JP2010238669A - Static eliminator and method for static elimination - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a static eliminator and a method for static elimination that provide high static elimination performance and high safety. <P>SOLUTION: The static eliminator 10 includes: an ion generating unit 28 which separately generates positive ions and negative ions; an ion transport path 30, for separately transporting the positive ions and the negative ions generated by the ion generating unit 28, of which outer surface is insulated and inner surface is conductive; an ion supplying unit 40 provided at an end of the ion transport path 30 for mixing the transported positive ions and negative ions and supplying the mixture; a fan 22 for sending air to the ion generating unit 28; a chemical filter 24 for removing organic substances in the air sent to the ion generating unit 28; a dust removing filter 26 for removing dust in the air sent to the ion generating unit 28; and DC power supplies 36A, 36B that applies DC voltage having the same polarity as ions flowing through the ion transport path 30 to the inner surface of the ion transport path 30. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a static elimination device and a static elimination method, and more particularly to a static elimination device and a static elimination method for removing static electricity generated in a clean room of a semiconductor manufacturing factory.

  In manufacturing factories of semiconductors, especially manufacturing factories of semiconductor devices whose performance and integration are increasing and flat panel displays whose size is increasing, the destruction of devices due to static electricity and the adhesion of dust are problematic. In order to prevent these static electricity disturbances, a static eliminator is used that reduces the generated potential by ionizing and supplying air.

  By the way, in recent years, due to the downsizing of the manufacturing apparatus, it has become difficult to secure an installation space necessary for the static eliminator in the manufacturing apparatus. Therefore, in Patent Document 1, an ion generator is provided at a position away from the manufacturing apparatus in a clean room, and the ion generated by the ion generator is transported to a charge removal place, thereby reducing the installation space in the manufacturing apparatus. An ion transport type static eliminator that can be significantly reduced has been proposed. In this static eliminator, positive ions and negative ions are generated by an ion generator, mixed separately after being transported separately, and sprayed on a charged object as static elimination air.

JP 2000-21596 A

  However, the static elimination apparatus of patent document 1 uses the air in a clean room as static elimination air, and when the cleanliness in a manufacturing apparatus is higher than the cleanliness of a clean room, the cleanliness in a manufacturing apparatus is reduced instead. There was a problem. In addition, when corona discharge is used as an ion generation method, dust adheres to the discharge electrode and the amount of generated ions decreases, resulting in a problem that the static elimination performance is lowered. Further, in the conventional method, when corona discharge is used as an ion generation method, the insulation coating of the high-voltage electric wire is corroded by organic substances, and spark discharge occurs due to dielectric breakdown, which may become an ignition source.

  Further, in the conventional method, there is a problem that ions in the transport path decrease due to the ions coming into contact with the inner surface of the transport path.

  The present invention has been made in view of such circumstances, and an object thereof is to provide a static eliminator and a static eliminator that can obtain high static elimination performance and have high safety.

  In order to achieve the above object, the invention according to claim 1 is a static eliminator that neutralizes a static elimination object that is installed in a clean room and that is held in a manufacturing device having a higher cleanliness than in the clean room. A fan installed in the clean room for sending air in the clean room and a chemical installed in the clean room for removing organic substances in the air sent by the fan By passing both the filter, the dust removal filter installed in the clean room, the chemical filter, and the dust removal filter for removing dust in the air supplied by the fan, Positive ions and negative ions are generated separately from clean air, which is more clean than air in a clean room. An ion generating unit and a carrier that is installed in the clean room, the outer surface is insulated, the inner surface is conductive, and the positive ion and the negative ion generated by the ion generating unit are separately conveyed together with the clean air. An ion supply unit that is installed in the clean room and provided at the tip of the transport path, and mixes positive ions and negative ions transported by the transport path and supplies them into the manufacturing apparatus together with the clean air And a DC power source for applying a DC voltage having the same polarity as the ions flowing through the transfer path to the inner surface of the transfer path.

