JPS63197335U - - Google Patents
Info
- Publication number
- JPS63197335U JPS63197335U JP8799687U JP8799687U JPS63197335U JP S63197335 U JPS63197335 U JP S63197335U JP 8799687 U JP8799687 U JP 8799687U JP 8799687 U JP8799687 U JP 8799687U JP S63197335 U JPS63197335 U JP S63197335U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- collet
- suction hole
- semiconductor pellets
- hollow part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims 1
- 239000007779 soft material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 1
Description
第１図は本考案に係る一実施例を示した断面図
である。第２図は半導体ペレツトの装着及びマウ
ントの位置関係を表す概略図、第３図はペレツト
マウント装置のアーム部の全体図、第４図はＲ形
状のコレツトの部分断面図、第５図はフラツト形
状のコレツトの部分断面図である。
１……テーブル、２……半導体ウエーハ、３…
…半導体ペレツト、４……送り搬送装置、５……
リードフレーム、６……アーム部、７……アーム
本体、８……コレツトホルダー、９……コレツト
（角錐コレツト）、９ａ……傾斜内壁、１０……
Ｒ形状のコレツト、１０ａ……凹部、１１ａ……
コレツト本体、１１ｂ……吸着体、１２……コレ
ツト、１３……胴部、１３ａ……中空部、１３ｃ
……偏平面、１４……浮動体、１４ａ……軸部、
１４ｂ……シート、１４ｃ……吸引孔、１４ｄ…
…逆止弁。
FIG. 1 is a sectional view showing an embodiment of the present invention. Fig. 2 is a schematic diagram showing the mounting of semiconductor pellets and the positional relationship of the mount, Fig. 3 is an overall view of the arm part of the pellet mount device, Fig. 4 is a partial cross-sectional view of the R-shaped collet, and Fig. 5 is a schematic diagram showing the positional relationship of the mounting and mounting. FIG. 3 is a partial cross-sectional view of a flat-shaped collet. 1...Table, 2...Semiconductor wafer, 3...
...Semiconductor pellet, 4...Feeding device, 5...
Lead frame, 6... Arm portion, 7... Arm body, 8... Collet holder, 9... Collet (pyramidal collect), 9a... Inclined inner wall, 10...
R-shaped collect, 10a... recess, 11a...
Collet main body, 11b...adsorption body, 12...collection, 13...body, 13a...hollow part, 13c
... Oblate plane, 14 ... Floating body, 14a ... Axis part,
14b... Sheet, 14c... Suction hole, 14d...
…non-return valve.
Claims (1)
ペレツトを吸着するコレツトであつて、中空部を
有し、下部に鍔部を有し、かつ、下面が半導体ペ
レツトの吸着面となる偏平面を有する硬質材から
なる胴部と、 上記胴部の中空部内に上下動可能に装入され、
下部に軸部を有し、軸部の端面に軟質材からなる
シートを有し、上記軸部ならびにシートに至る吸
引孔を有し、該吸引孔の上部に逆止弁を設けた浮
動体とを具備し、 上記浮動体が胴部の中空部内で下死点に位置す
るとき軸部が胴部から下方に突出するようにした
ことを特徴とするペレツトマウント装置のコレツ
ト。[Claims for Utility Model Registration] A collet that is attached to the tip of a collet holder to attract semiconductor pellets, which has a hollow part, a flange at the lower part, and whose lower surface is an attraction surface for semiconductor pellets. a body made of a hard material having an oblique plane; and a body inserted into the hollow part of the body so as to be movable up and down;
A floating body having a shaft at the bottom, a sheet made of a soft material on the end surface of the shaft, a suction hole extending to the shaft and the seat, and a check valve provided at the top of the suction hole. A pellet mount device collet, comprising: a shaft portion that projects downward from the body when the floating body is located at the bottom dead center within the hollow portion of the body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8799687U JPS63197335U (en) | 1987-06-05 | 1987-06-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8799687U JPS63197335U (en) | 1987-06-05 | 1987-06-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63197335U true JPS63197335U (en) | 1988-12-19 |
Family
ID=30945717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8799687U Pending JPS63197335U (en) | 1987-06-05 | 1987-06-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63197335U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006046379A1 (en) * | 2004-10-28 | 2006-05-04 | Shin-Etsu Engineering Co., Ltd. | Adhesive chuck device |
-
1987
- 1987-06-05 JP JP8799687U patent/JPS63197335U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006046379A1 (en) * | 2004-10-28 | 2006-05-04 | Shin-Etsu Engineering Co., Ltd. | Adhesive chuck device |
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