate-like separator or an elastic plate, for example, which is made of a rubber-like material such as fluororubber or ethylene-propylene-diene (EPDM) rubber, an elastic material such as an elastomer or a soft synthetic resin, and is formed into a circular shape or a rectangular shape.
The plurality of peeling parts 3 are disposed on the facing surface 11a of the holding disk main body 11, respectively, on the inner side and the outer side of the adhesion part 2 via the adhesion part 2 in the XY direction, and have a plurality of pressing surfaces 3a formed on the surface side facing the surface W1 of the workpiece W in the Z direction.
All of the pressing surfaces 3a of the plurality of peeling parts 3 are configured to elastically protrude and deform in the Z direction in a plurality of non-adhering portions W3, W4, etc. adjacent to the adhering portion W2, which is adhered and held across the adhering surface 2a in the XY direction, on the surface W1 of the workpiece W.
Further, the first separation portion 31 on the inner side of the plurality of separation portions 3 is preferably provided substantially at the center of the facing surface 11 a. The shape of the inner first separation portion 31 is preferably circular when the holding disk body 11 is in a circular plate shape, and rectangular when the holding disk body 11 is in a rectangular plate shape. The outer second peeling portion 32 and the like of the plurality of peeling portions 3 are preferably provided in a ring shape such as a circle or an ellipse, a square shape or a frame shape such as a polygon along the outer edge of the adhering portion 2.
In addition, it is preferable that the pressing surface 32a or the like of the second peeling section 32 disposed outside other than the first peeling section 31 on the inside is provided with a pressing passage 3p for breaking vacuum so that the space S1 in which the adhesion section 2 is disposed inside the second peeling section 32 or the like on the outside communicates with the outside space S o on the outside of the second peeling section 32 or the like on the outside.
In the same manner, it is preferable that the adhesion surface 2a of the adhesion portion 2 and the like are also provided with the adhesion path 2p for breaking the vacuum so that the space S1 in which the adhesion portion 2 is disposed communicates with the inner space Si in which the first separation portion 31 is disposed further inside than the adhesion portion 2.
As a specific example of the plurality of peeling portions 3, in the case shown in fig. 1 (a) to 1 (c) and the like, for example, the peeling portions are constituted by separators or elastic plates integrally formed by compression molding (compression molding) or injection molding (injection molding) and the like.
The plurality of pressing surfaces 3a are formed to be elastically deformable inside and outside the partition plate or the elastic plate, respectively.
In the example shown in the figure, the plurality of pressing surfaces 3a are formed in uneven shapes by surface processing at the time of molding rubber. This reduces the contact area of the pressing surface 3a with respect to the surface W1 of the workpiece W, and controls the pressing surface so as not to come into close contact with the surface W1 of the workpiece W.
The attachment portion 3b is formed on the outer periphery of the partition plate and the elastic plate. The mounting portion 3b is preferably mounted and fixed so as to be sandwiched between a plurality of support plates 11b constituting the holding disk main body 11, and is not movable in the Z direction and the XY direction, and is detachable. Accordingly, the plurality of pressing surfaces 3a are supported so as to be elastically deformable in the Z direction along the opposed surface 11a of the holding disk body 11, and are arranged so as to seal a plurality of positions of the support plate 11b of the holding disk body 11, on which a part of the flow path 5b of the driving fluid 5F described later is cut, in an airtight manner.
In the illustrated example, the separator or the elastic film is divided into a first separation portion 31 on the inner side, a second separation portion 32 on the outer side, and the like, and is separately attached.
Further, although not shown in the drawings, instead of the surface processing at the time of molding, the processing may be changed to post-processing such as blasting (sand blasting), laser processing, etching processing, or the like, the plurality of pressing surfaces 3a may be formed in an uneven shape, the plurality of pressing surfaces 3a may be changed to an uneven shape or a structure other than the one shown in the drawings, or the first separation portion 31 on the inner side and the second separation portion 32 on the outer side may be integrally attached without being divided.