  According to the first aspect of the present invention, since the organic matter in the air is removed by the chemical filter and the air is sent to the ion generating portion, the ion generating portion (for example, the insulating film of the high voltage electric wire for corona discharge) is corroded by the organic matter. It can be suppressed.

  In the first aspect of the present invention, since dust in the air is removed by the dust removing filter and is sent to the ion generating portion, the dust adheres to the ion generating portion (for example, a discharge electrode for corona discharge). Therefore, the number of times of maintenance of the ion generation unit can be reduced.

  Furthermore, according to the first aspect of the present invention, since the chemical filter and the dust removal filter are provided, air from which organic substances and dust have been removed can be supplied. Therefore, for example, the cleanliness of the manufacturing apparatus at the supply destination can be made higher than the cleanliness around it.

  Further, according to the invention described in claim 1, since a DC voltage having the same polarity as the ions is applied to the inner surface of the transport path, a repulsive force is generated between the inner surface of the transport path and the ions, Contact with the inner surface of the conveyance path can be prevented. Thereby, the reduction | decrease of the ion in a conveyance path can be suppressed.

  The invention according to claim 2 is the invention according to claim 1, wherein the transport path is configured by a double structure including an inner duct and an outer duct, and an inner surface of the inner duct has conductivity. The outer surface of the outer duct has an insulating property. According to invention of Claim 2, since the conveyance path has the double structure of a conductive duct and an insulation duct, the reduction | decrease of ion can be reliably prevented with a conductive duct.

  The invention according to claim 3 is a static elimination method for neutralizing a static elimination object that is installed in a clean room and is held in an apparatus having a higher cleanliness than in the clean room, and is installed in the clean room. In the air supplied in the air supply step using the air supply step of supplying air in the clean room using a fan for supplying air and the chemical filter installed in the clean room An organic matter removing step for removing the organic matter, a dust removing step for removing dust in the air sent in the air feeding step using a dust removing filter installed in the clean room, and the organic matter removing step From the clean air, which is air that has been purified to be higher than the air in the clean room by passing through both of the dust removal steps, The ion generation step of generating positive ions and negative ions separately using the installed ion generation unit, and the ions installed in the clean room, the outer surface is insulated, and the inner surface is electrically conductive. A transport step of separately transporting positive ions and negative ions generated in the generation step together with the clean air, and applying a DC voltage having the same polarity as the ions transported in the transport path to the inner surface of the transport path. And using an ion supply unit installed in the clean room and provided at the tip of the transport path, the positive ions and negative ions transported by the transport path are mixed together with the clean air in the apparatus. And an ion supply step for supplying.

  According to the invention described in claim 3, since the organic matter in the air is removed by the chemical filter and the air is sent to the ion generating portion, the organic matter causes the ion generating portion (for example, the insulating coating of the high voltage electric wire for corona discharge) to corrode. It can be suppressed.

  In the third aspect of the present invention, dust in the air is removed by the dust removal filter and is sent to the ion generation unit, so that the dust adheres to the ion generation unit (for example, a discharge electrode for corona discharge). Therefore, the number of times of maintenance of the ion generation unit can be reduced.

  Furthermore, according to the invention described in claim 3, since the step of removing the organic matter and dust in the air using the chemical filter and the dust removing filter is provided, air from which the organic matter and dust have been removed can be supplied. . Therefore, for example, the cleanliness of the manufacturing apparatus at the supply destination can be made higher than the cleanliness around it.

  According to the invention of claim 3, since a DC voltage having the same polarity as the ions is applied to the inner surface of the transport path, a repulsive force is generated between the inner surface of the transport path and the ions, Contact with the inner surface of the conveyance path can be prevented. Thereby, the reduction | decrease of the ion in a conveyance path can be suppressed.

