CN104904004A - Workpiece adhesive chuck device and workpiece attachment machine - Google Patents
Workpiece adhesive chuck device and workpiece attachment machine Download PDFInfo
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- CN104904004A CN104904004A CN201380069904.3A CN201380069904A CN104904004A CN 104904004 A CN104904004 A CN 104904004A CN 201380069904 A CN201380069904 A CN 201380069904A CN 104904004 A CN104904004 A CN 104904004A
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- plate workpiece
- plate
- stripping portion
- press surface
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Abstract
The purpose of the present invention is to easily and surely separate a plate-like workpiece that has been subjected to adhesive separation in vacuum, from a separation part in atmosphere ambient air. Separation parts (2) are elastically deformed in vacuum ambient air to protrude toward a plate-like workpiece (W) held by adhesion by an adhesion part (1), so that pressing surfaces (2a) are brought into contact with a surface (W1) of the plate-like workpiece (W), whereby the plate-like workpiece (W) is separated from the adhesion part (1). Thereafter, while the pressing surfaces (2a) of the separation parts (2) remain in contact with the surface (W1) of the plate-like workpiece (W), peripheries of the plate-like workpiece (W) are made open to atmosphere, whereby air flows through flow paths (2p) from an outer space (S2) to an inner space (S1) of the separation parts (2). Consequently, vacuum break occurs between the inner space (S1) of the separation parts (2) and the plate-like workpiece (W).
Description
Technical field
The present invention adheres to chuck assembly about a kind of workpiece and possesses the workpiece make-up machine that this workpiece adheres to chuck assembly, described workpiece adheres to chuck assembly such as at liquid crystal display (LCD), OLED display (OLED), plasma display panel (PDP), in the manufacture process of the flat-panel monitors such as flexible display, be used in the plate workpiece such as synthetic resin substrate that comprises and adhere to and keep the glass substrate such as CF glass or TFT glass or comprise the plastic films such as PES (Poly-Ether-Sulphone) etc. and carry out the substrate assembling apparatus of the baseplate-laminating machine of fitting, carry the insulators such as this substrate, the base board delivery device etc. of the workpiece such as electric conductor or semiconductor crystal wafer (handled object).
Background technology
In the past, adhere to chuck assembly and workpiece make-up machine as this workpiece, had the substrate bonding apparatus comprised as lower part: the 1st chamber, possess the 1st flat board that the 1st substrate is settled; 2nd chamber, possesses from above-mentioned 1st chamber isolation settle with the 2nd substrate of above-mentioned 1st base plate bonding the 2nd dull and stereotyped; Substrate chuck, has and utilizes adhesion to make to be placed in the fixing adhesion rubber of the 1st substrate on above-mentioned 1st flat board; And adhesion decontrol, guide the power in the direction contrary with above-mentioned adhesion, depart from above-mentioned adhesion rubber to make above-mentioned 1st substrate.Above-mentioned adhesion decontrol is above-mentioned 1st dull and stereotyped and add thermal expansion to the attachment surface direction of above-mentioned 1st substrate and formed to the heating bulge making above-mentioned 1st substrate and depart from by being arranged at.Above-mentioned heating bulge comprises the swelling part of the material of the ductility of the attachment surface side expansion being included in above-mentioned 1st substrate being attached to above-mentioned adhesion rubber, and above-mentioned adhesion rubber is formed at central part, and above-mentioned heating bulge is positioned at around it with ring-type.Under vacuum conditions, by making above-mentioned heating bulge expand, above-mentioned 1st substrate is departed from from above-mentioned adhesion rubber, and be positioned at below above-mentioned 2nd base plate bonding, afterwards, isolate above-mentioned 1st chamber and above-mentioned 2nd chamber and atmosphere opening, and carry bonded above-mentioned 1st substrate and above-mentioned 2nd substrate (such as with reference to patent documentation 1).
Conventional art document
Patent documentation
Patent documentation 1: Japanese Patent Publication 2010-126342 publication (6-the 9th page, Fig. 1-8)
The summary of invention
The technical task that invention will solve
But, in the manufacture processes such as LCD, under vacuum atmosphere, if make two pieces of baseplate-laminatings be that the inclosure materials such as liquid crystal are sandwiched between it, the adhesion removing the substrate of a wherein side afterwards keeps and makes its ambient atmosphere open, then two pieces of substrate clampings enclose materials and completely bonding be because the substrate removing to adhere to the wherein side kept likely away from inclosure material from gap to gases such as inclosure material entrained airs.
Therefore, in order to address this is that a little, consider that the adhesion not removing bonded substrate under vacuum atmosphere keeps, and atmosphere opening while crimping two pieces of substrates, prevent air to be mixed into inclosure material.