The contact/separation driving unit 4 is constituted by an actuator or the like for relatively moving one or both of the opposing surface 11a of the holding plate 1 and the workpiece W toward and away from each other, and is controlled by an operation control unit 6 described later.
By the control of the operation of the control unit 6 described later, the contact or separation driving unit 4 moves one or both of the opposing surface 11a of the holding plate 1 and the workpiece W relatively closer to each other, and the adhering surface 2a of the adhering unit 2 comes into contact with a part of the surface W1 of the workpiece W (adhering target portion W2) to adhere and hold the adhering target portion W2 detachable.
The peeling driving unit 5 is constituted by an actuator or the like that deforms the pressing surfaces 3a of the plurality of peeling units 3 to protrude toward the workpiece W, and is controlled in operation by a control unit 6 described later.
As an example of the actuator constituting the peeling driving section 5, the illustrated example includes: a driving source 5a such as a compressor, to which a driving fluid 5F composed of a liquid such as gas or water, such as compressed air or gas, is supplied from a supply source (not shown); and a flow path 5b leading from the supply source to the primary side of the plurality of peeling units 3 via the drive source 5 a. A part of the flow path 5b is provided so as to penetrate through a plurality of positions of the holding plate 1 and the support plate 11b of the holding disk main body 11 in the Z direction. Thereby, the driving fluid 5F is supplied from the driving source 5a to the opposing surfaces 11a of the holding disk main body 11 through the flow paths 5 b.
Further, a flow rate adjustment valve (not shown) may be provided in the middle of the flow path 5b, if necessary.
By controlling the operation of the control unit 6 described later, a predetermined amount of the driving fluid 5F is supplied to the primary sides of the plurality of peeling units 3 by the driving source 5a, the flow rate adjustment valve, or the like, and a pressure difference is generated between the primary sides and the secondary sides of the plurality of peeling units 3, so that the plurality of pressing surfaces 3a are elastically expanded and deformed in the Z direction.
Further, although not shown in the drawings, instead of the driving source 5a or the like for supplying the driving fluid 5F, the plurality of pressing surfaces 3a may be elastically deformed to protrude in the Z direction by pressing by a cylinder or the like by another driving source as an actuator constituting the peeling driving section 5.
The control unit 6 is a controller that is electrically connected not only to the contact or separation driving unit 4 or the peeling driving unit 5, but also to other components.
The controllers serving as the control unit 6 sequentially perform operation control at predetermined timings in accordance with a program preset in a control circuit (not shown).
A procedure of a control circuit set in the control unit 6 will be described as a peeling method of the work W adhered and held by the adhering surface 2a of the adhering unit 2.
In the initial state shown in fig. 1 (a) and the like, the pressing surface 3a of the plurality of peeling parts 3 is deformed to be concave more than the opposing surface 11a of the holding plate 1, and the work W held by the adhesion surface 2a of the adhesion part 2 is held in a standby state without applying a peeling force.
When peeling is performed as shown in fig. 1b, etc., all of the pressing surfaces 3a of the plurality of peeling parts 3 are deformed to protrude from the opposing surface 11a of the holding plate 1 to press against the surface W1 (the plurality of non-adhering portions W3, W4, etc.) of the workpiece W by the operation of the peeling driving part 5, and are further pressed in the same direction to forcibly peel (press-peel) the workpiece W from the adhering surface 2a of the adhering part 2.
After the work W is peeled off from the adhering surface 2a, the plurality of pressing surfaces 3a are reversely immersed and deformed to restore the surface W1 away from the work W in the Z direction to the original state.
According to the work adhering and holding tray device a of the embodiment of the present invention, the surface W1 of the work W is brought into contact with the adhering surface 2a of the adhering portion 2 by the relative approach of the thin plate-like work W and the opposing surface 11a, and the adhered portion W2 of the surface W1 is adhered and held to the adhering surface 2a.
In this adhesion holding state, the plurality of pressing surfaces 3a of the plurality of peeling parts 3 elastically protrude and deform toward the non-adhesion parts W3, W4 on the two sides adjacent to each other with the adhered part W2 interposed therebetween by the operation of the peeling driving part 5.