  According to the present invention, organic substances in the air are removed by the chemical filter, dust in the air is removed by the dust removal filter, and the air is sent to the ion generation unit. Therefore, corrosion due to organic substances, reduction in cleanliness by dust, etc. The occurrence of defects can be suppressed. In addition, according to the present invention, since a DC voltage having the same polarity as the ions is applied to the inner surface of the transport path, it is possible to suppress a decrease in ions in the transport path. Therefore, according to this invention, the static elimination performance and safety | security of a static elimination apparatus can be improved.

Configuration diagram schematically showing the static eliminator of the present embodiment Sectional view showing the configuration of the ion generator Sectional view of the ion transport path cut along a plane orthogonal to the longitudinal direction Sectional view of the ion transport path cut in the longitudinal direction Diagram showing the action of the static eliminator Sectional drawing which shows the ion conveyance path of a structure different from FIG. Sectional drawing which shows the ion conveyance path of a structure different from FIG.

  Hereinafter, preferred embodiments of a static eliminator and a static eliminator according to the present invention will be described with reference to the accompanying drawings.

FIG. 1 is a configuration diagram schematically showing the static eliminator of the present embodiment. The static eliminator 10 shown in the figure is a device that removes static electricity by blowing ionized air onto an object to be neutralized 14 provided inside the manufacturing apparatus 12, and is arranged inside the clean room 16 together with the manufacturing apparatus 12.

  The configuration of the clean room 16 is not particularly limited. For example, an FFU (not shown) is arranged on the ceiling surface, and clean air dedusted by the FFU is supplied into the clean room 16. The inside of the clean room 16 is cleaned by being sucked into the space under the floor. The static eliminator 10 and the manufacturing apparatus 12 are arranged inside the clean room 16.

  The manufacturing apparatus 12 is, for example, a semiconductor exposure apparatus or a drawing apparatus, and the entire apparatus is sealed in a chamber (not shown). The chamber is maintained at a higher level of cleanliness (ie, lower class) than the clean room 16, for example, the chamber is maintained in class 100 when the clean room 16 is class 1000, and is maintained in class 10 when the clean room 16 is class 100. . Thus, by making the inside of the chamber only highly clean, the cleanliness of the entire interior of the clean room 16 can be lowered, and the running cost of the clean room 16 can be reduced.

  On the other hand, the static eliminator 10 is mainly composed of an ion generator 20, an ion transport path 30, and an ion supply unit 40. The ion generator 20 is arranged away from the manufacturing apparatus 12, and ions generated by the ion generator 20 are transported to the ion supply unit 40 via the ion transport path 30, and the object 14 to be removed is transferred from the ion supply unit 40. Ionized air is blown out. Each component will be described below.

  FIG. 2 is a cross-sectional view showing the configuration of the ion generator 20. As shown in the figure, the ion generator 20 has a casing 21 that can be moved by wheels 23, and a fan 22, a chemical filter 24, a dust removal filter 26, and an ion generator 28 are placed inside the casing 21. In order. An air intake 25 is formed in the lower part of the casing 21, and air is sucked into the casing 21 from the air intake 25 by driving the fan 22. The air taken into the casing 21 passes through the chemical filter 24 and the dust removal filter 26 in this order.

  The chemical filter 24 is a filter that removes molecular pollutants such as organic substances. For example, a fiber activated carbon felt pleated or an activated carbon filter in which granular activated carbon is fixed to a nonwoven fabric is used. By passing air through the chemical filter 24, organic substances such as siloxane, DOP (phthalate ester), DBP (dibutyl phthalate), toluene and the like in the air are removed at a predetermined ratio (80 to 90%). . On the other hand, the dust removal filter 26 is a filter that removes dust in the air. For example, the same filter (usually a HEPA filter) as the filter in the FFU of the clean room 16 is used. The dust removal filter 26 removes dust in the air.

  The air from which organic substances and dust have been removed by the chemical filter 24 and the dust removal filter 26 is sent to the ion generator 28. A partition plate 29 is provided at the center position of the ion generation unit 28 so that air flows evenly to the areas on both sides of the partition plate 29.