But, in the substrate chuck of described patent documentation 1, if make cyclic expansion parts be close contact in the surface of the 1st substrate and crimp to the 2nd substrate under vacuum conditions, and make its ambient atmosphere open, then become vacuum state by the surrounding space of the adhesion rubber of cyclic expansion parts enclose.Therefore, there is problem fatal as follows, namely relative to the surface of the 1st substrate, cyclic expansion parts become absorption layer, though afterwards under atmospheric atmosphere cyclic expansion parts expand also cannot peel off the 1st substrate.
Its result, if make the reverse contraction distortion of cyclic expansion parts in rear operation, then causes the 1st substrate fitted on the 2nd substrate to be sling by cyclic expansion parts (absorption layer).Now, when the 1st substrate is thickness 0.3mm such as the following ultra thin substrate, there is the deadweight because producing with slinging and the 1st substrate is deformed, and the problem declined with the laminating accuracy of the 2nd substrate.
And, because the material of swelling part by ductility is formed, therefore when the pressing of the 1st substrate that the prolonged and repeated strain because of swelling part produces is peeled off, the press surface of swelling part is blended in the surface of the 1st substrate, thus when the press surface of swelling part being crimped on the 1st substrate surperficial, exist by microscopic observation to Van der Waals force (gravitation) and the surface adhesion of the 1st substrate and the problem that cannot peel off.
And, in the substrate bonding apparatus of described patent documentation 1, dull and stereotyped relative to the 1st, multiple substrate chuck and adhesion decontrol are configured to matrix shape respectively, adhere to maintenance the 1st substrate by the adhesion rubber of multiple substrate chuck simultaneously, peel off the 1st substrate by the expansion of the cyclic expansion parts in multiple adhesion decontrol simultaneously.
But, if when keeping making multiple cyclic expansion parts be close contact in the surface of the 1st substrate respectively under vacuum state, make its ambient atmosphere open, then at least become vacuum state by the surrounding space of the adhesion rubber of some cyclic expansion parts enclose in multiple adhesion decontrol, the 1st substrate cannot be peeled off respectively.Therefore, by the contraction distortion simultaneously of cyclic expansion parts, the 1st substrate causing fitting on the 2nd substrate is sling by some cyclic expansion parts (absorption layer) local, and exists and make the 1st substrate that local deformation occur, and the problem declined with the laminating accuracy of the 2nd substrate.
Problem of the present invention is for addressing this is that, and its object is under air atmosphere, easily and reliably peels off vacuum from stripping portion and is adhered to the plate workpiece etc. peeled off.
For the means of technical solution problem
For realizing this object, workpiece of the present invention adheres to chuck assembly, peel off after being adhered to the plate workpiece of maintenance under vacuum atmosphere, make the ambient atmosphere of this plate workpiece open, wherein, possess: adhesion part, this adhesion part arranges in the mode opposed with described plate workpiece and detachably adheres to and keeps this plate workpiece; And stripping portion, this stripping portion elastically deformable, and arrange in the mode of the periphery surrounding described adhesion part, be crimped on the surface of described plate workpiece along with the outstanding distortion towards described plate workpiece and force to peel off from described adhesion part, described stripping portion has press surface, this press surface to be formed at the inner space being configured with described adhesion part and the mode of surrounding the periphery of this inner space between the outer space of configuration more more outward than described stripping portion, from vacuum atmosphere until atmosphere opening time and the described surface contact of described plate workpiece; And vacuum breaking stream, this vacuum breaking stream, when the atmosphere opening of the described surface contact of this press surface and described plate workpiece, is communicated with described inner space and described outer space and air is flowed into described inner space from described outer space.
Invention effect
The workpiece of the present invention with described feature adheres in chuck assembly, the plate workpiece of maintenance is adhered to relative in adhesion part, under vacuum atmosphere, outstanding for stripping portion elasticity distortion is made press surface and plate workpiece surface contact, thus plate workpiece is stripped from adhesion part, afterwards, make the ambient atmosphere of plate workpiece open under keeping the state making the press surface of stripping portion and the surface contact of plate workpiece, thus air is flowed into, by vacuum breaking between the inner space of stripping portion and plate workpiece in space to the inside by the outer space of stream from stripping portion.
The plate workpiece peeled off is adhered to thereby, it is possible to easily and reliably peel off vacuum from stripping portion under air atmosphere.
Its result, if by atmosphere opening when making cyclic expansion parts be close contact in the 1st substrate under maintenance vacuum state, then with become vacuum state by the surrounding space of the adhesion rubber of cyclic expansion parts enclose and compared with the conventional art that cannot peel off, even if make the reverse contraction distortion of the press surface of stripping portion in rear operation, also plate workpiece can not be made to be lifted, even if plate workpiece is ultra thin substrate, also can not deform, and the strain deformation of plate workpiece does not occur and normal adhesion maintenance can be carried out and peel off.