Therefore, the plurality of pressing surfaces 3a press the non-adhering portions W3, W4 against the non-adhering portions W3, W4, respectively, in the peeling direction (Z direction).
Thus, the adhered portion W2 is pushed and peeled from the both end sides of the adhered portion W2 continuous with the plurality of non-adhered portions W3, W4 toward the intermediate position substantially simultaneously with respect to the adhering surface 2a, and is spread apart. Therefore, a space S1 is created between the adhesion surface 2a and the adhered portion W2.
Therefore, even in the case of the thin plate-like workpiece W which is easily deformed, the surface W1 can be smoothly pressed and peeled from the adhesion surface 2a of the adhesion portion 2 with relatively small flexural deformation.
As a result, compared to the conventional technique in which the pressure release is performed in only one direction from the one end side of the adhered portion continuous with the heated expansion portion by the protruding deformation of the heated expansion portion adjacent to the adhered rubber, the pressure release of the adhered portion W2 with respect to the adhered surface 2a is substantially simultaneously performed in two directions continuous with the non-adhered portions W3, W4 adjacent to the adhered portion W2 with the adhered portion W2 interposed therebetween. Therefore, the adhered portion W2 is not inclined with respect to the entire adhering surface 2a and is pushed and peeled substantially parallel.
Next, examples and modifications (first to third embodiments) of the work attachment holding tray device a according to the embodiment of the present invention will be described.
Fig. 1 (a) to 1 (c) show a work adhering and holding tray device A1 according to a first embodiment.
Fig. 2 (a) to 2 (c) show a work adhering holding tray device A2 according to a second embodiment.
Fig. 3 shows a work adhering holding tray device A3 according to a third embodiment.
Fig. 4 shows an example of a work attaching machine B using the work adhering holding tray device a according to the embodiment of the present invention.
First embodiment
In the work adhering and holding disk device A1 according to the first embodiment, the adhering portion 2 is provided in a ring shape or a frame shape so as to surround the first peeling portion 31 on the inner side of the plurality of peeling portions 3, and the second peeling portion 32 on the outer side is provided in a ring shape or a frame shape along the outer edge of the adhering portion 2, and the second pressing surface 32a of the second peeling portion 32 is disposed adjacent to the first pressing surface 31a of the first peeling portion 31 with the adhering surface 2a of the adhering portion 2 interposed therebetween.
In the case shown in fig. 1a to 1c, two peeling parts 3 (first peeling part 31 and second peeling part 32) are arranged in double inside and outside across one adhesion part 2, and all the pressing surfaces 3a (first pressing surface 31a and second pressing surface 32 a) are deformed to protrude.
In the illustrated example, the first separation portion 31 on the inner side is disposed substantially at the center of the opposing surface 11a. The holding disk main body 11 has a circular plate shape as a whole, and the adhesive portion 2 and the outer second peeled portion 32 are formed in a ring shape.
That is, the first pressing surface 31a of the inner first peeling portion 31 is pressed against the first non-adhering portion W3 on the surface W1 of the workpiece W, which is located on the inner side of the adhered portion W2 adhered and held by the adhered surface 2a, so as to protrude in the Z direction. The second pressing surface 32a of the outer second peeling portion 32 is pressed and protruded in the Z direction toward the non-adhering portion W4 outside the adhered portion W2 in the center.
The flow path 5b from the drive source 5a of the peeling drive unit 5 to the primary side of all the peeling units 3 is a single system, and the first pressing surface 31a of the inner first peeling unit 31 and the second pressing surface 32a of the outer second peeling unit 32 are simultaneously protruded as the drive fluid 5F is supplied to the flow path 5 b.
According to the work adhering and holding disk device A1 of the first embodiment, the pressing surface 31a of the first peeling section 31 at the center and the pressing surface 32a of the second peeling section 32 at the outer side are deformed to protrude toward the center non-adhering portion W3 and the outer non-adhering portion W4 adjacent to each other with the adhered portion W2 interposed therebetween by the operation of the peeling driving section 5, and are pressed in the peeling direction (Z direction).