  The ion generator 28 is a device that ionizes air by, for example, direct current corona discharge, and includes a positive ion generator 28A that positively ionizes air and a negative ion generator 28B that negatively ionizes air. The positive ion generator 28A and the negative ion generator 28B are arranged on the opposite sides with the partition plate 29 in between. Therefore, the air flowing in one area partitioned by the partition plate 29 is positively ionized by the positive ion generator 28A, and the air flowing in the other area is negatively ionized by the negative ion generator 28B. At that time, since air from which organic substances have been removed by the chemical filter 24 is supplied to the ion generation section 28, the insulating coating (not shown) of the high voltage electric wire provided in the ion generation section 28 is prevented from being corroded by the organic substances. it can. Therefore, ionization can be performed safely in the ion generator 28.

  In addition, since air from which organic substances have been removed by the dust removal filter 26 is supplied to the ion generation unit 28, it is possible to prevent dust from adhering to the discharge electrode (not shown) of the ion generation unit 28. Therefore, it is possible to prevent the ion generation amount from being reduced by the ion generation unit 28, and it is possible to maintain high static elimination performance as the dust removing device 10.

  The ion generating unit 28 is not limited to the direct current corona discharge, but uses an alternating current corona discharge or soft X-ray to remove positive ions and separate negative ions. May be.

  An ion transport path 30 is connected above the ion generator 28, and the air positively ionized by the positive ion generator 28 </ b> A and the air negatively ionized by the negative ion generator 28 </ b> B are transmitted by the ion transport path 30. It is conveyed separately. That is, the ion transport path 30 includes a positive ion transport path 30A that transports positive ions and a transport path 30B that transports negative ions.

  3 is a cross-sectional view of the ion transport path 30 cut along a plane orthogonal to the longitudinal direction, and FIG. 4 is a cross-sectional view of the ion transport path 30 cut in the longitudinal direction. As shown in these drawings, the positive ion transport path 30A is configured by a double structure including an inner duct 32A and an outer duct 34A, and positive ionized air passes through the inner duct 32A. It is supposed to be. The outer duct 34A is made of an insulating material such as vinyl chloride, and is configured to completely cover the outer surface of the inner duct 32A. The duct 32A is made of a conductive material such as aluminum, and is connected to a DC power source 36A, and a positive DC voltage is applied by the DC power source 36A. Therefore, since positive ions in the air flowing inside the duct 32A receive a repulsive force when approaching the inner surface of the duct 32A, the number of contact between the positive ions and the inner surface of the duct 32A can be reduced. Thereby, since the reduction | decrease of the positive ion during conveyance can be suppressed, more positive ions can be conveyed and the static elimination time can be shortened. The ducts 32A and 34A are preferably flexible ducts whose shapes can be arbitrarily changed.

  Similar to the positive ion transport path 30A, the negative ion transport path 30B has a double structure including an inner duct 32B and an outer duct 34B. Air inside the inner duct 32B is negatively ionized. It has come to pass. The outer duct 34B is made of an insulating material such as vinyl chloride, and is provided so as to completely cover the outer surface of the inner duct 32B. The duct 32B is made of a conductive material such as aluminum and is connected to a DC power source 36B, and a negative DC voltage is applied by the DC power source 36B. Therefore, negative ions in the air flowing inside the duct 32B receive a repulsive force when approaching the inner surface of the duct 32B, so that the number of contact between the negative ions and the inner surface of the duct 32B can be reduced. Thereby, since the reduction | decrease of the negative ion during conveyance can be suppressed, more negative ions can be conveyed and the static elimination time can be shortened. The ducts 32B and 34B are preferably flexible ducts whose shapes can be arbitrarily changed.

  Positive ionization air and negative ionization air are separately conveyed by the ion conveyance path 30 configured as described above, and are supplied to the ion supply unit 40 of FIG.