Accompanying drawing explanation
Fig. 1 represents that the workpiece involved by embodiments of the present invention adheres to the key diagram of chuck assembly, and (a) is longitudinal section front view, and (b) is upward view.
Fig. 2 be represent workpiece make-up machine involved by embodiments of the present invention reduce longitudinal section front view.
Embodiment
Below, embodiments of the present invention are described in detail according to diagram.
Workpiece involved by embodiments of the present invention adheres to chuck assembly A as shown in Fig. 1 (a), Fig. 1 (b), under the atmosphere of vacuum degree reaching air atmosphere or vacuum atmosphere and regulation, such as detachably adhere to the plate workpiece W keeping comprising the substrate of such as LCD etc., and force to peel off after this is adhered to the plate workpiece W of maintenance under vacuum atmosphere, make the ambient atmosphere of plate workpiece W open (turning back in air atmosphere).
If be described in detail, then the workpiece adhesion chuck assembly A of embodiments of the present invention possesses following main composition important document: adhesion part 1, arranges and detachably adhere to keep this plate workpiece W in the mode opposed with plate workpiece W; Stripping portion 2, elastically deformable and arranging in the mode of the periphery surrounding adhesion part 1; And support 3, in order to install adhesion part 1 and stripping portion 2 directly or indirectly and arrange.
Adhesion part 1 is its entirety or a part are such as formed as sheet adhesion tablet with adhesion materials such as fluorubber or elastomer, butyl rubber, photoresist, propylene class or silicon classes, and is formed as the adhesive face 1a with flexible planar.
The adhesive face 1a of adhesion part 1 is configured to, and the mode opposed with plate workpiece W is installed on aftermentioned support 3, and makes towards the surperficial W1 contact of the plate workpiece W of adhesion part 1 and support 3 movement, thus plate workpiece W is detachably kept by adhesion.
In addition, in the example shown in figure, adhesive face 1a is preferably configured to, and adheres to plate workpiece W like a cork by being such as formed as concavo-convex and overall easy strain with embossing processing etc.
Stripping portion 2 is that its overall or part is formed as the flexure strips such as the barrier film of the sheets such as circular or rectangle or elastic membrane with the elastomeric material of such as rubber or the elastically deformable such as elastomer, soft synthetic resin, and has the press surface 2a of the elastically deformable of the ring-type of the periphery being formed as the adhesive face 1a surrounding adhesion part 1.
The press surface 2a of stripping portion 2 is configured to, with opposed with plate workpiece W and along near or Z-direction away from the surperficial W1 of plate workpiece W the elasticity mode of giving prominence to distortion can be installed on aftermentioned support 3, and to be given prominence to towards plate workpiece W elasticity by the pressure differential of the primary side in press surface 2a and primary side etc. and be out of shape.
Support 3 is the base plates being such as formed as the tabular of circular or rectangle etc. with the material that hard resin, metal, pottery etc. are difficult to adhere to the press surface 2a of stripping portion 2, and arranges in the mode parallel with plate workpiece W.
Opposed faces 3a opposed with plate workpiece W in support 3, adhesion part 1 is immovably installed on its central authorities along Z-direction and the XY direction that intersects therewith, and it is more outstanding a little to plate workpiece W than the press surface 2a of stripping portion 2 that adhesive face 1a is configured to.
Stripping portion 2 is to be arranged on the ring-type position of the periphery surrounding adhesion part 1 in the opposed faces 3a of support 3 along the immovable mode in XY direction, and press surface 2a is out of shape along Z-direction elasticity is outstanding towards adhering to the plate workpiece W being held in the adhesive face 1a of adhesion part 1, thus is crimped on surperficial W1 and promotes to equidirectional further.
As the concrete example making the press surface 2a of stripping portion 2 give prominence to the mechanism of distortion along Z-direction elasticity, preferably also possesses the drive division 4 for the primary side supply driving fluid F to press surface 2a, from drive division 4 to the primary side of press surface 2a supply driving fluid F, thus with the mode dilatancy making press surface 2a give prominence to towards the plate workpiece W elasticity that adhesion remains on the adhesive face 1a of adhesion part 1.
Drive division 4 has only unidirectional supply or the two-way stream 3b at the back side picking and placeing the drive sources (not shown) such as the pump of the driving fluid F of gases such as comprising compressed air or liquid and be formed at ring-type position in the opposed faces of support 3, and drive source is communicated with the primary side of press surface 2a via stream 3b.
In the work of drive division 4, driving fluid F is supplied towards the primary side of press surface 2a by stream 3b, thus make press surface 2a towards adhering to the plate workpiece W dilatancy being held in the adhesive face 1a of adhesion part 1, and be crimped on the surperficial W1 of plate workpiece W, press forcibly from the adhesive face 1a of adhesion part 1 and peel off plate workpiece W.