Thus, the adhesive surface 2a is pressed and peeled off from both end sides of the adhered portion W2 continuous with the central non-adhered portion W3 and the outer non-adhered portion W4 toward the inner and outer intermediate positions at substantially the same time, and is spread apart.
Therefore, the surface W1 of the thin plate-like workpiece W can be reliably pressed and peeled from the adhesion surface 2a of the adhesion portion 2 with slight deformation of the workpiece W.
As a result, the peeling force of the workpiece W by the first pressing surface 31a at the center and the second pressing surface 32a at the outer side is improved, and the holding pan performance is excellent.
Second embodiment
In the work adhering and holding tray device A2 according to the second embodiment, the number of the passages 5b from the drive source 5a of the peeling drive unit 5 to the primary side of all the peeling units 3 is plural, and the configuration is different from that of the first embodiment, but other configurations are the same as those of the first embodiment.
In the case shown in fig. 2 (a) to 2 (c), a second flow path 5c from the driving source 5a to the primary side of the second separation portion 32 is formed separately from the first flow path 5b from the driving source 5a to the primary side of the first separation portion 31. Thus, the driving fluid 5F is supplied from the driving source 5a to the primary side of the first separation portion 31 on the inner side through the first flow path 5b, and is also supplied to the primary side of the second separation portion 32 on the outer side through the second flow path 5c.
Therefore, by controlling the timing, amount, and the like of the supply of the driving fluid 5F to the first and second flow paths 5b, 5c, the first pressing surface 31a of the inner first separation portion 31 and the second pressing surface 32a of the outer second separation portion 32 can be simultaneously operated in a projecting manner or operated in a time-staggered manner.
Thus, subtle peeling control suitable for the thickness of the workpiece W can be realized.
Third embodiment
In the work adhering and holding disk device A3 according to the third embodiment, the first adhering portion 21 as the inner side of the adhering portion 2 is provided in a ring shape or a frame shape so as to surround the innermost first adhering portion 31 of the plurality of adhering portions 3, the second adhering portion 32 as the outer side of the adhering portion 2 is provided in a ring shape or a frame shape along the outer edge of the first adhering portion 21, the second adhering portion 22 as the outer side of the adhering portion 2 is provided in a ring shape or a frame shape so as to surround the second adhering portion 32, the third adhering portion 33 as the outer side of the second adhering portion 22 is provided in a ring shape or a frame shape along the outer edge of the second adhering portion 22, and the first pressing surface 31a of the first adhering portion 31 is arranged adjacent to the second pressing surface 32a of the second adhering portion 32 with the first adhering surface 21a interposed therebetween, and the second pressing surface 32a is arranged adjacent to the third pressing surface 33a of the third adhering portion 33 with the second adhering surface 22 interposed therebetween, the structure is different from the first embodiment.
In the case shown in fig. 3, three peeling sections 3 (first peeling section 31, second peeling section 32, and third peeling section 33) are arranged inside and outside three with two adhesion sections 2 (first adhesion section 21 and second adhesion section 22) interposed therebetween, and all pressing surfaces 3a (first pressing surface 31a, second pressing surface 32a, and third pressing surface 33 a) are deformed to protrude.
In the example shown in the drawing, the innermost first separation portion 31 is disposed substantially at the center of the opposing surface 11 a. The holding disk main body 11 has a circular plate shape as a whole, and the first and second adhesion portions 21 and 22, and the intermediate and outer second and third separation portions 32 and 33 are formed in annular shapes. The overall size of the holding disk main body 11 is set to be the same as that of the first embodiment.
That is, the non-adhering portion W6, which is located further outside than the intermediate adhered portion W5 adhered and held by the second adhering surface 22a of the outer second adhering portion 22, of the surface W1 of the workpiece W facing the third pressing surface 33a of the third peeling portion 33 located further outside than the second peeling portion 32 protrudes and is pressed in the Z direction.