The ion supply unit 40 is provided in the manufacturing apparatus 12. Although the structure of the ion supply part 40 is not specifically limited, it is comprised so that the positive ionization air and negative ionization air which were conveyed separately may be mixed uniformly, and it blows out toward the to-be-eliminated object 14. FIG. Thereby, ionization air can be sprayed on the to-be-eliminated object 14, and it can neutralize. Since this ionized air is obtained by ionizing the air from which organic substances are removed by the chemical filter 24 of the ion generator 20 and dust is removed by the dust removing filter 26, the ionizing air is supplied to the inside of the manufacturing apparatus 12. There is no risk of reducing the cleanliness of the inside. Therefore, it is possible to remove the charge to be removed 14 while keeping the inside of the manufacturing apparatus 12 at a high cleanliness.

  Next, the operation of the static eliminator 10 configured as described above will be described.

FIG. 5 shows the results of testing using the above-described static eliminator 10. In this test, the neutralization completion time was measured by changing the applied voltage value (V) of the DC power source 36A. The test was performed at two locations, 1.5 m from the air outlet of the ion supply unit 40 and 0.3 m. In the test, the temperature and humidity were 29 ± 1 ° C., the length of the ion transport path 30A was 5 m, and the ion concentration at the entrance of the ion transport path 30A was 3.6 × 10 ⁶ ions / cm ³ . there were.

  As can be seen from FIG. 5, the static elimination time can be shortened by applying a positive DC voltage to the duct 32A of the ion transport path 30A. This is because, as described above, by applying a positive DC voltage to the duct 32A, the positive ions approaching the inner surface of the duct 32A receive a repulsive force, and the number of times of contact with the inner surface is reduced. Similar test results were obtained for the ion transport path 30B.

  As described above, according to the static eliminator 10 of the present embodiment, since the DC voltage having the same polarity as the ions is applied to the ducts 32A and 32B of the ion transport path 30, the ions contact the inner surfaces of the ducts 32A and 32B. It is possible to suppress the decrease of ions in the ion transport path 30. Therefore, since the amount of ions transported per unit time increases, it is possible to shorten the time for removing the charge to be removed 14.

  Further, according to the static eliminator 10 of the present embodiment, since the organic matter in the air is removed by the chemical filter 24 and the air is supplied to the ion generator 28, the high voltage electric wire insulation coating (not shown) of the ion generator 28 is provided. Can be prevented from being corroded by organic matter. Therefore, the ignition etc. in the ion generator 20 can be prevented reliably, and the safety of the static eliminator 10 can be improved.

  Further, according to the static eliminator 10, since dust in the air is removed by the dust removal filter 26 and is sent to the ion generator 28, it is possible to suppress the dust from adhering to the discharge electrode of the ion generator 28 and to generate ions. The maintenance frequency of the unit 28 can be reduced.

  Furthermore, according to the present embodiment, air from which organic substances and dust have been removed by the chemical filter 24 and the dust removing filter 26 is supplied to the manufacturing apparatus 12, so that the cleanliness of the manufacturing apparatus 12 can be prevented from being lowered. .

  In the above-described embodiment, the conductive ducts 32A and 32B are covered with the insulating ducts 34A and 34B as the configuration of the ion transport path 30, but the configuration of the ion transport path 30 is limited to this. It is not a thing. For example, the positive ion transport path 50A shown in FIGS. 6 and 7 includes a hose 54A made of an insulating material (for example, vinyl chloride), a conductive paint 52A applied to the inner surface of the hose 54A, and a positive electrode to the conductive paint 52A. And a direct current power source 56A for applying the direct current voltage. Similarly, the ion transport path 50B includes a hose 54B made of an insulating material, a conductive paint 52B applied to the inner surface of the hose 54B, and a DC power supply 56B that applies a negative DC voltage to the conductive paint 52B. Is done. Also in the case of the positive ion transport path 50A and the negative ion transport path 50B configured as described above, it is possible to suppress the decrease of positive ions and negative ions during transport, and to shorten the static elimination time.