And, not shown as other examples, but as the mechanism making the press surface 2a of stripping portion 2 give prominence to distortion along Z-direction elasticity, replace supplying the drive division 4 of driving fluid F by cylinder body etc. and press etc., press surface 2a can be made along the outstanding distortion of Z-direction elasticity with other drive sources.
According to Fig. 1 (a), the peeling action of the plate workpiece W of stripping portion 2 is described.
Under initial condition, as shown in the single dotted broken line of Fig. 1 (a), the press surface 2a of stripping portion 2 is plane or concavity with the mode contraction distortion connected with the opposed faces 3a of support 3, not standby to the plate workpiece W effect peeling force kept by adhesive face 1a adhesion.
During stripping, as shown in the double dot dash line of Fig. 1 (a), be out of shape by the primary side of press surface 2a and the pressure official post press surface 2a of primary side are outstanding to expand along Z-direction away from the surperficial 3a of support 3 and near the mode of plate workpiece W, thus press surface 2a contacts with the surperficial W1 of plate workpiece W and carries out pressing and peel off plate workpiece W (press and peel off) forcibly from adhesive face 1a.
Further, after adhesive face 1a peels off plate workpiece W, make the press surface 2a of stripping portion 2 with along Z-direction distortion of submerging away from the reverse contraction of mode of the surperficial W1 of plate workpiece W, thus turn back to the initial condition shown in single dotted broken line of Fig. 1 (a).
And, stripping portion 2 has when the press surface 2a of described stripping portion contacts with the surperficial W1 of plate workpiece W and is crimped, and makes the vacuum breaking stream 2p that the inner space S1 of the stripping portion 2 being configured with the adhesion part 1 and outer space S2 of the side contrary with this inner space is communicated with.
Vacuum breaking stream 2p is made up of multiple gap 2b and multiple groove 2c etc., the mode that described multiple gap 2b is communicated with throughout inner space S1 and outer space S2 so that the press surface 2a Surface Machining of stripping portion 2 is become concavo-convex is formed, and described multiple groove 2c is communicated with inner space S1 and outer space S2 intermittently to be arranged along the circumferential direction centered by adhesion part 1 respectively by the press surface 2a of multiple stripping portion 2 mode between press surface 2a adjacent is in the circumferential direction formed.
In example shown in Fig. 1 (a), Fig. 1 (b), as stream 2p, the press surface 2a of stripping portion 2 is such as formed as concavo-convex by embossing processing and air blast process (sand-blast) or other Surface Machining etc., thus form multiple gap 2b, and multiple press surface 2a is intermittently set along the circumferential direction centered by adhesion part 1, thus forms the multiple groove 2c extended along the radiation direction centered by adhesion part 1.
In addition, the concaveconvex shape of press surface 2a, the shape of multiple gap 2b and their size that are produced by embossing processing and Surface Machining etc. and the degree of depth are not limited to illustrated example, and can carry out various distortion.
Further, not shown as other examples, but as stream 2p, also only can be arranged through multiple gap 2b that the concavo-convex Surface Machining in press surface 2a formed or be formed at any one in the multiple groove 2c between press surface 2a adjacent in the circumferential direction.
Workpiece according to this embodiments of the present invention adheres to chuck assembly A, in air atmosphere or vacuum atmosphere, adhered to by the adhesive face 1a of adhesion part 1 and keep plate workpiece W, afterwards, relative to adhering to the plate workpiece W kept in adhesion part 1, by stripping portion 2 elastic expansion and outstanding distortion and make press surface 2a contact with the surperficial W1 of plate workpiece W and crimp under vacuum atmosphere.
Thus, plate workpiece W is peeled off from adhesion part 1.
Keeping under the state that the press surface 2a of stripping portion 2 is contacted with the surperficial W1 of plate workpiece W afterwards, making the ambient atmosphere of plate workpiece W open.
Thus, air by stream 2p from the outer space S2 of stripping portion 2 to the inside space S 1 flow into, by vacuum breaking between the inner space S1 of stripping portion 2 and plate workpiece W.
Therefore, under air atmosphere, can easily and reliably peel off from stripping portion 2 the plate workpiece W being adhered to stripping vacuum by adhesion part 1.
Its result, in rear operation, even if make the press surface 2a of stripping portion 2 plate workpiece W also can not be made to be lifted with distortion of submerging away from the reverse contraction of mode of the surperficial W1 of plate workpiece W along Z-direction, even if plate workpiece W also can not deform for the such as such as the following ultra thin substrate of thickness 0.3mm, do not make plate workpiece W that strain deformation occurs, and normal adhesion maintenance can be carried out and peel off.