According to the work adhering and holding disk device A3 of the third embodiment, the pressing surface 31a of the first peeling section 31 at the center and the pressing surfaces 32a of the second peeling section 32 at the outer side and the third pressing surface 33a of the third peeling section 33 are deformed so as to protrude toward the center non-adhering portion W3, the middle non-adhering portion W4, and the outer non-adhering portion W6 adjacent to each other with the adhered portion W2 therebetween by the operation of the peeling driving section 5, and are pressed in the peeling direction (Z direction).
Thus, the inner adhering surface 21a is pressed and peeled off from both end sides of the inner adhered portion W2 continuous with the central non-adhering portion W3 and the intermediate non-adhering portion W4 toward the inner and outer intermediate positions at substantially the same time, and is spread out. At the same time, the second outer adhesive surface 22a is pressed and peeled off from both end sides of the outer adhered portion W5 continuous with the intermediate non-adhered portion W4 and the outer non-adhered portion W6 toward the inner and outer intermediate positions at substantially the same time, and is spread apart from each other.
Therefore, the surface W1 of the sheet-like workpiece W can be reliably pressed and peeled from the first adhesion surface 21a of the first adhesion portion 21 and the second adhesion surface 22a of the second adhesion portion 22 with slight deformation of the workpiece W.
As a result, compared to the first embodiment in which the two peeling units 3 are disposed inside and outside the single adhesive unit 2, the adhesive unit 2 and the peeling units 3 are disposed in a dispersed manner without aggregation. Therefore, the adhesion force of the inner first adhesion surface 21a and the outer second adhesion surface 22a to the work W and the peeling force of the central first pressing surface 31a, the intermediate second pressing surface 32a, and the outer third pressing surface 33a to the work W are improved, and the holding pan performance is excellent.
[ Example of workpiece laminator ]
The work attaching machine B is provided with a plurality of work adhering and holding disk devices a which are respectively and dispersedly mounted at predetermined intervals on one or both of a pair of opposed holding plates 1, 1', and the work (first work) W adhered and held by the adhering portion 2 is peeled from the adhering portion 2 by a plurality of peeling portions 3 and attached to the other work (second work) W'.
In the example shown in fig. 4, the work adhering and holding disk device A1 according to the first embodiment is assembled to only one (upper) holding plate 1 in a dispersed manner, and the work (first work) W is adhered and held detachably by the adhering portion 2, and the other work (second work) W 'is held by the other (lower) holding plate 1' so as to face the first work W in parallel via the seal C. The work (first work) W is peeled from the adhering portion 2 by the plurality of peeling portions 3, and is overlapped and adhered on the other work (second work) W' via the seal C.
Further, if necessary, the suction and suction portions 12 may be provided on one or both of the pair of holding plates 1, 1' so as to face the first workpiece W or the second workpiece W ' in the Z direction, and one or both of the first workpiece W or the second workpiece W ' may be detachably sucked and sucked by the plurality of suction and suction portions 12.
In the example shown in the drawing, a plurality of suction/suction portions 12 are disposed on only the smooth surface 1a of one (upper) holding plate 1 so as to surround a plurality of work adhering and holding disk devices a, respectively.
Further, although not shown, a work adhering and holding tray device a or a suction portion may be provided on the other (lower) holding plate 1'.
In particular, in a work attaching machine such as an LCD, it is preferable that the first work W is adhered and held by the adhering portion 2 under an atmosphere which reaches an air atmosphere or a vacuum atmosphere or a predetermined vacuum degree, and the adhered and held first work W is forcibly peeled off by the plurality of peeling portions 3, and then the periphery of the first work W is opened to the air (returned to the air atmosphere).
In this case, when the first pressing surface 31a of the inner first peeling portion 31 and the second pressing surface 32a of the outer second peeling portion 32 are brought into contact with the surface W1 (the inner first non-adhering portion W3 and the outer non-adhering portion W4) of the first workpiece W, the periphery of the first workpiece W is opened from the vacuum atmosphere to the atmosphere in this state, and the space S1 where the adhering portion 2 is disposed is brought into a vacuum state. Therefore, the inner first pressing surface 31a and the outer second pressing surface 32a may not be peeled off from the surface W1 (the inner first non-adhering portion W3 and the outer non-adhering portion W4) of the first workpiece W.