  In the above-described embodiment, a control device (not shown) that controls the voltages of the DC power supplies 36A, 36B, 56A, and 56B is provided, and the applied voltage may be changed according to the transport conditions of the ion transport path 30. Transport conditions include, for example, ion concentration, temperature / humidity, transport wind speed, transport path cross-sectional area (duct diameter, etc.), transport path length, transport path inner surface material, etc. during transport. The optimum voltage value changes to prevent the decay of ions therein. Therefore, by controlling the applied voltage of the DC power supplies 36A, 36B, 56A, and 56B according to these transport conditions, it is possible to more reliably suppress the decrease in ions during transport.

  In the above-described embodiment, the surface potential of the object 14 to be discharged is measured with a surface potentiometer, or the ion balance around the object 14 to be discharged is measured with an ion balance sensor. You may make it control DC power supply 36A, 36B.

  In the above-described embodiment, the chemical filter 24 and the dust removal filter 26 are arranged in this order in the air flow direction, but the dust removal filter 26 and the chemical filter 24 may be arranged in this order.

  DESCRIPTION OF SYMBOLS 10 ... Static elimination apparatus, 12 ... Manufacturing apparatus, 14 ... Electric discharge object, 16 ... Clean room, 20 ... Ion generator, 22 ... Fan, 24 ... Chemical filter, 26 ... Dust removal filter, 28 ... Ion generation part, 30 ... Ion Conveying path, 32A, 32B, 34A, 34B ... duct, 36A, 36B ... DC power supply, 40 ... ion supply unit

Claims (3)

A static eliminator that is installed in a clean room and neutralizes static elimination objects held in a manufacturing apparatus having a higher cleanliness than in the clean room,
A fan installed in the clean room for sending air in the clean room;
A chemical filter installed in the clean room for removing organic matter in the air supplied by the fan;
A dust removal filter installed in the clean room for removing dust in the air supplied by the fan;
An ion generator that separately generates positive ions and negative ions from clean air, which is air having a higher cleanliness than air in the clean room by passing through both the chemical filter and the dust removal filter; ,
Installed in the clean room, the outer surface is insulated, the inner surface is electrically conductive, a transport path for transporting positive ions and negative ions generated by the ion generator separately with the clean air;
An ion supply unit that is installed in the clean room, provided at the tip of the transfer path, and mixes positive ions and negative ions transferred by the transfer path and supplies them into the manufacturing apparatus together with the clean air;
A DC power source for applying a DC voltage having the same polarity as the ions flowing through the transport path to the inner surface of the transport path;
A static eliminator characterized by comprising: The conveyance path is composed of a double structure including an inner duct and an outer duct,
The inner surface of the inner duct has electrical conductivity, and the outer surface of the outer duct has insulating properties.
The static eliminator according to claim 1. A static elimination method for neutralizing a static elimination object that is installed in a clean room and that is held in a device having a higher degree of cleanliness than in the clean room,
An air supply step for supplying air in the clean room using a fan for supplying air, installed in the clean room;
Using a chemical filter installed in the clean room, an organic matter removing step of removing organic matter in the air fed in the air feeding step,
Using a dust removal filter installed in the clean room, a dust removal step of removing dust in the air supplied in the air supply step;
From clean air, which is air that has become cleaner than the air in the clean room by passing through both the organic matter removing step and the dust removing step, using an ion generator installed in the clean room, An ion generation process for generating positive ions and negative ions separately;
The positive ions and negative ions generated in the ion generation step are separately transported together with the clean air using a transport path that is installed in the clean room, the outer surface is insulated, and the inner surface is conductive. A conveying step of applying a DC voltage having the same polarity as the ions conveyed in the path to the inner surface of the conveying path;
Using an ion supply unit installed in the clean room and provided at the tip of the transport path, positive ions and negative ions transported by the transport path are mixed and supplied into the apparatus together with the clean air. An ion supply process;
A static elimination method comprising:

Images