Especially, stream 2p be the mode be communicated with throughout inner space S1 and outer space S2 by the press surface 2a Surface Machining of stripping portion 2 is become concavo-convex formed multiple gap 2b time, along with the outstanding distortion of stripping portion 2, concavo-convex press surface 2a is crimped with the surperficial W1 of plate workpiece W, thus air by as stream 2p multiple gap 2b respectively from outer space S2 to the inside space S 1 flow into, by vacuum breaking between the inner space S1 of stripping portion 2 and plate workpiece W.
Therefore, as simple structure, under air atmosphere, normally plate workpiece W can be peeled off from stripping portion 2.
Its result, manufactures and safeguards that comparatively simple and cost declines.
And, stream 2p be the mode being communicated with inner space S1 and outer space S2 between press surface 2a adjacent in the circumferential direction intermittently to be arranged along circumferential direction centered by adhesion part 1 respectively by the press surface 2a of multiple stripping portion 2 formed multiple groove 2c time, can be formed darker than the press surface 2a of stripping portion 2 and as the groove 2c of stream 2p, outstanding distortion along with stripping portion 2 makes multiple press surface 2a crimp with the surperficial W1 of plate workpiece W simultaneously, thus air by the groove 2c that becomes stream 2p respectively from outer space S2 to the inside space S 1 flow into, by vacuum breaking between the inner space S1 of stripping portion 2 and plate workpiece W.
Therefore, as simple structure, and can through reliably peeling off plate workpiece W from stripping portion 2 for a long time in air atmosphere.
Its result, manufactures and safeguards that comparatively simple and cost declines, and can through carrying out stable stripping for a long time.
Namely, if by the strain of swelling part of the material that comprises ductility and the pressing through prolonged and repeated 1st substrate is peeled off, then be blended in the press surface because of swelling part the 1st substrate surface and by microscopic observation to Van der Waals force adhere to the surface of the 1st substrate and compared with not strippable conventional art, the strain of the stripping portion 2 formed through prolonged and repeated reason elastomer (ductility material) and the pressing of plate workpiece W that produces is peeled off, even if the press surface 2a of stripping portion 2 weares and teares, also can be formed darker than the press surface 2a of stripping portion 2 and become the groove 2c of stream 2p, therefore, it is possible to reduce the impact because Van der Waals force produces, can peel off and excellent in stability through long term maintenance.
On the other hand, workpiece make-up machine involved by embodiments of the present invention as shown in Figure 2, multiple described workpiece adheres to chuck assembly A either party or both of scattering device in opposite a pair holding plate 11,11 ' at regular intervals respectively, detachably adhere to multiple adhesion chuck assembly A and keep plate workpiece (the 1st plate workpiece) W, and make it peel off, thus be overlapped in another plate workpiece (the 2nd plate workpiece) W ' and fit.
As its concrete example, holding plate 11,11 ' is such as formed smoothly by flat board etc., and the holding plate 11 of a side (top) is provided with workpiece adhesion holding device A wherein, maintenance the 1st plate workpiece W is adhered to, at the holding plate 11 ' of the opposing party (below) to maintain the 2nd plate workpiece W ' via the mode of seal C and the 1st plate workpiece W parallel opposed in its adhesive attachment means 1.
In addition, as required, either party or both in a pair holding plate 11,11 ' are provided with multiple attraction adsorbing mechanism 12 in the mode of surrounding workpiece and adhering to holding device A, and either party or both that adsorbing mechanisms 12 can be attracted detachably to attract in absorption the 1st plate workpiece W or the 2nd plate workpiece W ' by these.
Embodiment 1
Then, according to illustrating various embodiments of the present invention.
This embodiment 1 is as shown in Fig. 1 (a), Fig. 1 (b), and workpiece has adhered to chuck assembly A and the driving fluid F in self-driven portion 4 since being formed as the inner circumferential position 2d of the stripping portion 2 of ring-type and position, periphery 2e is clamped and fastened on support 3 respectively by the mode sealed.
If further describe, then stripping portion 2 is the barrier film and the elastic membrane that are such as integrally formed as ring-type with compression molding (compression forming) and injection moulding (injection moulding) etc., and the flange shape inner circumferential position 2d that formed of the press surface 2a with the elastically deformable that the surperficial 3a along support 3 is formed, the mode that radially extends continuously with inner side and the outside of press surface 2a and position, periphery 2e.
In example shown in Fig. 1 (a), Fig. 1 (b), installing hole 3c is offered in the central authorities of support 3, insert installing hole 3c from surperficial 3a side along Z-direction by the base material 5 of adhesion part 1, thus the inner circumferential position 2d of stripping portion 2 is immovably gripped by clamping along Z-direction.
The base material 5 of adhesion part 1 is formed as cylindric or corner post shape, fixes adhesive part 1 at one end 5a, screws togather the fastening part 5c such as nut etc. and fixes, thus be fixed on the installing hole 3c of support 3 at the other end 5b from the behind of support 3.