Even in this case, since the outer second pressing surface 32a has the pressing passage 3p, air flows from the outer space S omicron outside the second peeling section 32 into the space S1 where the adhesion section 2 is located through the pressing passage 3p, and the vacuum between the space S1 and the workpiece W is broken. Further, by the adhesion surface 2a having the adhesion passage 2p, air flows from the space portion S1 to the inside space Si further inside than the adhesion portion 2 through the adhesion passage 2p, and the vacuum between the inside space Si and the workpiece W is broken.
This makes it possible to easily and reliably peel the work W, which has been adhered and peeled in vacuum, from the plurality of peeling sections 3 (the inner first peeling section 31 and the outer second peeling section 32) in the air atmosphere.
According to the work attaching machine B of the embodiment of the present invention, the work W (first work) adhesively held by the adhesion portions 2 of the plurality of work adhesion holding tray devices a on the opposite surface 11a of the one holding plate 1 is pressed and peeled toward the other work W 'held by the other holding plate 1' by the plurality of peeling portions 3 (the inner first peeling portion 31, the outer second peeling portion 32).
Thereby, the work W pressed and peeled from the adhesion portion 2 is attached to the other work W'.
Therefore, even the thin plate-like workpiece (first workpiece) W that is easily deformed can be smoothly pressed and peeled from the adhesion surface 2a of the adhesion portion 2 with relatively small flexural deformation, and can be bonded to the other workpiece (second workpiece) W'.
As a result, compared with the conventional technique of manufacturing an LCD by pressing and peeling only in one direction from one end side of an adhered portion continuous to the heated expansion portion by the protruding deformation of the heated expansion portion adjacent to the adhered rubber and bonding the substrate to the 2 nd substrate located therebelow, the deflection of the workpiece W is relatively small, and therefore, the difference in the interval between the two workpieces (first workpiece, second workpiece) W, W' is less likely to occur, and the liquid crystal outflow is reduced.
Thus, the possibility of vacuum bubbles or unevenness is reduced, and the yield of the product is improved to realize the production of a high-performance product.
In the above-described embodiments (first to third embodiments), the case where the entire shape of the holding disk body 11 is a circular plate has been described, but the present invention is not limited to this, and the entire shape of the holding disk body 11 may be changed to a rectangular plate.
In the third embodiment, three peeling parts 3 are arranged inside and outside three times with two adhesion parts 2 interposed therebetween in the example of the figure, but the present invention is not limited to this, and four or more peeling parts 3 may be arranged inside and outside four times or more with three or more adhesion parts 2 interposed therebetween, and the adhesion parts 2 and the peeling parts 3 may be provided in a frame shape such as a square shape or a polygon shape, or the adhesion parts 2 may be arranged in the substantially center of the facing surface 11 a. The overall size of the holding disk main body 11 may be changed so that the triple arrangement or the quadruple or more arrangement of the peeling units 3 is larger than the double arrangement of the peeling units 3.
This case also achieves the same actions and advantages as those of the first to third embodiments.
The case where the work adhering holding tray device a according to the embodiment of the present invention is used in the work mounter B has been described, but the present invention is not limited to this, and a work conveyor or the like may be used instead of the work mounter B.
Even in this case, the same actions and advantages as those of the work doubler B can be obtained.
Symbol description
A-work adhering holding tray device, B-work attaching machine, 1-one holding plate, 1 '-another holding plate, 2-adhering portion, 21-first adhering portion, 22-second adhering portion, 2 a-adhering surface, 21 a-first adhering surface, 22 a-second adhering surface, 3-peeling portion, 31-first peeling portion, 32-second peeling portion, 33-third peeling portion, 3 a-pressing surface, 31 a-first pressing surface, 32 a-second pressing surface, 33 a-third pressing surface, 5-peeling driving portion, 6-controlling portion, 11 a-opposite surface, S1-space portion, W-work (first work), W1-surface, W2-adhered portion, W3-non-adhering portion, W4-non-adhering portion, W' -another work (second plate-like work).