Be formed with stage portion 5d, 3c1 of mutually engaging at the lateral surface of base material 5 and the inner peripheral surface of the installing hole 3c opposed with it, between stage portion 5d, 3c1, sandwich the inner circumferential position 2d of stripping portion 2 along Z-direction.
Be arranged with annular recessed portion 3d in the periphery of the surperficial 3a side of support 3, utilize the securing member such as screw and bolt 7 that ring 6 is installed on annular recessed portion 3d, thus sandwich position, the periphery 2e of stripping portion 2 along Z-direction between annular recessed portion 3d and ring 6.
Be preferably, inner circumferential position 2d and position, periphery 2e be integrally formed be clamped and fastened on support 3 time annular thickening part 2d1,2e1 for preventing position from offseting.
The surperficial 3a of support 3 is formed as convex by the stage portion 3c1 and annular recessed portion 3d of installing hole 3c, along its surface between the press surface 2a and inner circumferential position 2d and position, periphery 2e of stripping portion 2, is integrally formed a pair foot position 2f.
Further, the base material 5 of adhesion part 1, stripping portion 2, support 3 and ring 6 according to secondary installation they and be integrated, become workpiece and adhere to chuck assembly A.
Further, not shown as other examples, but do not use base material 5 and ring 6 and the inner circumferential position 2d of stripping portion 2 and position, periphery 2e can be clamped and fastened on support 3 or the shape of support 3 and stripping portion 2 is changed to the shape beyond illustrated example.
Workpiece involved by this embodiments of the invention 1 adheres to chuck assembly A, the driving fluid F being supplied to the primary side of press surface 2a by the inner circumferential position 2d of ring-type stripping portion 2 and position, periphery 2e is clamped and fastened on support 3 respectively from drive division 4 is pressed face 2a and closes, therefore the leakage of driving fluid F does not occur, and press surface 2a is towards the surperficial W1 of plate workpiece W to primary side dilatancy.
Therefore, as simple structure, and the leakage of driving fluid F can be prevented, and drive press surface 2a through long-term stability.
, there is following advantage in its result: manufactures and safeguard that comparatively simple and cost declines, and can through carrying out the stable stripping of plate workpiece W for a long time.
And, as shown in Fig. 1 (a), Fig. 1 (b), multiple gap 2b that the concavo-convex Surface Machining be arranged through in press surface 2a as stream 2p is formed and when being formed between press surface 2a adjacent in the circumferential direction multiple both groove 2c, when only having multiple gap 2b, even if not enough from the throughput of the outer space S2 of stripping portion 2 air of space S 1 to the inside, also can make air by multiple groove 2c from outer space S2 to the inside space S 1 supplement, therefore between the inner space S1 of stripping portion 2 and plate workpiece W by vacuum breaking.
Thus, tool has the following advantages: under air atmosphere, quickly and reliably peels off from stripping portion 2 the plate workpiece W being adhered to stripping vacuum by adhesion part 1.
And, as stream 2p, even if peel off because warp contacts with plate workpiece W for a long time at multiple gap 2b of press surface 2a upper surface processing and wear and tear, throw away the groove 2c remaining and be arranged at the position darker than gap 2b, therefore further can through carrying out stable stripping for a long time.
Embodiment 2
This embodiment 2 as shown in Figure 2, workpiece make-up machine is under the atmosphere of vacuum degree reaching air atmosphere or vacuum atmosphere or regulation, the adhesion part 1 adhering to work piece apparatus A at multiple workpiece of the holding plate 11 of a side disposed therein adheres to maintenance plate workpiece (the 1st plate workpiece) W simultaneously, and fit in another plate workpiece (the 2nd plate workpiece) W ' of the holding plate 11 ' remaining on the opposing party, afterwards, under vacuum atmosphere, adhere in the stripping portion 2 of chuck assembly A at multiple workpiece of the holding plate 11 of a side disposed therein, peel off by after the 1st plate workpiece W that fits and the 2nd plate workpiece W ' simultaneously, make the ambient atmosphere open (turning back to air atmosphere) of the 1st plate workpiece W and the 2nd plate workpiece W '.
In the example shown in Fig. 2, the support 3 of workpiece adhesion chuck assembly A is embedded into multiple concavity portion 11a on the surface being formed at holding plate 11, and at holding plate 11, fixation workpiece adhesion chuck assembly A is installed with the securing member such as screw and bolt 7, supply driving fluid F respectively from the air vent hole 11b dug at holding plate 11 to the stream 3b of support 3, thus the press surface 2a dilatancy of stripping portion 2 and press forcibly peel off adhesive face 1a adhere to keep the 1st plate workpiece W.
Further, not shown as other examples, but as the installing mechanism of support 3 relative to holding plate 11, firm 7, screw and bolt etc. can be replaced and use other retention mechanisms.
According to the workpiece make-up machine involved by this embodiments of the invention 2, adhere in the adhesion part 1 of multiple workpiece adhesion chuck assembly A simultaneously and maintain plate workpiece (the 1st plate workpiece) W, and after fitting in another plate workpiece (the 2nd plate workpiece) W ', under vacuum atmosphere, make multiple workpiece adhere to the stripping portion 2 outstanding distortion simultaneously of chuck assembly A and make press surface 2a be crimped on the surperficial W1 of the 1st plate workpiece W respectively, thus peel off plate workpiece W from adhesion part 1.Afterwards, keeping under the state that the press surface 2a of stripping portion 2 is contacted with the surperficial W1 of plate workpiece W, the surrounding of the 1st plate workpiece W and the 2nd plate workpiece W ' is by atmosphere opening, thus air flow into inner space S1 from outer space S2 respectively by each stream 2p, by vacuum breaking between the inner space S1 of stripping portion 2 and the 1st plate workpiece W.
Therefore, when according to when to make by plate workpiece (the 1st plate workpiece) W that fits and another plate workpiece (the 2nd plate workpiece) W ' to keep poised state, can under air atmosphere easily and reliably peel off from stripping portion 2.
Its result, when keeping making multiple cyclic expansion parts be close contact in the surface of the 1st substrate under vacuum conditions respectively, if make its ambient atmosphere open, then with at least become vacuum state by the surrounding space of the adhesion rubber of several cyclic expansion parts enclose and cannot peel off compared with the conventional art of the 1st substrate, even if make the press surface 2a of stripping portion 2 shrink and distortion of submerging in rear operation simultaneously, 1st plate workpiece W also can not locally sling, and prevents the local deformation of the 1st plate workpiece W.
Thus, tool has the following advantages: can maintain the 1st higher plate workpiece W and the laminating accuracy of the 2nd plate workpiece W ', and improves rate of finished products and productivity ratio.
In addition, in the example shown in Fig. 2, only the holding plate 11 of a side (top) arranges workpiece and adheres to chuck assembly A and attraction adsorbing mechanism 12 wherein, but be not limited thereto, also workpiece can be set at the holding plate 11 ' of the opposing party (below) and adhere to chuck assembly A or attract adsorbing mechanism 12.
Symbol description
A-workpiece adheres to chuck assembly, 1-adhesion part, 1a-adhesive face, 2-stripping portion, 2a-press surface, 2b-gap, 2c-groove, 2d-inner circumferential position, position, 2e-periphery, 2p-stream, 3-support, 4-drive division, the holding plate of a 11-wherein side, the holding plate of 11 '-the opposing party, F-driving fluid, S1-inner space, S2-outer space, W-plate workpiece (the 1st plate workpiece), W1-surface, W '-another plate workpiece (the 2nd plate workpiece).
Claims (5)
1. workpiece adheres to a chuck assembly, peels off after being adhered to the plate workpiece of maintenance under vacuum atmosphere, makes the ambient atmosphere of this plate workpiece open, it is characterized in that possessing:
Adhesion part, this adhesion part arranges in the mode opposed with described plate workpiece and detachably adheres to and keeps this plate workpiece; And
Stripping portion, this stripping portion elastically deformable, and arrange in the mode of the periphery surrounding described adhesion part, be crimped on the surface of described plate workpiece along with the outstanding distortion towards described plate workpiece and force to peel off from described adhesion part,
Described stripping portion has stream, and this stream, when the described surface contact of the press surface of described stripping portion and described plate workpiece, makes the inner space of this stripping portion being configured with described adhesion part and is communicated with the outer space of this inner space opposite side.
2. workpiece according to claim 1 adheres to chuck assembly, it is characterized in that:
Described stream is multiple gaps that the mode be communicated with throughout described inner space and described outer space so that the described press surface Surface Machining of described stripping portion is become concavo-convex is formed.
3. workpiece according to claim 1 adheres to chuck assembly, it is characterized in that:
Described stream is multiple grooves that the mode being communicated with described inner space and described outer space between described press surface adjacent in the circumferential direction intermittently to be arranged along the circumferential direction centered by described adhesion part respectively by the described press surface of multiple described stripping portion is formed.
4. the workpiece according to claim 1,2 or 3 adheres to chuck assembly, it is characterized in that:
Described workpiece adheres to chuck assembly also to be possessed: support, and this support is provided with described adhesion part and described stripping portion; And drive division, this drive division supplies driving fluid to the primary side of described press surface,
The inner circumferential position and the position, periphery that are formed as the described stripping portion of ring-type are clamped and fastened on described support respectively in the mode of being enclosed from the described driving fluid of described drive division by described press surface.