Claims (8)
1. A work adhering and holding disk device for peeling a thin plate-like work adhering and held in a vacuum atmosphere and opening the periphery of the work to the atmosphere, characterized by comprising:
A facing surface provided so as to be movable relative to the workpiece in a direction toward and away from the workpiece;
An adhesion part provided on the opposite surface in such a manner as to be opposite to the surface of the workpiece;
a plurality of peeling parts provided on the opposite surfaces so as to be elastically deformable inside and outside the adhesion part, respectively;
A peeling driving unit that deforms the plurality of peeling units so as to protrude toward the work, respectively; and
A control unit for controlling the operation of the peeling driving unit,
The adhesion part is formed in a ring shape or a frame shape, and has an adhesion surface for detachably adhering and holding the surface by contacting with the surface of the workpiece,
The plurality of peeling parts have a plurality of pressing surfaces which are deformed so as to protrude toward a plurality of non-adhering portions adjacent to each other on the surface of the work with the adhered portion held by the adhering surface adhered therebetween, thereby pressing the plurality of non-adhering portions,
The plurality of pressing surfaces of the plurality of peeling parts are disposed adjacently to each other with the adhesive surface of the adhesive part interposed therebetween,
The pressing surface and the adhesive surface which are arranged outside the adhesive surface of the plurality of pressing surfaces are provided with a pressing channel and an adhesive channel which are formed to enable an outside space to be communicated with an inside space through the outside pressing surface and the adhesive surface,
The control unit controls: by pressing the plurality of non-adhering portions with the plurality of pressing surfaces, space portions are formed between the adhering surface and the adhered portion, which space portions are widened from both end sides of the adhered portion continuous with the plurality of non-adhering portions,
The adhesive portion is provided in a ring shape or a frame shape so as to surround a first peeling portion on an inner side of the plurality of peeling portions, and a second peeling portion on an outer side is provided in a ring shape or a frame shape along an outer edge of the adhesive portion, and a first pressing surface of the first peeling portion and a second pressing surface of the second peeling portion are disposed adjacent to each other with the adhesive surface of the adhesive portion interposed therebetween.
2. The work adhering holding tray device according to claim 1, wherein,
The plurality of suction/suction portions are disposed only on the smooth surface of the opposing surface.
3. The work adhering holding tray device according to claim 1, wherein,
The peeling driving unit includes a plurality of system flow paths, and is configured to supply a driving fluid to the plurality of system flow paths.
4. A work adhering and holding disk device for peeling a thin plate-like work adhering and held in a vacuum atmosphere and opening the periphery of the work to the atmosphere, characterized by comprising:
A facing surface provided so as to be movable relative to the workpiece in a direction toward and away from the workpiece;
An adhesion part provided on the opposite surface in such a manner as to be opposite to the surface of the workpiece;
a plurality of peeling parts provided on the opposite surfaces so as to be elastically deformable inside and outside the adhesion part, respectively;
A peeling driving unit that deforms the plurality of peeling units so as to protrude toward the work, respectively; and
A control unit for controlling the operation of the peeling driving unit,
The adhesion part is formed in a ring shape or a frame shape, and has an adhesion surface for detachably adhering and holding the surface by contacting with the surface of the workpiece,
The plurality of peeling parts have a plurality of pressing surfaces which are deformed so as to protrude toward a plurality of non-adhering portions adjacent to each other on the surface of the work with the adhered portion held by the adhering surface adhered therebetween, thereby pressing the plurality of non-adhering portions,
The plurality of pressing surfaces of the plurality of peeling parts are disposed adjacently to each other with the adhesive surface of the adhesive part interposed therebetween,
The pressing surface and the adhesive surface which are arranged outside the adhesive surface of the plurality of pressing surfaces are provided with a pressing channel and an adhesive channel which are formed to enable an outside space to be communicated with an inside space through the outside pressing surface and the adhesive surface,