5. a workpiece make-up machine, is characterized in that: workpiece according to any one of Claims 1 to 4 adheres to any one party of chuck assembly in a pair opposite holding plate or both arrange multiple,
The described adhesion part adhering to chuck assembly at the described workpiece of the holding plate being arranged at one adheres to the described plate workpiece of maintenance simultaneously, and make it fit in remain on another plate workpiece of the holding plate of described the opposing party, under vacuum atmosphere, after the described workpiece of the holding plate being arranged at one adheres in the described stripping portion of chuck assembly and peels off by the described plate workpiece of fitting and another plate workpiece described simultaneously, make the ambient atmosphere of described plate workpiece and another plate workpiece described open.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2013/050215 WO2014109018A1 (en) | 2013-01-09 | 2013-01-09 | Workpiece adhesive chuck device and workpiece attachment machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104904004A true CN104904004A (en) | 2015-09-09 |
| CN104904004B CN104904004B (en) | 2017-05-31 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380069904.3A Active CN104904004B (en) | 2013-01-09 | 2013-01-09 | Workpiece adheres to chuck assembly and workpiece make-up machine |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5442171B1 (en) |
| KR (1) | KR101944155B1 (en) |
| CN (1) | CN104904004B (en) |
| TW (1) | TWI576954B (en) |
| WO (1) | WO2014109018A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115552322A (en) * | 2020-11-13 | 2022-12-30 | 信越工程株式会社 | Work adhesion holding disc device and work laminating machine |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101983674B1 (en) * | 2016-11-10 | 2019-05-30 | 어플라이드 머티어리얼스, 인코포레이티드 | A holding arrangement for holding a substrate, a carrier including a holding arrangement, a processing system using a carrier, and a method for releasing a substrate from the holding arrangement |
| US20220143838A1 (en) * | 2019-02-28 | 2022-05-12 | Nitto Denko Corporation | Adherent device, transfer equipment using the same, and transfer method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101379606A (en) * | 2007-01-31 | 2009-03-04 | 信越工程株式会社 | Apparatus for bonding chuck |
| JP2010126342A (en) * | 2008-12-01 | 2010-06-10 | Advanced Display Process Engineering Co Ltd | Substrate chuck and substrate fusion device having the same |
| JP4903906B1 (en) * | 2011-04-07 | 2012-03-28 | 信越エンジニアリング株式会社 | Workpiece adhesive chuck device and workpiece bonding machine |
| CN102649336A (en) * | 2011-02-28 | 2012-08-29 | 信越工程株式会社 | Working attaching chuck device and work piece laminating machine |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4796382B2 (en) * | 2005-12-08 | 2011-10-19 | 株式会社ディスコ | Chuck table of processing equipment |
| KR100953101B1 (en) | 2008-09-29 | 2010-04-19 | (주)아폴로테크 | Chuck |
| KR20110038995A (en) * | 2009-10-09 | 2011-04-15 | 엘아이지에이디피 주식회사 | Substrate chuck, substrate attaching apparatus comprising the same and substrate detaching method using the substrate attaching apparatus |
-
2013
- 2013-01-09 CN CN201380069904.3A patent/CN104904004B/en active Active
- 2013-01-09 WO PCT/JP2013/050215 patent/WO2014109018A1/en active Application Filing
- 2013-01-09 JP JP2013539835A patent/JP5442171B1/en active Active
- 2013-01-09 KR KR1020157021342A patent/KR101944155B1/en active IP Right Grant
-
2014
- 2014-01-02 TW TW103100071A patent/TWI576954B/en active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101379606A (en) * | 2007-01-31 | 2009-03-04 | 信越工程株式会社 | Apparatus for bonding chuck |
| JP2010126342A (en) * | 2008-12-01 | 2010-06-10 | Advanced Display Process Engineering Co Ltd | Substrate chuck and substrate fusion device having the same |
| CN102649336A (en) * | 2011-02-28 | 2012-08-29 | 信越工程株式会社 | Working attaching chuck device and work piece laminating machine |
| JP4903906B1 (en) * | 2011-04-07 | 2012-03-28 | 信越エンジニアリング株式会社 | Workpiece adhesive chuck device and workpiece bonding machine |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115552322A (en) * | 2020-11-13 | 2022-12-30 | 信越工程株式会社 | Work adhesion holding disc device and work laminating machine |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI576954B (en) | 2017-04-01 |
| CN104904004B (en) | 2017-05-31 |
| KR101944155B1 (en) | 2019-01-30 |
| JP5442171B1 (en) | 2014-03-12 |
| JPWO2014109018A1 (en) | 2017-01-19 |
| WO2014109018A1 (en) | 2014-07-17 |
| TW201442140A (en) | 2014-11-01 |
| KR20150104191A (en) | 2015-09-14 |
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