The control unit controls: by pressing the plurality of non-adhering portions with the plurality of pressing surfaces, space portions are formed between the adhering surface and the adhered portion, which space portions are widened from both end sides of the adhered portion continuous with the plurality of non-adhering portions,
The first adhesive portion on the inner side of the adhesive portion is provided in a ring shape or a frame shape so as to surround the first adhesive portion on the innermost side of the plurality of peeling portions, the second adhesive portion on the outer side of the first adhesive portion is provided in a ring shape or a frame shape along the outer edge of the first adhesive portion, the second adhesive portion on the outer side of the adhesive portion is provided in a ring shape or a frame shape so as to surround the second adhesive portion, the third adhesive portion on the outer side of the second adhesive portion is provided in a ring shape or a frame shape along the outer edge of the second adhesive portion, the first pressing surface of the first adhesive portion and the second pressing surface of the second adhesive portion are arranged adjacent to each other with the first adhesive surface of the first adhesive portion interposed therebetween, and the second pressing surface and the third pressing surface of the third adhesive portion are arranged adjacent to each other with the second adhesive surface of the second adhesive portion interposed therebetween.
5. The work adhering holding tray device according to claim 4, wherein,
The plurality of suction/suction portions are disposed only on the smooth surface of the opposing surface.
6. The work adhering holding tray device according to claim 4, wherein,
The peeling driving unit includes a plurality of system flow paths, and is configured to supply a driving fluid to the plurality of system flow paths.
7. A workpiece laminating machine, wherein a plurality of the workpiece adhering holding tray devices according to claim 1 are provided on one or both of a pair of opposed holding plates,
The work is adhered and held by the adhering portion of the work adhering and holding tray device, and the work peeled from the adhering portion is adhered and held to the other work held by the other holding plate of the pair of holding plates by the plurality of peeling portions of the work adhering and holding tray device provided to one holding plate of the pair of holding plates.
8. A workpiece laminating machine, wherein a plurality of the workpiece adhering holding tray devices according to claim 4 are provided on one or both of a pair of opposed holding plates,
The work is adhered and held by the adhering portion of the work adhering and holding tray device, and the work peeled from the adhering portion is adhered and held to the other work held by the other holding plate of the pair of holding plates by the plurality of peeling portions of the work adhering and holding tray device provided to one holding plate of the pair of holding plates.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2020/042490 WO2022102096A1 (en) | 2020-11-13 | 2020-11-13 | Workpiece adhesive chuck device and workpiece laminating machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115552322A CN115552322A (en) | 2022-12-30 |
| CN115552322B true CN115552322B (en) | 2024-05-31 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202080100757.1A Active CN115552322B (en) | 2020-11-13 | 2020-11-13 | Workpiece adhesion holding disk device and workpiece laminating machine |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP6942908B1 (en) |
| KR (1) | KR102592800B1 (en) |
| CN (1) | CN115552322B (en) |
| TW (1) | TWI766810B (en) |
| WO (1) | WO2022102096A1 (en) |
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- 2020-11-13 JP JP2021544638A patent/JP6942908B1/en active Active
- 2020-11-13 KR KR1020227033801A patent/KR102592800B1/en active IP Right Grant
- 2020-11-13 CN CN202080100757.1A patent/CN115552322B/en active Active
- 2020-11-13 WO PCT/JP2020/042490 patent/WO2022102096A1/en active Application Filing
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Also Published As
| Publication number | Publication date |
|---|---|
| JP6942908B1 (en) | 2021-09-29 |
| KR102592800B1 (en) | 2023-10-20 |
| WO2022102096A1 (en) | 2022-05-19 |
| CN115552322A (en) | 2022-12-30 |
| TW202218965A (en) | 2022-05-16 |
| KR20220139412A (en) | 2022-10-14 |
| JPWO2022102096A1 (en) | 2022-05-19 |
| TWI766810B (en) | 2022-06-01 |
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